Appendix

C4

Estimation of HSP from Solvent Mixtures

Box C4-1 Abbreviations and Names of Solvents used in Appendix C4

ID

CAS

Name

ID

CAS

Name

ID

CAS

Name

AC

67-64-1

Acetone

EG

107-21-1

Ethylene
Glycol

NMP

872-50-4

N-Methyl-2Pyrrolidone

BA

100-51-6

Benzyl Alcohol

EHA

103-11-7

2-Ethyl Hexyl
Acrylate

NP

108-03-2

1-Nitropropane

CAP

105-60-2

Caprolactone
(Epsilon)

H2O

7732-18-5

Water (with
Organic
Liquids)

PC

108-32-7

Propylene
Carbonate

CHexanone

108-94-1

Cyclohexanone

HFC

13849542-8

HFC-4310mee +
38%
TRANS DCE

PGME

107-98-2

Propylene Glycol
Methyl Ether

MC

75-09-2

Methylene
Chloride

HFE

16370207-6

HFE-7100

TCE

79-01-6

Trichloroethylene
(TCE)

DMSO

67-68-5

Dimethyl
Sulfoxide

MIBK

108-10-1

Methyl
Isobutyl
Ketone

Texanol

25265-77-4

Texanol

EA

141-78-6

Ethyl Acetate

NEP

2687-91-4

1-ethyl-2Pyrrolidinone

THF

109-99-9

Tetrahydrofuran

THFA

97-99-4

Tetrahydrofurfuryl
alcohol

analysis can aid in understanding whether aws in scale-up

are related to aws in the matrix of experimental steady-state
solubility data, or in transport operations4 which control
dynamic migration/diffusion of solvents into the material
being dissolved.
HSP are thermodynamic properties. They represent and
describe equilibria. If the experimental solubility data
describing the dissolution of a soil by solvents are true
equilibrium data, and not partially complete dynamic nonequilibrium results, the solubility results and solubility
characteristics of the soil should be well described by the
analysis method below. If not, then successful scale-up may
be at risk because the solubility experiments didnt produce
equilibrium data5.

Transport operations are, by denition, non-equilibrium events. Most

commonly, they are diffusion of one solvent into and throughout a soil
or heat ow from a hot solvent into and throughout a soil.
5
This situation is analogous to experimenters measuring vapor-liquid
equilibrium data from which expensive distillation equipment will be
designed. They must know if their data represent thermodynamic
equilibrium, or some intermediate metastable state. So they use
a thermodynamic relationship known as the Gibbs-Duhem Equation as
a reference. If the experimental data are consistent with that
relationship, they are true equilibrium data, and probably useful. If not,
the data will likely be (and should be) discarded.

588

C. PHOTORESIST MATERIALS
(SOILS)
Photoresists (PR) are copolymers. Two were studied in
these testsdidentied as PR1 and PR2. PR1 is a polymethacrylate photoresist with two different ester sidegroups, an adamantane and a lactone. PR2 is a mixed
polyacrylate-polymethacrylate photoresist, also with adamantane and lactone side-groups.

D. ANALYSIS OF PR1 CLEANING

TESTS
The compositions6, cleaning solubility performance, and
analysis are shown in Table C4-1 (Box C4-1). A total of 80
tests were reported for the photoresist noted as PR1.
Note that this solvent cleaning work was done at room
temperature with only incidental agitationdtesting not
6
Twenty-two solvents were on the ingredient list for formulation of
solvent blends. Some of these solvents were also used as
single-component solvents.