Beruflich Dokumente
Kultur Dokumente
Contents
1.
1.1
1.2
12
1.3
16
2.
2.1
18
2.2
20
2.3
22
3.
3.1
Accessories
Electricals
24
3.2
Mechanics
24
3.3
25
3.4
25
PIEZOMECHANIK
Guideline:
The main pre-requisite for selecting suitable piezo components is the precise
definition of the needed operation profile by the user !
Any supplier of piezo-mechanical components will highly appreciate precise
specifications of the requested components beyond the system shall do as much
as possible.
Putting definite numbers on the needed piezo-parameters is helpful to avoid oversizing and mismatch. Poorly selected system components are ineffective and
therefore expensive.
Please try to analyze the needs for operating your mechanics successfully according to
the following:
A, what shift/stroke shall be achieved ?
B, what force variation shall be generated by the piezo action ?
C, what static preload is acting on the actuator from the beginning ?
D, what is the desired maximum operation frequency ?
E, what is the desired stroke at maximum frequency (D) ?
F, what is the desired max. frequency at maximum stroke (see A) ?
G, shortest achievable rise-/fall-time ?
H, what external masses shall be attached to the actuator ?
A, to C, allow an actuator selection for low dynamic operation according
D, to H, aims for the best match for the designated dynamic operation.
Selecting the amplifier
The above selection process results in a piezoactuator of distinct voltage range and electrical
capacitance. Only amplifiers with a matched voltage
range should be considered for use.
Do not use amplifiers providing higher voltage !
PIEZOMECHANIK
General comments
Dynamic operation:
The real operating frequency of a piezomechanical
system is usually held far below the actuators resonance frequency
Ask for special low capacitance low voltage actuators PSt150hTc
For high dynamic applications
To reduce power consumption
To reduce self-heating
Do not misinterpret catalogue data:
Not all operating specifications can be realized at
the same time due to simple physical facts.
Example:
Piezostack PSt 150/5x5/20
Unipolar operation 0 V/ +150 V: stroke 20 m e.g.
with a PIEZOMECHANIK LE 150 unipolar power
amplifier
Semi-bipolar operation -30 V/+150 V: stroke 27 m
with a PIEZOMECHANIK SVR 150 amplifier
PIEZOMECHANIK
9
3
30.5
M2, 3 mm depth
L
3
3
3
SW 6 mm
M3, 4 mm depth
Type
max. stroke
length
stiffness
mm
el.
capacitance
nF
N/m
resonance
frequency
kH z
m
13/9
27/20
19
28
170
340
25
12
40
30
Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with BNC connector
9
Options:
Coaxial cable RG 178 with LEMO connectors 00250 or 0S250
Moving end with spherical end piece VbS
UHV compatibility
3
1
R
1
30.5
PIEZOMECHANIK
VbS
10
4
M3, 4 mm depth
40.5
L
SENSOR
3
PIEZO
SW 8 mm
M3, 4 mm depth
Type
PSt
PSt
PSt
PSt
PSt
PSt
150/5/7
150/5/20
150/5/40
150/5/60
150/5/80
150/5/100
VS10
VS10
VS10
VS10
VS10
VS10
max. stroke
length
stiffness
mm
el.
capacitance
nF
N/m
resonance
frequency
kH z
m
13/9
27/20
55/40
80/60
105/80
130/100
19
28
46
64
82
100
350
800
1600
2400
3200
4000
50
25
12
8
6
5
40
30
20
15
12
10
Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors 00250
or 0S250
10
10
4
4
4
5
M3
6
VAg
SW 3 mm
40.5
VbS
1.
40.5
pF
PIEZOMECHANIK
12
5
M3, 4 mm depth
40.5
3
SW 4 mm
L
SENSOR
3
PIEZO
SW 10 mm
M4, 4 mm depth
Type
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
150/7/7
150/7/20
150/7/40
150/7/60
150/7/80
150/7/100
150/7/120
150/7/140
150/7/160
VS12
VS12
VS12
VS12
VS12
VS12
VS12
VS12
VS12
max. stroke
length
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
m
013/9
27/20
55/40
80/60
105/80
130/100
160/120
190/140
210/160
19
28
46
64
82
100
118
136
154
0.7
1.8
3.6
5.4
7.2
9
11
13
15
120
60
25
15
12
10
8
7
6
40
30
20
15
12
10
8
6
5
Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250
12
5
12
12
5
5
M4
70.5
VAg
PIEZOMECHANIK
SW 4 mm
5
1.
40.5
VbS
40.5
pF
15
6
M4, 4 mm depth
40.5
3.75
SW 5 mm
L
SENSOR
3
PIEZO
SW 13 mm
M4, 4 mm depth
Type
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
150/10/20
150/10/40
150/10/60
150/10/80
150/10/100
150/10/120
150/10/140
150/10/160
150/10/180
150/10/200
max. stroke
length
m
27/20
55/40
80/60
105/80
130/100
160/120
190/140
210/160
240/180
270/200
VS15
VS15
VS15
VS15
VS15
VS15
VS15
VS15
VS15
VS15
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
28
46
64
82
100
118
136
154
172
190
3.6
7.2
11
14
18
21
25
28
33
37
120
60
35
25
20
15
14
13
11
10
30
20
14
12
10
8
7
6
5
4
Standard configuration:
15
15
15
6
6
6
M4
70.5
VAg
SW 5 mm
R2
40.5
Vbs
40.5
pF
PIEZOMECHANIK
20
8
M5, 5 mm depth
SW 6 mm
3
40.5
L
SENSOR
5
PIEZO
SW 17 mm
M8, 7 mm depth
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
150/14/20
150/14/40
150/14/60
150/14/80
150/14/100
150/14/120
150/14/140
150/14/160
150/14/180
150/14/200
VS20
VS20
VS20
VS20
VS20
VS20
VS20
VS20
VS20
VS20
max. stroke
length
m
27/20
55/40
80/60
105/80
130/100
160/120
190/140
210/160
240/180
270/200
Standard configuration:
Tapped hole in moving end
1 m coaxial cable RG 178 with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
35
53
71
89
107
125
143
161
179
197
7
14
22
30
39
47
55
63
71
80
250
120
70
50
40
35
30
25
22
20
30
20
14
12
10
8
7
6
5
4
20
8
M5
20
8
2
40.5
VbS
10
PIEZOMECHANIK
20
SW 6 mm
Type
VAg
8
40.5
pF
25
10
M6, 6 mm depth
40.5
SW 8 mm
L
SENSOR
5
PIEZO
SW 22 mm
M8, 7 mm depth
Type
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
PSt
150/20/20
150/20/40
150/20/60
150/20/80
150/20/100
150/20/120
150/20/140
150/20/160
150/20/180
150/20/200
VS25
VS25
VS25
VS25
VS25
VS25
VS25
VS25
VS25
VS25
max. stroke
length
m
25/20
50/40
75/60
95/80
120/100
150/120
175/140
200/160
230/180
250/200
Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
37
57
77
97
117
137
157
177
197
217
11
22
33
44
55
66
77
88
100
110
500
250
160
100
80
65
55
50
45
40
28
18
13
11
9
7
6
5
4
3
Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3
PIEZOMECHANIK
PIEZOMECHANIK
11
1.2 Piezocartridges:
Low voltage actuators in casings with front mount threading
Stack actuators in cartridge-version offer elegant design features by simple attachment of an actuator to
the mechanics using a front mounting thread. Using this thread a coarse adjustment for the system is
provided. Piezocartridges can retrofit conventional lead screws. Mechanical arrangements for adjusting
purposes can be very simply upgraded by using piezocartridges.
12
PIEZOMECHANIK
PIEZOMECHANIK
tilt range
fix holder
coarse adjust by
fine pitch thread
reset spring
tilt plate
piezo
cartridge
bearing
Schematic of a mirror mount based on piezo cartridges for coarse adjust by mounting screw and ultra fine
adjustment by piezo action.
The stiffness of piezo cartridges is reduced compared to a normally mounted stack because of the force
transmission from mounting plate to moving end via stack + casing, and in addition by the quality the
screw mount. A lock nut is provided to increase attaching force.
Piezocartridges can therefore withstand high loads, but force generation is reduced due to the lower stiffness. Most applications (e.g. for adjusting purposes) use constant loading.
Standard configuration:
Options:
Stroke A/B
PIEZOMECHANIK
PIEZOMECHANIK
13
12
M8x0.5
R2
.5
SW10
8
1-1.5
FPSt 150/4/20 M8
FPSt 150/4/40 M8
FPSt 150/4/60 M8
max. stroke
length
mm
el.
capacitance
nF
27/20
55/40
80/60
22
40
58
340
700
1000
15
M10x0.75
FPSt
FPSt
FPSt
FPSt
FPSt
R2
.5
SW15
9.5
1-1.5
150/5/20
150/5/40
150/5/60
150/5/80
150/5/100
M10
M10
M10
M10
M10
max. stroke
length
mm
el.
capacitance
nF
27/20
55/40
80/60
105/80
130/100
23
41
59
77
95
800
1600
2400
3200
4000
15
14
M12x0.5
1.5
FPSt
26
14
11
M12x0.5
FPSt-BD
14
SW 12
1.5
8.5
PIEZOMECHANIK
PIEZOMECHANIK
Type
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
150/5/20
150/5/30
150/5/40
150/5/60
150/5/80
150/5/100
150/5/120
150/5/140
M12
M12
M12
M12
M12
M12
M12
M12
(BD)
(BD)
(BD)
(BD)
(BD)
(BD)
(BD)
(BD)
max. stroke
length
mm
el.
capacitance
nF
27/20
40/30
60/40
80/60
105/80
130/100
160/120
190/140
25
34
43
61
79
97
115
133
800
1200
1600
2400
3200
4000
4800
5600
SW12
20
M14x1
13
40.5
5
R1.5
SW20
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
150/7/20 M14
150/7/40 M14
150/7/60 M14
150/7/80 M14
150/7/100 M14
150/7/120 M14
150/7/140 M14
150/7/>140 M14
max. stroke
length
mm
27/20
60/40
80/60
105/80
130/100
160/120
190/140
/>140
28
46
64
82
100
118
136
on request
el.
capacitance
F
1.8
3.6
5.4
7.2
9
11
13
SW16
17
20
40.5
7
2 R2.5
M18x1 SW22
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
FPSt
150/10/20 M18
150/10/40 M18
150/10/60 M18
150/10/80 M18
150/10/100 M18
150/10/120 M18
150/10/140 M18
150/10/>140 M18
max. stroke
length
mm
27/20
55/40
80/60
105/80
130/100
160/120
190/140
>/140
28
46
64
82
100
118
136
on request
el.
capacitance
F
3.6
7.2
11
14
18
21
25
PIEZOMECHANIK
15
Type
4
M3, 4 mm depth
40.5
3
ESt
ESt
ESt
ESt
150/5/6
150/5/12
150/5/18
150/5/25
VS10
VS10
VS10
VS10
max. stroke
length
stiffness
mm
el.
capacitance
nF
m
6
12
18
25
19
28
37
46
600
1200
1800
2400
50
25
16
12
N/m
SW 8 mm
M3, 4 mm depth
VS 10
Type
M4, 4 mm depth
SW 4 mm
40.5
3
SW 10 mm
M4, 4 mm depth
VS 12
16
PIEZOMECHANIK
ESt
ESt
ESt
ESt
ESt
150/7/6
150/7/12
150/7/18
150/7/25
150/7/40
VS12
VS12
VS12
VS12
VS12
max. stroke
length
stiffness
mm
el.
capacitance
F
m
6
12
18
25
40
19
28
37
46
64
2
4.2
6.3
8.4
12.6
100
50
33
25
20
N/m
15
14
M12x0.5
1.5
FESt
FESt
FESt
FESt
FPSt
M12
M12
M12
M12
(BD)
(BD)
(BD)
(BD)
length
mm
el.
capacitance
nF
12
18
25
40
31
40
48
67
1200
1800
2400
3600
26
14
11
M12x0.5
150/5/12
150/5/18
150/5/25
150/5/40
max. stroke
SW 12
1.5
Type
8.5
FPSt-BD
PIEZOMECHANIK
17
15
9
Polymer coating
L
2
Type
HPSt
HPSt
HPSt
HPSt
150/14-10/12
150/14-10/25
150/14-10/40
150/14-10/55
max. stroke
length
mm
16/12
32/25
50/40
70/55
13.5
27
on request
on request
Ceramic
el.
capacitance
F
stiffness
N/m
resonance
frequency
kH z
2.6
5.2
250
120
75
22
Options:
15
9
8
6
M 12x0.5
9
5
7
HAg
18
PIEZOMECHANIK
HPSt 150/20-15/xx
22
14.5
Polymer coating
L
2
Ceramic
Type
HPSt
HPSt
HPSt
HPSt
150/20-15/12
150/20-15/25
150/20-15/40
150/20-15/55
max. stroke
length
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
m
16/12
32/25
50/40
70/55
13.5
27
40.5
54
5
10
15
20
450
230
150
100
75
22
15
10
Options:
25
15
12
10
M22x0.75
14
7
5
PIEZOMECHANIK
19
15
9
8
SW20
6
M12x0.5
9
4
5.50.5
M2, 4 mm depth
15
L
6
4 5
22
Type
HPSt
HPSt
HPSt
HPSt
150/14-10/12
150/14-10/25
150/14-10/40
150/14-10/55
VS22
VS22
VS22
VS22
max. stroke
length
m
16/12
32/25
50/40
70/50
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
31
44
58
71
2.6
5.2
7.8
11
250
120
70
50
30
20
14
9
Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
Coaxial cable RG 178 length 1 m with LEMO 00250 or 0S250 connector
UHV compatibility
Low temperature application
Thermostable modification
Position sensor
Optics adaptor 0A : see section 3
Adaptor rings AR: see section 3
Stroke A/B:
20
PIEZOMECHANIK
M12x0.5
25
15
SW32
12
10
14
M22x0.75
5
80.5
4xM3, 5 mm depth
26
L
6
4
M22x0.75
35
Type
HPSt
HPSt
HPSt
HPSt
150/20-15/12
150/20-15/25
150/20-15/40
150/20-15/55
VS35
VS35
VS35
VS35
max. stroke
length
stiffness
mm
el.
capacitance
F
N/m
resonance
frequency
kH z
m
16/12
32/25
50/40
70/50
31
44
58
71
5
10
15
20
450
230
150
100
30
20
17
15
Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
Coaxial cable RG 178 length 1m with LEMO 00250 or 0S250 connector
UHV compatibility
Low temperature application
Thermostable modification
Position detector
Optics adaptor 0A 1: see section 3
Adaptor rings AR: see section 3
Stroke A/B:
PIEZOMECHANIK
21
L
3
Ceramic
Type
HESt
HESt
HESt
HESt
150/15-8/2
150/15-8/4
150/15-8/6
150/15-8/12
max. stroke
length
stiffness
mm
el.
capacitance
F
m
2
4
6
12
3
6
9
18
4
8
12
22
1500
750
500
250
22
PIEZOMECHANIK
N/m
Type
max. stroke
length
mm
6
12
26
35
on request
el.
capacitance
F
stiffness
12
22
500
250
N/m
Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
UHV compatibility
Optics adaptor 0A : see section 3
Adaptor rings AR: see section 3
PIEZOMECHANIK
PIEZOMECHANIK
23
3. Accessories
3.1 Electricals
Supply coaxial cables: one side connector, other
side free for attaching piezocomponents such as
bare stacks etc.
Cable type RG 178 (PTFE), thickness 1.8 mm:
length 1.5 m
Connectors available: BNC, LEMO 0S250
Cable type RG 316 (PTFE), thickness 2.5 mm:
length 1.5 m
for power applications
Connectors available: BNC, LEMO 0S250
Extension cables:
Connector system LEMO 0S250, length 2 m/4 m/6 m
Cable types RG 178 or RG 316 (see above)
Connecting adaptors for matching different connectingsystems plug (from electronics) /Cables connector
LEMO 0S 250/BNC (this adaptor is used to match amplifi ers with LEMO output to a component, having a
BNC connector)
BNC/LEMO 0S250
BNC/LEMO 00250
3.2 Mechanics
Adaptor rings
The adaptor rings are normally used to match the diameter of actuators with casing to mirror mounts, defined for a distinct mirrors diameter. An often used combination are ring actuators (e.g. with casing VS22),
which are adopted to 2 mirror mount system. The proper adaptor ring is an AR (51/22).
thread
3x120
Designation AR X/Y X external diameter, Y internal diameter (corresponds to actuators casings diameter),
T thickness of ring (all dimensions in mm)
AR
AR
AR
AR
AR
AR
AR
AR
24
PIEZOMECHANIK
PIEZOMECHANIK
25/10
25/12
25/18
50/18
50/20
50/22
50/25
50/35
t
t
t
t
t
t
t
t
5
5
5
7
7
7
7
7
AR
AR
AR
AR
AR
AR
AR
AR
31/12
31/22
31/25
51/18
51/20
51/22
51/22
51/35
t
t
t
t
t
t
t
t
7
7
7
7
7
7
7
7
M28x0.75
M14x0.5
16
9
2,5
2,5
M28x0.75
M14x0.5
14
3
9
17
4
10
25.5
11 12
16
M12x0.5
16
M22x0.5
0A
0A 1
30
D
2
2
L
M xx
M xx
plane
Type
SE9
SE10
SE12
SE15
SE18/20
Mx (mm) D (mm)
2.3
3
3
4
5
5
6
7
8
10
L (mm)
R (mm)
3
3
4
4
4
2.5
2.5
3.5
3.5
4
spehre
25
Electronic Supplies
for Piezomechanics:
An Introduction
Technical
Data
Piezomechanik GmbH
Position
Feedback control electronics
PosiCon.an
for piezoactuators
(low voltage and high voltage actuators)
Above:
PosiCon 150/3 with actuator PSt 150/14/20 VS 20, option: position detection.
Sensor: white cable and actuator: brown cable are connected to channel I.