What is Next for MEMS

Actually, its Actuators!

Benedetto Vigna
Executive Vice President
General Manager, Analog, MEMS, Sensor Group

Sensing and Actuating

Complementary Phenomena
Feel

Move

See

Project

Hear

Make sound

Sensing and Actuating

MEMS act in both directions

Motion

Physical
change

Environmental

Audio

Sensors

Signal

Electro

MEMS
Mechanical

Micro-actuators

Mechanical

Fluidic
Micro-actuators

Piezo actuators

Electric

Micro
Mirrors

MEMS Competitive Landscape

ST offering vs Competition

ST is the only company to offer

the full range of Sensors
& Micro-actuators

Piezo actuators

Micro mirrors
Optical micro-actuators

Fluidic
Micro-actuators
Environmental
Sensors

Environmental
Sensors

MEMS
Microphone

MEMS
Microphone

MEMS
Microphone

Motion
Sensors

Motion
Sensors

Motion
Sensors

Optical
Micro-actuators

Environmental
Sensors

MEMS
Microphone

Environmental
Sensors

10 Years of MEMS Sensors and Actuators

ST Innovations

SENSING

Accelerometer

2000

2005

Gyroscope

Inertial
module

2008

2010

Pressure
sensor

2012

Microphones

2013

UV
sensor

2014

Humidity
sensor

2015

ACTUATING

Fluidic
Micro-actuators

Piezo
actuators

Micro
Mirrors

A Complete Offering
MOTION SENSORS

ACTUATORS

Accelerometer, gyroscope,
Magnetic sensor

Fluidics MEMS
Piezo actuators
Micro-Mirror

ENVIRONMENTAL
SENSORS
Pressure, UV

MICROPHONES
Analog & Digital

Sensor
Fusion
&
Sensor
Hub

Mobile & Consumer

Leading supplier of MEMS for
mobile and consumer applications
New markets
Fitness & Wearable
The Internet of Things

LOW POWER ANALOG

Standard Analog
High-end Analog

TOUCH

RF

FingerTip

Bluetooth, SubGhz, Wi-Fi

Automotive
Addressing the market for
assisted guidance, personal
safety & comfort

Motion MEMS
Continued Innovation
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Accelerometer

6-Axis & 9-Axis

Inertial modules

Gyroscope

6-Axis
eCompass

Magnetometer

Optical Image
Stabilization

>5 Billion motion MEMS shipped to date

Highlights
Renewal of product portfolio/continuing to lead innovation

iNEMO Ultra - LSM6DS3

The 6X Ultra

Launched new industry leading 6-axis sensor

Ultra
low power

Ultra
small size

Ultra
performing

Ultra
capable

Ultra
smart

Ultra
scalable

3rd generation Gyroscope for Optical Image

Stabilization <5mm2, thickness <0.75mm

This is the first time that we see a true 6X sensor in an Apple product
that doesnt require an external accelerometer. Chipworks

MEMS Microphones
Microphones

More than 500 million MEMS microphones

shipped
Market share from <2% in 2012 to 10% in 2014

Focus on High Performance Microphones

Always-on feature

Audio fidelity required by Social Media

Proliferation of analog and digital microphones

designs across the customer base in mobile
and PC

ST MEMS Microphone Market Share

12%
10%
8%
6%
4%
2%
0%
2012

2013

2014

Environmental Sensors
Pressure

More than 300 million Pressure sensors

shipped

Introduced worlds smallest pressure sensor in

tiny package (2x2x0.76mm)

Applications

Altimeter

Indoor navigation

Weather station

UV sensor

Introduced and ramped the worlds first

sensor to provide a direct digital output of
the Ultraviolet Index (UVI)

Humidity & Temperature

Combined temperature & humidity sensor

in production

Touchscreen
Winning most demanding Designs
FingerTip
Touch-screen Controller

Strong growth with touchscreen controllers

High-profile wins beating out competition in

some of the most demanding smartphones

Winning value proposition

Very good high-end analog performance

Very low power consumption

High flexibility of solution and fast time to market

FingerTip technology well positioned to address

wearable, security and active pen applications

First to deliver a touchscreen controller

for a curved smartphone display

10

New products

Product & Market Strategy

New products for traditional markets

Traditional products for traditional markets

New products for new markets

Traditional products in new markets for ST

New Markets

11

MEMS for Micro-Actuation

Micro-machined device able to
move a tiny object, either liquid
or solid, with relatively small
force and along a small
distance

The MEMS actuators use

different transduction
schemes for their operation
Electric

Mechanical

Convert an electric current into

a mechanical output
causing the displacement or
rotation of a mechanical structure

Piezo-electric

Thermal

Electro
static

Electro
magnetic

12

Building Micro-actuators
The mechanical structures of MEMS micro-actuators are built on the same principles
and using the same basis processes as MEMS sensors

Sensors
MEMS sensors have specialized analog
signal processing parts

MEMS micro-actuators have specialized

analog and power management parts

Micro-Mechanical
part

Analog signal
processing

Micro-Mechanical
part

Analog signal &

power
management

(since higher voltages required for some applications)

Micro-actuators

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What can we do
with MEMS micro-actuators?
Piezo-Electric

Electro-Static

Camera autofocus
Inkjet print head

Micro-mirrors
Touchless UI
Ultra-mobile projection

Thermal

Electro-Magnetic

Inkjet print head

Microfluidic MEMS

Micro-mirrors
Touchless UI
Ultra-mobile projection

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Micro-actuators using Piezo-electric

Camera Auto-focus

Printing

Lower power consumption and higher speed

versus Voice-Coil Motor (VCM) based solution

High-speed inkjet print head for commercial

and industrial applications

Announced commercialization of Thin-film

Piezo Partnership with innovative lens maker
PoLight for autofocus actuator in smart phones

Enables printing with high-viscosity materials

Adaptable to different printing materials

15

Optical Micro-actuators for Projection

HUD
Drivers Information

Image Projection
Extending Mobile Displays

HMD
Wearable Devices

16

Micro-mirrors for Scanning

Intel RealSense Depth Camera
MEMS
Mirror
Powers
IR Projector

(Some) Applications Examples

8 Products already on
the market

3D Scanning for 3D Printing,

Accurate Gesture Control for Immersive Gaming
Face Recognition
Object Avoidance in autonomous devices

http://www.intel.com/content/www/us/en/architecture-and-technology/realsense-overview.html

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JewelPUMP for Insulin

18

Nanopump developed by Debiotech with ST for diabetes management

Easy to use. Personalized

Source: www.jewelpump.com

So what will the next 10 years bring?

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Thank you