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W W W. I N D U S T R I A L - L A S E R S. C O M
Motion accuracy in
laser micro-sintering
Lasers counter
competition
Glass processing
Thin-flm ablation
Battery welding
Steel tube cutting
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V O L
3 0
N O. 1
JA N UA RY \
F E B R U A R Y 2 0 15
Features
technology report
14
P.
14
33
application report
technology report
technology report
PATRICK WHEELER
23
28
technology report
19
A complex 3D object
produced by selective
laser sintering.
application report
37
application report
Departments
2
W W W. I N D U S T R I A L- L A S E R S . C O M
Update
DABbling
1501ils_1 1
39 Ad Index
40 My View
1/16/15 11:47 AM
update
Whats new with 100kW fber lasers?
ILS editorial advisor Dr. Kunihiko Washio, on a lab tour at the
NADEX Laser R & D Center (Tsuruga, Japan), witnessed the
following experiment with a 100kW fber laser welding SUS
304 stainless steel at 100kW (1mm-diameter spot size):
In air with N2 shield gas
Penetration depth of 40mm at welding speed of 2 m/min.
Penetration depth of 38mm at welding speed of 3 m/min.
In vacuum (0.1Pa)
Penetration depth of 100mm at 50kW
Penetration depth of 125mm at 70kW
I contacted Keiichi Suzuki, Corporate Offcer at the Center,
who contributed the news item that follows. DAB
NADEX Co., Ltd. (Aichi Prefecture, Japan) is an enterprise that
has been doing business with the automotive industry since
the 1950s, focusing on the manufacture and sales of resistance spot welding systems. This company has been developing new joining technologies as an industry/academia government project in cooperation with the Joining and Welding
Research Institute of Osaka University and Fukui Prefectural
Government. They established NADEX Laser R&D Center in
Fukui Prefecture, where the worlds largest IPG Photonics
100kW fber laser is installed.
IPG Photonics YLS-100000 oscillator is a multimode laser
oscillator that consists of 90 modules having a 0.3mm-diameter feeding fber connected to a 0.5mm-diameter process fber,
with output energy densities of 51MW/cm2 at the fber end.
In developing the output optics, it is important to enhance
the focusing stability and the stability of the convection in a
welding keyhole melting pool generated by the laser for which
the optimum threshold needs to be determined. Gas shielding of the protection window glasses also affects the stability
of the optic materials and application technology is indispensable. Because low heat input is a feature in 100kW laser processing, the weld bead is kept in a liquid form after melting by
trialing a gas-style nozzle suitable for the shape and material
of the work piece.
NADEX has been proposing various laser processing techniques, primarily to the automotive industry, through processing
trials with this laser in collaboration with customers. NADEX is
accumulating experiments at a higher speed and with a heavier
metal plate to expand the feld of application in cooperation
1501ils_2 2
www.industrial-lasers.com
1/16/15 11:47 AM
Ultimate Performance
User Friendly
Maximized Production
Reliable In Rugged Conditions
1501ils_3 3
info@nufern.com
OPTICAL FIBERS
DEFENSE TECHNOLOGY
1/16/15 11:47 AM
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Laser Cutting. Laser Welding.
1501ils_4 4
HIGHYAG. www.highyag.com
1/16/15 11:47 AM
t e c h n o l o g y
r e p o r t
DAVID A. BELFORTE
1501ils_5 5
1/16/15 11:47 AM
t e c h n o l o g y
r e p o r t
Industrial lasers integrated into prolasers used in both deep- and extreme-UV
of CO2, solid-state, and fiber lasers, and
cessing systems, from simple marking
photolithography. In this sector, Strategies
Amada, an integrator of their own fiber
systems to complex, multi-axis remote
Unlimited reports revenues of $908 million,
and CO2 lasers for cutting, can offer
welding systems, are employed in a
a 15-percent increase over 2013, and they
their customers a choice of laser source.
wide variety of manufacturing operations
project an 18-percent increase for 2015.
Otherssuch as Bystronic, Mazak,
where laser technology allows users to
Some international market reports include
Mitsubishi, Prima Power, and Ermaksan,
improve in productivity and profitabilthis application in their reports for lasers for
to name a fewalso can offer laser cutity. These systems have gained accepindustrial materials processing.
ters powered with either laser technology
tance in key industries that were the drivIn 2014, marking continued to repreat a range of output power levels.
ing force for manufacturing recovery from
sent about 13 percent of all industrial
Our estimates for 2015 revenue growth
the depths of the 2008/2009 global receslasers sold, while Micro Materials using
are predicated on the anticipated mudsion: energy, transportation, agricultural
all types of lasers held a 23-percent
dled global economic situation. This is best
machinery, aerospace, communications,
share and Macro Materials processing
exemplified by a quote made at the close
medical devices, and fabricated
of the contentious November 2014 G-20
metal products. And these indus- Table 2. All Industrial laser material
summit in Australia by the Prime Minister
processing revenues.
tries are projected to continue to
of the UK: red warning lights are flashing
REVENUE (US$M)
2013
2014
2015
grow and expand in global marfor the world economy.
kets through the second decade
MARKING
$335.0
$347.5
$370.8
of the millennium. In short, indusMarking/engraving remain solid
y-to-y
4%
7%
trial laser technology is aligned with
The marking/engraving market, as seen in
MICRO MATERIALS
$597.0
$611.3
$631.5
growing markets. Since the recesTABLE 3, has long been the foundation for
y-to-y
2%
3%
sion, the compound annual growth
growth in the Low-power Laser category.
MACRO MATERIALS $1,554.4 $1,671.6 $1,755.6
rate (CAGR) for industrial lasers has
Tracing the history of industrial lasers from
y-to-y
8%
5%
been 12.18 percent.
1970, there have been only two significant
In 2014, industrial laser revenues
market reversals: 1993 and 2008-2009,
TOTAL
$2,486.4 $2,630.4 $2,757.9
grew by 6 percentprimarily as a
in which marking/engraving revenues
y-to-y
6%
5%
result of 14-percent growth in the
declined.
The negative revenue growth in
Sources: Strategies Unlimited
fiber laser sector, which since the
2014 for sealed-off CO2 lasers for
recession has shown a CAGR of
Table 3. Lasers used for marking/engraving. engraving operations and solid33.58 percent. The fiber laser share of the
state lasers for marking applicaREVENUE (US$M)
2013
2014
2015
total 2014 industrial laser market was 36.5
tions is not indicative of the active
CO2
$47.5
$45.9
$44.1
percent, up 8 percent from 2013, while the
market for these lasers; it only
y-to-y
-3%
-4%
rest of the market grew only 2 percent.
reflects the current selling price
Carbon dioxide (CO2) revenues mancompetition situation common in
SOLID STATE
$72.3
$70.1
$71.8
aged to grow 2 percent even though they
Asia, the largest market for these
y-to-y
-3%
2%
lost market share to high-power fiber
lasers. This commodity-like marFIBER
$201.0
$215.3
$237.4
lasers, which penetrated into the metal
ket is very much quantity-driven,
y-to-y
7%
10%
cutting sector by more than 30 percent.
as the cost of low-power fiber
DIODE
$14.2
$16.2
$17.5
And solid-state lasers, losing market
and CO2 lasers makes profit mary-to-y
14%
8%
share to low-power fiber lasers for markgins difficult to sustain. However,
TOTAL
$335.0
$347.5
$370.8
ing, dropped 3 percent; only the increased
unit sales continued to increase
revenues from high-power disk lasers and
at a modest single-digit rate in
y-to-y
4%
7%
ultrafast-pulse (UFP) lasers for microma2014 and will increase slightly
Sources: Strategies Unlimited
chining kept the losses lower. In the Other
more in 2015.
category, high-power direct-diode and
excimer lasers (growing in niche markets)
dominated with a 63-percent share
Microprocessing takes off
showed a 5-percent revenue growth.
typically due to the high selling price of
Its a given that a significant portion of the
TABLE 2 shows industrial laser revenues
the lasers used. Overall revenue growth
industrial laser market is fragmented into a
by material processing applications. ILS
of 6 percent in 2014 was supported by
multitude of niche markets. As an example,
uses categories established by our partincreased sales of high-power lasers (8
microprocessing lasers are used to manuner Strategies Unlimited, where Micro
percent) for metalworking, mostly for cutfacture metal and bioasorbable stents and
Materials includes all applications proting and welding. In both of these applifilters for medical and biological applicacessing by <1kW of laser power and Macro
cations, competition between CO2 and
tions, and they also find use in the fabricaMaterials covers applications at 1kW and
fiber lasers is intense. Some systems intetion of microfluidic components, glass PCB
higher. ILS does not report revenues for
grators such as Trumpf, a self-integrator
substrates, lab-on-a-chip, and displays for
1501ils_6 6
www.industrial-lasers.com
1/16/15 11:47 AM
0.7
0.63
0.56
0.49
Absorption (ppm)
0.42
0.35
0.28
0.21
0.14
0.07
0
0
0.25
0.5
0.75
1.25
1.5
1.75
2.25
2.5
Distance (mm)
<1ppm
Proprietary
Super
Call us today to
discuss your optics
and coating needs!
303-815-1545 atlms@idexcorp.com
advancedthinlms.com
TM
1501ils_7 7
1/16/15 11:47 AM
t e c h n o l o g y
r e p o r t
Methodology
The methodology uses a bottom-up, demand-based process for each segment
followed by a top-down approach; then, the numbers are compared to
previous forecasts.
The information, other than the forecasts, comes from both public sources and
private briefngs held with those in the industrial laser business. Information gained
from briefngs typically isnt sourced, and the author of this report ultimately remains
responsible for its content.
We gathered information from a wide variety of sources, including:
Interviews with end users, product vendors, component and module suppliers,
suppliers of subcomponents, and independent industry experts;
Press releases, sales literature, flings with the Securities and Exchange Commission
(SEC) and other government agencies, and other public information;
Statistics gathered by trade associations and research frms that follow specifc markets,
with our own interpretation as necessary; and
Information gathered from PennWell resourcesStrategies Unlimited, Laser Focus
World, the Lasers & Photonics Marketplace Seminar, and Industrial Laser Solutions.
1501ils_8 8
www.industrial-lasers.com
1/16/15 11:47 AM
No Speed Limit.
Visit us at:
Photonics West 2015, Booth #2417
San Francisco, February 10-12
www.scanlab.de
1501ils_9 9
1/16/15 11:48 AM
t e c h n o l o g y
replacing high-temperature diffusion furnaces for doping solar cells, scribing cell
surfaces, detecting defects in solar cells,
and characterizing and testing solar cell
properties. To the extent that lasers can
continue to demonstrate competitive or
superior performance quality or cost (or
both) than other established processes
and technologies, especially as newer solar
cell structures and platforms are embraced,
this leads experts to see their use continue
to grow in this sector.
And for the first time in recent years,
shipments of CO2 laser systems for via drilling decreased and in some cases halted
as the PC board industry slowed in 2014.
New technology boosts
microprocessing
r e p o r t
2013
2014
2015
$183.9
$184.0
$176.8
0%
-4%
$144.9
$164.2
14%
13%
y-to-y
FIBER
$127.2
Control Systems
Advanced control capabilities for
coordinated motion
Innovative features for
minimizing dynamic tracking
errors
Velocity profiling maintains a
constant vector velocity over
complex profiles for total material
distributing control
Powerful, user-friendly
controllers and drives to enhance
your complete process
Mechanical Systems
3D motion down to nanometerlevel performance
Aerotech motion products are currently used in a
variety of additive manufacturing applications.
A 3D printed structure
produced using an
Aerotech motion system.
Photo provided by
Professor Jennifer A. Lewis,
Harvard University
Dedicated to the
Science of Motion
Ph: 412-963-7470
Email: sales@aerotech.com
www.aerotech.com
AH1114A-PMG
10
1501ils_10 10
www.industrial-lasers.com
1/16/15 11:48 AM
For more information about Synrads new Pulstar line of CO2 lasers and the p250, visit www.synrad.com/pulstar today!
Synrad, Inc., 4600 Campus Place, Mukilteo, WA 98275, USA Ph: 1.800.SYNRAD1 Ph: 1.425.349.3500 Fax: 1.425.349.3667 synrad@synrad.com
1501ils_11 11
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t e c h n o l o g y
2013
METAL CUTTING
$1,170.5
y-to-y
METAL WELDING
$334.2
y-to-y
OTHER
$49.7
y-to-y
TOTAL
$1,554.4
y-to-y
12
1501ils_12 12
r e p o r t
2014
2015
$696.1
$714.2
$699.9
3%
-2%
$599.5
$683.4
17%
14%
$189.5
$181.9
-5%
-4%
$168.4
$190.3
15%
13%
y-to-y
FIBER
$512.4
y-to-y
SOLID STATE
$199.5
y-to-y
DIRECT DIODE/OTHER
$146.5
y-to-y
TOTAL
war won?
8%
5%
2013
www.industrial-lasers.com
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t e c h n o l o g y
r e p o r t
2015. Many industrial laser product suppliers are taking a wait-and-see attitude,
seeking shelter behind terms like modest and spotty when they report to investors, analysts, and journalists. ILSs survey
of dozens of suppliers of industrial lasers,
laser systems, and related products produced a consensus that 2015 will likely
be a repeat of 2014, with overall revenue
growth of 5 percent. Behind this number
are anticipated declines in high-power CO2
lasers for sheet metal cutting and continuing declines in high-power solid-state laser
usage, for example, in the aborted application of cutting sapphire cover plates for
smartphones.
On the other hand, there are other revenue contributions that continue to add
to overall market revenue growth. Fiber
lasers are expected to attain double-digit
growth at 13 percent and high-power diode
lasers for applications in the auto industry
will gain over 2014 numbers.
In an aside, fiber, high-power diode, and
excimer laser sales together will surpass,
Small is
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1501ils_13 13
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t e c h n o l o g y
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PATRICK WHEELER
14
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FIGURE 1. A
complex 3D
object produced
by selective laser
sintering.
We will start from the bottom up, beginning with the machinebase assembly. The first consideration is to design a machine
base that is adequately stiff, heavy, and capable of rejecting
ground disturbances that can cause small oscillations at the
work point (FIGURE 2).
Considerations include proper leveling feet, a stiff metal
structure, and a proper type of isolation system between
the machine base and the base plate. For some precision
applications, it may be necessary to characterize the ground
vibrations for the location at which the machine will ultimately
reside. Knowing this gives a machine designer insight into
which frequencies of oscillation their machine must ultimately
reject. This, however, is not often required, although sometimes machine builders give recommendations for ideal ground
floor characteristics. Most often, machine builders will design
a system for the most common situation. Isolation systems
www.industrial-lasers.com
1/16/15 11:48 AM
- sintering applications
vary in complexity, from simple passive dampening material, passive air isolation, active air isolation, or isolation through some custom system employing another fluid. Whatever the choice may be,
the consideration here is the rejection of unwanted frequencies.
System mechanics
Once a preliminary base design is completed, the next design decision is the type of mechanics for the actual motion system. For this
example, imagine a 300 300 150mm XYZ motion envelope over
a powder bed with a special powder addition and leveling system
below. The work envelope requires three dimensions of motion
and must span the powder bed. The system design will consist of
linear stages in all three directions (X, Y, and Z) and will be a traditional gantry configuration (FIGURE 3)meaning dual axes carrying
a single bridge axis. It is important to note that a controller can only
position a stage to be within some accuracy specification limited
by the encoders resolution, the mechanical resolution of the bearings, and the location of the encoder with respect to the work point.
The first limitation, the encoder resolution, is typically overcome by
using well-tuned sine wave encoder feedback. A good controller
1501ils_15 15
air bearings will not work in a vacuum environment, can be subject to contamination by the powder, and do not have the same
stiffness as mechanical bearing solutions. Finally, the location of
the encoder relative to the work point is important due to angular
errors (pitch, roll, and yaw) of any linear stage. The further the work
point is from the bearing and encoder system, the more greatly
exaggerated these angular errors will be.
Fortunately, there are ways that high-end motion providers can
get around some of these errors. For example, for the gantry system under discussion, parallel gantry base axes or spars on
either side of the powder bed carry a single gantry bridge (also linear motor-driven) over the top of the powder bed. These parallel
base axes may not be perfectly orthogonal to the bridge axis, but
the right controller choice can force orthogonality by applying an
offset to one of the base axes or spars. This assists in minimizing
angular errors at the work point. Additionally, each encoder must be
calibrated such that the highest level of accuracy is achieved at the
work point. This calibration procedure involves placing reflective
optics mounted to the XYZ motion system at the laser work point.
A laser interferometer is used as the master position reference as
the axis being calibrated is moved along its travel. Calibrating an
optical linear encoder with laser interferometer feedback at the
work point will increase performance in two ways. First, it corrects
for the magnitude of error along the axis being calibrated due to
angular error motion of that axis, which is magnified by the distance
between the encoder and the work point. It should be noted that
the angular element of that error vector is not corrected. However,
with symmetric Gaussian or top-hat laser spots, the angular aspect
of this error is not an important consideration. Second, it increases
the raw linear accuracy imparted by the stage at the work point.
Moving to multiple positions along the travel of the stage tracks
the differences between the native encoder and the more precise
interferometer feedback. The difference in measurements between
the two devices is used to generate a calibration file. A controller
will use this calibration file to ensure that a commanded motion of,
for instance, 10 mm will be as close as possible to 10 mm at the
work point, not necessarily at the encoder.
Now that the precise, calibrated XYZ motion system has been
designed for use over the powder bed, it is decided that the velocity requirements to meet the process throughput goals cannot be
accomplished with the linear motor drive-train of the XY gantry.
The scanning speed needs to be a few meters per second, so XY
galvo scanning heads are chosen as the proper tool for fast beam
steering. The only issue is that the galvo scanning head has a field
of view of 100 100mm while the part is 250 250mm in XY size.
Also, the accuracy of the scanning head is 50m, and that is after
a theoretical f-theta lens correction file is applied.
There are several ways to address the limited field of view of
15
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t e c h n o l o g y
LASER MICROMACHINING
PhotoMachining, Inc.
performs precision laser
micromachining on a
variety of different
materials including
plastics, metals, glass,
ceramics, etc. Our
eleven different types
of lasers allow us wide
fexibility to address
many applications.
We also design and
manufacture custom
laser machine tools.
r e p o r t
Now, its time to evaluate motion controllers. Realizing all controller features required to operate this mechanical system has narrowed our choices. Some key considerations include: What type
of controller can manage five axes of coordinated motion? Can
the controller continuously process a large part and, if so, how
difficult is that part to program? How will the controller interface
54 m
m
FEATURES
Laser beam size adaptable up to 20% Achromatic
Compensates for input beam tolerances Free space or ber coupled
Refractive, efciency >97%
Suitable for custom specications
PhotoMachining, Inc.
Contact sales@photomachining.com
Tel: 603-882-9944
Web site: www.photomachining.com
16
1501ils_16 16
osela.com
www.industrial-lasers.com
1/16/15 11:48 AM
t e c h n o l o g y
r e p o r t
BeamWatch
Output Beam
(Beam has not been
touched)
Question:
1/16/15 11:48 AM
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t e c h n o l o g y
r e p o r t
Laser
structure
Laser Laser
cure print
Clean
Laser
etch
Laser
drilling Clean
Clean
Laser
cut
GERARD M. OCONNOR
Unwind
1501ils_19 19
Direction
FIGURE 1. Representative
laser process steps
envisaged for a versatile,
multilayer roll-to-roll
(R2R) manufacturing pilot
line. Next-generation R2R
manufacturing exploits
key enabling technologies
(KETs) in photonics,
advanced materials,
nanotechnology, microand nano-electronics, and
advanced manufacturing.
Rewind
Perhaps of most relevance to the laser community is the concept of key enabling technologies (KETs). KETs are recognized
by the EU to be the building blocks for future product and process solutions that address many challenges facing European
society. There are six KETs identified for Europes Innovation
Union: photonics, advanced materials, industrial biotechnology, advanced manufacturing, nanotechnology, and micro-/
nano-electronics. Europe has aligned its biggest-ever research
JANUARY/FEBRUARY 2015 Industrial Laser Solutions
19
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t e c h n o l o g y
r e p o r t
regions of research and innovation intensity. The research and innovation strategies for smart specialization (RIS3) are hosted by the
European Commission on a dedicated website (http://s3platform.
jrc.ec.europa.eu). Of particular use is an Eye@RIS3 tool or map. At
the time of writing, Eye@RIS3 is a pilot project in its infancy stage;
however, it is proposed to be a searchable online database that
identifies activities for the EU region or member state into which
significant future regional resources will be invested.
Photonics clusters
In terms of laser technology, the origin and development of geographical clusters in photonics throughout Europe are based on
localized existing strengths. Thanks to the interactions between
research laboratories, SMEs, and large corporations in these clusters, local cooperation makes possible the transfer of photonics
technologies to industrial products and services. In Europe, there
are approximately 27 or so active clusters centered on photonics
(FIGURE 2). The best practices within these clusters were reported
recently by a European project (www.fp7-aspice.eu). Best practice here is interpreted as a method or technique that consistently showed results superior to those
achieved by other means.
The photonics clusters throughout
Europe showed different characteristics depending on either the number of members, scope of technologies, or focused application markets.
Thus, the extension from local cooperation to a European one allows photonic stakeholders to develop partnerships and invest in a broader scope of
technologies. Regional and national
clusters activated in photonics along
the European landscape attempted to
bridge or fill gaps existing within the
value chains of relevant services or
Smart specialization
products. The weakest clusters tended
In addition to the research and innovato be those which were emerging and
tion priorities discussed above, Europe
most inwardly focused by means
has also re-positioned its regional polof market and geographical figures.
icies to more cohesively contribute to
Clusters that fostered a sense of rivalry
the economic development of the membetween participants, and had a wellber states and their regions. In effect,
established supply chain, appeared to
Europe is seeking to align its regional
be more competitive with better prosFIGURE 2. A map of healthcare, optics/photonics,
budget to better serve as an input to
pects in the photonics market. All phoand security clusters identified by the ASPICE
its advanced research and training pro- project in Europe. (Source: www.fp7-aspice.org)
tonic clusters examined were found to
grams. Through an inspired move, the
have a limited drive for internationalEU has requested each region to pubization; this is considered to negatively
lish their evolving research and innovation priorities. In turn, these
impact the growth potential of such constituent SMEs.
policies are reviewed by critical friends from across Europe. The
The growth of internationalization activities within a cluster is
smart specialization strategies that emerge are expected to be
recognized to be a key aspect to a clusters evolution and sustaindeveloped from the ground up, in the full knowledge of what other
ability. The European Cluster Collaboration Platform (ECCP), also
EU regions propose.
supported by the EU, provides many useful tools in assisting clusThe purpose of this smart specialization is to assist regional
ter-to-cluster collaborations. The platform provides quality online
stakeholders to develop highly competitive and complementary
information and networking support for cluster organizations. The
20
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t e c h n o l o g y
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t e c h n o l o g y
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the highest level of accuracy, but also to be aligned with the servo
axes that carry it? There are still a lot of questions.
Summary
Moving from rapid prototyping and conceptual designs manufactured by SLS and into the 30m and below micro-selective laser
sintering processes requires a new set of considerations. Many of
these considerations are straightforward. Smaller powder particles
to make smaller features are needed. Smaller laser spot sizes to
make smaller features are required. The ability to control the pulsing of the laser to control energy input is another requirement. In
concept, these requirements are easy to understand.
In contrast, the motion system proposed in this article has a
total of five moving axes, each contributing its own unique errors.
Although many items were discussed, many more were not
www.industrial-lasers.com
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V I S I T U S AT P H O T O N I C S W E S T, 10 -12 F E B R UA RY 2 0 15 , B O O T H 2 3 2 3
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a p p l i c a t i o n
r e p o r t
Femtosecond
laser glass
processing
ULTRASHORT-PULSE LASER TECHNIQUES
ENABLE BEST PRECISION
SEYDI YAVAS
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nonlinear excitation allows the use of femtosecond laser micromachining for practical purposes for which other methods are
not capable.
Until recently, use of ultrashort pulses
on glass was a known but not widely used
method since the pulse energy need for this
process is relatively high. The only lasers
that were providing these pulse energy levels were solid-state lasers that are complex, difficult to operate, and expensive
to purchase. Improvements in fiber laser
technology over the last few years provide pulse energy levels with short pulses
and high beam quality that make them an
important alternative to solid-state lasers.
In addition, fiber lasers are more economical, compact, reliable, and easier to operate since they are alignment-free.
The development of user-friendly, lowcost, microjoule-range ultrafast fiber
lasers is now transforming this technique from a niche application to a
widely adopted industrial processing tool
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a p p l i c a t i o n
Glass layer 1
r e p o r t
Weld
Glass layer 2
50m
FIGURE 6. A schematic showing direct laser writing of a waveguide inside glass [6].
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LIGHT APPLIED
HOW
PHOTONICS CAN
HELP PUT YOUR
COMPANY IN THE
RIGHT LIGHT?
Youll nd
the answer
here.
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r e p o r t
t e c h n o l o g y
a)
Superfuous energy
Intensity
(a.u.)
Gauss
Ablation threshold
Heating energy
Spot diameter
Laser processing has become an indispensable manufacturing technique in thin film technology. Especially in thin-film
solar cell processing, the laser-based structuring of individually deposited functional layers is typically performed using
DPSSLs with a Gaussian beam profile, different wavelengths,
and pulse lengths in the nanosecond regime. The respective
laser scribing processes are generally referred to as P1 (structuring the transparent conductive oxide layer), P2 (patterning
the semiconductor absorbing layer), and P3 (patterning the
contact layer).
In particular, the P1 scribe of transparent conductive oxides
(TCOs) can also be found in the production of display devices,
touchscreens, and organic light-emitting diodes (OLEDs). Laser
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Top-hat
Spot diameter
b)
HAZ
c)
Damage
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ablation
of the energy within a Gaussian beam is effectively used for
the ablation of thin layers [1]. As shown in FIGURE 1a, a top-hat
beam profile can significantly improve this energy match to the
ablation threshold, by means of which both the excess energy
above the threshold and the excess energy in the wings can
be reduced. As a result, potential damage to the substrate
beneath the laser scribe and the adjacent area can be avoided.
A further advantage of using a beam shaper to generate a
top-hat profile is the possibility to change the laser footprint
from a circular type to a square or a rectangular one. Typically,
structuring with a pulsed laser having a circular footprint leads
to a sawtooth-type pattern along the ablated line, which can
induce unwanted mechanical stress in the thin film. To avoid
this, it is necessary to use a high pulse overlap of at least 70
percent when working with a circular Gaussian beam profile
[2]. In contrast, a rectangular footprint can produce straight
walls with a very small overlap, thus increasing the processing speed of the laser micromachining [3-5].
2mm
In the following section, valuable rules of practice are summarized for using refractive and diffractive beam-shaping optics
for top-hat profiles. The spot size of an unshaped beam profile
in the focal plane is determined by the wavelength, the numerical aperture (NA) of the focusing optics, and the input beam
quality. A redistribution of this intensity profile into a homogeneous top-hat beam profile can fundamentally only be realized
by a widening of this spot size. The magnitude of this spatial
expansion depends on the particular physical approach of
beam shaping, with the homogenization of the beam profile
being possible in one or two dimensions.
DPSSLs used for thin-film processing typically exhibit diffraction-limited, single-mode Gaussian beam profiles (TEM00) in the
focal plane. As a rule of thumb, with refractive beam shapers,
the minimum top-hat size (at 1/e2-limit) is at least 4X bigger than
an unshaped, diffraction-limited TEM00 spot. Besides this limitation of minimum feature size, refractive beam shapers allow
generating top-hat profiles in the range of up to a centimeter
and can work also with multimode lasers (FIGURE 2). However,
in thin-film laser ablation, a large spot size will remove more
material and thereby decrease the active area of the device.
Alternatively, top-hat sizes close to the diffraction limit can be
generated by using diffractive beam-shaping elements. Each
focus beam shaper (FBS) allows the generation of two different top-hat profiles in the working plane. The so-called zeroorder top hat is just 1.5X bigger than an unshaped, diffractionlimited TEM00 spot, whereas the first-order top hat is 3X bigger
www.industrial-lasers.com
1501ils_29 29
M
NA *
2 *
M
NA *
a high homogeneity (2.5 percent) within the generated tophat profile. Typical tolerances for variation of input beam size
and lateral misalignment are approximately 10 percent of the
used beam diameter. The input beam quality should be better than M 2 = 1.5.
FIGURE 3 illustrates the footprint geometry of the zero-order
top hat of two different top-hat FBSs, denoted as FBS-1 and
FBS-2. These two diffractive optical elements differ in their spatial modulation, which in turn leads to different intensity distributions of the diffracted optical field. In particular, FBS-1 generates a top-hat beam profile in the focus with a square-type
footprint, yet with rounded corners. The conversion efficiency
of FBS-1 is about 95 percent. In contrast, FBS-2 generates
a top-hat beam profile with the sharp edges of the squaretype footprint. However, the conversion efficiency of FBS-2 is
slightly reduced to about 90 percent.
The zero-order top hat of FBS-2 also shows a very high
depth of working area around the focal plane (depth of focus).
Both the intensity distribution and the size (@1/e-level) of
the profile are rather stable within this area, which leads to
an almost constant power density. The length of the zeroorder top-hat working area is approximately 60 percent of
JANUARY/FEBRUARY 2015 Industrial Laser Solutions
29
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a)
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REFERENCES
1. K. Du, Thin layer ablation with lasers of different beam profiles Line
Energy efficiency and over filling factor, Proc. SPIE, 7202 (2009).
2. O. Homburg, F. Vlkermeyer, F. Toennissen, H. Ganser, and T.
Mitra, High-precision Gaussian-to-tophat beam transformation
FIGURE 5. Combination of a first-order top hat of FBS-1 and a fourfold beamsplitter
improves structure quality and speed in micro-machining, Proc.
for line scribing of a 150nm ITO: a microscope picture with detail views of every line
LIM, 754762 (2007).
3. B. Baird, T. Gerke, K Wieland, and N. Paudel, P2 and P3 spatially
(a) and measurement values of the burr volume (ROI: 100 100m2), line width, and
shaped laser scribing of CdTe and a-Si thin film solar cells using a
roughness Rz (Rt) for each line (b).
532 nm picosecond MOFPA, Proc. 26th European Photovoltaic Solar
Energy Conference, 2471 (2011).
percent and homogeneity between the sub-beams >2.5 percent.
4. S. Rung, M. Rexhepi, C. Bischoff, and R. Hellmann,Laserscribing of thin films using top-hat
FIGURE 5 highlights the results of laser scribing a 150nm ITO layer by
laser beam profiles, J. Laser Micro. Nanoeng., 309 (2013).
5. S. Rung, C. Bischoff, E. Jger, U. Umhofer, and R. Hellmann, Laser thin-film ablation with
using a combination of a fourfold beamsplitter and the first-order
multiple beams and tailored beam profiles, Proc. SPIE, 8967 (LAMOM), 2389 (2014).
top hat of FBS-1. The four lines have comparable values for the
generated burr volume, line width, and the bottom roughness Rz.
Conclusion
STEFAN RUNG is with the Fraunhofer Application Center for Resource Efficiency,
Aschaffenburg, Germany; CHRISTIAN BISCHOFF and ERWIN JGER are with TOPAG
Lasertechnik GmbH, Darmstadt, Germany; and RALF HELLMANN (ralf.hellmann@hab.de) is with the University of Applied Sciences Aschaffenburg, Aschaffenburg,
Germany.
Fraunhofer ILT
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a p p l i c a t i o n
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Battery welding:
Selecting laser,
microTIG, and resistance
technologies
CONSUMER DEMAND DRIVES BATTERY PRODUCTION VOLUMES
GEOFF SHANNON
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EASTERN
12-14
STATES
EXPOSITION
2015
WEST SPRINGFIELD, MA
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FIGURE 3. Laser reads laser weld placement for tailoring weld strength and weld.
Resistance welding
MicroTIG
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a p p l i c a t i o n
r e p o r t
ANTONIO VENDRAMINI
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FIGURE 3. A TTM Laser S.p.A laser system for cutting tubes with diameters
up to 406mm is installed at agricultural machinery manufacturer Unverferth
Manufacturing.
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DR. ANTONIO VENDRAMINI (antonio_vendramini@iol.it) is a wellknown international consultant on industrial laser material processing,
a prolific author, and a periodic contributor to Industrial Laser Solutions.
His company, Lasertec s.a.s, is located in Segrate, Italynear Milan.
www.industrial-lasers.com
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CALENDAR
JANUARY
FEBRUARY
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Advertiser .......................................................................................................Page
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my view
Happy New Year
2014 COULD BE
REPEAT OF 2013
FOR INDUSTRIAL
LASER GROWTH
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David A. Belforte
belforte@pennwell.com
www.industrial-lasers.com
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