Functional Oxides and Related Materials for Electronics

Strategic Research Cluster

Summary of project and partner

capabilities

Partners

Tyndall National Institute

University College Cork
Dublin City University
University College Dublin
Trinity College Dublin
Queens University Belfast
Intel
Applied Materials
Seagate
SAFC Hitech
Glebe Scientific
Solarprint
Asylum Research

FORME expertise

Chemistry
Deposition
Devices

Chemistry
Precursor design
Modelling

Synthesis

Analysis

Tyndall /
UCC

Molecule synthesis, isolation

and purification

TCD / UCC

Physical characterisation

TCD / UCC

Deposition

Modelling

Growth

Process mechanism
illumination
Process development and
optimisation

Thin film characterisation

Analysis

Tyndall

Tyndall /
DCU / UCC

Tyndall /
UCD

Devices
Test structure development

Tyndall /
UCD

Fabrication

Sample device preparation

and process optimisation

Tyndall /
DCU / UCD

Evaluation

Structural, electrical and

magnetic characterisation

Design

Tyndall /
UCD

High-k on III-V MOSFET

ICL theorisation
Precursor modelling
Molecule synthesis and isolation
Precursor characterisation
Substrate surface pretreatment
ICL/high-k atomic layer deposition
Thin film characterisation
MOSFET fabrication
Electrical characterisation

Tyndall
Tyndall
UCC / TCD
UCC / TCD
Tyndall
Tyndall
Tyndall / UCD
Tyndall
Tyndall

Relevant Industry Partners Intel, Applied Materials, SAFC Hitech, Glebe Scientific

High-k on III-V MOSFET

ICL modelling and formation

Test device

Low-k BEOL BCP

BCP process
Substrate patterning
Textured coating
Device fabrication
Electrical characterisation

UCC
UCC
Tyndall
UCC / Tyndall
UCC / Tyndall

Relevant Industry Partners Intel, Applied Materials, SAFC Hitech

Low-k BEOL BCP

Mesoporous silica formation

BCP patterning

Transfer to silicon

Nanostructured DSSC
Interface design theorisation
Substrate texturing with nanoarrays
Blocking layer atomic layer deposition
Thin film characterisation
DSSC fabrication
Electrical characterisation

UCD
DCU
Tyndall
Tyndall / UCD
UCD
UCD

Relevant Industry Partners Solarprint, SAFC Hitech, Applied Materials

Nanostructured DSSC

ZnO nano arrays

Multiferroics
Aurivillius material design and modelling
Multiferroic thin film deposition (AVD/CSD)
Thin film characterisation
Substrate patterning with BCP
Test structure fabrication
Electrical and magnetic characterisation

Tyndall / TCD
Tyndall
Tyndall
UCC
Tyndall
Tyndall

Relevant Industry Partners Intel, Seagate, SAFC Hitech, Asylum Research

Multiferroics

Piezoresponse (phase)
Aurivillius phase structure

PZT nanostructure
AVD chamber