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in hearing aids, surveillance devices, and industrialprocess monitoring. Compared with conventional
microphones, the micromachined ones have potential
advantages of reduced device size, low cost, and the
Sensitivity
Polarization
Voltage
Dynamic
Range
Fabrication
CMOS
C pby
Microphone
Vs
Condenser
Piezoelectric
Microphone
Relatively low
Not needed
Condenser
Microphone
Good
Needed
Wide
Relatively Narrow
Simple
Demonstrated
10yrs ago
Relatively
Complicated
Demonstrated 2yrs
ago
SiO2 (O.5pm)
Al(O.34um)
PZI(O.8wn)
Si(30un)
microphone
III. Theoretical Design of the Cantilever
Structure
(I)
AirdaImpinp
i~ I
,,
and
= be..
(2)
F,,,
's;I d''E;,f{/,Xt>/
e ;ov f-.~~~~End mas%^
/.; =
lJ,,, 0
5~ ~ ~ ~i"1 .1k ,
lectro&
Pkv.zeelctrk
dk,c
i =
piezo
+6axial + Ebend
=d3
+X E
2r
898
(4)
1I -.X
Fmm
Fml
m-l
_-
J____
-~~~~~~~M-
MP2 < ~
M2
RA
[6]:
6(x)
= X
2r
X2[2d31DK'C1
(5)
2 - DA'B J
A2E2
E1
0AE
A2E2
-I/
-1/
/A3E3
A3E3
o~~I~A
1/
/A3E3
m4nlEm-a
-1AmErE
ti + t2
t2
+ t3
|,And
tEt-l
rn-
899
+ tm
i2)
EEI
i=l
2)
i
(,t
2)j
-LJ
(6)
a
v
aQ/lP = b43
aQ/av
=
PZT Si 3 N4SO2
4 SiO2
Materials
Conistants
S 0 =aV/p
Piezoelectric
d3(pC IN )
32.4
Realative
,33
200
Coefficient
Dielectric
Constant
Young's
modulus
Poisson's
ratio
Density
(N / m
1WIY
N)
0.3
o(Kg Ini)
Al
7d
DxB
0.28
0.5
0.25
(8)
Conclusions
A novel ferroelectrics PZT layer is used to replace the
normal piezoelectric later in the cantilever Material
constants used in the design are listed in Table 2. A
References
Microspeaker,"Journal
of
Microlectromechanical
Systems, Vol. 5, No.
4, December 1996.
[41 Julian W. Gardner, Osama 0. Awadelkarimn,"
Microsensors MEMS and Smart Devices," Wiley,
Englar)d, 200 1.
[5] P.R Scheeper, A. G. H. Van der donk, "Fabrication of
Silicon Condenser Microphones using Single Wafer
Technology," Journal of Microlectromechanical Systems,
Vol. 1, No. 3, September 1992.
[6] Don L. DeVoe and Albert P. Pisano, "Modeling and
Optimal Design of Piezoelectric Cantilever
Microactuators," Journal of Microlectromechanical
Systems, Vol. 6, No.3, September 1997.
[7] Mark Sheplak, John M. Seiner, Martin A. Schmidth,
"A MEMS Microphone for Aeroacoustics
Measurements," The American Institute of Aeronautics
and Astronautics, 1999.
[8] J. G. Smits and A. Ballato, "Dynamic admittanc'e
matrix of piezoelectric cantilever bimorphs," Journal of
Microlectromechanical Systems, Vol. 3, pp. 105- 111,,
September 1994.
900