HongFeng Mechanical Equipment Manufactory

Tel: +86-731-58282058

Fax: +86-731-55567993

Address: East Yanjiang Road, Yuhu District, Xiangtan, Hunan, China

Professional Manufacturer of Physical Vapor Deposition System

PVD Vacuum Metalization Machine

Features of Metallization machine

Available coatings
Available base materials
Available Industries
Application
Original coatings color

FOB Shanghai factory Price

Sized 1300*1600mm(diameter*height)
Delivery Time
Terms of payment
Inspection Address
Quotation Date
Valid Time
Origin

>>Configurations
>>Specifications

>>System Variables

echanical Equipment Manufactory

Tel: +86-731-58282058

Fax: +86-731-55567993

Address: East Yanjiang Road, Yuhu District, Xiangtan, Hunan, China

Professional Manufacturer of Physical Vapor Deposition System

VD Vacuum Metalization Machine

hine
Aluminum, nikel
Kinds of plastic, glass after pre-treatment
Plastic Decorations, toys, plastic parts,glass industry, Car Parts
Processing Area, etc
Metallization and decorative coatings
Silver

50.000USD
60 days on receipt of payment
60% for deposit in T/T,balance before shipment
In sellers factory
March 27th, 2013
30 days
Made in China

>>Configurations
>>Specifications

>>System Variables

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No.

Specification

Name

Vacuum
Chamber

Quantity

Size

Vacuum Working Chamber is sized

1300*1600mm(Diameter*Height)--Inner size

Material of body

Carbon Steel

Observation port

The chamber door comes in 1 set of optical view

port

Type

The body type is vertical, One Chamber

1 Set

Scaleboard inside the This part is made of SUS(Thickness:1 mm), which

is removable to be cleaned easily.
chamber
The movement tracking is public-self spining during
Rotating Carousel
working.
The carbon steel base frame keeps the appropriate
Base Frame
height which for well loading
Description This part contains the products which need to coat during PVD process.

Rough Pumping
Pumping Unit and Fine pumping
Unit

ZJP-600 Roots Pump

1 Unit

2X15 Mechanical Pump

1 Unit

K-600 Oil Diffusion Pump

ZLVAC

1 Unit

H-150 Maintaining Pump

Zhejiang

1 Unit

Description This is the part which creates the required vacuum states during vacuum coating.

Pipeline
valve

High Valve

600 High Vacuum Valve

Foreline Valve

200 High Vacuum Valve

Rough Puming Valve 150 High Vacuum Valve

1 system venting valve--It is used to evacuate the vacuum of the working
chamber.
Others

Description

Bellows(all set) and cylinders

These parts connect the working chamber and pipes in different vacuum degree in the
whole system.

Measurement To measure the

and Control vacuum degree with
Instrument sensor
Description

1 Unit
Each

Vacuum Composite Gauge

These instruments are used for measuring the working parameters which shows the
working conditions.
Evaporation Unit

1 Unit

Made of Copper(in the middle

of working chamber)

Evaporation
The valve is controlled by
Unit
Evaporation Power manual according to the
parameter, which to control
Supply(30KW)
the evaporation rate.

1 Unit

XinDa

1 Unit

PLC control system(Auto&Manual)

10'4 Inches Full Touched screen

6

Control
Cabinet

1 Unit

Kinco

Speed Digital Adjuster of the caurousel

1 Unit
1 Piece

The cabinet contains the controlling unit of the whole system which includes: Magnetron power
supply, vacuum composite gauge, mass flow controller, controlling touched screen, electric
current display, voltage display, and all the electrical componenets.

Contactor, thermo relay

Electrical
Components
and Other Venting System
Automatic venting system is applied
parts
Alarm system

All

1 Set

Pressure alarm, water flow alarm power supply

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Pumping(Degassing)System
Name of parameters

Value

Name

Oil Diffusion Pump

Image

Brand

ZLVAC

www.zlvac.com.cn

Website
Model Number
Quantity

KT-600
1 Unit

Ultimate vacuum

5*10-5Pa

Pumping Speed(L/S)

17500

Heating Power(Kw)

9 Kw

Consumption of cooling
Water(L/Min)
Name of parameters

8
Value

Image
Name

Booster (Roots) Pump

Brand

Rankuum

Website

http://www.rankuum.com

Model Number
Quantity

ZJP-600
1 Unit

Ultimate vacuum
Pumping Speed(L/S)
Motor Power(Kw)

5*10-2Pa
600
5.5 Kw

Rotating Speed(rpm)

2930

Weight(KG)

480

Name of parameters

Value

Name

Rotary vane vacuum pump

Image

Brand

Rankuum

Model Number

H-150

Quantity

1 Unit

Ultimate vacuum

1Pa

Pumping Speed(L/S)
Power(Kw)

150
15 Kw

Consumption of cooling
Water(L/H)

480

Name of parameters

Value

Name

Rotary vane vacuum pump

Image

Brand

Rankuum
www.rankuum.com

Website
Model Number

2X15

Quantity

1 Unit

Ultimate vacuum
Pumping Speed(L/S)

6*10-2Pa
15

Heating Power(Kw)

3 Kw

Consumption of cooling
Water(L/H)

480

Rotation speed of main shaft(rpm)

470

Control&Measuring Instrument
Full-Touched Screen
Image

Name of parameters

Value

Brand

Kinco

Website

http://www.kinco.cn

Output Print Port

Communication Port

Working Elctricity Current

Quantity
Size
Resolution
CPU

Support EPSON
ESC/PII&HP PCL
COM0: PC RS232 & PLC
RS485/422 COM1: PLC
RS232
21-28 VDC
1 Piece
10.4'' Colorful TFT
640 480
32 bytes RISC CPU
200MHz

2MB Flash ROM(it could be

increase to 4M)+ 4MB DRAM

Memory
Controlling Module
Image

Name of parameters

Value

Brand

Mitsubishi

I/O quantity

48

Input Voltage

24V/Leak type

Output Voltage

Relay&transistor
182x87x90mm
(7.2'x3.4'x3.5')

size
Vacuum Composite Gauge
Image

Name of parameters

Value

Brand

Reborn

Website

http://www.cdreborn.com

Model Number
Quantity
Measuring Range
Measuring Channel
Display
Control method
Power supply
Size(mm)
Weight(KG)

ZDF-5210B
1 Unit
3.0105-1.010-5 Pa
2
5 Decimals digital display

Point/Area control
AC/220V10%/50Hz/50W
48088280mm
(W*H*D)
7

Speed Ajuster of Caurousel

Image

Name of parameters

Value

Brand

Delta

Model Number

VFD-M

Quantity

1 Piece

Working Voltage

115V

Output Frequency

50kHz

Built-in PID and MODBUS

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Ultimate vacuum
Compressing Air
Coating system
Cooling water Cycle
Pumping Cycle Time
Power Consumption/hour
Cycle time

Carousel and Racks

Racks would be designed according to the specification of substrates.
Cooling water circuitry, gas distribution for all process gases and pneumatic valves or shutters

Power Input and Interlocks

Output voltage:10-40kV
Input supply: 3-phase, 4 wires, 380V/50Hz
Master: 3 phase power distribution box
Main Power switch
Emergency OFF button
Water cooling/vacuum interlocks

Process and Operation Control:

Manually or Automatic operation control
Phase protection and pumping sequence controller
Controls for fast opening door
Controls for vacuum pumps and valves
Controls for vacuum measurements
Controls for rotary substrate stage
Controls for evaporation unit
Controls for emergency and interlock
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5.010-3 Pa
0.5M Pa -0.6M Pa
Evaporation Unit+Evaporation Power Supply
2 Ton / hr 2.0 kg/cm2, 205 C
-2

Pumps from atmosphere to 5.010 Pa in 6

minutes(unloading and clean oven)
About 35KW
About 8-12 min

o the specification of substrates.

n for all process gases and pneumatic valves or shutters

nce controller

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