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FEATURES
Monolithic IC Chip
2 mg Resolution
10 kHz Bandwidth
Flat Amplitude Response (1%) to 5 kHz
Low Bias and Sensitivity Drift
Low Power 2 mA
Output Ratiometric to Supply
User Scalable g Range
On-Board Temperature Sensor
Uncommitted Amplifier
Surface Mount Package
+2.7 V to +5.25 V Single Supply Operation
1000 g Shock Survival
ADXL105
TEMP
SENSOR
TOUT
UNCOMMITTED
AMPLIFIER
ST
X SENSOR
COM
COM
AOUT
VMID VNIN
VIN
UCAOUT
APPLICATIONS
Automotive
Accurate Tilt Sensing with Fast Response
Machine Health and Vibration Measurement
Affordable Inertial Sensing of Velocity and Position
Seismic Sensing
Rotational Acceleration
GENERAL DESCRIPTION
The ADXL105 is a high performance, high accuracy and complete single-axis acceleration measurement system on a single
monolithic IC. The ADXL105 offers significantly increased
bandwidth and reduced noise versus previously available micromachined devices. The ADXL105 measures acceleration with a
full-scale range up to 5 g and produces an analog voltage output. Typical noise floor is 225 gHz allowing signals below
2 mg to be resolved. A 10 kHz wide frequency response enables
vibration measurement applications. The product exhibits significant reduction in offset and sensitivity drift over temperature
compared to the ADXL05.
The ADXL105 can measure both dynamic accelerations, (typical of vibration) or static accelerations (such as inertial force,
gravity or tilt).
Output scale factors from 250 mV/g to 1.5 V/g are set using the
on-board uncommitted amplifier and external resistors. The
device features an on-board temperature sensor with an output
of 8 mV/C for optional temperature compensation of offset vs.
temperature for high accuracy application.
The ADXL105 is available in a hermetic 14-lead surface mount
Cerpak with versions specified for the 0C to +70C, and
40C to +85C temperature ranges.
*Patent Pending.
iMEMS is a registered trademark of Analog Devices, Inc.
REV. A
Information furnished by Analog Devices is believed to be accurate and
reliable. However, no responsibility is assumed by Analog Devices for its
use, nor for any infringements of patents or other rights of third parties
which may result from its use. No license is granted by implication or
otherwise under any patent or patent rights of Analog Devices.
Conditions
SENSOR INPUT
Measurement Range1
Nonlinearity
Alignment Error2
Cross Axis Sensitivity3
SENSITIVITY4 (Ratiometric)
Initial
At AOUT
Min
5
Z Axis, @ +25C
225
80
VS = 2.7 V
vs. Temperature5, 6
ZERO g BIAS LEVEL5 (Ratiometric)
Zero g Offset Error
vs. Supply
vs. Temperature5, 7
NOISE PERFORMANCE
Voltage Density7
Noise in 100 Hz Bandwidth
At AOUT
From +2.5 V Nominal
@ +25C
225
2.25
10
13
Units
g
% of FS
Degrees
%
275
120
mV/g
mV/g
%
+625
+20
mV
mV/VDD/V
mV
325
g/Hz
mg rms
12
18
100
kHz
kHz
+100
mV
mV/C
k
+15
mV
k
500
mV
k
VS 0.5
V
pF
+25
mV
V/C
V
nA
V/mV
V
pF
8
10
From +2.5 V Nominal
Self-Test 0 to 1
AOUT
Output Drive
Capacitive Load Drive
I = 50 A
POWER SUPPLY
Operating Voltage Range
Quiescent Supply Current
250
105
0.5
Max
50
VMID4 (Ratiometric)
Output Error
Output Impedance
UNCOMMITTED AMPLIFIER
Initial Offset
Initial Offset vs. Temperature
Common-Mode Range
Input Bias Current9
Open Loop Gain
Output Drive
Capacitive Load Drive
7
0.2
1
1
625
20
FREQUENCY RESPONSE
3 dB Bandwidth
Sensor Resonant Frequency
TEMP SENSOR4 (Ratiometric)
Output Error at +25C
Nominal Scale Factor
Output Impedance
ADXL105J/A
Typ
15
10
100
30
50
0.50
1000
25
5
1.0
4.0
25
100
I = 100 A
0.25
1000
VS 0.25
2.70
At 5.0 V
At 2.7 V
1.9
1.3
700
Turn-On Time
TEMPERATURE RANGE
Operating Range J
Specified Performance A
0
40
5.25
2.6
2.0
V
mA
mA
s
+70
+85
C
C
NOTES
1
Guaranteed by tests of zero g bias, sensitivity and output swing.
2
Alignment of the X axis is with respect to the long edge of the bottom half of the Cerpak package.
3
Cross axis sensitivity is measured with an applied acceleration in the Z axis of the device.
4
This parameter is ratiometric to the supply voltage V DD. Specification is shown with a 5.0 V V DD. To calculate approximate values at another V DD, multiply the specification by
VDD/5 V.
5
Specification refers to the maximum change in parameter from its initial value at +25C to its worst case value at TMIN to T MAX.
6
See Figure 3.
7
See Figure 2.
8
CMOS and TTL Compatible.
9
UCA input bias current is tested at final test.
All min and max specifications are guaranteed. Typical specifications are not tested or guaranteed.
Specifications subject to change without notice.
REV. A
ADXL105
ABSOLUTE MAXIMUM RATINGS*
Package Characteristics
Package
JA
JC
Device Weight
14-Lead Cerpak
110C/W
30C/W
<2 Grams
Model
Temperature Range
Package Option
*Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; the functional operation of
the device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
ADXL105JQC
ADXL105AQC
0C to +70C
40C to +85C
QC-14
QC-14
ORDERING GUIDE
CAUTION
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily
accumulate on the human body and test equipment and can discharge without detection.
Although the ADXL105 features proprietary ESD protection circuitry, permanent damage may
occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD
precautions are recommended to avoid performance degradation or loss of functionality.
WARNING!
ESD SENSITIVE DEVICE
Drops onto hard surfaces can cause shocks of greater than 1000 g
and exceed the absolute maximum rating of the device. Care should
be exercised in handling to avoid damage.
PIN CONFIGURATION
VDD
13
VDD
NC 3
12
UCAOUT
ADXL105
VIN
TOP VIEW
(Not to Scale) 10
VNIN
NC 5
COM 4
11
ST 6
VMID
AOUT
COM
NC = NO CONNECT
12
13
14
11
10
11
12
13
14
AOUT = 2.75V
10
10
11
12
13
14
TOUT
NC
COM
ST
COM
AOUT
VMID
VNIN
VIN
UCAOUT
VDD
14
NC 2
1
2, 3, 5
4
6
7
8
9
10
11
12
13, 14
TOUT 1
Description
AOUT = 2.50V
AOUT = 2.25V
REV. A
25
90
20
0g OFFSET SHIFT mV
60
% OF UNITS
30
0
30
15
10
60
5
90
120
50
0
50
TEMPERATURE 8C
0
0.242 0.244 0.246 0.248 0.250 0.252 0.254 0.256 0.258
SENSITIVITY V/g
100
0.260
2.5
CURRENT mA
SENSITIVITY CHANGE %
2
3
1.5
0
0.5
1
2
50
0
50
TEMPERATURE 8C
100
2.7
3.3
4
SUPPLY VOLTAGE
5.5
20
18
18
12
16
OUTPUT dB
% OF UNITS
14
12
10
8
6
4
12
2
0
18
100
2.2 2.25 2.3 2.35 2.4 2.45 2.5 2.55 2.6 2.65 2.7 2.75 2.8
OUTPUT V
1000
10000
FREQUENCY Hz
100000
REV. A
ADXL105
500
450
NOISE mg / Hz
400
350
300
250
200
150
2
4
SUPPLY VOLTAGE
15
40
35
10
ADXL105 SOLDERED TO PCB
30
OUTPUT dB
% OF UNITS
5
25
20
15
5
ADXL105 SOLDERED AND GLUED TO PCB
10
10
15
0
205
210
215
220
225 230
235
NOISE DENSITY mg / Hz
240
245
250
10
100
1000
FREQUENCY Hz
10000
100000
20
400
18
300
16
200
PHASE Degrees
% OF PARTS
14
12
10
8
6
100
0
100
4
200
300
1.375
1.125
0.875
0.375
0.625
0.0125
0.375
0.0125
0.625
0.875
1.125
1.375
10
100
1000
FREQUENCY Hz
10000
DEGREES OF MISALIGNMENT
REV. A
100000
ADXL105
THEORY OF OPERATION
VMID
VDD
VDD
ADXL105
TEMP
SENSOR
TOUT
UNCOMMITTED
AMPLIFIER
ST
X SENSOR
COM
AOUT
COM
VNIN VIN
VMID
R1
UCAOUT
R2
OUTPUT
GAIN
SCALE mV/g
1
2
3
4
250
500
750
1000
R1
R2
50kV
50kV
50kV 100kV
50kV 150kV
50kV 200kV
VDD
+V
The ADXL105 has two power supply (VDD) pins, 13 and 14.
The two pins should be connected directly together. The output
of the ADXL105 is ratiometric to the power supply. Therefore a
0.22 F decoupling capacitor between VDD and COM is required to reduce power supply noise. To further reduce noise,
insert a resistor (and/or a ferrite bead) in series with the VDD
pin. See the EMC and Electrical Noise section for more details.
0.22mF
VDD
VDD
ADXL105
TEMP
SENSOR
TOUT
UNCOMMITTED
AMPLIFIER
ST
X SENSOR
COM
COM
COM
AOUT
VNIN VIN
VMID
R1
ST
UCAOUT
R2
OUTPUT
The ST pin (Pin 6) controls the self-test feature. When this pin
is set to VDD , an electrostatic force is exerted on the beam of the
accelerometer causing the beam to move. The change in output
resulting from movement of the beam allows the user to test for
mechanical and electrical functionality. This pin may be left
open-circuit or connected to common in normal use. The selftest input is CMOS and TTL compatible.
+V
R3
10kV
(250) R2
SCALE =
R1
R3 = 5R1
R1 > 20kV
mV/g
AOUT
The accelerometer output (Pin 8) is set to a nominal scale factor of 250 mV/g (for VDD = 5 V). Note that AOUT is guaranteed
to source/sink a minimum of 50 A (approximately 50 k output impedance). So a buffer may be required between AOUT and
some A-to-D converter inputs.
T OUT
REV. A
ADXL105
So given a bandwidth of 1000 Hz, the typical rms noise floor of
an ADLX105 will be:
Output Scaling
f3dB =
R1
R2
IN
OUT
1
2pCR1
GAIN = R1
R2
VMID
20kV
20kV
IN
OUT
0.18mF
f3dB = 30Hz
VMID
f3dB =
C
R2
IN
R3
OUT
VMID
2 rms
3 rms
4 rms
5 rms
6 rms
7 rms
8 rms
32%
13%
4.6%
1.2%
0.27%
0.047%
0.0063%
1
2pCR2
GAIN = R1
R2
0.1mF
R3 ~
~ 2.5 R1
VDD
VMID
10kV
47kV
44.2kV
100kV
OUT
IN
0.39mF
47kV
0.39mF
47kV
IN
59kV
VMID
GAIN = 2
f3dB = 30Hz
OUT
f3dB = 10Hz
Where
K 1.6 for a single-pole filter
K 1.4 for a 2-pole filter
REV. A
0.1mF
ADXL105
VDD
VDD
0.22mF
TEMP
SENSOR
TOUT
ADXL105
UNCOMMITTED
AMPLIFIER
VREF
The resonant frequency of the beam in the ADXL105 determines its high frequency limit. However the resonant frequency
of the Cerpak package is typically around 7 kHz. As a result, it
is not unusual to see 6 dB peaks occurring at the package resonant frequency (as shown in Figures 12 and 13). Indeed, the
PCB will often have one or more resonant peaks well below
7 kHz. Therefore, if the application calls for accurate operation
at or above 6 kHz the ADXL105 should be glued to the PCB in
order to eliminate the amplitude response peak due to the package, and careful consideration should be given to the PCB
mechanical design.
DOUT
ST
AIN
X SENSOR
COM
COM
AOUT
UCAOUT
COM
A-TO-D
CONVERTER
C3549a19/99
5 kHz where it gently rolls off (see Figure 7). The beam resonance at 16 kHz can be seen in Figure 7 where there is a small
noise peak (+5 dB) at the beams resonant frequency. There are
no other significant noise peaks at any frequency.
50V
+V
The initial value of the offset and scale factor for the ADXL105
will require dc calibration for applications such as tilt
measurement.
An accurate sensitivity calibration method is to make a measurement at +1 g and 1 g. The sensitivity can be determined by the
two measurements. This method has the advantage of being less
sensitive to the alignment of the accelerometer because the on
axis signal is proportional to the Cosine of the angle. For example, a 5 error in the orientation results in only a 0.4% error
in the measurement.
To calibrate, the accelerometer measurement axis is pointed
directly at the Earth. The 1 g reading is saved and the sensor is
turned 180 to measure 1 g. Using the two readings and sensitivity is calculated:
Sensitivity = [1 g Reading (1 g Reading)]/2 V/g
OUTLINE DIMENSIONS
Dimensions shown in inches and (mm).
PRINTED IN U.S.A.
14-Lead Cerpak
(QC-14)
0.415 (10.541)
MAX
14
0.310 (7.874)
0.275 (6.985)
Broadband Operation
0.419 (10.643)
0.394 (10.008)
1
PIN 1
0.170 (4.318)
0.135 (3.429)
0.020 (0.508)
0.004 (0.102)
0.345 (8.763)
0.290 (7.366)
0.300 (7.62)
0.190 (4.826)
0.140 (3.556)
0.050 0.020 (0.508)
(1.27) 0.013 (0.330)
BSC
SEATING
0.0125 (0.318)
PLANE
0.009 (0.229)
88
08
0.050 (1.270)
0.016 (0.406)
REV. A