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A vibrating reed apparatus to measure the natural frequency of multilayered thin films
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2016 Meas. Sci. Technol. 27 045002
(http://iopscience.iop.org/0957-0233/27/4/045002)
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IP Address: 148.247.193.72
This content was downloaded on 15/02/2016 at 17:44
doi:10.1088/0957-0233/27/4/045002
Centro de Investigacin y de Estudios Avanzados del IPN, Unidad Mrida, Depto. de Fsica Aplicada,
km 6 Antigua Carretera a Progreso, 97310 Mrida, Yucatn, Mexico
2
Centro de Investigacin Cientfica de Yucatn, AC, Unidad de Materiales, Calle 43 #130, Col.
Chuburn de Hidalgo, 97200 Mrida, Yucatn, Mexico
3
Facultad de Ingeniera, Universidad Autma de Yucatn, Av. Industrias no contaminantes por Perifrico
Norte, 97310 Mrida, Yucatn, Mexico
E-mail: ffgamboa@mda.cinvestav.mx
Received 9 November 2015, revised 15 December 2015
Accepted for publication 11 January 2016
Published 15 February 2016
Abstract
1.Introduction
F Gamboa et al
Figure 1. Mechanical components of the vibrating apparatus. 1- Base metallic plate; 2- Rubber pad; 3- Join screws; 4- Auxiliary plate;
5- C-shape arm; 6- Sample holder; 7- Straightedge mechanism; 8- Thin rubber strip; 9- Flexible steel sheet; 10- Fixing screws for the steel
sheet; 11- Adjustment screw; 12- Vibration sensor; 13- Air valve; 14- Adjustable height crossbar.
F Gamboa et al
Figure 2 shows a schematic of the excitation and sensing arrangement that comprises the sample holder, an air valve and a vibration sensor arrangement. The sample is clamped by the holder
at one of its ends producing a cantilever beam configuration. A
miniature air valve (MB332-VB33-L203, Gems Sensors and
Controls, CT, USA) is gated during 20ms to produce a short airpulse which is concentrated on a small area (1mm2) at the free
end of the sample. The air supplied to the valve is previously filtered and its pressure is controlled to 1 psi by means of a pressure
regulator. The oscillation amplitude at the free end of the sample
is measured through a laser diode-photosensor arrangement
(see bottom part of figure2). This design was chosen because
it permits an easy sample handling with high accuracy. A light
beam emitted by an OPV332 laser diode (OPTEK Technology
Inc., TX, USA) is reflected by the bottom surface of the sample
and detected by an UDT-455 photosensor (OSI Electronics, CA,
USA). For better pick up, both sensor components are positioned at an angle of 30 with respect to the perpendicular axis
of the incidence plane. The laser beam spot is 0.4mm2 while
the photosensor has an active area of 5.1mm2. The photovoltage
registered is a function of the displacement of the reflection surface with respect to the position of the photosensor [24]. This
arrangement requires a sample surface with enough reflectance
to detect the vibration frequency. The reflectance of the Kapton
foil used in this work as substrate was enough for an adequate
operation of the apparatus. However if the sample surface is not
F Gamboa et al
beam constituents.
Material
Substrate (Kapton)
Film #1 (Au)
Film #2 (Al)
125
0.25
0.20
3.64
69.1
78.0
(kg m3)
1420
19 320
2699
F Gamboa et al
Figure 6. Representative vibratory measurements conducted on multilayered beams using the constructed apparatus. (a) Kapton, (b) Au/
Kapton, (c) Al/Au/Kapton beams. Left side shows a period (T) in the time domain while right side shows the FFT in the frequency domain.
Table 2. Measured natural frequency of the four layered beams
fn (Hz)
Beam No.
1
2
3
4
Kapton
Au/Kapton
Al/Au/Kapton
74.6 0.1
74.6 0.2
74.5 0.2
74.6 0.3
77.5 0.2
77.5 0.3
77.6 0.2
77.5 0.3
81.1 0.2
80.9 0.2
81.1 0.2
81.2 0.3
F Gamboa et al
Figure 8. Close-up of the first oscillation amplitude used to determine the damping factor of the layered beams. (a) Kapton, (b) Au/Kapton,
(c) Al/Au/Kapton. Insets show the full oscillatory signal for 1 s.
W
= ln 1 .
(2)
W2
=
.
(3)
(2 )2 + 2
In actual free vibration experiments, the magnitude and frequency of oscillations are affected by damping. Vibration
theory recognizes a difference between the frequency of
damped vibration (fd) and the natural frequency ( fn) by introducing a damping factor () such as [1],
(1)
fd = 1 2 fn .
6
F Gamboa et al
Kapton
Au/Kapton
Al/Au/Kapton
0.0121
0.0192
0.0219
0.0019
0.0030
0.0034
layered beams.
fn (Hz)
Beam
Measured
FEA
Kapton
Au/Kapton
Al/Au/Kapton
74.6 0.3
77.5 0.3
81.2 0.3
74.6
77.7
80.8
Acknowledgments
The authors wish to thank O Gmez (CINVESTAV), Alejandro
May (CICY) and Cesar Villanueva (FI-UADY) for their technical support.
systems, respectively. The inset in figure 8 shows the complete vibratory oscillation for 1 s, indicating a slow decay in
the vibrating amplitude. The vibratory parameters ( and )
extracted from the vibratory curves measured are listed in
table3. Very small damping factors ranging between 0.0019
and 0.0034 were obtained for all the investigated multilayer
system, given their low mass. Therefore, using equation (1)
the ratio fd /fn is very close to 1 for all cases, indicating that the
instrument rightfully measures the natural frequency.
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F Gamboa et al