Beruflich Dokumente
Kultur Dokumente
Motivation
Prior Art
iDFM Filling
Incremental Fill Flow relies on re-using the old fill data as much as
possible
No re-filling
Fill Legalization
Cleanup of Shorts
The portion of the fill polygon that overlaps the design polygon is
removed
Trim Done
Density
Error?
Incremental
Filling
DRC analysis
and Fixing
Clean Fill DB
iDFM Advantages
Results
6X improvement
implementation.
in
TAT
(Turn
Around
time)
for
ECO
DRC Results
450
400
350
300
250
200
150
100
50
0
Metal1
Metal2
Metal3
Metal4
Metal5
Metal6
Metal7
Metal8
10
Density Results
10
0
11
Conclusion
12
13
Incremental Refill:
Original FILL and CELL:
Fill Polygon
Signal
Polygon
iDFM Flow: An ECO Implementation of Metal, Via Filling
ISPD 2013
14
15
16