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Rochester Institute of Technology

Microelectronic Engineering
11/20/2004
IMPLANT MASK CALCULATOR
DOPANT SPECIES
B11
0
BF2
0
P31
1

Lance Barron
Dr. Lynn Fuller

Enter 1 - Yes
MASK TYPE
Resist
Poly
Oxide
Nitride

0
0
0
1

Thickness to Mask >1E15/cm3 Surface Concentration

0 - No in white boxes
ENERGY
250

KeV

4306.947 Angstroms

This calculator is based on Silvaco Suprem simulations using the Dual Pearson model.
Data on Log/Log scale is approximately linear and an equation is extracted.

B11 Implant M asking

Thickness (A)

100000

Resis
t
Oxid
e
Poly

10000

1000
10

100
Energy (KeV)

1000

B11 M asking Thickne ss: Empirical Fit

Mask Thickness (A)

100000

10000

Resi
st
Poly
Oxid
e

1000

100
10

100
Energy (KeV)

1000

All Thicknesses in Angstroms

All Thicknesses in Angstroms

Energy
25
50
75
100
125
150
175
200

Resist
4300
7400
10000
12400
14600
16600
18600
20400

Oxide
2100
3100
3900
4700
5400
6000
6600
7100

Log-Log Fit Equation


Resist
Poly
Oxide
Nitride

y=mx+b
m
0.7474
0.7856
0.5914
0.5844

b
2.595
2.213
2.49
2.3157

Energy
10
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
170
180
190
200
210
220
230
240
250
260
270
280
290

Resist
2199.885
3693.089
5000.35
6199.828
7325.043
8394.411
9419.466
10408.05
11365.82
12297.02
13204.95
14092.24
14961.02
15813.07
16649.86
17472.67
18282.58
19080.54
19867.37
20643.81
21410.49
22168.01
22916.87
23657.56
24390.48
25116.04
25834.57
26546.42
27251.87

Poly
996.7816
1718.261
2362.797
2961.954
3529.481
4073.011
4597.365
5105.843
5600.837
6084.151
6557.195
7021.094
7476.768
7924.98
8366.374
8801.499
9230.828
9654.773
10073.7
10487.92
10897.72
11303.35
11705.05
12103.03
12497.46
12888.52
13276.37
13661.15
14043

Poly
2100
3000
5300
6400
7900
8800
9300
9300

Nitride
1400
2000
2500
3000
3500
3800
4300
4700

Oxide
1206.146
1817.311
2309.774
2738.157
3124.43
3480.155
3812.334
4125.603
4423.225
4707.605
4980.577
5243.579
5497.764
5744.075
5983.294
6216.079
6442.991
6664.509
6881.053
7092.987
7300.633
7504.276
7704.17
7900.543
8093.6
8283.526
8470.49
8654.645
8836.132

Nitride
794.5112
1191.302
1509.836
1786.257
2035.064
2263.871
2477.281
2678.34
2869.19
3051.406
3226.19
3394.482
3557.038
3714.473
3867.299
4015.945
4160.776
4302.107
4440.211
4575.325
4707.659
4837.398
4964.708
5089.738
5212.621
5333.477
5452.416
5569.538
5684.934

Energy
1.39794
1.69897
1.875061
2
2.09691
2.176091
2.243038
2.30103

Resist
3.633468
3.869232
4
4.093422
4.164353
4.220108
4.269513
4.30963

Oxide
3.322219
3.491362
3.591065
3.672098
3.732394
3.778151
3.819544
3.851258

300
310
320
330
340
350
360
370
380
390
400
410
420
430
440
450
460
470
480
490
500
510
520
530
540
550
560
570
580
590
600
610
620
630
640
650
660
670
680
690
700
710
720
730
740
750
760
770
780
790

27951.2
28644.66
29332.5
30014.93
30692.15
31364.36
32031.74
32694.44
33352.64
34006.48
34656.1
35301.62
35943.18
36580.89
37214.87
37845.22
38472.04
39095.43
39715.47
40332.26
40945.88
41556.4
42163.91
42768.48
43370.17
43969.05
44565.19
45158.64
45749.47
46337.73
46923.48
47506.77
48087.65
48666.17
49242.37
49816.3
50388
50957.52
51524.9
52090.17
52653.38
53214.56
53773.75
54330.98
54886.28
55439.69
55991.24
56540.96
57088.88
57635.03

14422.03
14798.37
15172.1
15543.35
15912.19
16278.71
16642.99
17005.1
17365.13
17723.13
18079.16
18433.3
18785.58
19136.07
19484.82
19831.87
20177.28
20521.07
20863.31
21204.01
21543.23
21881
22217.35
22552.31
22885.93
23218.22
23549.22
23878.95
24207.45
24534.73
24860.83
25185.76
25509.56
25832.23
26153.81
26474.32
26793.76
27112.18
27429.57
27745.97
28061.38
28375.83
28689.33
29001.9
29313.55
29624.3
29934.17
30243.16
30551.29
30858.57

9015.078
9191.604
9365.818
9537.82
9707.706
9875.562
10041.47
10205.5
10367.74
10528.24
10687.06
10844.27
10999.92
11154.07
11306.75
11458.03
11607.94
11756.52
11903.81
12049.86
12194.69
12338.35
12480.86
12622.25
12762.56
12901.81
13040.02
13177.24
13313.47
13448.75
13583.09
13716.52
13849.06
13980.73
14111.55
14241.54
14370.71
14499.09
14626.68
14753.51
14879.59
15004.94
15129.56
15253.49
15376.72
15499.27
15621.16
15742.39
15862.98
15982.94

5798.687
5910.875
6021.569
6130.834
6238.731
6345.318
6450.646
6554.764
6657.72
6759.556
6860.312
6960.026
7058.735
7156.472
7253.268
7349.155
7444.16
7538.31
7631.631
7724.148
7815.883
7906.859
7997.097
8086.616
8175.436
8263.575
8351.05
8437.878
8524.076
8609.658
8694.64
8779.034
8862.856
8946.118
9028.832
9111.011
9192.666
9273.808
9354.449
9434.598
9514.266
9593.462
9672.196
9750.477
9828.314
9905.714
9982.687
10059.24
10135.38
10211.12

800
810
820
830
840
850
860
870
880
890
900
910
920
930
940
950
960
970
980
990
1000

58179.43
58722.12
59263.11
59802.45
60340.14
60876.22
61410.71
61943.64
62475.01
63004.87
63533.22
64060.09
64585.5
65109.47
65632.02
66153.16
66672.93
67191.32
67708.37
68224.09
68738.49

31165.03
31470.66
31775.48
32079.51
32382.76
32685.23
32986.94
33287.89
33588.11
33887.6
34186.36
34484.42
34781.77
35078.43
35374.41
35669.72
35964.36
36258.34
36551.67
36844.36
37136.42

16102.28
16221.02
16339.15
16456.7
16573.67
16690.08
16805.92
16921.22
17035.98
17150.2
17263.9
17377.09
17489.77
17601.95
17713.64
17824.84
17935.57
18045.83
18155.62
18264.96
18373.84

10286.46
10361.4
10435.97
10510.16
10583.98
10657.43
10730.52
10803.27
10875.66
10947.72
11019.43
11090.82
11161.89
11232.63
11303.06
11373.17
11442.98
11512.49
11581.71
11650.62
11719.25

Log Scale
Poly
3.322219
3.477121
3.724276
3.80618
3.897627
3.944483
3.968483
3.968483

Nitride
3.146128
3.30103
3.39794
3.477121
3.544068
3.579784
3.633468
3.672098

BF2 Implant M asking

Thickness (A)

10000

Resis
t
Oxid
e
Poly

1000

100
10

100
Energy (KeV)

1000

BF2 M asking Thickness: Empirical Fit

Mask Thickness (A)

100000

10000

Resi
st
Poly
Oxid
e

1000

100
10

100
Energy (KeV)

1000

All Thicknesses in Angstroms

All Thicknesses in Angstroms

Energy
25
40
55
70
95
110
115
120

Resist
1900
2800
3600
3800
4700
5300
5500
5700

Oxide
800
1100
1400
1600
1900
2100
2100
2200

Log-Log Fit Equation


Resist
Poly
Oxide
Nitride

y=mx+b
m
0.6692
0.3637
0.6341
0.6582

b
2.361
2.583
2.0263
1.8551

Energy
10
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
170
180
190
200
210
220
230
240
250
260
270
280
290

Resist
1072.013
1704.705
2236.091
2710.807
3147.391
3555.812
3942.209
4310.7
4664.221
5004.953
5334.577
5654.42
5965.556
6268.864
6565.084
6854.836
7138.655
7417.001
7690.276
7958.831
8222.978
8482.996
8739.131
8991.608
9240.627
9486.372
9729.01
9968.691
10205.56

Poly
884.5044
1138.111
1318.952
1464.432
1588.237
1697.124
1794.991
1884.316
1966.79
2043.619
2115.702
2183.726
2248.232
2309.653
2368.342
2424.591
2478.645
2530.711
2580.968
2629.569
2676.647
2722.32
2766.689
2809.848
2851.877
2892.849
2932.831
2971.881
3010.053

Poly
1200
1500
1600
1900
2100
2100
2100
2100

Nitride
600
800
1000
1200
1400
1600
1600
1700

Oxide
457.5094
710.0405
918.2112
1101.961
1269.454
1425.036
1571.364
1710.21
1842.83
1970.153
2092.893
2211.611
2326.759
2438.708
2547.766
2654.193
2758.212
2860.015
2959.768
3057.617
3153.692
3248.106
3340.963
3432.353
3522.36
3611.059
3698.518
3784.8
3869.961

Nitride
326.0619
514.5623
671.9566
812.0371
940.5071
1060.423
1173.663
1281.486
1384.785
1484.226
1580.319
1673.467
1763.996
1852.173
1938.221
2022.329
2104.658
2185.347
2264.517
2342.275
2418.715
2493.921
2567.966
2640.919
2712.84
2783.784
2853.801
2922.937
2991.234

Energy
1.39794
1.60206
1.740363
1.845098
1.977724
2.041393
2.060698
2.079181

Resist
3.278754
3.447158
3.556303
3.579784
3.672098
3.724276
3.740363
3.755875

300
310
320
330
340
350
360
370
380
390
400
410
420
430
440
450
460
470
480
490
500
510
520
530
540
550
560
570
580
590
600
610
620
630
640
650
660
670
680
690
700
710
720
730
740
750
760
770
780
790

10439.74
10671.35
10900.5
11127.29
11351.83
11574.18
11794.45
12012.7
12229.01
12443.44
12656.06
12866.93
13076.11
13283.64
13489.58
13693.98
13896.89
14098.34
14298.37
14497.04
14694.36
14890.39
15085.14
15278.67
15470.98
15662.13
15852.12
16041
16228.79
16415.5
16601.17
16785.83
16969.48
17152.16
17333.87
17514.66
17694.52
17873.49
18051.57
18228.79
18405.16
18580.7
18755.42
18929.35
19102.48
19274.85
19446.46
19617.32
19787.44
19956.85

3047.397
3083.957
3119.773
3154.885
3189.326
3223.128
3256.321
3288.933
3320.988
3352.511
3383.524
3414.047
3444.1
3473.701
3502.868
3531.615
3559.959
3587.914
3615.492
3642.708
3669.572
3696.096
3722.292
3748.169
3773.737
3799.005
3823.983
3848.679
3873.1
3897.255
3921.151
3944.795
3968.194
3991.353
4014.28
4036.98
4059.459
4081.722
4103.775
4125.622
4147.269
4168.719
4189.979
4211.051
4231.941
4252.651
4273.187
4293.552
4313.748
4333.781

3954.054
4037.127
4119.226
4200.391
4280.66
4360.071
4438.655
4516.445
4593.469
4669.755
4745.328
4820.213
4894.433
4968.009
5040.961
5113.309
5185.071
5256.265
5326.906
5397.011
5466.595
5535.671
5604.253
5672.354
5739.987
5807.163
5873.893
5940.189
6006.06
6071.518
6136.57
6201.227
6265.498
6329.39
6392.912
6456.072
6518.877
6581.336
6643.454
6705.238
6766.696
6827.833
6888.657
6949.171
7009.384
7069.299
7128.923
7188.26
7247.316
7306.095

3058.73
3125.462
3191.462
3256.761
3321.387
3385.366
3448.723
3511.481
3573.663
3635.287
3696.374
3756.941
3817.005
3876.582
3935.687
3994.335
4052.539
4110.312
4167.667
4224.614
4281.166
4337.332
4393.123
4448.549
4503.618
4558.34
4612.723
4666.775
4720.503
4773.916
4827.021
4879.823
4932.331
4984.55
5036.486
5088.146
5139.535
5190.658
5241.521
5292.13
5342.488
5392.6
5442.473
5492.108
5541.513
5590.689
5639.642
5688.375
5736.892
5785.197

800
810
820
830
840
850
860
870
880
890
900
910
920
930
940
950
960
970
980
990
1000

20125.55
20293.56
20460.88
20627.52
20793.5
20958.84
21123.52
21287.58
21451.01
21613.83
21776.05
21937.67
22098.7
22259.16
22419.05
22578.37
22737.14
22895.37
23053.06
23210.21
23366.84

4353.653
4373.368
4392.928
4412.337
4431.598
4450.714
4469.687
4488.52
4507.216
4525.777
4544.206
4562.505
4580.677
4598.723
4616.646
4634.449
4652.132
4669.699
4687.151
4704.49
4721.718

7364.603
7422.844
7480.823
7538.543
7596.009
7653.226
7710.197
7766.926
7823.417
7879.673
7935.699
7991.497
8047.072
8102.425
8157.562
8212.484
8267.195
8321.698
8375.996
8430.091
8483.987

5833.294
5881.185
5928.875
5976.366
6023.662
6070.767
6117.682
6164.411
6210.957
6257.322
6303.51
6349.522
6395.362
6441.032
6486.535
6531.872
6577.047
6622.061
6666.916
6711.616
6756.161

nesses in Angstroms
Oxide
2.90309
3.041393
3.146128
3.20412
3.278754
3.322219
3.322219
3.342423

Log Scale
Poly
3.079181
3.176091
3.20412
3.278754
3.322219
3.322219
3.322219
3.322219

Nitride
2.778151
2.90309
3
3.079181
3.146128
3.20412
3.20412
3.230449

P31 Implant M asking

Thickness (A)

100000

10000

Resis
t
Oxid
e
Poly

1000

100
10

100
Energy (KeV)

1000

P31 M asking Thickness: Empirical Fit

Mask Thickness (A)

100000

10000

Resi
st
Poly
Oxid
e

1000

100
10

100
Energy (KeV)

1000

All Thicknesses in Angstroms

Modeled

Energy
25
50
75
100
125
150
175
200

Resist
2200
3800
5300
6800
8300
9700
11000
12400

Oxide
1300
2100
2900
3500
4200
4700
5300
5800

Log-Log Fit Equation


Resist
Poly
Oxide
Nitride

y=mx+b
m
0.8356
0.6938
0.7236
0.6847

b
2.1658
2.2133
2.1002
1.9923

Energy
10
20
30
40
50
60
70
80
90
100
110
120
130
140
150
160
170
180
190
200
210
220
230
240
250
260
270
280
290

Resist
1003.229
1790.361
2512.364
3195.077
3849.988
4483.562
5099.927
5701.931
6291.657
6870.684
7440.253
8001.361
8554.824
9101.324
9641.439
10175.66
10704.42
11228.09
11746.99
12261.42
12771.63
13277.87
13780.34
14279.22
14774.7
15266.93
15756.06
16242.21
16725.53

Poly
807.4209
1306.034
1730.321
2112.561
2466.297
2798.861
3114.792
3417.148
3708.117
3989.33
4262.047
4527.265
4785.793
5038.295
5285.33
5527.369
5764.816
5998.022
6227.292
6452.895
6675.069
6894.025
7109.954
7323.026
7533.396
7741.204
7946.579
8149.637
8350.486

Poly
1500
2500
3300
4000
4700
5300
5800
6400

Nitride
900
1400
1900
2300
2700
3000
3400
3700

Oxide
666.4998
1100.589
1475.859
1817.4
2135.869
2437.083
2724.664
3001.069
3268.059
3526.956
3778.781
4024.348
4264.316
4499.231
4729.548
4955.657
5177.89
5396.537
5611.851
5824.053
6033.341
6239.892
6443.862
6645.396
6844.621
7041.655
7236.604
7429.568
7620.636

Nitride
475.3352
764.0385
1008.521
1228.091
1430.819
1621.064
1801.518
1973.993
2139.784
2299.853
2454.944
2605.646
2752.435
2895.702
3035.776
3172.933
3307.413
3439.419
3569.132
3696.709
3822.289
3945.998
4067.945
4188.231
4306.947
4424.175
4539.989
4654.458
4767.645

All Thicknesses in Angstroms


Energy
1.39794
1.69897
1.875061
2
2.09691
2.176091
2.243038
2.30103

Resist
3.342423
3.579784
3.724276
3.832509
3.919078
3.986772
4.041393
4.093422

300
310
320
330
340
350
360
370
380
390
400
410
420
430
440
450
460
470
480
490
500
510
520
530
540
550
560
570
580
590
600
610
620
630
640
650
660
670
680
690
700
710
720
730
740
750
760
770
780
790

17206.1
17684.05
18159.48
18632.46
19103.1
19571.46
20037.63
20501.68
20963.66
21423.66
21881.71
22337.89
22792.25
23244.82
23695.67
24144.84
24592.37
25038.31
25482.68
25925.54
26366.92
26806.84
27245.35
27682.48
28118.25
28552.69
28985.84
29417.72
29848.36
30277.77
30706
31133.05
31558.95
31983.72
32407.38
32829.96
33251.47
33671.94
34091.37
34509.79
34927.21
35343.66
35759.14
36173.67
36587.27
36999.95
37411.73
37822.62
38232.64
38641.79

8549.225
8745.945
8940.732
9133.663
9324.812
9514.247
9702.031
9888.225
10072.88
10256.06
10437.81
10618.16
10797.18
10974.9
11151.35
11326.58
11500.62
11673.51
11845.28
12015.95
12185.56
12354.13
12521.69
12688.28
12853.9
13018.58
13182.35
13345.23
13507.23
13668.38
13828.7
13988.2
14146.9
14304.82
14461.98
14618.38
14774.05
14929
15083.24
15236.79
15389.66
15541.86
15693.41
15844.31
15994.58
16144.24
16293.28
16441.72
16589.57
16736.85

7809.89
7997.409
8183.263
8367.519
8550.237
8731.475
8911.288
9089.725
9266.835
9442.66
9617.243
9790.625
9962.841
10133.93
10303.92
10472.84
10640.73
10807.62
10973.53
11138.48
11302.5
11465.63
11627.87
11789.25
11949.79
12109.51
12268.43
12426.56
12583.94
12740.56
12896.45
13051.63
13206.1
13359.89
13513
13665.46
13817.26
13968.43
14118.98
14268.92
14418.26
14567.01
14715.19
14862.79
15009.84
15156.34
15302.3
15447.73
15592.64
15737.04

4879.608
4990.4
5100.071
5208.666
5316.228
5422.798
5528.411
5633.103
5736.907
5839.853
5941.97
6043.285
6143.824
6243.611
6342.669
6441.019
6538.683
6635.68
6732.027
6827.744
6922.847
7017.353
7111.275
7204.63
7297.431
7389.692
7481.425
7572.644
7663.359
7753.582
7843.324
7932.596
8021.408
8109.769
8197.689
8285.177
8372.241
8458.891
8545.134
8630.977
8716.43
8801.498
8886.189
8970.511
9054.468
9138.069
9221.319
9304.225
9386.792
9469.025

800
810
820
830
840
850
860
870
880
890
900
910
920
930
940
950
960
970
980
990
1000

39050.09
39457.55
39864.18
40270
40675.02
41079.25
41482.69
41885.36
42287.28
42688.44
43088.86
43488.56
43887.53
44285.79
44683.34
45080.2
45476.38
45871.87
46266.7
46660.86
47054.37

16883.55
17029.7
17175.29
17320.34
17464.85
17608.84
17752.32
17895.28
18037.74
18179.7
18321.18
18462.18
18602.7
18742.76
18882.35
19021.49
19160.19
19298.44
19436.26
19573.64
19710.61

15880.93
16024.33
16167.23
16309.66
16451.61
16593.1
16734.13
16874.7
17014.83
17154.52
17293.78
17432.61
17571.02
17709.01
17846.59
17983.77
18120.55
18256.94
18392.94
18528.56
18663.8

9550.931
9632.515
9713.782
9794.737
9875.385
9955.731
10035.78
10115.53
10195
10274.18
10353.09
10431.71
10510.07
10588.15
10665.98
10743.54
10820.84
10897.89
10974.7
11051.25
11127.56

nesses in Angstroms
Oxide
3.113943
3.322219
3.462398
3.544068
3.623249
3.672098
3.724276
3.763428

Log Scale
Poly
3.176091
3.39794
3.518514
3.60206
3.672098
3.724276
3.763428
3.80618

Nitride
2.954243
3.146128
3.278754
3.361728
3.431364
3.477121
3.531479
3.568202