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REVISION RECORD
REV

ECO

DESCRIPTION

SUBMITTED

APP

WTP10369

Production Release

2/25/99

R. Reinisch

WTP10531

Updated Spec for FOF

9/06/00

R. Reinisch

ECR0043132

Released per ECR

05/06/05

P. Newby

ECR0051974

Corrected table formatting error on pg 14.


No changes to content of document

10/20/05

P. Newby

ECR0056629

Removed Matrix, added testing expiration,


added Appendix A, text corrections

03/21/06

P. Newby

ECR0061723

Add Section 4 CR Const. Exempt Mats., add review


of EHS CSOP 109, correct HEPA/ULPA in Section
6.1.4, update attachments in Appendix A

06/28/06

P. Newby

ECR0066500

Removed references to Tooling/Equipment

09/08/06

P. Newby

ECR0089093

Added value for Other Compounds, Total Outgassing to Table 2; updates to Section 13.1 Flammability Acceptance Criteria; fixed page number/section
number references; updated Appendix A: Construction Material Review to include Flammability Acceptance Criteria.

01/18/08

P. Newby

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Table of Contents
1
2
3
4
5
6
7
8
9
10
11
12
13
14

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PURPOSE .........................................................................................................3
SCOPE ..............................................................................................................3
ASSOCIATED DOCUMENTS ...........................................................................4
CLEANROOM CONSTRUCTION EXEMPT MATERIALS ................................5
SEAGATE APPROVED CONSTRUCTION MATERIALS .................................8
CONSTRUCTION MATERIAL REVIEW ...........................................................8
MATERIALS SUBMISSION PROCEDURE.......................................................9
FTIR ANALYSIS ..............................................................................................12
IONIC CONTAMINATION ...............................................................................12
DYNAMIC HEADSPACE OUTGASSING (DHS).............................................13
CORROSION ..................................................................................................15
ESD PROPERTIES .........................................................................................16
FIRE PROTECTION........................................................................................17
APPENDIX A ...................................................................................................18

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1 PURPOSE
This specification establishes the test methods and acceptance criteria to determine the cleanliness
level of materials used in clean room construction and renovation. Materials used for installing
equipment, structural repairs or modifications of walls, floors and ceilings (like temporary polyethylene
sheeting, or signs), must meet the acceptance criteria of this specification. Refer to Specification, Tapes
/ Labels, Cleanroom: 30825-001 for labels.

2 SCOPE
To provide Seagate-wide methods for determining the cleanliness, outgassing, electrical, flammability,
corrosion resistance and cleanability properties of materials, such as paint coatings, ceiling tiles, floor
tiles, sealants, caulk, mastics, foams, gaskets, ducting, greases, lubricants, and metal surfaces for
Seagate clean rooms; also applicable for plastics not in direct contact with disc drives or drive
components. All adhesives used in the fabrication of assemblies used in construction of the cleanroom,
for example in HEPA/ULPA equipment, must be in compliance to Seagate Specification 64902255 and
must be evaluated for fitness of use at relevant conditions of temperature and humidity. All adhesives
cured in the clean room must be individually approved in their specific application.
Material Test Data Expiration
The test data on the following materials expires from the last date tested:
Material

Test data expiration

Adhesives, lubes, greases, mastics, foams, caulks, paints, sealants, tapes

4 years

Tiles, filters, metals, alloys, plastics, ducts, hardware

8 years

NOTE: This specification does not cover performance testing of clean room equipment, like HEPA
filters or Filter Fan Units. A complete assembly of the clean room equipment must be delivered
to the Project Manager for performance testing.

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3 ASSOCIATED DOCUMENTS
64902255

Corporate General Specification for Adhesives

81453598

Pole Tip Corrosion Audit

20800014-001

Method, WW Non-Volatile Residue and Silicone Oil Analysis

20800012-001

Spec, World Wide Method, Ionic Contamination Analysis Procedure

20800020-001

Method, WW Dynamic Headspace Outgassing

20800021-001

Specification, World Wide, Copper Wire Corrosion Test Method

20800032-001

Method, W/W Quantitative Analysis of Organic Contamination

30228-001

Spec, Supplier Packaging Standard

35367-001

HEPA Filter, Cleanroom

ST1027
EHS SOP 109

Life Safety and Fire Protection System Design and Installation

ANSI ESD-S7.1

Resistive Characterization of Floor Materials

ASTM E-84-07

Standard Test Method for Surface Burning Characteristics of Building


Material

ASTM E-648-06a

Standard Test Method for Critical Radiant Flux of Floor-Covering


Systems Using a Radiant Heat Energy Source

ASTM E-662-06

Standard Test Method for Specific Optical Density of Smoke


Generated by Solid Materials

ASTM 1193
FM4910

Standard Specification for Reagent Water


Cleanroom Materials Flammability Test Protocol

NFPA 253

Standard Method of Test for Critical Radiant Flux of Floor Covering Systems
Using a Radiant Heat Energy Source

NFPA 255

Method of Test of Surface Burning Characteristics of Building


Materials, National Fire Protection Association

UL 2360

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EOS/ESD Control Program Specifications

Test Methods for Determining the Combustibility Characteristics of


Plastics Used in Semi-Conductor Tool Construction

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4 CLEANROOM CONSTRUCTION EXEMPT MATERIALS


This list is exempt from cleanliness testing and applies to Facilities applications ONLY. Any of these
materials used in production workstations or production equipment is subject to cleanliness and ESD
specifications. Also, any of these materials used outside the production tool/workstation but in the
moving air stream directly upstream of production tools/workstations is subject to Contamination
engineering review.

4.1 METALS
Stainless Steel
Stainless Steel with Halar or Teflon coating
Copper pipe or tubing
Brass pipe or tubing
Galvanized steel
Anodized aluminum, in general, as used in construction materials
Application: Galvanized steel is used in exhaust duct, occasionally for some limited
framework. Located in sub-fab and maintenance chases not in the main cleanroom. Occasionally may be painted, but usually is left uncoated and exposed.
Used to make up air duct, pipe support hangers, chilled water pipe, all-thread
hanger rods, Unistrut pipe supports, air plenum dividers (below and above clean
room envelop). All make up air handlers, transfer fans, etc. This material is the
basic backbone of the air distribution and heating/ cooling piping system in cleanrooms.
Restriction: Generally all the ductwork in the cleanroom is made of stainless steel - both
for cosmetic and performance reasons. Any transition to other material should be
made below the floor or in the maintenance chase.

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4.2 PLASTICS
4.2.1 Piping, Ducting and Tubing
PVC, CPVC, Corzan CPVC, UPVC
Restriction: Cannot be used for DI Water supply or recirculation due to chloride leaching.
Not for use in the cleanroom upstream of any process equipment or potential
product.
CDA (Clean Dry Air) Chemtrol piping, Chem-Aire
PVC Glues & Cements
Restriction: Not for use in the cleanroom upstream of any process equipment or potential
product.
PVDF (Polyvinylidene fluoride) Pipe & Fittings
Pheumatic control plastic tubing
ATS Duct Work
Application: Used in most wash operations, plating, wet bench exhaust. ATS is a non
combustible, chemical resistant duct specifically intended for exhaust ducting
without sprinkler heads (without sprinkler heads is not approved in all government regulatory jurisdictions). This is the preferred type of duct for cleanrooms.
The corrosion resistant interior liner consists of a synthetic veil and glass reinforcement and vinyl ester resin. The exterior is fabricated with fire resistant phenolic resin.
Restriction: Can only be installed when not exposed to the "clean side" of the production
space due to outgassing of resin.
Fiberglass Duct Work
Application: Used in most wash operations, plating, wet bench exhaust. Used because of
its corrosion resistance properties to convey a wide range of acid exhaust vapors.
The option to this is lined steel exhaust duct, generally more expensive. The duct
is installed below raised floor, interstitial space, or return air space. The exterior
surface is a resin rich glass finish. Some manufacturers apply a paint coating.
Restriction: Can only be installed when not exposed to the "clean side" of the production
space due to outgassing of resin and Silicon Dioxide.

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4.2.2 Sheet Materials with a surface area < 144 square inches
Polycarbonate sheet material
Plastic stick on labels for identification
Phenolic engraved plates for equipment identification
Electrical cable insulation (IT, electrical power, control)
Plastic Face Plate of the Electrical power, lighting & IT points and its power points

4.3 ALL GLASS, QUARTZ, and CRYSTAL iTEMS


4.4 ASSEMBLIES/COMPONENTS
Light fixtures supplied as an integral part of cleanroom ceiling system
Panduit wire management components
Screws, nuts, bolts made of stainless steel, anodized aluminum, copper, brass, PP, PVC
Electrical components used in power distribution systems
Painted Cast Iron for Pump/motor assembly, CDA filters
Restriction: Must be located where it will not be a contamination hazard to the process
Components used to install the Lighthouse CR Monitoring system
Application: Applies to components external to the process tool
Emergency exit or direction signage

4.5 COATINGS
Powder Coated Surfaces
Restriction: Surface areas of 250 square inches or less would be exempt while larger
surface areas would require testing.
Baked Enamel Finishes (volatiles released during bake)
Restriction: Surface areas of 250 square inches or less would be exempt while larger
surface areas would require testing.

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5 SEAGATE APPROVED CONSTRUCTION MATERIALS


Review the Approved Materials in the Lotus Notes database named: Cleanroom Construction Approved
Materials (Contam\clnstuff.nsf - for internal Seagate access) or Cleanroom Construction Approved
Material(CCAM) (for external supplier access). This database contains Materials and Test Data records
for approved cleanroom construction materials.
1. Contact Corporate Facilities or the Site Project Manager for the URL to access this database.
2. If a Material is recorded and Approved, use that material.
3. If no records are found for the material, go to Section 6 to submit the material for approval,
(process is summarized in the Flow Chart on pages 19-20) for use in a Seagate Cleanroom.

6 CONSTRUCTION MATERIAL REVIEW


Refer to Appendix A for Cleanroom Construction Material Qualification Process Flowchart, and
examples of Construction Material Review form, and Test Plan form.

6.1 Review the materials Material Safety Data Sheet (MSDS) with the below Cleanroom Construction Material Categories
If the MSDS meets all the requirements below, go to Section 7.
If the MSDS does not meet all the requirements below, Do Not Use product.
6.1.1 Air ducting, electrical panel boards, switch boxes, lighting fixtures, conduits, and similar items.
No exposed silicone sealants or silicone caulking compounds are permitted in clean rooms or
in sealing of air ducting, electrical panel boards, switch boxes, lighting fixtures, conduits, and
similar items.
6.1.2 Foams, tiles, gaskets, or molded plastics
No flame retardants such as organobromines, organophosphates compounds, or asbestos are
permitted in any foams, tiles, gaskets, or molded plastics used in the clean room.
6.1.3 Adhesives, sealants (especially compounds used to seal HEPA/ULPA filters in holding brackets)
No organophosphates, organochlorophosphates (for example: tricresylphosphate) are
permitted as flame retardants in any adhesives or sealants used in the clean room.

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6.1.4 HEPA and ULPA Filters


No filter media or finished filters supplied to Seagate can be exposed to or challenged by
phthalate esters (for example, DOP) at any time.
6.1.5 Tapes
All electrical insulation tape must use an approved pressure sensitive adhesive as defined by
Seagate Specification 64902255 and the level of outgassing products from the substrate tape
must not exceed the acceptance criteria in Section 10.1 of this specification.
6.1.6 Two Dissimilar Metals
If the sample is composed of two dissimilar metals in contact with one another, then perform
aqueous rinse for ions by the extractable ions method defined in section 7. If the sample fails
the requirements the part is rejected and further testing is unnecessary.

7 MATERIALS SUBMISSION PROCEDURE


Refer to Appendix A for Cleanroom Construction Material Qualification Process Flowchart, and
Cleanroom Construction Material Test Plan and Instructions.
The Cleanroom Construction Material Test Plan is a matrix of the tests required arranged by Cleanroom
Construction Material Category. The addresses and contacts for the correlated Testing Laboratories are
also listed. The supplier of the material is responsible for sample submissions and paying the laboratory
for the testing. Send softcopy (electronic files) test results as indicated on Test Plan form.
The final authorities are the Site Contamination and ESD Engineers, who may require testing for any
items that will come into the clean room.

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7.1 Guidelines for Submittal of Materials for Testing


The area tested should represent the actual exposed surface of the construction material and should
be representative of its application in the clean room.

7.2 Sample Submittal Routine


Submitters should be aware that all sealants and adhesives are cured for 24 hours at room temperature
prior to testing. Samples should be submitted by, or at the direction of, the relevant general contractor
or sub-contractor, and be in compliance with section 5.1.3. Unless a vendor is under Supplier Quality
Control, (per a Non-Disclosure Agreement filed with Seagate), all sealants and adhesives materials
must be re-submitted despite prior approval of the material for cleanroom use.

7.3 Documentation
Samples for testing must be submitted with a MSDS report and technical data sheet. A copy of the
MSDS report is required for each carrier handling the shipment as well as for Customs. Three extra sets
of the required documentation should be included. The cleanroom use application of the sample should
be clearly identified. A bound set of the required documentation should be sent separately to the test
laboratory manager and the designated Seagate Project Manager. In the case of stainless steel parts,
vendor must supply certification of passivation or electropolishing treatment.

7.4 Traceability
The sample manufacturers name, key contract, address and phone number should accompany the
shipment along with lot number, expiration date, and instructions for use. No testing will be done without
documentation indicating the traceability of the sample.

7.5 Sample Size


A minimum 0.1 sq. ft (93 sq. cm., or 15 sq. inches) of sample size is required for outgassing (DHS) and
solvent rinse (NVR) measurements. The actual sample size for DHS can be no smaller than 3.5 cm by
3.5 cm.

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7.6 Sample Preparation


Samples of sealants, caulking materials, greases, lubricants, and paint coatings must be prepared by
applying a thin film, on the dull side of a sheet of aluminum foil.
Material

Amount

Surface area

sealant, caulking material

2 - 3 mm thick

3.5 cm by 3.5 cm

grease, lubricant, paint coating

min. 10 mg, +/- 1mg

3.5 cm by 3.5 cm

Spread sample using a single edge razor blade. The actual cured sample size must be 3.5 cm by 3.5
cm while the aluminum foil must be no smaller than 4.0 cm by 4.0 cm to allow the excess foil to be
trimmed off without cutting into the test sample to avoid creating an exposed cut edge.
Grease, lubricant and paint coating samples must be spread out as a thin film with a sample weight
minimum of about 10 mg, +/- 1 mg.

7.7 Floor Tiles


Six tiles of 2 ft x 2 ft size are required for electrical point-to-point resistance measurements of the free
floor tiles per method ANSI ESD -S7.1. For testing of mounted tile samples, sufficient tile mastic must
be supplied to bond the six tiles in a floor assembly for compliance with this Specification, and
Specification ST1027. Samples of tile bead and adhesive must also be supplied for outgas testing.

7.8 Packaging and Handling of Samples


Care must be taken to prevent accidental exposure of the test materials to external contamination from
handling, shipping containers or packing materials to avoid cross contamination. The packing slip shall
indicate quantities, vendors part number, and be readily visible to the receiver. Polyethylene bags for
samples must be free of amides and silicones. Small samples must be packaged in glass vials with
screw cap seals. All samples will be rinsed with DI water, or wiped down with IPA/DI water wetted wipes,
to remove ionic contamination prior to testing at the lab. Aluminum foil can be used as packaging
material for samples. Use the dull side of the aluminum foil to contact the sample.

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8 FTIR ANALYSIS
Perform FTIR Analysis per 20800014-001 to detect siloxanes, amides, phthalate esters and flame
retardants in the following general categories, but not limited to:
Sealants, Caulking, Mastics, Adhesives (including tile beading)
Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating,
Non-Metallic Ceiling Components, Gasket, Foams, Molded
Plastics, HEPA & ULPA Filters, Plastics and Tapes

Metal, Alloys
(panels, sheets),
Dissimilar Metals

8.1 FTIR Acceptance Criteria


Determine the level of siloxanes (silicones), amides and phthalates by Fourier Transform Infrared
(FTIR).
Siloxanes, amides and phthalate ester compounds shall not exceed 0.2 ug/cm2. Flame retardants are
not permitted.

9 IONIC CONTAMINATION
Use the method defined in Seagate Specification 20800012-001 for aqueous extraction of ions.
In the following general categories, but not limited to:
Sealants, Caulking, Mastics, Adhesives (including tile beading) Metal, Alloys
Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating,
(panels, sheets),
Non-Metallic Ceiling Components, Gasket, Foams, Molded
Dissimilar Metals
Plastics, HEPA & ULPA Filters, Plastics and Tapes

Floor Tile

Conduct this test at 80 +/- 5 C for 1 hour. Minimum surface area required is 100 cm2. The volume of DI
water used should be sufficient to submerge the sample with a minimum of 20 ml of DI water used for
an extraction. The ratio of the volume of DI water used (in ml) to the total area (in cm2) of the parts
extracted must be as close to one as possible.

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9.1

Ionic Contamination Acceptance Criteria


Anions

Clean Room Material ug/cm2

Total Anions

0.20

Chloride

0.10

Sulfate

0.10

Bromide

0.10

Fluoride

0.10

Nitrate

0.10

Nitrite

0.10

Phosphate

0.10

Cations
Ammonium

Clean Room Material ug/cm2


0.20

TABLE 1: Maximum Acceptable Levels of Extractable Ions

10 DYNAMIC HEADSPACE OUTGASSING (DHS)


Identification and quantitative analysis using Specification 20800020-001 Method, WW Dynamic
Headspace Outgassing, in the following general categories, but not limited to:
Sealants, Caulking, Mastics, Adhesives (including tile beading)
Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating,
Non-Metallic Ceiling Components, Gasket, Foams, Molded
Plastics, HEPA & ULPA Filters, Plastics and Tapes

Floor Tile

For Cleanroom Construction Materials, sample must be heated at 50C+/- 2C (122F +/- 5F) for 4
hours which represents worst case Cleanroom conditions.

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10.1 DHS Acceptance Criteria


Outgassing products shall not exceed the limits shown below when tested per Seagate Specification
20800020-001. The acceptance criteria are reported in ng/cm2.

Controlled Chemicals

Teflon Jar ng/cm2

Sulfur Dioxide and Carbon Disulfide

15**

Siloxane

15

Amines (Tributylamine, N-phenyl benzenamine)

100

Ethyl Hexanol

1,000

Acrylic Acid and Methacrylic Acid

1,200

2-Phenyl 2-Propanol (Dimethyl Benzene


Methanol)

4,000

Methacrylates/Alkyl Acrylates

1,100

(HEMA, IBOMA, HPMA, Octyl Acrylate)

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BHT

400

2- Ethyl Hexanoic Acid

250

Amides (Acrylamide)

20

Organo Sulfur Compounds (Benzothiazole) **

30

Caprolactam

1,500

Benzoic Acid

1,000

Acetophenone (DMAP, CHAP)

1,300

Polyglycol, Dimethacrylate (TGDMA, PhDMA)

3,000

Other Esters (DOP,DBP)

700

Dioctyl Sebacate

100

Sulfur

10**

Organometallics (Tributyltin Chloride)

10

Hydrocarbons

20,000

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Controlled Chemicals

Teflon Jar ng/cm2

Other Acids

1,250*

Alcohols, >C7

400*

Hydroxybenzenes

400*

Glycol Ethers

200

N-substituted Pyrrolidinone

100

Other Compounds

1000

Total Outgassing

40,000

TABLE 2: - Acceptance Criteria for Outgassing


Note: The compounds in the table above are examples of organic chemical families.
* Calculated to Hexadecane
** If levels of organosulfur compounds exceed 30 ng/cm2, then Seagate Specification
20800021-001 must be performed. If the test sample passes the copper stain test, then the part
can be used in the clean room.

To use hexadecane as an internal standard, build calibration curves for controlled compounds using
hexadecane (1,000 ng) as an internal standard on ChemStation Software. For compounds not
controlled, assume hexadecane response factor of 1.

11 CORROSION
All stainless steel parts, for example: screws, nuts, panels, or sheets, must be passivated or
electropolished to prevent corrosion leading to the formation of rust particles. Passivation of free
machining stainless steels is a difficult process, and may result in the formation of corrosive byproducts.
The use of high Cr (Chromium), (>19%), stainless steels (such as DHS2 and SF20T) that contain Mo
(Molybdenum), greatly improves corrosion resistance. These stainless steels have been demonstrated
to meet the acceptance criteria of this specification.

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11.1 Pole Tip Corrosion Test


For all RHO facilities, all nonmetal components that will come into contact with drive components, or are
in the moving air stream, must be reviewed by the responsible Contamination Engineer as to need for
85C/85% RH testing per Process Number 81453598, Pole Tip Corrosion Audit. Those materials that
require this 85C/85% RH testing must pass this test to be approved for use. Additionally, 85C/85% RH
testing review of these materials is recommended for all process steps that involve exposed slider pole
tips, including HSA and relevant HDA operations.

12 ESD PROPERTIES
12.1 Acceptance Criteria for Conductive and Static Dissipative Materials
All non-metallic surfaces should be either conductive or dissipative. The electrical resistance of
conductive non-metallic surfaces in electrostatic discharge sensitive areas shall be < 1 x 105 ohms per
ST1027.
The electrical resistance of static dissipative non-metallic surfaces in clean room applications shall be
> 1 x 105 ohms and < 1 x 109 ohms per ST1027.
Vendor must provide certification of compliance with the above requirements.

12.2 Acceptance Criteria for Conductive Floor Tiles


The electrical resistance to a ground point must be measured using ANSI ESD S-7.1 Conductive
flooring per Seagate Specification ST 1027 (EOS/ESD Control Program) is defined as having a
resistance to a ground point of between 7.3 x 104 to 1.0 x 107 ohms.

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13 FIRE PROTECTION
13.1 Flammability Acceptance Criteria
Cleanroom walls, ceilings and partitions as well as assemblies using adhesives, must have a Flame
Spread Index (FSI) of 25 or less and a Smoke Density Index (SDI) of 50 or less when tested in
accordance with ASTM E-84/NFPA 255. Cleanroom floor materials must have a Critical Radiant Flux of
Class 1 when tested in accordance with ASTM E-648/NFPA 253 and a Smoke Density of 450 or less
when tested in accordance with ASTM E-662.
Per ASTM E-84/NFPA 255
Flame Spread Index

Smoke Density Index

Cleanroom walls, ceilings and partitions

25

50

Assemblies using adhesives

25

50

Critical Radiant Flux: Class 1


per ASTM E-648/NFPA 253

450
per ASTM E-662

Cleanroom floor

Flexible plastics used in cleanrooms as partitions for contamination control or other operational
purposes must meet FM4910 or UL2360 standards for flammability and smoke generation
requirements.
Where FM4910 or UL2360 compliant materials are not suitable for the application, PC350 plastic sheets
may be used. Where other materials are proposed for the application, a formal deviation request must
be submitted for approval per CSOPEHS109.
Supplier must provide applicable certification of compliance for the construction material per
requirements stated above.

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13.2 CSOP 109 Review


Materials and products used in Cleanroom construction must meet the requirements in EHS CSOP
109, Life Safety and Fire Protection System Design and Installation. Refer to Appendix A: Construction
Material Review Matrix: form example, page 21.

14 APPENDIX A
Cleanroom Construction Material Qualification Process: Flowchart, pages 19-20
The general process flow for a new material qualification.

Construction Material Review Matrix: form example, page 21


Initial set of questions about the new material to be answered before any testing is started.

Cleanroom Construction Test Plan & Instructions: form example, page 22


Lists the required tests for new material, and the approved testing laboratories to use.

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EXAMPLE

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EXAMPLE

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