Beruflich Dokumente
Kultur Dokumente
0522
Mario Kupnik
and Butrus T. Khuri-Yakub
E. L. Ginzton Laboratory
Stanford University
Stanford, California 94305-4088
I. D ERIVING
THE
(1)
P0 a4
r2
r2
(1 2 )2 = wpk (1 2 )2
64D
a
a
(2)
Et3
12(1 2 )
Fig. 1.
(3)
P0 a4
(4)
64D
Averaging the deflection over the entire plate area shows that
the average plate deflection equals 1/3 of the peak deflection.
Ra
2rw(r)dr
P0 a4
wpk
=
=
(5)
wavg = 0
2
a
192D
3
wpk =
Lohfink and Eccardt [2] refer to the equation for the plates
deflection as the shape function. We assume that the shape
function given by (2) for a uniform pressure P holds for all
stable deflections despite the nonuniformity of the electrical
forcethe electrical force is strongest at the plates center,
where the top and bottom electrodes are closest. This assumption simplifies deriving equivalent mechanical parameters and
accurately predicts the plate displacement due to an applied
voltage.
From the shape function and the CMUT gap, g0 , we can
find the CMUTs electrical capacitance, C, as a function of
plate displacement.
q
wpk
2
Z a
a
arctanh(
0
g0 )
2r0
dr
=
C=
2
r 2
g0 wpk
0 g0 wpk (1 a2 )
(6)
2111
m)
Peak Displacement (
150
100
Linear, FEM
Linear, Analytical
50
Nonlinear, FEM
Nonlinear, Analytical
12
16
20
Normalized Pressure
m=
(a)
Linear, Analytical
Nonlinear, FEM
Nonlinear, Analytical
100
50
0
12
16
20
Normalized Pressure
(b)
Rb = Zrad a2
3wavg
g0 )
C
2wavg
0 a2
d2 C
30 a2
=
C
=
3w
2
2 (1
dwavg
2g02 wavg (1 gavg
)2
2g0 wavg
0
C
1
dC
+ 2
2wavg
2wavg dwavg
(7)
a2
a4
1
= Fm
= Fm
192D
192D
k1
k1 =
192D
a2
t
m0
= 1.84
0
Rb
Rmed
s
Rb2
d = 0 1
4k1 m
Q=
(11)
(15)
(16)
(10)
From a design perspective, we often specify transducer requirements in terms of center frequency and bandwidth. From
the expressions for k, m, and Rb , we can derive expressions for
the CMUTs natural resonance frequency, damped resonance
frequency, and quality factor. The natural resonance frequency,
given by (12), equals the plates resonance frequency in the
absence of damping. When the quality factor, given by (15),
is greater than 0.5, we use the damped resonance frequency,
given by (16). If the quality factor is less than 0.5, the system
is overdamped and the resonance frequency is undefined.
For those designs, we can use the quality factor and natural
resonance frequency as starting points and use the small-signal
equivalent circuit model to evaluate the frequency response.
(8)
(9)
(14)
3wavg
g0 )
(13)
Linear, FEM
150
k1
= 1.84a2 t
02
AND
P ULL -I N
2112
(18)
(19)
(20)
=0
2
2
dwavg dwavg
dwavg
dwavg
d2 C
dC
Fm 2 + kef f
=0
dwavg
dwavg
(26)
g03 Q0 Rb
(27)
A0
g03 k1
= 0.39
A0
(21)
(22)
wP I,pk
|k3 =0, Patm =0 = 0.46
g0
pi
dwavg
By numerically solving (24) and (25), we can find the pullin voltage and the plate deflection at the pull-in voltage. With
some simplifying assumptions, we can also find closed-form
analytical solutions for the pull-point. For example, for highfrequency immersion devices we can neglect k3 and watm .
With these assumptions, we find that at the pull-in point the
peak plate deflection equals 46% of the gap and that (29) gives
the pull-in voltage.
pi
dwavg
VP I |k3 =0 =
(28)
2(k1 wP I Fatm )
C (wP I )
(29)
THE
(23)
(24)
2113
V
F
= AB =
V
Q g=0
F
Q
g=0
V
g Q=0
F
g Q=0
Q
g
(30)
(.
30
m)
25
Gap, g
/. 0
1
40
60
80 100
Membrane Thickness, t (
m)
pk
8
0
50
-2
12
-4
6
50
m)
(d)
(V)
-10
60
50
700
650
-5
pi
Pull-In Voltage, V
0
pi
-5
750
100
Membrane Thickness, t (
50
(e)
m)
40
80
20
0
60
80
100
1
= keq = A22 (1 ke2 )
Cm
(37)
Lm = m
(38)
(g)
Fig. 3. Comparison of FEM (circles) and spring-mass-damper (dots) model
results.
A22
(36)
ACKNOWLEDGMENT
Membrane Thickness, t ( m)
A12 = A21 =
A211
n2
=
A12 A22
CA22
V. C ONCLUSION
Error (%)
60
160
40
(35)
80
20
A12
= V C
A11
(f)
240
(34)
100
Membrane Thickness, t (
m)
Error (%)
75
Error (%)
(%)
100
Membrane Thickness, t (
10
ke2 =
-8
0
(c)
90
C0 = C
n=
-6
100
()
m)
'
-
80 100
18
Capacitance, C (pF)
m)
60
Error (%)
16
12
24
Error (%)
Center Deflection, w
40
(b)
Membrane Thickness, t ( m)
w /g
20
Membrane Thickness, t (
(a)
#$%
20
15
20
!" +
,
/ !&
-
Fig. 4.
0
Frequency (kHz)
dF
Q
dV
=
= 2 C
dg
dQ
C
(32)
R EFERENCES
[1] S. Timoshenko and S. Woinowsky-Kreiger, Theory of Plates and Shells,
2nd ed. New York: McGraw-Hill Higher Education, 1964.
[2] A. Lohfink and P. C. Eccardt, Linear and nonlinear equivalent circuit
modeling of CMUTs, IEEE Transactions on Ultrasonics, Ferroelectrics
and Frequency Control, vol. 52, no. 12, pp. 21632172, 2005.
[3] A. W. Leissa, Vibration of Plates. Washington D.C.: NASA, 1969.
[4] Y. Nemirovsky and O. Bochobza-Degani, A methodology and model for
the pull-in parameters of electrostatic actuators, Journal of Microelectromechanical Systems, vol. 10, no. 4, pp. 601615, 2001.
[5] S. D. Senturia, Microsystem Design.
New York: Kluwer Academic
Publishers, 2001.
F
dFe
1 2 2C 2
C
=
=
k
=
k
+
Q
(
)
ef
f
g Q=0
wavg
2
C3
C2
(33)
2114