CP 060 en Thermovac

THERMOVAC Transmitters
TTR 91 (S)N / TTR 96 N / TTR 911 (C)N / TTR 916 N

The THERMOVAC Transmitters are
active sensors using the unique
MEMS-Pirani technology (Micro-Electro-Mechanical-Systems). They offer
analog voltage output and the S-versions offer set point relays for improved
process control. For chemical and
aggressive applications, the C-versions
are equipped with a Parylene HTcoated sensor. The THERMOVAC
series is also equipped with a LED-ring
(360) showing the status of the sensor.
The TTR 911 N and 916 N have a
touch display and/or digital interfaces
available.
THERMOVAC Transmitter TTR 91 N / 96 N / 911 N / 916 N, right: with display
Advantages to the User
Typical Applications
Sensor
- Very robust MEMS-Pirani solid state

sensor resilient to vibration and
shock venting
The THERMOVAC Transmitters offer a

high degree of versatility. They are suited for applications in the medium and
rough vacuum range.
Typical applications are:
The THERMOVAC transmitters measurement principle is based on thermal

conductivity. The transmitters are
equipped with a MEMS-Pirani sensing
cell that consists of a silicon chip with
a heated resistive element.
The THERMOVAC transmitters with the
coated MEMS-Pirani are well suited for
harsh processes and therefore more
robust than the uncoated versions.
Built-in relays allow switching functions
to be performed directly by the transmitter, without the need of a programmable control.
An integration of the transmitters in
programmable control systems is facilitated by the linear characteristic, which
can be defined by entering a simple
equation into a PLC or computer.
- Fast response and high accuracy

- Individually temperature compensated to ensure stable measurements
- Analytical instrumentation
- High reproducibility
- Research and development
- Measurement signal insensitive to

mounting position
- Vacuum Drying
- Robust stainless steel housing
- Activation of UHV gauges
- Available with display for pressure

units, set point parameters and
operation status
- System process control
- Optional Computer interfaces:

EtherCAT and RS 232
- Long tube version for reaching higher chamber bakeout temperatures
- LED ring to indicate status of the
sensor
Parylene HT is a registered trademark of
Speciality Coating Systems Inc.
- Process industry
- Coated versions for improved
chemical resistance
- General foreline vacuum measurement
11
10
V DC
8
Analog Out
- Available with up to three set point

relays for improved process control
- Controlling of ionization gauges
7
6
5
4
3
2
1
0
10-5
10-4
10-3
10-2
10-1
100
Pressure
101
102
103 mbar 104
Characteristic of the THERMOVAC Transmitters TTR 91 (S)N / TTR 96 N and TTR 911 (C)N / TTR 916 N
Oerlikon Leybold Vacuum Full Line Catalog 2016
leybold
39,30
34,10
12,84
22,28
30
115,00
52,29
33,78
DN 16 ISO-KF
DN 16 CF
33,78
10,29
DN 16 CF
1/8" NPT
15,90
16,65
Measuring,
controlling
40,75
Dimensional drawings for the THERMOVAC Transmitters TTR 91 (S)N / TTR 96 N
30,16
51,16
59,48
62,15
30,11
54,48
34,00
56,65
31,90
15,04
15,04
15,04
30
30
30
40,75
9,20
46
32,40
9,20
12,70
6,34
52,85
Dimensional drawings for the THERMOVAC Transmitters TTR 911 (C)N / TTR 916 N
left: with display, middle: with RS 232, right: with EtherCAT
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Technical Data

TTR 91 N
mbar (Torr)
Measurement range
Measurement uncertainty (typical)
Repeatability (typical)
1)
1)
Power consumption
5 x 10-4 to 1 x 10-3 10 % of reading

1 x 10-3 to 100 5 % of reading
100 to atm 25 % of reading
mbar

MEMS-Pirani

Analog output

Resolution
Impedance
Update rate
Interfaces
MEMS-Pirani
Coated MEMS-Pirani
Thermal conductivity according to Pirani
V DC
9 - 30
< 1.2
Electrical connection
V DC
bit
Hz
TTR 96 N
5.0 x 10-5 to Atmosphere (3.75 x 10-5 to Atmosphere)
mbar

Sensor
Measurement principle
Supply voltage
THERMOVAC Transmitter
TTR 91 SN
FCC68 / RJ45
Vout = log10 (Pmbar) x 1.286 + 6.143

1.1 to 10

16

100

16

N / A
Set point
2.7 x 10-4 to 1000 (2.0 x 10-4 to 750)
Range
mbar (Torr)

0 2 2
Relay

1 A @ 30 V AC/ DC, resistive load
Relay contact rating
100
Relay contact resistance, max.
m
Relay contact endurance, min.

100 000
1.0 A@ 30 V DC load

2 000 000
0.2 A@ 30 V DC load
Status indicators
Max. cable length
Overpressure limit

m
bar
LED-ring (360)
100
6
Operating temperature range
C (F)
Storage temperature range
C (F)
Max. bakeout temperature
C (F)
Max. rel. humidity
% n.c.
0 to 40 (32 to 104)
-20 to +65 (-4 to 149)
85 (185), non-operating
95
Installation orientation
Any
Materials exposed to vacuum
304 stainless steel, Silicon, SiO2, Si3N4,1

Tin, Gold, Viton, low out gassing epoxy resin
Dead volume (DN 16 ISO-KF), approx. cm3
2.80
170
Protection class
40
CE certification
Controller type
Weight (DN 16 ISO-KF)
1)
304 stainless steel,

Viton, Parylene-HT
EMC Directive 2004/108/EEC
DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE
Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment
leybold
Technical Data


TTR 911 (C/S)N
TTR 916 N
mbar (Torr)

1)
1)
mbar

5.0 x 10-4 to 1.0 x 10-3 10 % of reading

1.0 x 10-3 to 100 5 % of reading
100 to atm 25 % of reading
mbar

911 N: MEMS-Pirani
Coated MEMS-Pirani

911 NC: Coated MEMS-Pirani

Thermal conductivity according to Pirani
Sensor
Supply voltage
Power consumption
V DC
9 - 30
< 1.2

FCC68 / RJ45
Analog output

Resolution
Impedance
Update rate
V DC
bit
Hz
Set point
Range
mbar (Torr)

Relay
m

1.0 A@ 30 V DC load

0.2 A@ 30 V DC load
TTR 911 N Display: N / A

TTR 911 (S)N: RS 232
TTR 911 (C)N: EtherCAT / Profibus
TTR 916 N Display: N / A

1.0 x 10-4 to 1000 (0.75 x 10-5 to 750) [Profibus]
2.7 x 10-4 to 1000 (2.0 x 10-4 to 750) [RS 232 / EtherCAT / Display]

2 [Profibus / EtherCAT / Display] / 3 [RS 232]


100

100 000
2 000 000

LED-ring (360)
Status indicators
Overpressure limit

Vout = log10 (Pmbar) x 1.286 + 6.143

1.1 to 10
16
100
16

Interfaces
Max. cable length
5.0 x 10-5 to Atmosphere (3.75 x 10-5 to Atmosphere)

1.0 x 10-5 to Atmosphere (0.75 x 10-6 to Atmosphere) [RS 232 / EtherCAT / Display]
100
m
6
bar
0 to 40 (32 to 104)
C (F)
-20 to +65 (-4 to 149)

C (F)
C (F)
Max. rel. humidity
% n.c.
0 - 95
Any


Dead volume (DN 16 ISO-KF), approx.
Measuring,
controlling
Measurement range
304 stainless steel, Silicon, SiO2, Si3N4, Tin, Gold, Viton, low out gassing epoxy resin
304 stainless steel, Viton, Parylene-HT
2.80
cm3
Weight (DN 16 ISO-KF, RS 232 w/o Display) g

168
Protection class
40
IP
CE certification
Controller type
1)
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Ordering Information
TTR 91 (S)N / TTR 96 N
Part No.
Without switching threshold

TTR 91 N, DN 16 ISO-KF
TTR 91 N, 1/8" NPT
TTR 91 N, DN 16 CF
TTR 91 N, 1/2" Tube, DN 16 CF
bakeable
With switching threshold
TTR 91 SN, DN 16 ISO-KF, 2SP
TTR 91 SN, 1/8" NPT, 2SP
TTR 96 N, DN 16 ISO-KF, 2SP
TTR 96 N, 1/2" Tube, DN 16 CF
bakeable
Calibration
230035V02
230038V02
230036V02
230037V02
230040V02
230043V02
230045V02
230047V02
see chapter Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service
Connection cable, FCC 68 on both ends,

8-way, shielded
005 m
010 m
015 m
020 m
030 m
050 m
075 m
100 m
Type A
124 26
230012
12427
12428
12429
12431
12432
12433
Accessories, optional
Spiral tube DN 16 ISO-KF
230082
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TTR 911 (C/S)N
TTR 916 N
Part No.
TTR 911 N, DN 16 ISO-KF, EtherCAT
230700V02
TTR 911 CN, DN 16 ISO-KF, EtherCAT
230701V02
TTR 911 SN, DN 16 ISO-KF, RS 232
89660V02
TTR 911 C, DN 16 ISO-KF
89658V02
TTR 911 N, DN 16 ISO-KF, with display
89654V02
TTR 916 N, DN 16 ISO-KF,

with display and coating
89656V02
Calibration
230650V02
230651V02
See Section Miscellaneous, paragraph Oerlikon Leybold Vacuum calibration service

8-way, shielded
005 m
010 m
015 m
020 m
030 m
050 m
075 m
100 m
Type A
124 26
230012
12427
12428
12429
12431
12432
12433
Optional accessories
230 082
leybold
Measuring,
controlling
Replacement sensor, DN 16 ISO-KF

TTR 916 N
TTR 916 CN
THERMOVAC Transmitters
TTR 101 (S)N
The THERMOVAC TTR 101 N models

utilize a thermal conductivity MEMSPirani combined with a silicon membrane Piezo. They offer superior accuracy and gas type independent readings between 10 mbar and 1500 mbar.
THERMOVAC Transmitter TTR 101 N, right: with display
Sensor
- Wide measurement range combining two sensor technologies into a

single output
The THERMOVAC TTR 101 N transmitters can be used in any application that
requires absolute pressure measurement and switching capabilities.
Dust and other particles may cause

measurement errors and reduced lifetime. Therefore we recommend the
installation of a fine filter in critical applications.
Fine filters are listed in chapter General, para. Connection Accessories for
Small Flanges.
- Robust MEMS-Pirani and Piezo

solid state sensors resilient to vibration and shock venting
- Rapid cycling by fast and repeatable
pressure measurements
- General vacuum measurement and

control from low to medium vacuum
pressure
- Safety circuits in vacuum systems
- High reproducibility and high accuracy
- Control of high vacuum ionization

gauges
- Gas type independent from 10 to

1500 mbar
- Analytical Instrumentation
- Autozero of Piezo
- Vacuum Drying
- Individually temperature compensated to ensure stable measurements
- System process control

mounting position
- Coating
- Available with display for pressure

units, set point parameters and
operation status
- Research and development
- Vacuum furnaces and sintering

- Process industry
- Available with up to three set point

relays for improved process control
sensor
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30,16
51,16
59,48
39,30
62,15
56,65
54,48
34,10
15,04
30
12,84
15,04
52,29
30
DN 16 ISO-KF
32,40
DN 16 ISO-KF
12,70
1/8" NPT
15,90
54,49
30
12,70
9,20
1/8" NPT
12,70
6,34
16,65
46
52,85
40,75
Dimensional drawing for theTHERMOVAC Transmitters TTR 101 (S) N (left) and TTR 101 N Display (right)
34,00
31,90
15,04
7
6
5
4
3
30
40,75
2
1
0
10-5
10-4
10-3
10-2
10-1
100
Pressure
101
102
103 mbar 104
Characteristic of the THERMOVAC Transmitters TTR 101 (S)N
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Measuring,
controlling
30,11
11
10
V DC
8
Analog Out
Dimensional drawing for the TTR 101 N (EtherCAT)
9,20
Dimensional drawing for the TTR 101 N (RS 232)
Technical Data
TTR 101 (S)N
Measurement range
mbar (Torr)
1)
mbar

1)
mbar
Power consumption
MEMS-Pirani and Piezo

Thermal conductivity combined with Piezo
9 - 30
V DC
< 1.2 [2 for EtherCAT]

1x FFC68 or 2x FCC68 + 1x D-Sub 15 PIN
Analog output

Resolution
Impedance
Update rate
5 x 10-4 to 1 x 10-3 10 % of reading

1 x 10-3 to 100 5 % of reading [RS 232 (Pirani) / EtherCAT (Pirani)]
0.1 x 10 1 % of reading 0.5 mbar [RS 232 (Piezo) / EtherCAT (Piezo)]
10 to 1333 0.75 % of reading [RS 232 (Piezo) / EtherCAT (Piezo)]
11 to 1333 0.75 % of reading
100 to atm. 25 % of reading [RS 232 (Pirani) / EtherCAT (Pirani)]
1333 to 1500 2 % of reading
1333 to 2000 2 % of reading [RS 232 (Piezo) / EtherCAT (Piezo) / Display]
1 x 10-3 to 100 2 % of reading [RS 232 (Pirani) / EtherCAT (Pirani)]
10 to 1067 0.2 % of reading / EtherCAT (Piezo)

11 to 1067 0.2 % of reading
Sensor
101 (S)N
101 N, EtherCAT
101 N, Display
101 N, Profibus
101 N, RS 232
Supply voltage
5 x 10-5 to 1500 (3.75 x 10-5 to 1125)

1 x 10-5 to 2000 (0.75 x 10-5 to 1500) [RS 232 / Display / EtherCAT]
Vout = log10 (Pmbar) x 1.286 + 6.143

0.61 to 10.23
16
100
16
V DC
bit
Hz

RS 232 / Display / EtherCAT / Profibus
Interfaces
Set point
Range
mbar (Torr) 2.7 x 10-4 to 1000 (2.7 x 10-4 to 750) / 1.0 x 10-4 to 1000 (0.75 x 10-4 to 750) [RS 232 / Display]
2 / 3 [RS 232]
Relay
1 A @ 30 V AC/ DC, resistive load / [EtherCAT: N/A]
m
100 / [EtherCAT: N/A]
100 000 / [EtherCAT: N/A]
1.0 A@ 30 V DC load
2 000 000 / [EtherCAT: N/A]
0.2 A@ 30 V DC load

LED-ring (360)
Status indicators
Max. cable length
Overpressure limit
100
m
2
bar
0 to 40 (32 to 104)
C (F)
-20 to +65 (-4 to 149)

C (F)
C (F)
Max. rel. humidity
% n.c.
0 - 95
Any
Materials exposed to vacuum for Part-Nos.
230350V02, 230351V02, 230352V02, 230353V02,
230354V02, 230355V02, 230356V02, 230358V02,

230366V02, 230702V02
304 stainless steel, Silicon, SiO2, Si3N4, Tin, Gold, Viton, low out gassing epoxy resin
2.8
Protection class
g 168
40
IP
CE certification
Controller type
1)
leybold
TTR 101 (S)N
Part No.
TTR 101 N, DN 16 ISO-KF
230350V02
TTR 101 N, 1/8" NPT
230351V02
TTR 101 N, DN 16 ISO-KF, 2SP
230352V02
TTR 101 N, 1/8" NPT, 2SP
230353V02
TTR 101 N, DN 16 ISO-KF, Display
230354V02
TTR 101 N, 1/8" NPT, Display
230355V02
TTR 101 N, DN 16 ISO-KF, Display, 2SP
230356V02
TTR 101 N, DN 16 ISO-KF, RS 232, 3SP
230366V02
TTR 101 N, DN 16 ISO-KF, EtherCAT, 3SP
230370V02
Replacement sensor
DN 16 ISO-KF
1/8" NPT
230361V02
230362V02
Calibration
883 96
See Section Miscellaneous, paragraph Oerlikon Leybold Vacuum calibration service

8-way, shielded
005 m
010 m
015 m
020 m
030 m
050 m
075 m
100 m
Type A
124 26
230012
12427
12428
12429
12431
12432
12433
Optional accessories
230 082
leybold
Measuring,
controlling
Centering ring with fine filter 16 ISO-KF
10
Loadlock Transmitter
THERMOVAC TTR 200 N
PENNINGVAC PTR 200 N
The TTR 200 N and PTR 200 N combine different measurement technologies in one housing making them the
perfect gauges for load lock applications. The transmitters offer a wide
absolute measurement range and a differential range of -1013 to 1013 mbar
(relative to ambient pressure). The highly accurate differential sensor is ideal
for loadlock control since it is insensitive to changes in ambient pressure
conditions. Efficient loadlock control will
improve throughput due to reduced
cycle time.
THERMOVAC Transmitter TTR 200 N (left) and PENNINGVAC Transmitter PTR 200 N (right)
Option
- Fast, accurate and repeatable pressure measurements reduce process

cycle time
- Load lock applications
- Gas type independent pressure

measurements from 50 mbar to
1300 mbar
- Processes requiring both absolute

pressure measurement and atmospheric switching capabilities
For protection of the sensor TTR 200 N

and PTR 200 N against contamination,
radiation and other disturbing factors
the installation of a baffle is recom
mended.
- Combination of absolute and differential measurements offer unprecedented loadlock control
- Analytical equipment (e. g. mass

spectrometer control)
- Three integrated setpoints
- Coating Systems (e. g. UNIVEX)

- Vacuum chamber production
- Scanning electron microscopes
Two types of baffles are available:

A build-in version for CF connections is
mounted in the sensor; the baffle for
ISO-KF connections is integrated in a
centering ring.
- Up to three sensors in one housing

for a wide measurement range
mounting position
- Ease of operation via analog output
and digital communication
sensor
Baffle DN 25 ISO-KF, with centering ring,

Part No. 230 078
11
leybold
30,11
30,11
85,00
82,90
82,90
10,80
15,04
40
30
40,75
40,75
Dimensional drawing for the THERMOVAC

transmitter TTR 200 N
Measuring,
controlling
9,20
9,20
Dimensional drawing for the PENNINGVAC

transmitter PTR 200 N
11
10
V DC
8
Analog Out
7
6
5
4
3
2
1
0
10-5
10-4
10-3
10-2
10-1
100
Pressure
101
102
103 mbar 104
Characteristic of the THERMOVAC Transmitter TTR 200 N
Analog Out
9
V DC
7
6
5
4
3
2
1
0
10-9
10-8
10-7
10-6
10-5
10-4
Pressure
10-3
10-2
10-1
100
101
102
103 mbar 104
Characteristic of the PENNINGVAC transmitter PTR 200 N
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12


TTR 200 N
PTR 200 N
Technical Data
Measurement range (N2 and air) mbar (Torr) 5.0 x 10-5 to 1500 (3.75 x 10-5 to 1125)
absolute
mbar
5 x 10-5 to 1500 [RS 232]

(Torr)
(3.75 x 10-5 to 1125) [RS 232]
differential
mbar
-1013 to 1013 [RS 232]

(Torr)
(-760 to 760) [RS 232]
Cold cathode
MEMS-Pirani
Diff. Piezo
Penning

MEMS-Pirani

Diff. Piezo
1.0 x 10-8 to 1500 (0.75 x 10-5 to 1125)

1 x 10-8 to atm. [RS 232]
(0.75 x 10-8 to atm.) [RS 232]
-1013 to 1013 [RS 232]
(-760 to 760) [RS 232]
1)
mbar

1 x 10-8 to 1 x 10-3 30 % of reading

1 x 10-4 to 1 x 10-3 10 % of reading


100 to atm. 25 % of reading
mbar 1 x 10-4 to 1 x 10-3 10 % of reading
1 x 10-4 to 1 x 10-3 10 % of reading


mbar -10 to 10 10 % of reading 0.67 mbar - 10 to 10 10 % of reading 0.67 mbar

-100 to -10 8 % of reading

-1013 to -100 1 % of reading
-1013 to -100 1 % of reading

1)
mbar
mbar
mbar
1 x 10-8 to 1 x 10-3 30 % of reading


MEMS-Pirani and Diff. Piezo Cold cathode, MEMS-Pirani and Diff. Piezo
Thermal conductivity, combined with Piezo Thermal conductivity, combined with Piezo

and cold cathode ionization
Sensor
Supply voltage

-1013 to 10 1 % of reading
V DC
9 - 30
9 - 30
Power consumption
Analog output

Resolution
Impedance
Update rate
Vout = log 0.6 (Pmbar) + 6.8

Vout = log10 (Pmbar) x 1.286 + 6.143

0.61 to 10.23
2.0 to 8.667
16 16
100 100
16 16
Interfaces
V DC
bit
Hz
< 1.2 < 2

D-Sub 15 pin
D-Sub 15 pin
RS 232
RS 232
Set point
Range
Absolute
mbar (Torr) 1 x 10-4 to 1333 (0.75 x 10-4 to 1000) 1 x 10-8 to 1333 (0.75 x 10-8 to 1000)
-1013 to 133 (-775 to 100) -1013 to 133 (-775 to 100)
Differential
mbar (Torr)
3 3
Relay

100
100
m

100 000
100 000
1.0 A@ 30 V DC load

2 000 000
2 000 000
0.2 A@ 30 V DC load
Status indicators
Max. cable length
Overpressure limit
LED-ring (360) LED-ring (360)

20 20
bar 2 2
C (F)
C (F)
0 to 40 (32 to 104)
-20 to +65 (-4 to 149) -20 to +65 (-4 to 149)
C (F)
Max. rel. humidity
% n.c.
0 - 95

304 stainless steel, Silicon,
SiO2, Si3N4, Tin, Gold, Viton,

low out gassing epoxy resin


Protection class
0 - 95
Any Any
304 stainless steel, 403 stainless steel,
Ceramic (Al2O3), Silicon, SiO2,
Si3N4, Tin, Gold, Viton, Titanium,
low out gassing epoxy resin
2.8 28.6
IP 40 40

Controller type
13
g 305 321
CE certification
1)
0 to 40 (32 to 104)
DISPLAY ONE / TWO / THREE and

GRAPHIX ONE / TWO / THREE

DISPLAY ONE / TWO / THREE and
GRAPHIX ONE / TWO / THREE
leybold


TTR 200 N
PTR 200 N

Part No.
Part No.
THERMOVAC TTR 200 N

DN 16 ISO-KF, 3SP
230365V02
PENNINGVAC PTR 200 N

DN 25 ISO-KF, RS 232, 3 SP

230087V02
Replacement cathode plate
EK16991V02
Replacement anode ring
20028711V02
Baffle, with centering ring (FPM (FKM))

DN 25 ISO-KF

230 078
883 96
Measuring,
controlling
Centering ring with fine filter DN 16 ISO-KF
leybold
14

CP 060 en Thermovac

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THERMOVAC Transmitters

TTR 91 (S)N / TTR 96 N / TTR 911 (C)N / TTR 916 N

THERMOVAC Transmitter TTR 91 N / 96 N / 911 N / 916 N, right: with display

Advantages to the User

- Very robust MEMS-Pirani solid state

The THERMOVAC Transmitters offer a

The THERMOVAC transmitters measurement principle is based on thermal

- Fast response and high accuracy

- Research and development

- Measurement signal insensitive to

- Robust stainless steel housing

- Activation of UHV gauges

- Available with display for pressure

- System process control

- Optional Computer interfaces:

- Available with up to three set point

- Controlling of ionization gauges

103 mbar 104

Oerlikon Leybold Vacuum Full Line Catalog 2016

Oerlikon Leybold Vacuum Full Line Catalog 2016

Measurement uncertainty (typical)

5 x 10-4 to 1 x 10-3 10 % of reading

1 x 10-3 to 100 2 % of reading

5.0 x 10-5 to Atmosphere (3.75 x 10-5 to Atmosphere)

Vout = log10 (Pmbar) x 1.286 + 6.143

Operating temperature range

Storage temperature range

Max. bakeout temperature

Max. rel. humidity

Materials exposed to vacuum

304 stainless steel, Silicon, SiO2, Si3N4,1

Dead volume (DN 16 ISO-KF), approx. cm3

Weight (DN 16 ISO-KF)

304 stainless steel,

EMC Directive 2004/108/EEC

DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

Oerlikon Leybold Vacuum Full Line Catalog 2016

Measurement uncertainty (typical)

5.0 x 10-4 to 1.0 x 10-3 10 % of reading

1 x 10-3 to 100 2 % of reading

Thermal conductivity according to Pirani

TTR 911 N Display: N / A

TTR 916 N Display: N / A

Max. cable length

5.0 x 10-5 to Atmosphere (3.75 x 10-5 to Atmosphere)

Operating temperature range

Storage temperature range

-20 to +65 (-4 to 149)

Max. bakeout temperature

Max. rel. humidity

Materials exposed to vacuum

Weight (DN 16 ISO-KF, RS 232 w/o Display) g

EMC Directive 2004/108/EEC

DISPLAY ONE / TWO / THREE and GRAPHIX ONE / TWO / THREE

Oerlikon Leybold Vacuum Full Line Catalog 2016

Without switching threshold

Connection cable, FCC 68 on both ends,

Oerlikon Leybold Vacuum Full Line Catalog 2016

TTR 911 CN, DN 16 ISO-KF, EtherCAT

TTR 911 SN, DN 16 ISO-KF, RS 232

TTR 911 C, DN 16 ISO-KF

TTR 911 N, DN 16 ISO-KF, with display

TTR 916 N, DN 16 ISO-KF,