Beruflich Dokumente
Kultur Dokumente
2014
Image Sensors
Various types of image sensors covering a wide spectral response range for photometry
Image sensors
Various types of image sensors
covering a wide spectral
response range for photometry
H A M A M AT S U d e v e l o p s a n d p r o d u c e s a d vanced image sensors for measurement applications in spectral and energy ranges including infrared, visible, ultraviolet, vacuum ultraviolet, soft X-rays and hard X-rays. We provide
a full lineup of image sensors to precisely
match the wavelength of interest and application. HAMAMATSU complies with customer
needs such as for different window materials,
filters or fiber couplings. We also offer easyto-use driver circuits for device evaluation and
sensor/driver modules for OEM applications
as well as multichannel detector heads.
Contents
Infrared detectors
13
Image sensor
CMOS area image sensors
15
16
24
17
31
22
26
27
20
21
35
37
37
40
Infrared detectors
Feature
Lineup
Page
For spectrophotometry
For spectrophotometry (High resolution type)
For spectrophotometry (Low etaloning type)
For spectrophotometry (IR-enhanced type)
For spectrophotometry (Large full well type)
For ICP spectrophotometry
For scientific measurement
Fully-depleted CCD area image sensor
Low dark current and low noise CCD area image sensors For spectrophotometry
are ideal for scientific measurement instruments.
For scientific measurement
These are APS type CMOS area image sensors with high SXGA format type
sensitivity in the near infrared region.
VGA format type
7 to 12
13, 14
15
17 to 19
20
21
CCD linear image sensors for industry These are CCD linear image sensors suitable for industry.
Front-illuminated type
TDI-CCD image sensor
22, 23
24, 25
26
These distance image sensors are designed to measure the Distance linear image sensor
distance to an object by TOF method.
Distance area image sensor
27
Image sensors
28 to 30
Product name
Feature
Lineup
Page
31 to 34
Digital X- ray image sensors developed as key devices For radiography (rotational type)
for real -time X- ray imaging applications requiring high For radiography (biochemical imaging)
sensitivity and high image quality
Low noise type
35, 36
37 to 39
40 to 43
10-8
10-12
10-6
10-10
10-4
10-8
10-2
10-6
100
10-4
102
10-2
104
Irradiance (W/cm2)
Illuminance (lx)
KMPDC0106ED
Image sensors
Image sensor
Hamamatsu Photonics uses its original silicon/compound semiconductor process technology to manufacture image sensors that cover a
wide energy and spectral range from 2.6 m near infrared region to visible, UV, vacuum UV (VUV), soft X-ray, and even hard X-ray region.
In addition, we also provide module products designed to work as driver circuits for various image sensors.
Si process
technology
Compound
semiconductor
process technology
CCD
CMOS
In G aA s
MEMS technology
Back-illuminated type
Three-dimensional mounting
Spectral response
CCD area image sensor (without window)
(Typ. Ta=25 C)
100
Back-thinned
type
90
S10121 to
S10124 series
0.4
70
Photosensitivity (A/W)
80
S10420-01
series
60
50
(Ta=25 C)
0.5
S9970/S9971
series
40
30
20
0.3
S8377/
S8378 series
0.2
0.1
S9972/S9973
series
10
0
200
400
600
800
1000
1200
Wavelength (nm)
Image sensors
400
600
800
1000
1200
Wavelength (nm)
KMPDB0251ED
0
200
KMPDB0252EF
Wavelength [nm] =
Distance
image sensor
1240
Photon energy [eV]
CMOS area
image sensor
CMOS linear
image sensor
NMOS
image sensor
Back-thinned CCD
1 MeV
100 keV
10 keV
1 keV
100 eV
10 eV
1 eV
0.1 eV
Photon energy
Wavelength
0.01 nm
0.1 nm
1 nm
10 nm
100 nm
1 m
10 m
KMPDC0105EG
Note) If using an NMOS image sensor (windowless type) for X-ray direct detection, please consult our sales office regarding usage conditions.
(Typ. Ta=25 C)
0.5
S8380/S8381 series
(infrared enhanced type)
Photosensitivity (A/W)
Photosensitivity (A/W)
0.4
0.3
0.2
(Typ.)
1.5
1.0
Td=25 C
G9206-256W
Td=-10 C
Td=-20 C
G9205-256W
G9201 to G9204/
G9211 to G9214/
G9494 series
G9207-256W
G9208-256W
G11135 series
0.5
0.1
S3901/S3904 series
0
200
400
600
800
1000
1200
Wavelength (nm)
0
0.5
1.0
1.5
2.0
2.5
3.0
Wavelength (m)
KMPDB0161ED
KMIRB0068EB
Image sensors
Drive pulse
Irradiation light
Light source
(LED array or LED)
Evaluation
circuit
Ethernet
PC
Reflected light
Distance
image
sensor
Target
(man, object)
Light receiving
lens
KMPDC0417EA
Vertical
control 1, 2
Amp, ADC
Hold 1, Horizontal control 1
Timing
generator
Photosensitive area
(640 480 pixels)
Hold 2, Horizontal control 2
Amp, ADC
Image sensors
Photosensitivity [TV/(Ws)]
(Ta=25 C)
25
20
15
10
0
400
500
600
700
800
900
Wavelength (nm)
KMPDB0363EB
fine-pitch bumps
ROIC (Si)
In bump
Back-illuminated
InGaAs photodiode array
be modified.
Back-thinned technology
In general, CCDs are designed to receive light from the front side where circuit patterns are formed. This type of CCD is called
the front-illuminated CCD. The light input surface of front-illuminated CCDs is formed on the front surface of the silicon substrate
where a BPSG film, poly-silicon electrodes, and gate oxide film are deposited. Light entering the front surface is largely reflected
away and absorbed by those components. The quantum efficiency is therefore limited to approx. 40% at the highest in the visible
region, and there is no sensitivity in the ultraviolet region.
Back-thinned CCDs were developed to solve such problems. Back-thinned CCDs also have a BPSG film, poly-silicon electrodes, and gate
oxide film on the surface of the silicon substrate, but they receive light from the backside of the silicon substrate. Because of this structure,
back-thinned CCDs deliver high quantum efficiency over a wide spectral range. Besides having high sensitivity and low noise which are the
intrinsic features of CCDs, back-thinned CCDs are also sensitive to electron beams, soft X-rays, ultraviolet, visible, and near infrared region.
Schematic of CCDs
Back-thinned type
Front-illuminated type
Poly-silicon electrode
BPSG film
Incident light
Poly-silicon electrode
BPSG film
Potential well
Silicon
Potential well
Accumulation layer
Silicon
Incident light
KMPDC0180EB
KMPDC0179EB
Image sensors
For spectrophotometry
Achieving high quantum efficiency (at peak 90% min.) and ideal for high accuracy spectrophotometry
Number of
effective pixels
Frame rate*1
(frames/s)
S7030-0906
512 58
316
S7030-0907
512 122
239
Type no.
Pixel size
[m (H) m (V)]
S7030-1006
1024 58
192
S7030-1007
1024 122
160
S7031-0906S
512 58
316
S7031-0907S
512 122
239
Cooling*2
Photo
Dedicated driver
circuit*3
(P.37)
Non-cooled
C7040
One-stage
TE-cooled
C7041
24 24
S7031-1006S
1024 58
192
S7031-1007S
1024 122
160
Image sensors
Frame rate*4
(frames/s)
S10140-1007
1024 122
160
S10140-1008
1024 250
120
S10140-1009
1024 506
80
Type no.
Pixel size
[m (H) m (V)]
S10140-1107
2048 122
96
S10140-1108
2048 250
80
S10140-1109
2048 506
60
S10141-1007S
1024 122
160
S10141-1008S
1024 250
120
S10141-1009S
1024 506
80
Cooling*5
Photo
Dedicated driver
circuit*6
(P.38)
Non-cooled
C10150
One-stage
TE-cooled
C10151
12 12
S10141-1107S
2048 122
96
S10141-1108S
2048 250
80
S10141-1109S
2048 506
60
Image sensors
Frame rate*1
(frames/s)
S10420-1004-01
1024 16
221
S10420-1006-01
1024 64
189
Type no.
Pixel size
[m (H) m (V)]
Cooling
Dedicated driver
circuit*2
(P.40)
Photo
C11287
S10420-1104-01
2048 16
116
S10420-1106-01
2048 64
106
Non-cooled
S11071-1004
1024 16
1777
1024 64
751
14 14
S11071-1006
C11288
S11071-1104
2048 16
1303
S11071-1106
2048 64
651
S11850-1106
106
One-stage
TE-cooled
2048 64
S11851-1106
651
100
Etaloning-improved type
90
wavelength light enters a back-thinned CCD, etaloning occurs due to the relationship between the silicon substrate
(Ta=25 C)
110
80
70
Previous type
60
50
40
30
20
10
0
900
920
940
960
Wavelength (nm)
Image sensors
980
1000
KMPDB0284EB
S11500 -1007
Pixel size
[m (H) m (V)]
Number of
effective pixels
Frame rate*3
(frames/s)
24 24
1024 122
160
1024 64
189
S11510 -1006
Cooling
Photo
Dedicated driver
circuit*4
(P.37, 40)
C7040
Non-cooled
14 14
S11510 -1106
C11287
2048 64
106
Enhanced IR sensitivity
These sensors have MEMS structures fabricated by our own
100
90
wavelengths longer than 800 nm. Utilizing high sensitivity characteristic in the near infrared region, these sensors
should find applications in Raman spectroscopy.
(Typ. Ta=25 C)
IR-enhanced type
Back-thinned CCD
80
70
60
Back-thinned CCD
50
40
30
20
Front-illuminated CCD
10
0
200
400
600
800
1000
1200
Wavelength (nm)
KMPDB0329EA
Image sensors
10
Pixel size
[m (H) m (V)]
S7033-0907
S7033-1007
Number of
effective pixels
Frame rate*1
(frames/s)
512 122
239
1024 122
160
512 122
239
Cooling
Photo
Dedicated driver
circuit*2
(P.37, 38)
Non-cooled
C7043
One-stage
TE-cooled
C7044
24 24
S7034-0907S
S7034-1007S
1024 122
160
S12071
Pixel size
[m (H) m (V)]
Number of
effective pixels
Frame rate*3
(frames/s)
Cooling
24 24
1024 1024
Tap A: 0.1
Tap B: 1.5
One-stage
TE-cooled
Photo
Dedicated driver
circuit
Pixel size
[m (H) m (V)]
Number of
effective pixels
Frame rate*4
(frames/s)
S7170-0909
24 24
512 512
512 4
S9037-1002
Photo
Dedicated driver
circuit*6
(P.38)
Non-cooled
C7180
One-stage
TE-cooled
C7181
Non-cooled
0.9
S7171-0909-01
S9037-0902
Cooling*5
1879
1024 4
945
512 4
1879
24 24
S9038-0902S
One-stage
TE-cooled
S9038-1002S
1024 4
945
*4: Area scanning excluding full line binning for S9037/S9038 series
*5: Two-stage TE-cooled type for S7170-0909 and S7171-0909-01 is available upon request (made-to-order product).
*6: Sold separately
Note: Windowless type is available upon request.
11
Image sensors
Pixel size
[m (H) m (V)]
Number of
effective pixels
Thickness of
depletion layer
(m)
Cooling
S10747- 0909
24 24
512 512
200
Non-cooled
Photo
Dedicated driver
circuit
Back-thinned CCD
Figure 1
Figure 2
CCD surface
Figure 3
CCD
surface
Depletion
layer
CCD side
Charge
diffusion
Neutral
region
Depletion
layer
Photosensitive
surface
Photosensitive
surface
GND
Blue light
Depletion
layer
Near-infrared
light
GND
Blue light
Near-infrared
light
Photosensitive
surface
BIAS
Blue light
Near-infrared
light
KMPDC0332EA
100
90
80
70
60
Back-thinned CCD
50
40
30
S10747-0909
20
10
0
200
400
600
800
1000
1200
Wavelength (nm)
KMPDB0313EA
Image sensors
12
For spectrophotometry
CCD area image sensors specifically designed for spectrophotometry
Number of
effective pixels
Frame rate*1
(frames/s)
S9970 - 0906
512 60
239
S9970 -1006
1024 60
160
Type no.
Pixel size
[m (H) m (V)]
Cooling
Photo
Dedicated driver
circuit*2
(P.37)
Non-cooled
S9970 -1007
1024 124
120
S9970 -1008
1024 252
80
S9971- 0906
512 60
239
S9971-1006
1024 60
160
C7020
C7021
One-stage
TE-cooled
24 24
S9971-1007
1024 124
120
S9971-1008
1024 252
80
S9972-1007*3
1024 124
120
C7025
Non-cooled
S9972-1008*3
1024 252
80
S9973-1007*3
1024 124
120
C7020 - 02
C7021- 02
One-stage
TE-cooled
S9973-1008*3
1024 252
80
Image sensors
C7025 - 02
Pixel size
[m (H) m (V)]
Number of
effective pixels
Frame rate*4
(frames/s)
Cooling
Package
Photo
Dedicated
driver circuit
Ceramic DIP
S9736 - 01
24 24
512 512
S9736 - 03
Plate type
S9737- 01
Ceramic DIP
12 12
1024 1024
S9737- 03
Non-cooled
Plate type
S9978* 5
24 24
512 512
Ceramic DIP
S9979
48 48
1536 128
15
Ceramic DIP
Image sensors
14
Pixel size
[m (H) m (V)]
Type no.
Number of
effective pixels
Frame rate
(frames/s)
1280 1024
S11661
Package
7.4 7.4
Dedicated driver
circuit
Photo
Ceramic
S11662
640 480
30
and offset control, and so on. It also has a built-in 12-bit A/D
converter.
Block diagram
(Ta=25 C)
Booster circuit
25
Photosensitivity [TV/(Ws)]
20
15
10
Dout [11-0]
12-bit
A/D converter
Vsync
Hsync
Pclk
CDS circuit
(S11661: 1320 lines, S11662: 680 lines)
0
400
12
Photodiode array
S11661: 1280 1024 pixels
S11662: 640 480 pixels
Amplifier
Bias circuit
Timing generator
500
600
700
800
900
Serial/parallel
interface
Wavelength (nm)
KMPDB0363EB
MCLK
All_reset
(MST)
SPI_reset
SPI_data
SPI_clk
SPI_enable
KMPDC0409EA
15
Image sensors
Equivalent circuits
CMOS linear image sensor (S9227-03)
Clock
Start
Shift clock
(2-phase)
Video
Video
Transfer
gate
VSTG
Hold circuit
VREGH
VREGL
All reset
gate
All reset
drain
Vdd
Vss
KMPDC0121EC
Vss
KMPDC0352EA
st
Clock
Clock
End of scan
Active video
Active
photodiode
Saturation
control gate
Saturation
control drain
Dummy video
Dummy diode
Vss
KMPDC0020EC
Image sensors
16
Pixel height
(m)
Pixel pitch
(m)
Number of pixels
Line rate
(frames/s)
200
14
2048
4672
S11639
Photo
Dedicated driver
circuit
-
Easy-to-operate
the clock pin is 5 pF, the image sensor can easily be operated
sensitive vertically long pixels but with low image lag, based
100
f(CLK)=VR=10 MHz
CLK
80
5 V/div.
GND
Trig
60
5 V/div.
GND
2.5 V (saturation output voltage=2 V)
Video
40
0
200
GND
20 ns/div.
20
300
400
500
600
700
800
900
1000
Wavelength (nm)
KMPDB0394EA
that can be used to control the start timing and length of the
that of CCDs.
17
Image sensors
Pixel height
Pixel pitch
(mm)
(m)
Dedicated driver
circuit*1
(P.42)
Photo
(frames/s)
S10121-128Q
2.5
S10121-256Q
Line rate
Number of pixels
S10121-512Q
128
1923
256
969
512
486
128
3846
256
1938
512
972
50
S10122-128Q
S10122-256Q
0.5
S10122-512Q
C10808 series
S10123-256Q
S10123-512Q
0.5
S10123-1024Q
256
1938
512
972
1024
487
256
969
512
486
1024
243
25
S10124-256Q
S10124-512Q
2.5
S10124-1024Q
*1: Sold separately
(Ta=25 C)
0.4
0.08
0.3
Photosensitivity (A/W)
Photosensitivity (A/W)
(Ta=25 C)
0.1
0.2
0.1
0.06
0.04
Convensional product
S10111 to S10114 series
0.02
0
200
400
600
800
1000
1200
Wavelength (nm)
0
200
220
240
260
280
300
Wavelength (nm)
KMPDB0399EA
KMPDB0400EA
Image sensors
18
Standard type
CMOS linear image sensors with internal readout circuit
Type no.
Pixel height
Pixel pitch
(m)
(m)
S8377-128Q
S8377-256Q
50
S8377-512Q
Number of pixels
Line rate
(frames/s)
128
3846
256
1938
512
972
500
Dedicated driver
circuit*1
(P.42)
C9001
S8378-256Q
S8378-512Q
Photo
25
S8378-1024Q
256
1938
512
972
1024
487
S9226-03
125
7.8
1024
194
250
12.5
512
9434
S9226-04
S9227-03
S9227-04
19
Image sensors
Back-thinned type
The S11155-2048 and S11156-2048 are back-thinned CCD linear image sensors with an internalelectronic shutter for spectrometers.
Type no.
S11155 -2048- 01
Pixel size
Pixel pitch
(m)
(m)
(frames/s)
Dedicated driver
circuit*2
(P.40)
2254
C11165 - 01
Line rate
Photo
14 500
14
S11156-2048-01
Number of pixels
2048
14 1000
Front-illuminated type
The S11151-2048 is a front-illuminated CCD linear image sensor with high sensitivity and high resistance to UV light.
Type no.
S11151-2048
Pixel size
Pixel pitch
(m)
(m)
14 200
14
Number of pixels
2048
Line rate
(frames/s)
484
Photo
Dedicated driver
circuit*3
(P.40)
C11160
Image sensors
20
S3901 series
Pixel height
Pixel pitch
(m)
(m)
2.5
S3902 series
Number of pixels
Cooling
Photo
Dedicated driver
circuit*1
(P.39, 41)
C7884 series
C8892
1024
50
50
S3903 series
25
S3904 series
25
Non-cooled
0.5
C7884 series
C8892
2.5
S5930 series
50
256, 512
S5931 series
25
512, 1024
One-stage
TE-cooled
C5964 series
(Built in sensor)
Pixel height
Pixel pitch
(mm)
(m)
S8380 series
50
S8381 series
Number of pixels
Cooling
Photo
25
S8382 series
50
256, 512
S8383 series
25
512, 1024
Dedicated driver
circuit*1
(P.39, 41)
Non-cooled
C7884 series
C8892
One-stage
TE-cooled
C5964 series
(Built-in sensor)
2.5
Pixel height
Pixel pitch
(mm)
(m)
S3921 series
2.5
S3922 series
0.5
S3923 series
0.5
S3924 series
2.5
50
Number of pixels
Cooling
21
Image sensors
Dedicated driver
circuit
25
Photo
Number of
Pixel size
[m (H) m (V)] effective pixels
Number of
ports
S10200 - 02- 01
1024 128
S10201- 04- 01
2048 128
12 12
Pixel rate
(MHz/port)
Line rate
(kHz)
4096 128
S10202-16 - 01
4096 128
16
Photo
Applicable*2
camera
-
50
30
S10202- 08- 01
Vertical
transfer
C10000 -801
Bi-directional
-
100
Time1
Time2
Time3
First stage
Last stage M
Charge
Signal transfer
Object movement
KMPDC0139EA
Image sensors
22
Configuration (S10201-04-01)
OSb4
OSb3
(Typ. Ta=25 C)
7000
OSb2
OSb1
B port side
OFD
OFG
DGND
512 pixels
TGb
P3V
P2V
P1V
TGa
128 pixels
5000
Bidirectional
transfer
OSa4
2000
OSa3
3000
OSa2
RG
RD
OD
AGND
OG
SG
P2H
P1H
4000
OSa1
6000
A port side
1000
KMPDC0260EA
0
200
300 400
500 600
Wavelength (nm)
KMPDB0268EB
Front-illuminated type
These are front-illuminated type CCD linear image sensors with high-speed line rate designed for applications such as sorting machine.
Type no.
S12551-2048
S12379
23
Image sensors
Pixel size
Number of
[m (H) m (V)] effective pixels
Number of port
Pixel rate
(MHz/port)
Line rate
(kHz)
Photo
Dedicated driver
circuit
14 14
2048 1
40
19
88
2048 1
40
72
S10226 -10
Pixel height
(m)
Pixel pitch
(m)
Number of pixels
Line rate
(frames/s)
125
7.8
1024
194
Photo
Dedicated driver
circuit
S10227-10
250
12.5
512
9434
S11106-10
63.5
63.5
128
64935
S11107-10
127
127
64
111111
S12443
125
2496
3924
Image sensors
24
Pixel height
(mm)
Pixel pitch
(m)
Number of pixels
Line rate
(frames/s)
512
18867
S10453-512Q
0.5
Photo
25
S10453-1024Q
Dedicated driver
circuit
1024
9596
512
88495
S11105
0.25
12.5
S11105-01
S11108
Pixel height
(m)
Pixel pitch
(m)
Number of pixels
Line rate
(frames/s)
14
14
2048
4672
Photo
Dedicated driver
circuit
S12706
4096
2387
S10077
25
Image sensors
Pixel height
(m)
Pixel pitch
(m)
Number of pixels
Line rate
(frames/s)
50
14
1024
972
Photo
Dedicated driver
circuit
Reset
CLK
EXTSP
Vms
Vdd
GND
Timing generator
TRIG
Shift register
EOS
Video
Vref
10
Hold circuit
Vgain
11
Vpd
12
Board
KMPDC0186EA
N-1
Photodiode array
KMPDC0153EA
Pixel pitch
(mm)
Number of pixels
Line rate
(frames/s)
S11865 - 64
0.8
0.8
64
14678
S11865 -128
0.6
0.4
128
7568
S11865-256
0.3
0.2
256
3844
S11865 -64-02
1.6
1.6
64
14678
S11865 -128-02
0.8
0.8
128
7568
Type no.
Photo
Dedicated driver
circuit*1
C9118
C9118- 01
C9118
C9118- 01
Features
C9118
Single power supply (+5 V)
Operation with two input signals
(M-CLK and M-RESET)
C9118-01
Connection
For single/parallel
connection
For serial
connection
Photo
Suitable sensor
S11865 - 64
S11865 - 64G
S11865 -128
S11865 -128G
S11866 - 64- 02
S11865 - 64G- 02
S11866 -128- 02
S11866 -128G- 02
Image sensors
26
Drive pulse
Irradiation light
Light source
(LED array or LED)
Evaluation
circuit
Ethernet
Reflected light
PC
Distance
image
sensor
Target
(man, object)
Light receiving
lens
KMPDC0417EA
S11961- 01CR
Pixel height
(m)
Pixel pitch
(m)
Number of pixels
50
20
256
Pixel height
(m)
Pixel pitch
(m)
Number of pixels
40
40
64 64
Photo
Dedicated driver
circuit
S11962- 01CR
10
S11963- 01CR
27
Image sensors
30
30
160 120
Photo
Dedicated driver
circuit
Spectral response
(Typ.)
1.5
Reset
Clock
Photosensitivity (A/W)
Vdd
Video
line
Vss
Vref
Signal processing circuit
Charge
amplifier
Si
Wire
bonding
1.0
Td=25 C
G9206-256W
Td=-10 C
Td=-20 C
G9205-256W
G9201 to G9204/
G9211 to G9214/
G9494 series
G9207-256W
G9208-256W
G11135 series
0.5
Photodiode
InGaAs
0
0.5
1.0
1.5
2.0
2.5
3.0
INP
Wavelength (m)
KMIRC0016EB
KMIRB0068EB
Pixel height
(m)
G9201-256S
Pixel pitch
(m)
Number of
pixels
Line rate
(lines/s)
50
256
1910
Cooling
0.9 to 1.67
(-10 C)
One-stage
TE-cooled
C8061- 01
0.9 to 1.7
(25 C)
Non-cooled
0.9 to 1.67
(-10 C)
One-stage
TE-cooled
C8061- 01
0.9 to 1.7
(25 C)
Non-cooled
0.9 to 1.67
(-10 C)
One-stage
TE-cooled
C8061- 01
250
G9202-512S
25
512
970*
256
Photo
G9203-256D
50
Dedicated driver
circuit*1
(P.39)
Spectral
responese range
(m)
1910
G9203-256S
500
G9204-512D
25
512
970*2
G9204-512S
*1: Sold separately
*2: When two video lines are used for readout, the line rate is equal to that for 256 channels.
Image sensors
28
Pixel height
(m)
G9211-256S
Pixel pitch
(m)
Number of
pixels
Line rate
(lines/s)
50
256
1910
25
512
960*2
Dedicated driver
circuit*1
(P.39, 43)
Spectral
responese range
(m)
Cooling
0.9 to 1.67
(-10 C)
One-stage
TE-cooled
C8061- 01
Two-stage
TE-cooled
C8062- 01
Photo
250
G9212-512S
G9213-256S
50
256
1910
G9214-512S
25
512
960*2
G9205 -256W
50
256
1910
G9205 -512W
25
512
960*2
50
256
1910
500
G9206 - 02
G9206 -256W
250
2
G9206 -512W
25
512
960*
G9207-256W
50
256
1910
G9208-256W
50
256
1910
G9208-512W
25
512
960*2
G11620 -256DA
50
256
0.9 to 1.85
(-20 C)
0.9 to 2.15
(-20 C)
0.9 to 2.05
(-20 C)
0.9 to 2.15
(-20 C)
0.9 to 2.25
(-20 C)
0.9 to 2.55
(-20 C)
0.95 to 1.7
(25 C)
Non-cooled
0.95 to 1.67
(-10 C)
One-stage
TE-cooled
17200
G11620 -256SA
500
C11513
G11620 -512DA
25
512
Non-cooled
0.95 to 1.67
(-10 C)
One-stage
TE-cooled
Spectral
responese range
(m)
Cooling
9150
G11620 -512SA
Pixel height
(m)
Pixel pitch
(m)
Number of
pixels
Line rate
(lines/s)
G9494-256D
50
50
256
7100
G9494-512D
25
25
512
3720*
Type no.
0.95 to 1.7
(25 C)
Photo
Dedicated driver
circuit*1
(P.39, 43)
C10820
2
0.9 to 1.7
(25 C)
G10768-1024D
100
G10768-1024DB
25
G11135 -256DD
50
25
1024
39000
50
256
14000
Non-cooled
0.95 to 1.7
(25 C)
G11135 -512DE
25
25
512
8150
29
Image sensors
C10854
C11514
Pixel height
(m)
Pixel pitch
(m)
G11097- 0606S
50
Number of
pixels
Frame rate*3
(frames/s)
64 64
1025
128 128
279
Cooling
Dedicated driver
circuit*4
(P.39)
Photo
C11512
0.95 to 1.7
(25 C)
50
G11097- 0707S
Spectral
responese range
(m)
G12460 - 0606S
50
50
64 64
1025
1.12 to 1.9
(25 C)
G12242- 0707W
20
20
128 128
258
0.95 to 1.7
(25 C)
One-stage
TE-cooled
C11512- 01
C11512
Two-stage
TE-cooled
C11512- 02
Start
Shift register
output.
Pixel scanning starts from the starting point at the upper
left in the right figure. The vertical shift register scans
from top to bottom in the right figure while sequentially
selecting each row.
End
For each pixel on the selected row, the following operations are per-formed:
Offset
compensation
circuit
VIDEO
Transfers the sampled and held optical signal information to the signal processing circuit as a signal voltage.
Shift register
KMIRC0067EA
Resets the amplifier in each pixel after having transferred the signal voltage and transfers the reset volt-
The vertical shift register then selects the next row and repeats
low. After that, when the MSP goes high and then low, the reset
switches for all pixels are simultaneously released and the next
This eliminates the amplifier offset voltage in each pixel. The voltage difference between and is output
as the output signal in the form of serial data.
Image sensors
30
31
Image sensors
Pixel size
[m (H) m (V)]
Scintillator
Number of
effective pixels
S8980
Frame rate*1
(frames/s)
Photo
Dedicated driver
circuit
C9266 - 03
C9266 - 04
1 (max.)
C9266 - 03
C9266 - 04
1500 1000
S10810 -11
CsI
(+ FOP)
S10814
20 20
S10811-11
1700 1200
Without scintillator*2
S8984- 02
*1: Area scanning
*2: Coupled with FOP
Signal frequency
Interface
1 MHz
USB 2.0
Photo
Suitable sensor
C9266 - 03
S10810 -11
S10811-11
C9266 - 04
Connection example
USB cable
PC (Windows XP/7)
Image sensors
32
Scintillator
Pixel size
[m (H) m (V)]
Number of
effective pixels
Frame rate
(frames/s)
1000 1500
0.9
Photo
Dedicated driver
circuit
S10830
S10834
CsI
(+ FOP)
20 20
S10831
0.6
1300 1700
S10835
Photosensitive area
S10830, S10834
Upper light-shielded pixels
(766, 768, 770 pixels)
269 pixels
Effective pixels
(1300 1700 pixels)
Monitor photodiode
all around effective pixels
1700 pixels
1500 pixels
Effective pixels
(1000 1500 pixels)
114 pixels
114 pixels
269 pixels
114 pixels
S10831, S10835
Monitor photodiode
all around effective pixels
Lower light-shielded pixels
(1300 3 pixels)
KMPDC0449EA
Scintillator
Pixel size
[m (H) m (V)]
48 48
S8658- 01*1
*1: The types coupling FOP (S7199-01F, S8658-01F) are provided.
*2: Area scanning
33
Image sensors
Frame rate*2
(frames/s)
1536 128
(2-chip buttable)
S7199 - 01*1
CsI
(+ FOP)
Number of
effective pixels
Photo
Dedicated driver
circuit
15
1536 128
(3-chip buttable)
Scintillator
S11865 - 64G
Pixel height
(mm)
Pixel pitch
(mm)
Number of
pixels
Line rate
(lines/s)
0.8
0.8
64
14678
Photo
Dedicated driver
circuit*3
C9118
C9118- 01
S11865 -128G
Phosphor
screen
S11865 -256G
S11866 - 64G- 02
0.6
0.4
128
7568
0.3
0.2
256
3844
1.6
1.6
64
14678
C9118
C9118- 01
S11866 -128G- 02
0.8
0.8
128
7568
Features
Connection
Photo
Suitable sensor
S11865 - 64
S11865 - 64G
S11865 -128
S11865 -128G
S11866 - 64- 02
S11866 - 64G- 02
S11866 -128- 02
S11866 -128G- 02
For single/parallel
connection
C9118
Single power supply (+5 V)
Operation with two input signals
(M-CLK and M-RESET)
For serial
connection
C9118- 01
Connection examples
Single or parallel readout example (C9118)
Simultaneous integration/output
(effective for high-speed processing)
S11865/
S11866 series
S11865/
S11866 series
C9118
CN2
External
controller
C9118-01
CN2
External
controller
CN3
Scan
direction
S11865/
S11866 series
S11865/
S11866 series
C9118
CN2
External
controller
Accessory
cable
C9118-01
CN2
Scan
direction
CN3
S11865/
S11866 series
C9118
CN2
S11865/
S11866 series
External
controller
Scan
direction
Scan
direction
KACCC0644EA
C9118-01
CN2
CN3
KACCC0645EA
Image sensors
34
Scan
mode
Fast
mode
C10900D*1
Partial
mode
Fine
mode
Panoramic
mode
Fast
mode
C10901D*1
Fine
mode
Panoramic
mode
C10500D- 03*1
Output
Number of
pixels
[(H) (V)]
Digital
(13-bit)
624 624
Digital
(12-bit)
1248 1248
Digital
(13-bit)
504 341
Digital
(12-bit)
1008 682
Digital
(14-bit)
1512 60
Number of
effective pixels
[(H) (V)]
Pixel size
(m)
Frame rate
(frames/s)
608 616
Resolution
(line pairs/
mm)
Photo
35
200
2.5
608 310
70
1216 1232
17
100
4.5
1216 72
280
496 336
200
60
992 672
2.5
30
100
4.5
992 72
265
1480 60
100
300
4.5
Output
Number of
pixels
[(H) (V)]
C7942CK-22
Digital
(12-bit)
2400 2400
C9730DK-10
1056 1056
Pixel size
(m)
50
Frame rate*2
(frames/s)
Resolution
(line pairs/mm)
Interface
RS- 422
(differential)
10
Digital
(14-bit)
C9732DK-11
35
Image sensors
USB 2.0
2400 2400
10
Photo
Output
Number of pixels
[(H) (V)]
Pixel size
(m)
Frame rate
(frames/s)
Resolution
(line pairs/mm)
Interface
C9728DK-10
Digital
(14-bit)
1056 1056
50
80
USB 2.0
Photo
Video output
Vsync, Hsync,
Pclk
OS +
Acquisition software
Frame
grabber
X-ray source
Monitor
Binning
(bin0, bin1)
IntExt
ExtTrgGrb
Voltage source
[A.vdd, D.vdd, v (7.5)]
ExtTrgLemo
MOS Image Sensor for X-Ray
Image sensors
36
Output
Photo
Applicable sensor
C7020
S9970 series
C7020 - 02
S9972 series
C7021
S9971- 0906/-1006/-1007
Analog
Sold separately
C7021- 02
S9973-1007
C7025
S9971-1008
C7025 - 02
S9973-1008
Output
C7040
C7041
C7043
Photo
Applicable sensor
Analog
S7031 series
Sold separately
S7033 series
Note: Multichannel detector heads for two-stage TE-cooled type CCD area image sensors (Back-thinned type) are also available upon request (made-to-order product).
37
Image sensors
Type no.
Output
Photo
Applicable sensor
C7044
S7034 series
C7180
S7170 - 0909
C7181
Analog
S7171- 0909 - 01
C10150
S10140 series
C10151
S10141 series
Sold separately
Note: Multichannel detector heads for two-stage TE-cooled type CCD area image sensors (Back-thinned type) are also available upon request (made-to-order product).
C7557- 01
Interface
Photo
USB 2.0
Accessories
USB cable
Fuse (2.5 A)
Detector head connection cables
AC cable
Software [Compatible OS: Windows 7 (32-bit only)]
Operation manual
MOS adapter
Shutter*
timing pulse
Trig.
POWER
Dedicated cable
(included with C7557-01)
SIGNAL I/O
USB cable
(included with
C7557-01)
TE CONTROL I/O
Image sensor
+
Multichannel
detector head
C7557-01
PC [Windows 7 (32-bit)]
(USB 2.0)
Image sensors
38
Type no.
Output
Photo
C5964 series
Applicable sensor
S5930/S5931/S8382/S8383 series
Built in sensor
Sold separately
Analog
C8892
Note: Controller for multichannel detector head is available. Refer to page 38 for details.
C10854
Output
Photo
Applicable sensor
G10768-1024D
G10768-1024DB
CameraLink
G9201/G9203/G9211/G9213-256S
G9202/G9204/G9212/G9214-512S
C8061- 01
Sold separately
Analog
C8062- 01
G9205/G9206/G9207/G9208-256W
Note: Controller for multichannel detector head is available. Refer to page 38 for details.
Output
C11512
Photo
Applicable sensor
G11097- 0606S
CameraLink
C11512- 01
39
Image sensors
Sold separately
G11097- 0707S
Signal frequency
Interface
Photo
Applicable sensor
C11287
250 kHz
S10420 - 01 series
S11510 series
C11288
4 MHz
S11071 series
Sold
separately
USB 2.0
C11165 - 01
6 MHz
S11155 -2048- 01
S11156 -2048- 01
C11160
1 MHz
S11151-2048
Connection examples
C11287
C11288, C11165-01
Laser
Laser
Mechanical shutter
Mechanical shutter
Pulse generator
Pulse generator
USB 2.0
USB 2.0
DC +5 V
C11287
C11288, C11165-01
PC
KACCC0509EB
PC
KACCC0526EB
C11160
Laser
Mechanical shutter
Pulse generator
USB 2.0
C11160
PC
KACCC0669EA
Image sensors
40
Driver circuits for NMOS linear image sensors (Current output type)
Type no.
Feature
Photo
C7884
C7884G
C7884- 01
C7884G- 01
Applicable sensor
Connection examples
C7884, C7884-01
C7884G, C7884G-01
Oscilloscope
Oscilloscope
Pulse
generator
Power
supply
Start
D. GND
CLK
D. GND
+12 V (+15 V)
A. GND
-12 V (-15 V)
EXT TRIG
GND
NMOS
linear
image
sensor
Video
A. GND
NMOS
linear
image
sensor
Input
GND
Analog input
GND
AD. TRIG
D. GND
Trigger input
GND
Power
supply
+12 V (+15 V)
A. GND
-12 V (-15 V)
Start
D. GND
EXT TRIG
GND
Video
A. GND
Input
GND
Analog input
GND
AD. TRIG
D. GND
Trigger input
GND
A/D conversion
A/D conversion
KACCC0301EA
41
Image sensors
KACCC0302EA
Feature
Photo
C8225 - 01
C7884 series
Image sensor
driver circuit
MSt. D. GND
Power
supply
MCLK D. GND
+5 V D. GND
CLK
ST
1
2
5
KACCC0305EA
Feature
Photo
C9001
C10808 series
Applicable sensor
S8377/S8378 series
Connection example
C9001
C10808 series
C10808 series
CMOS
linear
image
sensor
Power
supply
Pulse
generator
START-EX
CLK-EX
Controller
EXT-INT
Gain
Video
PLD
+5V
ST
CLK
INT
INT-SEL
EOS
A. GND
MCLK
CN3
Start
CLK
MStart
Vcc
GND
CN4
A/D
conversion
KACCC0561EA
KACCC0294EA
Image sensors
42
Feature
Photo
C10820
G9494-256D
G9494-512D
C11513
G11620 series
C11514
CameraLink
G11135 series
Pin no.
NC
A.GND
CH. 1
VIDEO DATA
EXT. TRIG
A.GND
10
A.GND
+15 V
+15 V
NC
11
-15 V
-15 V
+5 V
D.GND
12
D.GND
+5 V
+5 V
D.GND
13
D.GND
START
Start
D.GND
14
D.GND
M-CLK
TRIGGER
15
Coaxial cable
Oscilloscope
Ex: PW18-1T
made by
TEXIO CORPORATION
Pulse generator
C8225-01
made by HAMAMATSU
CLK
A/D TRIG
D.GND
Data processing board/PC
EOS
VIDEO
GND
KACCC0499EA
43
Applicable sensor
Image sensors
Copies of the full warranty can be obtained prior to the purchase of products by contacting your local Hamamatsu sales office.
Hamamatsu makes no other warranties, and any and all implied warranties of merchantability, or fitness for a particular purpose,
are hereby disclaimed. The customer is responsible for use of the product in accordance with Hamamatsu's instructions and
within the operating specifications and ratings listed in this catalogue. Hamamatsu shall not be responsible for the customer's
improper selection of a product for a particular application or otherwise. No warranty will apply if the products are in any way
altered or modified after delivery by Hamamatsu or for any intentional misuse or abuse of the products. Proper design safety
rules should be followed when incorporating these products into devices that could potentially cause bodily injury.
Hamamatsu's liability on any claim for loss or damage arising out of the supplying of any products, whether based on contract,
warranty, tort (including negligence and for property damage or death and bodily injury) or other grounds, shall not in any event
exceed the price allocable to such products or a part thereof involved in the claim, regardless of cause or fault. In no event shall
Hamamatsu be responsible to the customer or any third party for any consequential, incidental or indirect damages, including
but not limited to loss of profits, revenues, sales, data, business, goodwill or use, even if the company has been advised of the
possibility of such loss or damage. The limitation of liability set forth herein applies both to products and services purchased or
otherwise provided hereunder. This warranty is limited to repair or replacement, at the sole option of Hamamatsu, of any product
which is defective in workmanship or materials used in manufacture. All warranty claims must be made within 1 year from the
date of purchase or provision of the products or services.
Products that are amenable to repair shall be done so either under warranty or pursuant to a separate repair agreement. Some
products cannot be repaired either because of the nature or age of the product, the unavailability of spare parts, or the extent of
the damage is too great. Please contact your local Hamamatsu office for more details.
The products described in this catalogue should be used by persons who are accustomed to the properties of photoelectronics
devices, and have expertise in handling and operating them. They should not be used by persons who are not experienced or
trained in the necessary precautions surrounding their use.
The information in this catalogue is subject to change without prior notice.
Information furnished by Hamamatsu is believed to be reliable. However, no responsibility is assumed for possible inaccuracies
or omissions. Before using these products, always contact us for the delivery specification sheet to check the latest specifications.
No patent rights are granted to any of the circuits described herein.
Main Products
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Hamamatsu also supplies:
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Sales Offices
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