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Photolithographic Process
Photomask Fabrication
Exposure Systems
Exposure Sources
Lithography
Photoresist (PR):
Photo-sensitive organic polymers that are spun onto wafers and
prebaked to produce a film 0.5~1 um
Reticle(10X)
Photomask
Light field
Dark field
Cr
Contact printing
Figure 2.11
Artists conception of various printing techniques.
(a) Contact
printing, in which wafer is in intimate contact with mask; (b)
proximity printing, in which wafer and mask are in close
proximity; (c) projection printing, in which light source is
scanned across the mask and focused on the wafer.
The minimum feature size that can be reproduced using optical lithography, resolution, is intimately tied
to the wavelength of light used for exposure.
A rough estimate of the minimum feature size F (line or space) that can be transferred to the wafer
surface is given by
l
F = 0.5
(2.1)
NA
(2.2)
NA = sin q
DF = 0.6
l
( NA)
(2.3)
Based upon Eqs. (2.1) and (2.2) with NA=0.5, one-tenthmicron technology (F=0.10 ) would require a 100
illumination source and have only a 240 depth of field.
Figure 2.14
Optical focal plane and depth of focus
Resolution = K 1
NA
K1 = Process constant
NA = Numerical aperture
Smaller
Lower K 1
process/resist improvements
improved optical schemes
Higher NA
DOF = K2
(NA) 2
EXPOSURE SOURCES
Diffraction spreads
reference
Advanced lithography
Needs:
Optical lithography has advantages of high throughput, good resolution,
low cost, ease in operation. However, due to the requirement for deepsubmicron or nanometer IC processes, we need to find alternatives.
Electron-beam lithography
Primarily used to produce high-quality masks and reticles
Exposure system
e gun: generate a beam of e with a suitable current density (LaB6)
Condense lens: focus e beam to a spot size 10 to 25um
Beam blanker: e beam on/off
Beam deflection coils: direct the focused beam to any location
in the scan field on the substrate.
Advantages
- Highly automated and precisely controlled, greater DOF,
high resolution ~10nm, direct patterning
Disadvs.
- low throughput ~10 wafers/h for <0.25um, high cost
Raster scan:
- resist patterns are written by a vertically-oriented beam that moves in a mode, blanked where no exp. required
Vector scan:
- beam is directed only to the requested pattern features and jumps from feature to feature, rather than scanning
the whole chip
Problems
Must be performed in a vacuum due to strong absorption of EUV
Required defect-free multilayered reflection masks higher cost
Required an EUV source: higher cost
Must be considered sensitivity and line edge roughness of production resist
X-ray lithography
potential candidate for the fabrication of IC at 100nm. XRL uses a
shadow printing method similar to optical proximity printing
Characteristics
Very short wavelength : 4~50
Projection system of full size mask
Higher output with short exposure time
Little scattering and reflection
Low level of defects
Problems
hard to make an x-ray mask, low transparency at 1nm
Au should be used instead of Cr/glass
Need of high energy x-ray source
hard to develop x-ray resist use ebeam resist
X-ray aligning/exposure with 1:1 mask
Ion-beam lithography
Among the highest resolution because ions have a higher mass and thus
scatter less than electrons little spread of ion beam, no backscattering
Problem
Difficulty in fabricating a Si stencil mask: due to problems such as stitching, complementary
mask stress control, Si trench etch
H.W
Using white light for illumination with wavelengths centered on 0.5 , and with a
numerical aperture of 0.95, the resolution is approximately 0.25 (the resolution of
the human eye itself is approximately 0.25 .)
Bright-field operation is the mode that we most often encounter. The sample is illuminated
by light perpendicular to the plane of the sample back up into same operation path in the
microscope.
For dark-field mode, the sample is illuminated from an oblique angle, and light that is
reflected or refracted from features on the surface of the sample enters by the microscope
lens system. The surface of the sample appears mostly dark with the surface features
standing out in bright contrast against the dark back-ground.
; Surface feature that are washed out in bright-field mode can be clearly observed.
The magnitude of the secondary electron current depends upon the materials present and on
the curvature of the surface, and significant contrast can be achieved due to varying surface
morphology and materials.
The SEM extended the minimum resolution limit to 20~30, with magnifications up to 300,000.
at a magnification of 10,000 the SEM provides a depth of field of 2~4 .
; useful tool for investigating VLSI structure.
Figure 2.17
SEM image of a three-dimensional
micromechanical system (MEMS) structure
TEM extended the resolution of microscopy another order of magnitude down to the 2
range, which corresponds to a distance below the radius of most atoms.
In this instrument, a 60 ~ 400 KeV beam of electrons is used to illuminate a thin sample only
0.5~2 thick. The amplitude of the electron current that passes through the sample is detected,
and an image is created as the beam scans the sample.
In MOS structure, TEM can display an image of transition from the regular array of atoms in the
silicon lattice to the irregular amorphous layer of the silicon dioxide gate insulator (Figure 2.18)
TEM provides very high resolution, its application requires special preparation of the extremely
thin samples.
Figure 2.18
Cross-sectional high-resolution TEM images for CMOS structure with (a) 27 and (b) 24 image.
The polysilicon grains are easily noticeable in (a), the Si/SiOand poly Si/SiO2 interfaces are shown in
part (b). On a local, atomic scale, thickness variation of 2~3 are found which are a direct result of
atomic silicon steps at both interfaces.
SUMMARY
Photography is used to transfer patterns from masks to photoresist
on the surface of silicon wafers.
The resist projects portions of the surface while windows are
etched in barrier layers such as silicon dioxide, silicon nitride, or
metal.
The windows may be etched using either wet- or dry-processing
techniques.
Wet chemical etching tends to etch under the edge of the mask,
causing a loss of linewidth control at small dimensions.
Dry etching can yield highly anisotropic etching profiles and is
required in most VLSI processing.
After etching, impurities can be introduced into the wafer through
the windows using ion implantation or high-temperature diffusion, or
metal can be deposited on the surface making contact with the
silicon through the etched windows.
SUMMARY(Contd)
Masking operations are performed over and over during IC processing, and the
number of mask steps required is used as a basic measure of process
complexity.
Mask fabrication uses computer graphics systems to draw the chip image at 100
to 2,000 times final size.
Reticles 1 to 10 times final size are made from this computer image, using
optical pattern generators or electron-beam systems.
Step-and-repeat cameras are used to fabricate final masks from the reticles, or
direct step-on-wafer systems may be used to transfer the patterns directly to the
wafer.
Today, we are reaching the limits of optical lithography.
Present equipment can define windows that are approximately 0.15 wide.
(Just a few years ago, experts were predicting that 1 ~ 2 would be the limit!)
Electron-beam and X-ray lithography are now being used to fabricate devices
with geometrical features smaller than 0.10 , and lithography test structures
have reproduced shapes with minimum feature sizes below 0.05 .
The wavelength of light is too long to produce much smaller geometrical features,
because of fringing and interference effect.
Any dust particles on the substrate can result in defects in the final resist coating.
If defects occur in only 10% of the chip sites at each mask step, then <50% of the chips will be
functional after a 7-mask process is completed.
Vertical laminar-flow hoods in clean rooms are used to prevent particulate contamination
throughout the fabrication process.
Clean rooms use filtration to remove particles from the air and rated by the maximum number of
particles per cubic foot ( Class #) or cubic meter of air. (Table 2.1)
(350,000)
(35,000)
(3,500)
(350)
(35)*
Number of 5 particles
per ft3(m3)
65
6.5
0.65
0.065
0.0065
(23,000)
(2,300)*
(230)*
(23)*
(2.3)*
PROCESS
SiO2
1. Surface preparation
Wafer
6. Hard bake
PR
SiO2
2. Photoresist coating
Wafer
7. Develop inspection
Wafer
PR
SiO2
Wafer
Solvent
3. Soft bake
PR
SiO2
Wafer
8. Etch
PR
SiO2
Wafer
UV
4. Alignment and
Exposure
5. Development
PR
SiO2
Wafer
PR
SiO2
Wafer
9. Photoresist removal
(strip)
SiO2
Wafer
SiO2
Wafer
1. Surface preparation
Purpose
To clean and dry wafer surface
Chemical cleaning
To remove organic and inorganic contaminant residues
Chemical clean
DI water rinse
Spin dry
Dehydrate bake
Heating process for removing the moisture adsorbed on the wafer surface
Figure 2.3 Illustration of wafer flat standard used to identify 100mm wafer
Wafers are chemically cleaned to remove particulate matter on the surface as well as any traces
of organic, ionic, and metallic impurities.
One very important chemical used in wafer cleaning and fabrication process is deionized(DI)
water, which is highly purified and filtered to remove any traces of ionic, particulate, and bacterial
contamination
B.
1.
C.
D.
Immerse in a(5:1:1) solution of H2O-NH4OH-H2O2; heat solution to 7580 and hold for 10
min.
2.
Quench the solution under running DI water for 1 min.
3.
Wash in DI water for 5 min.
Hydrous Oxide Removal
1.
Immerse in a (1:50) solution of HF-H2O for 15 sec.
2.
Wash in running DI water with agitation for 30 sec.
Heavy Metal Clean
1.
Immerse in a (6:1:1) solution of H2O-HCl-H2O2 for 10 min at a temperature of 7580
2.
Quench the solution under running DI water for 1 min.
3.
Wash in running DI water for 20 min.
1. Surface preparation
Primer deposition
To promote adhesion between the organic photoresist and the inorganic silicon or
silicon compound wafer surface
HMDS (HexaMethylDiSilane)
(CH3)3SiNHSi(CH3)3)
2. Photoresist coating
Purpose
To coat a thin layer of photoresist on surface
After formation of a thin film, the surface of the wafer is coated with PR.
PR is typically applied in liquid form by spin coating to for a thin uniform coating.
The PR thickness depends on its viscosity and spinning speed. (tPR speed1/2)
t = Ks[v /(wR )]
Where,
K : constant
s : quantity of polymer
v : viscosity coefficient
w : angular velocity
R : radius of wafer
2. Photoresist coating
Schematic of a photoresist spin coater
PR dispense method
Static dispense method
Dynamic dispense method
2. Photoresist coating
Method of edge-bead removal (EBR)
Chemical EBR
Optical EBR
3. Soft bake
Purpose
Partial evaporation of photoresist solvents by heating
To improve the PR adhesion to the wafer surface
3. Soft bake
Methods
90~120 C, 30 minutes
Batch process
and developing
A photomask : a square plate with a patterned emulsion or metal film on one side.
Each mask following the first must be carefully aligned to the previous pattern on the
wafer, by either operating the alignment equipment (mask aligner) manually or at
computer-controlled mode.
Minimum feature size of 100 (0.1 ) will require a worst case alignment error of better
than 35 (mean + 3).
The wafer is held on a vacuum chuck and moved into position below the mask.
The mask is spaced 25-125 above the surface of the wafer during alignment.
If contact printing is used, the mask is brought into contact with the wafer after alignment.
Alignment marks are introduced on each mask and transferred to the wafer as part of
the IC pattern. A sample set of alignment marks is shown in Figure 2.5.
Figure 2.5
A simple set of alignment marks. At some
steps a cross may be aligned within a box. At
others, a box may be placed around the cross.
The choice depends on the type of resist being
used at a given mask step.
Contact aligner
Proximity aligner
Short wavelength
Reliable
High intensity
Adjustable
Long lifetime
Accurately aligned
Poorly aligned
5. Development
Purpose
Removal of unpolymerized resist
Development
Rinse
Spin dry
5. Development
Positive PR
Exposed region unpolymerize
Developer : alkaline-water (NaOH, KOH), nonionic solution (TMAH, (CH3)4NOH))
Rinser : water
More sensitive than negative PR
Negative PR
Exposed region polymerize
Developer : xylene
Rinser : n-butylacetate
5. Development
Photoresist profile for different developments
Normal
development
scum
Incomplete
development
Underdevelopment
Overdevelopment
Positive PR
Negative PR
6. Hard bake
Purpose
To improve the PR etch and implantation resistance and improve its adhesion to
the wafer
7. Pattern inspection
Purpose
To inspect surface for alignment and defects
Methods
Optical microscope : larger-dimension
features inspection
SEM (Scanning Electron Microscope) :
sub-half-micron features inspection
Defects
1. Contamination
2. Opaque spot
3. Large hole
4. Pin hole
5. Excess material
6. Lack of adhesion
7. Intrusion
8. Scratch
9.
8. Next process
Etch
Wet etch
Dry etch
Plasma etch
Ion beam etch
RIE (Reactive Ion Etch)
Ion implantation
9. PR strip
Purpose
To remove photoresist layer from wafer
Methods
Wet chemical removing ; strip, rinse, and dry
H2SO4:H2O2=4:1 @120
Cost effective
Metallic ion removal
No plasma damage
Plasma O2 strip
CxHy (resist) + O2 CO + CO2 + H2O
Method
Similar to develop inspection process