www.universityquestions.in Reg. No.: LLTTL ] Question Paper Code : 48694 M_E. DEGREE EXAMINATION, MAY/JUNE 2015. Second Semester Manufacturing Engineering MF 7204 — MEMS AND NANOTECHNOLOGY (Regulation 2013) ‘ime : Three hours WWW.univer sity questions. i imum : 100 marks PRP ARAa Sw m Ss Answer ALL questions. PART A — (10x 2= 20 marks) State the importance of silicon nitride. Brief on microrobotics. Concise on X-ray masks. What is the major disadvantage of multiple spin coatings? Classify the externally foree-leveraged actuators. Brief on wall-shear stress sensors. What is meant by Coulombic explosion? Concise about alkali doped Con. State the significance of Raman spectroscopy. Brief on TEM. PART B— (5 x 16= 80 marks) (@) @ Discuss on the mechanical properties of materials used in MEMS. 0) (i) Explain the advantages of micro systems. © Or (©) @ _ Disouss on the design and fabrication micro-system. (10) Gi) Explain about microelectronics with examples. ©13. 4. @) &) (@) ) @) ) @) ) @ w@ Gi), @ a) @ a ® a) www.ulliver: yquestions tH Discuss about LIGA process steps in detail. (10) Explain the working principle of CVD. © Or Discuss in detail about micro-assembly processes with examples. (10) Explain about the interfaces in packaging. © Discuss about micro-mechanical sensors. (20) Explain about functional characteristics of actuators. © Or Discuss on micro-electromagnetic actuators. (10) Explain about biochemical sonsozs. © Discuss about high-temperature thermal decomposition. (ao) Explain about spark plasma sintering, © Or Discuss on the effects of nano-scale dimensions on various properties. (a0) Explain about synthesis of carbon nanctubes. 6) Discuss in detail about nanostructures composition measurement. Or Explain about scanning probe microscopy and optical microscopes.