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Acta mater.

49 (2001) 35393551
www.elsevier.com/locate/actamat

AN ANALYSIS OF LOADPENETRATION CURVES FROM


INSTRUMENTED INDENTATION
K. ZENG and C.-h CHIU
Institute of Materials Research and Engineering, 3 Research Link, Singapore 117602

( Received 6 October 2000; received in revised form 8 June 2001; accepted 8 June 2001 )

AbstractA new empirical method is proposed for analyzing nano-indentation loaddisplacement curves.
This method is based on experimental results and finite element (FEM) calculations reported in the literature.
This method proposes to link the indentationunloading curve to elastic modulus and strain-hardening proper-
ties. Through the analysis, elastic modulus, yielding stress and strain hardening properties are derived from
the complete indentation loaddisplacement curve. This new method has then applied to the nano-indentation
experiments of 14 different materials in which the elastic modulus ranges from 3 to 650 GPa and the hardness
ranges from 0.1 to over 30 GPa. The elastic modulus, hardness and yielding stress derived from the new
method agreed well with the literature values. An analysis of the loading curve also shows that there is a
transition region, in which of the exponent of the loading curve changes from 1.5 to 2 corresponding to the
change of the loads from low to high. This implicates that to avoid this transition region in loading curve,
one should keep the load of the nano-indentation larger than approx. 30 mN. 2001 Acta Materialia Inc.
Published by Elsevier Science Ltd. All rights reserved.

Keywords: Nano-indentation

1. INTRODUCTION simple relationship for the indentation work, the hard-


ness, and Youngs modulus.
Instrumented indentation such as nano-indentation
In contrast to the unloading curves, analyses for the
has been a popular technique for measuring the mech-
loading data started much earlier than the introduction
anical properties of surface of bulk materials and thin
of nano-indentation machine [e.g. 15]. It is now well
films [112]. The nano-indentation equipment was
recognized that the loading curves of the conical,
first introduced in early 1980s [e.g. 1], providing the
capability to record the loadpenetration curves dur- Vickers, and Berkovich indenters depend on the
ing the loading and the unloading process. It was yielding stress, the strain-hardening property, and the
recognized by Doerner and Nix that the slope of the elastic moduli of the materials [79, 15]. Those
unloading curve at the initial stage of unloading could results provide fundamentals for employing the sharp
be adopted to measure Youngs modulus of the indentation technique to measure the yielding stress
materials [3]. Their method was later modified by Oli- and the strain-hardening parameter. However,
ver and Pharr [4, 5] to take into account large elastic because the shapes of those sharp indenters are self-
recovery during unloading. The assumptions and limi- similar (ignoring the small imperfection at the
tations inherent in these methods were reviewed in indenter tips), the loading curve can provide only one
[6]. More recent development in this direction independent quantity, which is a combination of the
focused on new schemes for determining the contact elastic and the plastic properties of the materials [16].
area at the maximum loading, a crucial quantity for In order to realize the potential application of sharp
deriving Youngs modulus. For example, it was pro- indentation in measuring the yielding stress, it is
posed in [13] that the contact area could be evaluated necessary to identify another characteristic in the
by a polynomial function of the indentation depths at indentation data that depends on one of the plastic
the maximum unloading and at the end of unloading. properties. This issue was addressed in [13], which
The scheme in [14], on the other hand, was based a proposed that the strain-hardening parameter could be
related to the unloading penetration depth ratio or the
indentation work ratio. The proposed scheme was
To whom all correspondence should be addressed. Tel.:
shown to be valid by finite element (FEM) calcu-
+65-874-8495; fax: +65-872-0785. lations, but it has not been widely tested in experi-
E-mail address: ky-zeng@imre.org.sg (K. Zeng) ments. One potential concern of the scheme is that

1359-6454/01/$20.00 2001 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
PII: S 1 3 5 9 - 6 4 5 4 ( 0 1 ) 0 0 2 4 5 - 2
3540 ZENG and CHIU: INSTRUMENTED INDENTATION

0.5% error in the measurement of the indentation and that on an elasticplastic material,
work ratio can lead to 20% deviation of the yielding
stress [17].
In this paper, we propose another scheme for using P
1.273
(tan 24.7)21
su
sy
1 ln
E tan 24.7
3sy
sy h 2
sharp indentation to derive the elastic and the plastic (3)
properties of materials. The key feature of the scheme
is the proposal that the unloading curve in indentation
can be used to determine both Youngs modulus and where n is Poissons ratio, E is Youngs modulus, sy
the strain-hardening parameter. This scheme is an is the yielding stress, su is the stress at 29% strain,
empirical method based on the experimental obser- and the ratio su/sy is used to represent the strain-hard-
vation as well as on the finite element calculations in ening property of materials throughout this paper. For
[9]. Combining the two properties derived from the convenience, equation (2) is called the indentation
unloading process with the information from the load- elastic solution, while equation (3) is called the inden-
ing curve [8] leads to the yielding stress. In order to tation elasticplastic solution of loading.
examine the new empirical method, we carried out
nano-indentation experiments of 14 different 2.2. Unloading curve and elastic modulus
materials where the elastic modulus ranges from 3 to The unloading curve is generally used to derive the
650 GPa and the hardness range from 0.1 to 30 GPa. elastic modulus of the material by the following for-
The results are shown to be consistent with the litera- mula,
ture values and with those derived from other analysis
methods for indentation data. E S
The outline of the paper is as follows. Section 2 is (4)
1n2 aA
a briefly review of the existing methods for analyzing
the loading curves, the unloading curves, the contact
stiffness, the contact area, the hardness, and the elas- where S = dP/dh is the contact stiffness at the initial
tic modulus. Section 3 describes the experimental of unloading process, A is the true contact area at the
details and the materials employed in this study of maximum load, and a = 1.168 for Berkovich inden-
nano-indentation. Section 4 summarizes the results tation [7, 8], 1.142 for Vickers indentation [7, 8, 22],
based on Oliver and Pharrs analysis scheme for and 1.129 for conical indentation [22].
nano-indentation [4]. Section 5 presents our finding The contact stiffness S can be determined by two
on the initial part of loading curves. Section 6 intro- fitting methods for the unloading curves. The first one
duces the new empirical method for interpreting the is the linear curve fitting method developed by
unloading curve. Application of this new method to Doerner and Nix [3], who proposed that Sneddons
determining the yielding stress is discussed in Section flat punch solution [23] could be used to describe the
7, followed by discussion and summary in Sections unloading curve,
8 and 9, respectively.
P S(hh0) (5)
2. REVIEW OF THE EXISTING METHODS
2.1. Loading curve where h0 is the true contact indentation depth. The
The loading part of an instrumented indentation best-fit results of S and h0 depend on the portion of
can be expressed as the unloading curve that is employed in the fitting,
and it is suggested that to use the top one-third of the
P Ch2 (1) unloading data [3].
Equation (5) is based on the assumption that the
contact area remains unchanged during unloading,
where P is the indentation load, h is the penetration which is true for the case of a punch indenting an
depth measured from surface, and C is a constant elasticperfect plastic material. The solution is there-
depending on the geometry of the indenter tip and fore called the indentation plastic solution in this
material properties. The relation in equation (1) has paper.
been demonstrated by numerical simulation for both Doerner and Nixs method in equation (5) can
elasticperfect plastic and elasticplastic materials describe well the unloading behavior of most metals,
[79, 12, 14, 1621]. The constant C in equation (1) but often fails to capture that of hard materials such
can be found in [79, 12, 21], based on different as ceramics. In order to resolve this issue, Oliver and
approaches. The results obtained by the finite element Pharr [4, 5] introduced the second method, taking into
analysis [8] is cited below, which considering a sharp account the large elastic recovery during the
Berkovich indentation on an elastic material, unloading process of hard materials. In their scheme,
the power-law relation,
E 2
P 2.1891(10.21n0.01n20.41n3) h (2)
1n2 P B(hhmin)m, (6)
ZENG and CHIU: INSTRUMENTED INDENTATION 3541

is adopted to fit the whole unloading curve where B 2.5. Elastic modulus of indenter
and m are the fitting parameters, and hmin is the
When indenting a hard material, the indenter defor-
remaining plastic indentation depth recorded at the
mation can become significant, causing the contact
end of the unloading process. After the parameters B
stiffness to decrease. This effect can be taken into
and m are determined, the contact stiffness can be
account by considering the effective contact modulus
evaluated to be S = mB(hmaxhmin)m1 where hmax is
Er of the system,
the indentation depth at the maximum load.
One of the major difference between Doerner and
1 1n2 1v20
Nixs and Oliver and Pharrs methods is the (10)
approaches for determining the contact stiffness and Er E E0
how they determine the contact area at the maximum
load, while they both focus on the effects of the elas-
tic modulus on the indentation unloading curves. The where E0 and n0 are Youngs modulus and Poissons
dependence of the curves on the other mechanical ratio of the indenter, respectively. Equation (10) indi-
properties was examined in [14, 16, 18], and the cates that the effective contact modulus Er of the sys-
attention was to demonstrate that equation (1) is valid tem is identical to that of the indented material if the
for a wide range of yielding stress and strain harden- indenter is rigid. The difference between Er and
ing [16, 19]. Those previous studies, however, have E/(1n2) increases as the elastic modulus of the
overlooked the shape of the unloading curves and its indented material approaches that of the indenter.
relation with the mechanical properties. This issue is Take the diamond indenter as an example. The rela-
addressed in this paper later in Sections 6 and 7, and tive difference between Er of the system and E/(1
it is shown that the unloading curves can be adopted n2) of a material with n = 0.25 will exceed 10% if
to determine Youngs modulus and the strain-harden- Youngs modulus E is larger than 150 GPa.
ing parameter.
2.3. True contact area 3. MATERIALS AND EXPERIMENTS

It is now generally realized that a crucial step in In our study, the following materials are tested by
analyzing the loadpenetration curve of indentation is nano-indentations: soda-lime glass, fused silica, Al,
to determine the true contact area. For an ideal sharp Cu, Ni, W, Si (001), Stainless steel (301), WC6%
Berkovich indenter, the contact area A is given by: Co, Al2O3, ZrO2, sapphire (random orientation),
glassy carbon, and polycarbonate. Among all these
A 24.56h2p (7) materials, Al, Cu, Ni, W, glassy carbon, sapphire and
polycarbonate are purchased from Goodfellow Cam-
bridge Ltd (UK). Fused silica is the material provided
where hp the plastic contact depth at the maximum by MTS Nano Instruments Innovation Center (USA)
load. In Doerner and Nixs method [3], hp is equal to as a standard material for nano-indenter calibration.
the fitting parameter h0 in equation (5). In Oliver and Al2O3 is fine-grained polycrystalline ceramics from
Pharrs method [4, 5], the plastic contact depth hp is Sandvik Procera (Sweden), ZrO2 is 3% Y2O3 partial
taken to be: stabilized ceramics. Stainless steel is a commercial
steel (301) from our workshop. WC6% Co is a com-
Pmax mercial cutting tool insert. All the material was first
hp hmaxe (8)
S mechanical polished using diamond suspensions
(down to 1 m) and then using 0.1 m silica solution
except glass, fused silica, glassy carbon, sapphire and
where the geometric constant e is taken to be 0.75 polycarbonate. The last five materials were tested as
for the Berkovich indenter. More recently, Giannako- the as-received materials. The literature values of
poulos and Suresh [13] proposed that the contact area elastic modulus and yielding stress of these materials
could be expressed as a polynomial function of the and the sources of the data are listed in Table 1.
depth ratio hmax/hmin or the ratio of the total work dur- The nano-indentation experiments were performed
ing loading to the elastic work during unloading. at two machines, both using Berkovich indenter tips.
Following materials were tested by Nano IIs Nano-
2.4. Hardness
indenter (MTS Cooperation, Nano Instruments Inno-
The hardness of a material is defined to be vation Center, TN): soda-lime glass, fused silica,
Al2O3, ZrO2, and glassy carbon. The load was selec-
Pmax ted as 40 and/or 50 mN. For some materials (soda-
H (9)
A lime glass, Al2O3, and ZrO2), the indentation method
suggested by Oliver and Pharr [4] was used, i.e.,
where A is the true contact area at the maximum load. repeated loading and unloading four times at the
The area A can be determined by the methods men- maximum load. For those materials, the analysis was
tioned earlier in the previous subsection. performed on all the four unloading cycles, but the
3542 ZENG and CHIU: INSTRUMENTED INDENTATION

Table 1. Literature values of elastic modulus of the materials 4. EXPERIMENTAL RESULTS


Materials Elastic modulus (GPa) Yielding stress (GPa)
Table 2 summarizes the hardness H and Youngs
Fused silica 6973 a

modulus E derived from Oliver and Pharrs power
Glassy carbon 2030b law fitting method, including the average value and
Soda-lime glass 66a the standard deviation of the two properties. Compar-
ZrO2 (PSZ) 205a
Al2O3 380a ing the results with Table 1 indicates that the elastic
Polycarbonate 2.5b 0.07g modulus measured by indentation is generally higher
Al 68.3c 0.10.2b than those reported in the literature.
Cu 117132b 0.070.4f
Si 112c Different maximum loads were also adopted in our
Sapphire 440.0d experiments. For the length of the paper, however,
Ni 207.0c 0.5h
Stainless steel 301 175215e 1.11.9e
the results will be presented elsewhere.
W 400.0f 0.551.0h
WC6% Co 614650f 6.0f,i
5. ANALYSIS OF LOADING CURVES
a
Engineered Materials Handbook, Volume 4, Ceramics and Glasses,
ASM International, 1991. All the numerical analyses for cone, Vickers, and
b
The Materials Selector, Vols. 2 and 3, 2nd edn, ed. N. A. Waterman Berkovich indentations indicated that the loading
and M. F. Ashby, Chapmam & Hall, London, 1997.
c
Matallic Materials Specification Handbook, 4th edn, ed. R. B. Ross, curve follows equation (1) [79, 22, 23]. Many
Chapman & Hall, London, 1992.
d
experimental results, however, have shown that the
Oliver, W. C. and Pharr, G. M., J. Mater. Res., 1992, 7(6), 1564.
e
ASM Special Handbook, Stainless Steels, ASM International, 1994.
actual relation between the load P and penetration
f
ASM Metals Handbook, Vol. 2, Properties and Selection, ASM Inter- depth h deviates from the theoretical prediction. For
national, 1992. example, when fitting the loading curve to a power-
g
CRC Materials Science and Engineering Handbook, 2nd edn. CRC
Press, 1994. law relation, P = Chn, the derived exponent n is less
h
Materials Data Sheet. Goodfellow Cambridge Ltd, 1999. than 2 [24, 25]. The discrepancy between the experi-
i
Compressive strength. mental and the theoretical results poses an issue on
understanding the loading curves obtained in experi-
ments, as well as the material properties derived by
result presented in the paper is only from the last interpretation of the curves. Therefore, it is necessary
unloading cycle. For the rest of materials, the tests to have an insight into the discrepancy before adopt-
were performed using UMIS-2000H Nano-indenter ing any model for the indentation loading curves.
(CSIRO, Australia). Again, the load was selected as The following comparison scheme is adopted to
40 and/or 50 mN. Due to the set-up of the UMIS- have a better picture about the discrepancy between
2000 Nano-indenter, Oliver and Pharrs experimental the experimental and theoretical results. In the
method cannot be used, therefore all the tests on this scheme, the loading curve is contrasted with the two
machine (UMIS-2000H) were only have one loading lines, P = C1h3/2 and P = b + C2h2, corresponding to
and unloading cycle. the cases of spherical and sharp Berkovich inden-
The indentation procedure used as following: load- tation, respectively. The constant C1 is determined by
ing to the maximum load in 20 s, holding for 30 s at fitting the first function to the initial part of the load-
the maximum load, and then unloading in approxi- ing curve (first 2050 data point). And the constants
mately the same rate (20 s from the maximum load b and C2 corresponds to the best fit of the second
to 90% of the unloading). At the 90% of unloading, function to the last part of the loading curve (last 30
another holding of 20 s to correct the thermal draft, 50 data point from the maximum load).
then fully unloading to the zero-load. This procedure The comparison scheme is applied to the cases of
was used at both Nano IIs and UMIS-2000H nano- fused silica, aluminum, and ZrO2, and the results are
indenters. The experimental data were analyzed using depicted in Fig. 1(ac), respectively. The figure
the power-law method [4] to derive the elastic modu- shows that the loading curves for those materials are
lus equations (6)(10). At least 10 indents were per- described by two different functions, P = C1h3/2 and
formed at the selected load. The reason to select the P = b + C2h2, at low- and high-loads, respectively.
indentation loads of 40 and/or 50 mN is discussed in The transition of the characteristics of the loading
Section 5. curve suggests it is the initial indentation that causes
It is worth to note that our experimental work the exponent n in the fitting P = Chn to deviate from
covers 14 materials range from polymer, soft and hard 2. The initial deviation may come from the initial
metals, ceramics, to hard carbide materials. The elas- contact at the surface and/or the imperfectness of
tic modulus and hardness of these materials covers a indenter tip. These effects become insignificant as the
range with 23 order of magnitude of differences. The load increase. Therefore, the loading process in
work was done over two different nano-indentation experiments will follow closely the theoretical predic-
machines. In addition, several indenter tips were used tion given in equation (1) after the load is sufficiently
during the experiments. Therefore the analysis and large. The minimum load required for equation (1) to
the results presented in this paper should have very be valid varies with the hardness of the material as
wide representative and unique future. well as the shape of the indenter tip. As a rule of
ZENG and CHIU: INSTRUMENTED INDENTATION 3543

Table 2. Summary of results from the power-law fitting analysis

Materials Load (mN) E (GPa) H (GPa) Instrument

Fused silica 50 79.50.3 10.80.05 Nano IIs


Glassy carbon 50 12.60.8 1.90.3 Nano IIs
SLS-glass 35 95.710.7 6.40.6 Nano IIs
SLS-glass 50 80.20.5 7.10.06 Nano IIs
Nano IIs, four times
SLS-glass 40 80.10.2 7.60.07
unloading
Nano IIs, four times
ZrO2 40 310.611.2 20.21.2
unloading
Nano IIs, four times
Al2O3 40 474.441.3 34.84.0
unloading
Polycarbonate 40 3.20.05 0.180.01 UMIS-2000H
Al 40 97.89.0 0.70.05 UMIS-2000H
Al 50 66.616.0 0.70.2 UMIS-2000H
Cu 40 122.817.0 1.50.1 UMIS-2000H
Si (001) 40 175.014.3 13.01.5 UMIS-2000H
Sapphire 40 418.84.8 29.30.8 UMIS-2000H
Ni 40 204.26.2 2.70.2 UMIS-2000H
Stainless steel 40 206.19.6 3.70.1 UMIS-2000H
W 40 431.89.1 10.80.4 UMIS-2000H
WC6% Co 40 578.318.9 24.41.5 UMIS-2000H

thumb, the load should be larger than 30 mN in order su/sy, and the yielding stress sy, is presented in the
for nano-indentation to be beyond the transition next section.
region. For this reason, the indentation loads have General speaking, the characteristics of the inden-
been selected to be 40 and/or 50 mN in our experi- tationunloading curves and their dependence on the
ments. stressstrain properties of a general elasticplastic
The requirement of a minimal load has an material are not fully understood. However, a trend
important implication on the indentation of of the indentationunloading curves can be uncovered
film/substrate structures. In general, the indentation when examining the results of two extreme cases
loading curves of film/substrate systems will deviate where the materials are fully elastic and elastic per-
from equation (1) at high loads because of the sub- fectplastic, respectively. For a fully elastic material,
strate effect. On the other hand, the minimal require- the indentationunloading curve will be identical to
ment suggests the loads have to be sufficiently large the loading one as described in equation (2), i.e. a
in order to avoid the complications at the initial stage parabolic curve Ph2. The indentationunloading
of loading. The restrictions at low and high loads curve of an elastic perfectplastic material, on the
become an issue when the film thickness is too small other hand, can be approximately described as a
such that even the minimal load can cause significant straight line depicted in equation (5) if the yielding
substrate effect. As a simple estimation, this situation strain is not unreasonably large, say 10%. For the
can occurs when the film thickness is less than 10 general elasticplastic material, the stressstrain
times the indentation depth at the minimal load of relation is between elastic one and elastic perfect
30 mN. It follows from the results in Fig. 1 that the plastic one. Thus, the indentationunloading curve of
corresponding film thickness is about 3, 5, and 20 m the general elasticplastic material will also be
for ZrO2, fused silica, and Al, respectively. However, between a parabolic curve and a straight line; as sche-
a typical Al film on Si is usually less than 1 m in matically illustrated in Fig. 2. The experimental data
thickness. Obviously, how to analyze the loading presented in Fig. 3 shown clearly that the unloading
curves in those cases is still an open question. curve is bounded by two lines (corresponding to the
indentation of fully elastic and elastic perfectplastic
cases), this also confirmed by the FEM calculations
6. AN EMPIRICAL METHOD FOR ANALYZING
presented in [9]. The unloading curve will be close
UNLOADING CURVES
to a straight line if the material is an almost elastic
In this section, an empirical method for analyzing perfectplastic one, i.e., if the strain hardening para-
the unloading curves of sharp Berkovich indentation meter is small. In contrast, the unloading curve will
is first proposed, taking into account the effects of be close to a parabolic curve if the strain hardening
elastic modulus and strain hardening on the unloading parameter is large. This suggests the unloading curve
curves. This empirical method is then adopted to ana- could be written as a linear combination of the results
lyze our experimental data, which demonstrates that of the two extreme cases as below:
the new method fits well the unloading curves
recorded in the experiments when the load is suf- P (1q)f(n)Eh2 qS(hh0) (11)
ficient high. Application of the method to deriving the
mechanical properties of materials, including
Youngs modulus E, the strain-hardening parameter where (1q) and q, respectively, are the weight of
3544 ZENG and CHIU: INSTRUMENTED INDENTATION

Fig. 2. Schematic representation of relation of the stressstrain


characteristics to the indentation loaddisplacement curve (a)
elastic, (b) elasticplastic, (c) elasticperfect plastic and (d)
rigid plastic.

Fig. 3. Experimental data showing the indentationunloading


curve is bounded by elastic solution and plastic solution.


24.56 E
S2 h. (13)
p 1n2 0

Substituting equations (12) and (13) into (11) leads to


24.56 E
P (1q)f(n)Eh2 2q h (hh0).
p 1n2 0
(14)
Fig. 1. Indentation loading curves of (a) fused silica, (b) Al
and (c) ZrO2 at different loads.
Equation (14) is an empirical equation for analyzing
the unloading curve of Berkovich indentation on a
general elasticplastic material.
the elastic and the elasticperfect plastic responses in The weight q mainly depends on the strain harden-
the unloading curve, f(n) is the effect of Poissons ing parameter sy/su. When sy/su = 1, corresponding
ratio n on an elastic indentation, S is the unloading to an elasticperfect plastic case, q = 1. On the other
stiffness of indentation on an elasticperfect plastic hand, when sy/su = 0, corresponding to an elastic
material, and h0 is a constant, referring to the plastic case, q = 0. According to the two results, it seems
depth of an indentation on the elasticperfect plastic reasonable to assume the following relation for strain-
material. It follows from equations (2), (4) and (7) hardening and unloading curve,
that f(n) and S for Berkovich indentation are given by,
q sy/su. (15)
2.1891(10.21n0.01n20.41n3)
f(n) , (12)
1n2 There clearly exist other empirical expressions for q
that satisfy the two results at sy/su = 0 and 1. One
ZENG and CHIU: INSTRUMENTED INDENTATION 3545

example is a power-law expression such as


q = (sy/su)m. Which expression is better for describ-
ing the dependence of q on the strain-hardening para-
meter requires further theoretical analyses for the
unloading process. This is a challenging question, and
is still under investigation in our group. In spite of the
lack of a rigorous theoretical support, the empirical
expressions in equations (14) and (15) together with
the loading relation equation (3) seem to provide
good estimations for the yielding stresses. As shown
later in Section 6, the yielding stresses derived by
adopting these three equations are consistent with the
literature values obtained by other experimental tech-
niques.
Another question concerning the expression for q
is its dependence on the yielding strain sy/E. This
issue is addressed later when we discuss Table 5, Fig. 4. Schematic drawing showing the surface displacement
which shows little correlation between q and sy/E for during the indentation and the relations between h0 and hmax,
the materials tested in our experiments. (a) no pile-up or sinking-in, (b) sinking-in, and (c) pile-up.
Now turn to the data analysis process for fitting
equation (14) to experimental results. It may be first has to be larger than 1. A question raised is how to
noted that equation (14) is a second order polynomial choose the value h. Our calculation suggests if is
of h with three unknown parameters q, E, and h0, sufficiently large, the actual choice of h has little
assuming n is known. This seems to suggest that one effect on the final fitting result since h only deter-
can first fit the second order polynomial equation mines the upper bound for the fitting parameter h0.
P = ah2 + bh + c to the experimental data, determine When h is too large, however, the iteration needed to
the coefficients a, b, and c, and then use the coef- obtain a convergent fitting result will increase drasti-
ficients and equation (14) to evaluate q, E, and h0. cally. This suggests that the optimum value of may
This approach, however, will lead to wrong results be the extent of pile-up. Assuming the maximum pile-
since the fitting does not take into account the limits up is about 10% of hmax leads to the choice h = 1.1
on the values of q, E, and h0 in the actual situation. for Al and Cu in the current study.
The finding led us to adopt Bates and Watts The chi-square fitting in the current study is non-
method for bounded fitting parameters [26] together linear since the empirical equation, given in equation
with the chi-square fitting scheme [27] when analyz- (14), depends non-linearly on the fitting parameters
ing our experimental data. The details of Bates and q, E, and h0. The fitting thus requires iterations in
Watts method and the implementation for the current order to obtain the best-fit parameters that minimize
study are presented in Appendix A. Here it is suf- a c2 merit function. The iteration scheme in our calcu-
ficient to explain the range of the value of each para- lation was adopted to be the LevenbergMarquardt
meter, method [27]. And the initial values of q, E, and h0
for the iterations were chosen as follows: q = 0.5,
1q0, E0, hhmaxh0hmin (16) E = 100 GPa, and h0 = (hhmax + hmin)/2. The only
exception was the initial value of q for Al and Cu,
which was taken to be 0.88 in order to accelerate the
where hmax and hmin are the recorded maximum and convergence of the iteration results.
minimum penetration depth during unloading, and the Our data analyses for the unloading curves focused
parameter h, depending on the materials, is taken to on fitting equation (14) to the first part of curves
be 1 or 1.1. The first option h = 1 is adopted for hard where P was generally higher than approx. 20 mN.
materials such as fused silica, glass, ZrO2, Al2O3, In other words, only the top 50% of the unloading
WCCo, and sapphire. And the second option curves recorded in our experiments were adopted in
h = 1.1 is employed for metallurgical materials such the fitting process. In this range of loading, the
as Al and Cu. empirical expression in (14) fits well the unloading
Choosing a higher value of h reflects the fact that curves. The best-fit parameters in the expression
there is pile-up around indents in the cases of inden- remained insensitive even when a smaller part of the
tation on metallurgical materials such as Al, Cu, Ni, curves were employed in the data analyses. The best-
and stainless steel. The pile-up causes the effective fit parameters, however, could change significantly if
penetration depth in those materials to be larger than some of the last part of the unloading curves was
the depth recorded in the experiments; see Fig. 4. included in the analyses. The last part of the
Accordingly, the parameter h0, which is related to the unloading curves when unloading to below approx.
plastic penetration depth, should be allowed to exceed 20 mN cannot be well described by our empirical
the recorded maximum depth hmax, or equivalently h expression in (14).
3546 ZENG and CHIU: INSTRUMENTED INDENTATION

The failure of equation (14) in capturing the last The hardness is called the perfect plastic hardness
part of the unloading curves can be explained by our (PPH) since h0 is the effective plastic depth of the
earlier finding in Fig. 1 that the loading curves deviate elasticperfect plastic contribution during indentation.
from the theoretical prediction for a sharp indentation The analysis scheme was applied to the indentation
in the range of 2030 mN during loading. We have data of the materials tested in our experiments. The
found that there is a transition region at the load results of E, sy, su/sy, h0, and the PPH hardness are
approx. 2030 mN during loading. The finding sug- summarized in Table 3. The results demonstrate that
gests the unloading curves will also deviate from the Youngs modulus E derived by the new analysis
prediction based on the sharp indentation assumption, scheme compares well with the literature values listed
our fitting results showed that this deviation occurs in Table 1 and with those in Table 2 that were evalu-
when the load P is below approx. 20 mN in our ated by using Oliver and Pharrs scheme [4] to fit our
experiments. Since the assumption is indeed implied experimental data. The derived yielding stresses sy in
in equation (14), the equation is therefore inappropri- most of the cases also agree well with the literature
ate for the last part of the unloading curve. This values. In only two cases, Cu and W, the results are
explanation was verified by carrying out Berkovich only slightly higher than the literature values. The
indentation tests on a few materials, such as ZrO2, reasonable agreement between our results and the
with higher loads of 75 and 100 mN. It was found literature values suggests that the empirical
that the unloading curves in these tests could be well expressions, equations (14) and (15), can be used to
described by equation (14) in the same part of curves describe well the unloading process.
where P is higher than approx. 20 mN. Throughout this paper, the strain-hardening para-
Parts (ah) of Fig. 5 compare the unloading data meter of a material is represented by the ratio su/sy
in the experiments with the fitting results of fused as suggested by FEM numerical calculations [8]. The
silica, Si, Cu, ZrO2, polycarbonate, sapphire, stainless parameter can be used to determine the other strain-
steel 301, and tungsten, respectively. The results dem- hardening properties defined in some well-known
onstrate that equation (14) fits well the high load part material models for plastic deformation. One example
of the unloading curves in our experiments. The is the power-law model where the stressstrain
empirical equation can even capture almost the whole relation under uni-axial tension in the range of yield-
unloading curves in the cases of fused silica, Cu, ing can be described as
sapphire, stainless steel 301, and tungsten although
only about 50% of data were used in our fitting.
s sy
e n
ey
. (18)

7. ELASTIC MODULUS, STRAIN HARDENING,


YIELDING STRESS, AND PILE-UP In equation (18), ey = y/E is the yielding strain, and
n is the strain-hardening exponent. The exponent n is
This empirical method for analyzing loading and
related to su/sy and ey by
the unloading curves of Berkovich indentation,
expressed in equations (3), (14), and (15), provide a ln(su/sy)
new data analysis scheme for determining Youngs n (19)
ln(eu/ey)
modulus E, the strain-hardening parameter su/sy, the
yielding stress sy, and the occurrence of pile-up or
sinking-in by the indentation technique. The first step
Using eu = 0.30 and ey = 0.002 leads to equation (1)
of the scheme is to fit equation (14) to the indentation
in [17], while in our calculation, eu was taken to be
unloading curves subject to the constraints given in
0.29 [79] sy was not fixed at 0.002 but evaluated
equation (16). Combining the results with the
by sy/E. The calculated results of the strain-hardening
assumption in equation (15) yields Youngs modulus
exponent n of the materials tested in our experiments
E, the strain-hardening parameter su/sy, and h0 of the
are presented in Table 4 where the values of E, sy,
materials; the ratio h0/hmax indicates the occurrence of
and su/sy given in Table 3 are employed in the calcu-
pile-up (h0/hmax1) or sinking-in (h0/hmax1). The
lation. The results indicate that the magnitude of the
second step is to fit the function P = Ch2 to the load-
exponent n is in the range from 0.01 to 0.03 for the
ing curves. Substituting the coefficient C and the
metals tested in our experiments, while n is larger
results of E and su/sy derived in the first step into
than 0.2 for the polymers, the glass, the carbide, and
equation (3) determines the yielding stress sy.
the ceramics examined here. It is known that most of
The quantity h0 is the only fitting parameter that
metallic materials can exhibit a wide range of strain
has a dimension of length in our method. We can
hardening exponents (0.0n0.6) depending on the
therefore define the hardness of the material as
composition and treatment conditions (annealed or
work hardened etc.) [17]; therefore a comparison
P between the strain hardening exponent determined
H (17)
24.56h20 from equation (19) with literature values need to be
studied further.
ZENG and CHIU: INSTRUMENTED INDENTATION 3547

Fig. 5. Curve fitting of the indentation unloading curve by equation (14) of selected materials: (a) fused silica,
(b) Si (001), (c) Cu, (d) ZrO2, (e) polycarbonate, (f) sapphire, (g) stainless steel 301, and (h) tungsten.

Equations (18) and (19) suggest a method for using The actual physical meaning of the parameter h0 in
the sharp indentation technique to construct the our empirical method has not been fully understood,
stressstrain relation; however, the method is only while it is noted that the ratio h0/hmax seems to be
valid when the power-law model for plastic defor- correlated with the occurrence of pile-up or sinking-
mation is appropriate for the material. The sharp in during indentation. For example, the ratio h0/hmax
indentation technique does not have the capability to of metallurgical materials, especially Al and Cu, is
depict the detailed stressstrain relation as provided larger than unity in our fitting, and a significant pile-
by a tensile test since a sharp indentation test can only up is usually observed in these materials during
apply a characteristic strain on the system, irrespec- indentation. For some hard metals such as Ni, stain-
tive of the indentation loading [7, 13, 15]. less steel, and W, h0/hmax is close to unity and the
3548

Table 3. Summary of results from the new analysis

Material Load (mN) E (GPa) q h0 (nm) PPH (GPa) Yielding strength (GPa) Instrument

Fused silica 50 74.01.1 0.490.04 430.612.1 11.00.6 2.560.22 Nano IIs


Glassy carbon 50 10.30.6 0.080.01 1474.743.1 0.950.06 0.0650.006 Nano IIs
SLS-glass 35 81.26.0 0.530.04 507.125.1 5.580.53 2.210.16 Nano IIs
SLS-glass 50 79.52.5 0.460.02 644.619.6 4.910.32 1.900.10 Nano IIs
Nano IIs, four
SLS-glass 40 74.41.1 0.430.04 533.316.9 5.740.36 1.910.20
times unloading
Nano IIs, four
ZrO2 40 275.010.2 0.420.02 337.98.6 14.30.7 4.360.13
times unloading
Nano IIs, four
Al2O3 40 416.632.4 0.310.04 269.513.2 22.62.1 6.510.86
times unloading
Polycarbonate 40 2.140.06 0.490.04 3279.355.6 0.150.01 0.0540.004 UMIS-2000H
Al 40 61.82.8 0.920.04 1576.867.4 0.660.06 0.250.04 UMIS-2000H
Al 50 61.42.8 0.870.004 1794.872.9 0.640.05 0.230.03 UMIS-2000H
Cu 40 99.16.2 0.920.02 1116.229.1 1.310.07 0.600.04 UMIS-2000H
Si (001) 40 132.88.8 0.460.10 415.724.9 9.521.21 2.940.57 UMIS-2000H
Sapphire 40 484.913.4 0.180.05 244.817.9 27.64.62 3.470.99 UMIS-2000H
Ni 40 213.414.0 0.940.01 769.918.6 2.750.14 0.550.04 UMIS-2000H
Stainless steel 301 40 191.46.3 0.930.01 643.515.2 3.940.19 1.140.05 UMIS-2000H
W 40 401.027.5 0.900.03 378.317.0 11.451.20 1.500.54 UMIS-2000H
ZENG and CHIU: INSTRUMENTED INDENTATION

WC6% Co 40 619.522.8 0.430.10 232.712.3 30.313.13 5.771.02 UMIS-2000H


ZENG and CHIU: INSTRUMENTED INDENTATION 3549

Table 4. Summary of H/E, sy/E, su/sy and strain-hardening exponent n based on new model

Materials H/E sy/E su/sy n

Fused silica 0.149 0.035 2.04 0.337


Glassy carbon 0.092 0.006 12.5 0.651
SLS-glass 0.069 0.026 2.11 0.310
ZrO2 0.052 0.016 2.38 0.299
Al2O3 0.054 0.015 3.23 0.396
Polycarbonate 0.070 0.025 2.05 0.293
Al 0.011 0.004 1.12 0.027
Cu 0.013 0.006 1.09 0.022
Si (001) 0.072 0.022 2.17 0.300
Sapphire 0.057 0.007 5.56 0.461
Ni 0.013 0.003 1.06 0.013
Stainless steel 301 0.021 0.006 1.08 0.020
W 0.029 0.004 1.11 0.024
WC6% Co 0.049 0.009 2.33 0.244

Table 5. Comparison of q and sy/E for some selected materials and 0.93). Similar situation can also be found in the
Materials q sy/E comparison of polycarbonate and WC with 6% Co.
These finds seem suggest that the values of q and
Polycarbonate 0.49 0.028 sy/E do not have relationship.
Al 0.92 0.0029
Cu 0.92 0.0034
Ni 0.94 0.0024
Stainless steel 301 0.93 0.0077 8. DISCUSSION
W 0.9 0.0025
WC6% Co 0.43 0.0092 This paper points out a new empirical method for
determining the elastic modulus, strain-hardening
parameter, and yielding stress by sharp indentation.
experimental observations are consistent that there is Supported by the good agreement between the results
no significant pile-up or sinking-in in those materials. and the literature values as well as the finite element
For the other materials tested here, the ratio h0/hmax calculation derived earlier [9], the new method has
is less than unity, which again is in accordance with many potential applications on measuring the mech-
our experimental observations that the sinking-in anical properties of complicate structures at small
occurred during indentations in those materials. length scales. The development of the approach,
It is emphasized that the data analysis scheme nevertheless, is still at the early stage, and many
presented here not only provides a novel recipe for important issues need to be resolved in order to make
determining the mechanical properties of materials by significant process in the future.
sharp indentation, but also has the advantage of being One of the issues is to explain the empirical method
robust. The method is applicable to a wide range of expressed in equations (14) and (15) from a theoreti-
materials including ceramics, hard and soft metals, cal point of view. This method is proposed by using
polymers and carbide materials. The method yields a simple argument based on the experimental obser-
consistent results though our experiments involved vations and finite element calculations. Although the
two different nano-indentation machines and several method seems to fit well the experimental data, it is
different indenter tips. The method also has the still necessary to employ the theoretical background
advantage that it does not require knowledge of true to understand why the unloading curve can be
contact area or tip profile; as a consequence, detailed approximately described by the function given in equ-
calibration of the indenter shape can be avoided in ation (14). The understanding will shed a light on the
our analysis. physical meanings of the two fitting parameters, q and
The fitting parameter q in equation (14) is proposed h0, in the empirical formular and on how the two
to be equal to the strain-hardening parameter sy/su in parameters are related to the mechanical properties of
this paper. A question raised is whether q is also the materials. Particularly, it is important to under-
related by the yielding strain ey = sy/E. This question stand the dependence of q on su/sy. It is also neces-
is examined in Table 5 by comparing q with sy/E. sary to examine the relation between q and the yield-
The values of are taken from the fitting results in ing strain ey = sy/E and that between the ratio
Table 3, while those of sy/E are from the literature h0/hmax and the amount of pile-up/sinking-in during
results in Table 1. The comparison indicates that the indentation.
correlation between q and sy/E is not significant (the Another issue that needs to be explored is the
correlation coefficient is 0.72 [28]), and in many indentation unloading process of thin film/substrate
cases q is insensitive to the variation of sy/E. For systems. Similar to the case of bulk materials, the
example, sy/E of Ni and stainless steel 301 is signifi- shape of the unloading curves in the systems has been
cantly different (0.0024 and 0.0077, respectively), but overlooked in the literature, though the dependence
the corresponding difference in q is negligible (0.94 of the contact stiffness at the initial of unloading on
3550 ZENG and CHIU: INSTRUMENTED INDENTATION

the elastic moduli of the film and the substrate was soft metals, carbide and polymers were tested and
examined in [29]. Modifying the results by consider- analysed by the new method. The results of Youngs
ing the effect of strain-hardening on the unloading modulus and the yielding stress of the materials agree
process may provide an insight into the unloading well with the existing literature values. The Youngs
curves of the systems. modulus is also consistent with those derived by other
The third issue is the uniqueness of the mechanical analysis methods for nano-indentation data. The new
properties determined by the sharp indentation test. method has the advantage of robust, giving consistent
This issue was addressed in [30] where FEM calcu- results even though our experiment involved different
lations was employed to show that different combi- nano-indentation machines and indenter tips. The
nations of yielding stress sy and strain-hardening method also has the advantage that it does not require
exponent n could lead to the same loading and knowledge of true contact area or tip profile.
unloading curves. A more recent study, however, Finally, we defined a new hardness of materials,
repeated some of the calculations and concluded that called the perfect plastic hardness. The new hardness
the loading/unloading curves were different [17]. In related only with the virtual perfect plastic defor-
order to clarify this issue, it is necessary to carry out mation during indentation.
systematic calculations to examine the variations of
the characteristics of the loading/unloading curves
AcknowledgementsPart of the experimental work was done
with the mechanical properties. at Department of Materials Science and Engineering, Royal
The fourth issue is the initial indentation due to Institute of Technology (KTH), Stockholm, Sweden. The
imperfect indenter tip and contact surface. Of parti- authors would like to thank the support for the experiments
cular interest is how the imperfect indenter tip and from KTH.
contact surface cause the loading curves to deviate
from the relation P = Ch2 at the initial stage of inden-
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APPENDIX A are bounded within their limits.
For the work presented in this paper, two kinds of
Curve fitting with the bounded fitting parameters and
initial values were given. For hard materials such as
initial values determination
fused silica, glass, ZrO2, Al2O3, WCCo, sapphire
For a fitting parameter a bounded with fixed values etc, the initial values were taken as that f1 = f2 = 0.
a and b, it is then more convenient to write the fitting This gives the q = 0.5 and h0 = 1/2(hmax + hmin).
parameter as: For soft metallurgical materials, such as Al, Cu, Ni
and stainless steel etc, the initial value was selected
ba differently. The indentation unloading curve of these
aa (A1)
1 ef material is close to a straight line, this means that
fitting parameter q is very close to 1. In order to min-
imize the computation time for the non-linear curve
where as f is a new parameter can take any value fitting, we choose f1 = 2, gives the initial value of
between and +. Based on equation (A1), we q = 0.88. For those materials, we also include the
choose the fitting parameters q and h0 as follows pile-up during the indentation, then set f2 = 0, but the
upper bound for h0 in equation (A3), hmax is replaced
1 by 1.1hmax, this allows maximum pile-up 10% of hmax,
q (A2)
1 ef1 so that the initial value is h0 = 12(1.1hmax + hmin).

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