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Electrostatics of
Metal-Oxide-Semiconductor Structure
Contents:
Reading assignment:
Key questions
1. Introduction
Metal-Oxide-Semiconductor structure:
metal
interconnect to gate
gate oxide
ox = 3.9 o n+ polysilicon gate
p-type x
s = 11.7 o
Idealized 1D structure:
"metal"
(n+ polySi)
semiconductor
oxide (p type)
contact contact
-tox 0 x
log po, no
Na
po
no
ni2
Na
-tox 0 xdo x
no
ni2
Na
-tox 0 xdo x
QG
0 0 xdo
-tox x
-qNa
2 Electric field
1 Z x2
Eo(x2) Eo(x1) = x1 o(x)dx
oxEox = sEs
Eox s
= '3
Es ox
Eox
Es
0
0 x
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-8
0 0 xdo
-tox x
-qNa
E
Eox
Es
0
-tox 0 xdo x
qNa
0 < x < xdo Eo(x) = (x xdo)
s
s + qNaxdo
tox < x < 0 Eo(x) = Eo(x = 0 ) =
ox ox
2 Electrostatic potential
(with = 0 @ no = po = ni)
kT no kT po
= ln = ln
q ni q ni
in n+ gate: no = Nd+ g = n+
in p-QNR: po = Na p = kT
q
ln Nnia
n+
B
0
-tox 0 xdo x
p
Built-in potential:
kT Na
B = g p = n+ + ln
q ni
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-10
Eox
Es
0
-tox 0 xdo x
n+
Vox,o
B 0 xdo
0 x
-tox
VB,o
p
qNa
0 < x < xd o(x) = p + (x xdo)2
2s
qNax2do qNaxdo
tox < x < 0 o(x) = p + + (x)
2s ox
qNax2do qNaxdotox
B = VB,o + Vox,o = +
2s ox
ox
Cox =
tox
1 r
= 2sqNa
Cox
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-12
2 Numerical example:
= 0.43 V 1/2
xdo = 91 nm
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-13
"metal"
semiconductor
contact oxide contact
(p type)
n+
B
0 0
x
-tox xdo
p
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-14
"metal"
(n+ polySi)
semiconductor
oxide (p type)
contact contact
-tox 0 x
gate contact
n+-polysilicon gate
oxide
semiconductor SCR
semiconductor QNR
semiconductor contact
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-15
VGB B+VGB
? B
0 -tox 0 xdo
x
xd
0
-tox 0 x
-qNa
Eox
Es
0
-tox 0 xd x
VGB=0
VGB>0
B+VGB
B
0
-tox xd x
0
log p, n
Na
n
ni2
Na
-tox 0 xd x
B B + VGB
For example,
v
u
u
s 4(B + VGB )
u
u
xd(VGB ) = [ 1+ u
t 1]
Cox 2
VGB xd
6.012 - Microelectronic Devices and Circuits - Spring 2003 Lecture 7-18
Key conclusions