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Lecture 12:
Micromachining with
Laser
Prasanna S. Gandhi
Assistant Professor,
Department of Mechanical Engineering,
Indian Institute of Technology, Bombay,
Recap
Laser fundamentals
Stimulated emission
Laser beam characteristics
Laser demo: Excimer laser
Today
Active medium
Source of pumping energy
Discharge excitation (electrical current thro medium)
Electrical or ion beam excitation (pulses of e/ions
deposited in medium from accelerator)
Microwave excitation
Chemical excitation (exothermic reaction)
Nuclear excitation (nuclear reaction)
Resonating cavity
L
plane-parallel resonator
(marginal stability)
Light oscillator
r1 = L
(laser cavity, laser resonator)
r1 hemiconfocal resonator
(stable)
Laser
medium r 1 = r2 = L
r1 concentric resonator r2
Principle set-up of various mirror
configurations for a laser resonator r1 + r2
= L
2
confocal unstable r2
r1
resonator
Source of Pumping
Simple model
I(X) = (1-R)I0 e(-x)
: absorption coefficient
R: reflectance
h = In 0 : threshold fluence
1
0
Mechanics of
Micromachining
Simple model x
T(x,t) = T0 erf
2kt
Temperature variation
T0: surface temperature
: coefficient of temperature
diffusion
erf: error function
http://mathworld.wolfram.com/
Mechanics of
Micromachining
Summary:
Laser Micro-machining By long pulses
Absorption: depends upon the w/p material, power
density and wavelength. CO2 lasers 20% absorption
whereas Nd: YAG and exciemer 40-80% is absorbed.
The optical penetration depth is a depth for which power
density is reduced to 1/e of the initial density. With CO2
lasers this depth is 15 nm and with Nd: YAG it is 5 nm.
The heat flow in the bulk of the material is a approx. one
dimensional phenomenon and the temperature at the
surface is given by
T = (Ia/) (4at/)1/2
Where, Ia power density (W/cm2) ; a - thermal
diffusivity = /c; t - time.
For Ia = 109 W/cm2 on steel, the melting point is reached
in 300 ns. If power density is increased 10 times, time to
melt is reduced to 3 ns.
Laser Micro-machining By long pulses
The high vaporization rate causes a shock wave and a high vapor
pressure at the liquid surface considerably increases the boiling
temperature. Finally, the material is removed by the expulsion of melt
and explosive like boiling of the superheated liquid at the end of a laser
pulse. Machining of metals generate a rim of resolidified material.
The value 0.44 is known as the time-bandwidth product of the pulse, and
varies depending on the pulse shape.
Using this equation, we can calculate the minimum pulse duration which
can be produced by a laser. For the HeNe laser with a 1.5 GHz bandwidth,
the shortest Gaussian pulse which can be produced would be around 300
picoseconds; for the 128 THz bandwidth Ti:sapphire laser, this duration
would be only 3.4 femtoseconds.