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Reg. N Question Paper Code: 17716 M.B. DEGREE EXAMINATION, NOVEMBER/DECEMBER 2016. Second Semester Manufacturing Engineering . MF 7204 — MEMS AND NANOTECHNOLOGY sf (Regulations 2013) Time : Three hours wun : 100 marks sepe 10. ue Anawer ALL questions. & PART A— (10x 2= 20 mats) Distinguish between microsystems and microelectronics technology. What are the role of substrates in microelectronics? List the various light sources used in photoresists. List the major steps involved in LIGA process. Distinguish between the chemiresistor and chemicapacitor sensors. What is the principle involved in an electrochemical sensor for the sensing of biological samples? Comment on the effect of nanoscale dimension of vibration. Distinguish between Top-down and Bottom-up processes of nanomaterials synthesis. ‘What information can be had from diffraction analsysis. nanomaterials? What is the capability of STM in characterization of nanostructures? @) b) PART B—(5 x 13 = 65 marks) WWWJBCENIEUESTIONDOPELCO Explain in detail the application of SiOz, Gallium Arsenide and conducting polyniers in MEMS devices? Or Describe in detail the working principle, application and advantages of microsystems? 13, 4 15, 16. @) ) @) ) (a) ) (a) ) @ &) Explain in detail, how the CVD process can be utilized during the fabrication of microsystem? Or Describe in detail the different packaging technologies used for assembly of microsystem? Explain in detail the performance response and application of microactuators? Or Write a detailed note on @) Pressure Sensors, www-secentqueshoneal ©) (i) Accelerometer. @ Explain in detail the synthesis procedure of nanomaterials by Sol-Gel on high energy bell milling process with appropriate examples. Or Describe in detail the role of nanoscale dimension on the structural and optical properties of materials. Explain in detail the principle, working and application of confocal Jaser ‘scanning microscopy for the characterization of nanomaterials? Or Explain in detail the principle, working and application of Raman Spectroscopy for’ the evaluation of properties of nanomaterials and nanostructures. PART C— (1x 15 = 15 marks) (@__ Describe in detail the synthesis procedure of Carbon nanotubes. (8) Gi) What are the properties of CNT? @ ii) What are the applications of carbon nanotubes? @ Or Explain application of TEM, AFM and SEM in the characterization of materjals used in MEMS. . ee 2 17716