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APPLICATIONS 12
Vibration monitoring 9
Shock detection 6
RESPONSE (dB)
GENERAL DESCRIPTION 6
07510-102
12
This part is ideal for industrial, medical, and military applications 15
1 10 100 1k 10k 100k
where wide bandwidth, small size, low power, and robust
FREQUENCY (Hz)
performance are essential.
Figure 1. Sensor Frequency Response
FUNCTIONAL BLOCK DIAGRAM
VS
VDD
ADXL001
TIMING
GENERATOR
VDD2
SELF-TEST
07510-001
ST COM
Figure 2.
Rev. A
Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
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Trademarks and registered trademarks are the property of their respective owners. Fax: 781.461.3113 2010 Analog Devices, Inc. All rights reserved.
ADXL001* PRODUCT PAGE QUICK LINKS
Last Content Update: 02/23/2017
DOCUMENTATION DISCUSSIONS
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Accelerometers and Gyros
Data Sheet
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ADXL001
TABLE OF CONTENTS
Features .............................................................................................. 1 Design Principles........................................................................ 11
Applications ....................................................................................... 1 Mechanical Sensor ..................................................................... 11
General Description ......................................................................... 1 Applications Information .............................................................. 12
Functional Block Diagram .............................................................. 1 Application Circuit..................................................................... 12
Revision History ............................................................................... 2 Self-Test ....................................................................................... 12
Specifications..................................................................................... 3 Acceleration Sensitive Axis ....................................................... 12
Specifications for 3.3 V Operation ............................................. 3 Operating Voltages Other Than 5 V ........................................ 12
Specifications for 5 V Operation ................................................ 4 Layout, Grounding, and Bypassing Considerations .................. 13
Recommended Soldering Profile ............................................... 5 Clock Frequency Supply Response .......................................... 13
Absolute Maximum Ratings............................................................ 6 Power Supply Decoupling ......................................................... 13
ESD Caution .................................................................................. 6 Electromagnetic Interference ................................................... 13
Pin Configuration and Function Descriptions ............................. 7 Outline Dimensions ....................................................................... 14
Typical Performance Characteristics ............................................. 8 Ordering Guide .......................................................................... 14
Theory of Operation ...................................................................... 11
REVISION HISTORY
2/10Rev. 0 to Rev. A
Added -250 and -500 models ............................................ Universal
Changes to Table 1 ............................................................................ 3
Changes to Table 2 ............................................................................ 4
Added Figure 9 through Figure 18 ................................................. 8
Changes to Ordering Guide .......................................................... 14
Rev. A | Page 2 of 16
ADXL001
SPECIFICATIONS
SPECIFICATIONS FOR 3.3 V OPERATION
TA = 40C to +125C, VS = 3.3 V 5% dc, acceleration = 0 g, unless otherwise noted.
Table 1.
ADXL001-70 ADXL001-250 ADXL001-500
Parameter Conditions Min Typ Max Min Typ Max Min Typ Max Unit
SENSOR
Nonlinearity 0.2 2 0.2 2 0.2 2 %
Cross-Axis Sensitivity Includes package 2 2 2 %
alignment
Resonant Frequency 22 22 22 kHz
Quality Factor 2.5 2.5 2.5
SENSITIVITY
Full-Scale Range IOUT 100 A 70 +70 250 +250 500 +500 g
Sensitivity 100 Hz 16.0 4.4 2.2 mV/g
OFFSET Ratiometric
Zero-g Output 1.35 1.65 1.95 1.35 1.65 1.95 1.35 1.65 1.95 V
NOISE
Noise 10 Hz to 400 Hz 85 95 105 mg rms
Noise Density 10 Hz to 400 Hz 3.3 3.65 4.25 mg/Hz
FREQUENCY RESPONSE
3 dB Frequency 32 32 32 kHz
3 dB Frequency Drift 2 2 2 %
Over Temperature
SELF-TEST
Output Voltage Change 400 125 62 mV
Logic Input High 2.1 2.1 2.1 V
Logic Input Low 0.66 0.66 0.66 V
Input Resistance To ground 30 50 30 50 30 50 k
OUTPUT AMPLIFIER
Output Swing IOUT = 100 A 0.2 VS 0.2 0.2 VS 0.2 0.2 VS 0.2 V
Capacitive Load 1000 1000 1000 pF
PSRR (CFSR) DC to 1 MHz 0.9 0.9 0.9 V/V
POWER SUPPLY (VS)
Functional Range 3.135 6 3.135 6 3.135 6 V
ISUPPLY 2.5 5 2.5 5 2.5 5 mA
Turn-On Time 10 10 10 ms
Rev. A | Page 3 of 16
ADXL001
SPECIFICATIONS FOR 5 V OPERATION
TA = -40C to +125C, VS = 5 V 5% dc, acceleration = 0 g, unless otherwise noted.
Table 2.
ADXL001-70 ADXL001-250 ADXL001-500
Parameter Conditions Min Typ Max Min Typ Max Min Typ Max Unit
SENSOR
Nonlinearity 0.2 2 0.2 2 0.2 2 %
Cross-Axis Sensitivity Includes package 2 2 2 %
alignment
Resonant Frequency 22 22 22 kHz
Quality Factor 2.5 2.5 2.5
SENSITIVITY
Full-Scale Range IOUT 100 A 70 +70 250 +250 500 +500 g
Sensitivity 100 Hz 24.2 6.7 3.3 mV/g
OFFSET Ratiometric
Zero-g Output 2.00 2.5 3.00 2.00 2.5 3.00 2.00 2.5 3.00 V
NOISE
Noise 10 Hz to 400 Hz 55 60 70 mg rms
Noise Density 10 Hz to 400 Hz 2.15 2.35 2.76 mg/Hz
FREQUENCY RESPONSE
3 dB Frequency 32 32 32 kHz
3 dB Frequency Drift 2 2 2 %
Over Temperature
SELF-TEST
Output Voltage Change 1435 445 217 mV
Logic Input High 3.3 3.3 3.3 V
Logic Input Low 0.66 0.66 0.66 V
Input Resistance To ground 30 50 30 50 30 50 k
OUTPUT AMPLIFIER
Output Swing IOUT = 100 A 0.2 VS 0.2 0.2 VS 0.2 0.2 VS 0.2 V
Capacitive Load 1000 1000 1000 pF
PSRR (CFSR) DC to 1 MHz 0.9 0.9 0.9 V/V
POWER SUPPLY (VS)
Functional Range 3.135 6 3.135 6 3.135 6 V
ISUPPLY 4.5 9 4.5 9 4.5 9 mA
Turn-On Time 10 10 10 ms
Rev. A | Page 4 of 16
ADXL001
RECOMMENDED SOLDERING PROFILE
Table 3. Soldering Profile Parameters
Profile Feature Sn63/Pb37 Pb-Free
Average Ramp Rate (TL to TP) 3C/sec maximum 3C/sec maximum
Preheat
Minimum Temperature (TSMIN) 100C 150C
Maximum Temperature (TSMAX) 150C 200C
Time (TSMIN to TSMAX), ts 60 sec to 120 sec 60 sec to 150 sec
TSMAX to TL
Ramp-Up Rate 3C/sec 3C/sec
Time Maintained Above Liquidous (tL)
Liquidous Temperature (TL) 183C 217C
Liquidous Time (tL) 60 sec to 150 sec 60 sec to 150 sec
Peak Temperature (TP) 240C + 0C/5C 260C + 0C/5C
Time Within 5C of Actual Peak Temperature (tP) 10 sec to 30 sec 20 sec to 40 sec
Ramp-Down Rate 6C/sec maximum 6C/sec maximum
Time 25C to Peak Temperature (tPEAK) 6 minute maximum 8 minute maximum
TL
TSMAX tL
TSMIN
tS
PREHEAT RAMP-DOWN
07510-022
tPEAK
TIME (t)
Rev. A | Page 5 of 16
ADXL001
Rev. A | Page 6 of 16
ADXL001
07510-004
COM 3 5 DNC
4
ST
DNC = DO NOT CONNECT
ADXL001
TOP VIEW
(Not to Scale)
Rev. A | Page 7 of 16
PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION
10
15
20
25
10
15
20
25
30
35
40
45
10
20
30
40
50
60
0
5
0
5
0
15.2 0.07 0.07
ADXL001
16.0 0 0
(mV/g)
VOLTS
VOLTS
16.1 0.01 0.01
16.2 0.02 0.02
16.3
0.03 0.03
VS = 3.3 V, TA = 25C, unless otherwise noted.
16.4
0.04 0.04
16.5
Rev. A | Page 8 of 16
PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION
10
15
20
25
30
10
15
20
25
30
35
10
15
20
25
0
5
0
5
0
5
4.32 15.3
4.32
15.4
4.34 4.34
15.5
4.36
4.36 15.6
4.38 15.7
4.38
4.40 15.8
4.40
15.9
4.42
4.42 16.0
(mV/g)
(mV/g)
(mV/g)
4.44
16.1
4.44
4.46 16.2
4.46
4.48 16.3
4.48 16.4
4.50
4.50 16.5
4.52
4.56 4.54
10
15
20
25
10
15
20
25
30
10
15
20
25
30
0
5
0
5
0
5
360 2.17 2.17
365
2.18
370 2.18
375 2.19
2.19
380 2.20
385 2.20
2.21
390
2.21
395 2.22
(mV)
(mV/g)
(mV/g)
405
2.24 2.23
410
415 2.25
2.24
420 2.26
2.25
Rev. A | Page 9 of 16
PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION
10
15
20
25
30
10
15
20
25
30
35
40
10
15
20
25
30
0
5
0
5
0
5
110
55
2.000
112
56
2.075
114
57
2.150
116
118
58
2.225
120
2.300
59 122
2.375
60
124
2.450
61
126
(mV)
(mV)
(mA)
128
2.525
62
130
2.600
63
132
134
Figure 15. ADXL001-500, Self-Test Delta
Figure 14. ADXL001-250, Self-Test Delta
2.750 136
65
138
2.825
66
140
2.900
67
142
07510-010 07510-029 07510-028
ADXL001
ADXL001
40
35
PERCENT OF POPULATION
30
25
20
15
10
07510-012
5
07510-011
0
CH1 500mV BW CH2 500mV BW M10.0s A CH2 1.38V
2.100
2.175
2.250
2.325
2.400
2.475
2.550
2.625
2.700
2.775
2.850
2.925
3.000
T 42.80%
(mA)
Figure 17. ISUPPLY at 125C Figure 18. Turn-On Characteristic (10 s per DIV)
Rev. A | Page 10 of 16
ADXL001
THEORY OF OPERATION
DESIGN PRINCIPLES MECHANICAL SENSOR
The ADXL001 accelerometer provides a fully differential sensor The ADXL001 is built using the Analog Devices SOI MEMS
structure and circuit path for excellent resistance to EMI/RFI sensor process. The sensor device is micromachined in-plane
interference. in the SOI device layer. Trench isolation is used to electrically
This latest generation SOI MEMS device takes advantage isolate, but mechanically couple, the differential sensing elements.
of mechanically coupled but electrically isolated differential Single-crystal silicon springs suspend the structure over the
sensing cells. This improves sensor performance and size handle wafer and provide resistance against acceleration forces.
because a single proof mass generates the fully differential
ANCHOR
signal. The sensor signal conditioning also uses electrical
feedback with zero-force feedback for improved accuracy MOVABLE
PLATE FRAME
and stability. This force feedback cancels out the electrostatic CAPACITORS
forces contributed by the sensor circuitry. UNIT
FIXED
ACCELERATION
SENSING
CELL PLATES
Figure 19 is a simplified view of one of the differential sensor
cell blocks. Each sensor block includes several differential
capacitor unit cells. Each cell is composed of fixed plates attached UNIT
FORCING
MOVING
to the device layer and movable plates attached to the sensor PLATE
CELL
07510-019
ANCHOR
Rev. A | Page 11 of 16
ADXL001
APPLICATIONS INFORMATION
APPLICATION CIRCUIT ACCELERATION SENSITIVE AXIS
Figure 20 shows the standard application circuit for the ADXL001. The ADXL001 is an x-axis acceleration and vibration-sensing
Note that VDD and VDD2 should always be connected together. device. It produces a positive-going output voltage for vibration
The output is shown connected to a 1000 pF output capacitor toward its Pin 8 marking.
for improved EMI performance and can be connected directly PIN 8
to an ADC input. Use standard best practices for interfacing
with an ADC and do not omit an appropriate antialiasing filter.
VS
CVDD
07510-002
0.1F VDD2
8 VDD
DNC 1 7 Figure 21. XOUT Increases with Acceleration in the Positive X-Axis Direction
ADXL001 XOUT
OPERATING VOLTAGES OTHER THAN 5 V
DNC 2 TOP VIEW 6 XOUT
(Not to Scale) COUT The ADXL001 is specified at VS = 3.3 V and VS = 5 V. Note that
COM 1nF
3 5 DNC some performance parameters change as the voltage is varied.
4
In particular, the XOUT output exhibits ratiometric offset and
ST
ST sensitivity with supply. The output sensitivity (or scale factor) scales
07510-023
HIGH LIMIT
plate. This potential creates an attractive electrostatic force, causing 2.5
the sensor to move toward those fixed fingers. The entire signal
channel is active; therefore, the sensor displacement causes a
2.0
change in XOUT. The ADXL001 self-test function verifies proper
operation of the sensor, interface electronics, and accelerometer
LOW LIMIT
channel electronics. 1.5
07510-016
Do not expose the ST pin to voltages greater than VS + 0.3 V. If
this cannot be guaranteed due to the system design (for instance, if 1.0
3.2 3.7 4.2 4.7 5.2 5.7
there are multiple supply voltages), then a low VF clamping SUPPLY VOLTAGE (V)
diode between ST and VS is recommended. Figure 22. Typical Zero-g Bias Levels Across Varying Supply Voltages
Rev. A | Page 12 of 16
ADXL001
Rev. A | Page 13 of 16
ADXL001
OUTLINE DIMENSIONS
0.031 (PLATING OPTION 1,
SEE DETAIL A
0.025 FOR OPTION 2)
111808-C
DETAIL A
(OPTION 2)
ORDERING GUIDE
Model 1 Temperature Range g Range Package Description Package Option
ADXL001-70BEZ 40C to +125C 70 g 8-Terminal LCC E-8-1
ADXL001-70BEZ-R7 40C to +125C 70 g 8-Terminal LCC E-8-1
ADXL001-250BEZ 40C to +125C 250 g 8-Terminal LCC E-8-1
ADXL001-250BEZ-R7 40C to +125C 250 g 8-Terminal LCC E-8-1
ADXL001-500BEZ 40C to +125C 500 g 8-Terminal LCC E-8-1
ADXL001-500BEZ-R7 40C to +125C 500 g 8-Terminal LCC E-8-1
EVAL-ADXL001-250Z Evaluation Board
EVAL-ADXL001-500Z Evaluation Board
EVAL-ADXL001-70Z Evaluation Board
1
Z = RoHS Compliant Part.
Rev. A | Page 14 of 16
ADXL001
NOTES
Rev. A | Page 15 of 16
ADXL001
NOTES
Rev. A | Page 16 of 16