STANFORD NANO PATTERNING

CLEANROOM MANUAL

The Stanford Nano Patterning Cleanroom (NPC)

Spilker Building
Rooms 005 and 006
Revised June, 2016
 Stanford Nano Patterning Facility Cleanroom Manual

Table of Contents

1. Safety Objective........................................................................................................................................................1
1.1 Staff Responsibility.................................................................................................................................................1
1.2 Lab User Responsibilities........................................................................................................................................1
2. General Safety..........................................................................................................................................................1
2.1 Lab Behavior...........................................................................................................................................................1
2.2 Appropriate Street Clothing and Shoes....................................................................................................................1
2.3 Eye Protection..........................................................................................................................................................1
2.4 Personal Protective Equipment................................................................................................................................1
2.5 Buddy System..........................................................................................................................................................2
2.6 Special Health Concerns..........................................................................................................................................2
3. Facility Hazards Overview.......................................................................................................................................2
3.1 Chemical Hazards....................................................................................................................................................2
3.2 Electrical Hazards....................................................................................................................................................2
3.3 Other Hazards..........................................................................................................................................................2
4. Chemical Safety Information.....................................................................................................................................2
4.1 Manufactures Chemical Labels..............................................................................................................................2
4.2 Secondary Use Labels..............................................................................................................................................3
4.3 Safety Data Sheets SDS...........................................................................................................................................3
5. Chemical Hazard Classes..........................................................................................................................................3
5.1 Liquid Chemical Hazard categories.........................................................................................................................3
5.1.1 Solvents.................................................................................................................................................................3
5.1.2 Corrosives.............................................................................................................................................................3
5.1.3 Oxidizers...............................................................................................................................................................4
5.1.4 Water Reactive......................................................................................................................................................4
5.1.5 Flammables...........................................................................................................................................................4
5.1.6 Toxic/Poison.........................................................................................................................................................4
5.1.7 Non-toxic..............................................................................................................................................................4
5.2 Resist Chemicals......................................................................................................................................................4
5.3 Miscellaneous Materials..........................................................................................................................................4
6. Chemical Storage.......................................................................................................................................................5
6.1 Chemical Storage.....................................................................................................................................................5
6.2 General Use Chemicals..................................................................................................6.1 General Use Chemicals
.......................................................................................................................................................................................6
6.32 Personal Chemical StorageIntroducing New Chemicals.......................................................................................6
6.4 Personal Chemical Storage......................................................................................................................................6
7. Chemical Handling....................................................................................................................................................6
7.1 Personal Protective Equipment................................................................................................................................6
7.2 Transporting Chemicals in the Lab..........................................................................................................................6
7.3 Chemical Waste Disposal........................................................................................................................................7
7.4 Solid Hazardous Waste Disposal.............................................................................................................................7
7.5 Chemical Spills........................................................................................................................................................7
8. Emergency Responses...............................................................................................................................................8
8.1 General Emergencies...............................................................................................................................................8
8.2 Life Threatening Medical Emergency.....................................................................................................................8
8.3 NPC Response Procedures......................................................................................................................................8
8.4 Evacuations.............................................................................................................................................................8
8.4.1 Building Evacuation.............................................................................................................................................8
8.4.2 Laboratory Evacuation..........................................................................................................................................9
8.4.3 Wet Bench Room Evacuation and Issolation........................................................................................................9
8.4.4 Odors in the Lab...................................................................................................................................................9
8.4.5 Lab Fire.................................................................................................................................................................9
8.4.6. Fire Alarms..........................................................................................................................................................9
8.4.76 Electrical Power Outage.....................................................................................................................................9
8.4.87 Major Earthquake.............................................................................................................................................10
8.4.98 Water on Floors.................................................................................................................................................10
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9.1 Appearance and Location........................................................................................................................................9
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9.3 Actions to be taken...................................................................................................................................................9
910. Chemical Exposure..............................................................................................................................................10
101. Reporting Accidents.............................................................................................................................................10
11.2.3.1 Medical Providers or Work Related Injuries..................................................................................................11
Appendix A: Chemicals in the Lab..............................................................................................................................12
Appendix B: Nano Patterning Cleanroom Safety Map...............................................................................................13

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1. Safety Objective

The primary goal of safety programs is the prevention of accidents through the education of the lab user
community. This is achievable through the understanding of safety hazards, the adherence to the safety policies,
and the expectation of self policing between our lab user and the lab user community. The secondary goal of a
safety program is learning and applying the correct response in a safety or emergency event.

1.1 Nano Patterning Cleanroom Staff Responsibilities

The responsibility of the Staff within the facility regarding safety is to:
1 Inform the lab member community of potential safety hazards within the facility
2 Provide the appropriate personal protective equipment (PPE)
3 Maintain a current SDS binder
4 Verify the safe operation of all facility equipment.

1.2 Lab User Responsibilities

The responsibility of the lab user within the facility regarding safety is to:
1. Follow the safety guidelines of the facility at all times
2. Operate in a safe and professional manner at all times
3. Take responsibility for your own and other lab members safety at all times
4. Report any unsafe conditions, or unsafe practices of their fellow lab users to the facility staff
5. Submit any suggestion for improving safety to the facility staff.

WARNING: Any lab member not adhering to the General Lab Behavior, either intentionally or unintentionally
will be subject to administrative action and this may result in a loss of lab privileges. See SNSF general policies at:
http://snsf.stanford.edu/labmembers/policies.html
WARNING: Any lab member found behaving in an unsafe manner, either intentionally or unintentionally will be
subject to administrative action and this may result in a loss of lab privileges.

2. General Safety

2.1 Lab Behavior

1. The appropriate clean room gowns must be worn. This includes disposable shoe covers, hairnets, clean
room hoods, clean room coveralls, clean room boots, and gloves.
2. Eating, drinking and gum chewing are strictly prohibited within the clean room. Absolutely no drinking is
allowed within the clean room.
3. All materials brought in to the clean room must be clean room compatible. No paper, backpacks, etc are
allowed.
4. Laptop and tablet computers are allowed, but must be wiped down or blown off with N2 prior to entering
the clean room.
5. Your work area must be clean of clutter and chemicals when you are finished.
6. Only qualified lab users who have completed the lab safety requirements are allowed in the facility
unescorted by staff.

WARNING: Any lab member not adhering to the General Lab Behavior, either intentionally or unintentionally
will be subject to administrative action and this may result in a loss of lab privileges.

2.2 Appropriate Street Clothing and Shoes

You are required to wear clean room gowns over your street cloths. To be most comfortable, street clothing
should be worn that is light weight, comfortable and allows for free movement.
Required street clothing:
Long pants (or the equivalent) that cover the legs and ankles.
Non-perforated closed toed shoes that completely cover feet. Avoid shoes with sharp or pointed heels that
could jam in the perforated floor.

2.3 Eye Protection

Safety glasses are required at all times in the facility. Safety glasses must be of type B, C, D, G, or H (with side
shields or offer side protection) and conform to ANSI standard (marked "Z87"). Safety glasses must be worn over
all prescription glasses which are not safety glasses. Anyone wearing contact lenses must wear safety glasses.

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Standard safety glasses are designed to protect against flying fragments, but, not chemical splash hazards. Full
face shields must be worn in addition to the lab members safety glasses when handling chemicals or working at
chemical wet benches.

2.4 Personal Protective Equipment

Complete Personal Protective Equipment (PPE) must be worn while using any wet bench or during the
transportation of any chemical. See appendix A for required and recommended PPE when working at the wet
benches.

2.5 Buddy System

Safety is a critical concern and we do not want users working in isolation. We are concerned about injuries being
reported and responded to in a timely fashion. Please use the following methods to decrease the response time to
any injuries that might occur (in descending order of preference):
1. Have a lab "buddy" who is working in the SNPC cleanroom at the same time and is aware of your
presence and well being.
2. Have a friend within Spilker check on you periodically (to make sure youre not incapacitated). Have
them walk by the windows every hour or so and look to see if youre OK.
3. Make sure a friend or family member is aware of your plan for working in Nanopatterning Cleanroom.
Call, or text every couple of hours to let them know youre OK. Also, prepare them to call the Stanford
Emergency Dispatch Office at: 650-329-2412 if you stop responding to calls or texts, or do not return
from the lab after a reasonable time.

2.6 Special Health Concerns

1. Pregnancy: Lab members who are concerned should consult with EH&S. Nancy Young 725-9597.
2. Pacemakers: Equipment in the lab may serve as sources of high voltage, ionizing radiation, ultrasonic
interference or electromagnetic interference, which may affect normal operation of a pacemaker. If you
have such a device, you should consult your physician before working in the lab.

3. Facility Hazards Overview

3.1 Chemical Hazards

The key to safe use of any chemical is the understanding the hazards presented by each specific chemical and
knowing and using the appropriate precautionary measures to minimize these hazards. Knowing the main hazards
and general rules for how to safely transport, pour, use, and dispose of these chemicals is every lab member's
responsibility. Detailed hazard information is provided in the Safetey Data Sheet (SDS) located in the entry to the
lab and online.

3.2 Electrical Hazards

The danger of injury due to electrical shock is present in any electrical component. To prevent electrical exposure
all equipment is interlocked and must have the protective covers in place while being used. If you feel the
equipment is unsafe or a potential electrical hazard exists, stop using the tool and immediately notify the staff.

Notice: With the exception of personal electronics devices, any electrical equipment brought into the facility must
have prior approval by the facility staff.

3.3 Other Hazards

Many tools in the lab use or generate high voltages, ultraviolet, or electromagnetic radiation. Safety interlocks are
built into each tool, which prevent direct contact with high voltage sources or exposure to radiation sources during
normal operation. However, no system is absolutely foolproof. It is absolutely essential that you, as a lab user, learn
and are always aware of the potential hazards, follow the procedures for safe operation of each tool you are
qualified to use, and refrain from using tools you are not qualified/trained to use.
1. Ultraviolet Radiation: UV exposure is a potential risk in plasma etch, UV Ozone, and sputter tools, where
highly energized species are generated. Avoid looking directly at a UV source and always wear protective
glasses.
2. Electromagnetic Radiation: Electromagnetic radiation may be generated by equipment using RF (primarily
plasma etch and plasma deposition tools.) If you have a pacemaker, be aware that RF sources are present in the
lab. All equipment is shielded to prevent exposure; report any damage to shielding on the equipment or cables.

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4. Chemical Safety Information

4.1 Manufactures Chemical Labels

All chemical containers from the manufacture are required to have a label identifying the contents and containing
the following precautionary information:
1. A signal word to define the hazard potential. These words include one of the following: Caution,
Warning or Danger, in order of increasing potential hazard.
2. One or more Statements of Hazard, which describe in more detail the hazard presented.
3. Precautionary Measures.
4. First Aid or other information (this may not always be present on the label.)

4.2 Secondary Use Labels.

Chemicals that have been dispensed for use or divided into secondary containers must have an updated label listing
the following information.
1. Common Chemical Name (not an abbreviation or chemical formula)
2. Hazard Potential or Potentials (fill in the values of the hazard diamonds)
3. Name and email address of person creating the secondary container
4. Date when the secondary container was created
5. Fill in the NFPA hazard numbers in the appropriate diamonds.
As a qualified lab user, it is your responsibility to have all the chemicals in use at your station properly labeled as
defined above.

4.3 Safety Data Sheets (SDS)

Chemical manufacturers and distributors are required by federal law to provide Safety Data Sheets (MSDS) for
each product they sell. The Safety Data Sheet (MSDS) contains information on general composition, physical and
chemical properties, toxicology, and storage and handling recommendations. The SDS sheets for all the chemicals
in the facility are located in a binder in the gowning room. Additional SDS information for many
chemicals/chemical mixtures is available through the Stanford University Environmental Health and Safety group
(EH&S) website at: http://www.stanford.edu/dept/EHS.

You are required to read the SDS information for all the chemicals that you use in the lab. You are expected to
know the main hazards, handling requirements, and disposal methods for all chemicals used by you in the facility.

5. Chemical Hazard Classes

5.1 Liquid Chemical Hazard categories

Liquid chemicals can be divided into different hazard categories with many chemicals falling into more than one
hazardous class. It is your responsibility to recognize the chemical hazards of all the chemicals you are using and
understand the appropriate precautionary measures required for safe use.

The following are typical safety measures for handling any liquid chemical:
1. Knowledge of the main hazards.
2. Use of required personal protective equipment (PPE).
3. Working only in an approved exhausted bench.
4. Knowledge of the approved disposal method.

5.1.1 Solvents
Most solvents are flammable chemicals with low flash points that attack plastics and polymers. At sufficiently
high vapor concentrations, they can be easily ignited at room temperature and pose a significant fire hazard. Great
care is required when using solvents near ignitions sources such as hot plates or any electrical systems. Solvents
may ignite or explode when brought into contact with chemical oxidizers, such as acids. Prolonged exposure to
solvents can cause tissue and organ damage. Solvents must be double contained and stored in the designated
flammables cabinet. Solvents may be used only in designated solvent hoods (with the exception of isopropyl
alcohol).

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Common Solvents: acetone, isopropyl alcohol (2-propanol), methanol, xylenes, anisole, n-methyl-2-pyrrolidone
(NMP) and methyl isobutyl ketone (MIKB).

5.1.2 Corrosives
Corrosives in the facility include bases and acids. A corrosive (or "caustic") chemical destroys or permanently
damage living tissue such as skin and underlying tissues resulting from an exposure. Splashes in the eyes can
cause blindness and inhalation of vapors can destroy lung tissue.

Common Acids and Bases: potassium hydroxide, tetramethylammonium hydroxide (TMAH), sodium
hydroxide, sulfuric acid, and hydrofluoric acid.

5.1.3 Oxidizers
An oxidizer is any substance which will react chemically either by supplying oxygen or removing electrons.
Oxidizers must not be stored near flammable or reactive materials. Oxidizers should not be stored or mixed with
solvents. When oxidizers are mixed with compounds that can act as reducing agents, the result is often a violent
reaction and possibly an explosion.

Common Oxidizers: Nitric Acid and Hydrogen Peroxide.

5.1.4 Water Reactive

A water reactive substance spontaneously undergoes a chemical reaction when in contact with water, very quickly
generating heat and/or gas upon mixing. Water reactive mixtures should never be poured directly into a sink drain.

Common Water Reactives: concentrated sulfuric acid and piranha

5.1.5 Flammables
Vapors from a flammable liquid can ignite and explode above a critical concentration called the flash point and in
the presence of ignition source. Flammable liquids include most solvents, such as acetone, isopropanol, methanol
and MIKB. To minimize hazards, always work well within the exhausted area of the appropriate bench and
minimize the quantities of flammables in use.

Common Flammables: acetone, isopropanol, methanol, xylenes, n-methyl-2-pyrrolidone (NMP) and methyl
isobutyl ketone (MIKB).

WARNING: There is no heating of acetone on lab hot plates. Acetone has a low ignition temperature and the
likely hood of ignition and explosion is high.

5.1.6 Toxic/Poison
A toxic material is one which has poisonous or harmful effects. All materials can be toxic depending on the level
of exposure. There are formal, quantifiable definitions as to what comprises a toxic material and to what degree it
is toxic based on lethal dosages for lab animals when administered orally or through inhalation. Materials with
moderate to extreme toxicity are not allowed in the facility.

Common Toxics: hydrofluoric acid, tetramethylammonium hydroxide (TMAH), xylenes, and methyl isobutyl
ketone (MIKB).

5.1.7 Non-toxic
A non-toxic material is one that is not likely to result in harmful effects with normal use.

Common non-toxic: deionized water

5.2 Resist Chemicals

1. HSQ e-beam resists are comprised of hydrogen silsesquioxane (HSQ) resin in a carrier solvent of
methylisobutylketone (MIBK). HSQ functions as a negative tone electron-beam resist. The HSQ monomer
formula is H8Si8O12 and is cross-linked by exposure to e-beam radiation.

2. PMMA (polymethyl methacrylate) is a popular e-beam resist. The PMMA polymer is dissolved the solvent
Anisole. Exposure causes scission of the polymer chains acting as a positive tone resist.
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3. CSAR 62 and ZEP 520 are common positive tone e-beam resists with better durability than PMMA. They
both come dissolved in Anisole at various concentrations and survive longer in SEM inspections and plasma
etching conditions than the more common PMMA.

4. mA-N is a common negative tone resist dissolved in a combination of cyclopentanone and anisole..

5.3 Miscellaneous Materials

Gallium Arsenide (GaAs) and its by-products are extremely toxic. Anyone working with GaAs must be
constantly aware of how arsenic might be generated during processing. Physical contact with GaAs and
anything that comes into direct contact with GaAs must be avoided. Scribing and cleaving GaAs samples
must be done in an exhausted hood. All work surfaces must be wiped down afterwards to prevent the
spreading of GaAs dust.

o All GaAs waste, no matter how small, is considered hazardous. This includes GaAs-contaminated lab wipes.
Place all of the GaAs waste in a sealed zip-lock plastic bag and place it in the Solid GaAs Waste can.

Compressed Gases: There are extreme hazards presented in working with pressurized gas cylinders. Only
trained and qualified staff may install, disconnect, or change out gas cylinders.

Non Toxic Gases: Non-toxic gases do not generally pose an immediate risk to health and safety. However,
they can be asphyxiants and may pose health risks at high concentrations or with long-term exposure. House
nitrogen (N2) is plumbed throughout the lab for the equipment and for general use. The nitrogen supply is at
high pressure which can pose a hazard.

Toxic Gases: The Spilker Building is not rated for toxic gases, so no toxic gases are stored in the facility.

Nano Structured Materials: Being a Nano Lab it is reasonable to assume a fair number of Nano Structured
Materials will make their home in the lab. Exposure to nanomaterials may occur through inhalation, dermal
contact, or ingestion depending on how personnel use and handle them. The full health effects of exposures to
nanomaterials are not fully understood at this time. For example, a peer-reviewed toxicity study on carbon
nanotubes (CNTs) indicated that the toxicity of nanoparticles depends on specific physiochemical and
environmental factors and thus the toxic potential of each nanoparticle needs to be evaluated separately
[Helland et al., 2007]. Results of existing studies in animals or humans provide some basis for preliminary
estimates of areas of concern.

Required Personal Protective Equipment for working with Nano Structured Materials:
For non-destructive handling of solid nanoparticle composites or nanoparticles permanently bonded to a
substrate.
o Disposable nitrile or PVC gloves. Do not reuse gloves.
o Wet cleaning procedures and/or HEPA vacuum for surfaces/equipment.
For nanomaterials in liquid media, nanostructured powders, or cleaving or breaking substrates with
nanoparticle fixed to the surface
o Conduct task within a fume hood
o Add a second layer of disposable nitrile or PVC gloves. Do not reuse gloves.
o Use a face shield if splash potential exists from liquid

6. Chemical Storage

Notice: Our facility, including our safety equipment, personal protective equipment (PPE), and even staff expertise
is focused on chemicals that support the Nano Patterning Process. For chemicals that substantially deviate from
this mission, we may refer users to other labs that are better equipped to handle those chemicals safely.

65.12 Liquid Chemical Storage

To prevent accidental mixing of incompatible materials, every chemical in the lab must be stored in the designated
area appropriate for its hazard class. Each storage area is designed for safe storage of chemicals of a particular set
of hazard classes (i.e., they are appropriately ventilated, chemically resistant, and built against the main physical
hazards presented by the chemicals to be stored there.) Thus, it is a safety imperative that all chemicals in the lab
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be stored appropriately in one of these designated storage areas. No chemicals may be kept in personal storage
bins.
By law, we are required to maintain an up-to-date list and amounts of all hazardous chemicals and materials in the
entire facility. Violations and inaccurate chemical inventory control can result in the closure of the facility.
The designated chemical storage areas in the lab are:
Location General Hazard Class Chemical Type Processing Use
Solvent Bench Flammable, toxic Solvents Cleaning, developer, resist removers
Spinner Bench Flammable Solvents e-beam resists
Acid Bench left side Corrosive Acids Cleaning, etching
Acid Bench right side Oxidizer Oxidizers Cleaning, etching
Refrigerator Flammable Solvents e-beam resists
Base Bench Corrosive Base Resist developers

6.21 General Use Chemicals

We supply a number of chemicals that are commonly used with e-beam writing processes. A full list of these
chemicals, required PPE, disposal, and engineering controls is listed in Appendix A. Containers that are already
opened should be used first. Notify staff when chemicals are running low.

Prior to using a chemical in the lab you must first:

1. Review and understand the Safe Operating Procedures (SOPs) for that chemical or class of chemicals either
on-line or in the binder in 004 H
2. Sign off (either in the binder or on-line) that you have read and understood the SOPs for that chemical

6.32 Introducing New Chemicals

No new chemicals are allowed in the facility without approval of the facility staff. Email Cliff Knollenbergthe
Nano Patterning Cleanroom staff at (nano-snpcleanroom-staffcknollen@lists.stanford.edu) the following
information and wait until approval has been granted before bringing the chemical into the lab:
1. A Safety Data Sheet (SDS)
2. Prepare a Safe Operating Procedure (SOP) document for your desired process. Carefully detail
3. :
a. Outline a method for safe disposal.Required Personal Protective Equipment
b. Special Handling Procedures for working with the chemical(s)
c. Safe Disposal Methods.

WarningWARNING: Unapproved chemicals found in the lab are subject to disposal without notice.

6.43 Personal Chemical Storage

Chemical storage space is limited in the lab. Large personal or group use bottles of chemicals already provided by
the facility are not allowed. An exception is made for small bottles of resist and the like which do not take up as
much storage space. Storage of personal containers of chemicals or materials already approved by NPC staff must
comply with the following restrictions:
1. The container must be stored in the appropriate hazard class storage area (wet bench or chemical cabinet)
2. You must add it to the chemical inventory list in the wet bench room.
3. Personal containers, even if they have the original manufacturers label, must have a blue yellow? SNSF
label includingcompleted.
4. :
Your SUID.
Exact name(s) of the chemical.
Date chemical was received.
5. From time to time we review the chemical inventory and may purge old unused, unlabeled, or unapproved
chemicals.

WARNING: Any lab member not adhering to the rules, either intentionally or unintentionally will be subject to
administrative action and this may result in a loss of lab privileges. Any chemicals found in the facility in violating
of the rules are subject to immediate removal and disposal.

7. Chemical Handling

7.1 Personal Protective Equipment

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Protective gear is required whenever handling or transporting chemicals within the facility. The degree of
protective gear depends on the usage of the chemical. The table below is a guideline as to the level of personal
protective equipment required for various chemical types. A more complete list is found in Appendix A.

Chemical Type Recommended personal protective equipment

Corrosives or oxidizers face shield, apron, chemically-resistant gloves

Solvents face shield, chemically-resistant gloves

Photoresist vinyl gloves over nitrile gloves

7.2 Safe Operating Procedures.

You must abide by the following safety procedures when using these chemicals:
1. Follow Safe Operating Procedures (SOP) for the process you are using.
2. SOPs for common lab supplied chemicals are found in a binder in the wet bench room
3. Leave a chemical in use tag before stepping away from your work.
4. Use the required PPE for the chemicals you are using.
5. Keep the chemicals contained within the appropriate lab bench (engineering controls)
6. The work surface must be clean and dry when you have completed your work.
7. When you return chemicals, the bottles must be clean and dry.

7.3 Transporting Chemicals in the Lab

1. When transporting chemicals to/in the lab use the following PPE:
1. Chemical resistant gloves
2. Safety Glasses
3. A chemical transport bucket/container to provide secondary containment

7.3 Chemical Waste Disposal

1. Disposing of chemical waste in a safe manner is every lab users responsibility. Improper disposal of
waste could result in explosion and injury. Violations of proper waste disposal laws may even result in
shutdown of the facility.
1. Use the appropriately labeled drains at the back of the respective bench, or
2. Use chemical waste containers that you have labeled with an appropriate waste tag.
1. Waste tags are available in room 005 Spilker.
3. Small drips and spills onto cleanroom wipes should be placed in a ziplock bag and labeled for
collection
4. No chemicals can be disposed of down the sinks
2. How to Change Local Waste Containers
1. Obtain an empty waste container.
2. Fill out and adhere the Hazardous Waste Tag to the container (tags are located in 005 Spilker).
3. Cap the old, filled container, making sure that the outside of the container is clean and dry and
make sure the hazardous waste label is legible and securely attached.
4. Transport the old, filled waste container to the fume hood in 005 Spilker or the appropriate
chemical cabinet in 005 Spilker

7.4 Solid Hazardous Waste Disposal

Solvent/resist contaminated objects are considered solid hazardous waste. These include gloves, lab
wipes, swabs, plastic syringes, and syringe filters. Hazardous waste items must be placed in the
hazardous waste cans and not in the standard garbage cans. At times these items can give off gas vapors.
If any items are emitting an odor, they must be placed in a fully sealed zip-lock bag before being placed in
the yellow hazardous waste can.

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Sharps: Objects which can cut or puncture the skin are also considered hazardous. These sharps
include items such as broken wafers, razor blades, broken glass, razor blades/exacto knives/scalpels, or
hypodermic needles.
o Pipets with resist residue must be places in the red sharps container located in the spinner bench.
o Other sharp object should be placed in the red sharps container outside the SEM room.

WARNING: Any lab member failing to strictly adhering to the waste disposal rules, either intentionally or
unintentionally will be subject to administrative action and this may result in a loss of lab privileges.

7.5 Chemical Spills

In the event of a minor spill or release that can be cleaned up by local personnel using readily available equipment
(absorbent, available from EH&S in Small Spill Kit):

Notify personnel in the area and restrict access. Eliminate all sources of ignition.
Review the MSDS for the spilled material, or use your knowledge of the hazards of the material to determine
the appropriate level of protection.
Wear gloves and protective eyewear. Clean up using absorbent. Put the contaminated absorbent in a labeled
hazardous waste container.
If greater than 30 ml, or if it will take longer than 15 minutes for you to clean-up, immediately call EH&S at
725-9999 (or in the School of Medicine, x286) to report the spill, and notify lab staff.
Place the waste container in the fumehood in 005 Spilker
Submit on-line waste pickup request to EH&S or notify lab staff.

In the event of a spill or release, which may or has impacted the environment (storm drain, soil, air outside the
building), or spill or release that cannot be cleaned up by local personnel:
1. Notify Stanford Responders: Call 725-9999
2. Notify Lab Staff

Chemical spills that occur outside the ventilated area of a chemical wet bench can pose inhalation and contact
hazards. Unless you are trained and specifically instructed by a staff member who has evaluated the situation, DO
NOT attempts to clean up the spill yourself.

8. Emergency Responses

8.1 General Emergency

1. In the event of an imminent or actual health-threatening emergency (threatening local or public health,
safety, or welfare; or the environment outside the immediate area):
2. CALL 9-911 for the Fire Department or pick up a red emergency phone to speak directly with Stanford
Emergency Operations.
3. Alert people in the vicinity, activate local alarm systems.
4. Evacuate the area.
5. REMAIN NEARBY TO ADVISE EMERGENCY RESPONDERS.
6. Once personal safety is established, call EH&S at 725-9999 and report the incident to lab staff.
8.2 Life threatening medical emergency:
1. Remove exposed/contaminated individual(s) from area, unless unsafe to do so because of (a) medical
condition of victim(s), or (b) potential hazard to rescuer(s).
2. In all instances, immediately notify SU Emergency 9-911 if immediate medical attention is required or
pick up a red emergency phone to speak directly with Stanford Emergency Operations.
3. Notify EH&S to report the potential exposure by calling 5-9999.
4. Administer First Aid as appropriate.
5. Flush contamination from eyes/skin using the nearest emergency eyewash /shower for a minimum of 15
minutes. Remove any contaminated clothing.
6. Take copy of MSDS(s) of chemical(s) to hospital with victim.

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8.3 Stanford Nano Patterning Cleanroom (NPC) Response Procedures
Emergency response procedures and emergency contact information for the Nano Patterning facility is posted
throughout the facility.
Emergency Contact information is posted next to lab phones
Emergency response procedures are posted in the gowning area and at the entry to the wet bench room.

8.4 Evacuations
In the case of an emergency, the priority is to ensure that everyone is safely away from the hazard. Depending on
the extent and seriousness of the situation, an evacuation may be invoked just for the lab or for the entire building.

8.4.1 Building Evacuation

The building fire alarm system will sound when an emergency requires the evacuation of the building. The fire
alarm is automatically activated by smoke and fire detectors located throughout the facility and the building. The
fire alarm can be activated manually as well, by pulling the handle at any one of the pull stations located
throughout the building.

When the fire alarm is activated, the alarm strobe will flash and a very loud klaxon horn will sound. When a fire
alarm sounds, leave immediately. Do not take time to finish your tasks in the lab. Do not take time to remove
your clean room gown or pick up your belongings. Leave the lab and the building through the nearest exit and go
to the Emergency Assembly Point (EAP). There are maps showing the location of the Emergency Assembly Point
on the door to the wet bench room and in the gowning room. Only after the Fire or Police Departments declare the
scene safe are you allowed to re-enter the building.

Anyone in the building may call for an evacuation. This is an appropriate response to "an unforeseen event that
calls for immediate action to protect individuals, the environment, or property. Examples of such situations
include: fire, smoke, strong chemical vapors, or large chemical spill. To call an evacuation, pull the fire alarm.
This will immediately notify the Palo Alto Fire Department and the appropriate Stanford University Emergency
Response teams.

All lab members must know the location of building exits, the Emergency Assembly Point, fire alarm pull stations,
and fire extinguishers.

8.4.2 Laboratory Evacuation

Some situations may warrant evacuation of the facility, rather than the whole building. In this case lab
users are required to immediately leave the facility through the change room. A facility evacuation will be
invoked in situations which are isolated to the facility and do not pose a health or safety risk to building occupants
outside the facility. Such situations may include:
Chemical spill
Unusual odor
Any other situation in which the health or safety of facility occupants may be of concern.

8.4.32 Wet bench room evacuation and isolation

From time to time odors occur in the wet bench room. In this case the room needs to be evacuate and the sliding
door shut until the odor clears.
1. Inform any users in the wet bench room and have them leave the room
2. Notify building staff at: 650-272-8306
3. Notify Lab Staff

8.4.43 Odors in the Lab

The laboratory should be free of odors with proper use of the benches and disposal procedures. If you smell
something there is either an equipment malfunction or someone has neglected to follow the appropriate procedures.
If you smell something in the lab, notify a staff member. Provide as much information as you can about the
location and possibly identity of the smell.

8.4.54 Lab Fire

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Fires in the facility may result from the ignition of a flammable chemical. Ignition of chemical solutions on hot
plates is a major concern of facility fires. If a fire does start, immediately pull the fire alarm and follow the
building evacuation protocol. Report your actions to the Emergency Personnel at the Emergency Assembly Point.

Fire Extinguishers are located at:

1. In the Gowning Room by the lockers.
2. In 005 Spilker next to the safety shower.
8.4.6 Fire Alarms
Appearance and location of the alarm beacons: Fire alarm beacons are located in the lab and throughout (both
inside and outside) the building. The beacon is a small, rectangular, white light, mounted in a bright red frame.

Alarm conditions: In an alarm situation, the beacon flashes and a very loud klaxon sound. In an alarm condition,
all the alarms in the building should go off.

Action to be taken under alarm conditions: Immediately evacuate the facility and the building, going to the
designated Emergency Assembly Point. When evacuating:
1. Leave immediately; do not stop to remove your clean room gown or pickup your belongings.
2. Leave through the nearest "EXIT" door.
3. Do not stop to save your work as any delay jeopardizes not only your personal safety.
4. On leaving the lab, continue out the building to the designated Emergency Assembly Point (EAP).
5. You must report and remain at the EAP there for further instructions or to be released.
Notice: There is no heating of acetone on lab hot plates. Acetone has a low ignition temperature and the likely
hood of ignition and explosion is high.

8.4.75 Electrical Power Outage

Remain calm. Emergency backup lights should come on within 15 seconds.
When emergency lights come on, immediately leave the building from the nearest exit.
Notify the facility staff

8.4.86 Major Earthquake

In a major earthquake, the greatest hazard you face while in the lab is falling objects.
Take cover in a doorway or under a solid table.
After shaking stops
o Check nearby co-workers
o Leave the lab and go to the designated Emergency Assembly Point

8.4.97 Water on Floors

From time to time water accumulates on the lab floors. This may be due to a cooling water leak, spill, or overflow
from an air conditioning pan. Water on the floor is not only dangerous due to the slip hazard, but because high
voltage electrical lines may be present and pose an electrocution hazard. If water is observed on the floors,
1. Inform any users in the area and have them leave the area
2. Notify lab staff
3. If after hours call the Facilities Quick Response number at: 723-2281
4.
9. Fire Alarms
9.1 Appearance and location of the alarm beacons: Fire alarm beacons are located in the lab and throughout (both
inside and outside) the building. The beacon is a small, rectangular, white light, mounted in a bright red frame.

9.2 Alarm conditions: In an alarm situation, the beacon flashes and a very loud klaxon sound. In an alarm
condition, all the alarms in the building should go off.

9.3 Action to be taken under alarm conditions: Immediately evacuate the facility and the building, going to the
designated Emergency Assembly Point. When evacuating:
6. Leave immediately; do not stop to remove your clean room gown or pickup your belongings.
7. Leave through the nearest "EXIT" door.
8. Do not stop to save your work as any delay jeopardizes not only your personal safety.
9. On leaving the lab, continue out the building to the designated Emergency Assembly Point (EAP).

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10. You must report and remain at the EAP there for further instructions or to be released.

910. Chemical Exposure

In case of a localized external exposure: promptly flush the affected area with water, for at least 15 minutes. For
larger area external exposure, use a safety shower. Remove your clothing while under the shower and flush for at
least 15 minutes. Exposure of corrosives to the eyes is extremely serious; flush immediately, either with the water
spray gun at the wet bench or preferably the eyewash station. Eyes should be rolled up and down, and side to side,
continuously, to allow clean water to flush behind the eyeball. For any exposure to corrosives, you should be taken
to the emergency center for evaluation and treatment. For non-HF containing solutions, flush for at
least 15 minutes.

1) For Hydro Fluoric Acid exposure: follow the SU HF first aid response posted on the acid bench and on line at:
http://web.stanford.edu/dept/EHS/prod/researchlab/lab/safety_sheets/12-090.pdf

2) For Piranha ?
http://web.stanford.edu/dept/EHS/prod/researchlab/lab/safety_sheets/08-111.pdf

3) For TMAH?

All chemical exposures must be reported to the staff. For any significant exposure the lab member should be taken
to the emergency center for evaluation and treatment. See 12.3.1 for medical treatment.

10. Reporting Accidents

All injuries must be reported to the Department of Risk Management. Accident forms are available from the
facility staff. See Stanford Environmental Health and Safety Guidelines (Memo 25.6) for information on reporting
injuries.

Incident Reporting
Report all occupational injuries or illness to laboratory staff as soon as practical. Laboratory supervisor and
laboratory personnel must submit the required paper work to Risk Management.

1. An Accident/Incident/Exposure Form SU-17 form must be submitted in the event of injury of any
personnel, Stanford or non-Stanford. This form must be submitted to Risk Management within 24 hours
of injury and signed by the injured party and a facility staff manager. Non Stanford University employees
should report to their employer.

2. For Stanford University Employees: An Employees Claim for Workers Compensation Benefits DWC
Form-1 form must be submitted in the case of injury of Stanford personnel. This form must be signed by
a University representative/supervisor/administrator and then given or mailed to the employee within 24
hours of the accident, incident or exposure. The DWC Form-1 and a detailed instruction sheet are
available from Risk Management.

3. An Employers Report of Industrial Injury, Cal-OSHA Form 5020 must be submitted within 24 hours of
occurrence when an industrial injury or occupational disease suffered by a Stanford employee results in:
a. lost time beyond the day of injury, or
b. medical treatment by a physician in a clinic, hospital, emergency room, or medical office.
4. A Workers Compensation Lost Time Report, Form SU-16 must be submitted when a Stanford employee
has lost one full day or more following the day of an accident or the first day of a work related illness.

Follow-up
Laboratory supervisor is to conduct (or coordinate) an investigation of all incidents and "near misses." The
goal of the investigation is to identify and address any deficiencies that may have contributed to the incident.

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11.2.3.1 Medical Providers or Work Related Injuries

Non-Life Threatening Work-Related Injuries, please go to:

Stanford University Occupational Health Center
480 Oak Road
650-725-5308
M-F 8 am 5 pm.

Life Threatening Emergency Care

For immediate life threatening injuries go to the nearest Emergency facility (eg. Stanford Hospital Emergency
room, phone (650) 723-5111).

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Appendix A: Chemicals in the Lab
Chemical Name PPE Engineering Controls Danger Disposal SOP to use
2-propanol or Nitrile Gloves Can be used outside wet Flammable Drain at back of solvent Solvents
isopropyl alcohol benches bench
Acetone Nitrile Gloves Keep within Solvent Bench Flammable Drain at back of solvent Solvents
bench
Methanol Nitrile Gloves Keep within Solvent Bench Flammable Drain at back of solvent Solvents
and Toxic bench
Ethanol Nitrile Gloves Keep within Solvent Bench Flammable Drain at back of solvent Solvents
bench
MIBK Nitrile Gloves Keep within Solvent Bench Flammable Drain at back of solvent Solvents
and Toxic bench
Xylenes Nitrile Gloves Keep within Solvent Bench Flammable Drain at back of solvent Solvents
and Toxic bench
Remover PG or Nitrile Gloves Keep within Solvent Bench Flammable Drain at back of solvent Solvents
NMP bench
Silver Colloidal Nitrile Gloves Keep within Solvent Bench Flammable Pipets in sharps container at Colloidal
Paint spinner bench, waste in silver
solvent can in zip-lock
PMMA in Anisole Nitrile Gloves, Keep within Spinner Flammable Pipets in sharps container at Resists
recommend: Bench spinner bench, waste in
polyvinyl gloves solvent can in zip-lock
ZEP 520 or CSAR Nitrile Gloves, Keep within Spinner Flammable Pipets in sharps container at Resists
AR-P in Anisole recommend: Bench spinner bench, waste in
polyvinyl gloves solvent can in zip-lock
mA-N in Anisole Nitrile Gloves, Keep within Spinner Flammable Pipets in sharps container at Resists
recommend: Bench spinner bench, waste in
polyvinyl gloves solvent can in zip-lock
HSQ in MIBK Nitrile Gloves, Keep within Spinner Flammable Pipets in sharps container at Resists
recommend: Bench spinner bench, waste in
polyvinyl gloves solvent can in zip-lock
MMA (8.5) MAA Nitrile Gloves, Keep within Spinner Pipets in sharps container at Resists
in Ethyl Lactate recommend: Bench spinner bench, waste in
polyvinyl gloves solvent can in zip-lock
TMAH 25% Nitrile Gloves, Keep within Base Bench Corrosive Drain at back of base bench 25% TMAH
Chemical Resistant Burns and
Gloves, Face Shield, Toxic
Chemical Apron
TMAH 2% or Nitrile Gloves Keep within Base Bench Corrosive Drain at back of base bench 2% TMAH
MF-319 Burns
Surpass 4000 Nitrile Gloves Keep within Base Bench Corrosive Drain at back of base bench Corrosives
Burns
Sulfuric Acid Nitrile Gloves, Keep within Acid Bench Corrosive Other Acids drain at back Corrosives
Chemical Resistant Burns of acid bench
Gloves, Face Shield,
Chemical Apron
Hydrofluoric Acid Nitrile Gloves, Keep within Acid Bench Corrosive HF drain at back of acid HF SOP
(HF) Chemical Resistant Burns and bench
Gloves, Face Shield, Toxic
Chemical Apron
Surpass 300 Nitrile Gloves Keep within Acid Bench Corrosive Other Acids drain at back of Corrosives
Burns acid bench
Hydrogen Nitrile Gloves Keep within Acid Bench Burns Other Acids drain at back Piranha
Peroxide of acid bench
Nano Structured Nitrile Gloves Handle loose particles in Toxic Place in ziplock bag and seal. Nano
Materials exhausted hood Materials

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