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Abstract
Magnetic sensors offer several key advantages: they allow contactless and, consequently, wear-free measurement of mechanical
quantities like angle of rotation and angular speed. They are robust and inexpensive to manufacture.
As one example of magnetic sensors in production at Robert Bosch GmbH, the steering wheel sensor LWS3 is shown, developed for the
electronic stability program (ESP), which prevents vehicles from spinning. We recently demonstrated, that the inherent limitation of the
AMR-effect to an 1808 angular range can be overcome by using a switchable magnetic eld generated inside the sensor element.
For a new generation of magnetic sensors, the technology of giant magneto-resistance (GMR) thin lm systems promises several
advantages like larger working distances, more precise angular position measurement in a wider range (up to 3608), smaller and therefore
cheaper sensor chips and economic system solutions due to the higher signal output.
A GMR multilayer system of CoCu/Cu was developed, which fullls the requirement of having no hysteresis in the magneto-resistive
characteristics. On the other hand, research is still going on for sensitive GMR layers, which are stable at temperatures of 2008C (or more)
for long time periods of at least 500 h. Thin lm systems of spin valve type, used in read heads for disc drives, have been thoroughly
evaluated about whether they can be used in sensors for automotive applications.
The great challenge is to generate GMR thin lm systems which cover a much wider range of features than the existing technologies of
Hall and AMR and which can be produced at lower cost. Only versatile GMR sensors will lead to high production volumes, which are
needed for a cost efcient fabrication as in other modern micro technologies. # 2001 Elsevier Science B.V. All rights reserved.
0924-4247/01/$ see front matter # 2001 Elsevier Science B.V. All rights reserved.
PII: S 0 9 2 4 - 4 2 4 7 ( 0 1 ) 0 0 6 2 1 - 5
C.P.O. Treutler / Sensors and Actuators A 91 (2001) 26 3
2.2. Angle of rotation sensors, derived quantities Fig. 3. Sensing principle of 3608 AMR element with switched auxiliary
fields on chip.
These sensors measures the absolute angular position.
They can be applied in almost all cases where wear affected
potentiometric techniques are used today. Examples are We recently showed [2], that the inherent limitation of the
pedal position, engine control (e.g. throttle valve position, AMR-effect to an 1808 angular range can be overcome by
crankshaft or camshaft angle), transmission control, active using a switchable magnetic eld generated inside the sensor
suspension damper systems, head lamp leveling, fuel level element (Fig. 3). The signal changes of Vcos and Vsin due to
measurement, seat position and other applications. Several the small auxiliary eld BA generated by planar coils can be
mechanical quantities can be measured by transferring them used to determine if the angle of the external eld is in the
into a displacement signal, e.g. a torsion bar will convert the range of 01808 or in the range of 1803608. The required
engine's torque into a difference angle of two parts of the intensity of the auxiliary eld is determined on one hand by
shaft, which can be me measured by precise angle sensors. the maximum external eld and on the other hand by thermal
Halls IC's can be used for this type of sensors only in effects. This means that the intensity must be high enough to
conjunction with a magnetic circuit that transforms position generate detectable signal changes by the angular modula-
into magnetic eld strength. The directional sensitivity of tion but should be as low as possible to avoid additional
the AMR-effect can be used to directly determine the thermal induced signal changes. The inuence of the aux-
direction of a magnetic eld of a magnet being rotated, iliary elds on the phase of the signal can be optimized by
resulting in a very simple mechanical arrangement of an the angle of the auxiliary elds to each other. As current
angle of rotation sensor as shown in Fig. 2. samples show, a signal change below 1% of the signal
amplitude is high enough to perfectly determine the range
of the external eld. Furthermore, the accuracy of the angle
sensing over the whole 3608 measuring range is the same as
for 1808 sensing with conventional AMR IC's.
Such a modied AMR IC, called an AMR360, plus an
evaluation circuit are used for the modular steering angle
sensors which are mounted onto the steering gear (Fig. 4).
In future, GMR sensor chips may measure these angular
positions. GMR technology promises high signal and an
inherent 3608 angular range allowing a simple sensor struc-
ture and electronic circuitry. Additionally, due to the rather
low magnetic eld needed for a direct angular measurement,
mechanical set-up can be further simplied and high pre-
cision position sensors based on magnetic scales can be
realized.
4. GMR technology
Fig. 5. Steering wheel angle sensor LWS3 with two AMR elements. Fig. 6. GMR system with 20 bilayers of CoCu/Cu.
C.P.O. Treutler / Sensors and Actuators A 91 (2001) 26 5
Fig. 8. GMR gradiometer; above: Wheatstone bridge circuit and Fig. 9. The magneto-resistive characteristics of a spin valve based on
arrangement of the GMR resistors on the chip; below: sensor layout. FeMn as anti-ferromagnetic layer.
6 C.P.O. Treutler / Sensors and Actuators A 91 (2001) 26
Fig. 10. The sensor signal depending on the strength of the magnetic field.
References
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