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The design and characterization of a piezo-driven ultra-precision stepping positioner

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2000 Meas. Sci. Technol. 11 N15

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Meas. Sci. Technol. 11 (2000) N15N19. Printed in the UK PII: S0957-0233(00)07017-X

DESIGN NOTE

The design and characterization of a

piezo-driven ultra-precision stepping
positioner
Peng Gao, Hong Tan and Zhejun Yuan
School of Mechanical and Production Engineering, Nanyang Technological University,
Nanyang Avenue, Singapore 639798
Department of Mechanical Engineering, Harbin Institute of Technology, Harbin 150 001,
Peoples Republic of China

Received 16 August 1999, in final form and accepted for publication 4 November 1999

Abstract. Ultra-precision positioning mechanisms with a high displacement resolution and

long travelling range are becoming increasingly popular in industrial applications. In this
design note, we discuss the design and characterization of a new piezo-driven ultra-precision
stepping positioner composed of three piezoelectric actuators and a monolithic flexure hinge
mechanism. The analytical models are presented, the formulae for static and dynamic
characteristics are derived and the design process is described. It follows that the
performance characterization is carried out. It is confirmed that this device is capable of
performing a stepping motion with a high reproducibility, as well as a single movement with
a displacement resolution of over 10 nm and a natural frequency of over 432 Hz.

Keywords: piezoelectric actuator, flexure hinge, stepping positioner, laser interferometer

1. Introduction include its compact structure, high positioning resolution

Ultra-precision positioning is an essential technology in
such fields as precision measurement, machining and
semiconductor-based manufacturing. Most of the ultra-
precision positioners that have been developed are driven
using piezoelectric actuators, which have high resolution,
high stiffness, quick responses and so on [1]. However,
the stroke of the piezoelectric actuator is extremely small.
Usually, it is limited to several micrometres or several
tens of micrometres. To attain a long travelling range,
while maintaining a satisfactory resolution of displacement,
the dual-positioning and stepping-positioning techniques
involving piezoelectric actuation have been proposed and
applied in some ultra-precision positioning mechanisms.
For example, Zhang et al [2] developed a novel linear
piezomotor for machine-tool applications. Sakuta et al [3]
developed a precision dual-positioning apparatus consisting
of a friction drive unit and a piezoelectric actuator. Kagawa
and Mutuo [4] studied how to improve the accuracy of a
piezoelectric inchworm mechanism. Moronuki et al [5]
presented a linear-motion microsystem that was fabricated
on a Si wafer using the etching technique. However, there is
still much research [68] concentrating on the development
of various kinds of piezo-driven precision micropositioning
mechanisms for various industrial applications. In this
design note, we develop a new piezo-driven ultra-precision
stepping positioner. The salient features of such a mechanism
and long travelling range. It can, for example, be applied
in a scanning-probe microscope that is required to have a
large measurement volume, or used as a wafer stepper to
position the image of the IC on the surface of a silicon
wafer. This design note is organized as follows. The
configuration of the stepping positioner is described in
section 2. Section 3 presents a detailed design analysis
and experimental results are shown in section 4, where we
characterize the performance of the positioner. Finally, this
design note concludes with some remarks in section 5.
2. The configuration
Figure 1 is a schematic diagram showing the configuration
of the stepping positioner developed, which consists of three
stack-type piezoelectric actuators and a monolithic flexure
hinge mechanism. Electro-discharge machining (EDM) was
applied to cut the fine features of this mechanism. The
upper and lower piezoelectric actuators are used to clamp the
mechanism onto a fixed guideway in which the positioner is
built, whereas the middle one is used to provide a feeding
actuation. The high-precision positioning is generated by
either extension or contraction of the flexure hinges induced
by the piezoelectric actuators, which are controlled by a
computer. The advantages of flexure hinges over classical
hinges are that one has no friction, no clearance and high

0957-0233/00/020015+05$30.00 2000 IOP Publishing Ltd N15

Design note
y
My

50 mm
b1 r1
front view Mx
x
h1 t1

70 mm Mz

z
(a)

50 mm
top view
b2
t2
h2
Figure 1. A schematic diagram showing the configuration of the l2
stepping positioner developed.
(b)

F F Figure 3. Schematic diagrams of flexure hinges: (a) a
single-notch flexure hinge and (b) a right-angle flexure hinge.
(1) (2) (3)
x y

F F ke
a

kp

(6) m
(5) (4)
ce
Figure 2. The operating principle of the positioner.
(a) (b)

precision. Figure 2 shows the operating principle of the
positioner. One step motion includes six actuations. The
clamping and feeding motions are not simultaneous but
sequential. With a series of repeated motions, a long
travelling range, which is limited only by the length of the
guideway, can be obtained.
3. The design analysis
The size of the flexure hinge is a main parameter in the
design. As is shown in figure 3, two types of flexure hinges
are adopted in our design. One of them is a single-notch
flexure hinge [9] and the other is a right-angle flexure hinge.
These hinges have comparably low bending stiffnesses in a
single direction only, having higher stiffnesses in all other
directions. In other words, only one relative rotation around
the z-axis is allowed. For the single-notch flexure hinge, an
approximate formula for the bending stiffness is given by
[10]
5/2 1/2
k1 = 2Eb1 t1 /(9 2r1 ) (1)
where E is Youngs modulus of the material and the other
symbols are as shown in figure 3. For the right-angle flexure
hinge, the bending stiffness can be derived as follows:
 3
t2
k2 = cEb2 (1 2 ) (2)
l2
where c is a constant used for modifying the calculation
error and is Poissons ratio. Only the feeding operation is
Figure 4. Simplified analytical models for the feeding operation:
(a) the kinematic model and (b) the dynamic model.
analysed here since the analysis for the clamping operation
is similar. Figure 4 shows simplified analytical models for
the feeding operation.
A feeding piezoelectric actuator is held between two
linkages using an interference fit. A pair of wedges is
utilized to load and eliminate the effect of the stack clearance.
Preloading gives rise to an additional deformation in the
piezoelectric actuator. The displacement output of the
piezoelectric actuator can be expressed by
dp = d31 V + 1dp 1cp (3)
where d31 is a piezoelectric constant and V is the applied
voltage; 1dp and 1cp are the additional deformation and
clearance of the piezoelectric actuator, respectively. When
1dp = 1cp , the preload deformation exactly compensates
for the clearance and the displacement output of the
piezoelectric actuator is equal to its effective deformation.
When 1dp < 1cp , it is necessary to consume a part
of the effective deformation of the piezoelectric actuator
to compensate for the clearance. In other words, the
piezoelectric actuator needs to be provided with an initial
voltage; it is then capable of being in a working state. When
1dp > 1cp , it does not mean that a better result will be
generated by increasing the preload. In this case, the sum
of a driving force and a preload should be no more than the
maximum load allowable in the piezoelectric actuator. From

N16
 Design note

figure 4, the static displacement output of the system is given 9.00

by 8.00

kp

m)
d= dp (4) 7.00

Displacement (
kp + ke 6.00

where kp is the stiffness of the piezoelectric actuator, ke is 5.00

the stiffness of the elastic guidance mechanism and ce is the 4.00

damping coefficient. It is indicated by equations (3) and (4) 3.00

that the static characteristics of the system are influenced 2.00

by the preload and the stiffness of flexure hinges. Because 1.00

of the presence of the flexure hinge, the actual displacement 0.00

0 15 30 45 60 75 90 10 5 120 135 150
output of the positioner for a single movement is smaller than
that of the piezoelectric actuator. After the preload and the Applied voltage (V)
design parameters of flexure hinges have been determined,
the displacement output is reliant solely on the actuation Figure 5. The static characteristic curve of the positioner under
the driving of the feeding actuator.
from the piezoelectric actuator. Thus, one can reach a higher
positioning resolution and accuracy.
Still referring to figure 4, a dynamic model for the system Equation (11) presents a basic design formula for the
can be described by positioner. In this regard, using the maximum stroke of
the piezoelectric actuator and the resultant displacement
my(t) + ce y(t) + (kp + ke )y(t) = kp x(t) (5) output, the parameters are optimized to obtain the highest
where x(t) is the instant displacement input from the possible stiffness and natural frequency under the constraints
piezoelectric actuator, y(t) is the resultant displacement of there being a maximum allowable load applied by the
output of the positioner and m is the mass of the body in piezoelectric actuator and a maximum allowable stress for
motion. From equation (5), the transfer function of the the flexure-hinge material. The natural frequency can be
system can be obtained as derived according to Lagranges equation for a conservative
system and is given by the following formula:
kp 02
G(s) = (6)  1/2
(kp + ke )(s 2 + 2 0 s + 02 ) 1 4k1 + a 2 kp
f = (12)
2 2I + a 2 m + a 2 mp
where 0 = [(kp + ke )/m]1/2 and = ce /2[m(kp + ke )]1/2 .
For an elastic guidance mechanism, the damping ratio is where m and mp are the masses of the translational part and
very small. The step response of the positioner is derived the piezoelectric actuator, respectively, and I is the moment
from equation (6) and expressed by of inertia of the linkage. Obviously, the natural frequency

kp X e 0 t will increase with decreasing of m and a. In our design,
y(t) = 1
kp + ke (1 2 )1/2 the mechanical structure has a large cavity for mounting the
   piezoelectric actuators and reducing the total mass. With
(1 2 )1/2
sin d t + a tan (7) the optimized dimensions of the single-notch flexure hinge,

t1 = 2 mm, r1 = 2.5 mm and b1 = 50 mm, which consider
where d = 0 (1 2 )1/2 and X is the amplitude of the input the requirements of the design configuration, manufacturing
signal. The response time for reaching the peak point can be process and output stiffness, a natural frequency of 447.8 Hz
represented by is obtained theoretically.

tp = . (8)
0 (1 2 )1/2
It is indicated by equation (8) that a higher natural frequency 4. Performance characterization
is desired in order to increase the speed of response.
The positioner was built in the fixed guideway and the surface
The design of the positioner is carried out on the basis
gaps between the positioner and the guideway were adjusted
of these analyses. Assume that a translational motion of is
roughly and then precisely by applying the preloads and offset
produced when a force of F from the piezoelectric actuator
is applied. The resultant elastic potential energy U in each voltages to the clamping actuators, respectively. A stepping
flexure hinge can be expressed by motion involves all-piezoelectric actuation. The step size,
resolution and speed are strongly reliant on the characteristics
k1 2 of a single feeding operation. Thus, we characterize this kind
U= . (9)
2a 2 of positioning behaviour first. In this case, only the feeding
The mechanical work due to an external force is given by actuator was driven to reach a target position while one of
two clamping actuators was utilized to fix the positioner onto
W = 21 F . (10) the guideway. Figure 5 shows a static characteristic curve
of the positioner under the driving of the feeding actuator.
From equations (9) and (10) and the law of conservation of
The displacement was measured using a laser interferometer
energy, the following equation is obtained:
with 5 nm resolution. The driving signal generated from the
4k1 personal computer was applied to the piezoelectric actuator
F = . (11)
a2 via a digital-to-analogue converter and a power amplifier.

N17
Design note
0 .3 0 30
30 0
25 mV

Relative magnitude (dB)

m)

20
0 .2 5 25 0

Voltage (mV)
Displacement (

50 nm
10
0 .2 0 20 0

0
0 .1 5 15 0

-10
0 .1 0 100 200 250 300 350 400 450 500
0.00 0.90 1.8 0 2 .7 0 3 .6 0 4 .5 0
Frequency (Hz)
Time (s)
(a) Figure 7. The frequency-response function of the positioner for a
0.30 300
single feeding operation.

10 mV 25.00
8 .5 0
m)

0.25 25 0
Voltage (mV)
Displacement (

Displacement ( m)
20.00 8 .0 0

0.20 200
20 nm m)
7 .5 0
Displacement (

15.00
0.15 150

7 .0 0
2 4.0 0 2 4.10 24 .20 24 .3 0

10.00 Time (s)

0.10 100
0 .0 0 0 .9 0 1 .8 0 2.70 3.60 4.50

Time (s)
5.00
(b)
0 .30 3 00

0.00
5 mV 0.00 10.00 20.00 30.00 40.00 50.00
m)

0 .25 2 50
Time (s)
Displacement (

Voltage (mV)

0 .20 20 0 Figure 8. Experimental results for a stepping positioning test.

10 nm
0 .15
0 .10
0 .0 0 0.90 1.80 2 .70
Time (s)
(c)
Figure 6. Time responses of the positioner under the excitation of
square-wave commands with various amplitudes: (a) 25 mV,
(b) 10 mV and (c) 5 mV.
When an input voltage of 128 V is applied, the displacement
range reaches 8.7 m, which is smaller than the stroke of
15 m for the unloaded piezoelectric actuator due to the
flexure-hinge effect. It is noted that the zero-point variation is
small, but there are nonlinearity and hysteresis errors related
to the characteristics of the piezoelectric actuator.
In order to determine the displacement resolution of the
positioner, square-wave commands with various amplitudes
were applied to the piezoelectric actuator. Figure 6 shows
the time responses of the positioner. In this regard, a longer
time interval was programmed. As a reference, the input
commands generated from the computer were also plotted in
figures. It is demonstrated that the positioner can respond to
each of the square-wave commands with small amplitudes.
1 50
Although a positioning input as small as subnanometre scale
can be programmed to control the piezoelectric actuator,
100 it cannot be recognized due to the limit of resolution and
3.60 4.5 0
the stability of the laser interferometer. A displacement
resolution of about 10 nm can be observed in figure 6(c). It is
considered that the actual displacement resolution should be
better than the above value if the accuracy of measurement
instrumentation was higher. Experimental results have
confirmed that the programmable step size for the positioner
can be from at least 10 nm to 8.7 m.
For ultra-precision positioning, a wide dynamic
operating range is always desirable. Figure 7 shows the
frequency-response function of the positioner for a single
feeding operation. The command signal was the sinusoidal
sweeping excitation produced by a generator. A dynamic
signal analyser was adopted to process and analyse data.
From frequency-response-function data, a natural frequency
of 432 Hz at the first vibration mode is obtained, which is
close to the theoretical prediction.
The single-feeding-operation test reveals the characteris-
tics of each step for the positioner. By virtue of these repeated
stepping motions, the positioner can travel a long range along
the guideway. Figure 8 shows the experimental results for a

N18

stepping positioning test. Closed-loop control was adopted,
using the laser interferometer to reduce positioning errors.
The positioner was controlled to travel a range of 14 m with
a step size of 1 m. The step speed is close to 0.3 m s1 .
It can be altered by changing either the period or the ampli-
tude of the input signals. It is observed that all steps have
high reproducibility. This indicates that both the clamping
motion and the feeding motion are in a good operating state.
Zoomed-in-view results on the step response show that the
dynamic system reaches a steady state rapidly with a small
fluctuation amplitude.
5. Conclusions
(i) A piezo-driven ultra-precision stepping positioner,
which has a compact structure, high displacement
resolution, quick response and long range of motion,
has been developed.
(ii) Theoretical analysis and experimental studies have
shown that the design parameters of flexure hinges affect
the performance of the positioner. With the optimized
parameters, a nano-scale displacement resolution and a
high natural frequency have been attained.
(iii) This positioner is capable of performing a single
positioning operation as well as a stepping positioning
operation. Two types of motions can be controlled easily.
Design note
References
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[4] Kagawa Y and Mutou E 1994 The accuracy improvement of
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