C100 07 880

C100-07-880
Issue D Original
Instruction Manual
ISO Flanges and Clamps

This page has been intentionally left blank.
C100-07-880 Issue D
Contents
Contents
Section Page
1 INTRODUCTION .................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 TECHNICAL DATA ................................................................................. 3

2.1 Materials of construction ............................................................................................... 3
2.2 Product Item Numbers .................................................................................................. 3
2.2.1 Rotatable flanges ........................................................................................................ 3
2.2.2 Claw clamps .............................................................................................................. 3
2.2.3 Half claw clamps ......................................................................................................... 4
2.2.4 Co-Seals ................................................................................................................... 5
2.2.5 Trapped O-rings .......................................................................................................... 5
3 INSTALLATION ..................................................................................... 7
3.1 Assembly options ......................................................................................................... 7
3.2 Standard ISO collar flange .............................................................................................. 7
3.3 Rotatable flange assembly ............................................................................................. 7
3.4 Assembly with claw clamps and half claw clamps .................................................................. 8
3.5 Assembly with rotatable flanges ...................................................................................... 8
4 OPERATION ........................................................................................ 9
5 MAINTENANCE ................................................................................... 11
5.1 Precautions .............................................................................................................. 11
5.2 Clean the seals and O-rings ...........................................................................................11
6 STORAGE AND DISPOSAL ....................................................................... 13

6.1 Storage ................................................................................................................... 13
6.2 Disposal ................................................................................................................... 13
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Rotatable Flange ......................................................................................................... 3
2 Claw Clamp ............................................................................................................... 4
3 Half Claw Clamp (Bulkhead/Collar Flange Fitting) ................................................................. 4
4 Half Claw Clamp (Fixed Flange/Collar Flange Fitting) ............................................................. 4
5 Co-Seal .................................................................................................................... 5
6 Trapped O-ring ........................................................................................................... 6
7 Sectional View of ISO Collar Flange ................................................................................... 7
8 Rotatable Flange Assembly ............................................................................................. 8
9 Examples of Flange Component Assemblies ......................................................................... 9
cg/6016/10/08
Edwards Limited 2008. All rights reserved. Page i

Edwards and the Edwards logo are trademarks of Edwards Limited.
C100-07-880 Issue D
Contents
Tables
Table Page
1 Recommended Minimum Numbers of Clamps ....................................................................... 7
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P300-20-000
Page ii Edwards Limited 2008. All rights reserved.

C100-07-880 Issue D
INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation instructions for the Edwards range of ISO standard flange components. You must
install the components as specified in the manual.
Read this manual before you install the component. Important safety information is highlighted as WARNING and
CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
The following IEC warning labels appear on the component:
Warning - refer to accompanying documentation.
Warning - Edwards offer European customers a recycling service.
The units used throughout this manual conform to the SI international system of units of measurement.
1.2 Description
The Edwards range of ISO flange components provides a variety of different coupling methods to simplify the
assembly of vacuum systems. Dimensions of the flange components conform to ISO 2861.
There are two basic coupling methods: rotatable flanges and claw clamps. Use rotatable flanges to eliminate the
problem of alignment to bolt holes of accessory components, such as valves and fittings, when you assemble vacuum
systems. Alternatively, use claw clamps in situations where access is difficult. There are two alternative types of
sealing ring, both are self-centring:
z trapped O-ring (centring ring)
This has an aluminium outer ring and a stainless steel inner ring with a raised lip to locate the seal in the flange.
Wherever possible, use trapped O-ring seals, particularly in semiconductor, chemical and other low-to-medium
vacuum applications.
z Edwards Co-Seal
Cut-outs around the circumference of the Co-Seal carrier locate with the flange bolts to centralise the seal.
When claw clamps are used, the square cut-outs in the Co-Seal ensure that the claw clamps are equispaced
Edwards Limited 2008. All rights reserved. Page 1

C100-07-880 Issue D
INTRODUCTION
around the flange. The Co-Seal has no trapped volume within the vacuum system and is therefore suitable for
use in high vacuum applications. When you install Co-Seals, take care that the carrier and seal are not damaged.
Page 2 Edwards Limited 2008. All rights reserved.

C100-07-880 Issue D
TECHNICAL DATA
2 TECHNICAL DATA
2.1 Materials of construction
The flange components are manufactured from stainless steel or plated mild steel. Seals and O-rings are
manufactured from nitrile or fluoroelastomer. The trapped O-ring carriers have a stainless steel inner ring and an
aluminum outer ring. The Co-Seal carriers are manufactured from polymer.
Recommended maximum operating temperature in air
Nitrile rubber 100C

Flouroelastomer 200C
2.2 Product Item Numbers
2.2.1 Rotatable flanges
Each pack includes one flange, a retaining-ring and screws, nuts and washers to fit the rotatable flange to another
rotatable flange.
Size/Material Item Number

Plated mild steel
ISO63 C100-07-010
ISO80 C100-08-012
ISO100 C100-09-010
ISO160 C100-11-010
ISO200 C100-12-010
ISO250 C100-13-010
ISO400 C100-16-012
Figure 1 - Rotatable Flange
2.2.2 Claw clamps
Each pack includes one pair of claws, a fixing bolt, nut and washers.

Plated mild steel
ISO63-250 C100-07-090
ISO320-500 C100-14-090

C100-07-880 Issue D
TECHNICAL DATA
Figure 2 - Claw Clamp
2.2.3 Half claw clamps
Each pack includes a half claw clamp, a fixing bolt and washers; fixed flange/collar flange packs also include a nut.

Zinc plated mild steel
Bulkhead/collar flange with
Co-Seal/trapped O-ring fitting
ISO63-100 C100-07-151
ISO160-250 C100-11-151
ISO320-500 C100-14-151
Figure 3 - Half Claw Clamp (Bulkhead/Collar Flange Fitting)
Bulkhead/collar flange with

O-ring fitting
ISO63-100 C100-07-093
ISO160-250 C100-11-093
ISO320-500 C100-14-093
Fixed flange/collar flange fitting

ISO63-100 C100-07-150
ISO160-250 C100-11-151
ISO320-500 C100-14-151
Figure 4 - Half Claw Clamp (Fixed Flange/Collar Flange Fitting)

C100-07-880 Issue D
TECHNICAL DATA
2.2.4 Co-Seals

Polymer/nitrile
ISO40 B271-58-458
ISO63 B271-58-063
ISO100 B271-58-070
ISO160 B271-58-073
Polymer/fluoroelastomer
ISO40 B271-58-457
ISO63 B271-58-064
ISO100 B271-58-071
ISO160 B271-58-074
Figure 5 - Co-Seal
2.2.5 Trapped O-rings

Nitrile
ISO40 B271-58-175
ISO63 B271-58-176
ISO100 B271-58-177
ISO160 B271-58-178
ISO200 B271-58-080
ISO250 B271-58-180

Nitrile
ISO40 B271-58-165
ISO63 B271-58-170
ISO100 B271-58-171
ISO160 B271-58-172
ISO200 B271-58-081
ISO250 B271-58-143

C100-07-880 Issue D
TECHNICAL DATA
Figure 6 - Trapped O-ring

C100-07-880 Issue D
INSTALLATION
3 INSTALLATION
3.1 Assembly options
Example of the various possible combinations of ISO flange components are illustrated in Figure 9. Refer to Table 1
for the minimum number of claw clamps required according to the flange size.
Table 1 - Recommended Minimum Numbers of Clamps
Flange Size Bolt Holes Claw Clamps Required Half Claw Clamps Required
ISO40 4 4 4
ISO63 4 4 4
ISO80 8 8 8
ISO100 8 8 8
ISO160 8 8 8
ISO200 12 12 12
ISO250 12 12 12
ISO320 12 12 12
ISO400 16 16 16
ISO500 16 16 16
3.2 Standard ISO collar flange

A sectional view of the standard ISO collar flange is shown in Figure 7. The collar flange is designed to accept either
a rotatable outer flange or a suitable number of claw clamps (see Table 1).
Figure 7 - Sectional View of ISO Collar Flange
1. Rotatable Flange Retaining Ring Grove

2. Claw Clamp Recess
3.3 Rotatable flange assembly

Fit a rotatable flange to you ISO collar flange as described below. Note that the Edwards rotatable flange includes
the items listed in Section 2.3.2: it does not include the ISO collar flange component which may be already fitted to
your vacuum system or must be purchased separately.
1. With the retaining-ring (1) removed, pass the flange (2) over the collar (3).
2. Fit the retaining-ring into the groove in the collar.
3. Slide the flange back over the collar to engage with the retaining-ring.

C100-07-880 Issue D
INSTALLATION
Figure 8 - Rotatable Flange Assembly
1 2 3 1 2 3
1. Retaining Ring
2. Flange
3. ISO Collar Flange
3.4 Assembly with claw clamps and half claw clamps

Refer to Figure 9 details A, D, E and F and proceed as follows:
1. Align the two collar flanges (4) and bulkhead (6) or the collar flange (4) and fixed flange (1).
2. Ensure the Co-Seal/trapped O-ring (2,9) or the O-ring (8) is correctly positioned between the two faces.
3. Fit the required number of clamps (See Table 1) and space them equally around the circumference of the
collars. If you use an Edwards Co-Seal, use the rectangular cut-outs in the Co-Seal carrier to position the clamps.
4. Tighten the bolts evenly and alternately to a torque of 5 Nm, so that the seal is evenly loaded. If the seal is not
evenly loaded, the seal may leak.
3.5 Assembly with rotatable flanges

Refer to Figure 9 detail B or C and proceed as follows:
1. Assemble the rotatable flange, or flanges, as described in Section 3.3.
2. Rotate one flange to align the bolt holes with those of the other flange and place the Co-Seal or trapped O-ring
between the two faces.
3. Fit the bolts and nuts and tighten them evenly and alternately to a torque of 5 Nm, so that the seal is evenly
loaded. If the seal is not evenly loaded, the seal may leak.

C100-07-880 Issue D
OPERATION
4 OPERATION
In low vacuum applications, lubricate seals and O-rings with vapour pump fluid, Fomblin vacuum grease or Apiezon
grease M. Lubrication prolongs the life of the seals and assists sealing. Apply the fluid or grease sparingly to produce
an even coating. This should appear as a shiny surface without visible smears.
For high vacuum applications, obey the equipment manufacturers instructions on whether to lubricate the seals or
not. If in doubt, leave the seals dry.
Figure 9 - Examples of Flange Component Assemblies
A. Claw Clamp 1. Fixed Flange

B. Two Rotatable Flanges 2. Co-Seal or Trapped O-ring
C. One Fixed Flange with 3. Rotatable Flange
One Rotatable Flange 4. Collar Flange Component
D. Bulkhead with Collar 5. Claw Clamp
Flange (and Trapped O-ring) 6. Bulkhead
E. Bulkhead with Collar 7. Half Claw Clamp
Flange (and O-ring) 8. O-ring
F. Fixed Flange with Collar 9. Co-Seal or Trapped O-ring
Flange and Trapped O-ring)

C100-07-880 Issue D

C100-07-880 Issue D
MAINTENANCE
5 MAINTENANCE
5.1 Precautions
WARNING
Obey the precautions giver below. If you do not, you can cause injury to people and damage to
equipment.
z Observe all appropriate safety precautions when you come into contact with lubricating fluids and
fluoroelastomer seals and O-rings.
z Do not use solvents to clean Co-Seals or O-rings.
z Seals or O-rings manufactured from fluoroelastomers can decompose into very dangerous substances if they
are heated to 260C and above. The seals and O-rings may have overheated if the equipment has been
misused or if it has malfunctioned or if it has been in a fire. If the equipment has overheated, take extreme
care to avoid skin contact with the seals and O-rings and to avoid inhalation of vapours from the seals and O-
rings. Edwards Health and Safety Data sheets for fluoroelastomers used in the seals and O-rings are available
on request: contact your supplier or Edwards.
5.2 Clean the seals and O-rings

Wipe the seals or O-rings with a clean, dry, lint-free soft cloth. Do not use solvents. Fluoroelastomers and nitrile
rubber will absorb solvents; this will cause the material to swell and outgas into the system.

C100-07-880 Issue D

C100-07-880 Issue D
STORAGE AND DISPOSAL

6 STORAGE AND DISPOSAL
6.1 Storage
Store the fittings in cool dry conditions until required for use. When required, install the fittings as described in
Section 3.
6.2 Disposal
Dispose of the fittings safely in accordance with all local and national safety and environmental requirements.
Particular care must be taken with components which have come into contact with pump fluid, fluoroelastomers
which have been subjected to temperatures above 260C (see Section 5.1) and components which have been
contaminated with dangerous process substances.

C100-07-880 Issue D

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Form HS1
Return of Edwards Equipment - Procedure
INTRODUCTION
Before returning your equipment, you must warn Edwards if substances you used (and
produced) in the equipment can be hazardous. This information is fundamental to the safety
of our Service Centre employees and will determine the procedures employed to service your
equipment.
Complete the Declaration (HS2) and send it to Edwards before you dispatch the
equipment. It is important to note that this declaration is for Edwards internal use only,
and has no relationship to local, national or international transportation safety or
environmental requirements. As the person offering the equipment for shipment, it is your
responsibility to ensure compliance with applicable laws.
GUIDELINES
Equipment is 'uncontaminated' if it has not been used, or if it has only been used with
substances that are not hazardous. Your equipment is 'contaminated' if it has been used
with any substances classified as hazardous under EU Directive 67/548/EEC (as amended)
or OSHA Occupational Safety (29 CFR 1910).
If your equipment has been used with radioactive substances, biological or infectious
agents, mercury, polychlorinated biphenyls (PCBs), dioxins or sodium azide, you must
decontaminate it before you return it to Edwards. You must send independent proof of
decontamination (for example a certificate of analysis) to Edwards with the Declaration
(HS2). Phone Edwards for advice.
If your equipment is contaminated, you must either:
Remove all traces of contamination (to the satisfaction of laws governing the
transportation of dangerous/hazardous substances).
Or, properly classify the hazard, mark, manifest and ship the equipment in accordance
with applicable laws governing the shipment of hazardous materials.
Note: Some contaminated equipment may not be suitable for airfreight.
PROCEDURE
1. Contact Edwards and obtain a Return Authorisation Number for your equipment.
2. Complete the Return of Edwards Equipment - Declaration (HS2).
3. If the equipment is contaminated, you must contact your transporter to ensure that you
properly classify the hazard, mark, manifest and ship the equipment, in accordance with
applicable laws governing the shipment of contaminated/hazardous materials. As the
person offering the equipment for shipment, it is your responsibility to ensure compliance
with applicable law. Note: Equipment contaminated with some hazardous materials,
such as semiconductor by-products, may not be suitable for airfreight - contact your
transporter for advice.
4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any
accessories that will be returned to Edwards. Where possible, drain all fluids and
lubricants from the equipment and its accessories.
5. Seal up all of the equipment's inlets and outlets (including those where accessories were
attached) with blanking flanges or, for uncontaminated product, with heavy gauge tape.
6. Seal equipment in a thick polythene/polyethylene bag or sheet.
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If
the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
8. E-mail via scan, fax or post a copy of the original with signature of the Declaration (HS2)
to Edwards. The Declaration must arrive before the equipment.
9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter
if the
equipment is contaminated.
P900-70-000 Issue L
10. Seal the original Declaration in a suitable envelope: attach the envelope securely to the
outside of the equipment package, in a clear weatherproof bag.
WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE OUTSIDE OF THE
ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.
Form HS2
Return Authorisation Number:
Return of Edwards Equipment Declaration
You must:
Know about all of the substances which have been used and produced in the equipment before you complete this Declaration
Read the Return of Edwards Equipment Procedure (HS1) before you complete this Declaration
Contact Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions
Send this form to Edwards before you return your equipment as per the procedure in HS1
SECTION 1: EQUIPMENT
Manufacturer's Product Name ________________________ IF APPLICABLE:
Manufacturer's Part Number _________________________ Tool Reference Number _____________________
Manufacturer's Serial Number ________________________ Process _______________________________________
Has the equipment been used, tested or operated? Failure Date _______________________________
YES R Go to Section 2 NO R Go to Section 4 Serial Number of
Replacement Equipment ______________________
SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT

Are any substances used or produced in the equipment: Note 1: Edwards will not accept delivery of any equipment
that is contaminated with radioactive substances, biological/
Radioactive, biological or infectious agents, mercury, infectious agents, mercury, PCBs, dioxins or sodium azide,
poly chlorinated biphenyls (PCBs), dioxins or unless you:
sodium azide? (if YES, see Note 1) YES R NO R Decontaminate the equipment
Hazardous to human Provide proof of decontamination
health and safety? YES R NO R YOU MUST CONTACT EDWARDS FOR ADVICE BEFORE YOU RETURN
SUCH EQUIPMENT
SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT

Chemical Precautions required (for example, Action required after a spill,
Substance name Symbol use protective gloves, etc.) leak or exposure
SECTION 4: RETURN INFORMATION

Reason for return and symptoms of malfunction: ____________________________________________________________
______________________________________________________________________________________________________
If you have a warranty claim: who did you buy the equipment from? __________________________________
give the suppliers invoice number __________________________________
SECTION 5: DECLARATION
Print your name: _________________________________ Print your job title: ____________________________________
Print your organisation: ____________________________________________________________________________________
Print your address: _____________________________________________________________________________________
_____________________________________________________________________________________________________
Telephone number: ___________________________ Date of equipment delivery: ____________________________________
I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any
P900-71-000 Issue M
information, and I have followed the Return ofEdwards Equipment Procedure (HS1).
Note: Please print out this
form, sign it and return the
Signed: _____________________________________ Date: ______________
signed form as hard copy.
UNITED KINGDOM BELGIUM CHINA
Manor Royal Bergensesteenweg 709 23 Fu Te Road(N)
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Tel +55 11 3952 5000 203 Surya Kiran Building Daewoo Engineering Building
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Milan Fax +82 31 738 1001
Office +39 02 48 4471 ISRAEL
Sales +39 02 48 447242 5 Habarzel Boulevard AUSTRALIA
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Tel +972 8 681 0633 Australia
Fax +972 8 681 0640 Tel: +61 4 0199 1193
P80 0-8 0-000 Iss ue M 0 1A0 9-010
Fax: +61 2 9886 9249
PLEASE CONTACT ANY OF THE ABOVE FOR DETAILS OF OTHER SALES AND SERVICE CENTERS IN YOUR AREAS.
Edwards and the Edwards logo are trade marks of Edwards Limited
Edwards Limited 2007
WWW.EDWARDSVACUUM.COM
INFO@EDWARDSVACUUM.COM

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C100-07-880

ISO Flanges and Clamps

2 TECHNICAL DATA ................................................................................. 3

6 STORAGE AND DISPOSAL ....................................................................... 13

Edwards Limited 2008. All rights reserved. Page i

Page ii Edwards Limited 2008. All rights reserved.

The following IEC warning labels appear on the component:

Warning - refer to accompanying documentation.

Warning - Edwards offer European customers a recycling service.

z trapped O-ring (centring ring)

Edwards Limited 2008. All rights reserved. Page 1

Page 2 Edwards Limited 2008. All rights reserved.

Recommended maximum operating temperature in air

Nitrile rubber 100C

2.2 Product Item Numbers

2.2.1 Rotatable flanges

Size/Material Item Number

Figure 1 - Rotatable Flange

2.2.2 Claw clamps

Size/Material Item Number

Edwards Limited 2008. All rights reserved. Page 3

Figure 2 - Claw Clamp

2.2.3 Half claw clamps

Size/Material Item Number

Figure 3 - Half Claw Clamp (Bulkhead/Collar Flange Fitting)

Bulkhead/collar flange with

Fixed flange/collar flange fitting

Figure 4 - Half Claw Clamp (Fixed Flange/Collar Flange Fitting)

Page 4 Edwards Limited 2008. All rights reserved.

Size/Material Item Number

2.2.5 Trapped O-rings

Size/Material Item Number

Size/Material Item Number

Edwards Limited 2008. All rights reserved. Page 5

Figure 6 - Trapped O-ring

Page 6 Edwards Limited 2008. All rights reserved.

3.2 Standard ISO collar flange

Figure 7 - Sectional View of ISO Collar Flange

1. Rotatable Flange Retaining Ring Grove

3.3 Rotatable flange assembly

2. Fit the retaining-ring into the groove in the collar.

Edwards Limited 2008. All rights reserved. Page 7

Figure 8 - Rotatable Flange Assembly

3.4 Assembly with claw clamps and half claw clamps

3.5 Assembly with rotatable flanges

1. Assemble the rotatable flange, or flanges, as described in Section 3.3.

Page 8 Edwards Limited 2008. All rights reserved.

Figure 9 - Examples of Flange Component Assemblies

A. Claw Clamp 1. Fixed Flange

Edwards Limited 2008. All rights reserved. Page 9

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Page 10 Edwards Limited 2008. All rights reserved.

z Do not use solvents to clean Co-Seals or O-rings.

5.2 Clean the seals and O-rings

Edwards Limited 2008. All rights reserved. Page 11

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Page 12 Edwards Limited 2008. All rights reserved.

STORAGE AND DISPOSAL

Edwards Limited 2008. All rights reserved. Page 13

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Page 14 Edwards Limited 2008. All rights reserved.

SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT

SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT