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Air leaks and pressure drop in the vacuum distribution Monitor for h) in the entire system. Because
system result in poor vacuum at the points-of-use. airtightness leakage characteristics differ
Valves can be provided at several between a pressure-test and a
Properly designed and installed vacuum systems places in the vacuum line, to vacuum operation, particularly in
are less susceptible to fluctuations in production determine if air leakage occurs in components, such as valves and
vacuum load, which can result in higher productivity, the upstream piping of the vacuum flanges, pressure testing is only
system. However, too much isola- successful to find large leaks as it
better-formed products and enhanced product quality
tion valves increase pressure drop. does not discover the small leaks
or safety. As an example, in the semiconductor The most commonly used test that inevitably develop as the
industry, oxygen from an air in-leak can chemically methods to determine the presence system ages (Umrath et al., 2007;
of air leaks are the following: Hesser, 2008).
react with silane to produce sand, SiO2, not the
With the foam-spray test, the
desired semiconducting solid. In the food industry, A pressure test with oil-free contractor can register the forma-
improper vacuum during packaging may compromise nitrogen allows to measure the tion of bubbles in a soapy solu-
the safety of the food product. decrease in pressure over a cer- tion applied to leaking joints of
tain period of time (usually 24 a system under pressure (Umrath
Smallest
detectable Quantitative the location of the leak site. The advantages
Method Test gas Pressure range
leak rate measurement of ultrasonic leak detection include versatil-
mbar.l/s ity, speed, ease of use, the ability to perform
Air and other tests while equipment is running, the ability
Pressure drop test 10-4 Positive pressure Yes to find a wide variety of leaks and its accu-
gases
racy (Senternovem, 2010).
Foaming liquids Air and others 10-4 Positive pressure No In table 1 a comparison is made between
different air leak detection methods, more
specifically their air leak detection potential.
Pressure rise test Air 10-4 Vacuum Yes