Beruflich Dokumente
Kultur Dokumente
551-563
Pergamon Press Lid.. 1!%?4l Printed in Great Britain
W. VERSNEL
Department of Electrical Engineering, Eindhoven University of Technology, Eindhoven, the Netherlands
Abstract-This paper considers circular and rectangular Van der Pauw structures with finite edge contacts, having
two orthogonal axes of symmetry. Using conformal transformations, analytical solutions of the potential problems
have been found. Approximate formulae are also given (a) for the circular sample if the contacts are small, and (b)
for the rectangular sample if one pair of contacts is small and the other pair coincides with the short sides. It is
shown that rectangular Hall plates can be used for measurements of sheet resistance at zero magnetic field. For the
latter case numerical results are tabulated.
INTRODUCTION
In a theoretical study on Hall plates the problem arose,
how the sheet resistance of such plates can be measured
at zero magnetic field. In practice, the rectangular
configuration is often used. In order to prevent unwanted
temperature effects the contacts should be edge contacts
instead of point contacts.
The sheet resistance R, of a homogeneous semi-con-
ducting layer can be measured by means of the method
Fig. 1. Rectangular sample with two orthogonal axes of sym-
of Van der Pauw[l], who analysed structures with four metry. Heavy lines denote contacts which are two by two equal
point contacts on the boundary. Further, analytical in size. I = current: V; = potential of contact i(i = 1, 2,3, 4).
results have been given in[2], where the case of finite
contacts has been treated for samples being invariant for
rotations of 90.
We shall now consider Van der Pauw samples with
another kind of symmetry, viz. with two orthogonal axes
of symmetry. Then, there is always a conformal trans-
formation that maps the structure on the unit circle in
such a way that the symmetry is preserved (see 131,p. 109).
For the sake of simplicity and because of its practical
importance we shall restrict ourselves to a rectangular
shape (see Fig. 1). After the mapping one has to solve the
potential problem of the circular Van der Pauw structure
of Fig. 2. It will be shown that the symmetry of the
sample permits a treatment by means of three separate Fig. 2. Circular structure with two orthogonal axes of symmetry.
structures, each of which having two edge contacts. I = current; V, = potential of contact i(i = 1, 2, 3,4).
It is clear that
4. Numerical results are given if one pair of contacts
V coincides with the short sides of the rectangle. Section 5
R, = Cta,, a+ (1)
I will be devoted to the study of the behaviour of the last
structure when the contacts of the other pair become
where V = V4- V, is the voltage between two adjacent almost point contacts.
voltage contacts and I is the current flowing through the
sample (Fig. 2). The coefficient C(a,, 1~~)depends on the 2. THE CIRCULAR STRUCTURE WITH TWO AXES OF SYMMETRY
angles a, and a2, which are determined by the lengths of From the symmetry of the structure of Fig. 2 it follows
the edge contacts. According to Van der Pauw C(0, that there are two unequal pairs of equal contacts. The
42) = r/in 2, since in that case the terminals are point problem we have to solve is to calculate V,,- V, when a
contacts. current Z flows through such a sample of uniform thick-
In the following section we shall derive a formula for ness d with a specific resistivity p.
the coefficient C(a,, 02). In Section 3 an approximation In Figs. 3(a)-3(c) the same structure is considered.
for C(a,, a2) will be given for the case of small contacts. The current distributions are so chosen that super-
The rectangular structure will be investigated in Section position yields the current distribution of Fig. 2. It
557
558 W. VERSNEL
V,, - V3,
-=__ p K(k,)
I
(4)
40 K(k,)
v,, =P KW
(5)
I 4d K(b)
where
k2 = 2
sin a
sin a2
(6)
b c
It is clear from the symmetry that it is sufficient to
Fig. 3. Reduction to three simpler potential problems. Super- consider only one quarter of the structure of Fig. 3(c)
position of the current distribution yields the current distribution (see Fig. 6). Again, the number of contacts is reduced
of Fig. 2.
from 4 to 2. By the conformal transformation
w= ;z12+1
z-mane
zz-I
the structure of Fig. 6 is mapped on the first quadrant of
the complex w-plane (Fig. 7). The points z = 0, z = 1,
l/2 I z = zI, z = z2, z = i correspond to w = i, w = point at
1 v,l
infinity, w = wI =cotan a,, w = w,=cotan a2, w =0
=2
respectively. By doubling the structure of Fig. 7 a sample
02 =, is obtained that covers the whole upper half-plane of a
complex t-plane (Fig. 8). It is evident that t = w as far as
31
the first quadrant is concerned.
a
01 Let k, = fz/tl. Then one finds
l/2 I
t
Fig. 4. Semi-circle with two unequal contacts but with one axis of
k, = E= k,k, (8)
symmetry. 1
Analysis of Hall-plate shaped Van der Pauw structures 559
z-plane
aa,, n/2 -80,l
t
9-
6-
e
w-plone
6-
/
I
/
5-
1w,
I WI
t 4
l/4 i l/4 I
L-L
Fig. 7. First quadrant of complex w-plane. The points z = I, and
z = z2 correspond to the points w = w, and w = w? respectively.
t-plane
0
-
IO 20 33 40-
aI
(degrees)
Fig. 9. Coefficient Cta,. (1/2)r - Ba,) versus angle (I, for circular
structure of Fig. 2. The parameter B is the ratio of the lengths of
the contacts 2 and I. Each curve has an asymptote defined by
a, = !N/(E t I) degrees.
I 4d K(b)
(9)
k,=Bc[l+s(;-$))
From (2), (4), (5) and (9) we derive the following theorem
for R, = p/d; k2=+++&;))
V
Rs = Cb,, (YZ)- (10) k, = Be* 1+ $(I+ I?)).
I
C(a
I,
a
2
) = 4
c K(h)+ KW
K(k,) K(k,)-K(k,)
KW -
1 (1)
The arguments k,, kz, t are given by formulae (3), (6) and
and (8) respectively, and V = V, - V,.
Let B be equal to the ratio of the lengths of the
contacts 2 and 1 (see Fig. 2). Then a2 =(1/2)rr-Bar. k*
The function C(ar, (1/2)7r-Bar) has been calculated
from (3), (6), (8) and (11). It is represented in Fig. 9
as a function of al, where E is a parameter. Each of the +...
curves has an asymptote defined by aI = (l/2)6(8 + 1).
560 W. VERSNEL
Ko=2,n4-L/+1!!k4+. (k LOI
K(k) r k2a 1~64
Then
errors in the specific resistivity p, introduced by small Let us choose the part of integration in the t-plane along
contacts, are to a first approximation additive (see [l]). the arc of the unit circle from 1 to t,. Put p = exp($).
For equal contacts i? = 1; Then, one finds
z,=l+iH. (20)
K(sin a)
= K(cos a)
(21)
0 0.5 - 1.0
x2
f = D(x2; y,)v.
Fig. 12. Coefficient D(x,; y,) versus x2 for rectangle of Fig. I I.
Parameter y, = 0.5.
It will then be clear (see [2]) that
Further ([ll], p. 504), the following expressions will be From (12) one derives
applied
K(k,) K(kd 2 k3 1
---=;lnz-2--(k,- k,2)t.. .
KM K(k,)
sn(u,k)=u-(l+k$+... (u +O) (27)
=$lnsinat$t... (e -10). (33)
cn(u,k)=l-& (u +O) (28)
Finally, taking into account formulae (ll), (24), (30),
dn(u,k)=l-y+... (u -+O). (29) (32) and (33), and observing that x2 = 6, it is not difficult to
derive
In that case, too, the same reduction to three simpler results are represented in Table 1 in a form which is
potential problems can be carried out (see Fig. 3). The suited for direct application.
only modification is that now, in general, each current is
unequal to (l/2)1. It is clear that this statement is also Acknowledgemen&-The author is indebted to Professor H.
true of the rectangular sample. Groendijk for several discussions and important suggestions.
In principal, the method of analysis as given in Section
4 in the case of a rectangle can be applied to other REFERENCES
1.L. J. van der Pauw, Philips Res. Rep. 13, 1(1958).
samples having a polygon as a boundary and two ortho-
2. W. Versnel, Solid-St. Electron. 21, 1261 (1978).
gonal axes of symmetry. Then, the conformal trans- 3. W. von Koooenfels und F. Stallmann. Praxis der Konformen
formation of such a structure on the unit circle can be Abbildungipringer, Berlin (1959).
calculated analytically[8]. But, in most cases one has to 4. E. C. Titchmarsh. The Theorv of Functions. 2nd Edn.
p. 1%. Oxford University Press:Ldndon (l%O).
solve a new problem, the so-called parameter problem
5. P. Moon and D. E. Spencer, Field Theory Handbook. p. 71.
(see [3], p. 149, which, however, is beyond the scope of Springer, Berlin (1971).
this paper. 6. W. R. Smythe, Static and Dynamic Electricity, p. 100.
McGraw-Hill, New York (I%@.
7.CONCLUSION 7. H. B. Dwight, Tables of Integrals and other Mathematical
Data. Macmillan, New York (1957).
Circular and rectangular Van der Pauw structures have
8. E. Durand, Electrostatique, Tome 2. Problimes Gbbraux
been investigated. The symmetry enabled us to obtain Conducfeurs. p. 329. Masson, Paris (1966).
analytical solutions, by which the sheet resistance can be 9. 1. S. Gradshteyn and I. M. Ryzhik, Table of Integrals, Series
calculated using relatively simple numerical calculations. and Products. Academic Press. New York (1%5).
10. P. Henrici,Elements of Numerical Analysis,p. 87. Wiley, New
Moreover, analytical approximation formulae have also
York (1964).
been obtained. We would mention particularly the Il. E. T. Whittaker and G. N. Watson, A Course of Modem
parabolic expression (39, which relates to a Hall-plate Analysis, 4th Edn. University Press, Cambridge (1952).
shaped Van der Pauw structure (see Fig. 12). Numerical 12. R. C. Booth, Electronics Lett. 12,221 (1976).