Beruflich Dokumente
Kultur Dokumente
9280J101
Windows
Ultima IV Software
(Ver. 1.0.0.0)
Instruction Manual
Part. 3 Measurement
General Contents
Part.1 Prologue
1Set up
2Basic Operations
3Ultima IV System Startup and Shutdown
Part.3 Measurement
1Manual Measurement
2Measurement Monitor
3Standard Measurement
4X-ray Measurement Using Temperature Measurement
5Asymmetric Measurement
6Measurements with the ASC-48/ASC-120
Part.5 Utility
1File Manager
2Binary->ASCII Conversion Program
3Screen Clip
4Physical Constant Table
Appendix
1. Manual Measurement
1.1 Overview ...................................................................................................................................... 1.1
1.2 Function........................................................................................................................................ 1.1
1.3 Starting and Exiting Program .................................................................................................. 1.2
1.3.1 Starting the Program ............................................................................................................... 1.2
1.3.2 Exiting the Program ................................................................................................................ 1.2
1.3.3 Help........................................................................................................................................ 1.2
1.4 Operation Procedures ................................................................................................................ 1.3
1.4.1 Main Window ......................................................................................................................... 1.3
1.4.1.1 Menu bar ...................................................................................................................... 1.3
1.4.1.2 Toolbar......................................................................................................................... 1.4
1.4.1.3 Status Display Window................................................................................................. 1.5
1.4.1.4 Control Window ........................................................................................................... 1.5
1.4.2 Manual Measurement Main Window....................................................................................... 1.5
1.4.2.1 Status Display Area in the Main Window...................................................................... 1.6
1.4.2.2 Control Window ........................................................................................................... 1.6
1.4.3 Counter Control Window ...................................................................................................... 1.12
1.4.3.1 SCHV,PHA Control Status Display Area .................................................................... 1.12
1.4.3.2 Control Window ......................................................................................................... 1.12
1.4.4 Attachment Control Window................................................................................................. 1.16
1.4.4.1 Attachment Control Position Display Frame ............................................................... 1.16
1.4.4.2 Control Frame ............................................................................................................ 1.17
1.4.5 Present Position Display Window ......................................................................................... 1.23
1.4.6 Setting Result Dialog Box ..................................................................................................... 1.23
1.4.7 Version Information Dialog Box ........................................................................................... 1.25
1.5 Troubleshooting ........................................................................................................................ 1.26
1.5.1 Error Messages ..................................................................................................................... 1.26
1.6 Print Formats ............................................................................................................................ 1.28
1.6.1 Raw Data .............................................................................................................................. 1.28
1.6.2 SCHV Data ........................................................................................................................... 1.28
ME13435A - ii
Part3
2. Measurement Monitor
2.1 Overview ...................................................................................................................................... 2.1
2.2 Operation Procedures ................................................................................................................ 2.1
2.2.1 Main Window ......................................................................................................................... 2.1
2.2.2 Menu Bar................................................................................................................................ 2.2
2.2.3 Toolbar ................................................................................................................................... 2.4
2.2.4 Measurement Information Display Area .................................................................................. 2.6
2.2.5 Profile Display Area................................................................................................................ 2.6
2.2.6 Present Measurement Position Display Area ........................................................................... 2.6
2.2.7 Status Bar ............................................................................................................................... 2.6
2.3 Basic Operations ......................................................................................................................... 2.7
2.3.1 Profile Zoom........................................................................................................................... 2.7
2.3.1.1 Enlarging and Reducing the Profile with the fixed magnification (50%) ........................ 2.7
2.3.1.2 Zoom a Selected Area ................................................................................................... 2.8
2.3.1.3 Specifying the Display Area Numerically ..................................................................... 2.8
2.3.1.4 Returning to the Initial Display ..................................................................................... 2.8
2.3.2 Scrolling the Profile ................................................................................................................ 2.9
2.3.2.1 Scroll with the fixed magnification (50%) ..................................................................... 2.9
2.3.2.2 Specifying the Display Area Numerically ..................................................................... 2.9
2.3.3 Peak Search Execution .......................................................................................................... 2.10
2.3.3.1 Peak Search Execution and Cancellation ..................................................................... 2.10
2.3.3.2 Changing a Peak Search Method ................................................................................. 2.10
2.3.3.3 Specifying the Peak Search Range .............................................................................. 2.11
2.4 Function Details ........................................................................................................................ 2.12
2.4.1 Open File Dialog Box ........................................................................................................... 2.12
2.4.2 Menu .................................................................................................................................... 2.15
2.4.3 Toolbar ................................................................................................................................. 2.21
2.4.4 Measurement Information Display ........................................................................................ 2.23
2.4.5 Profile Display ...................................................................................................................... 2.23
2.4.6 Present Measurement Position Display.................................................................................. 2.24
2.4.7 Status Bar ............................................................................................................................. 2.24
ME13435A - iii
Part3
3. Standard Measurement
3.1 Overview ...................................................................................................................................... 3.1
3.1.1 Principles ................................................................................................................................ 3.1
3.2 Starting and Exiting the Program............................................................................................ 3.3
3.2.1 Starting the Program ............................................................................................................... 3.3
3.2.2 Exiting the Program ................................................................................................................ 3.3
3.2.3 Working Directory .................................................................................................................. 3.3
3.3 Basic Operations ......................................................................................................................... 3.5
3.3.1 Sample Preparation ................................................................................................................. 3.5
3.3.2 Filling Samples ....................................................................................................................... 3.5
3.3.3 How to Measure the Full Charts .............................................................................................. 3.5
3.3.4 How to Measure a Specific Peak Selectively and Save Results in One File .............................. 3.8
3.3.5 How to Measure a Specific Peak Selectively and Save Results in Separate Files.................... 3.10
3.3.6 Notice for the Measurement with the Execute Status of the Counting Loss Correction ........... 3.11
3.4 Functions Details ....................................................................................................................... 3.12
3.4.1 Window Contents ................................................................................................................. 3.12
3.4.2 Main Dialog Box .................................................................................................................. 3.13
3.4.2.1 Menu Bar ................................................................................................................... 3.13
3.4.2.2 Toolbar....................................................................................................................... 3.16
3.4.2.3 XG Ending Condition Area ......................................................................................... 3.17
3.4.2.4 File Condition List ...................................................................................................... 3.17
3.4.2.5 Auto Create File Name ............................................................................................... 3.19
3.4.2.6 Print Condition Dialog Box......................................................................................... 3.20
3.4.3 Attachment Dialog Box......................................................................................................... 3.21
3.4.3.1 Menu Bar ................................................................................................................... 3.21
3.4.3.2 Toolbar....................................................................................................................... 3.22
3.4.3.3 Attachment Condition Dialog Box .............................................................................. 3.22
3.4.4 Measurement Condition Dialog Box ..................................................................................... 3.29
3.4.4.1 Menu Bar ................................................................................................................... 3.29
3.4.4.2 Toolbar....................................................................................................................... 3.32
3.4.4.3 Measurement Condition Area ..................................................................................... 3.33
3.4.4.4 Auto Condition Dialog Box ........................................................................................ 3.38
3.4.4.5 Normalize Condition Dialog Box ................................................................................ 3.41
3.4.4.6 Unified Scan Condition Dialog Box ............................................................................ 3.42
3.4.4.7 Background Condition Dialog Box ............................................................................. 3.42
3.4.4.8 Material Condition Dialog Box ................................................................................... 3.43
3.4.4.9 Other Condition Dialog Box ....................................................................................... 3.44
3.4.4.10 Open File Dialog Box ............................................................................................... 3.45
3.4.5 Measurement Monitor Dialog Box ........................................................................................ 3.47
3.5 Troubleshooting ........................................................................................................................ 3.48
ME13435A - iv
Part3
5. Asymmetric Measurement
5.1 Overview ...................................................................................................................................... 5.1
5.2 Setting Methods........................................................................................................................... 5.4
5.2.1 Rigaku Control Panel .............................................................................................................. 5.4
5.3 Measurement Methods .............................................................................................................. 5.6
5.3.1 Standard Measurement method ............................................................................................... 5.6
5.4 Notice ............................................................................................................................................ 5.7
ME13435A - v
Part3