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Analytical Resolution vs Detection Limit

AFM Imaging Techniques


TEM/STEM
EBIC
FIB
OP
SEM
RTX
100 at%
5E22 STEM/

ICP techniques
XRR
EELS
STEM/ Auger SEM/ Raman XPS/ XRD
1E22 EDS EDS ESCA 10 at%

1E21 1 at%

TGA/DTA/DSC
FTIR
XRF RBS
1E20 0.1 at%
Ph

1E19 LEXES 100 ppm


ys
i
Ph

ca
ll
ys

TOF-SIMS
im
Ph

i
ca
Detection Range

1E18 10 ppm
it
ys

ll

fo

LA-ICPMS
i

im
ca
Atoms/cm3

TXRF
r0
it
ll

IGA
im

.3
fo

nm
r3
it

1E17 1 ppm
fo

nm

Sa

GC-MS
r3

m
Sa
0n

pl
m

in
m

pl

100 ppb
g

1E16
Sa

in

D
g
m

ep
D
pl

th
ep
in
g

th

1E15 10 ppb
D

Chemical bonding/ Bulk


ep

molecular information Techniques


th

Elemental information Dynamic SIMS


1E14 Imaging information 1 ppb
Thickness and Density information only
(no composition information)
1E13 Physical Properties 100 ppt

GDMS
The EAGLABSSM Bubble Chart
2014 Evans Analytical Group
1E12 10 ppt
0.1 nm 1 nm 10 nm 100 nm 1 m 10 m 100 m 1 mm 1 cm
Analytical Spot Size

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Copyright 2014 Evans Analytical Group 10/14 BR004
Typical Analysis Depths for Techniques

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Copyright 2014 Evans Analytical Group 10/14 BR004