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Work Instruction

WD4 ACID SUPER CLEANING


Document number : RST WI POL-031 Rev : 7 Page 1

DOCUMENT NUMBER AND REVISION

RST WI POL-031 REV: 7

DOCUMENT TITLE

WD 4 ACID SUPER CLEANING

PROPOSING DEPT NAME SIGNATURE DATE


PARTY
ORIGINATOR ENGINEERING NARENDRAN
AFFECTED PARTY SIGNATURE DATE
APPROVED BY OPERATIONS TAN HOO HIN
(DEPT MANAGER)

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 2

REVISION HISTORY

REV RELEASE ORIGINATOR REASON FOR CHANGE(S) EXPIRY


DATE DATE
1 01/12/2010 Kalish New release 01/12/2012
2 28/01/2011 Rajan Added daily checklist 28/01/2013
3 04/05/2011 Yeong Oi Kuan Deleted Items 4 to 9, Revised and Added: 04/05/2013
1. Table of Content (Page 3)
2. Standard of Condition (Page 5)
3. Standard of Procedure (Page 6-10)
4. Attachment 1 WD4 Daily Machine
Checklist
5. Attachment 2 Display: Method of
Chemical Carboys Handling and Storage
– Part 1
6. Attachment 3 Display: Method of
Chemical Carboys Handling and Storage
– Part 2
7. Attachment 4 Display: Personal
Protective Equipment

4 02/05/2012 MADAVAN 1. Upgrade Table of Content (Page 3) 02/05/2014


2. Upgrade Parameter Setting (Page 4)
3. Upgrade Standard of Condition (Page 5)
4. Upgrade Standard of Procedure (Page
6-10)
5. Attachment 1.0 - PH Scale and method
of measurement
6. Attachment 2.0 – Wet Bench PH Check
Form
7. Attachment 3.0 – WD4 Machine
Cleaning and Chemical Change Check
List
8. Attachment 4.0 – WD4 Machine Status
Check List
9. Attachment 5.0 – Spin Dryer Machine
Shiftily check form
10. Attachment 8.0 – Instruction On
Preparation of Acid Hydrochloric ( HCL )
at WD4 ( Manual Preparation )
11. Attachment 9.0 – Instruction On
Preparation of Clair at WD4 ( Manual
Preparation )

5 14/06/2013 NARENDRAN 1. Revise 4.0 - Standard Operation 14/06/2015


Condition
2. Revise Attachment 3.0 - WD4 machine
cleaning and cleaning change checklist
3. Revise Attachment 4.0 - WD4 machine
checklist
4. Revise Attachment 5.0 - Spin Dryer
Machine Shiftily

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 3

6 07/04/2014 NARENDRAN 1. Revise 4.0 Standard Operating 07/04/2016


Procedure
7 06/05/2014 NARENDRAN 1. Edited 4.0 Standard Operating Condition 06/05/2016
2. Edited Attachment 4,0 WD4 machine
check list
3. Edited Attachment 5.0 Spin Dryer
machine check ilist

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 4

1.0 Purpose

The purpose of the acid super cleaning process is to clean metallic as well as organic contamination off the
wafer surface to meet the stringent cleanliness specification of CMOS and LED applications.

2.0 Safety

2.1 H2SO4 H2O2 and HCL are all very toxic and corrosive chemicals. Any direct skin or eye exposure
must be avoided.
2.2 These acids will burn the skin and eye tissues.
2.3 Always wear Personal Protective devices - safety goggles, respiratory mask, apron and long sleeve
chemical safety gloves when preparing the solutions.
2.4 Report any accidents to your supervisor, immediately!
2.5 If exposed to any of the chemicals used in the cleaning process, rinse the contaminated area with cold
water for a minimum of 15 minutes.
2.6 In the event of exposure, call immediately for help, and if required, seek immediate medical attention.

3.0 Equipment Required

3.1 2”,4”, 6” or 8” Teflon cleaning cassettes and cassette carrier


3.2 Transfer jig
3.3 Spin dryer
3.4 Flexible DI water hose with nozzle
3.5 Safety goggle and apron
3.6 Respiratory mask
3.7 Long sleeve chemical safety gloves
3.8 Wipers (Cloth)
3.9 pH – indicator strips (pH 0 – 14)
3.10 Concentrated HCL (36%) ( Hydrochloric Acid )
3.11 Concentrated H2SO4 (96%) ( Sulfuric Acid )
3.12 Concentrated H2O2 (31%) ( Hydrogen Peroxide )

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 5

4.0 Standard Operation Condition (SOC)

Standard Operation Condition For WD4 (Acid Super Cleaning)

Stage No. 1 2 3 4 5 6 Dry


Stage H2 O2 /HCL/DI QDR H2 O2 /H2 SO4 QDR EMPTY EMPTY Spin Dryer
Beaker Type / Material Teflon Teflon Quartz Teflon Quartz Teflon Stainless Steel
HCL 6 litres Phase 1:
H2SO4 50 litres - Time: 40s
H2O2 3 litres 5 litres - Speed: 1000rpm
Chemic al DI water 46 litres
Mix Time
Clair Phase 2:
Setting
(s) Interval (min) 360 360 - Time: 140s
Spiking Volume 0.5 litres 0.5 litres - Speed: 2600rpm
Volume 0.5 litres 0.5 litres
Lifetime 24 hours / 500 wafers Phase 3:
US Power Setting (Ampere) - Time: 40s
30 (shower) 30 (shower) - Speed: 1000rpm
Proc ess Time (s) 600 60 (bubble) 600 60 (bubble)
3 c yc le 3 c yc le
R-Plane: 80 ±
R-Plane: 125 ±
5˚C
Temperature (°C) 5˚C
Others:40 ±
Others:80 ± 5˚C
5˚C
DI In
Tank Cleaning Time Drain
Setting (s)
Cyc le

Pore size (µm) 0.2 µm 0.2 µm


Filter
Lifetime Max. 3 months Max. 3 months

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 6

5.0 Standard Operation Procedure (SOP)


5.1 WD4 Cleaning
No. Procedure Remark
1.0 Procedure of Receiving Materials
1.1 Wear complete lint-free suit and nitrile gloves and go in the area through Class 10K
air-shower.
1.2 Wear safety goggle
1.3 Receive material from WD3 cleaning for WD4 cleaning If the information and
1.4 Check the information from the lot traveler and make sure the information number of pieces is not
is correct with the number of pieces received. correct:
- a) Lot ID a) a) Inform CR100 personnel
- b) Number of pieces or area supervisor
accordingly
1.5 Transfer the material into Cleaning cassette using transfer jig and materialsb) b) Do not process the lot
are ready for cleaning
1.6 Record the detail into MES system and the activity log:
a) Date
b) Lot ID
c) PFA cleaning cassette ID
d) Number of pieces
e) Load in Time
f) Unload Time
g) Operator ID
h) Remark (Post Microscope; Candela Reclean)

2.0 Before Operation


2.1 Make sure the three-phase power is “ON” from the side panel and visual Related Doc: WD4 Daily
check for any machine abnormality. Checklist
2.2 Check the chemical is enough with sufficient chemical volumes. If it is not, Refer to Chemical Supply
replace with a full chemical carboy as per chemical supply preparation preparation procedure at
procedure. section 5.2, item 5.0
3.0 Chemical Preparation, Auto Tank Cleaning and Cleaning Procedure Three-colour signal light of
3.1 Press “POWER ON” button on machine panel, turn to “MANUAL”. the machine:
Welcome page will appear on the panel monitor. Press “Welcome” on the Green: Automatic operation
touch screen and the screen will switch to Main Menu: Yellow: Manual Operation
(Blinking with Home
position)
Red: Alarm

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 7

No. Procedure Remark

3.2 To Prepare new chemicals or tank cleaning, at machine panel:

3.2.1 Select ULTRASONIC HEATER, make sure Heating Condition


Tank#1 and Tank#3 are “OFF”; Ultrasonic Operation Tank#5 is “OFF”

3.2.2 Select PNEUMATIC,


At Tank #1 Operation and Tank#3 Operation:
Click “OFF” for Circulate pump Heater & Ultrasonic need to
Click “OFF” for DI In, Chemical In, Cleaning be “OFF” first before
Click “ON” for Drain draining out chemicals

At Tank#2 and Tank#4 (QDR Stages): Change the chemical based


Click “OFF” for DI In, Shower, Slow Flow, Reservoir Fill on the chemical lifetime as
Click “ON” for Drain per standard of condition
Once all stages are empty, Drain will be off automatically (blinking light
off).

3.2.3 Tank cleaning will be done manually by Operator/Tech by fill in DIW and
circulate the DIW for 10 min before drain the DIW out

3.2.4 At CLEANING MIXING,( Not in Use because Manual mixing )

HCL H202 H2S04 DIW Time has been set as per


Tank 1 6L 3L - 46L Standard Operation
Condition. Inform Supervisor
Tank 3 - 5L 50L -
if time setting shown is
different

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 8

No. Procedure Remark


3.2.5 Go to ULTRASONIC HEATER, select “ON” for Tank#1 and
Tank#3 Heating condition

3.2.6 Go to PUMP, at diaphragm pump condition,


Click “ON” for #1HCL Circulate, 3#H2SO4 Circulate

3.3 To start cleaning operation, at machine panel:


3.3.1 Go to Automatic Operation,
a) Click HOME to make sure the robot arm is back to loading stage.
b) Confirm tank temperature as per SOC setting, if temperature is still low,
RED light is shown at temperature status, wait until it is Green light.
c) Confirm no cassette in any stages. Cassette In Tank indicator will blink
if any cassette is available in related stage.
3.3.2 Twist the control button from MANUAL to AUTO. Check the chemical tank
3.3.3 Press “START” temperature with the IR gun
3.3.4 Put the cassette carrier at the loading stage and only start loading
3.3.5 Put the cleaning cassette on the carrier. Max. 2 cassettes per carrier. cassette when chemical tank
3.3.6 Make sure Three-color signal light on top of machine is GREEN: temperature is within
Automatic Operation standard operation condition
3.3.7 Press the FEEDING button next to the loading stage, Shutter door (Green indicator shown at
will open and the operator need to manually feed in the cassette carrier and monitor)
operation will start.

4.0 Spin Drying Procedure


5.1 4.1 Collect cassettes from cleaning machine unloading conveyor. Time and Speed has been set
5.2 4.2 Operator must make sure nitrogen purging in the spin dryer is working as per Standard Operation
4.3 Open the spin dryer door and place the cassette into spin dryer with the Condition. Inform Supervisor
cassette H-bar facing inward. if time setting shown is
4.4 Close the spin dryer door different
4.5 Ensure the setting as per SOC.
4.6 Press “START” button and the indicator light for door-sealed is “ON” Stop the machine if door-
4.7 Once complete, door-sealed indicator light will “OFF” sealed indicator is not “ON”
4.8 Open the door, ensure rotor is upright to prevent wafers dropping and when START button is
gently remove the cassette from the rotor. pressed.
4.9 Visual checks the wafer surface. If wafers are not dried properly, gently
spray off the water with air gun and inform to area supervisor. Record the
abnormality and lot details in the activity log
4.10 Move the cassette to transfer table
4.11 Confirm the number of pieces and send out the cleaned materials from
pass-door CR10

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 9

5.2 Other Procedure


No. Procedure Remark
1.0 Shutdown Procedure
1.1 Perform items 3.2.1 until 3.2.3 (procedure 5.1 above)
1.2 At PNEUMATIC, select DI In “ON” for Tank#1 and Tank #3 to fill up the
tank with DI water and let it soak.
1.3 Select DI In “ON” for Tank#2 and Tank#4 to fill-up the QDR tanks and let
it soak.
1.4 Power OFF the machine

2.0 Procedure when there is water interruption during automatic operation

2.1 Stop loading any cassettes at loading stage.


2.2 Complete the cycle for the balance cassettes in the machine and unload it
for spin dry.
2.3 Record the cassette ID, date/time, Operator when the event happened in the
activity log.
2.4 Report to shift supervisor or facilities to check out the actual root cause and
wait for further instruction from them
2.5 Perform items 3.2.1 and 3.2.2 (procedure 5.1 above) to drain out all
chemicals
2.6 When water supply is back to normal, perform items 3.2.3 (procedure 5.1
above) auto tank cleaning and prepare new chemical as per item 3.2.4 onwards.
2.7 Re-clean the affected materials.

3.0 Procedure when there is electricity interruption


3.1 Stop loading any cassettes at loading stage.
3.2 Inform shift supervisor or facilities to check out the actual root cause and
wait for further instruction from them.
3.3 Report urgently to shift supervisor if exhaust suction is not functioned and
chemical couldn’t be drained out due to power failure, and leave the clean
room seek for further action.
3.4 When power supply is back to normal, close all tank cover at
PNEUMATIC machine panel, use the MANUAL JOG at the side of machine
to transfer out those cassettes from chemical tank into QDR tanks first before
unloading.
3.5 Record the cassette ID, date/time, Operator when the event happened in the
activity log..
3.6 Perform items 3.2.1 until 3.2.6 (procedure 5.1 above) after power failure.

4.0 Procedure when there is filter, pumps or valve changed


4.1 Chemical stages need to be flushed with DI before any filters or pump
changed. First, Perform 3.2.1 to off heater and ultrasonic
4.2 Perform 3.2.2 to drain out all chemicals.
4.3 Switch to MANUAL OPERATION, at PNEUMATIC, turn “ON” the DI
In, once tank is filled-up with DI water, turn “OFF” DI In.
4.4 At PUMP, turn “ON” the circulate pump for the chemical stages and let it
run for 10minutes, then turn “OFF” the circulate pump.
4.5 Repeat items 4.2 until 4.4 above to do another DI flushing.
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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 10

4.6 Perform 3.2.2 to drain out all DI water before any filter or pump changed.
4.7 After filter changed, perform 2X DI flushing by repeating items 4.3 – 4.5
before new chemical preparation.

5.0 Chemical Preparation Procedure


5.1 Check the chemical is sufficient enough chemical volumes at start shift WARNING:
before operating the cleaning machine. Wear respirator mask, acid-
5.2 Wear PPE when handling chemicals. proof long gloves, apron
5.3 Get ready the biker to measure and pour the chemical to the tank when preparing chemical at
5.4 Get ready the manual suction pump to manually pump the chemical from supply cabinet
Carboy to Biker.
5.4 Bring the new chemical carboy to relevant supply cabinet. CHECK and Check the lifetime of the
CONFIRM the correct chemical is in-used. respirator mask cartridge
5.5 Open the cap and slot in the manual suction pump tubing into carboy and
Than start to manually pump the chemical from carboy to the biker until Wash the glove if there is
the level is reached. ( ref : 3.2.5 ) any chemical residual before
5.6 pour the chemical from the biker to the tank and repeat the process of removing and put it back to
chemical top up until reached the level of required in ( ref : 3.2.5 ) the assigned PPE storage
5.6 Close back the chemical cap and return back the chemical carboy to the area
chemical storage located area.
5.7 Cap the empty carboy and place it at the disposal carboy storage area. CAUTION:
5.8 Since the chemical is using external heater, the operator must check the Transfer chemical carboys
external heater is function well. The external heater must heat up the from warehouse into CR10K
chemical up to the required. or CR100 by using trolley
and through trolley pass-
NOTE: door.
Operator is responsible for ensuring sufficient departmental inventory of
chemicals. When the departmental inventory level of chemical reaches 1
gallon or less, you are responsible for going to the inventory control area
(ICA) and procuring additional inventory.

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 11

Attachment 1.0 - pH Scale

1 2 3 4 5 6 7 8 9 10 11 12 13 14

How pH is Measured

To get accurate pH readings always remember to:

 Wait a minute or two after you add an acid or a base to a solution. This will allow the reaction (ions being either
donated [acid] or accepted [base]) to complete before you measure.
 Swirl or mix a solution well before measuring. This will help ensure that the solution is uniform.

When using pH test paper/indicator sticks you should also:

 Make sure to only use paper/sticks that have not been previously wetted.
 Wait for the color to stop changing (1-2 minutes maximum) before matching the paper/stick to the color key. Do
not wait more than 5 minutes after the color has stabilized or it may start to fade and affect the accuracy of your
reading.

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 12

Figure 1. pH indicator sticks are dipped into a solution then matched against a color key to determine the solution's
approximate pH

Attachment 2.0 :
WET BENCH PH CHECK FORM

DATE TIME SHIFT PIC

UNDERLINE THE MC NAME:

MC WDO WD1 WD3 WD4

TARGET ACTUAL STATUS


SOLUTION
NO.TANK STICK PH TEST PAPER PH PH PASS/
TANK
READING READING FAIL
T#1 HCL & H2O2 0–1

T#2 QDR 6–7

T#3 H2SO4 & H2O2 0–1

T#4 QDR 6–7

CHECK BY : DATE :

VERIFYED BY : DATE :

Note :- If the PH reading is out of spec please inform to line Supervisor and change back the chemical. If the DIW PH is out
of spec drain the DIW and top-up new DIW.

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 13

Attachment 3.0 :
WD4 - MACHINE CLEANING AND CHEMICAL CHANGE Check List
DATE SHIFT TIME DOWN TIME START UP
DRAIN CHEMICAL AND DID MACHINE CLEANING
1 Make sure all wafer completed unload.
Select to manual mode
2 Off heater power for tank # 1, # 3 and #5.
3 Drain HCL & H202 Chemical ( tank #1)
Flushing inside tank with DI Water ( Open valve )
Close drain valve and do manual cleaning ( 3 cycle )
4 Drain H2SO4 & H2O2 Chemical ( Tank # 3 )
Flushing inside tank with DI Water ( Open valve )
Close drain valve and do manual cleaning ( 3 cycle )
5 Clean loader side & unloaded side
Wipe or vacuum any dust or rubbish at loader / unloaded area.
6 Cleaning all machine cover and robot movement side
Top up New Chemical in tank # 1,3
* ex : Please use PPE completely during handling / make up chemical.
1 Fill up half level DI Water inside tank.
Top up H2O2 & HCL by manually in tank # 1( H2O2 - 3 litres & HCL 6 Litres and DIW 46 litres
Fill up Di Water until over flow level. Make Sure overflowing and proper circulation.
2 Top up H2O2 & H2SO4 Chemical ( tank # 3)
Top up H2O2 & H2SO4 by manually in tank # 1 ( H2O2 - 5 Litres & H2SO4 - 50 Litres )
Didn't fill up Di Water inside tank. Make sure proper circulation.
3 Drain DI Water - QDR tank ( tank # 2,4 )
Do manual cleaning - clear any dust or rubbish inside tank.
Fill up DI Water until over flow level. ( After cleaning or wipe machine tank cover )
Check Machine condition before start up machine
1 Check robot functionality and do homing before start running
2 On Heater tank # 1 and #3
3 On and check circulate pump functionality tank # 1, #3 & #5
Monitor heater temperature tank # 1 to reach 80 °C ± 5 °C respectively and 125 °C ±
4 5°C for tank 3

5 After 4all condition


Monitor OK homing machine and select auto mode for running machine.
heater
Done by : temperatu
re tank # 1
& 5 to
reach 80
°C ± 5 °C
respectiv
ely

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Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 14

Attachment 4.0 WD4 Machine Check List


Month :………………………………… Year :………………………………
ITEM

DATE /
DETAILS SETTING / CONDITION 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31
SHIFT
DAY
Time :
NIGHT
Process Beaker DAY
1 No Abnormality
Condition / Content NIGHT
No Abnormality (sounds, DAY
2 Pump Condition
leak..etc); Functionality NIGHT
DAY
a: Tank #1,#3 recycle pump
NIGHT
Tank #2, #4, QDR DI suply DAY
b:
pump NIGHT
No Abnormality DAY
3 Robotic Arm
(jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly
NIGHT
Tank #5 DAY
5 Ultrasonic
( Ultrasonic 6 ~ 7 A ) NIGHT
6 Recipe Setting
DAY
Tank #1, #3, #5 600s
Process
time :

NIGHT
a:
30s ( shower)/ DAY
Tank #2, #4, #6
60s ( bubble) NIGHT
R-Plane = 80 ± 5˚C DAY
Temperature :

Tank #1, #5 Others : 40 ± 5˚C NIGHT


b:
R-Plane = 125 ± 5˚C DAY
Tank #3 Others : 80 ± 5˚C
NIGHT
DAY
Tank #1 6.0 ltrs
Chemical Mix By Liters

NIGHT
DAY
Tank #1 3.0 ltrs
NIGHT
DAY
c: Tank #1 46.0 ltrs,
NIGHT
DAY
Tank #3 H2SO4 50.0 ltrs
NIGHT
DAY
Tank #3 H2O2 5.0 ltrs
NIGHT
No Abnormality: (leak, DAY
7 Overall Machine Area
smell,vibration, sound ) NIGHT
DAY
Check By ( Operator ID # )
NIGHT
DAY
Acknowledged By ( Supervisor ID # )
NIGHT
1 7 13 19 25 31
Any mc issue

2 8 14 20 26
/ Remarks

3 9 15 21 27 3 8
4 10 16 22 28 4 9
5 11 17 23 29
6 12 18 24 30
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

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official document control stamp
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 15

Attachment 5.0 - Spin Dryer Machine


Month : ……………..…Year : ………………….
Shiftily (((Check List DAT
ITEM

E/
1 1 1 1 1 1 1 2 2 2 2 3 3
DETAILS SETTING / CONDITION 1 2 3 4 5 6 7 8 9 10 11 17 24 25 26 27 28 29
SHI 2 3 4 5 6 8 9 0 1 2 3 0 1
FT
a: Phase 1: Rinse DAY
1 Spin Dryer NIG
Time /Speed : 40s/600rpm HT
TOP Phase 2: Dry 1 DAY
b: NIG
Time /Speed : 360s/2400rpm HT
Phase 3: Dry 2 DAY
c: NIG
Time /Speed : 80s/1000rpm HT
Phase 1: Rinse DAY
a: NIG
BOT Time /Speed : 40s/600rpm HT
Phase 2: Dry 1 DAY
b: NIG
Time /Speed : 360s/2400rpm HT
Phase 3: Dry 2 DAY
c: NIG
Time /Speed : 80s/1000rpm HT
a: Ok or Not DAY
2 N2 Supply NIG
HT
a: Ok or Not DAY
3 DIW supply NIG
HT
a: no any abnormality: DAY
4 overall machine area NIG
( Leak,Smell, Vibration,sound ) HT
DAY
Time : NIG
HT
DAY
Check By ( Operator ID # ) NIG
HT
DAY
Acknowledged By ( Supervisor ID # ) NIG
HT
1 7 1 19 25 31
3
2 8 1 20 26
Any mc issue

4
/ Remarks

3 9 1 21 27
5
4 10 1 22 28
6
5 11 1 23 29
7
6 12 1 24 30
8
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

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official document control stamp
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 3 Page 16

Attachment 6.0 :
DISPLAY : Method of Chemical Carboys Handling and Storage

X
Chemical carboy should be faced-upwards at storage or when transfering on trolley

X
No stacking of chemical carboy at storage area

Opening the
machine doors
will affect
efficiency of the
machine exhaust
system

X
Chemical supply cabinet and all cleaning machine doors must be always closed properly

Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 3 Page 17

Attachment 7.0 :
DISPLAY :Method of Chemical Carboys Handling and Storage

No Chemical Carboy is allowed to hand-carry and pass-through


air shower

Trolley Pass-Door


Chemical Carboy must be transported on trolley and send into
clean-room through trolley pass-door
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 18

Attachment 8.0 :
DISPLAY: PERSONAL PROTECTIVE EQUIPMENT
a) When handling any chemical directly (during chemical supply change at supply cabinet; weekly
machine stages cleaning, chemical process beaker checking during operation/machine failure, filter
changed…etc)  Respirator Mask; Acid-proof gloves, Apron

Long sleeve acid-proof Use Sperian 100800 NIOSH 3M 6004 NIOSH Cartridge
gloves, apron, respirator mask Cartridge when handling only for handling NH4OH
chemicals in CR10K chemical in CR10K

b) When entering CR10K, during cleaning operation  Safety goggle, nitrile gloves

or

c) Make sure PPE are always in good condition. Inform area supervisor to replace any damaged PPE.

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official document control stamp
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 19

Instruction On Preparation of Acid Hydrochloric (HCL) and Hydrogen Peroxide (H2O2) at WD4 (Manual
Preparation)

1) Wear long sleeve 2) Get ready a washed


acid-proof gloves, and cleaned measuring
apron, respirator mask. beaker.
Use Sperian 100800
NIOSH Cartridge

3) Fill-up the 4) Bring the H2O2


HCL/H2O2 tank (Tank chemical drum on the
1 and Tank 5) with DI trolley to the front of Tank
water (at least ½ level 1, open-up the cap and
of the tank) tranfer out 3L H2O2 in the
measuring beaker with
Always prepare DI the dip-tube and pour into
water first before Tank 1 and Tank 5
pouring acid into the
tank

5) Transfer out 6L HCL 6) Rinse and wash the


into beaker and pour beaker, dip-tube and
into Tank 1 and Tank 5 gloves with DI water to
slowly. clean off the HCL residue
Fill up the balance with before storing.
DI water until Wipe if any HCL residue
overflowing and dripped on floor or side of
circulating ( Confirm machine
this by checking the
chemical flowing at the
circulating pump
behind). Before start
running, make sure the
heater is ON

Confidential – For Internal Use Only


*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 20

Instruction On Preparation of Acid Sulfuric (H2SO4) and Hydrogen Peroxide (H2O2) at WD4 (Manual Preparation)

1) Wear long sleeve 2) Get ready a washed


acid-proof gloves, and cleaned measuring
apron, respirator mask. beaker.
Use Sperian 100800
NIOSH Cartridge

3) Bring the H2O2 4) Next, bring the H2SO4


chemical drum on the chemical drum on the
trolley to the front of trolley to the front of Tank
Tank 3, open-up the 3, open-up the cap and
cap and tranfer out 5L tranfer out 5L H2SO4 in
H2O2 in the measuring the measuring beaker
beaker with the dip- with the dip-tube and pour
tube and pour into into Tank 3 SLOWLY.
Tank 3. Continue until ~50L of
Put back the chemical H2SO4 has been filled
drum at the storage into the tank and make
area. sure chemical level until
Rinse and wash the overflowing level in the
beaker and dip-tube tank.
before storing. CAUTION:
Rinse and wash the
Wipe if any chemical beaker, dip-tube and Bubbles and heat will be
residue dripped on gloves with DI water to generated during
floor or side of machine clean off the chemical mixing. Pour in H2SO4
residue before storing. slowly
Wipe if any chemical
residue dripped on floor or
side of machine

5) Make sure there is


overflowing and proper
circulation when pump
is ON ( Confirm this by
checking the chemical
flowing at the
circulating pump
behind). If not, add-on
H2SO4 until
overflowing.

Before start running,


make sure the heater is
ON
Confidential – For Internal Use Only
*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 21

Confidential – For Internal Use Only


*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp