Beruflich Dokumente
Kultur Dokumente
CORROSION OF CERAMICS
J.R. Blachere
F.S. Pettit
Department of Materials Science and Engineering
University of Pittsburgh
Pittsburgh. Pennsylvania
10987654321
Blachere, J.R.
High temperature corrosion of ceramics / by J.R. Blachere and F.S.
Pettit.
P. cm.
Bibliography: p.
Includes index.
ISBN O-8155-1188-4 :
1. Ceramic materials--Corrosion. I. Pettit, F.S. (Frederick
S.), 1930- . II. Title.
TA455C43B57 1989
620.1’404217--dc19 88-38242
CIP
Other No yes Publications
Edited by
D.J. De Renzo
The broad-based ceramics Industry encom- provides chemical and physlcal property data
passes all types of glass; refractones; abrasives; for more than 1000 products supplied by 181
whitewares. such as porcelain and pottery, ceramic raw material suppliers in the U.S. and
structural clay materials; etc. Increasing use of Canada.
advanced ceramic materials in the automotive Part I is an alphabetical listing of 99 raw
and aerospace Industries, as well as in such material categories. Raw material suppliers are
diverse areas as electronics and medical devices, then included alphabetically under each cate-
IS expected to push the demand for raw materials gory, along with their product information. The
far beyond that associated with the traditional categories in Part II include additives; semi-
ceramics industry. processed materials, some of which are available
Prepared directly from manufacturers’ data as unfinished shapes or substrates; and materi-
sheets and tables at no cost to, nor influence als intended for specific end uses. Raw materials
from, the contributing companies, this book categories are:
This book describes high temperature corrosion of ceramics. The materials in-
vestigated in this particular study were silica, alumina, silicon nitride and silicon
carbide. In addition to the pure single crystals or CVD materials, typical engi-
neering materials of various purities were included in the study. The corrosion
conditions were ‘hot corrosion’ in which gaseous corrosion was enhanced by
Na2S04 deposits. Some gaseous corrosion and oxidation experiments were also
performed. The hot corrosion was studied at IOOO’C and at lower tempera-
tures, in the presence of pure oxygen and oxygen containing SO2 and SOs. The
changes in morphology of the surfaces were observed in the scanning electron
microscope. This instrument and the related x-ray microanalysis were the
major tools of research. A method of measurement of oxide thickness in the
electron microprobe was developed for the experiments on silicon nitride and
silicon carbide.
A great number of ceramic materials are available for use in a variety of corrosive
environments. In order to develop a theory applicable to the corrosion of cer-
amics in general, it was necessary to investigate a variety of representative cer-
amic materials exposed to a number of different corrosive environments. In
order to keep the number of experiments at a reasonable number, the ceramic
materials used in this study were selected on the basis by which resistance to
corrosion was developed, in particular, by being immune to the environment
or by developing passivity. Furthermore, the environments used to produce
corrosion were selected based upon the likelihood of their being encountered in
practice and their severity.
V
vi Foreword
NOTICE
INTRODUCTION.........................................l
REFERENCES..........................................30
vii
viii Contents and Subject Index
Single Crystal . . . . . . . . .. . . . .
. .. . . . 116
High Purity Polycrystalline . . .
Alumina . . 116
Medium Purity Polycrystalline Alumina. . . . 118
Low Purity Polycrystalline Alumina .. . . . . 119
Discussion of Results . . . . . . . . . . . . . . . . 122
References. . . . . . . .. . . .. . . . . . . .. . 136
is apparent that in most instances ceramics are the best choice to provide
metallic alloys and polymers, ceramics can react with certain environments.
materials used in this study were selected on the basis by which resistance to
were selected based upon the likelihood of their being encountered in practice
practice but in some cases the amount of reaction required for equilibrium to be
achieved is very small, and consequently the changes in the properties of the
material are very small. For example, when Al303 is heated in oxygen at
elevated temperatures, the oxygen activity in the Al.303 may not be the same as
that in the gas, and oxygen will be incorporated into or removed from the Al303
depending upon the oxygen activities in the Al303 and in the gas. Upon obtaining
equilibrium between the Al303 and the gas, which may require extremely long
2 High Temperature Corrosion of Ceramics
times depending upon the temperature, the Al303 does not exhibit any significant
Al303 however will change and there could be significant changes in properties
Alumina and silica are two ceramic materials which can be considered to be
and therefore these two materials were studied in the present investigation. The
purity and structure of these ceramics can also affect their behavior in different
corrosive environments and therefore these two parameters were also examined
varying purity as defined in Table I. Only one type of silica was studied. As
reaction product barrier through which the reactants involved in the corrosion
ceramic and upon the environment causing corrosion. For example, Si3N4 and
sufficient SO3 to form sulfates and again the properties of the sulfate reaction
product play a significant role in the corrosion properties. In the present studies
Si3N4 and SIC specimens with purities as defined in Table I were therefore used.
TABLE I - MATERIALS UNDER STUDY
995 poly A1203 (a) 99.6 - 99.5(0.17 M@ AlSi Mag 772 (3M)
0.17 Si02) or ADS 995 (Coors)
975 poly A1203 (a) 97.4 (0.75 MgO, 1.6SiO2 S-697 (Saxonburg)
0.1 Na20)
Sic H.P. H.P. (aSiC) 94(3Al203, 2.5W, Fe, 02) Norton NC-203
contain oxygen but other reactants such as sulfur, nitrogen, carbon and chlorine
chlorides may also accumulate upon exposed surfaces and substantially affect
the corrosion processes. In the case of studies concerned with the corrosion of
to mixed gases containing one or more reactants in addition to oxygen, and finally
environments used in the present studied are identified in Table II. These
sulfur, carbon and hydrogen at temperatures of 700, 1000 and 14OOOC. The
described and then a summary of the results will be presented and discussed.
Some of these results have been presented in previous reports for this
program.(l) Other results are included in student theses and are also presented
the results will not be repeated in this report but will be referred to by
Results obtained from studies using gaseous environments will be discussed first
and then results obtained from studies using deposits on silica, alumina, Sic and
Experimental Conditions
The materials that were studied in this program and the environments that
were used to produce gaseous corrosion and hot corrosion attack have been
briefly discussed previously in this report (Tables I and II). The ceramics that
were studied (Table I) consisted of Al3O3, SiO3, Sic and Si3N4. A range of
purities were examined in the case of Al3O3, Sic and Si3N4. Single crystals of
SIC and Al303 were also studied and compared to polycrystalline specimens.
The gas compositions that were used are presented in Table II. Gas mixtures
consisting of O3-SO3-SO3 were used in both gaseous corrosion studies and the
hot corrosion studies. Hot corrosion experiments were also performed in pure
1000 and 1400°C whereas the hot corrosion investigations used temperatures of
700 and 1000°C. When O3-SO3-SO3 mixtures were used at 700°C, this mixture
was passed over a platinum catalyst to ensure that equilibrium was achieved.
The catalyst was not required to achieve equilibrium at 1OOOOC.The flow of the
temperature to a flowing gas stream of fixed composition. In the case of the hot
corrosion studies the specimens were coated with deposits of Na3S04 for
6
Experimental Procedures 7
mixture. Most specimens were diamond polished and they were ail cleaned
light microscope and particularly the Scanning Electron Microscope (SEM) with
and WDS (Wavelength Dispersive X-ray Spectroscopy used particularly for light
large number of other techniques were used in special cases they are SIMS, ISS,
Furthermore, since after the corrosion tests some deposited salt often
remained on the sample, the Nag.504 was washed off to reveal the sample
surface. The samples were characterized before and after this washing.
Experience has shown that the examination of the sample before washing is
extremely fruitful, and the observed morphologies have taken many forms. The
washwater was analyzed as described in a previous report (l); this analysis is now
Special techniques
intensity of the oxygen Ka line is used in the present research to measure the
A beam current) for a scale and a bulk standard of pure fused SiO2. Both
samples are coated with 200A of carbon. The ratio k of their intensities
The calibration curve for the relationship between the k ratio and the oxide
thickness was calculated with a computer program written for this research
the Q (pz) curve which is the intensity of X-ray generated at a weighted PZ depth
into the sample. This calculation includes many corrections and correlations
the data available for these corrections (such as absorption) for light elements is
relatively poor and that this calibration can only be approximate. Measurements
based on light element are usually not used quantitatively. However the method
recently(3) and more details will be found in Appendix E which contains a copy of
may lead to significant error if the composition of the scale deviates markedly
calibration and other sources of error under the best conditions. It is good down
to about lum and depends greatly on the thickness of the layer (constancy and
magnitude). In some cases the scales are difficult to separate from the substrates
The contact angles of the deposits have been measured in the SEM at room
is particularly important since deposits often break into droplets decreasing the
area of interaction between the sample and the melt. After coating with carbon
(about ZOOA)the samples are placed in a tilted position in the SEM which allows
the location of the drop under the electron beam and then they are tilted further
to a vertical position to record the profile of the drop. The edges of the drops
are enlarged for the measurement. A number of drops are measured under those
conditions on the same sample. Experience with the measurements show that
their reproducibility is about f: 2O. Since this reproducibility is very good, it has
However the samples are often damaged (silica and silica formers) during exposures
and processing. Also, cross sections are often desired with salt on the sample, so
that sawing or polishing in wet media has been avoided to preserve the soluble
sodium compounds. Most cross sections were either dry-cut with a diamond saw
nature of the scale and sometimes its apparent layered growth is shown clearly
in cross sections. The cross sections can also be used directly for the measurement
of oxide layer thickness (~l~rn). In some cases salt drops have been crossed by
the fracture giving valuable information. However the lack of flat cross sections
has limited the use of the crystal spectrometers of the electron microprobe.
In many cases the deposit drops do not adhere welt to the sample surface
after cooling so that the underside of the drops and the area of the sample which
was under the drops can be examined and analyzed at least qualitatively.
Mechanical bursting of bubbles in surface layers and removal of drops are also
Introduction
The results from the gaseous corrosion studies will be discussed by considering
first the studies of silica and alumina, and then the studies performed using Sic
and Si3N4.
of 700, 1000 and 14000C in a number of different gas environments which included
oxygen, 02-H20-H2, 02-CO2-CO and O2-SO2-SO3 gas mixtures (Table II). The
results obtained from these studies are discussed in detail in Reference 1 and
Appendix A. The specific conclusions developed from these studies are as follows:
Silica
(1) Devitrification of silica glass to cristobalite took place rapidly under all
SiO2 is important with regards to the use of crystalline SiO2 scales on Sic, Si3N4
(3) The silica is significantly affected when exposed to low oxygen pressure
at 1400°C. Silica weight losses occurred after exposure to either wet hydrogen
or a CO-CO2 gas mixture and are related to the decomposition of silica in the
low oxygen pressure and the reaction of either hydrogen or CO with silica to
form SiO vapor and either H20 or CO2 gas. Weight losses increase with increasing
11
12 High Temperature Corrosion of Ceramics
Gaseous Corrosion 13
(5) Silica is very resistant to attack by SO2-SO3-02 gas mixture under the
test conditions.
Alumina
in the alumina materials such as SiO2 and Na20 can result in volatilization. The
reactions occurred especially at high SO3 pressures (e.g. 7~10~~ atm. SO3) and
(4) Corrosion of alumina in SO3 containing gas can occur even on the highest
purity alumina where reaction products with activities less than unity are formed.
sulfate) by ESCA.
grain boundaries (i.e., on the impurity second phases at the grain boundaries).
higher SO3 pressures and lower temperature (e.g. at 7000 than 1000°C), since a
lower SO3 pressure is necessary to form sulfate at 700°C than at 1000°C. The
The gas induced corrosion of Si3N4 and SIC was studied only at 1400°C in
oxygen and at 1OOOoC in an 02 - SO2 - SO3 gas mixture with an initial SO2
and to provide baseline data for comparison with the hot corrosion studies at
1ooooc.
The studies in oxygen at 1400°C showed varying results depending upon the
form of the substrate material. In the case of the single crystal Sic
crystallization of the silica scales was observed. These scales which were about
1 urn thick after 12 hours of oxidation and cracked upon cooling to form star
patterns that were believed to radiate from nucleation centers indicating the
The silica scales which formed on the polycrystalline samples were thicker in
most cases than those formed on the single crystals of Sic being about 10 urn
after 12 hours of oxidation. The hot pressed silicon carbide exhibited a glazed
surface and contained bubbles resulting from CO and CO2 evolution. The lack of
XRD along with a large “glass” peak. The hot pressed silicon nitride also formed
a 10 urn thick scale which was composed of cristobalite and enstatite (MgSiO3).
The CVD silicon nitride, which was much purer than the other silicon nitrides
developed an extremely thin silica scale after 12 hours of oxidation. There was
specimens prior to oxidation and the weight change of specimens after 12 hours
of oxidation was below the detection limits of the techniques used in this program
Gaseous Corrosion 15
and glass. The sintered silicon nitride developed a scale composed of glass
out above the surface of the silica scale. Impurities influenced the oxidation of
The results obtained from the studies performed at 1400°C show that the
oxidation of SIC and SiSN4 is dependent upon the structure and composition of
the silica scales that are formed upon these materials. Glassy silica provides a
more protective reaction product barrier than crystalline silica, however, the
incorporation of impurities into the glassy silica can cause the protectiveness of
At 1000°C the pressure of SO2 and SO3 in the gas mixture along with oxygen
did not significantly affect the oxidation of pure silicon nitride or pure silicon
carbide compared to oxidation in pure oxygen. The major effect of SO2 and SOS
occurred when the specimens contained impurities. While the effects of impurities
were significant but not documented extensively, these effects were not as
in the oxide scale at 1000°C and thereby affect the protective properties of the
The results obtained from the studies on the hot corrosion of silica are
following the important results from these studies are briefly summarized.
mm thick were exposed to a variety of conditions known to cause the hot corrosion
were performed at 700 and 1000°C. The deposits of Na3S04 which were applied
different gas compositions were used. One consisted of an SO3-03 gas mixture
and the other was pure oxygen. The SO3 pressure in the gas mixture was 1.5 x
10e3 atm. When Na3S04 is exposed to gases containing SO3 the activity of
Na90 in the sulfate is inversely proportional to the SO3 pressure. If the activity
higher SO3 pressures established less basic, or more acidic melts, whereas the
gas containing only oxygen causes the more basic liquid sulfate to develop.
Furthermore the deposit applied to the specimen surfaces was Na3S04 - 50 mole
percent CoSO4 since pure Na$304 melts at about 883OC and the sulfate mixture
is liquid at 700°C.
16
Hot Corrosion of Silica 17
The liquid sulfate deposits wetted the silica specimens in varying amounts
thickness of the deposit also affected wetting. Generally the liquid deposits
wetted the silica more completely under basic conditions. At 1000°C under
basic conditions the salt wetted most of the coupon after 1 hour with a wetting
angle of 20. After 24 hours the wetting was continous. At this temperature and
under acidic conditions droplets of liquid were formed with wetting angles Of
24O, and 130 on large droplets (’ 0.2 mm dia), after 24 hours. Wetting was not as
complete at 7OOoC. In the case of basic conditions droplets with wetting angles
between 13 -240C were observed after 24 hours, whereas under acidic conditions
the silica was observed. After water washing to remove the salt, small weight
losses (0.1 - 1 mg/cm2) were detected and small voids were evident in the silica
where salt droplets had been present prior to water washing. The voids were
more concentrated near the perimeter of the droplets. Analysis of these results
has been complicated by the decomposition of the CoSO4 in the liquid via the
reaction,
since the SC3 pressure in the gas was lower than the equilibrium pressure
required to maintain the initial liquid deposit. The principal reaction of the
deposit with the silica should involve the Na20 component of liquid since
sulfates and sulfides of silicon are not stable under the experimental conditions
that were employed. Hence, a reaction of the following type seema plausible,
Inspection of this reaction shows that the formation of sodium silicate phases
becomes less favorable as the SO3 pressure is increased. It is believed that the
SOS pressure in the melt over most of the specimen surfaces is too high to
sulfate at localized regions under the drops, in particular along the sulfate -fused
silica interface which caused voids to be evident upon water washing. This
the CoSO4 component of the liquid was more severe since there was no SOS in
the gas phase. Cristobalite spherulites were observed beneath the salt drops.
Weight change measurements after water washing were not meaningful because
some cobalt oxide resulting from decomposition of CoSO4 remained upon the
specimen surfaces. Since dissolution of the fused silica was observed under the
acidic conditions, and this process is believed to involve NaSO, such a reaction
would also be expected in the more basic melt. The important result obtained at
7000 under basic conditions however is that crystallization of the fused silica
was observed beneath the salt droplets. Since crystallization was not observed
at 700°C under acidic conditions, the activity of NaSO in the liquid deposit must
all of the droplets, but no devitrification of the fused silica was evident away
from the droplets. The weight losses of specimens under acidic conditions at
1000°C were less than at 700°C. This can be accounted for by less sodium
The most extensive degradation of the vitreous silica occurred under basic
conditions at 1OOOoC. A layered reaction product was formed over the total
interface the following sequence of phases was observed after very long
more rapidly and conformed to a linear rate law since the crystalline products
observed parabolic rate has been accounted for by assuming the crystallization
of the fused silica is caused by sodium from the liquid deposit. There is no
question that some sodium silicate was formed. Analyses of wash water,
however, shows that more water soluble corrosion products are formed early in
the corrosion process than after long reaction times when the crystalline phases
have been formed. Such results suggest that the reaction to form silicates is
dependent upon the composition of the liquid deposit and the structure of silica.
corrosion nor devitrification was detected at 700 or 1OOOOC. On the other hand
significant degradation of fused silica was observed in SOS-02 gas mixtures, and
in oxygen, when liquid sulfate deposits were present. This degradation occurred
by two different, but related, processes both of which were dependent upon the
activity of NaSO in the deposit. The process which caused the most severe
the liquid was increased and it occurred at both 700 and 1000°C. It requires a
20 High Temperature Corrosion of Ceramics
threshold Nag0 activity. It was especially severe when the specimens were
thermally cycled since the crystallized products spalled under the influence of
thermally induced stresses. The other process involved the formation of sodium
silicate as a reaction product on the surfaces of fused silica. It appears that this
latter process is less prevalent when the liquid is reacting with crystalline silica
than vitreous silica, nevertheless this reaction also increases as the activity of
The results obtained from the studies on the hot corrosion of alumina are
The weight changes measured after hot corrosion of the aluminas were
small but not negligible. They were due to offsetting reactions such as the
solution of Al203 into the sulfate melt, the silica and silicate precipitation
mostly due to impurity phases and the precipitation of Co0 at 7OOoC in pure
oxygen. In general the weight changes appear greater than for gaseous
corrosion.
The sulfate tended to wet the aluminas partially at 7OOoC under acidic
conditions (~20~ after 24 hours). The wetting of the purer aluminas decreased as
a function of time apparently as some alumina dissolved into the sulfate and
reduced the affinity of the sulfate for the alumina substrates. At higher
The wetting was better at 1000°C under basic conditions than under acidic
conditions as the impurities tended to increase the wetting tendency. The wetting
is an indication of the reaction tendency of the sulfate with the substrate. Good
wetting results in more contact area between the sulfate and the substrate which
The single crystal alumina tended to react very little with the Na2S04 and
in line with the gaseous corrosion results more reaction occurred under acidic
conditions than under basic conditions. The single crystal has basal orientation.
The corrosion of the polycrystalline aluminas indicated that the corrosion of the
grains is a function of orientation, with greater attack of planes away from the
21
22 High Temperature Corrosion of Ceramics
melt.
were formed and after long exposures globular silica was observed on all
polycrystailine materials. This shows that under the most acidic conditions the
silicate impurities are attacked by the melt generating sulfates and precipitating
silica. The required solubility gradient is set for continued dissolution of alumina
probably cristobalite, occurs in the sulfate melt away from the interface with
the substrate and is not related to the microstructure of the substrate. The
wider scale at 1OOOoC. At the higher temperature the regions under the sulfate
melt are smooth with no marked preferential attack at the grain boundaries. At
1000°C magnesium sulfate and calcium sulfate are formed and alumina is
silicates were formed. The salt on cooling contained Mg, Al and some Ca. The
attack of the alumina grains was limited under the more basic conditions overall
micrographs.
oxygen (basic conditions). While there was little evidence of basic fluxing of the
single crystal, the high Nag0 activities promote reaction with the silicates
aluminum silicates grew from the melt with transport of silica and other oxides
Hot Corrosion of Alumina 23
along the grain boundaries. This is illustrated by the perfect decoration of the
silicate after long term cyclic exposures. Some magnesium was present in the
silicates formed near triple points. With the more impure aluminas more silicate
was formed and the crystals contained various alkaline earth elements and
potassium which were present as impurities in the materials. While this fluxed
growth of silicate crystals feeding from grain boundaries and impurity grains is
proposed that the impurity reactions which form sodium silicates lower the Na30
activity and raise the SO3 locally in the melt. This more acidic Na3S04 then can
dissolve the alumina grains by formation of sulfate in the melt by acidic fluxing.
The two reactions, the grain reaction and the grain boundary reaction will
proceed cooperatively, as the ion needed for one is produced by the other.
above they have a major influence even on 99.8% purity alumina, which means on
most technical ceramics. This may apply also to alumina scales grown on
coatings on superalloys but in a general manner since they do not contain silica-
Under acidic conditions, the sulfate tends to dissolve the alumina even
though conditions are not favorable for the formation of aluminum sulfate at
aluminum sulfate in the field of stability of alumina was already observed in the
presence of silica-based impurities which are present at the grain boundaries and
as second phases in the polycrystalline aluminas. The impurities modify the local
conditions so that intermediate activities favoring the attack of the silicates and
the dissolution of the alumina in the sulfate prevail under the acidic and the
basic conditions of this study. Under acidic initial conditions, set by the gaseous
environment, the sulfate tends to dissolve alumina and as this is done the
activity of Nag0 in the sulfate is increased. This promotes the attack of the
silicates which are dissolved in the sulfate thus decreasing the Nag0 activity.
The two reactions can proceed cooperatively. At 700°C the activity of Na70
was always too low to form sodium silicates and SiO7 is precipitated. At
1000°C, higher Nag0 activities are generated by the same mechanism and
sodium aluminosilicates are formed. Under basic initial conditions, the sulfate
melt tends to attack the acidic impurity phases, thus promoting the dissolution
as discussed earlier.
were attacked under both acidic and basic conditions of the experiments,
however the processes are extremely slow and there was no experimental
evidence of catastrophic attack even after 400 hours exposure. Under the
circumstances one may ask if any of the proposed mechanisms would lead to slow
depleted. Higher temperatures might increase the rate of corrosion and basic
concentrations in the atmosphere, however the sulfate vapor pressure then will
limit the corrosion since sulfate deposits are no longer formed at higher
temperatures.
Hot Corrosion of Silicon Carbide
and Silicon Nitride
The hot corrosion of silicon nitride and silicon carbide has been studied in
pure oxygen, conditions in the temperature range 900-1000°C. During basic hot
corrosion the salt wets completely the samples while during acidic corrosion it
breaks up in droplets. The hot corrosion increases the rate of oxidation and the
thickness of the oxide layers formed increases markedly from acidic (measured
between the drops) to basic hot corrosion and both are greater than for dry
oxidation. The oxide layers formed tend to be vitreous and devitrify rapidly
under the liquid sulfate. For the purer materials devitrification was sparse and
very limited in between the sulfate droplets under acidic conditions. In general,
clearly different behaviors are observed for the pure materials under the two
conditions. They are controlled by the activity of sodium oxide in the sulfate
melt near the interface with the substrate. In all cases the materials oxidize and
the oxide dissolved into the sulfate. For acidic conditions, the sulfate does not
wet the oxide, and a surface activity of sodium oxide in equilibrium with the
atmosphere is set up in between the sulfate droplets. The sodium diffuses into
26
Hot Corrosion of Silicon Carbide and Silicon Nitride 27
Under basic conditions, a thick product layer was formed and the NagSO4
was consumed slowly in the reaction. The ceramics oxidize at their surfaces and
the oxide dissolves into the sulfate melt. The Nag0 activity builds up at the
phase remains on top of the silica and the sulfate left is in small isolated drops
on top of the silicate. The melt contains a high concentration of silica initially
as indicated by the wash water analysis and it has also been well documented by
Mayer and Riley(S) except that the reaction is much slower with Nags04 than
for NagCOS which they studied. Some protection is offered by this complex
product layer since greater degradation was observed after preoxidation of the
samples.
Under acidic conditions (1.5~10-~ atm SOS), poor wetting and little
reactivity with the salt were observed. However the oxidation was enhanced
even between the sulfate drops. This oxide growth between the drops was studied
in detail. The oxide formed was mostly vitreous. In these regions a very thin
layer rich in sodium is detected (~10 A thick) and sodium diffuses into the silica
formed. The silica layers formed under the sulfate droplets devitrified rapidly
They were thicker than the vitreous layer formed outside the drops except for
the C-side silicon carbide for which these thicknesses were similar. The
thicknesses of oxide formed under the drops tended to be similar for all three
surfaces (CVD silicon nitride, C-side silicon carbide and Si-side silicon carbide)
studied but they were still smaller than the product layers formed under basic
28 High Temperature Corrosion of Ceramics
liquid phase and therefore independent of the nature of the substrate surface.
Indeed for the basic conditions and under the droplets for acidic conditions there
was no more differentiation in the behavior of C-side and Si-side silicon carbide.
A model was proposed for the formation of random cristobalite globules which
correlates with the results obtained for the hot corrosion of bulk silica. Selective
attack of the substrate occurs by transport through the liquid phase between the
spherulite fibrils.
The acidic hot corrosion which occurs between the sulfate droplets is
of this formation was obtained in this research. It is not clear presently how this
thin layer formed during the oxidation slows down the oxidation so strongly. The
silicon carbide has different behavior for the carbon-side and for the silicon-side.
During the acidic hot corrosion they oxidize parabolically at different rates.
Kinetic data and apparent activation energies were obtained for the hot corrosion
of each side. In order to interpret these results, it was logical to modify a model
the oxide layers to the substrate interface. Although vitreous silica is formed in
all cases, the different rates of oxygen transport are associated with different
carbide C-side and silicon carbide Si-side. Tentative mechanisms were proposed
for the oxidation of the two sides of silicon carbide in which the oxides are formed
Hot Corrosion of Silicon Carbide and Silicon Nitride 29
under different oxygen pressures and therefore are expected to have different
defect structures. The observed trends in the variation of the parabolic constants
for the acidic hot corrosion of these materials compared to their oxidation and
that of silicon are predicted qualitatively by these models. High apparent
activation energies such as those measured for hot corrosion are generally
consistent with the models although that for the silicon-side of silicon carbide
impurities they contain. MgO and Y3O3 tend to segregate toward the surface
during oxidation and hot corrosion. They lower the acidity of the sulfate under
acidic conditions so that wetting is improved and thicker oxide layers are formed
as the conditions are more basic than promoted by equilibrium with the
atmosphere. Conversely, the wetting is not as good under basic corrosion for
these materials as for the purer ones. The impurities set conditions intermediate
between those promoted by the equilibria with the atmospheres selected for the
basic and acidic corrosion experiments. Alumina impurities in the silicon carbide
do not segregate to the product layer formed on oxidation or hot corrosion. The
alumina entering the oxide layer appears to stabilize it against devitrification.
Great progress has been made in the understanding of the hot corrosion of
silicon nitride and silicon carbide. The corrosion varies with environmental
behavior observed correlates well with the results on the hot corrosion of silica.
In particular the major role played in the degradation of the scales by their
preferential attack occurred locally under acidic corrosion. Overall the hot
mechanisms proposed for the oxidation and hot corrosion of silicon nitride and
silicon carbide suggest directions for further studies.
1. J.R. Blachere and P.S. Pettit “High Temperature Corrosion of Ceramics”
a) DOE Report ER45117-2, March 1988
b) DOE Report ER45117-1, June 1985
C) DOE Report ER10915-4, June 1984
3. J.R. Blachere and D.F. Klimovich, J. Am. Ceram. Sot., 70 [ll] C324-C326
(1987).
6. M.I. Mayer and F.L. Riley, J. Mat. Sci., l3, (1978) 1319-1328.
30
Appendix A-Gaseous Corrosion of Silica
and Alumina in Sulfur Oxide Environments
H.R. Kim, J.R. Blachere and F.S. Pettit
Abstract:
A fused silica of high purity and alumina in single crystal and poly-
SOj- SO2~02 at 700°C and 1000°C. The silica and alumina are very resistant
Sulfates formed on the aluminas particularly at low temperature and high SO3
pressures. The reaction occurred under less severe conditions and with greater
31
32 High Temperature Corrosion of Ceramics
I. INTRODUCTION
operating at high temperatures. (1) This is because they have high refractori-
extensive research over the past twenty years. They have been partially
One should not assume however that ceramics are totally corrosion resistant.
Corrosion of refractories by oxide melts such as slags and glasses are costly
to the steel and glass industries. As a result research has been performed on
the corrosion of ceramics in deep melts, (3) but little is known about the
In addition, deposits of salts such as NaZSO4 mpy form on the components and
tend to enhance the gaseous corrosion. It has been shown recently that ceramics
such as AlZO3, Si3N4 and yttria-stabilized ZrO2 can react with molten deposits
of Na2S04 in SO3 gas.(b) The gaseous corrosion of ceramics has been studied
energy systems but also as the baseline for research on the hot corrosion of
discussed here. These materials are of great importance since they perform
as protective scales on superalloys and SiOZ forms on silicon nitride and silicon
just as in the case of the gaseous corrosion of metals and alloys. Moreover,
the corrosion process are ultimately controlled by the nature of the products
that are formed as a result of reaction between the gas and the ceramic. In
metals and alloys reaction with the gas is almost always characterized by
in the gas. The cations of the ceramics are already in oxidized states and the
would result in oxygen being incorporated into the ceramic. Such a process
of the phase being oxidized. This plays a major role with degradation of chrome-
Second, the atoms or molecules of the gas may form more stable compounds with
the cations of the ceramic, for example silicon nitride reacts with oxygen to
form silicon dioxide and nitrogen. This type of reaction will depend on the
properties of the products formed upon the surface of the ceramic but effects
produced by the elements displaced by the oxygen can also be very important.
h third possibility involves the formation of volatile species such as the re-
duction of SiOz (s) to SiO (g) or the oxidation of CrpOj (s) to CrOj (g). Such
reactions probably would involve diffusion through gaseous boundary layers and
could proceed at rates fast compared to those of processes involving the form-
in the gas such as SOj. CO2 or Hz0 may possess a significant affinity for the
cationic component or its oxide and react to form compounds such as sulfates
carbonates or hydrates.
34 High Temperature Corrosion of Ceramics
respects to the corrosion of ceramics in melts which has been studied extensively
The kinetics involve the transport of reactants and products which often
determine the overall rate of the corrosion process. The corrosion reaction
rate depends on the relative corrosion rate of the various phases, the viscosity
of the liquid, the density gradient in the liquid, the concentration gradient
in the liquid, the porosity of the solid, the wettability of the solid phases
by the liquid, the boundary layer at the interface and the geometry of the system.
The grain size and the pore structure are major factors in controlling the rate
of dissolution. Fine grain materials dissolve faster than coarse grain materials.
The liquid may penetrate into the grain boundaries resulting in engulfment of the
(9,101
solid grains by the liquid .The influence of the microstructure on the
for fundamental studies Simple systems with simple geometries and microstructures
must be used. This is valid also for gaseous corrosion studies since except for
wetting effect, the grain size, the pore structure and the grain boundaries should
silicon carbide (*l! the only literature on gaseous corrosion of simple oxides
For instance, significant weight losses were observed in wet hydrogen (51 at
Appendix A-Gaseous Corrosion 35
1400oc. Alumina is much more resistant to conditions of this tvpe and tends
alumina are only observed at very high temperatures, of the order of 19OOOC. (14)
Steam at low temperatures can form hydrates with silica resulting in degradation
(1) Materials
They include four aluminas and a fused silica which were obtained from
the influence of microstructure and impurities on the corrosion. The single crystal
in the form of almost transparent washers; (S) and (M) are white substrates.
The more impure (S) alumina was included to show the gross effects of impurities.
The (S) and (MI aluminas have a much finer average grain size L-kin than (L)
I’ 1
alumina (19Urn). Their microstructure will be discussed later as needed.
(‘2) Experiments
Flat specimens ( z l~l.cm) were exposed to sulfur oxide eases at ml and lno~~c
they were cleaned thoroughly in acetone and alcohol and then heated in flowing
oxyeen atmosphere at IOOOoC for one hour. The ~02 and 02 mixtures were passed
with the samples. The conditions were selected to have relevance to gas turbine
operations. The SO3 pressures were high enough in most instances to prevent the
environments. The initial SO2 contents of the gases were “s~ally 1%. 0.1% and
TABLE I. MATERIALS UNDER STUDY
* Polycrystalline
0.01% with the balance 02 for a total pressure of one atmosphere and a flow race
of about lcm3/sec. The corresponding equilibrium SO3 pressures are shown in Table
II. The exposure times were usually one week but ware varied from one day to one
product development on the same area of the sample, examined also before exposure.
Since the materials are electrically non-conductive the samples were coated with
o
about 200A of carbon prior to any observation in the Scanning Electron Microscope
(SEM). This carbon was oxidized at 700°C in 02 before any additional exposure
duplicate samples exposed only once for the same total time that this procedure
The major investigative tools were the SM’s equipped with Energy
(XRD) was used to identify the products when they formed in sufficient quantities.
Some specimens were also analyzed by Electron Soectroscopy for Chemical Analysis
(ESCA) after exposure. The weight of the specimen was checked on an analytical
be shown, considering the size of the samples, that a weight change of D.Img/
product about lum thick. The corrosion products were usually discrete and often
with little coverage of the surface, they could be detected using the SEM , EDS
and ESCA, but in no case were they equivalent to a continuous layer of the order
(1) Silica
No visible product formed and no sulfur was detected by EDS or ESCA after exposure
38 High Temperature Corrosion of Ceramics
Initial
Gas Pressure Pressure (Atm) at
(Atm) 7oooc 1ooooc
dynamic data for silicon sulfate. The oxygen pressure of the experiments was too
atmospheres were performed above 1OOOoC since Sulfate formation is less favorable
as the temperature increases. .No devitrificatioa of the silica glass was observed
(2) Alumina
(a) General Results
the evolution of the products. The results are summarized in Table III. This
by ESCA. Since only very small amounts of products were formed in many cases and
the analytical techniques were close to their limit of detection, the formation
of products (P) is reported in the table only when it was indicated by at least
It was established that the products were sulfates by the combined observations
of sulfur in the products by EDS and the identification of the valency of this
1
elements de:ec:cd in the products were only aluminum and sulfur. Extraction replicas
on exposed (L) samples showed also the same combination, thus leading to the
conclusion that aluminum sulfate was formed on the purer aluminas, Mg and Ca
with increasinR SO3 pressure in the atmosphere. These general trends are
TABLE III
Results of Alumina Corrosion Experiment in SO3 Gas at 700° add 1000°C for One Week
7.2 x IO-' N P P P
1.3 x 10-3 N P - P
1.3 x 10-4 N SU P P
1.3 x 10-5 N N SU SU
a Al203 (pso3j3
and the SO3 pressure for the equilibrium between hl2(SO4) 3 can be calculated.
unit activity for the solid phases. The test conditions and the relevant
boundaries for the HgO- Mg SO4 and CaO- CaSO4 equilibria are shown on the
diagrams.
lower temperatures. Furthermore, for a given initial mixture of 02- SO3 the
that the SO3 pressures required for sulfate formations increase from CaSO4
CaSC4 and YgSO4 will form more readily than Al?(SO4)3 this explains the increase
a 0
cao C&m*
4- WN Me
log POY
-lo - A12(so4
Al203
-1a -
A12S3
-1(1 -10 4 0 I
log Psoa
b Ow
4-
log Por
-10 *
log PSOl
Figure 1. Stability diagrams for A1203 in SO@03 atmospheres at: (a)
700°C (b) 1OOOoC. The experimental conditions (+) and the
boundaries for CaO and MgO are also shown.
Appendix A-Gaseous Corrosion 43
Very little reaction of the single crystal alumina was observed during
exposure to any of the gas mixtures at 700°C and IOCWC. A few thin tetragons
about 0.5 pa on a side were detected after an exposure of one week to the highest
SO3 pressures of 7000C (Table III). For the same time of exposure to the inter-
mediate pressure of SC3 at 70C°C no products could be found but sulfur was
detected by EDS and sulfates were indicated by ESCA analysis. NO sulfur was
found after exposure to the lower SD3 pressure at 700°C nor for any of the
gas compositions at IOOOoC. These results show that the single crystal material
was affected by the environment when the experimental conditions were most
favorable for reaction. The stability diagrams of Figure 1 show that Al2(SC4)3
should not be formed in any of the experiments. These diagrams have been
constructed however for unit activity of the phases. Solid solutions (e.g.
Al2(SO4)3 at less than unit activity dissolved in Al2O3) or other phases not
considered in these diagrams may be formed.
The sintering aids added to the (L) material degrade its purity but it is
The role of Sin2 is less clear and it may have enhanced solubility in presence
to the grain boundaries, but this has not been observed. MgO apparently does not
segregate greatly at grain boundaries but Ca does even though its average concentrat_
More products were evident on the (L) alumina compared to the single
crystal material. Products were evident after exposures of one week to all of
the three gas mixtures at 7OO’C. As shown in Figure 2 the amount of products
increased with increasing SO3 pressure. Corrosion products were also observed
at the higher SO3 pressure at 1OOOnC (Table III), but in less quantity than at
7oonc. Exposure to the intermediate SO3 pressure at 1OOW’C did not produce any
observable products but sulfates were identified on specimens by EDS and ESCA.
The products formed on the (L) alumina did vary for apparently, the
same exposure conditions. Two types of morphologies were detected which are
shown in Figure 2 and 3 for as received (L) altiina. One is small cuboids.
The other contains many cuboids but also other shapes are evident such as laths
and films. The prodlicts were concentrated on certain grain faces of the same
L. M, S than on the single crystal. These materials are all polycrystalline and of
greater impurity content than the single crystal. Products were formed on all
polycrystalline materials under all conditions at 700°C and at least under the
higher SO3 pressure at 1000%. In general. the products formed more readily
(Table III) and were larger and in greater quantity (Figure 4) with increasing
impurity content. The samples in Figure 4 were relief polished and exposed in
tha same axpari-nt (7 x 10-3atm.S03at 700°C for one week). It shows also that
Figure 2. (L) alumina surfaces (A) as received, B,C,D, exposed for one
week at 700oC to 7 x 10-4 atm. 503 and 7 x 10-3 atm. 503
respectively. More products form at higher P503 (5EM)
46 High Temperature Corrosion of Ceramics
Two types of products were found on the (M) alumina, exposed to 7 ~10~~
atm SO3 for one week at 700°c. one was larger and was a magnesium sulfate
with no ca1ci.m in it and the other smaller in size was a CaSOh with little
or no magnesium.
The lowest purfty (S) alumina had the mosf product in both number and
size after exposure. EDS analysis of the products Indicated S, Al, Si, Mg,
Ca. They appear to be mainly magnesium sulfate, calcium sulfate and their
solid solutions. The larger products were mostly MgSDq which formed on impurity
phase( s’) in (S) occur as large grains of the size of the alumina grains
and along grain boundaries. Some smaller products, mostly CaSO4, appeared to
and aluminum are included in the products. It is believed that the silicon
aluminum is expected to come mostly from the impurity phases Since talc and clay
in Figure 6, for the same area of a relief-polished sample (S) after a sequence
of exposures from three days to 30 days. The products nucleate on the impurity
phases which are darker on the initial micrograph due to a weak acomic number
contrast and the relief polishing. The products grow wirh coalescence and
coarsening occurring ddring the latter stages. The product marked by the arrow
V. GENERAL DISCUSSION
‘Ihe results that have been obtained in the present studies show that
silica and alumina are considerably more resistant to sulfur-oxygen gas mixture
the thermodynamic and kinetic conditions are appropriate. In the present studies
the experimental conditions were such that no reactions of the gas mixtures
with silica were possible. In the case of alumina, however, reactions did
occur and these reactions were significantly affected by the purity of the
specimens.
with alumina in the case of the single crystal and with the impurities in
the other materials. Calcium sulfate and magnesium sulfate form at lower PSO3
than aluminum sulfate so that their solid solutions maybe anticipated to form
this point although no such sulfates are known with Ca and Mg. Intermediate
compounds occur in the sulfation of K20.3 A1203 in which above 300% a mixed
and the grain boundaries as documented for the more impure aluminas; however,
the control of the sulfate formation by the impurities appears to play a major
part the prominent role of the grain boundaries in this corrosion. The
impurities may not only increase the driving force for sulfate formation but
also provide nuclei for the growth of sulfates. A major point is that when
reaction products involving the impurities are formed, due to their greater
with oxygen where impurities such as Mg and Ca have been found to accumulate
In view of the results that have been obtained with the alumina samples,
alumina (hot corrosion) because these products should have significant solubilities
such that the Na7304 is liquid. Moreover, liquids can be expected to be formed
below the melting ooint of Na7SOh due to the formation of phases involving
solution of Na7S04 and impurity phases. This research is continuing with major
IV CONCLUSIONS
(1) Silica and alumina are very resistant to corrosion by SO3 gases.
(4) The products identified as sulfates formed only under the more favorable
(5) The general trends of the sulfate formation are in qualitative agreement
with predictions from thermodynamics which are that the corrosion of alumina
(6) The severity of the corrosion increases with the impurity content.
boundaries.
Acknowledgements:
The authors thank the 3M and Saxonburg Ceramics Companies for donating
References:
NMAB-357.
2. A.F McLean, "Ceramic Technology for Automotive Turbines" ~~11. AIII. &ram.
2. 1963-89 (1981)
Fuel Capable Directly Fired Heat Engines, Castine. Maine, Aug. 1979.
6. H.R. Kim, J.R. Blachire and F.S. Pettit "Gaseous Corrosion of Ceramics",
Nitride and Silicon Carbide", Basic Sci. Div. Fall Neeting Am. Gram.
8.a W.D. Kingery, H.K. Bowen and D.R. Uhlmann, "Introduction to Ceramics",
534 (1964)
on Liquid Corrosion of Al203 and N&l" paper No. 76-SII-82, An. Gram.
512-17 (1978)
15. D.E. Day and F.S. Gac. "Stability of Refractory Castables in Steam-
(7 1 644-48 (1977)
17. I.K. Lloyd and H.K. Bowen "Iron Tracer Diffusion in Aluminum Oxide"
234-237 (1978).
INTRODUCTION
parts, they are beginning to be incorporated in car engines and other high
material may not be stable in presence of some gases, i.e. metals in oxygen, and
compounds condense in the engine and often enhance the gaseous corrosion in a
complex process named ‘hot corrosion’. This type of degradation is well known in
growing scales may differ in properties from the same materials in bulk, it was
58
Appendix B-Hot Corrosion of Silica 59
ceramics (4). This paper covers the study performed under conditions relevant to
HOT CORROSION
Hot corrosion is dependent upon temperature and the gas atmosphere since
they affect the stability of the deposit and its reactivity with high temperature
applies:
Kl = PSO3. a(Na20)
The activity of Na20 and the pressure of SO3 in the melt are fixed by the
temperature and PSO3 in the atmosphere as defined by Kl. For pure Na2S04, its
activity can be taken as unity, and as a(Na20) increases, PSO3 decreases and
viceversa. An Na20 activity of 2~1O-l~ was calculated from equation (1) for the
equilibrium between the melt and the S03-containing atmosphere selected for
lower. In presence of pure oxygen, the activity of Na20 in the melt is not
to 10s4 since SO3 and SO2 are evolved from the Na2S04 to the gas. These
values are high and such Na2S04 melts are considered basic. However
equilibrium of the deposit with the atmosphere may be established only at the
beginning of the hot corrosion process and acid or basic behavior depends on the
specific reactions that occur between the sulfate and the ceramics.
60 High Temperature Corrosion of Ceramics
EXPERIMENTAL PROCEDURE
Materials
The experiments reported here were all performed on a high purity fused
silica (Corning 7940). The major impurities are 1OOOppmof ‘water’ and lo-100
ppm of chlorine. All other impurities were in the ppm or subppm range. The
samples were cut to about 1x1 cm in area and polished prior to exposure.
Gaseous Corrosion
The samples were exposed in tube furnaces at 700 and 1000°C. SO3-03 gas
mixtures flowed through a platinized catalyst in the furnace before passing over
the samples. The initial SO3 contents of the gas were usually 1, 0.1 or O.Ol%,
PS03 and PSO3 are given in table I. The gas flow rate was 1 cm3/s. The exposure
time was usually one week but varied from one day to one month. Weight changes
were checked on an analytical balance. The major tool was an SEM equipped
Hot Corrosion
The polished specimens were placed on a hot plate and sprayed with an
loading of 5mg/cm2. The samples were placed in a boat lined with platinum foil
and exposed in tube furnaces for times of 1 to 495 hours. Flow conditions and
Table I
table I were selected since they correspond to relatively acidic and basic
conditions. They are the initial mixture of 1% S02-balance oxygen (acidic) and
pure oxygen (basic) at 700 and 1000°C. Since Nags04 is not molten at 700°C, an
equimolar mixture of CoSO4 and Na2SO4 was used at that temperature. Cycling
experiments were also performed with or without water washing and reapplying
sensitivity of 0.1 mg before salt application and after exposure once the salt was
washed off in 10 cm3 of high purity water per cm2 of exposed area. The washing
samples was analyzed by EDS in the SEM using a procedure adapted previously
(5~6). A single drop of the washwater was deposited on a beryllium coupon and
dried. The deposit left on the coupon was analyzed and the spectrum was
under the same conditions and scaled to the same background. The specimens
were examined in the light microscope and the SEM before and after removal of
the salt, however the SEM with its X-ray spectrometers for microanalysis were
the major tools of this investigation. When possible, crystalline products were
salt on the substrates was measured on photographs of the droplet profiles taken
in the SEM at room temperature. Contact angles have been measured previously
Gaseous corrosion
The gaseous corrosion(*) was studied for comparison with the hot
SEM and no sulfur was detected by EDS or ESCA on the surface of the specimens
after exposures up to one month under the conditions given in table I. While the
uniform deposit of the order of 1 urn, the SEM with careful examination and
ESCA are much more sensitive. An estimate of the detection limits of discrete
10m7 to lo-* g/cm2. Under these assumptions* sulfur in the products seen in the
microanalysis technique, and its detection limits were of the order of lo-* to
10mg g/cm2.
was found in these experiments. This might have been expected since there are
expected to form under the experimental conditions since the oxygen pressure
was always around one atmosphere. The formation of silicon sulfide has been
devitrification of the silica was observed after any of these exposures at 700 and
1OOOoCin many experiments for times as long as 720 hours. Others have
* A 1% coverage with islands 20nm thick containing 20% sulfur was assumed for
the calculation of the limits of detection using SEM and EDS. In ESCA, 0.1% of
a sampling depth of 5nm was assumed.
64 High Temperature Corrosion of Ceramics
Wetting by sulfates
The wetting angles of the salts used in the hot corrosion experiments varied
with the environments. They are given in table II. The general wetting morphology
occured with time with the wetting increasing from 1 hour to 24 hours. In general
the sulfate wetted the silica better under basic conditions than acidic conditions
under which discrete small droplets were formed. After 24 hours under acidic
conditions at 1OOOoCthe wetting angle was 24O on the droplets and 13O on an
exceptionally large drop about 0.02cm across. Under basic conditions at 1000°C
the salt wetted most of the coupon after 1 hour, and a wetting angle of 2O was
In some cases, the salt formed drops of several sizes and different wetting
angles were observed for different size-range (table II). The wetting angle
measurements were very reproducible for given size range. The angles reported
are called wetting angles and not contact angles since the latter terminology
may imply that equilibrium was reached. It is clear from the increased wetting
with time and the influence of atmosphere on the wetting that reactions are
occuring between the sulfate and the silica surface, even under acidic conditions.
The wetting tends to increase with the affinity between the liquid and the
substrate surface and the greater wetting of the silica by the salt under basic
conditions reflects the higher affinity of the basic salt for the acidic silica.
which were cycled, with washing off the salt and reapplication between cycles,
that the droplets did not reform preferentially on previous droplet sites. This
suggested that no preferential local attack would occur under acidic conditions.
Table II
Basic - 26 t4) 2 0
Hot Corrosion
Under acidic conditions, the salt did not wet well the silica and it formed
droplets. At 700°C the weight changes were small, for example, after removing
the deposit by washing there were losses of 0.1 mg/cmz after 1 hour and 1.1
suggested that this ‘wormy’ void texture formed by dissolution of sodium silicate
in water. This corrosion was very limited as indicated by the small weight
losses. The attack occurred preferentially under the salt at the perimeter of the
495 hours of cyclic exposure of the silica. The sample was washed and salt
reapplied (5 mg/cm2) between cycles. The substrate had a strong texture after
exposure and a region 33 urn thick contained sodium. This attack over the whole
surface of the coupons is consistent with the separate observation that the
droplets did not reform at the same locations after reapplication of the salt.
Under acidic conditions, at 1000°C the wetting had improved and the silica
was devitrifying under the drops. After 24 hours the cristobalite formed
Devitrification occurred also under very small drops and no evidence of attack
was detected outside the drops. The weight loss of 0.3 mg/cm2, was smaller
than at 700°C. This can be explained by the greater stability of the cristobalite
compared to the vitreous silica which will result in the formation of less sodium
silicate to dissolve in the salt. The cristobalite layer which did not spall
probably offered some general protection to the vitreous silica but it was not
data, particularly weight change. Under the salt drops there was limited
hour exposure and some localized cracking (figure 3) but there was no evidence
conditions at 1OOOoC. After 1 hour the salt wetted the coupon almost
completely and a layer of cristobalite spherulites had formed under the salt. As
shown in figure 4, the fibrils of the spherulites had already broken down
with radii of the order of 30 pm, underlining the high velocity of the surface
separates the tridymite from the vitreous silica. After 212 hours the tridymite
near the surface had coarsened into laths about 15 pm wide and over 60 pm long.
The crystalline layer spalled extensively. The washwater analysis indicated that
significant silicon was water soluble with the sulfate after 1 hour, however this
was no longer found after 10 or 100 hours. The sulfur was never depleted as the
Na/S ratios in the water remained of the order of 2 (t 0.4). This suggests that
less reaction occurred after a continuous crystalline layer was formed and that
at the longer times sodium silicates with low solubility in the sulfate at 1OOOoC
It became clear, as the previous results were obtained, that the major
mode of degradation of vitreous silica under hot corrosion conditions was due to
Acidic 7000 < Basic 700° < Acidic 1000° < Basic 1000°C
The degradation increases with increasing Nag0 activity in the salt and decreasing
equilibrium PSO3 under these conditions. Since the hot corrosion results
Kinetics of Crystallization
basic hot corrosion conditions at 1000°C for times up to 300 hours. The
isothermal kinetics are shown in figure 5. They are for the propagation of the
under an hour. A long term experiment was performed with exposure cycles of
46 hours. In between cycles, the salt was washed off and new salt was reapplied
as described previously. Since this was done at room temperature, the samples
were thermally cycled. Extensive spalling of the crystalline layer occured and
the thickness of the remaining silica glass was measured where the fracture had
propagated at the interface. The plot of the thickness crystallized for 6 cycles
is given in figure 6. The plot is linear instead of parabolic and the total thickness
crystallized (about 1000 urn) is over twice that without cycling. In a separate
experiment of 100 hours total duration, a sample was cycled without reapplication
had the same layered structure as the other samples after the long exposures,
cycled or uncycled, (figure 7). One can identify a thin sodium silicate layer, a
tridymite layer and a cristobalite layer over the glass. The crystallized layer
had a thickness of the order of 400 urn which is also about twice the thickness
Appendix B-Hot Corrosion of Silica 73
I/2 l/2
TIME (Hours)
900
800
600
500
400
300
200
IOC
2 3 Y 5 6
0 I
crystallized for the same time under isothermal conditions. The larger rates of
crystallization and the change in the type of kinetics under cycling show the
strong influence of the salt on the crystallization but the increased damage under
the cycling experiments is due to the stresses generated during the cycling and
General Discussion
The wetting was greater under basic than under acidic conditions. The
Acidic 700 > Basic 700 > Acidic 1000 > Basic 1000°C
equation (1). The negative free energy of a reaction between a substrate and a
the wetting tendency of the solid by the liquid(ll). Therefore the wetting
Assuming that the silicate activity asil=l, y=l and x=2, the equilibrium
to the right when aNa is greater than this value. The experimental conditions
for equilibrium with 1.5x lo-5 atm So2 which correspond to aNa20=2xlO-15
should therefore not be .sufficient to form the silicate. A similar analysis was
the wetting behavior, the crystallization and the reaction of the sulfate with the
silica indicate that the equilibrium is shifted to much lower values of aNa so
that at least locally all conditions for this work might have been sufficiently
basic to permit for reaction 2 to proceed to the right. This can be explained at
least partially by aSiO2 > 1 since the glass is not an equilibrium phase and the
OH and Cl impurities decrease its stability. A discrete silicate phase was observed
under long term basic exposures at 1000°C. It is only expected to form under
strongly basic conditions where the silicate activity might get close to 1. In the
less basic experiments and early in the basic experiments the silicate formed is
Some limited reaction occurs between the fused silica and the sodium sulfate,
even under the less basic conditions at 700°C (acidic 700°C in table I.) Under
these conditions, with cyclic replenishing of the salt, significant hot corrosion
hot corrosion on the basis of reaction (2) was limited by the presence of cobalt in
the melt at 700°C and the overwhelming effect of the crystallization under all
conditions except the less basic (acidic 7OOOC). Neglecting these complications,
the major interactions between the salt and the silica occur at their interface.
They are the dissolution in the salt of the silicate formed via reaction (2) in the
salt and diffusion of sodium into the vitreous silica. Accordingly, under the more
basic conditions, the Si content of the washwater increases early during the
exposure but decreases later as the silica at the interface crystallizes; after a
long time a silicate layer is detected on top of the crystallized silica (after
washing). Under the less basic condition, this reaction is localized leading to the
clusters in the fused silica. The OH and Cl impurities are connected only to one
78 High Temperature Corrosion of Ceramics
silicon and they may generate microregions with more open structures more
susceptible to attack under reaction (2). Since for the less basic condition (acidic
7OOoC), the driving force for the reaction is small, the influence of these defects
products in the salt. As a result it occurs more readily near the edge of the salt
drops (figure 1) where the SO3 produced is released more easily to the atmosphere.
Under more basic conditions these defects may play a role, but it is not as obvious
interaction of Na2SOq with fused silica under acidic conditions(14). This was not
the case in any of the present experiments which included lower temperatures.
coefficients (DNa) of the order of 10s6 cm2/s at 1000°C(15). In type III silica
glass such as used in the present experiments, the OH’s may slow down the
sodium. In a recent discussion it was pointed out that impurity and structure
seem to affect DNa( 13). Sodium can be incorporated in the glass as a network
(CSiO)2. (CNa)2
g3 =_________________
Cst. aNa
in which an oxygen bridge (Si-0-Si) has been broken into two single bonded
oxygens to incorporate the oxygen into the network. The sodium ions, as
network modifiers, are located in holes of the structure near the single bonded
Appendix B-Hot Corrosion of Silica 79
oxygens. The oxygen bridges most likely to be broken are the more strained in
the structure(l6), and their concentration is Cst. Although the sodium ions are
associated with single bonded oxygens they are mobile in the structure. These
concepts have been used by Schaeffer to discuss the influence of water on the
rapidly with the activity of Nat0 in the melt as it increases the driving force
and probably the mobility of Na+ for the low concentrations of Na+. Diffusion of
Initially it must enter the glass structure by reaction 3 which could be rate
controlling. If this reaction is slow it is likely that ion exchange between protons
of the hydroxyls present in the glass and sodium might play a role. However, the
sodium through cristobalite is very difficult since it does not contain the
channels of vitreous silica or quartz. Diffusion is probably easier along the grain
boundaries.
member rings. In this research, the silica did not crystallize under the lower
Na30 activity (acidic, 700°C) but it did at the same temperature under the more
the Nag0 activity as expected from the previous discussion and reaction (3).
know in ceramics(21), here it has been shown that under basic hot corrosion
of many orders of magnitude due to the sodium. This is in line with previous
soda silica glasses with Na20 contents of the order of 1%. This shows that only
very low concentrations of sodium, in the ppm range are necessary to obtain the
Under the more basic conditions, at 1000°C, the greater Na20 activities
lead to dissolution in the salt as well as sodium penetration in the vitreous silica,
devitrification and the resulting spalling as the specimens are cooled through the
a-g cristobalite and the a-B-y tridymite inversions as well as the differential
contraction of the crystalline phases on cooling are responsible for most of the
under cycling is due to the cracking and spalling of the crystalline scale and
penetration of the salt through the cracks. In line with this conclusion, little
degradation was observed with no significant increase under cycling for the less
basic condition at 7OOoC (acidic 7OOoC) for which the silica did not crystallize.
Since it was responsible for most of the observed degradation the crystallization
The crystalline phase formed initially was always cristobalite which forms
instead of tridymite since a lower energy path is available because of the greater
similarity between the structures of high cristobalite and vitreous silica(221. The
cristobalite was globular in morphology (figure 2-4). Under the more basic
spherulitic formation. Under less basic conditions the spherulites did not
nucleate under all the salt drops or over the whole areas covered by the drops
Appendix B-Hot Corrosion of Silica 81
and for less basic conditions yet (acidic 700°C) no crystallization was observed
even after nearly 500 hours. Under the intermediate conditions, cristobalite
between spherulites. This suggests that the crystallization was initiated by two
different mechanisms depending on the Na20 activity. In both cases the sulfate
reacts with the silica by basic fluxing as discussed earlier and shown in reaction
2. The relationship with SO3 pressure is obtained by combining reactions (1) and
(2). Under the greater Na20 activities the cristobalite nucleated at the sulfate-
glass interface and formed spherulites, with the well-known radial morphology of
their fibrils, however the previous results suggest that a threshold concentration
must be reached for the nucleation of the spherulites at the interface. These
fibrils coarsen and break down due to interfacial instability giving the radial
high Na20 activities promote the crystallization of silica by breaking down the
network, (reaction 3) and silica is transported rapidly through the liquid phase.
reaction of the sulfate with the silica is less extensive, the silicate ions dissolved
in the sulfate diffuse into the sulfate away from the interface on which no
reaction proceeds at the interface, gradients of Na20 activity and SO3 pressure
are set up across the salt. The solubility of the silicate decreases as it diffuses
The crystallization of silica which has rapid parabolic kinetics under the
or products through the crystalline layer, since the crystal has the same
composition as the glass. As already discussed qualitatively, the very large rates
of crystallization are associated with high Na30 activities. The sodium breaks
local rearrangement of the network to the crystalline form. This could occur by
a mechanism similar to that proposed by Fratello et. a&18) for the high pressure
play a role similar to that of hydrogen in SiOH bonds, although the ONa bonds
are more ionic than the OH bonds and as a result they were considered ionized in
reaction (3). Since it is less tightly bound to the oxygen and because of size
considerations, the Na+ is more mobile than the protons(24). The active defects
sre still the non-bridging oxygens which are very mobile in combination with
either thermally created single bonded oxygens, SiOH or other SiO- Na+ groups.
The single bonded oxygens can attack oxygen bridges by simultaneous bond
formation and breaking, and reshape the network into six member rings. After
magnitude greater than in the pure system. From the present results this is due
microprobe, except in special cases. Only very small quantities of sodium are
required for the previous mechanism which can rapidly propagate a crystal ledge
In such an interfacial reaction a sodium can rapidly rearrange many bonds and
the controlling step is the break up of a strained Si-0 bond(l@. Adapting this
kinetic model the rate of advance of the interface (u) should be a function of the
sodium which take the place of the hydroxyls in the model. The hydroxyls have a
previously that most hydroxyls in synthetic silicas are strongly bound and nearly
During the induction period some sodium diffuses into the glass. Soon this
Neglecting any diffusion through the crystalline layer and the solubility in the
sodium injected initially into the glass, which spreads as a function of time
(figure 8). This spread which is due to the sodium diffusion into the glass is
slowed by the rejection of the sodium ahead of the crystallization front. Based
decrease with time in line with the observed decrease of the rate of
as:
cNa.(Dt)+ = s
84 High Temperature Corrosion of Ceramics
idym.
n
%I,0
in which D is the diffusion coefficient of Na+ into the glass and t is the time.
x=kt*
constant temperature.
One could still assume that the sodium at the interface is supplied mostly
the cristobalite changes grain size by over an order of magnitude and it transforms
to tridymite at the salt interface side without significant departures from the
The present results are in general agreement with the protective properties
of silica scales on ceramics (silicon carbide and silicon nitride) and coatings on
superalloys. The silica was not affected by the SO3-SO3 containing environments
of this study, however sodium plays a dramatic role under hot corrosion conditions.
86 High Temperature Corrosion of Ceramics
The vitreous silica has a tendency to react with Na2S04 by basic fluxing,
these conditions silica scales should be strongly affected and fundamentally not
afford good protection to silica formers. The validity of these conclusions will
depend on the purity of the silica formed, the nature of the impurities associated
with the sealest and the rate of growth of the scale since thick scales are more
expected from the role of OH in glasses( 18p2@. This is important for high
combustion.
The results suggest also that some silicate scales might be more desirable
devitrification.
CONCLUSIONS
- The wetting of the silica by the sulfate varied significantly with the PSO3
and the Nap0 activity. It increased with aNa20. It was greater under basic than
under acidic conditions at both temperatures. Under basic conditions at 1000°C
the wetting was complete.
- In all cases there was a tendency towards basic fluxing which increased
with the activity of Na20.
- The need for the development of vitreous coatings for the protection of
ceramics and metallic alloys is stressed.
Acknowledgements
The authors gratefully acknowledge the support of Basic Energy Science Division
REFERENCES
b. Heat Engine Ceramics, Bull. Am. Ceram. Sec. 64 [Z] 268-294 (1985).
3. P.J. Jorgensen et. al, J. Am. Ceram. Sot. 42 (12) 613-616 (1959).
6. J.I. Goldstein et. al, Scanning Electron Microscopy and X-ray Microanalysis,
Plenum, (1981), p. 378.
9. M.G. Lawson, Hot Corrosion of Silica and Alumina, M.S. Thesis, University
of Pittsburgh (1987).
10. 0.0. Vander Biest et. al, J. Am. Ceram. Sot. 70 [7] 456-59 (1987).
11. I.A. Aksay et. ai, J. Phys. Chem. 78 [12] 1178-1183 (1978).
12. J.R. Blachere et. al, Paper #77-BEG-86P, Basic Science Div. Am. Ceram.
Sot., New Orleans (1986).
14. N.S. Jacobson et. al, Workshop on Corrosion in Ceramics, Pennstate, Nov.
1987.
16. G.H. Prischat and W. Beier, J. of Non-CrystaLline Solids 7l, 77-85 (1985).
17. W.D. Kingery et. al, introduction to Ceramics, Wiley (1976) p. 103.
16. V.J. FrateIlo et. al, J. Appl. Phys. 51 [12] 6160-64 (1980).
25. R.W. Lee and D.L. Fry, Phys. Chem. Glasses, 3 19 (1966).
INTRODUCTION
the design of new systems for coal gasification, coal liquification, energy
conversion, thermal storage, and the battery storage of power. (l) Advances in
of fuel occurs. As superalloys and complex cooling systems have been developed
the operating temperatures of turbine engines has been raised to increase their
efficiency. Many of the raw materials used in superalloys are expensive and can
be obtained from a limited number of foreign sources. Low heat rejection diesel
and gas turbine engines are in development which allow a substantial decrease in
the size of power source, primarily due to the elimination of bulky cooling
and resistant to corrosion, most ceramic materials are available from domestic
sources and are much less expensive than the elements used in superalloys.
used by the steel and glass industries. The research resulting from the
89
90 High Temperature Corrosion of Ceramics
widespread use of ceramics as vessels to hold and direct the flow of molten metal
and glass has led to an understanding of the corrosion of ceramics in the presence
of a melt.
of deposits which may enhance the corrosion was studied in this research. Gaseous
are particularly relevant to turbine applications since the gases were generated
greater and SO3 pressures of about 10e4 to lo- 5. f4) Deposits results from the
condensation of gases produced when burning fuels with sodium and sulfur impurities
K1 = [aNa [PSO3]
or
so42- = 02- + so3 (21
assuming that the salt is at unit activity. The Na20 and SO3 dissolved in the
During hot corrosion the activity of Na20 and pressure of SO3 in the
deposit determine the type and extent of reaction. The composition of the
deposit in an engine can be determined by the gas phase or by the reaction of the
substrate material with components in the salt. If the activity of Na20 is high
and the pressure of SO3 is low or nil, solid oxides exhibit a basic solubilityin the
If the activity of Na20 is low and the pressure of SO3 is high, solid oxides exhibit
If the activity of Na20 (i.e. 02-) and pressure of SO3 in the deposit are within an
intermediate range then the oxide is stable and negligible solubility is observed.
The regions where the hot corrosion of Al203 occurs by either mechanism are
have been measured experimentally. Results for Al203 and SiO2 are shown in
Figure 2.(7-g) Plots of the solubilities of different oxides are displaced to the
left and right of each other depending on the relative acidity or basicity of those
oxides.
by the formation of continuous compact solid oxide scales with a low rate of
the oxides in the scale must be negligible. The extent of degradation by hot
molten salt.
Where the solubility of the oxide in the molten salt deposit is low or is not
rapid rate until the liquid is saturated. When the solution reaction stops the
LOG
P BASIC
O2
FLUXING
-10
AIO;
-20 -10 0
LOG &03
0
t
I/ 1
-16
IO
/
/
/
/
/ -10.6,
/ IO /
/ / 1
/ /
/ /
/
/ -s ’
BASIC / IO ’ ACIDIC
LOG / /
FLUXING / / FLUXING
/ t
P / /
/
-
02
/ /
/ /
I
AIO; /
/
A13+
-a
/
A’203 c
AG3
1
-8 -Y 0 Y
LOG Ps,
3
and precipitation of the oxide in the salt away from the oxide-salt interface is by
a negative gradient of the solubility of the oxide across the salt film.(lO-lll The
gradient in the solubility of the oxide is established by the local variation in the
activity of Nat0 (i.e. 09-) across the film. The resultant solution and
rates.
In acidic conditions sustained attack may arise when the acidic component
is derived from the gas phase.(5p12*131 Als o, acid fluxing can result when an
acidic component comes from the solid phase and reduces the Na90 activity in
the deposit. This causes the melt to become more acidic. Alloy induced acid
manner, the oxidation of the vanadium which is contained in many fuels can
EXPERIMENTAL PROCEDURE
Materials
The materials chosen are single crystal alumina and three poiycrystalline
been discussed in previous reports. Their sources were given in Table I of the
first part of this report. The single crystal is 99.99% pure. The chemical
TABLE I
All specimen had areas about 1 x 1 cm which were polished down to 1 urn
diamond. After cleaning, they were usually coated with 5 mg/cm2 of Na2S04
and exposed for various times from 1 to 100 hours. Some samples were also
subjected to cyclic exposures with 45 hours exposure for cycle, and washing and
pressure of 1 atm, were used in the experiments. The pure 02 tended to give
basic conditions and the SC2 containing atmospheres set up acidic environments
with pSO3 = 1.5 x 10e3 atm at 1000°C and pSO3 = 7 x 10N3 atm after passage of
the initial mixture over a platinized catalyst at 700°C. Since Na2S04 melts at
883OC, the sulfate used at 700°C was an equimolar mixture of Na2S04 and CoSO4
characterized mostly with the SEM, and its X-ray spectroscopy attachment (EDS
and WDS) for microanalysis. After exposures and observations of the samples,
they were washed and the weight changes were measured to iO.l mg. The wash
When sufficient products were formed, they were identified by X-ray diffraction.
Wetting
The wetting angles for the 1 hour and 24 hours isothermal exposures were
measured and are given in Tables II, and III. In most cases the wetting morphology
98 High Temperature Corrosion of Ceramics
TABLE II
ACIDIC
1 HR 7oooc 24 HR 1000°/24
TABLE III
BASIC
1 HR 1ooooc 24 HR 700°/24
was nearly developed minutes after the coupon reached the furnace temperatures
The phase separation of the (Na2,Co)SO4 deposit used in the 700°C exposures
exposure the deposits were composed of Na2S04 and masses of equiaxed cobalt
oxide crystals. The cobalt oxide formed a discontinuous layer on the substrate
surface. The cobalt oxide was preferentially wetted by the molten salt which
In some cases two distinct wetting angles were measured on some of the
the salt or from the formation a reaction product in the deposit. In other cases
the difference in contact angle was a function of drop size as reported in Tables
II and III.
The wetting of all the aluminas exposed in acidic conditions was limited.
In acidic conditions the wetting angle observed on the two higher purity aluminas
700°C. The wetting angle observed on the two lower purity aluminas (LowPP
the wetting with composition is apparent. In general, the wetting angle of the
salt on the aluminas in acidic conditions is lower at 1OOOoC than at 700°C. The
reaction of the more impure aluminas with the molten salt results in the formation
of multiple reaction products and the spreading of the droplets. There is less
reaction on the two higher purity substrates and the wetting decreases as the
In basic conditions the wetting angle of the salt on the alumina is lower at
1000°C than at 700°C. However, the crystallization of cobalt oxide from the
salt at 700°C affected the results. At both temperatures, the wetting of the
alumina by the salt is more extensive in basic conditions than acidic conditions.
In generai, a slight decrease in the contact angle occured between 1 hour and 24
increases with the impurity content of the substrate. The lower purity aluminas
were wetted much more extensively by the molten salt than were the higher
purity aluminas. This is attributed to the fact that the wetting behavior is
affected by the reaction of impurity phases with the basic component of the
Photographs taken during long term exposures where partial wetting of the
coupons occurred did not provide substantial evidence of the repeated wetting of
specific areas of a coupon when salt was reapplied before each cycle. This is
In those experiments where the wetting was poor and the resultant contact
angle was high, relatively thick droplets were observed. When the deposit is
thick the effect of the atmosphere on the composition of the salt, especially in
the vicinity of the substrate, may be significantly less than when the salt wet the
coupon in a thin continuous layer. On coupons where a low wetting angle is observed,
the area for reaction at both the oxide-salt and salt-gas interfaces is increased
and the distance over which the oxidant must be transported inward from the
when the contact angle is low. John observed that an increase in salt film thickness
Even after long term exposure with thermal cycling and the reapplication
of the salt the total weight changes measured were very small, less than 1 mg/cm2,
even after 500 hours of cyclic exposure. The weight changes recorded for 1, 24,
405, and 495 hour experiments are listed in Tables IV,V, and VI.
coupons from the exposures made in either atmosphere at 700°C. Well defined
coupons from expures in either atmosphere at 1000°C. After exposure, the silica
or silicate reaction products were etched from some of the coupons using
concentrated hydrofluoric acid. The weight decreases are listed in Table VII.
The weight losses due to the etching of the coupons indicate that these reaction
quantities which were not unreasonably large compared to the impurity content
of the samples.
The weight changes must be affected by the smaller area of reaction when
the coupon surface was not wetted completely by the melt. In acidic conditions
at both temperatures all the materials lost weight. The formation of cobalt
oxide on the surfaces of the coupons exposed at 700°C in basic conditions increased
the weight of the samples. The weight changes recorded for any of the exposures,
and hot corrosion occurred over fractions of the coupon surfaces during exposure.
Coupons of the same materials were exposed to gaseous corrosion in the same
atmospheres for 168 hours (appendix A) and no weight changes were detected
TABLE IV
BASIC 1OoOoC 1 HR 24 HR
LOWPP 0 - 0.2
MedPP 0 + 0.1
HighPP - 0.5 - 1.1
sxtal - 0.1 - 0.4
BASIC 7OOoC
LOWPP + 0.4
MedPP + 0.1
HighPP 0
sxtal + 0.1
LOWPP - 0.3
MedPP -0.3
HighPP - 1.1
sxtel - 0.3
LowPP = Saxonsburg
MedPP = 3M
HighPP = Lucallox
sxtal = Single crystal
104 High Temperature Corrosion of Ceramics
TABLE V
ACIDIC 700°C
Material
TABLEVI
WTCHANGE ALUMINA[mg/cm2]
405 HR CyclicExposure(45
HR Cycles+ ResaIt)
BASIC 1000°C
Material
1 -0.2 0 0 0
2 +0.3 -0.1 0 0
3 0 +0.1 0 0
4 0 -0.1 0 0
5 0 0 0 0
6 0 0 0 0
7 0 0 0 -0.1
8 0 0 0 0
9 0 0 0 0
TABLE VII
RESULTS HP ETCH
WT CHANGE ALUMINA [mg/cm2]
Exposed Samples Etched in HP
LOWPP 0 - 0.6
MedPP - 0.7 - 0.3
HighPP 0
LOWPP - 0.3
MedPP - 0.1
HighPP - 0.1
ACIDIC 1000°C 24 HR
LOWPP 0
MedPP - 1.0
Appendix C-Hot Corrosion of Alumina 107
The data given in Table VIII were obtained from the semiquantitative
processing of the EDS spectra taken from the wash water. This analysis was
The wetting was spotty and a wetting angle of 14O was measured. After 24 hours
of exposure the wetting angle was 22 o. The EDS spectra of many drops below
Negligible reaction was detected on the washed substrate after 100 hours of
exposure. Aluminum ions were consistently present in the wash water at 1, 10,
100 hours. A limited amount of Si was detected after 10 and 100 hours of exposure.
Since negliglble silicon was present in the single crystal, it is assumed that
limited contamination of the samples occurred and that the levels of Si detected
for the single crystal alumina are not significant. The alumina furnace tube in
which the samples were heated may have been a source of Si. After 495 hours of
the coupon.
The coupon exposed at 1000°C for 24 hours exhibited a faint etching at the
EDS spectra of the salt at the drop edges. The substrate was wetted by drops up
TABLE VIII
LOWPP
Na 17.0 18.0 16.0
S 14.0 14.0 14.0
Si 0.99 0.96 1.4
Al 2.0 1.2 2.2
Mg 2.4 1.3 1.3
Ca 0.00 0.00 0.00
co 4.1 4.2 3.5
0** 60.0 60.0 61.0
MedPP
Na 18.0 19.0 16.0
S 13.0 11.0 13.0
Si 0.94 1.5 3.6
Al 2.2 1.5
Mb? 1.8 :::
Ci 0.00 0.00 I?“00
co 4.2 3.9 3.3
0 59.0 58.0 61.0
HighPP
Na 17.0 19.0 17.0
S 15.0 15.0 16.0
Si 0.46 0.00 0.40
Al 1.0 0.52 0.66
ME 1.4 1.0 0.43
Ca 0.00 0.00 0.00
co 3.0 3.9 3.9
0 62.0 61.0 62.0
sxtal
Na 19.0 18.0 16.0
S 15.0 15.0 16.0
Si 0.00 0.46 0.56
Al 0.60 1.3 0.16
I% 0.81 1.6 0.00
Ca 0.00 0.00 0.00
co 3.9 3.7 4.4
0 61.0 61.0 63.0
** by stoichiometry
Appendix C-Hot Corrosion of Alumina 109
substrate was wetted by two large patches covering about half of the coupon
After 24 hours of exposure the wetting angle was approximately 20°. The
drops were patchy and typically under 1000 microns across. The solution of Al
was indicated by some of the EDS spectra of salt at the edges of drops. These
spectra also indicate the presence of significant amounts of Si. Washing the
substrate revealed the preferential solution of alumina grains and the presence
of a fine poorly defined silicate along the edges of the drop areas. A few
The etching of alumina grains throughout the drop areas was evident after
100 hours of exposure. A thin discontinuous layer of silica on the edges of grains
present in the wash water after 1, 10, and 100 hour exposures.
After 495 hours of cyclic exposure small thin patches of silica covered
these areas the etching and preferential solution of grains was apparent.
The coupon exposed at 1000°C for 24 hours was wetted by several discrete
drops about 2 millimeters across with a 12O wetting angle. Traces of Al and Si
were detected in EDS spectra of salt at the drop edges. Washing the substrate
revealed the presence of a thin poorly defined silica-containing layer with traces
limited amount of Si were indicated by the EDS spectra of drops. Wetting was
spotty except for a single large patch of salt covering about a fifth of the coupon
area. The droplets were typically 10 to 200 microns across. A wetting angle of
After 24 hours exposure the wetting was spotty with some small patches.
Substantial solution of Al was indicated by the EDS spectra of salt in drops with
a measured wetting angle of 22O, and in droplets containing larger well defined
crystals richer in Al with a wetting angle of about 48O. Washing the substrate
revealed that fine poorly defined bands a few microns wide, containing Co, Si,
and traces of Mg and Ca, skirted large fractions of the perimeters of the large
drop areas. In the drop areas, some of the grain boundaries had been etched.
The etching of grains throughout the drop areas is evident after 100 hours
microns across were observed. Aluminum and Mg ions were consistenly present
in the wash water at 1, 10, and 100 hours in much greater concentrations than
for the single crystal or the high purity polycrystalline material. The
The concentration of Si ions in the wash water was also much greater, and increased
defined globular silica covered portions of the substrate. The etching of grains
was apparent.
Appendix C-Hot Corrosion of Alumina 113
The coupon exposed at 1000°C for 24 hours was wetted nearly continuously
over some portions of the surface and by discrete droplets with a 13O wetting
angle in other areas. In both areas, substantial amounts of Ca, Mg, Si, Al, a
limited amount of Ba, and traces of K were present in EDS spectra of the salt.
Washing the substrate revealed the presence of numerous well defined sodium
substrate. Some crystals were present in groups but in most cases they
At 700°C after 1 hour of exposure the wetting was spotty with some
larger patches of salt over 500 microns across. Wetting angles of la0 for the
larger drops and 40° for the droplets were measured. A significant amount of Al
and a limited amount of Si were indicated by the EDS spectra of drops. Blocky
crystals about 20 microns across were visible below the salt in several droplets.
across wetted the substrate. Substantial solution of Al was indicated by the EDS
spectra of salt in drops with a measured wetting angle of 14O. Sulfate drops with
a wetting angle of about 500 contained well defined sulfate crystals rich in Al.
Some of the crystals contained Al and Mg as well as Si (Figure 5). Washing the
substrate revealed that a thin poorly defined layer as large as 100 microns wide
containing Co, Si, a significant amount of Mg, and traces of Ca skirted the
perimeters of the larger drop areas. In the drop areas a relatively even etching
between the grains had occurred. A few isolated patches of cobalt sulfate 10 to
observed.
114 High Temperature Corrosion of Ceramics
The etching of grains throughout the drop areas is evident after 10 hours of
have formed on fractions of the drop areas. After 100 hours of exposure many of
the globules coalesced. Aluminum and Mg ions were consistently present in the
wash water at 1, 10, and 100 hours in much greater concentrations than for the
ions in the wash waters was also much greater, but the increase observed
between 10 and 100 hours was not as great as that observed for the medium
The coupon exposed at 1000°C for 24 hours was wetted by drops up to 3000
microns across with a measured wetting angle of 19O. Spotty wetting was also
observed, particularly in the areas outside the perimeters of the larger drops. In
both areas, substantial amounts of Ca, Mg, Si, Al, and traces of Ba and K were
present in EDS spectra of the salt. Washing the substrate revealed the selective
solution of grains in the drop areas. Well defined aluminum silicate containing
term exposures were made in oxygen. At 700°C a large fraction of the molten
salt did not remain in contact with the substrate throughout the exposure due to
Single Crystal
exposure. The wetting was patchy and irregular. A wetting angle of about 20°
was measured. The concentration of Al ions was limited to the EDS spectra of a
few small drops, where the molten salt had remained in contact with the substrate.
Cobalt oxide separated the sulfate from the substrate over most of the area of
angle of loo was measured and broad patchy wetting covered large areas of the
Some sodium aluminum silicate was observed after 405 hours of cyclic
substrate material. The alumina furnace tube is a likely source of the Si.
exposure. The wetting was patchy and irregular. A wetting angle of about 14O
by the EDS spectra of small drops where the molten salt had remained in contact
the substrate in the perimeter of the larger drop areas. From the morphology of
the washed substrate it appeared that preferential solution of grains and growth
of Si rich needles had occurred in the drop areas. The growth direction of the
needles was constant across the surface of each grain (Figure 6, top). A few
larger needles were observed at or near the triple points between grains and
hemispherical silicates formed across the substrate surface in the drop areas.
from beneath the salt near the centers of some of the drop. A wetting angle of
magnesium aluminum silicate at the triple points between grains was apparent on
the washed substrate after 405 hours of cyclic exposure (Figure 6, bottom). The
exposure. The wetting was patchy and irregular. A wetting angle of about 14O
was measured. The EDS spectra of small drops where the molten salt had
remained in contact with the substrate indicated that significant amounts of Ca,
Si, Al, and Mg were present in the salt. Washing the substrate revealed the
associated with Co formed on the substrate in the perimeter of the drop areas.
over most of the coupon. Substantial amounts of Ca, Mg, Si, and Al were present
in EDS spectra of the salt. Washing the substrate revealed the presence of
partially covered with poorly defined crystals. Some of the crystals, particularly
the one near vugs, contained substantial amounts of Si and Mg. Small patches of
a thin layer of silica were also observed on the substrate. On the unwashed
sample large peaks for Ca, Ba, Mg, Al, Si and traces of K were present in the
EDS spectra of the salt. Rosettes about 10 to 15 microns across were present in
some areas where substantial amounts of Be were present in the salt (Figure 7,
top). The pronounced etching of grains was apparent after 405 hours of cyclic
exposure. The wetting was patchy and irregular. A wetting angle of about 16O
was measured. The EDS spectra of small drops where the molten salt had
remained in contact with the substrate indicated that significant amounts of Ca,
Al, Mg and Si were present in the salt (Figure 8). Washing the substrate revealed
After 1 hour of exposure at 1OOOoC the salt had formed a nearly continuous
film on over half of the coupon surface. A wetting angle of 3O was measured.
Substantial amounts of Ca, Ba, Mg, Si, Al, and K were present in EDS spectra of
the salt, both in the salt film and in small groups of well defined salt crystals
rich in impurity ions. Washing the substrate revealed a fine globular silicate
120 High Temperature Corrosion of Ceramics
globules up to
thin discontinuous film of salt with a network of holes and branches was left
behind by the dewetting of the molten salt. A 21° wetting angle was measured
Al ions and traces of Ca, Si, and Mg were indicated by the EDS spectra of the
salt. On the washed sample well defined tabular crystals of sodium magnesium
The etching of poorly defined grains was apparent after 405 hours of cyclic
of Ca and had become less well defined than after 24 hours of isothermal
Discussion of Results
grain boundaries and at the triple points between grains in impurity second
phases. In each condition of exposure the hot corrosion of the lower purity
the composition of the salt is not directly applicable when significant amounts of
Si are present in the melt. The formation of phases not predicted by thermodynamic
stability diagrams occurred at less than unity activity as in the previous work on
However, the actual activity of Na20 in the deposits during the exposures and
the profile of the activity across the thickness of the deposits is not known. In
the exposures of alumina the salt tended to form discrete droplets. Impurities
which result in more extensive wetting of the substrate increase the extent of
thinner molten salt film as discussed in the introduction. This is observed for the
discrete droplets of salt. The data obtained from the analysis of the wash water
indicates that the atomic sodium to sulfur ratios were significantly below 2.0 for
all times of exposure (Table VIII). This is true for all four aluminas. Since no
insoluble products rich in Na were detected, it is likely that SO3 from the
atmosphere enriched the deposit as the composition of the melt shifted toward
being less acidic because aluminum sulfate and other sulfates formed in solution
in the melt.
The presence of Al in the wash waters and the weight losses recorded for
all exposures in these conditions are COnSiStent with the fOrtTIatiOn of A12(S0.+)3.
The wash water indicates that Mg was present as a soluble reaction product in
the salt, probably MgSO4, since it is stable at lower pressures of SO3 than
Appendix C-Hot Corrosion of Alumina 125
After 495 hour cyclic exposures silica was present on portions of all of the
substrates but the single crystal (Figure 10, top). The solution of Si rich impurity
phases at the grain boundaries of the two lower purity polycrystalline materials
At 700°C in acidic conditions the principal reaction during the hot corrosion
(Appendix A). A mechanism for the reactions which occurred during the long
term exposures of the less pure polycrystalline aluminas has been developed. It
is proposed that the acidic solution of alumina lowers the pressure of SO3 at the
negative solubility gradient for silica across the molten salt layer and satisfying
the Rapp-Gotto criteria for fluxing. (11) Impurity silicates are dissolved from the
grain boundary areas on the substrate. As the silicate ions are transported toward
the salt-gas interface they advance into a negative solubility gradient and the
precipitation of nearly pure SiO3 results. The coalesence, growth, and coarsening
of the SiO3 which is precipitating from the melt results in the formation of
precipitation of SiO3 in the melt occurs some distance away from the substrate-
salt interface the size and shape of the patches of globular silica were not dictated
Figure 11. The solution of silicates present at the grain boundaries and as impurity
grains lowers the local Na30 activity of the melt in a manner analogous to the
126 High Temperature Corrosion of Ceramics
S/G
Distance
O/S = Oxide-salt
Interface
S/G = Salt-gas
Interface
way in which the solution of refractory oxides in molten Na3S04 lowers the
sodium oxide concentration of salt deposits during the alloy induced fluxing of
the Nag0 activity and increasing the solubility of the silicate impurities in the
For the proposed model it is likely that the rate of reaction is controlled by
the inward transport of reactive species (i.e. SO3) from the salt-gas interface
across the thickness of the film or by the transport of soluble reaction products
away from the substrate-salt interface. This assumes that the transport of
reactant and product species proceeds more slowly than the dissolution of the
could not be measured to check this statement, however, there is some evidence
detected in the drop edges than in the bulk of the salt on several of the samples
exposed in low temperature acidic conditions. The SO3 atmosphere has greater
effect on the chemistry of the salt at the drop edges because the distance for
discrete droplets of salt, except for the exposure of the medium purity
losses were recorded for all the exposures in these conditions. After exposure,
well defined crystals with the form and chemistry of silicates were observed on
after 24 hours of exposure were shown in Figure 4. A fine poorly defined silicate
covers grains over large portions of the drop areas on the high impurity
substrate. In the drop areas on the washed substrates where the crystals are
present in substantial quantities, the substrates are etched more deeply than on
similar exposed at 700°C in acidic conditions. Within the etched drop areas the
The salt deposits on the two least pure materials contained significant
amounts of Al, Si, Mg, and Ca after exposure. The EDS spectra of most of the
smaller salt droplets do not contain Al or Si, so the Ca and Mg are in solution in
the salt as sulfates (Figure 13, top). Since the partial pressure of SO3 in the
atmosphere at 1000°C was less than at 7OOoC, the formation of Al2(SO4)3 would
not have been predicted by thermodynamics, but was observed for gaseous
corrosion (Appendix A). Under acidic conditions the formation of the CaS04
phases at the higher temperature. The uniform etching of the substrate, by the
formation of Al2(SO4)3, could result from local decreases in the basicity of the
The lighter blocky phase contains Ca, Si, Al, and Mg, and the remainder of the
130 High Temperature Corrosion of Ceramics
salt contains Al. The two phase salt droplet reaction product morphology must
substrate.
concomitantly over different areas of the substrate and produced local variations
triple points of the microstructure. The results and the morphology of the
as follows. As the alumina grains are dissolved by the sulfate, the local SO3
pressure decreases and the Nag0 activity increases accordingly near the alumina
grains. The increased Nap0 activity promotes the transport of Nag0 in the melt
to the grain boundaries and grains of silicate phases in the low purity aluminas,
where it reacts with these silicates, forming sodium silicates and alumina
silicates as well as calcium and magnesium sulfates. This maintains the acidity
of the sulfate melt thus promoting the dissolution of the alumina grains. As the
transport is rapid at 1000°C, the corrosion under the sulfate is quite uniform and
similar mechanism operates but the transport is slower and the acid and basic
The results of the exposures in basic conditions at 700°C are more difficult
the substrates. The formation of nearly pure silica on the substrate did not
_ _----
r o 0-
,s
i
1
I
I0
I o 0 oI
I I
L-_-_-_-I
+ Transport of
Na20
-+ Transport of
so;
Q = Silicate Reaction Products
0 = Original Substrate Surface
Multi-phase Deposit
R = Bulk of Deposit
Sulfate Containing (Al, Mg, Ca, Si)
S = Other Phases
Complex Reaction Products Containing Silica
The presence of CaS04 in the salt on the two lower purity aiuminas, which
silicate in the oxygen atmosphere. The conditions in the oxygen atmosphere are
not conducive to the type of sustained fluxing which occurred at 700°C in acidic
Because of the depletion of the basic component of the melt due to the
sulfate.
In basic conditions at 1000°C the most extensive wetting of all four of the
aluminas occurred. The lower purity materials were wetted more extensively
triple points between grains on the surfaces of the two least pure substrates.
Even after 405 hours of cyclic exposure negligible reaction was detected on
the single crystal substrate. Aluminum silicates formed on the substrates of the
boundaries and sodium magnesium aluminum silicates at triple points on the high
phase deposit morphologies formed on the two least pure materials after
with various aluminum silicates of sodium, potassium and the rare earth
would be predicted on the basis of solubility data published by Rapp (Figure 2).
While this may be the case for the single crystal material, the degradation of the
molten salt. This is obvious when one considers the multiple phase morphology
Relatively small weight gains and losses were recorded for the exposures at
connectivity of the surface grains of the two lower purity substrates. The
silicates and the solution of alumina were not as extensive as that which
silicate impurities shift the activities in the melt towards values intermediate
between the acidic and basic conditions promoted by the atmosphere, thus
However, the greater acidicity of the melt under acidic conditions increases the
with the attack of the silicates impurities by the basic sulfate forming various
sodium alumina silicates including those of the rare earths. This raises the pSO2
of the melt providing for acidic solution of the alumina grains. This sulfate
formation is limited and the silicate formation is more extensive than under
REFERENCES
1. Wachtman, John B., et. al., “An Evaluation of Needs and Opportunities for
Fruitful Fundamental Research in Ceramics,” Ceramic Bulletin, Vol. 57,
No. 1 (1978), pp. 19-24.
5. Giggins, C.S. and F.S. Pettit, Hot Corrosion Degradation of Metals and
Alloys - A Unified Theory, Pratt and Whitney Aircraft, Report No. FR-
11545 (1979).
6. Goebel, J.A., P.S. Pettit and G.W. Goward, “Mechanisms for the Hot
Corrosion of Nickel-Base Alloys,” Metallurgical Transactions, Vol. 4 (1973),
pp. 261-278.
7. Jose, P.D., D.K. Gupta and R.A. Rapp, “Solubility of Alpha - Al203 in
Fused Na2S04 at lOOoK,” J. Electrochem. Sot., Vol. 132, No. 3 (1985), pp.
735-737.
8. Shi, D.Z. and R.A. Rapp, “The Solubility of SiO2 in Fused Na2S04 at
900°C,” J. Electrochem Sot., Vol. 133, No. 4 (1986), pp. 849-850.
10. Rapp, R.A. and K.S. Goto, “The Hot Corrosion of Metals by Molten Salts,
“Symposium Fused Salts, Electrochemical Society Meeting (Pittsburgh,
1979).
11. Rapp, R.A. and K.S. Goto, Fused Salts, (J. Braunstein and J.R. Selman,
eds.), Electrochemical Society, 1978.
14. John, R.C., “Corrosion of Metals by Liquid Na2C03,” Doctoral Thesis, Ohio
State University, 1979.
Appendix D-Hot Corrosion of Silicon Nitride
and Silicon Carbide
J.R. Blachere, D.F. Klimovich and F.S. Pettit
INTRODUCTION
Silicon nitride and silicon carbide are two ceramics materials considered
turbines burning low grade fuels, SiOz may be attacked due to the pressure of
SOS, CO2 as well as oxides of metallic impurities (e.g. NagO, Na$O& It has
been shown in this program that Nap0 is the corrosive agent in the hot corrosion
of silica in contact with NagSO4 deposits (Appendix B). In particular the sodium
oxide promote devitrification and the crystalline layer formed tends to spa11
under temperature cycling. Using the results for silica as foundation, the
mechanisms and the extent of the hot corrosion of silicon nitride and silicon
EXPERIMENTAL PROCEDURE
previous parts of this report. The materials are shown in Table I of the main
report. High purity materials (single crystal silicon carbide and CVD silicon
which generated a pressure of 1.5 x 1W3 atm of SO3 at 1000°C. The other was
pure oxygen. The gases flowed at the rate of 1 cm5/s. Usually the sodium
137
138 High Temperature Corrosion of Ceramics
The surface loading as well as the temperature were varied in the studies on the
purer materials. The times of exposure varied from 1 hour to 168 hours, with
standard times of 24 and 168 hours for all materials. The usual characterization
developed for this part of the research(2), where used for scale of thicknesses
under 1 pm. Above 1 urn they were measured on cross sections in the SEM.
surface analysis (ESCA, SIMS, ISS). The methods will be discussed as needed in
the text of this appendix. The morphology was characterized after exposure
before and after washing off the soluble materials in water. Analysis of the
morphologies, were described earlier for the various silicon nitrides and silicon
carbides(1~3~4). Scale thickness after 168 hours under gaseous, acidic and basic
conditions are compared in Fig. 1 and table I. For the purer materials (CVD and
single crystal) the thickness of oxide formed increased in order from gaseous
corrosion, which was essentially oxidation, acidic and then basic corrosion. This
trend is no longer clear for the more impure specimens whose behavior is
the sulfate was not depleted on any samples which were not preoxidized before
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 139
168 hour:
Figure 1. Thickness of layers formed for the oxidation, acidic and basic hot
corrosion of C-side and S-side single crystal silicon carbide and
CVD silicon nitride after 168 hours at 1000°C (measured between
sulfate drops for acidic corrosion). Note that oxide thicknesses
increase as OxA&.
140 High Temperature Corrosion of Ceramics
SC SC - si 0.11 0.6
12-25
SC SC - c 0.5 1.1
scales (>lO um)(3) and on bulk fused silica(s) lead to the essentially complete
before washing and by the semiquantitative wash water analysis (table II). This
In many cases, no sulfate could be detected in the washwater and the silicate
crystalline silicas are richer in silica than this average composition. Impurities
For the purer materials not preoxidized it is clear from these results that
while reaction (1) occurs under basic hot corrosion, it is the rate of oxidation
which controls the amount of silicate formed and the transport through the
silicate and sulfate layers decreases the rate of oxidation as the scale thickens.
samples not only formed more silicates which was water soluble but they
oxidized more as indicated by greater weight gains (after washing) than the same
materials not preoxidized. Since the preoxidation scales were formed at 14OOoC,
they had crystallized and cracked extensively during cooling before application
of the salt and were not protective during the hot corosion.
Under basic conditions the sulfate wets completely the sample surface and
reacts with the scale as it forms leading to very thick silicate layers even on the
purer silicon nitride (table I). This has been documented by Mayer and Riley(G)
SC SC 25 33 42
SC SC (PO)(l) 52 0 47
CVD SC 22 27 52
CVD SC (PO) 50 2 48
CVD SN 0 62 38
CVD SN (PO) 53 12 35
SN SN -_ -_ --
SN SN (PO) 59 13 27
With Na2S04 the reaction is milder(3~4~71 as all sulfate was not consumed in 168
hours. Also the extent of the reaction is affected by impurities and the purer
materials formed thicker scales except possibly for the hot pressed silicon
preference for segregation in the scale either on oxidation or hot corrosion. The
aluminum present in the scale tended to stabilize the glassy silicate phase. As
discussed in a previous report, magnesium and yttrium tend to segregate into the
scale on oxidation. They complicate also the hot corrosion conditions. MgC in
corrosion on the impure samples formed continuous silicate layers, these layers
were quite thick for hot pressed silicon nitride and sintered silicon nitride and
Early in the research it became apparent that some hot corrosion occured
conditions. Data on pure materials for shorter times were needed in order to
crystal silicon carbide and the CVD silicon nitride were exposed for 1 to 24 hours
Under acidic conditions the sodium sulfate does not wet the silicon’nitride
and silicon carbide completely. The wetting angle was of the order of 40° for
both materials. The drop size distribution was bimodal (fig. 2). There was a
variation in the values of the wetting angles measured but it was not consistent
with drop size, exposure time or nature of the sample. However the values
144 High Temperature Corrosion of Ceramics
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 145
observed were greater than measured on fused silica under similar conditions.
The evolution of the deposit as a function of time is shown in figure 2 for single
crystal silicon carbide. The deposit which was sprayed as a layer around 120°C
breaks up as the sulfate melts and morphologies similar to those in fig. 2 were
observed after a few minutes of exposure at 1000°C. As shown in the figure the
process. The large drops do not move on the surface and they are usually
The kinetics of acidic corrosion for single crystal silicon carbide and CVD
silicon nitride are shown in figures 3-5 for times from 1 to 24 hours at 1000°C.
The plots of figures 3 and 4 were for thicknesses of vitreous oxide measured
between, and generally away from the sulfate droplets. All the thicknesses in
these two figures were obtained by the same method (X-ray spectroscopy(2)) in
data for silicon carbide plots as good straight lines as function of the square root
of time suggesting a parabolic behavior. The kinetics for silicon nitride do not
show clearly this trend and are plotted as a function of time in figure 3a and as a
function of the square root of time in figure 3b. The lines for oxidation data
research indicate that the hot corrosion, even under acidic conditions enhances
the formation of the oxide layers in all cases for the purer materials even
The amount of sodium sulfate applied per unit area of surface was varied
from 0, 0.1 and 5 mg/cm2, the standard surface loading. While higher than that
for oxidation, the growth of the vitreous scale between the sulfate droplets is
independent of the surface loading as shown in fig. 4. The data for different
146 High Temperature Corrosion of Ceramics
1000- -0
CVDSN /
/
2 /
J; /
v) .
z / Hot Corrosion
5 /
i
b .
/
500. /
---Q
/
/
/ Oxidation
168
TIME(HR)
/
/
/
/
/
//
/’
b
/O
d
01
I--_-_-l I I L
VT (h OUTS ) ‘L
C-side
1.0 5.0
7rme
‘12 (/+%)
H(t)
-- --- -- -- -- A---
I
0 5.0
Figure 4. (b) Parabolic plots comparing of the data of figure 4(a) for single
crystal silicon carbide (solid lines) with the oxidation of
silicon (D + G )8 and single crystal silicon carbide (for
carbon side (“) and silicon side (A) (Harris) 22 at IOOOoC.
150 High Temperature Corrosion of Ceramics
0
SPHERULITES
UNDER DROPS
O-SC(C)
22
A- SC(Si) ____I_
O-CVDSN
/
0
0
I3
A i-.---.
l:o ’ 510
l/2 I/2
TIME (HR )
surface loadings fall on the same lines. No salt was applied initially on the
samples with 0 mg/cm2 loading but they were exposed with the other samples,
and they picked salt apparently through vapor transport. The independence of
the data on the surface loading is consistent with a constant salt activity
maintained through the vapor phase and a fixed pSOS (1.5 x 10e3 atm) setting a
Kg = aNa20.pS03/aNa$304
No sulfate could be detected on the vitreous scale by SIMS and ISS, but sodium
was found by ISS in the surface layers of the scale suggesting the formation of a
silicate layer about 10 A thick at the surface of the scale. This conclusion and
the role of sodium in the acidic hot corrosion will be discussed in detail below,
but it underlines that the role of sodium is different in acidic corrosion from that
in basic corrosion.
The rate of oxide build up under the sulfate droplets formed during acidic
corrosion on the purer silicon nitride and silicon carbides is much greater than
that outside the droplets except for C-side SIC as shown in fig. 5. The silica
crystallizes rapidly under the salt forming cristobalite spherulites. The evolution
is close to that calculated from Deal and Grove%(*) data for oxidation of silicon
at that temperature. However this is fortuitous since this part of the scale is
The data of figure 3a, is fairly linear with an intercept with the vertical
axis at about 80 A. This suggests an initial oxide layer which is not consistent
with the present experiments. The samples were cleaned in HF prior to the hot
although some oxygen and water are always readsorbed, as established in the
electronic industry. The silicon carbide samples which were pretreated like the
silicon nitride do not have a significant y-intercept (fig. 4). The silicon carbide
measurements by X-ray spectroscopy is also pushed to its limit with the very
thin oxide layers formed, but a systematic error in the measurements does not
samples of table III were consistent with an index of refraction of 1.75 and the
thicknesses given in the table. This index of refraction is much higher than 1.46,
the one for vitreous silica. The corresponding thickness are larger than those of
conclusive since the spectrometer could not reach the major peak for the silicon
oxynitride. The method in general did not appear sensitive to the presence of
silicon oxynitride and was not pursued further. Tressler et al. recently reached
ESCA data is still expected. The thickness of the glassy product layers formed
spectrometry than measured on cross sections in the SEM. For the Sic single
crystal the thicknesses measured by X-ray were larger than measured in the
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 153
Table III
A A
(21 CVD silicon nitride exposed to acidic hot corrosion for 24 hours
at 91OOC.
(3) CVD silicon nitride exposed to acidic hot corrosion for 24 hours
at 955OC.
SEM(2). The of thicknesses in the SEM on very thin layers such as those formed
on the silicon nitride are difficult and subject to errors but the trend in the
The present results are in line with an initial formation of silica which
giving very steep linear kinetics for short times in figure 3. As a result of
reaction 3, the pressure of nitrogen rises and the oxygen potential decreases at
the interface favoring the formation of oxynitride which grows between the
through the vitreous oxynitride is expected to be more difficult than through the
silica(12) since it is more tightly bound. The transport of oxygen through this
kinetics(l3). The sequence of the three mechanisms and the distortion of the
thickness data due to the formation of oxynitride instead of the silica assumed in
the thickness calculation from X-ray spectrometry are responsible for the linear
shape of the plot of figure 3a. The scale grows more slowly after 24 hours. The
thickness after 168 hours was measured as 1 pm by X-ray spectroscopy and 1.2
urn by imaging of cross section in the SEM. However data for longer times yet
would be required to establish if the growth had reached steady state and
became parabolic after one week exposure. Some data was obtained at lower
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 155
of the linear process but this was not justified because of the complexity of the
early kinetics.
has been proposed by previous workers but often not demonstrated convincingly
since they usually used one technique which could not be interpreted
and depth profiling and concluded that an oxynitride was formed during the
oxidation of silicon nitride. Others report only silica as the product of this
and used as passivating layer. Comparison of the vapor deposited oxynitride and
formed on oxidation of silicon and silicon nitride using many different methods
such as etch back rates, SIMS, FTIR, ellipsometry and concluded that a thin layer
The steady state kinetics for a layered scale growing by transport through
the layers are controlled by the mobility of a specie through the scale. This was
treated in detail by Yurek et al.( 17) for the diffusion of metal ions through two
layers of oxide scale to oxidize at the gas-scale interface. In the present case
oxygen must diffuse through two layers, the silica and then the oxynitride in
order to oxidize the silicon nitride. Part of the oxidation occurs at the
dry oxidation of silicont lg). Since diffusion through the oxynitride is more
difficult than through silica, the oxynitride layer under steady state conditions
should be thinner than the oxide layer. Based on(17), it is expected that the
thickness of the layers under diffusion controlled steady state will be given by
in which y, x, Kp’oxy, Kp’sil are the thicknesses and the rate constants for the
and if y is small Kp* = Kp’sil. Then the overall kinetics would be similar to those
of vitreous oxynitride would not change this conclusion except that this layer
will spread over greater distance than a layer of specific composition. This is
expected from the previous kinetic arguments since the mobility of oxygen
The detailed shape of the nitrogen distribution would depend on the specific
conclusion is consistent with the graded layer found by ellipsometry and the
large oxygen content of the scale found by X-rays. The index of refraction of
the scale appears high for the proposed graded structure of the scale, this may
be due to the fact that steady state was not achieved yet in the ellipsometry
samples. The conclusions of this analysis are in agreement with the extensive
work of Tressler et al.cg) on the oxidation of silicon nitride except that they
They find high actication energies for both the linear and parabolic constants of
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 157
a Deal and Grove analysis(*) for the oxidation of CVD silicon nitride between
1100 and 13OOOC. They conclude that the low rate of oxidation and
kcal/mole for the parabolic activation energy seem to rule out the rate control
be slower and with a higher activation energy than for fused silica the previous
analysis based on the formation of layered scale suggests that it cannot be rate
controlling.
The oxidation of silicon nitride is very slow. The larger oxidation rates(20)
observed in previous studies were due to impurities added for sintering as shown
in this research in the gaseous corrosion (and hot corrosion) of CVD, sintered and
hot pressed silicon nitride as shown in table I. The oxide layers formed on the
high purity silicon nitride (CVD) were thinner than observed on the high purity
single crystal or CVD silicon carbide under the same oxidation or hot corrosion
conditions. This may not establish that silicon nitride is intrinsically superior to
silicon carbide in this respect but it is certainly not inferior as stated in older
literature.
The oxidation of silicon nitride is much slower than that of silicon although
at 1000°C in both cases a vitreous oxide scale is formed and it appears oxygen
transport through the scale controls in both cases in that temperature range but
the detailed mechanisms are apparently different and not established for silicon
nitride. The general features of acidic corrosion already discussed are similar
158 High Temperature Corrosion of Ceramics
for silicon nitride and silicon carbide and in particular the growth of the scale
was increased under acidic corrosion. The presence of Na20 on the surface of
the sample, supplied as Na2S04 (or Na2C03 etc...) modifies this oxidation. The
behavior of the Na20 depends on its activity in the sulfate melt as determined
by reaction 2. From the equilibrium constant Kp, the activity of sodium oxide is
acidic conditions (here at 1000°C, a pSO3 of 1.5~10~~ atm was selected) the
aNa is small and the sodium sulfate reacts little with the silica formed by
oxidation of the silicon nitride or silicon carbide as indicated by the high values
of the wetting angles on bulk silica(5) and on the scales formed on the purer
specimens as reported above. Some penetration of Na20 into the silica scale is
Kg = [Csio12.[CNa+12/ aNa20.Csiosi
* [Csio14/aNa20
This reaction should be applicable also to the oxygen bridges of the oxynitride.
nitrogen is increased through the vitreous scales, thus generating a higher rate of
oxidation. It is likely that the sodium ion diffuses to the reaction interface
where it is reduced as proposed for silicon, it was proposed also that it would
may affect also the stability of the oxynitride phase. In the present experiments
sodium has been suggested in the scale with the electron microprobe and ISS, but
the evidence is not conclusive. Only very small amounts of sodium need to be
diffusion in silica glass as discussed later for SIC. Under acidic conditions the
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 159
probably by the mechanism discussed above. A very thin (slOA) layer rich in
sodium was found by ISS on the scale between the droplets, it did not contain any
sulfur. This adsorbed layer fed by the droplets by surface diffusion or vapor
The silicon nitride under the sulfate droplets oxidizes more rapidly than
outside and crystallization starts early (in the first hour). After 24 hours of
exposure and washing off the salt the region which were under the droplets stood
the surface of the sample. Some liquid is present in the intercrystalline regions
Thus the crystallization provides fast transport paths for oxygen leading to
thicker scale under the sulfate drops and greater penetration of the scale under
Under acidic conditions for pure materials, vitreous scales are formed
which crystallize very slowly outside the droplets. Some crystallization occurs
in between the droplets but it is sparse and the growth is extremely slow as
judged by a few very small spherulites disperse in the glass even after 168 hours
nucleation started under the edge of a sulfate drop. The growth away from the
drops appear slower yet than in this example. As discussed in detail in appendix
A, the crystallization of vitreous silica depends on the Oxygen ion activity (or
aNa20) in the structure, and the presence of defects in the network. The sodium
oxide reaction with the network (reaction 6) provides those defects and tends to
160 High Temperature Corrosion of Ceramics
occur preferentially at the interface between the salt and the sulfate where
(outside the sulfate droplets) the gaseous potentials remain close to pSO3~1.5 x
1V3 atm and ~02~1 atm and the aNa is low. Under the sulfate droplets, the
oxygen and SO3 are more difficult to replenish as they are depleted by the
K7 = (p02)li2 .pSO2/pSO3
The activity of Na20 is raised under the sulfate droplets (it is higher than
exposures were described previously (lp3) and for short times are generally
similar to those described above for the silicon nitrides (see fig. 2). They are
regions. The spherulitic growth of cristobalite occurs rapidly under the drops
and it is generally similar to the behavior observed on the silicon nitride (fig.6).
Preferential attack occurs also under regions between the cristobalite crystals as
shown in Figure 7 in which the silicon oxide has been etched away.
The kinetics of acidic hot corrosion for single crystal silicon carbide at
1OOOoCare plotted as a function of the square root of time in figure 4 and they
fall on two distinct lines both higher than the oxidation data of Harris(22)
sketched on the figure. The two lines have been associated with the carbon side
and the silicon side of the single crystal. In agreement with the oxidation results
162 High Temperature Corrosion of Ceramics
of Harris and Tressler et al.(g) the carbon-side is the fast or thick side and the
silicon-side is the thin or slow side. Hot corrosion data was obtained also at
955OC and 910 oC. The data at 910°C are plotted in figures 8 and 9 and both
sides still show parabolic behavior at that temperature. Activation energies for
the growth of oxide scale in the temperature range 910-1000°C were determined
errors. The plots of figures 10 and 11 give activation energies of 34 and 118
Silicon carbide is a polar crystal and has different basal surfaces (0001) and
salts(24). The present hot corrosion experiments resulted in milder attack but it
existed between the two surfaces which allowed their identification. Namely
after hot corrosion for long times, the silicon side between the droplets appeared
as-polished except for some interference colors on the thicker scales and the
been reported(g*22) for the two sides. This difference in behavior was no longer
behaviors were found for the two sides in this research at 10000C(1~3~4(. Under
acidic hot corrosion, the vitreous scale between the droplets grows faster on the
*B was determined also by the Deal Grove formulation but it gave the same
results since the data plotted as functions of t1/2 falls on good straight lines
extrapolating through the origin (fig. 3,7,8).
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 163
31OC KINfllCS - C
5000
4000
3000
3
x
I?
5
0
5 2000
’ 000
0
0.00 2.00 4.00 6.00 a.00
SQRT(TIME(HR))
91OC KINETICS - SI
600
500
4oc
z
x
Y 300
$
I!
F
200
100
0
0 2.00 4.00 6.00 8.00
SQRT(TIME(HR))
ACTIVATION ENERGY - C
1400
i 3.80
13.60
13.40
1320
13.00
i 2.80
12.60 1
Figure 10. Arrhenius plot for the acidic hot corrosion of C-side single crystal
silicon carbide.
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 167
ACTIVATION ENERGY - St
13.0
12.0
1 1 .O
10.0
8.0
3.78 0.80 0.82 0.84
1000/-T
Figure 1. Arrhenius plot for the acidic hot corrosion Si-side single crystal
silicon carbide.
168 High Temperature Corrosion of Ceramics
carbon side than on the silicon side as reported by Harris for oxidation. However
on figure 4 both sides show well defined parabolic behaviors while in Harris’
results the carbon-side was parabolic and the silicon side had linear kinetics over
the broad time scale of the experiments. For the hot corrosion the apparent
activation energy of the slow side (Si) is much larger than that of the fast
carbon-side.
Model for the Oxidation and Hot Corrosion of Silicon Carbide under Acidic
Conditions
dependent on the transport of oxygen to the substrate for the oxidation to occur.
The molecular diffusion of oxygen through the scale might be rate controlling as
established for silicon dry oxidation. It has been proposed(g) that as the
diffusion. Others have argued that the diffusion of CO produced in the oxidation
of silicon carbide is rate controlling and since the size of the two molecules is
work it was concluded that the diffusion of C-products was controlling at higher
carbide from 1200-1500°C, one with low activation energy (123kJ/mole) at low
temperatures and the other with high activation energy at high temperatures
silicon carbide had only one regime associated with a high activation energy
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 169
temperature range of the present experiments the oxidation of the carbon side is
similar to that of silicon, except slower with the same activation energy and
appears to control the oxygen transport through the scale. The silicon side is
slower and has a high activation energy for the complete temperature range of
results must be considered in terms of the defect structure of the silica scale
and the surface reactions, then mechanisms will be proposed for the oxidation
Proposed Model
It is based on:
literature although glassy structures which are great solvents allow greater
silica formed under oxygen deficient environments crystallizes more slowly than
similar silica formed under more oxidizing conditions(27). Silicon rich silica has
general it is accepted that the SiOg glass structure is built with SiO4 tetrahedra
structural defects may extend to any kind of orderin$31). The major defects in
silica have been reviewed by Motttao); they are dangling bonds in particular the
well known single bonded oxygen, but also 3 bonded silicon. They include also
oxygen vacancies in oxygen bridges as well as Si-Si bonds. The single bonded
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 171
expect that oxygen vacancies and Si-Si bonds are favored under oxygen deficient
network. Under low oxygen pressure oxygen vacancies could form by the
00 = Vo + I/2 02 + 2e
where the vacancies are formed at the oxide-gas interface and the oxygen is
appropriate here to consider that the oxygen molecules are dissolved into the
inside the scale under pO2 lower than at the interface and the molecular oxygen
Kg = 4Cv3 Cm112
in which the electronic charges are associated with silicon dangling bonds and Kg
includes the dissolution of 02 gas into the glass. The formation of electrons in
they exist commonly in vitreous silica in trapped form such as dangling bonds on
172 High Temperature Corrosion of Ceramics
silicon shown in equation 9. It has been shown that thermally grown silica
contains positive and negative charge centers. Silica films support electronic
randomly distributed on 3 dimensions. These rings provide tortuous paths for the
diffusion of gas molecules and impurity network-modifying ions smaller than the
size of the windows in the structure, a little over 3A(33). In the growth of a
scale the growth flux may introduce anisotropy to this structure by the
formation of more aligned channel in the flux direction(34). Larger channels less
than 50A in diameter have been postulated in order to explain silicon oxidation
very low oxygen pressures which cannot be calculated exactly except in presence
of free carbon, for the ternary equilibrium Sic-SiO2-C. The results of this
calculation which gives pO2 of the order of 10m30 atm at 1000°C can be
considered a lower bound for the oxidation of materials not containing excess
carbon. If active oxidation does not occur the silica formed at the reaction
oxygens
in which CJoxid is the sum of the oxidant fluxes which contribute to the
of scale, the parabolic constant and the scale thickness, respectively. The
silica and network contribution which can occur through the various network
in which Dv, Dm, Cv and Cm are respectively the vacancy and molecular
oxidation of silica formers may depend on the relative contribution of the two
pressure the quantity of dissolved oxygen (Cm) will be depressed and on the basis
diffusion. This in line with the proposal of a gradual change from molecular
mass transport at high pressures to ionic mass transport at low pressures for the
thermal oxidation of silicon(g). Based on equations 8,9 and 11 one can explain
the oxidation and hot corrosion of silicon carbide in the low temperature range in
simply DmCm = NB/2. The parabolic constant B is proportional to pO2 and it has
later, if one assumes that the silica scale formed on C-side silicon carbide is
slightly oxygen deficient because it was formed under a low pO2 (Cm decreased),
dominates but from equation 11, B is smaller than for silicon. This was observed
the other hand if the scale on the silicon-side of silicon carbide was formed
under very low oxygen pressure, by the same reasoning Cm is greatly depressed
and Cv increased since Cv * Kg/(Cm) li6. So that now DvCv>>DmCm and the
with the proposed model it is possible to derive a consistent picture for the
oxidation results obtained by others for silicon and silicon carbide. It postulates
As discussed earlier the two sides of single crystal silicon carbide oxidize
at different rates for long periods of time at lower temperature below 1300° C.
This indicates that under those conditions the two sides maintain their specific
character as they oxidize. The two sides maintain their separate identity after
grinding and polishing as shown in the present experiments and after ion
a1.(261 that the two surfaces had different stabilities under low pressure
oxidation. Under ultra high vacuum the carbon side was observed to cover with
carbon above 900 K while the Si-side did not start to graphitize until 13000K. At
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 175
that temperature the graphitization of the carbon-side was extensive. The two
during the early oxidation for thicknesses of silica up to 20A, even after surface
mixing due to sputtering. This carbonization of the of the carbon side was
explained the evolution of silicon under the very low oxygen pressure at the site
of the reaction
Under 1 atm of oxygen, it is assumed that this difference in stability of the two
sides is maintained and that silicon still tends to volatilize from the C-side,
In the pO2 range (s~O-~O atm) which is expected at the reacting interface SiO is
the prominant vapor specie in the Si-0 system(36). As shown in figure 12, it is
possible by this reaction to always maintain the order of the Si and carbon atoms
at the interface so that on the C-side carbon is always at the surface of the
silicon carbide as it oxidizes thus maintaining the C-side behavior. The SiO is
oxidized as it meets with higher oxygen pressure near the interface but not at
the interface and the silica forms as a rough porous scale and a rough interface
results from the active oxidation reaction. As the oxidation proceeds the SiO
oxidizes in the pores so that the scale porosity is filled. The scale is formed
under higher pO2 than is found at the interface and it will be more
stoichiometric.
On the Si-side, the silicons are at the surface and it is proposed that
oxygen is adsorbed first on the silicon (figure 13) and the carbon is oxidized by
between the oxide and the SIC in line with the Si character of that side. This in
176 High Temperature Corrosion of Ceramics
1) SiC
Figure 12. Model for oxidation of C-side silicon carbide. A rough interface
is formed and the C-side is maintained at the interface during
oxidation. The SO2 is formed away from the interface.
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 177
Sic
Sic
- Atmosphere
3) I02 I
01
Sib
sic
Figure 13. Model for oxidation of Si-side silicon carbide. The silicon side
nature of the interface is maintained.
178 High Temperature Corrosion of Ceramics
line with the results of Harris (linear kinetics of oxidation) as the CO would form
under the silica layer and desorption of CO from that position could control the
longer rate controlling and parabolic kinetics are observed. The scale is formed
under very low oxygen pressure and it is expected to be very oxygen deficient as
discussed earlier. The scale formed under these conditions would be more
oxygen deficient than that formed on the C-side. In the oxidation of SiC the
network transport and the molecular transport add to supply the oxygen. This
the C-side and the Si-side. As the temperature is increased, transport by the
vacancy and other network mechanisms with high activation energies increases
rapidly and becomes a major contributor to the oxidation of the carbon side. The
oxidation of the silicon-side has been increasing also since it was dominated by
increases also in the SiC interfaces and they can no longer be differentiated by
the mechanisms of fig. 12 and 13 and around 1350oC the two sides oxidize at
about the same rate with the same activation energy as reported by Tressler(9).
Therefore the proposed model is qualitatively consistent with the data on the
oxidation of silicon and silicon carbide, now we shall apply it to our acidic hot
corrosion results.
presence Na2Q at a low activity. Na2Q enters into the silica structure by
reaction 6 and generates single bonded oxygens thus modifying the defect
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 179
concentrations in the vitreous silica. Single bonded oxygens are oxygen excess
Therefore as Na20 is introduced into the scale, it tends to increase the single
bonded oxygen concentration (eq. 6), this decreases the vacancy concentration
(eq. 14) which inturn increases the molecular oxygen concentration in the glass
(eq. S).This can be written as a single equation which is the algebraic sum of
equations 6, 14 and 9.
such as those formed on silicon carbide the sodium will decrease network
transport and increase molecular transport as it drives the scales towards more
stoichiometric compositions.
This result and the previous oxidation model will now be applied to the
paragraph, in the hot corrosion Na20 increases Cm and decreases Cv, therefore
molecular transport is enhanced giving greater parabolic constant for the acidic
silicon(*). This result is in line with the scales of silicon carbide being more
stoichiometric under acidic corrosion than those formed in dry oxygen oxidation
and with lower oxygen pressures expected in the formation of scales by oxidation
of silicon carbidethan in the oxidation of silicon. From the previous analysis the
permation of molecular oxygen through vitreous silica, the same as for the
were determined at constant sulfur content in the atmosphere and not constant
total pressure was used at all three temperatures. After passage over the
From equilibrium relation 2 the activity of Na20 increases with decreasing pSO3
apparent activation energy greater than the 26-28 kcal/mole for molecular
diffusion of oxygen and the oxidation of silicon and C-side SIC will be measured.
DmCm and both terms will depend on temperature. It can be seen from reaction
from the defect equations considered in this report. However the enthalpy of
reaction 15 and in general the operating defect equations are not known so that
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 181
that the activation energy for hot corrosion should be significantly higher than
that for oxidation. The difference between the measured apparent activation
energy (34 kcal/mole) and that for molecular diffusion (27 kcal/mole) may not be
dominate the transport. Simple considerations suggest that the two mechanisms
For the acidic hot corrosion of Si-side silicon carbide, the same general
constant B. As for the C-side, the Na30 introduced by the hot corrosion
decreases the network contribution (lowers Cv) and increases the molecular
B extrapolated from the oxidation data of Tressler et al.tgl. The large apparent
activation energy is due to the same effect as for the carbon-side, the Na30
correlation between the results for C-side and Si-side acidic hot corrosion is
being considered.
182 High Temperature Corrosion of Ceramics
REFERENCES
2. J.R. Blachere and D.F. Klimovich, *J. Am. Ceram. Sot. 70 [ll] C324-C326
(1987) paper appended in Appendix E.
6. M.I. Mayer and F.L. Riley, J. Mat. Sci., 13, (1978) p. 1319-1328.
10. S.I. Raider et. al., J. Electrochem. Sot., 123 [4] (1976), p. 560.
13. R.E. Tressler and K.E. Spear, GRI Report, GRI-86/0066, 1985.
14. L.L. Hench et. al., Ceram. Eng. and Sci. Proc., 3 [9] (1982), p. 587-595.
18. J.A. Costello and R.E. Tressler, J. Am. Ceram. Sot., 64, (1981) p. 327-331 .
20. D.C. Larsen et. al, Ceramic Materials for Advanced Heat Engines, Noyes
1985, p. 234.
91
-*. Reference 19
Appendix D-Hot Corrosion of Silicon Nitride and Silicon Carbide 183
22. (a) R.C.A. Harris and R.L. Call, in Silicon Carbide 1973, R.C. Marshall
et. al., eds., University of South Carolina Press, 1974, p. 329.
(b) R.C.A. Harris, J. Amer. Ceram. Sot., 68, 1975, p. 7-9.
25. D.M. Mieskowski et. al., J. Am. Ceram. sot., 67, (1984), C17-Cl8
27. H. Rawson, Inorganic Glass Forming Systems, Academic Press (1967), p. 53.
26.. V.J. Fratello et. al., J. Appl. Phys., 51 [12] (1980), p. 6160-6164.
29. D.L. Griscom, MRS Bulletin, June 16/ August 15, 1987.
31. Reference 19 p. 67
34. A.G. Revesz and H.A. Schaeffer, J. Electrochem. Sot., 129, 1982, p0 357.
Many presentations have been made on this research. The most recent ones
are:
- Hot Corrosion of High Purity Silicon Carbide and Silicon Nitride [7]
The first paper is appended. Appendix B is ready for submission. The others
need further work. The material in Appendix C will be submitted next. Reprints will
184
Appendix E-Publications 185
REFERENCES
1. J.R. Blachere, D.F. Klimovich and F.S. Pettit, “Hot Corrosion of Non Oxide
Ceramics,” paper # , Fail meeting, Basic Science Div. Am. Ceram. Sot.,
Nov. 5, 1966.
2. J.R. Blachere, D.F. Klimovich and F.S. Pettit, “High Temperature Corrosion
of Silicon Nitride and Silicon Carbide,” Invited paper, Workshop on Corrosion
of Ceramics, Penn State, Nov. 12-13, 1967.
6. B.S. Draskovich et al., “Hot Corrosion of Silicon Nitride and Silicon Carbide,”
in preparation.
7. D.F. Klimovich et al., “Hot Corrosion of High Purity of Silicpn Nitride and
Silicon Carbide,” in preparation.
r
November\ 1987
h,k
#(PZ)
00
Parabolic
h
kh and 0.1425 were calcul.Acd rer~ctwely for
bulk SIO,. S,,N,. md SIC The>e value)
were “blamed for a pnmrry clec~ron barn
ener~v of IO keV bv m~erwlrtwn of the
elem;;l,al drta of He;“r,ch’;nd rddmon of
mars-weighted elcmcmal c”clf~c,en,~.
Therefore, the fdm and Ihe wb\,rrtcs .~e so
and iir IS calculr,sd from the prcdlcled in which simdar dxa, .I c”“a,a”, brckscartermp cc&
mca,ured ,“,cn,,,,eh as fic,en,. Iha, of the ondc. ua, urcd for dll
film thxknesse$ rouhmg I” an enor es,,-
mr,ed I” br <I% of ,bc film dnckne\ses
for xhca glass on s,bcon nitride ,ubw.oes
X[-@z-t&f (p:-h++ j] and slightly over 1% for sd~con crrbrde
wbsorlo. For other subsmale-tilm comb,-
“a,,““,. when ,h,r a,aump,,“” 1s no, \rhd.
The inlegrrl for Ihe parabolic and ex-
in which If 15 Ihe X-WV m,e”s,,v measured a film b;rcksca,ten”p cwflicwn, “wt be
ponenoal r.eg,on 8” a lhxkness p ,uch as
from Ihe f~irn md /Z ;s rhu lot& mca- calculawd as a funcoon “1 p:, d.,. I. aod h
pi,>p:>l.Sh 1s
wed fur the bulk aodard. The mwgration are different for lilm .md wb,trr,e.”
for /: ,s over ,hr mas lh,ckness of [he film Cabbra”“” curve, of 1, II film ihlck-
and Ihrl for Ihe bulk mtenwy is over Ihe ncss were calculr~ed u,,h a compu,er u,mg
uhole depth of X-ray producd”” p:, g,ven Eq. (4) and Ihe mclhod oullmcd above.
by Ihe X-ray praluc!,“” range of Hemnch.’ -(pz,- IShI S,l,ca glr,s u!,h .I den,,,y of 2 2 g/cm’
Equroon (4) ha, ken wed rucce,rfully by
x Q (8) was ured for the lilm I” ,dI ma rage.
?+K(p-_.-I 5hl
KelM,. ma,, Ih,ckne,,. and ab,“rp,,on COICUII-
Ttw mwosmc, of Eq (4) were integrated wnh u”“,. The cahbrat,“” cunc 1, ,houn m
I” clozd form u~,“e Ihe “arabolic-ex- Fig. 2 for sdx”” carbldc md ,dxo” m-
ponenwdexpresrm-for &p;) The ” Q=exP[P&&-X j] mde ,ubwa,es.
arrumrd 4(p:c) cwve 1s sketched I” Fig. I.
1
For [he prrabohc ,eg,on
1.Shx The inteosmes of Ihe “x)pc” Ku line
lip.-J=h~‘(~:-h)‘(a-k)+k (5) were measured 1” a ,ca”“,“~ elcc~“”
m,croscope* fmcd wlh IWO ud\slmglh
and for the rrponenwl rrg,o” I;=I, (for pi = I.Sh)
disperwe spec,r”mctcn equ~ptwd for hgh,
The panme,er, C&Bk. and h are a func- eleme”, .mrly~r. All wmple, uere coaled
don of [he backscattering clewon yield. w,lb &a~, 20 “m of carbon. Duphcnle
Using values for the bulk matenal, the I”- mmsurcment~ were made ,,muluncously
x exp(w ) (6)
te”,,,y for lhr bulk standard I, crlculaed: wth ,hr IWO spec,r”me,ers ill a” .,ccelcrd-
lion voltage of IO kV and a beam curre”,
,“.=I, ifor pr=pz,)
of 20 rA. The ra,a”s kr tie calculaled from
in which Ihe parameters 6, k. and h are cab Ihe measured intms,l~es corrected for back-
culzued followmg Keuwr’ and Goldstem.’ However, for thm films Ihe elrcrron back- ground. The oxide Ihicknes,es CA” be read
The mlegral for Ihe parabolic reg,““. for a xa,,er yield mcludes a conrnbution from from Fig. 2: ntedd. a am~ple m,erp&o”n
dwknes, ,x<l 5h. IP the subwale. Approx~ma,~“na of Ihe da, program and E.q. (4) were used LOgel them
of Cusslet were u,rd prev~ou,ly”’ dnd more exacdy. The meawreme”lS are very
wed m lh,s case Some var,~,,““s on Ihe reproducible. and a standard error of 1% or
electron ,rrnrm,ra~“n cwffiwn,’ of the less IP c;rlcula!ed’ for Le values corre,pond-
,ubauele were also med. The aweme val- me 10 th,cknesxs >IW nm for a se, 01
(7) “es of Ihe backsca,ter cwfticlen, of the lob-s co,m,~ on pea, md background. for
film ,h”uld be thrl of the ,ub,rrate for a film and srandsrd. I, i, ~mprowd by lhr
film mfmwly lhm md lbsl 01 Ihe bulk film comblnarlon of several of these mea-
mr,er,;ll for a IhIck film.’ I” tb,, case. suremen,,. They were uwlly repcrIed at
bilckscaltrr cocffic~ent?, of 0.1316. 0 I37 I, ,hr ,ame we and it, sevrral Icat~ons of
188 High Temperature Corrosion of Ceramics
Table I. Oxide Thickness Comparison* better SUN+ Oxan Eq (I) for tits La\k. As
Ilwkncncu shown in Rg. 2. httle addmonal lhrckness
(PI, can bc measured w,th dur higher electron
SImplc Typr WDS SEM energy beau% the sofr X-ray, produced
I SIC.SC 0.32 0.21 deep in tbe sample by hght elements such
a, “xygro are almost completely absorbed
: SIC, SC
SIC. 0.31
0.20 0.30
0.13 Tb,s rc~ults m Ihe shallow ,lopc of the
4 Sic. SC 0.17 0.11 curve for duckcr tilms and Ihe prormuty of
rhe two curves for low film ducknose,.
2 SI,N,
SI,N.. CVD 0.10
0.05 0.09
0.12 Imermedmte electron beam energies such
.sc=nng!x clyrul. WDS..X.R) mlcmuulvrir. ud sEM=lnugw “lr- as 20 kV did not provide signlftcanl
yzuuu. impmvemcn~~