Scanning Electron Microscope

Compact & High-performance

Features

1. Turbo Molecular Pump ( TMP) is standard. As an oil-free pumping system, sample contamination is
minimised. Unlike conventional oil diffusion pumped SEM, it does not require large heating
capacity or water re-circulator, making it an energy saving ecological SEM.
2. To assist inexperienced users the SU1510 includes an on-screen operation guide that walks
the user step by step through the complete imaging process – from vacuum mode selection to
image capture. This unique feature allows users of all experience levels to quickly obtain
high quality images.
3. The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron
resolution of 3.0nm (high vacuum mode) and a guaranteed backscattered electron resolution of
4.0nm (variable pressure mode).
4. For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode
that eliminates negative charging, and provides the optimum conditions for both imaging and
EDX microanalysis ＊1.
5. The specimen chamber and stage have been designed to accommodate samples as large as
153mm in diameter. Simultaneous EDX microanalysis and imaging can be completed on a sample
that is up to 60mm in height at the analytical working distance of 15mm.
6. The ESED-Ⅱ＊2 is optionally available if secondary electron imaging in variable pressure mode is
desired. This detector is integrated into the GUI of the SU1510 and is completely software driven
with all automatic features ready for instant use by the operator.

＊1 : Energy Dispersive X-ray microanalysis (option)

＊2 : Environmental Secondary Electron Detector (option)
＊ Table is to be prepared locally.
＊ The images are simulated, and are not actual images.

1
Operation Guide - Good quality images by easy operate ＊3
-

STEP1 Condition setting

The key to obtaining good quality images is to optimize the microscope to suit the requirement. The SU1510 GUI has pre-prepared versatile
conditions for observation and EDX microanalysis. The software helps the operator to select the optimum operating conditions depending on
the user’s application.

STEP2 Image adjustment

Just follow the instruction in the GUI, SU1510 will be set to the proper operating conditions for both focus and astigmatism adjustment.

One-point
advice

＊3 : An impression of easy operate varies between individuals.

2
 Electron optics for high resolution microscopy

High resolution image (High Vacuum 3.0nm/30kV, Low vacuum 4.0nm/30kV )

The SU1510 electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission
current. This design allows a guaranteed resolution of 3.0nm at High Vacuum (SE) and 4.0nm at Low Vacuum (BSE).

High Vacuum, SE image Low Vacuum, BSE image

Magnification : ×100,000 Magnification : ×60,000
Sample : Evaporated gold particles

Gun bias voltage system

The SU1510, in addition to the traditional variable bias,
has a unique Quad bias system, in which allows delivery
of high emission currents at the four most frequently
used accelerating voltages. This produces images with
good signal to noise ratio even when operated at a low
accelerating voltage.

Traditional variable bias

Accelerating voltage : 3kV
magnification : ×30,000
A unique Quad bias system
Accelerating voltage : 3kV
magnification : ×30,000

Accelerating voltage : 3kV Accelerating voltage : 15kV

Magnification : ×15,000 Magnification : ×30,000
Sample : Zeolite Sample : Metal hydride

3
Various Real Time Image Function those are Easy to Use

Real time image display

The SU1510 has a choice of image displays. The operator can choose from real time displays of full screen, small screen or simultaneously
display two different live signals as shown below.

A small screen real time image (640×480 pixels)

A full frame real time image (1,280×960 pixels)

A simultaneous live display of two different images

(640×480 pixels×2)
Sample : Clock

Signal mixing function

The SU1510 has a signal mixing function in which operators can mix different live signals generated from the same field of view and produce
one combined image. If operators mix a secondary electron signal (which is sensitive to surface topography) and a backscattered electron
signal (which is sensitive to atomic number contrast), for example, they may be able to evaluate surface details and compositions using a
single image.

Left : SE image Right : BSE image

Signal mixing image (SE+BSE)

Sample : Ball grid array

＊ The images are simulated, and are not actual images.

4
 Observation of insulating samples

Observation in Variable pressure ( VP) mode

A beam of electrons

The objective lens

A backscattered
electron detector e Neutralization of
e Preventing
a sample surface
sample charging
potential by ions
A variable Residual gas
pressure
＋ ＋ molecules
Microscopy of
environment
− − − − − − A variable pressure water/oil containing
(6 to 270Pa)
environment wet samples without
Sample metal coatings

The VP mode allows observation of non-conductive or hydrated samples without the need for sample preparation, such as a conductive
coating. Positive ions generated by either interaction of the incident electron beam or with electrons leaving the sample with the chamber gas,
act to neutralize the build up of negative charge on the sample surface. The chamber pressure is controlled by a simple slide bar.
Real-time Vacuum Feedback (RVF ) system permits rapid vacuum stability in the specimen chamber at the user specified pressure setting.

A comparison of BSE images at high and low accelerating voltages in VP-mode

The high sensitivity, 4 segment BSE detector makes observation of samples at low accelerating voltages a reality.

Accelerating Accelerating
voltage : voltage :
15kV
3kV

Sample : Photocatalyst fiber

Accelerating Accelerating
voltage : voltage :
15kV
5kV

Sample: Saccaromyces cerevisiae (containing Zinc)

5
BSE imaging at high speed scan rates

High sensitivity semiconductor BSE detector

It is well known that BSE images reflect sample composition due to atomic number contrast. This has been widely used in the examination of
metallic samples, as well as particles on various surfaces, such as molded parts. The SU1510 has a 4 segment BSE detector. In addition to
the normal compositional image this allows observation of sample topography from four different orientations without the need to rotate the
sample. The BSE detector is so compact that samples can be imaged at short working distances at very high sensitivity.

BSE/Composition BSE/Topography

BSE/3D SE (Secondary electron)

Sample : Blade for a cutting tool

6
 Versatile Specimen Chamber for Various Analytical Tools

A sample as tall as 60mm for EDX

The specimen stage of the SU1510 will accept a sample as tall as 60mm for image observation and elemental analysis (EDX ), or 70mm tall
sample is applicable if elemental analysis is not required.
60ｍｍ

Japanese Seal (60mm height)

EDX analysis (option)

The SU1510 design provides optimum column conditions for fast and accurate analytical X-ray mapping, qualitative analysis and quantitative
analysis.

Si Fe Al Mg Ti

BSE image EDX Mixed mapping image EDX Qualitative analysis

Si Mg Fe

EDX Mapping image EDX Mapping image EDX Mapping image

Sample : A block lava

Analyzed by XFlash5010 (Bruker AXS)

7
X-Y Axis Motor Drive (option)

Move function
The Move function uses both electrical image shift and motordrive stage controls. This function allows operators to move an object of interest to
the center of the monitor screen with a click of the mouse. It also allows any part of the image to be brought to a new location as shown below.

This is a point of interest. This is brought

to the center of the screen by clicking
the point of interest.

Clicking

Here is a point of interest. It is brought to

the right or any new position by
dragging it.

Dragging

Returning the stage to a captured image position

Selecting one of the last 16 captured images allows the operator to return to the stage coordinates of that image. This is convenient for further
study of a previously visited area.

Capture Box

Image navigation Montage function (option)

This function allows the operator to navigate around the This function allows the operator to record SEM images automatically across a
sample using either a low magnification SEM image, an large sample from neighboring fields. By combining the recorded images it is
image from an optical microscope or digital image (available possible to make an image covering a large field of view on a sample.
file format is BMP, JPEG and TIFF ), from another source.

10mm
Sample : MEMS (Racheting Torsion Motor)
Courtesy of Dalhousie University,Canada Sample : Key (10×10 images)

＊ The images are simulated, and are not actual images.

8
 High sensitivity imaging by using secondary electrons in a VP-mode

ESED-Ⅱ (Environmental Secondary Electron Detector Ⅱ)(Option)

The ESED-Ⅱ detects a signal that is the result of the secondary electrons interacting with the gas in the chamber. The resultant image has all
the characteristics and topographical information of a traditional secondary electron image.

A comparison of the ESED-Ⅱand BSE images in VP-mode

A complementary use of the ESED-Ⅱ with the standard BSE detector allows a comparison of two images. BSE images show sample
compositions while ESED-Ⅱ images show surface topography of a sample closely.

BSE image ESED-Ⅱ image

Sample : Rubber roller

BSE image ESED-Ⅱ image

Sample : Powder of cosmetic

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 Cooling stage (Option)
Cooling stage can be used to image hydrated samples such as biological material, plants, food products and emulsions as the vaporization of
water content can be minimized by keeping the sample between 0 to –20℃. It allows observation and analysis of water-containing samples for
a few tens of minutes to a couple of hours without causing deformation of samples.

30
Variable pressure range
of the SU1510

Freezing
0 A cooling stage

Evaporation
Freezing

A water (ice) vapor pressure curve

−60
6 10 102 103 104
A general view of a cooling stage

A relation of water and its vapor pressure

Typical applications of a cooling stage

At an ambient temperature At -20℃ (A cooling stage was used)

Sample shrinkage is seen after 5 minutes. Sample shrinkage is not seen after 5 minutes.
Sample : Petal of a hydrangea

10
 Simple maintenance

3D animated maintenance guide

The SU1510 has a 3D animated maintenance guide that shows the procedure for routine tasks such as to replace a filament.

Auto Beam Setting

After the installation of a new filament, it is necessary to adjust the filament current, electron beam alignment, focus brightness and contrast.
This can all be achieved automatically with the click of a single button.

Pre-centered cartridge filament

There is no need for the operator to perform complicated and delicate
alignment procedures. The filaments for the SU1510 are pre-aligned at the
factory so there is no need to perform centering in the field.

Condenser lens apertures (Column liner design)

The condenser lens fixed apertures are all located within the liner tube and
can be simply removed through the gun chamber. It is not necessary to
disassemble the column to gain access to the aperture assembly. 3D
animated maintenance guide provides users with step by step instructions
on how to replace the apertures.

11
Optional software for extended data analysis

3D VIEW software (Option)

Using the BSE detector equipped as standard the 3D software generates surface roughness measurements and an interactive 3D model
display of the sample.

A 3D-model

Sample : chromium molybdenum steel A bird’s-eye view

( Vickers hardness)

A 3D-model

Sample : Multi-crystalline Si photovoltaic cells A bird’s-eye view

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 Sample holders

A set of sample holders and stubs (Standard)

An appropriate specimen stub is selectable dependent upon the purpose.

Special holders (Option)

Here are sample holders prepared for some specific purposes.

Multiple sample holder Sample holder for resin embedded samples

(15mm dia. ×4 pcs)

Wafer holders (Option)

Here are sample holders for wafers of 2 to 6 inches (SEM compatible). These holders allow loading/unloading wafers at one touch.

Wafer holders for 2,4,6 inch wafers

13
■ Specifications ■ Optional Accessories
Items Description Detector and Analytical Tool
Resolution SE 3.0nm at 30kV (High Vacuum Mode) Environmental secondary electron detector (ESED-Ⅱ)
Resolution BSE 4.0nm at 30kV (Variable Pressure Mode) Energy Dispersive X-ray Spectrometer (EDX) made by each manufacturer
Magnification ×5 to ×300,000 Chamber scope made by each manufacturer
Accelerating Voltage 0.3 to 30kV
Low Vacuum Range 6 to 270Pa through graphic menu Specimen Stage
Image Shift ±50µｍ (WD=15mm) X-Y Axis Motor Drive
Maximum Specimen Size 153mm in diameter Cool Stage made by Deben UK Limited.
X 0 to 80mm Camera navigation system
Specimen Stage

Y 0 to 40mm
Z 5 to 50mm Software
R 360° 3D-VIEW (3D Image View and Measurement software)
T -20 to 90° CD Measurement
Observable area 126mm in diameter (with rotation) Hi-Mouse (Common software for Mouse and Keyboard)
Maximum Height 60mm (WD=15mm) Consecutive image recording function (Zigzag capture function). Stitch
Electron Gun Precentered Cartridge Filament
Electron Optics

Objective Aperture 5-position, click stop objective aperture Interface

Gun Bias Quad bias with variable bias control External communication Interface, DBC
Detector Secondary Electron Detector
High Sensitivity Semiconductor BSE Detector Others
Analytical Position WD=15mm, TOA.=35° Rotary Knob
OS Windows R XP (subject to change without notice)
Controls Mouse, Keyboard
Monitor 19 type LCD (subject to change without notice)
Auto Alignment Auto Beam Setting, Auto Axial Alignment
■ Dimension / Weight
Auto Image Auto Focus, Auto Stigmator/Focus Items Description
Adjustment Auto Brightness & Contrast Main Unit 550(W) × 1,000(D) × 1,460(H) mm, 380kg
Image Data 640×480 pixels, 1,280×960 pixels Oil Rotary Pump 526(W) × 225(D) × 306(H) mm, 28kg
Saving 2,560×1,920 pixels, 5,120×3,840 pixels Weight 200(W) × 180(D) × 160(H) mm, 40kg
Display

Image Filing Search Functions / Built-in Image Data Base

with Image Processing Functions
Filing Format BMP, TIFF, JPEG
Auto Data Accelerating Voltage, Magnification, Micron Marker,
■ Installation Requirements
Display Unit, Working Distance,Date/Time, Detector, Pressure Items Description
Image Display Full Screen Display：1,280×960 pixels Room Temperature 15 to 30℃
Mode Small Screen Display：640×480 pixels Humidity 70% RH or less
Dual Image Display：640×480 pixels ×2 Power Supply Single Phase AC100, 110, 115, 200, 220 or 240V (±10%) 2.0kVA
Signal Mixing Power Cable 10 meters long with M5 crimp-type terminal
Operation Full Automatic Sequence Grounding 100Ω or better
Evacuation

Turbo molecular pump 210L/s ×1

System

Oil Rotary Pump 135L/min (162L/min. with 60Hz) ×1

Protection Power Failure and Vacuum Failure
Auxiliary Functions Raster Rotation
■ Typical installation room layout
Dynamic Focus / Tilt Compensation 1,700

Dynamic Stigma Monitor

Free Layout Print Function
200
500

3D Animation Maintenance Guide

180

Weight 526
Operation Guide
225

Easy Measurement Rotary pump

Oblique image
1,000

2,000
(600)

R
●Windows is a registered trademark of Microsoft Corp. in the U.S. and other countries.
PC
●Observable area is restricted by specimen size.
Table＊
(600)
550
500

Doorway (600 or greater)

unit : mm

＊ Table is to be prepared locally.

14
Notice: For proper operation, follow the instruction manual when using the instrument.
Specifications in this catalog are subject to change with or without notice, as Hitachi High-Technologies Corporation continues to develop the latest
technologies and products for our customers.

Tokyo, Japan
http://www.hitachi-hitec.com/em/world/
24-14 Nishi-Shimbashi 1-chome, Minato-ku, Tokyo, 105-8717, Japan

Printed in Japan (H) HTD-E175 2010.3