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Physica E 69 (2015) 27–33

Contents lists available at ScienceDirect

Physica E
journal homepage: www.elsevier.com/locate/physe

Simulation analysis of a novel fully depleted SOI MOSFET: Electrical


and thermal performance improvement through trapezoidally doped
channel and silicon–nitride buried insulator
Hadi Shahnazarisani, Saeed Mohammadi n
Electrical and Computer Engineering Department, Semnan University, Semnan, Iran

H I G H L I G H T S G R A P H I C A L A B S T R A C T

 We have introduced a novel nano- We introduce a novel nano-scale SOI MOSFET structure with vertical trapezoidal doping distribution,
scale SOI MOSFET structure. additional side gate, and dual material buried insulator, and show that the on–off current ratio and the
 It is based on vertical trapezoidal self-heating effect of the proposed device improve considerably rather than those of the conventional
doping distribution and additional structure.
side gate.
 We have also used dual material
buried insulator to improve self-
heating.
 We have shown the improvement of
Ion/Ioff and self-heating effect.

art ic l e i nf o a b s t r a c t

Article history: In this paper, we present a novel nano-scale fully depleted silicon-on-insulator metal-oxide semi-
Received 8 August 2014 conductor field-effect transistor (SOI MOSFET). On-state current increment, leakage current decrement,
Received in revised form and self-heating effect improvement are pursued in our proposed structure. The structure makes use of a
16 December 2014
buried insulator layer which consists of two materials to reduce the self-heating effect. On the other
Accepted 6 January 2015
Available online 7 January 2015
hand, to modify the sub- and super-threshold drain current, vertical trapezoidal doping distribution and
additional side gate technique are employed. Our novel transistor is named dual material buried in-
Keywords: sulator vertical trapezoidal doping SOI MOSFET (DV-SOI MOSFET). We investigate the electrical perfor-
Silicon on insulator mance and thermal behavior of the DV-SOI MOSFET using a commercial device simulator. We demon-
Self-heating
strate that the proposed structure increases on–off current ratio by orders of magnitude and considerably
Leakage current
improves self-heating effect in comparison with the conventional uniform doping fully depleted silicon-
Dual material buried insulator
Vertical trapezoidal doping on-insulator MOSFET (C-SOI) which uses side gate for better electrical performance.
Side gate & 2015 Elsevier B.V. All rights reserved.

1. Introduction MOSFETs has raised adverse short channel effects (SCEs) [1–3]. The
main short channel effects are the threshold voltage roll-off, the
To achieve higher performance and lower power consumption, degradation of the subthreshold swing, and the drain induced
transistors have been scaled in the past decades. Scaling of barrier lowering effect [2–4]. SCEs lead to the increment of the Off-
state current, and degradation of the on–off current ratio. Two
n
Corresponding author. Fax: þ 98 2333654123.
common approaches to minimize these effects are using thinner
E-mail address: sd.mohammadi@semnan.ac.ir (S. Mohammadi). gate oxide and doping the channel with a higher dose of impurity

http://dx.doi.org/10.1016/j.physe.2015.01.012
1386-9477/& 2015 Elsevier B.V. All rights reserved.
28 H. Shahnazarisani, S. Mohammadi / Physica E 69 (2015) 27–33

[5,6]. Gate leakage current increment, carrier mobility degrada-


tion, and random dopant fluctuation are some of the negative
consequences of using these techniques in the nano-scale regime
[7]. Hence alternative MOSFET structures have been proposed. SOI-
MOSFET is one of the most promising structures for further
downscaling of the conventional bulk technology [8,9]. Thin body
nature of this device has the advantage of suppressing SCEs due to
better electrostatics influence of the gate compared to that of bulk
structures [10,11]. This enables us to reduce the doping level of the
channel. However, short channel effects still occur in SOI-MOSFETs
but to a lesser extent than in bulk MOSFETs.
One of the main difficulties in SOI-MOSFETs is dissipating the
heat generated in the active region of the device, since the buried
insulator layer blocks the heat flow toward out of the body of the
device [10]. Compensation of the self-heating effect is an im-
portant issue for improving the device performance. Although, the
straightforward approach for the heat dissipation seems to be the
reduction of the buried oxide thickness, but it degrades the Fig. 1. Good agreement between experimental profile [21] and simulated profile.
Data are reported for VG ¼ 0.3 V, Gate metal work function ¼ 4.5 eV, T ¼ 300 K,
blocking voltage and the conduction capability [11,12]. NA ¼ 1  1018 cm  3.
The advantages of the SOI-MOSFET structures compared to the
conventional MOSFET structure have been widely investigated
[13,14], and the use of SOI technology in the integrated circuits substrate is achieved in the proposed structure in comparison with
seems indispensable in the future. However, ongoing researches to the C-SOI structure. It is worth noting that the Si3N4–Si interface
optimize electrical performance and thermal behavior of SOI- quality is rather poor [22]. Therefore, we have used a thin layer of
MOSFETs continue. Recently, several SOI-MOSFET structures have SiO2 on top of the Si3N4 layer for having a better interface quality.
been reported in the literature to improve AC performance and The distribution of the dopant atoms in the channel of the
self-heating effect [15–17]. proposed transistor is vertically trapezoidal. Doping density dis-
In this paper, we employ the idea of using a higher thermal tributions in the DV-SOI and C-SOI structures are shown in Fig. 3. It
conductivity dielectric as buried insulator instead of using silicon can be seen from the figure that, the channel is doped linearly
dioxide. Recently utilization of silicon nitride layer as dielectric in from the bottom with higher concentration to the top with lower
different MOSFET structures has been taken into consideration concentration in the DV-SOI structure. In order to study the effect
[18,19]. The thermal conductivity of Si3N4 is 0.185 W K  1 cm  1 of vertically trapezoidal doping profile on the electric character-
that is dramatically higher than that of SiO2, which is istics of the device, a sample of doping distribution is simulated.
0.014 W K  1 cm  1. However, to have a better interface between The vertically trapezoidal doping is linearly graded from
the buried insulator and the Si body of the SOI device, Si3N4 layer 1  1015 cm  3 to 1  1019 cm  3.
is used with a thin SiO2 layer in stacked configuration. On the For making a fair comparison, all the device parameters of the
other hand, to improve the on–off current ratio, we employ a DV-SOI are chosen equal to those of the C-SOI unless otherwise
channel doping engineering technique in our proposed structure. stated. In the C-SOI structure, the uniform doping level of
Here, the doping density of the channel is distributed in a trape- 1  1018 cm  3 is utilized for the channel which yields the same
zoidal form in the vertical direction. This doping distribution threshold voltage, Vth ¼0.279 V, for the both structures. Para-
profile results in a higher potential barrier against the injected meters for the DV-SOI structure are listed in Table 1. A tempera-
carriers from the source, as they are further from the gate. ture of 300 K was employed by default in the simulations. Our
To simulate and examine the different characteristics of the simulations results show that the proposed structure has better
proposed SOI device, the ATLAS device simulator is used. In the sub- and super-threshold performance rather than conventional
simulator environment the basic Poisson and drift–diffusion structure. This can be observed in Fig. 4, where we have plotted
equations and some other impressive physical models such as the drain current versus gate voltage characteristics of both de-
Shockley–Read–Hall (SRH), and Auger recombination models are vices in linear and logarithmic scale at VDS ¼0.5 V.
utilized simultaneously. Furthermore, carrier velocity saturation,
carrier–carrier scattering at high doping concentrations, the de-
pendence of mobility on temperature, and the influence of vertical 3. Results and discussion
electric fields are taken into account, too. Quantum models are
also activated for accurate simulation of devices. Comparing the 3.1. Self-heating effect improvement
experimental data [20,21] and the simulation results of the drain
current of a similar structure (Fig. 1), it is shown that ATLAS is a In the SOI transistors, the difference between the channel and
suitable numerical simulator for accurate examination of our ambient temperature is reported by McDaid [23]:
semiconductor device. Pt tb
ΔTC =
Kd A (1)

2. DV-SOI structure where tb is the thickness of the buried layer, Kb is the thermal
conductivity of the buried layer, and A is the effective channel
Schematic cross-sections of the DV-SOI structure and the C-SOI length multiplied by the device width that is the area over which
structure are shown in Fig. 2(a) and (b), respectively. The DV-SOI the power is generated.
structure consists of dual material buried insulator instead of just Because of the higher thermal conductivity of Si3N4
SiO2 beneath active region (channel region). Because of the higher (0.185 W K  1 cm  1) compared to that of SiO2 (0.014 W K  1 cm  1),
thermal conductivity of Si3N4 than that of SiO2, the better heat we have replaced the commonly used insulator SiO2 with silicon ni-
conduction path from the active region of the device to the tride, in the DV-SOI structure, expecting much smaller values of ΔTc in
H. Shahnazarisani, S. Mohammadi / Physica E 69 (2015) 27–33 29

Fig. 2. Cross section of the (a) DV-SOI MOSFET and (b) C-SOI MOSFET structures.

Fig. 3. Doping distribution profile in the channel for the DV-SOI and C-SOI
structures.

Table 1
Typical parameters for the DV-SOI MOSFET and
C-SOI MOSFET structures.

Parameter Value

Channel length 30 nm
Main gate length, LM 14 nm
Side gate length, LS 14 nm
Gate oxide thickness, tf 1.2 nm
Buried oxide thickness, tBOX 100 nm
Thin silicon thickness, tSi 15 nm
Thin silicon film doping, NA 1  1018
Gap length, Z 2 nm
Source/drain doping, Nd 1  1020
Gate metal work function 4.5 eV
Voltage difference, VDiff 0.3 V
p-Type substrate doping 1  1013
Si3N4 thickness, tSi3N4 87.5 nm Fig. 4. Drain current versus gate voltage characteristics of the DV-SOI and C-SOI
Buried oxide thickness up of Si3N4 12.5 nm MOSFETs in linear and logarithmic scale at VDS ¼0.5 V. The parameters of these
structures are assumed according to Table 1.
30 H. Shahnazarisani, S. Mohammadi / Physica E 69 (2015) 27–33

Fig. 5. Steady state distribution of the temperature for (a) DV-SOI MOSFET and (b) C-SOI MOSFET structures. The bias conditions for both structures are VGS ¼  2 V and VDS
¼ 1 V. The other simulation parameters are listed in Table 1.

the DV-SOI structure in comparison with the conventional structure. where μeff,0 is the effective mobility at ambient temperature, T is
Fig. 5(a) and (b) shows the steady state heat distribution in the the average channel temperature, T0 is the ambient temperature,
DV-SOI and C-SOI structures at the same bias conditions (VGS and k is the mobility temperature exponent that for NMOS tran-
¼  2 V and VDS ¼1 V), respectively. The other parameters of the sistors has a typical value in the range of 1.5–1.7 [25,26]. Therefore,
structures are listed in Table 1. It can be seen in the figures that, the proposed structure shows higher mobility in the channel
the temperature of the DV-SOI structure is considerably lower region due to temperature reduction and we expect that the drain
than the temperature of the C-SOI structure because of the better current increases. Fig. 7(a) and (b) shows the electron concentra-
heat flow path in the proposed structure. tion of the C-SOI, and DV-SOI structures along the surface of the
The channel temperature versus the drain voltage bias when devices. As it can be inferred from these figures, the electron
the gate voltage is held at  2 V is shown in Fig. 6. Generally, the concentration of the DV-SOI structure increases with respect to the
higher drain voltage bias leads to the higher lattice temperature, C-SOI structure. So, we have achieved 15% electron concentration
however, in the DV-SOI structure due to the improved self-heating increment in the maximum values of the proposed structure with
effect, the slope of the curve is much smoother rather than the respect to the C-SOI structure.
slope in the curve of the C-SOI structure. Dependence of the maximum temperature of the lattice and
One of the main consequences of the higher temperature lat- the gate-substrate capacitance of the device on the thickness of
the silicon nitride layer is investigated in Fig. 8. Decreasing the
tice is dominant phonon scattering mechanism, which decreases
buried layer thickness results in reduction of thermal resistance of
the carrier mobility considerably. It has been shown that this de-
the layer and hence the maximum temperature of the lattice di-
pendence can be stated as [24]:
minishes. On the other hand, as it can be observed from the figure,
⎛ T ⎞−K when the thickness of silicon nitride layer decreases, the gate-
μ eff = μ eff,0 ⎜ ⎟ substrate capacitance of the device will increase, since the capa-
⎝ T0 ⎠ (2)
citance of the device depends on the dielectric constant and
thickness of the Si3N4 layer.

3.2. Leakage current reduction

To reduce the leakage current in the proposed DV-SOI transis-


tor, we have focused on the modification of the profile of the
channel potential in a way that the channel conduction can be
controlled better at the subthreshold region of the device opera-
tion. Although doping the channel with the higher dose of im-
purity is a well-known approach for reducing adverse short
channel effects, but, as stated before, it is not recommended for
nano-scale devices. One reason is considerable ionized impurity
scattering in highly doped channels, which leads to the weak
current drive. On the other hand, regions in the channel which are
further from the gate are more vulnerable to the short channel
effects. Here we dope the channel with a trapezoidal profile of
doping density, vertically. As a result, in addition to the higher
potential barrier at the depth of the channel, a slope in the po-
Fig. 6. Channel temperature versus drain bias for C-SOI MOSFET and DV-SOI
MOSFET structures at VGS ¼  2 V. The other simulation parameters are listed in tential barrier is created in the channel due to the doping differ-
Table 1. ence between the top of channel and the bottom of channel as
H. Shahnazarisani, S. Mohammadi / Physica E 69 (2015) 27–33 31

Fig. 7. The profile of electron concentration along channel for (a) DV-SOI MOSFET and (b) C-SOI MOSFET structures at VGS ¼  2 V, and VDS ¼10 V conditions.

shown in Fig. 9(a). It can be seen from Fig. 9(b) that a small po-
tential barrier is formed at the channel of the C-SOI structure, and
therefore, the OFF state leakage current is higher. But, in the
proposed DV-SOI structure, the conduction mechanism of the DV-
SOI should now be controlled by the potential barrier and the OFF
state leakage current decreases due to high barrier in the channel.
Furthermore, a slope on the potential profile aids the carrier
transport in the channel. Therefore, we are expecting that the ON
state current intensifies.
In the other word, by using the DV-SOI structure, the pene-
tration of the depletion regions of the reversed biased p–n junc-
tions of the drain and the source to the substrate is diminished. It
is shown that the leakage current of the reverse-biased p–n
junction is a function of junction area and doping concentration
[27].
Fig. 10 shows the DIBL and the threshold voltage of the DV-SOI
Fig. 8. Maximum temperature and gate-substrate capacitance versus thickness of and the C-SOI structures for the channel lengths down to 20 nm.
the silicon nitride layer for VGS ¼  2 V, and VDS ¼10 V. DIBL and threshold voltage roll-off are because of the potential

Fig. 9. Conduction band energy of the (a) DV-SOI MOSFET and (b) C-SOI MOSFET structures at VGS ¼  2 V and VD ¼10 V.
32 H. Shahnazarisani, S. Mohammadi / Physica E 69 (2015) 27–33

Fig. 12. Gate-source capacitance as a function of the frequency for DV-SOI MOSFET
and C-SOI MOSFET structures.

gm
Fig. 10. DIBL and threshold voltage of the DV-SOI and C-SOI structures versus fT =
channel length. 2π (CGS + CGD + Cpar ) (3)

barrier reduction in the short-channel device. Vertically trapezoi- fT R DS


dal doping profile in the channel of the DV-SOI structure mitigates fmax =
2 RG (4)
the dependence of the height of the potential barrier on the drain
bias condition and the channel length variation. The former de- where CGS and CGD are the gate-source and gate-drain capaci-
creases the DIBL, and the latter reduces the threshold voltage roll- tances, Cpar is the parasitic input capacitance, RDS and RG are the
off due to the channel length shrinkage. drain–source and gate resistances, and gm is transconductance,
As it can be inferred from the figure, when the channel length respectively.
decreases below 30 nm, the DIBL effect in the DV-SOI structure is Gate–source and gate–drain capacitances for the two structures
far less than that in the case of C-SOI structure. The strong de- are shown in Figs. 12 and 13. It can be inferred from the figures
pendence of the threshold voltage of the C-SOI structure on the that the carrier density around junctions is less modulated by
drain bias is highly undesirable. This means that the channel applied signals with higher frequencies. It is due to the gradual
conductance goes out of the gate control in the C-SOI structures mechanisms of movement, generation and recombination of car-
with very short channel lengths. riers around junctions. This means lower capacitance of junction
The on–off current ratio (Ion/Ioff) of the DV-SOI is large com- for higher frequency signals. The difference between the curves for
pared to that of the C-SOI. This can be clearly seen from Fig. 11, C-SOI and DV-SOI in both figures can be attributed to the lower
where the Ion/Ioff ratio curves of both DV and C-SOI structures are doping density of the channel surface in DV-SOI structure and
plotted against the channel length. Having better on-state drive deeper depletion region, hence, the parasitic capacitances of this
current along with lower off-state leakage current in the proposed structure is lower compared to those of C-SOI structure.
structure leads to the considerable improvement in the Ion/Ioff ratio The transconductance of the proposed and conventional
values. structures is observed in Fig. 14. It is shown that the transcon-
ductance is proportional to Cox/(Cox þ Cs) in which Cs is semi-
conductor capacitance [29,30]. We discussed the dependence of
3.3. High frequency characteristics
this capacitance on the frequency in the previous paragraph. This
dependence justifies the variation of transconductance with re-
In this subsection we investigate the parameters related to the
spect to frequency of applied signal in the figure. It can be inferred
small signal application of our device. The cut-off frequency, fT,
from these figures that the high frequency characteristics of the
and maximum oscillation frequency, fmax, are the main parameters
DV-SOI transistor are expected to be better, although not sig-
in the high frequency characteristics of a device. The expressions
nificantly, than those of C-SOI transistor.
for the fT and fmax are as following [22–28].

Fig. 11. The ratio of Ion to Ioff (Ion/Ioff) versus channel length for the DV-SOI, and Fig. 13. Gate-drain capacitance as a function of the frequency for the DV-SOI
C-SOI structures. MOSFET and C-SOI MOSFET structures.
H. Shahnazarisani, S. Mohammadi / Physica E 69 (2015) 27–33 33

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