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Application of ANSI/ESD S20.

20 to
Semiconductor Manufacturing

Carl Newberg
River’s Edge Technical Service, Inc.
www.retsinc.com
Acknowledgements
We would like to acknowledge Patrick Lim of
3M for many of the drawings used in this
presentation.
Many thanks to Patrick and 3M for their
willingness to allow the use of their
drawings.
What Is ANSI/ESD S20.20?

l ANSI/ESD S20.20 defines a companies


ESD control program
l Can be equated with (and actually is
becoming a part of) ISO 9000 quality
programs
l Applies to areas handling devices down to
100 volts (HBM).
ANSI/ESD S20.20

Applying ANSI/ESD S20.20 to semiconductor


manufacturers

l Equipment Manufacturers

l Semiconductor Manufacturers/Processors
ANSI/ESD S20.20
Equipment Manufacturers Semiconductor Manufacturers
l Program ensures that l Prevents equipment lockup
equipment is manu- problems
factured in a high quality l Increased yield due to ESD
ESD controlled environ- damage and electrostatic
ment charge contamination
l Protects Customers from l Protects customers from
equipment delivery latent failures
delays and latent failures
ANSI/ESD S20.20 & SEMI E-78
l Notexplicitly stated
l SEMI E-78 ties into S20.20
– Grounding/Bonding
– Electric Fields
l Materials

l Ionization

l E-78 has some additional elements not


called out in S20.20
Overview of ANSI/ESD S20.20
Goal: Provide continuous ESD protection
l Administrative Requirements
– The “Plan”
– Training
– Compliance Verification (Audits/Inspections)
l Technical Requirements
l Tailoring
Steps to Compliance with S20.20
l Develop an ESD control plan
– Tie into the quality program (ISO 9000)
l Implement the plan
– Training
– Installation of ESD controls
– Develop and begin inspections & audits
l Pursue certification
(many ISO Auditors now offer S20.20 certification also).
The ESD Control Plan
The Plan should address each of the
requirements of the program
l Training
l Compliance Verification
l Technical Requirements
l Organizational Requirements
l Contractual Obligations
The Training Plan
All personnel involved in handling or
contacting ESDS items must be trained
l Initial
training
l Recurrent training (frequency determined by
organization – typically 1/year or 1/two-years)
l Documentation – retained in personnel records
l Type & content of training determined by the
organization.
Compliance Verification Plan

This makes sure the program continues to work


lInternal Audits
– Inspections
l Frequency depends upon sensitivity and cost of failure
l Typically performed by internal personnel
– Audits
lExternal Audits
Technical Requirements

l Grounding / Bonding Systems


l Personnel Grounding
l Protected Areas
l Packaging
l Marking
l Equipment
l Handling
Grounding / Bonding Systems
Equipment Ground < 1.0 Ω (AC Impedance)
Auxiliary Ground < 1.0 Ω (AC Impedance)
Equipotential Bonding < 1.0 x 109 Ω
Common Point Ground < 1.0 Ω (AC Impedance)
Personnel Grounding
Wrist Strap System < 35 x 106 Ω
ESD S1.1
Stainless Steel
Ohmmeter Wrist
Electrode
Strap

Ground
Cord

Drawing compliments of 3M
Personnel Grounding
Flooring / Footwear System
Resistance (ESD STM 97.1) < 35 x 106 Ω
Body Voltage Generation
(ESD STM 97.2)
< 100 Volts
Graphical
Recording
Device
Ohmmeter

Charge
Plate
Monitor
Material 91x91cm
91x91cm Drawing compliments of 3M Under (36x36
Drawing compliments of 3M inch) or
(36x36 inch) or Test
Larger Flooring Larger
Flooring
Sample
Sample
Protected Area
• Work Surface < 1.0 x 109 Ω or < 200 Volts
• Wrist Strap Cord 0.8 x 106 - 1.2 x 106 Ω
• Footwear < 1.0 x 109 Ω
• Flooring < 1.0 x 109 Ω
• Seating < 1.0 x 109 Ω
• Ionization (other than < + 50 Volts Voltage Offset
room systems)
• Ionization (room < + 150 Volts Voltage Offset
systems)
Protected Area (Continued)
• Mobile Equipment < 1.0 x 109 Ω
• Continuous Monitors Manufacturer Specification
• Signs Required
• Equipment
• AC Powered Tools < 1.0 Ω

• Battery Powered and < 1.0 x 1012 Ω


Pneumatic Hand Tools
• Garment 1 x 105Ω > Resistance <1 x 1011Ω
• Humidity 30% < RH < 70%
Packaging
• Conductive < 1.0 x 104 Ω
• Dissipative > 1 x 104 to < 1 x 1011 Ω
• Shielding < 50 nJ
• Low Charging ESD ADV 11.2
• Protective Material Marking EOS/ESD S8.1
Work Surfaces (ESD S4.1)

R < 1 x 109 ohm

Ohmmeter 3”
D
A

To: A, B, C, D, E

B C
2”

2”

Resistance-to-Groundable Point - New Installations


Slide compliments of 3M
Work Surfaces (ESD S4.1)

R < 1 x 109 ohm


TABLE TOP TABLE TOP

10”
10”

TABLE TOP TABLE TOP

2” 2”

2” 2”

Resistance Point-to-Point - Installed Work Surfaces


Slide compliments of 3M
Footwear (ESD S9.1)

R < 1 x 109 ohm

Ohmmeter
One Sock Inside the Other Filled with Shot

Aluminum
Foil

Footwear Under Test

Insulator
Stainless Steel
Plate

Slide compliments of 3M
Flooring (A N SI/ESD S7.1)

R < 1 x 109 ohm

Electrode (5 lbs, 2.5” dia)

Groundable Point A Groundable Point B

2 4

1 6 5

Resistance to Groundable Point Measurement


Slide compliments of 3M
Flooring (A N SI/ESD S7.1)

R < 1 x 109 ohm

Position Position

A 3 B

2 4

1 6 5

Point to Point Resistance Measurement


Slide compliments of 3M
Seating (ESD STM 12.1)

1 x 105 ohm < R < 1 x 109 ohm

Ohmmeter Rear of Back Rest


Back Rest

Electrode A
Seat

Foot Rest

Base
Electrode B

Conductive Casters
Drag Chain
5”x10” Foot Plate

Resistance to Groundable Point Positions


Slide compliments of 3M
Seating (ESD STM 12.1)

1 x 105 ohm < R < 1 x 109 ohm

3 4 3 4
1 1
2 5 2 5

Seat Back Rest

1 2

1
2 3

Rear of Back Rest Arm Rest

Any Location 3

4 Base with Plastic


Covering
2
Note: If base is bare
metal, test only at
5 Position 1.
1
Foot Rest

Seating Component Test Positions Slide compliments of 3M


Ionization (ANSI EOS/ESD S3.1)

Offset Voltage < + 50 volts


Center Line of Test Points

60 cm
(24”)

Overhead Ionizer

Air Flow

45 cm
(18”)

Charge Plate
Monitor (CPM) 15 cm
(6”)
6”x6” Plate

Work Surface

Test Locations for Overhead Ionizer


Slide compliments of 3M
Ionization (ANSI EOS/ESD S3.1)

Offset Voltage < + 50 volts

30 cm 30 cm 30 cm 30 cm
(12”) (12”) (12”) (12”)

Bench Top Ionizer

15 cm
Air Flow
(6”)

Work Surface

Test Locations for Bench Top Ionizer


Slide compliments of 3M
Garment (ESD STM 2.1)

1 x 105 ohm < R < 1 x 1011 ohm

Ohmmeter Insulators
Clamps

Sleeve to Sleeve Resistance


Slide compliments of 3M
Garment (ESD STM 2.1)

1 x 105 ohm < R < 1 x 1011 ohm

Ohmmeter

Five Pound Electrodes

Insulative Surface

Point to Point Resistance


Slide compliments of 3M

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