Beruflich Dokumente
Kultur Dokumente
20 to
Semiconductor Manufacturing
Carl Newberg
River’s Edge Technical Service, Inc.
www.retsinc.com
Acknowledgements
We would like to acknowledge Patrick Lim of
3M for many of the drawings used in this
presentation.
Many thanks to Patrick and 3M for their
willingness to allow the use of their
drawings.
What Is ANSI/ESD S20.20?
l Equipment Manufacturers
l Semiconductor Manufacturers/Processors
ANSI/ESD S20.20
Equipment Manufacturers Semiconductor Manufacturers
l Program ensures that l Prevents equipment lockup
equipment is manu- problems
factured in a high quality l Increased yield due to ESD
ESD controlled environ- damage and electrostatic
ment charge contamination
l Protects Customers from l Protects customers from
equipment delivery latent failures
delays and latent failures
ANSI/ESD S20.20 & SEMI E-78
l Notexplicitly stated
l SEMI E-78 ties into S20.20
– Grounding/Bonding
– Electric Fields
l Materials
l Ionization
Ground
Cord
Drawing compliments of 3M
Personnel Grounding
Flooring / Footwear System
Resistance (ESD STM 97.1) < 35 x 106 Ω
Body Voltage Generation
(ESD STM 97.2)
< 100 Volts
Graphical
Recording
Device
Ohmmeter
Charge
Plate
Monitor
Material 91x91cm
91x91cm Drawing compliments of 3M Under (36x36
Drawing compliments of 3M inch) or
(36x36 inch) or Test
Larger Flooring Larger
Flooring
Sample
Sample
Protected Area
• Work Surface < 1.0 x 109 Ω or < 200 Volts
• Wrist Strap Cord 0.8 x 106 - 1.2 x 106 Ω
• Footwear < 1.0 x 109 Ω
• Flooring < 1.0 x 109 Ω
• Seating < 1.0 x 109 Ω
• Ionization (other than < + 50 Volts Voltage Offset
room systems)
• Ionization (room < + 150 Volts Voltage Offset
systems)
Protected Area (Continued)
• Mobile Equipment < 1.0 x 109 Ω
• Continuous Monitors Manufacturer Specification
• Signs Required
• Equipment
• AC Powered Tools < 1.0 Ω
Ohmmeter 3”
D
A
To: A, B, C, D, E
B C
2”
2”
10”
10”
2” 2”
2” 2”
Ohmmeter
One Sock Inside the Other Filled with Shot
Aluminum
Foil
Insulator
Stainless Steel
Plate
Slide compliments of 3M
Flooring (A N SI/ESD S7.1)
2 4
1 6 5
Position Position
A 3 B
2 4
1 6 5
Electrode A
Seat
Foot Rest
Base
Electrode B
Conductive Casters
Drag Chain
5”x10” Foot Plate
3 4 3 4
1 1
2 5 2 5
1 2
1
2 3
Any Location 3
60 cm
(24”)
Overhead Ionizer
Air Flow
45 cm
(18”)
Charge Plate
Monitor (CPM) 15 cm
(6”)
6”x6” Plate
Work Surface
30 cm 30 cm 30 cm 30 cm
(12”) (12”) (12”) (12”)
15 cm
Air Flow
(6”)
Work Surface
Ohmmeter Insulators
Clamps
Ohmmeter
Insulative Surface