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Abstract
Due to the high precision and good surface quality that it can give, EDM is potentially an important process for the fabrication of
micro-tools, micro-components and parts with micro-features. However, a number of issues remain to be solved before micro-EDM can
become a reliable process with repeatable results and its full capabilities as a micro-manufacturing technology can be realised. This paper
presents some recent developments in micro-EDM in its various forms (wire, drilling, milling and die-sinking) and discusses the main
research issues. The paper focuses on the planning of the EDM process and the electrode wear problem. Special attention is paid to factors
and procedures influencing the accuracy achievable, including positioning approaches during EDM and electrode grinding.
© 2004 Elsevier B.V. All rights reserved.
0924-0136/$ – see front matter © 2004 Elsevier B.V. All rights reserved.
doi:10.1016/j.jmatprotec.2004.02.008
D.T. Pham et al. / Journal of Materials Processing Technology 149 (2004) 50–57 51
Parts
Drilling Threading Manufacturing Micro Machine Path Dimensions
Holes (WEDM) 3D Electrode Generation
Jigs and
Stationary Rotating Guided running Fixtures
Block Disk Wire
Electrode
Wear and
Machining strategies
2.1. Handling of electrodes and parts 2.2. Electrode and workpiece preparation
In wire EDM machines, the trend to reduce the diam- With micro-wire EDM, the main issues in workpiece
eter of the wire used has caused many problems with preparation relate to the production of small holes used for
handling electrodes and parts. Initially, existing wire ma- threading the wire into the workpiece. Depending on the pro-
chines were adapted to take smaller diameter wires (down file to be machined, these holes could have micro-diameters
to 0.03 mm), but this demanded significant time for ma- with a very high-aspect-ratio. Usually they are produced ei-
chine preparation. The distance from the spool position ther by drilling or EDM drilling. The accuracy of position-
to the threading nozzle was long, and caused a great deal ing of the hole(s) with respect to the measuring point should
of inconvenience for the installation of the wire. The dy- be high. This is to ease the automatic threading procedure
namic forces on the brakes could not be taken easily by and to avoid short-circuiting after threading, although au-
the very thin wire. This resulted in frequent wire breaks, tomatic threading through such holes, even on specialised
which required manual intervention. Even on the newly micro-wire machines, is difficult.
developed micro-wire machines, manipulating and han- When die-sinking of micro-features is required, one or
dling of wires with diameters as small as 0.02 or 0.03 mm more electrodes is produced in advance usually either by
can be difficult. When micro parts are manufactured on micro-milling or by EDM. In this case micro-features ma-
a wire machine, handling of the parts can also be chal-
lenging. Special measures should be considered after a
separation cut to avoid losing parts into the tank of the
machine.
In micro-EDM die-sinking, drilling or milling, different
techniques and devices can be employed to help handling
and manipulating small electrodes and parts. For instance,
the electrodes mainly used for EDM drilling and milling
are W (tungsten) or WC (tungsten carbide) rods or tubes,
of diameters within the range 0.1–0.4 mm, and their han-
dling is difficult as they can be easily damaged. Therefore,
sub-systems are incorporated into micro-EDM machines for
on-the-machine manufacture and holding of the required
micro-electrodes. The most common sub-systems are ce-
ramic guides and dressing units such as wire electro dis-
charge grinders (WEDG) (Fig. 2). Fig. 2. Dressing unit and ceramic guiding system.
52 D.T. Pham et al. / Journal of Materials Processing Technology 149 (2004) 50–57
chined onto the electrode should be offset with the spark sons for the limited application of micro-EDM milling to the
gap. Thus the feature size is further diminished which may machining of complex 3D cavities is the difficulty of gener-
cause distortion of the form, even making the geometry im- ating tool paths using existing CAM systems. In particular,
possible. Production of such 3D profile electrodes is costly those systems do not permit electrode wear compensation,
and time consuming. nor support variation of the slice thickness or allow the di-
Trajectory EDM (EDM milling) uses a simple shaped rection of cut to vary with each slice. Attempts to address
electrode, rod or tube of diameter between 0.1 and 0.4 mm. these issues have been reported [2].
The electrode can be EDM ground if a smaller diameter is
required. As mentioned previously, to avoid handling diffi- 2.4. Measurement
culties and error stack-up when the electrode is manufac-
tured externally to the EDM machine, additional devices are Measuring the dimensions or the surface quality of
used to prepare the electrode on the machine. The working micro-features is not an easy task. There are not even
electrode is eroded against a sacrificial electrode in an op- standardised methods of determining the surface rough-
eration known as EDM grinding. Three different types of ness, which is one of the most important characteristics for
sacrificial electrodes are used (Fig. 3). A problem is that the micro-tooling.
shape, dimension and roughness of the ground electrode is Estimation of the recast layer and heat-affected zone,
not easy to control [1]. which affect the properties of the machined surface, requires
specialised equipment [4].
2.3. EDM process On-the-machine measurement of electrode and fea-
ture dimensions is necessary to achieve good accuracy in
Process planning for micro-EDM should be considered micro-EDM. This is because after a part that has been taken
very carefully, as feature sizes are very small and so are the out of the machine for measurement is reinstated for more
tolerances of the machined surfaces. During the preparation machining, the resetting error will drastically affect the final
stage and the machining process itself, a number of errors accuracy of the machined features. Work on on-line fea-
occur which may lead to disappointing results. These errors ture and electrode measurement has already been reported
are due to equipment imperfection on the one hand and the [1].
stochastic nature of the sparking process on the other.
Many papers target ways of optimising EDM performance
measures like the material removal rate (MRR), tool wear 3. Sources of errors
rate (TWR) and surface quality (SQ) [3]. Process parameters
for micro-EDM are still at the development stage and their To describe the typical sources of errors and their cumu-
effects on performance measures have yet to be clarified. Be- lative effect on the final accuracy, single-pass drilling of a
cause of the stochastic thermal nature of the EDM process, it small hole using a dressed electrode will be used as an ex-
is difficult to explain all of those effects fully. The optimisa- ample.
tion of parameters is based on process analysis to reveal the The achieved diameter H of the hole depends on the di-
influence of each process variable on the desired machining ameter of the effective dressed electrode diameter d and the
characteristic [3]. The lack of information in this field is the spark gap ge (Fig. 4).
main reason for the inability to develop knowledge-based
systems to help the planning of micro-EDM operations. H = 2ge + d (1)
Despite the use of advanced CNC controllers and the high
degree of automation of EDM machines, there is still a lack The deviation from the nominal H (H) is function of vari-
of CAM tools to support micro-EDM. One of the main rea- ations in the spark gap ge and the effective dressed elec-
D.T. Pham et al. / Journal of Materials Processing Technology 149 (2004) 50–57 53
YH
3.1. Machine errors
X
Xpos Ypos
d Yset 3.1.1. Accuracy and repeatability of positioning
The accuracy and repeatability of positioning of the ma-
Fig. 4. Achieved dimensions.
chine employed is a major source of errors. Using a laser
interferometer, the accuracy and repeatability of positioning
gmeas of a micro-EDM die-sinking machine was measured accord-
D/2 ing to ISO 230-2:1997 and some of the results are given in
Table 1.
workpiece To machine a micro-hole at a specific position (Xpos ,
Xmeas Ypos ), multiple dressed electrodes might be required and
Xset therefore the accuracy of positioning of the machine will
mainly affect the position of the hole, while the repeatabil-
Fig. 5. Setting up process. ity of positioning will impact on the size and shape of the
hole.
trode diameter d. On a specific machine, with a certain accuracy and re-
peatability of positioning, the only way to improve Xpos
H = 2ge + d (2) and Ypos is to adopt a unidirectional approach to the hole.
The position of the hole is given by the following equations
directly derived from Fig. 4. 3.1.2. Measuring cycles errors (∆Xmeas , Ymeas , D)
During the setting up of the workpiece, when electrical
XH = Xpos − Xset , YH = Ypos − Yset (3) contact occurs between the electrode and the workpiece, a
In order to set up the workpiece position in the work area, the contact signal is registered by the machine system processor.
machine spindle which is an electrode of nominal effective The processor has set priorities in checking each machine
diameter (D) is employed as a probe. It should be noted that status signal, which means that the checking of the contact
the use of external probes or other set-up devices is ruled signal is not carried out continuously. There is a time interval
out because it would require reattachment of the high-speed (tmeas ) between each signal check. This causes an error in
spindle and readjusting of the ceramic guide and therefore determining the position of the workpiece when measuring
introduce more errors. The set-up process is represented in Xmeas and Ymeas . If the speed of approaching the surface is
Fig. 5. Vmeas , the variation will be:
Xmeas (Ymeas ) = Vmeas tmeas (8)
XH = Xpos − Xmeas + 21 D + gmeas (4)
Usually the contact signal is checked every 2–5 ms (depend-
ing on the controller). Obviously, to minimise the error the
YH = Ypos − Ymeas + 2 D + gmeas
1
(5)
speed should be as low as possible but high enough to avoid
The deviations are respectively: stick-slip. For example, if tmeas is 3 ms and the measuring
speed is from 1 to 20 mm/min, the calculated variation is
XH = Xpos + Xmeas + 21 D + gmeas (6) 0.05–1 m.
YH = Ypos + Ymeas + 21 D + gmeas (7) During the measuring cycle, voltage is applied between
the table and the spindle. The machine moves until elec-
The accuracy of the position of the hole will depend on trical contact is made. As the surfaces tend to oxidise, a
the accuracy of positioning of the machine (Xpos , Ypos ), different gap or different contact pressure is needed for the
Table 1
Repeatability and accuracy of positioning
Repeatability of positioning Accuracy of positioning
Y Dressing Variation yd will arise due to the machine accuracy and
d/2 repeatability of positioning. An obvious way of reducing
yd
gd yd during the dressing process is always to approach the
position from the same direction (unidirectional approach).
Another way of limiting the error is to identify an area
yunit on-the-machine and to fix the dressing unit where the re-
Erosion point X peatability of positioning is highest.
chining of each layer the original shape of the electrode is Initial Zcontact Resulting Cavities
area of the electrode, the area of the layer surface, the depth Programmed Path 3
of cut and the volumetric wear ratio which are assumed
to be constant. Any variation in one of these values could
Reset Zcontact No wear
introduce discrepancies in the machined layer, and would
affect the values of the parameters for the next layers. Programmed Path 4