Beruflich Dokumente
Kultur Dokumente
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Atom Probe Tomography (APT)
• Field evaporation technique that permits 3D atom-
by-atom reconstructions
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Overview
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Specimen Preparation Techniques
• Electropolishing
• Dual-beam Focused Ion Beam (FIB) – Scanning Electron
Microscope (SEM) instrument
• Other fabrication techniques
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Electropolishing
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Manual Electropolishing
Electropolish
APT Needle-Shaped Specimen
Cut
Bulk
Schema9c courtesy of Mr. Richard Martens (U. Alabama)
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Specimen Blanks
Blanks from a
thin ribbon or sheet
Miller and Smith (1989)
Wires or Whiskers
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Manual Electropolishing Station
Suspended
Light Source Specimen Blank
Stand
Fume Exhaust Vent
Counter
Electrode
CuveDe
w/ Electrolyte
VerFcal
TranslaFonal
Control
Stereomicroscope
Power Supply and Control
Power Supply
and Control
Specimen Blank
and Loop Counter
Electrode
OpFcal
Microscope Adjustable
Actuators
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Manual Electropolishing Procedure
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Manual Electropolishing Method
Blank IniFal
Polish
Needle
Electrolyte
Final
Polish
Miller and Smith (1989)
Original schematic courtesy of Dr. Matt Bender (Northwestern)
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Manual Electropolishing Method
NUCu-140-1 Aged 1024 hours @ 500 oC
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Automated Electropolishing Station
Loop
Counter Electrode
Beaker
w/ Electrolyte
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Example Electrolytes
Perchloric acid is hazardous and requires a dedicated and certified fume hood. 16
Electropolishing Artifacts
• Inexpensive equipment
• Can easily repolish and resharpen blunt or fractured
needles
• Can rapidly make specimen blanks
• Can rapidly make multiple needles
• No Ga+ ion implantation
• No embrittlement
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Limitations
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Questions?
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Backup Slides
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Focused Ion Beam (FIB)
Instrument
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Focused Ion Beam (FIB)
Instrument
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Focused Ion Beam (FIB)
Instrument
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Focused Ion Beam (FIB)
Instrument
• Annular Milling
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Focused Ion Beam (FIB)
Instrument
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Focused Ion Beam (FIB)
Instrument
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Focused Ion Beam (FIB)
Instrument
• References
• G. B. Thompson, M. K. Miller, and H. L Fraser, “Some aspects of atom probe specimen
preparation and analysis of thin films”, Ultramicroscopy, 100 (2004) 25 – 34.
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In situ Fabrication
• In situ fabrication
• Fabrication of tips through catalytic growth methods, e.g. nanowires
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