Associate Professor Usman Institute of Technology Karachi. BE (Elect.) NED University, 1991 MSEE (Elect. & Communications) University of Engg. & Technology Lahore 1998 (with thesis) Field Experience: 9 Years (including both electrical power with NESPAK, and Electronic Communication Engg. with M/s SEW Lahore Teaching Experience: 17 Years with UIT Total Experience 9+17= 26 Years FALL 2018 NED 2 The Course…
An introduction to the enchanting
world of micro (extremely small in size) electromechanical systems. Devices we cannot even see with our eyes….but they do exist and work upon the electromechanical theory. Imagine it to be a complete processing factory shrunk to the size of a chip! We would explore how such systems work and how they are fabricated. FALL 2018 NED 3 Suggested References….
1) MEMS & Microsystems: Design, Manufacture
and Nanoscale Engineering by Tai Ran Hsu 3rd Edition, 2012 (2ND edition also valid) 2) Nano and Micro Electromechanical Systems: Fundamentals of Nano and Microengineering by Sergey Edward Lyshevski 4th Edition , 2015 3) Micromanufacturing & Nanotechnology by N. P. Mahalik 3rd Edition , 2016
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MEMS & MICROSYSTEMS
Components of sizes…1 micrometer
to 1 millimeter A MEMS performs some engineering function by electromechanical or electrochemical means A typical MEMS would contain two principal components: a) A sensing or actuating element b) A signal Transmission Unit FALL 2018 NED 5 MEMS & MICROSYSTEMS
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Micro Sensors Built to sense the existence & intensity of certain physical, chemical or biological quantities such as: a) Temperature b) Pressure c) Force d) Sound e) Light f) Nuclear Radiation g) Magnetic Flux h) Chemical Compositions
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Micro Sensors: Advantages Sensitive & Accurate Require minimum amount of sample Can be mass produced in large volumes
Common Micro Sensors:
Bio sensors Chemical Sensors Optical sensors Thermal Sensors Pressure Sensor FALL 2018 NED 8 Microsensors: An example THE PRESSURE MICROSENSOR Silicon diaphragm of a few micrometers Change in pressure sensed by the diaphragm thru its deflection Micropiezoresistors implanted in the diaphragm convert this deflection into change of electrical resistance which can be transformed into a corresponding voltage change! Thus Micropiezoresistors are actually part of the Transconduction unit
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Micro Pressure Sensor Packages
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Chemical Microsensors Developed for sensing toxic chemicals or gasses emission such as: a) CO (Carbon Monoxide) b) CO2 (Carbon Dioxide) c) NO (Nitric Oxide) d) O3 (Ozone) e) NH3 (Ammonia)
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Biomedical Sensors or Bio Sensors Primarily used for diagnostic analysis Miniature size means minimum sample requirement Produce faster results Since mass production in batches is possible hence comparatively lower cost Most of these sensors are disposable, hence no maintenance cost involved
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Biomedical Sensors or Bio Sensors Used in: Analytical Chemistry
Biomedicine
Genetic Engineering
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MEMS as a Microactuator
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Electrostatic Actuation
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Definition of a Microsystem The micro, Macro and Mesoscale
No clear definition of the Mesoscale, one
definition suggests that Mesoscale means sizes in the range of mm to cm
Another definition suggests that a
microsystem must contain:
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Definition of a Microsystem
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Microsystems: Microaccelerometer
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Intelligent Microsystems
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Microsystems: Intelligent Inertia Sensor
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Microsystems: Packaged sensor on chip
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Microsystems: Microgears
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Microsystems: A 100µm Pitch Microgear Set
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Micromotors: Nickel based, Rotor dia=700µm, 250µm dia gear wheel, Rotor/Stator Clearance =4µm, Unit Height=120µm
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Microturbines: Nickel based, rotor dia = 130µm, Axle, rotor gap=5µm, Max rot. Speed=150,000 rpm with average life time =100 million rotations