ULTRA - HIGH PURITY POINT - OF - USE REGULATOR HPGR-400 Series Catalog No. = H-HPGRAOOS ‘Aug. 2008 Features +s Single Stage ‘ ‘+ Low Particle Entrapment HPGR-400. = '* True metal to metal body to diaphragm seal Long lfe cycle '* 10Ra or 5Ra microinch internal surface '» Free poppet type (400) (© Tied diaphragm type (410) ‘© Internally springless & threadless (410) ‘© 360 positionable captured vent bonnet & adjustable stop to limits outlet (410) ‘* Maximum inlet pressure range : 3500 or 600psig (241 or 41barg) ‘© Outlet pressure range : 1-30, 1-60, 1-100, 1-150, 1-250psig, (124, 1-4.2, 17.0, 1-10.5barg) ‘The HPGR-400 Series is a high purty gas regulator designed to provide the optimum in performance and cleanliness for high purty delivery systems in semiconductor applications. The HPGR-410 Series is internally threadless and springless type, and minimized particle occurrence due 19 low internal volume and is a high purity gas regulator designed to provide the optimum in performance and cleanliness for high purity delivery system in semiconductor applications, be used with corrosive and non-corrosive gases in process gas systems for ‘Semiconductor manufacturing facilities and is a single stage regulator operated by the load spring which interacts with a main valve to control outlet pressure. The HPGR-400 and 410 Series regulators are metal-to-metal diaphragm to body sd provides enhanced leak integrity and a positive sealing effect by bonnet seal and vent Bonnet seal components.(410) ‘The wetted surface are finished to 10Ra or SRa microinch to minimize the generation of particles, ‘Assembly, testing and packing are performed in a class 10 cleanroom. 9% HPGR-410 listed in wales ZEZJ HY-LOK CORPORATION @) ©MATERIALS OF CONSTRUCTION co> [el eem [semcer HPGR-410 ed ++ Boor tte agro es |: 2 [Valve Bush(400) [Type 316L/ A479 ® 3 ae Smt [Tye aL AT Man Vat Risestaxaara | 0 seat porte > seat raer@on) [Type 180 TAa7O 3 [Diaphragm | [Elgiloy®™ owt Sel Gana [PTFE i@ IL ornetRing __[Stantes Swarso | 1 —C> : cot aor gs Hust sod [Staves Sea S00 = eee e- lomo wasner [oress 816 [Bonnet [Brass 7016 | te)pdus Sew [Staness Sted 08 o—t toes fsancssseasce | ©-C OD ¢ . [T7}ionewnea [Pate] ® Tellabe Paste tops soy |stats Sea 307 a [20a Bom Seay [Type 16k aa» 7 21] Valve Nuit4t0) [Stainless Steel 304 S&S 22 vent Romer [Brass 16 oo e@ 2 [Bone Sea No TO [Bras B16 nee Wlted Components 28 DIMENSION Al dimensions are in millimeters and Subject to change. HPGR-A10 Usted in wales crGR-410) 2 LEED vio conponarion| HPGR - 400Series SPECIFICATION FLUID MEDIA: Al gases corrosive or non-corrosive for high purty system. ‘When using other media , Please Contact us. PRESSURE RATING : Per criteria of ANSIASME 831.3 Maximum rated inet = 3500 or 600psig (241 or 41 barg) Outlet pressure range 1-30, 1-60, 1-100, 1-180, 1-250 psig (24, 142, 1-70, 1-105, 1178 barg) DESIGN PROOF PRESSURE : 150% maximum operating pressure MATERIALS IN CONTACT WITH MEDIA : Body 3161 $8 VOD / AOD /VIM (BA), 316L SS VIM/ VAR (EP) Valve seat 800 fo 1000psig - PCTFE, 3500psig- Vespel” Diaphragm — ~ Hastlloy €-22 Elloy Main valve,Sush Spring Seat haldor ---—~ 316L SS OTHER PARAMETERS Flow capaci = Gv =0.06(9500 psig), Cv = 0.15(600 psig) = 4x0" atm ec soe He = 10Ra or $Ra microinch (0.28 oF 0.1358) Cetfied maximum inboard leak rate Internal surface finish OPERATING TEMPERATURE : PCTFE Seat Vespel® Seat 40°F to +140"F (40°C to 480°C) “40°F lo +350°F (40°C 0 +17°C) WEIGHT : 20bs (0.9Ko) FLOW CHART REGULATOR DISCHARGE CHARACTERISTICS CURVES PI: Inlet Pressure 100189) 10139) 50182) 99162) 8 sos) eoys.5) a 3 £ reas) 2 rus) @ 604.1) @ 604.1) $ soe 8 sora) 5 4028) 5 sors) 5 ‘This characteristics 5 save. 2042. 3 san carve char shows S002) 20014) fhe change or eop 204) intwo Difernt pressure 1080) asthe flowrate hereases 401050 ‘nthe inlet presse ° Decree ° o 20 40 60 80 100 o 5 0 1 20 2 90 FLOW RATE -LPM FLOWRATE LPM (HPGR-400) vcs) DEED vin conponanion 3