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J. Photopolym. Sci. Technol., Vol. 27, No. 3, 2014
3. Results
3.1. Surface observation
The scanning probe micrographs of PET films
are shown in Fig. 2. In addition, the parameters of
surface roughness determined by the SPM images,
i.e., the values of Ra and Rq, were summarized in
Figs. 3 and 4, respectively. The Ra values of the
PET films were as follows: (A) unexposed; 1.8 ±
0.1 nm, (B) exposed in the low humidity condition;
2.2 ± 0.1 nm, and (C) exposed in the high humidity
condition; 3.6 ± 0.4 nm. The Rq values of the PET
films were as follows: (A) unexposed; 2.4 ± 0.1
nm, (B) exposed in the low humidity condition; 5.7 Fig. 3. Arithmetic mean roughness (Ra) of PET film
± 0.3 nm, and (C) exposed in the high humidity surfaces: (A) untreated, (B) after exposure to active
condition; 7.0 ± 0.7 nm. Both Ra and Rq values of oxygen species in the low humidity condition, and (C)
the films after the exposure of the active oxygen after exposure in the high humidity condition. The data
species in the high humidity condition were are the mean ± SD; n=5. “†” indicates a significant
significantly larger than those in the low humidity difference by means of Student’s two-tailed t-test (P <
condition. 0.05) with Bonferroni-Holm correction.
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J. Photopolym. Sci. Technol., Vol. 27, No. 3, 2014
4. Discussion
It is known that active oxygen species such as
excited singlet oxygen [O(1D)], ozone (O3),
hydroxyl radicals (OH*), and hydrogen peroxide
(H2O2) have long lifetime or high oxidization
abilities [8-16]. Generation mechanisms of these
active oxygen species have already been reported
as follows [11-16]. Firstly, an oxygen molecule is
decomposed into two ground-state oxygen atoms
by irradiation with 185 nm UV light. An O3
molecule is generated by the binding one of these
atoms to another oxygen molecule. The
Fig. 8. Transmittance of PET films at the wavelength of
excited-state oxygen atom and O(1D) are generated
550 nm: (A) untreated, (B) after exposure to active
by exposure of 254 nm UV light to the O3. A OH*
oxygen species in the low humidity condition, and (C)
is generated when the O3 is decomposed and binds after exposure in the high humidity condition. The data
to a hydrogen atom. The OH* is also generated by are the mean ± SD; n=3. “†” indicates a significant
exposing water molecules to 185 nm UV light. difference by means of Student’s two-tailed t-test (P <
O(1D) and OH* were found in the atmosphere 0.05) with Bonferroni-Holm correction.
when two wavelengths (185 and 254 nm) of UV
lamps were irradiated due to analyses of an
electron spin resonance (ESR) method. low humidity condition. It is considered that the
Concentrations of O(1D) and O3 generated under amount of OH* contributed to the etching behavior
low humidity condition were much higher than of the fluorocarbon thin film [21]. In this study, the
those generated under high humidity condition, amount of OH* is also considered to contribute the
and the concentration of OH* generated under low etching behavior of the PET film substrate.
humidity condition were much lower than that Contact angle of water droplet on the PET film
generated under high humidity condition [20]. surface and surface roughness after the treatment
Furthermore, a fluorocarbon thin film deposited in the high humidity condition increased compared
onto a quartz crystal oscillator prepared by r.f. to those in the low humidity condition, and
sputtering was used for investigation of etching transmittance within a region of the visible light of
and characteristics of an organic material due to the PET film after the treatment in the high
these active oxygen species. The etching rate under humidity condition decreased compared to that in
high humidity condition was higher than that under the low humidity condition. In addition, the
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J. Photopolym. Sci. Technol., Vol. 27, No. 3, 2014
amount of C-C bonds of the PET film surface after 5. Y. Sun, C. Li, Z. Zhiyong, W. Liu, andS. Yang,
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5. Conclusions Phys., 4 (2004) 1461.
Active oxygen species were generated via 12. L. T. Molina, and M. J. Molina, J. Geophys.
185/254 nm UV lights irradiation under conditions Res., 91 (1986) 14501.
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Changes in their surface characteristics were 14. D. S. Stafford, and M. J. Kushner, J. Appl.
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active oxygen species generated under high and 15. J. A. Manion, R. E. Huie, R. D. Levin, D. R.
low humidity conditions, and we evaluated effects Burgess Jr., V. L. Orkin, W. Tsang, W. S. McGivern,
of the humidity conditions on the surface J. W. Hudgens, V. D. Knyazev, D. B. Atkinson, E.
modification. The PET film surface can be Chai, A. M. Tereza, C-Y. Lin, T. C. Allison, W. G.
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(185 and 254 nm) of UV lights breaks polymer Technology, Gaithersburg, U. S., 2008) NIST
chains and oxidizes the PET film surface more Standard Reference Database 17, Version 7.0 (Web
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16. D. L. Baulch, C. T. Bowman, C. J. Cobos, R.
Acknowledgements A. Cox, Th. Just, J. A. Kerr, M. J. Pilling, D.
This work was financially supported by a Stocker, J. Troe, W. Tsang, R. W. Walker, and J.
Grant-in-Aid for A-STEP from the Japan Science Warnatz, J. Phys. Chem. Ref. Data, 34 (2005) 757.
and Technology Agency (JST). The authors are 17. Y. Teramoto, R. Ono, and T. Oda, Jpn. J.
thankful to Mr. Miyamoto and Mr. Haraki of the Appl. Phys., 111 (2012) 113302.
Technical Service Coordination Office of Tokai 18. S. F. Adams, C. A. DeJoseph Jr., C. C. Carter,
University for the SPM and XPS measurements. T. A. Miller, and J. M. Williamson, J. Phys. Chem.
A. 105 (2001) 5977.
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