Beruflich Dokumente
Kultur Dokumente
Neurotology
Guest Editor
Fan-Gang Zeng, Irvine, Calif.
Contents
75 Editorial
Harris, J.P. (La Jolla, Calif.)
76 Editorial
Zeng, F.-G. (Irvine, Calif.)
Original Papers
Editorial
As this special issue of Audiology & Neurotology ushers Around the same time, Eric Drexler proposed that the
in a new year, the focus on nanotechnology is intended to biological machinery that already exists in nature could
provoke thoughtful discussion of new areas for research be adapted through molecular manufacturing. He also
and development in our field. A broad definition of nano- called this approach ‘nanotechnology’ and envisioned
technology provides the backdrop for this issue: manufacturing high-performance machines out of a mo-
‘The creation of functional materials, devices and sys- lecular carbon lattice. Even as some scientists have an-
tems through control of matter on the nanometer length ticipated the revolutionary changes that nanotechnology
scale and exploitation of novel phenomena and proper- might bring, controversies associated with nanotechnol-
ties (physical, chemical, biological) at that length scale’ ogy have not been small scale – particularly as warnings
(http://www.ipt.arc.nasa.gov/nanotechnology.html). surfaced of the potential for developing a self-replicating
Given that the scale of a nanometer is less than 1/1000 nanorobot with the capacity to destroy the environment.
of the width of a human hair, the field of nanotechnology Even as scientific debate continues regarding the use-
naturally conjures up a myriad of questions about appli- fulness and safety of nanotechnology, some principles of
cation and feasibility. nanotechnology are already shaping biomedical research.
Some background and explanation for why the topic For example, innovative research is already funded and
of nanotechnology is both contemporary and momentous underway on creating synthetic ciliated surfaces through
may be useful to our readers. The origins of nanotechnol- the creation and actuation of sheets of nanorods and in-
ogy arose from the theoretical work of several scientists. vestigating the impact of light-driven molecular motors
In the 1950s, Richard Feynman proposed a new small for use in artificial muscle systems. In this issue, we are
scale future that included manipulating and controlling publishing seven articles that describe how various prin-
atoms. Feynman’s theory has been confirmed by the dis- ciples and practices of nanotechnology are being applied
covery of new shapes for molecules of carbon including to the human ear and hearing. Our goal is to both en-
carbon nanotubes, which are far lighter but stronger than lighten our readers about this new research and to stimu-
steel with superior heat and conductivity characteristics. late questions and dialogue about the possibilities for
In 1974, Norio Taniguchi coined the term ‘nano-technol- nanotechnology in our field.
ogy’ to refer to production technology or micromachining
with accuracy and fineness on the scale of the nanometer. Jeffrey P. Harris, La Jolla, Calif.
Editorial
Like integrated circuits and personal computers, the cated a directional microphone for hearing aids. Bach-
emerging micro- and nanotechnologies will fundamental- man and colleagues use polymers to produce microme-
ly change the way we live and work in the future. There chanical resonator arrays that may serve as the micro-
are two reasons why we should pay attention to the devel- phone and frequency analyzer for an analog cochlear
opment and impact of these technologies. Firstly, we implant. Wittbrodt and colleagues have developed a
should prepare for the changes the technologies will likely physical model of the human cochlea using microfabrica-
bring about to our profession and service. Secondly, as tion. Shkel and Zeng describe a microelectromechanical
audiologists and neurotologists, we deal with perhaps the system vestibular implant prototype. The usage of mag-
most sophisticated microelectromechanical system that netic nanoparticles for inner ear targeted molecule deliv-
nature ever built, namely the ear, which can sense vibra- ery and middle ear implants is described by Kopke and
tions as small as 0.5 nm. Engineers are not only learning coworkers. Combining microfluidics and transfected
the operational principles of the ear to enhance their tech- cells, Ryan’s group have conducted micropatterning stud-
nological development, but also how to apply the tech- ies to control auditory nerve development and growth.
nologies to addressing a host of clinical issues in otology. Although the papers were invited, each went through
The present special issue, consisting of seven invited the same rigorous review process as typical papers sub-
papers, showcases potential applications of micro- and mitted to Audiology & Neurotology. We thank the review-
nanotechnologies to audiology and neurotology. Spelman ers and the editorial managers at Karger for their efficient
reviews the development of cochlear implants and dis- and high-quality professional service.
cusses future cochlear electrode arrays. Inspired by the
working of a fly’s ear, Miles and Hoy have microfabri- Fan-Gang Zeng, Irvine, Calif.
a
Sonn [1972].
b
White et al. [1982].
c
The University of Michigan is also working on hybrid arrays that bury silicon sub-
strates in polymeric carriers.
olds occurred between 100 and 400 Hz [Spelman, 1982]. lus: the fibers’ characteristic frequencies are organized in
Despite the frequency-threshold characteristics of neural a spiral whose axis is either parallel or orthogonal to the
fibers, signal processing and interference issues made direction of placement of contacts in the array [Geisler,
clear the necessity to drive the fibers of the auditory nerve 1998]. Modiolar arrays have not been used commercially
with pulses of short duration, indeed, of widths less than at the time of this writing, but are proposed as potential
100 s [Wilson et al., 1991; Rubinstein and Miller, 1999; designs for high-density devices because the modiolar ap-
Rubinstein et al., 1999]. Clear also was the need to de- proach lends itself to the use of silicon substrates [Badi et
velop arrays with large numbers of electrode contacts, to al., 2003; Hillman et al., 2003]. Modiolar electrode arrays
better approximate the design of the auditory system may possibly be the heart of future implants and will be
[Merzenich and White, 1977; Spelman, 1982; Patrick et discussed in more detail below.
al., 1990]. The number of patients who have received brainstem
Modern cochlear implants consist of a microphone or auditory implants is small. Brainstem implants are still
microphones, an external processor, a transcutaneous experimental devices. No commercial device has been
data link, an internal processor and an electrode array. distributed widely. Brainstem arrays will not be discussed
This paper deals solely with the electrode array. Other in this paper.
aspects of the cochlear prosthesis are covered in other Current commercial electrode arrays are placed in the
papers within this issue. The manufacturing techniques, scala tympani of the cochlea. This paper will present a view
producers and basic properties of the major electrode ar- of arrays that have been developed and are currently in use,
rays presented here are summarized in table 1. and describe future designs of the scala tympani array.
Early studies in humans were done with six electrodes The length of the cochlea of the human is about 35 mm
that were inserted into the modiolus of the cochlea [Sim- [Geisler, 1998]. Ideally, a cochlear electrode array would
mons et al., 1964; Simmons, 1966]. That approach has span the entire cochlea, stimulating the full population of
the benefit of bringing electrode contacts into direct prox- auditory neurons that span its length. To excite the speech
imity with the cells of the auditory nerve, lowering the regions of the cochlea, the contacts of the array should stim-
threshold for electrical excitation. It suffers from the ulate neurons whose center frequencies extend from 500
tonotopic organization of the nerve fibers in the modio- to 3000 Hz, that is, the array should span the distance from
UCSF to Advanced Bionics long in the four-channel version, and was longer when it
Robin Michelson and his coworkers began a series of was produced in six-, eight- and twelve-channel models.
studies in animals in the 1960s, resulting in technology All versions were tested in human subjects, and the longer
transfer to the designers of cochlear implants, and then arrays could be inserted surgically to a depth of 25 mm.
to human subjects [Michelson, 1985]. The UCSF arrays The electrode was flexible and tractable for insertion. A
were made with 8 Pt-Ir (90% Pt-10% Ir) electrodes whose newer version of the array was tested as a modiolar-hug-
surfaces were formed into mushroom shapes, and whose ging device that used a central fiber under tension to ap-
carrier was molded to fit snugly into the human cochlea pose the electrodes to the modiolar wall [Jolly et al.,
[Michelson and Schindler, 1981]. The device consisted of 2000].
four paired electrodes of Pt-Ir, with four electrodes placed Med-El still produces its 24-electrode arrays manually,
near the bony shelf of the cochlea and four placed near but may change that approach in the future (fig. 1, vide
the modiolus [Rebscher et al., 1982]. The design took ad- infra).
vantage of the direction of the peripheral processes of the
auditory nerve, producing stimuli that followed along the The French Prosthesis
lengths of the processes. The electrode array was built in- Professor C.-H. Chouard and colleagues introduced a
tegral with its connector to the prosthesis’ internal proces- cochlear prosthesis in the 1970s. Their approach to elec-
sor, the whole assembly being molded of silicone [Reb- trode design that differed somewhat from that of the oth-
scher et al., 1982]. The technology was transferred from er arrays is described here. They used 12-contact Pt-Ir ball
UCSF to Advanced Bionics in 1988, and later became the electrode contacts (0.3-mm spherical diameter) placed in
prototype of the Advanced Bionics electrode arrays, used indentations on a half-cylindrical silicone carrier for im-
in the Clarion® implant system. The array was wedded plantation in an unobstructed scala tympani. In the case
to a four-channel processor; the initial designs were to be of malformed cochleae, they inserted Pt-Ir ball electrodes
driven as dipoles, developing fields that were at an acute into the scala via surgical fenestrations [MacLoed et al.,
angle, but not parallel to the peripheral processes of the 1985]. Cochlear prostheses with 15-contact arrays, based
nerve. The entire assembly was produced by hand. on the Chouard design, are currently produced in France
by MXM Laboratories (Côte d’Azur, France).
Austria to Med-El
Erwin and Ingeborg Hochmair at the Technical Uni- The LAURA Cochlear Implant
versity of Vienna developed a multi-channel, wire bundle The University of Antwerp introduced the LAURA
electrode array with an approach that was different from cochlear implant in 1993 [Offeciers et al., 1998]. The ef-
that of UCSF, Cochlear Corp. and the French [Hochmair- fort was adopted by the Philips Corporation, but has not
Desoyer et al., 1983]. The array was built manually on a been sold worldwide. There are few details available on
tapered silicone carrier with a basal diameter of 0.8 mm the LAURA electrode array. However, the designers of
and an apical diameter of 0.5 mm. It employed eight Pt- the LAURA implant proposed a new electrode array in
Ir contacts arranged so that half were in a modiolar loca- 2003 [Deman et al., 2003]. The array is designed to oc-
tion and half were on the opposite side of the array. The cupy the entire scala tympani as a tapered, space-filling
array did not fill the scala tympani. The array was 16 mm structure and has 48 contacts arranged with 24 contacts
Electrode Contacts
Materials Used More recently, researchers have investigated the ox-
ides of iridium as electrode contacts [Cogan et al., 2003a,
Substrates b]. Iridium oxide electrodes were suggested earlier [Rob-
Cochlear electrode arrays have used silicone rubber blee and Rose, 1990]; no commercial arrays employ them
(dimethylsiloxanes) carriers, Pt-Ir electrode contacts, and at present, although the material is under active investi-
Pt-Ir wires that are insulated with fluoropolymers. The gation by several groups. The oxides of iridium have
References
Arcand B, Friedrich CR: An Articulated Package Berrang PG, Bluger HV, et al: Modiolar hugging Bierer JA, Middlebrooks JC: Auditory cortical im-
for a Cochlear Prosthesis. Ann Arbor, WIMS electrode array. U.S. Patent Office. Epic Bio- ages of cochlear-implant stimuli: dependence
ERC, 2004, p 76. sonics, 2002b. on electrode configuration. J Neurophysiol
Badi AN, Kertesz TR, et al: Development of a nov- Berrang PG, Lupin AJ: Means for implanting a 2002;87:478–492.
el eighth-nerve intraneural auditory neuro- device in the canalis cochlaris. U.S. Patent Of- Bierer JA, Middlebrooks JC: Cortical responses
prosthesis. Laryngoscope 2003;113:833–842. fice. Epic Biosonics, 2002. to cochlear implant stimulation: channel in-
Berrang PG, Bluger HV, et al: Totally implantable Bhatti PT, Pfingst BE, et al: A 128-site, 16-channel teractions. J Assoc Res Otolaryngol 2004; 5:
cochlear prosthesis. U.S. Patent Office. Epic electrode array for a cochlear prosthesis. Ann 32–48.
Biosonics, 2002a. Arbor, WIMS ERC, 2004, p 73.
on the two ears. Operating under an appropriate set of Comparison with Conventional Directional
mechanical properties for the ears, these two modes com- Acoustic Sensing
bine such that they add on the ear that is closer to the
sound source and cancel on the ear that is further from Any system that responds to sound pressure in a man-
the source. With the right choice of mechanical proper- ner that depends on the direction of propagation of the
ties, this effect produces a directionally sensitive response wave must detect the spatial gradient in the pressure. The
in the fly’s ears over a frequency range of about 5 kHz to straightforward methods of creating a conventional pres-
over 25 kHz [Miles et al., 1995]. As shown in the lower sure gradient sensor use either the difference in the re-
schematic in figure 2, this mechanical coupling can gener- sponse of two independent microphones (where the sub-
ate a significant interaural difference in tympanal re- traction is accomplished by electronic circuitry or signal
sponse, in the face of minute interaural difference cues in processing) or a pressure-sensitive membrane that re-
the sound field at the location of the ears. This difference sponds due to the net (i.e. difference) pressure on its two
in the amplitude of the motion at the two ears is due to sides.
very small differences in the phase of the incoming wave The essence of what is special about the ears of O.
at the external surfaces of the tympana. One can view this ochracea is that miniscule pressure gradients in the sound
system as a simple mechanical signal processor that com- field cause the pair of eardrums to rotate about a central
bines the pressure gradient with the average pressure to anatomical pivot point in the rocking mode shown in fig-
achieve a directionally sensitive response [Miles et al., ure 2. Essentially, the pressure gradient creates a net mo-
1997]. ment, producing rotation of the entire assembly about the
This approach to sound source localization differs pivot. Figure 3 shows a schematic of an Ormia-inspired
from what is used in most large vertebrate animals, like pressure gradient diaphragm on the left and a conven-
ourselves, in which two independent ears detect the sound tional gradient diaphragm on the right. In the conven-
and interaural differences in amplitude and time of ar- tional diaphragm, the two pressures act on the top and
rival are processed by the central nervous system to de- bottom surface of a simple membrane. The membrane
termine the orientation of the sound source. Very little or responds to the net force produced by these pressures,
no interaural processing takes place at auditory periph- which is equal to the pressure difference because they act
ery, which is the ‘secret’ of the fly’s ears. We exploit this on opposite sides of the diaphragm. The use of an acous-
mechanistic difference in device design below. tic pressure gradient to produce a moment and hence a
rotation of a diaphragm suggests a significant departure
from previous approaches to directional acoustic sensing.
This approach offers a host of design possibilities and the rather than attempt to construct a diaphragm that pos-
potential of radically improved performance. sesses both the rocking and translational modes of Or-
Because nature conferred upon the small Ormia fly an mia’s ear (as shown in figure 2), we sought the more mod-
unusual technique to detect pressure gradients, i.e. an est goal of constructing a pressure gradient microphone
auditory system that is severely constrained by size, it that responds primarily with the rocking mode; the stiff-
seemed appropriate that engineers interested in small, ness of the structure was designed so that the natural fre-
sensitive, and robust directional microphones should also quency of the translational mode of figure 2 was above
examine the merits of this approach. the frequency range of interest (approximately 40 kHz).
The materials and fabrication constraints thus led to a
significant departure from the morphology of the fly’s ear
The Evolution of the Engineering Design – but the essential principle of differential sensing is still
Biomimetic Directional Microphone employed. In order to achieve the effect of the in-phase
mode, one can add another nondirectional microphone
Because the materials and fabrication processes that and combine the signals to obtain any of the directivity
are available preclude simply ‘copying’ of the design of patterns that are possible with a first-order directional
Ormia’s ear, our approach has been to mimic, or borrow, sensor.
the essential ideas rather than create a high fidelity rep-
lica. This becomes the starting point of an extensive en-
gineering design process. The analysis and design of the Differential Microphone Acoustic
mechanical diaphragm structure involved engineering Performance
evolution. The earliest design consisted of a membrane,
or thin plate, supported along its perimeter and stiffened In this section, predicted results for the sensitivity and
and tuned with masses in order to emphasize the response noise performance of the Ormia differential microphone
to the difference in pressure [Gibbons and Miles, 2000; (fig. 4) are compared with that of a conventional design
Miles et al., 2001; Yoo et al., 2002]. Lessons learned from (such as depicted in the right panel of figure 3). The per-
the analysis and fabrication of this structure led to the formance of several specific designs are compared to il-
realization that a considerably more compliant (and lustrate some of the advantages of the present approach.
hence more responsive to sound) diaphragm could be Since our goal is to develop very small acoustic sen-
constructed if it was fashioned out of a stiffened plate and sors, we deliberately used silicon microfabrication tech-
supported by carefully designed hinges as shown in fig- niques.
ure 4 [Miles et al., 2001; Tan et al., 2002]. In this design,
Pivots
Fig. 4. Ormia-inspired differential micro-
phone diaphragm. This diaphragm is sup-
ported only on carefully designed pivots. A
slit separates the diaphragm from the sur-
rounding substrate everywhere except at
the pivots. A finite element model of the
diaphragm is shown at the top, and a mesh
of a model used to examine stresses is shown
in the lower left. A scanning electron micro-
graph of a diaphragm fabricated out of poly-
crystalline silicon is shown on the lower
right. The rectangular diaphragm has di-
Finite element model Fabrication results
mensions 1 ! 2 mm.
In order to facilitate the design process, it is important el, where the parameters are identified by the finite ele-
to use a computationally efficient means of estimating the ment method, yields accurate predictions of the response
acoustic sensitivity of the diaphragm. Because of the com- of the diaphragms to sound [Tan et al., 2002].
plexity of the diaphragm structures that can be fabricated A similar approach can be taken to estimate the sensi-
in silicon, it is appropriate to use the finite element meth- tivity of a differential microphone that is fashioned out
od to model the dynamic response. Based on the detailed of a conventional diaphragm as in the right panel of fig-
finite element models, we have established that the design ure 3. The diaphragm can be modeled as a flexible plate
behaves much like a rigid body that rotates about the piv- with fixed boundaries. In this comparison, the sound field
ots shown in figure 4. This is determined by predicting is assumed to enter the microphone through the two open-
the resonant mode shapes and natural frequencies of the ings separated by the distance d in the right side of fig-
structure. In our typical design, the rocking mode (as il- ure 3. The difference in the pressures on the top and bot-
lustrated in the upper left of fig. 2) has a resonant fre- tom sides of the diaphragm (labeled 1 and 2 in the figure)
quency between 1 and 2 kHz, while the translational produce a net force on the diaphragm. In both of these
mode has a resonant frequency between 30 and 40 kHz. microphones, it is assumed that the wavelength of sound
The translational mode is thus above the frequency range is significantly longer than the distances L or d in figure 3.
of human hearing in these designs. We will assume that capacitive sensing is used to obtain
With the assumption that the diaphragm structure be- an electronic signal from the microphones.
haves like an ideal rigid body, with a response that is dom- The sensitivities of the differential microphone con-
inated by the rocking mode, we can estimate the response cepts shown in figure 3 may be estimated from:
to sound by calculating the moment applied to the dia-
Vb 2si X L/2 cos G / cIh
3
Acknowledgement
Improvements in Fabrication Technology Will
This work is supported by NIH grant 1R01DC005762-01A1,
Lead to Improved Designs
Bioengineering Research Partnership to RNM.
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Sens Actuators 1994;45:115–124. Sens Actuators 2005;199:544–552. 3059–3070.
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of integrated capacitive transducers. United chined corrugated silicon diaphragms. Sens ing organ of the parasitoid fly Ormia ochracea
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and assessment of two fixed-array microphones MEMS microphone (abstract). J Acoust Soc Scheeper PR, Olthuis W, Bergveld P: The design,
for use with hearing aids. J Rehabil Res Dev Am 2001;110:2645. fabrication, and testing of corrugated silicon
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0
–20 286 Hz
720 Hz
Response (dBVrms)
Amplitude (dBVrms)
–20
–30 2868 Hz
6948 Hz –40
–40
–50 –60
286 Hz
–60 –80
720 Hz
2868 Hz
–70 –100
Fig. 3. Frequency response and dynamic response for multiresonant transducer. a The Q10 values of these can-
tilevers are 9.38, 10.11, 11.56, and 14.01 for resonant frequencies at 286, 720, 2868, and 6948 Hz, respectively.
Measurements were made at 70 dB (SPL). b The polymeric cantilever array has a linear dynamic range of 80 dB
for sound inputs between 35 and 115 dB (SPL). Measurements were made at each cantilever’s resonance. The
fourth cantilever is not shown in the right figure because it was destroyed during handling between measure-
ments.
manner, the movement of the cantilever, and hence, the well within human hearing range. Q10 values (peak fre-
sound energy could be monitored (fig. 2). quency divided by the bandwidth 10 dB below the peak)
Several variations of the optical device were built to are similar to mammalian basilar response [Robles and
demonstrate different fabrication methodologies. Fabri- Ruggero, 2001]. Dynamic response is linear from 35 to
cation methods included using UV patternable high-def- 115 dB SPL. While linear response is an excellent char-
inition epoxy (SU-8), performing laser machining on acteristic for a microphone, for cochlear stimulation, dy-
polymer films, and performing microinjection molding. namic compression may need to be performed using ap-
The details of the injection molding manufacturing pro- propriate amplification circuitry.
cess which produced the results presented here, have been We have observed similar results with cantilevers pre-
detailed elsewhere [Xu et al., 2004]. pared for capacitive readout. In those devices, the canti-
We tested a four-resonator device by placing it under levers were coated with a thin (100-nm) layer of gold on
a speaker connected to an amplified tone generator. Sig- their underside forming a capacitor between each canti-
nal was collected from the resonators and analyzed using lever and a ground plane directly beneath each cantilever.
standard data acquisition instrumentation. Frequency A bias of 45 V was placed on the cantilever making it a
response, dynamic response, and directionality were re- capacitor. Vibration of the cantilever resulted in changes
corded. The preliminary data, shown in figure 3, are very in the capacitance, and thus modulated an induced cur-
encouraging. Cantilever response shows specific peak fre- rent across the capacitor. The small signal was amplified
quencies at 286, 720, 2868, and 6948 Hz, respectively, by a JFET and recorded using conventional microphone
Low noise floor Noisy due to electromagnetic interference – good shielding required
Low bias High bias preferred (45 V) or electret
Moderate power requirement due to Low power (<1 mW)
light coupling losses (5–10 mW)
Difficult integration with electronics Easy integration with electronics
Good sensitivity and dynamic range Good sensitivity and dynamic range
amplifiers and instrumentation. Ultimately, the capaci- Young’s modulus and low damping [Petersen, 1982].
tor (or even electret) readout is preferred over the optical This results in large natural frequencies (for example, a
readout because it is easier to integrate with convention- silicon cantilever, 1 mm ! 5 m, resonating at about
al electronics and consumes considerably less power. 5 kHz) and high quality factors. These are desirable qual-
However, the electrical system is more suspect to noise ities for fabricating mechanical resonators, such as those
and must be carefully shielded, whereas the optical sys- used in miniature accelerometers and gyroscopes, but this
tem demonstrated clear signal with almost no noise. Dif- is not satisfactory for mimicking the response of the co-
ferences between electrical and optical readout are indi- chlea. If the device can be built small enough, air may be
cated in table 1. used to dampen the oscillations [e.g., Haronian and Mac-
The multiband transducer works because the individ- Donald, 1995].
ual cantilevers have been designed to exhibit resonances Polymers have more suitable material properties, ex-
at frequencies within the range of human hearing. For a hibiting high damping and low modulus, typically 50
simple cantilever, the natural frequency is given by times less than metal. As a result, the natural frequencies
1 nk2 T E
of polymer cantilevers can be designed to be in the range
fk of a few hundred Hz to 10 kHz for microphone size under
4Q 3 L2 S
1 cm. Polymers have certain problems, however. Poly-
where E = Young’s modulus in pascals, T = thickness in mers cannot conduct electricity, requiring the addition of
meters, L = length in meters, = density in kg/m3, and a thin metal layer if electrical transduction is desired.
nk = 1.875, 4.694, 7.855, … (nk is mode number). When Polymers are difficult to fabricate at the small sizes re-
energized by acoustic energy, the cantilever will respond quired for this transducer. Polymers may exhibit long-
with maximum amplitude at the natural frequency, as term plastic deformation, or may develop stress from
given by the well-known Lorentzian formula, thermal processing. Indeed, our own microfabrication ef-
(
forts required a special annealing step to reduce residual
stress and straighten out the resonators (for microinjec-
A f
r 2
2
tion molded cantilevers). Nevertheless, many engineered
( ¬
f f 0
2
10
Frequency (kHz)
Relative length
1 0.1
0.1
0.01 0.01
0 0.25 0.50 0.75 1.0 0 0.25 0.50 0.75 1.0
a Relative distance from apex b Relative distance from apex
Fig. 4. a Tonotopic mapping of the human cochlea showing center frequency as a function of distance from the
apex of the cochlea. b Relative lengths for a cantilever-based multiresonator that can reproduce natural frequen-
cies that coincide with the center frequencies.
a small controlled gap between the resonator and the defined electrodes built up in platinum, passivated by ce-
ground plane is required. A ribbon device can maintain ramic or polymer (e.g., parylene), and encapsulated in a
tight gap tolerance, whereas any residual stress in a can- flexible polymer carrier, such as polyimide. Each elec-
tilever will result in bending, which will compromise the trode juts out in lithographically defined ‘hair’, 20–
gap tolerance. Traveling wave phenomena may be mim- 100 m in width and several hundred micrometers in
icked by lightly coupling adjacent resonators through mi- length. At the tip of each electrode hair is an opening in
cromachined tethers or springs. the passivation layer that exposes the platinum to the en-
vironment. Such hairs could enable the electrodes to
make close contact with the basilar membrane and, pre-
High-Density Microelectrode Arrays sumably, minimize cross talk among nearby electrodes.
One may wish to design multiple electrode hairs per elec-
The strategy of this and other technologies is to try to trical trace, and the hairs themselves may include hooks,
accurately mimic the response of the human cochlea so dendrites, and other special geometries to improve elec-
that one may artificially stimulate the cochlea in the way trical performance. Delamination of polymers may occur
it was designed to be stimulated. It is unlikely, however, due to swelling from fluid exposure, failure of adhesives,
that true hearing can be restored unless the electrode den- or electrochemical effects such as cathodic delamination.
sity is made large. Small numbers of electrodes, blunt and As with any implantable device, materials reliability will
ill-positioned, are likely to miscode and blend the spec- be a critical factor for success.
tral information of sound resulting in an unintelligible Assuming the electrodes are 10 m wide, with 10 m
sensation. Electrode density is limited by practical con- interspacing (smaller electrical traces can be manufac-
cerns (manufacturability, power consumption), as well tured), one can trace out 50 electrodes in a single side of
as by physical limitations – current lines tend to overlap plastic, 1 mm in width. This suggests that an electrode
for adjacent electrodes when the electrodes are far from capable of delivering all 88 keys on the piano should re-
their target, reducing the ability to stimulate specific quire a strip of plastic 1 mm in width, patterned on both
sites. Thus, electrode design must also include a mecha- sides with electrical traces. Since the electrode can be fab-
nism for the electrical contacts to be highly localized. The ricated using conventional micromachining technology,
benefit of the micromechanical resonator is that a large one can imagine having each electrode strip custom pro-
number channels can be simultaneously filtered at low duced to fit each patient’s cochlea.
power and low latency, in a small package. Advanced, Smaller electrodes will result in higher resistances, in-
high-density electrodes are needed to complement this creasing the driving power per electrode. The resistance
technology to deliver high-fidelity signals to the auditory of a 3-cm platinum electrode, 10 ! 0.1 m, will be near-
nerves. ly 3 k. This will necessitate the use of smaller currents
High-density electrodes may be manufactured using to reduce power consumption. Such a strategy can only
micromachining techniques similar to those used for work if smaller currents can still produce threshold volt-
building the resonator array. Figure 6 shows a hypotheti- ages at the dendrites. One can anticipate that the hairlike
cal electrode array that can be manufactured in thin poly- electrodes indicated in figure 6 may experience lower
mer membrane. The device consists of lithographically thresholds because they are in such close proximity to the
nerve sites, and less energy is wasted in the region be- up by the transducer, typically introducing broadband re-
tween electrodes. This has not been experimentally veri- sponse where narrow band may be desired. This is a well-
fied, however, and more work is needed in this area to known problem for microphone designers. One may need
confirm design strategies. to design damping systems or a vibration isolation mecha-
nism into the packaging or into the microdevice itself.
Sealing the device against fluid leakage is a particu-
System Packaging larly difficult task because the protective package will in-
troduce an acoustic barrier and impedance mismatch
A complete system can be expected to consist of a mul- which will degrade the performance of the transducer.
tiband microphone, amplification electronics, electrode One approach is to follow the example of the reptilian
driver, a high-density electrode array, small rechargeable middle ear and use a columella (a stiff rod) to connect the
battery, and a recharge coil. (The system might be co- ear drum to a membrane opening (analogous to the oval
packaged with a traditional CI system as an optional sec- window) in the packaged device. By choosing the size of
ondary implant choice.) A significant engineering prob- the window appropriately, one may be able to match the
lem for such a system will consist of packaging for the acoustic impedances.
microphone. There are several major issues that need to For most electrical transducers (e.g., capacitive, mag-
be addressed, namely (1) electrical packaging to make netic), interference from external electromagnetic sources
electrical connections from the microphone to the elec- is very problematic and greatly increases the noise in the
tronics, (2) mechanical packaging to mount the micro- signal. All condenser and electret microphones are heav-
phone in an appropriate location, (3) environmental ily shielded against electromagnetic interference through
packaging to seal and protect the microresonators from metal packages and grills. One may hope that the presence
fluids, and (4) radio frequency packaging to shield the of conductive fluid in the ear chamber and head can help
device from electrical noise. provide natural shielding for the microphone. If not, then
The resonator array must be mounted so that a large conductive casing will need to be placed around the trans-
number of resonators can make electrical contact to a ducer, grounding the system to the electrical potential of
microelectronic chip that performs the appropriate am- the patient.
plification for each channel. This may represent a large
number of bond points, possibly hundreds of electrical
connections may need to be made. High density bump- Summary
bonding, or even postprocessing of the microfabrication
directly on the die are possible solutions to this problem. We describe a micromachined multiresonator tech-
Since the fabrication method can be designed to be per- nology for building an artificial human cochlea that al-
formed at low temperature, one may consider building lows flexible design and good integration with electronic
the microresonators directly on the electronic die. circuitry. The use of polymer material is recommended
Direct connection of the resonators to the mechanical for low Q characteristics. An array of resonating cantile-
substrate can degrade performance of the microphone. Vi- vers, each built with a different natural frequency, allows
brations of the mechanical package can be readily picked a device to perform a mechanical Fourier transform at
References
Geisler CD: From Sound to Synapse. London, Ox- Lyon RF: Filter cascades as analogs of the cochlea; Saunders GH, Kates JM: Speech intelligibility en-
ford University Press, 1998. in Lande TS (ed): Neuromorphic Systems En- hancement using hearing-aid array processing.
Greenwood D: Critical bandwidth and the fre- gineering. Amsterdam, Kluwer Academic, J Acoust Soc Am 1997;102:1827–1837.
quency coordinates of the basilar membrane. J 1998, pp 3–18. Shannon RV, Otto SR: Psychophysical measures
Acoust Soc Am 1961;33:1344–1356. Lyon RF, Mead CA: A CMOS VLSI cochlea. from electrical stimulation of the human co-
Greenwood D: A cochlear frequency-position Acoust Speech Signal Process 1988; 4: 2172– chlear nucleus. Hear Res 1990;47:159–168.
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Acoust Soc Am 1990;87:2592–2605. Lyon RF, Mead C: An analog electronic cochlea. gol 1969;89:61–69.
Haronian D, MacDonald NC: A microelectrome- IEEE Trans Acoust 1998;36:1119–1134. Tanaka K, Abe M, Ando S: A novel mechanical
chanics based artificial cochlea (MEMBAC). McDermott H: A programmable sound processor cochlea ‘Fishbone’ with dual sensor/actuator
Proc Transducers (Stockholm) 1995; 2: 708– for advanced hearing aid research. IEEE Trans characteristics. IEEE/ASME Trans Mechatron
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Lim KM, Fitzgerald AM, Steele CR, Puria S: Moore BCJ: An Introduction to the Psychology of Tyler R, Witt S, Dunn C: Tradeoffs between better
Building a physical cochlea model on a silicon Hearing. New York, Academic Press, 1997. hearing and better cosmetics. Am J Audiol
chip; in Wada H, Takasaka T, Ikeda K, Ohya- Ohyama K, Koike T (eds): Recent Developments 2004;13:193–199.
ma K, Koike T (eds): Developments in Audi- in Auditory Mechanics. Teaneck, World Scien- Volta A: On the electricity excited by mere contact
tory Mechanics. Teaneck, World Scientific, tific, 1999, pp 223–229. of conducting substances of different kinds. R
1999, pp 223–229. Oxenham AJ, Bernstein JGW, Penagos H: Correct Soc Philos Trans 1800;90:403–431.
Loizou PC: Signal processing for cochlear prosthe- tonotopic representation is necessary for com- White RD, Grosh K: Microengineered hydrome-
sis: a tutorial review. Proc Midwest Symp Cir- plex pitch perception. Proc Natl Acad Sci USA chanical cochlear model. Proc Natl Acad Sci
cuits Syst (MWSCAS’97), Sacramento, 1997, 2004;101:1421–1425. USA 2005;102:1296–1301.
pp 200–204. Petersen KE: Silicon as a mechanical material. Xu T, Bachman M, Zeng FG, Li GP: Polymeric
Loizou PC: Mimicking the human ear. IEEE Signal Proc IEEE 1982;70:420–457. micro-cantilever array for auditory front-end
Process Mag 1998;5:101–130. Rauschecker JP, Shannon RV: Sending sound to processing. Sens Actuators A 2004; 114: 176–
Loulou M, Neji K, Mabrouk C, Fakhfakh A, Fakh- the brain. Science 2002;295:1025–1029. 182.
fakh M, Masmoudi N: New Approach to a Dig- Robles L, Ruggero MA: Mechanics of the mam- Xu T, Li GP, Bachman M, Lai Z, Yang Y: A nov-
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Prosthesis and its Implementation with SI 1352. waveguide fabrication. Proc Optic Fiber Com-
Technique. 16th Int Conf Microelectronics, Sarpeshkar R: Energy efficient adaptive signal de- mun Conf, Anaheim 2002, pp 17–18.
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Sarpeshkar R, Lyon RF, Mead CA: A low-power
wide-dynamic-range analog VLSl cochlea. An-
alog Integr Circuits Signal Process 1998; 16:
245–274.
=>
TM
membrane (TM), and basilar membrane
(BM). The three fluid-filled channels are re-
duced to two channels. Reissner’s mem- OC
brane has small stiffness and the SV and SM
ST BM
are combined as a single channel. The organ Elastic cochlear partition
of Corti and basilar membrane are com-
bined as a flexible cochlear partition sepa-
rating the two fluid (saline)-filled channels.
duces scaling questions. The model of Zhou et al. [1993] Box Model
is the first with life-sized dimensions for the basilar mem- This physical cochlear model is intended as a research
brane. However, the basilar membrane thickness was not tool. Simplifications to the design are made to focus on
controlled, a fluid viscosity 20 times that in the cochlea important features of the cochlear function. The basic
was used, and the fabrication is not easily extended to response of the cochlea is examined by studying the pas-
include other features. sive behavior of an elastic cochlear partition separating
Advances in micromachining equipment have en- two fluid channels. This is referred to as the ‘box model’
abled the development of models that can be extended to (fig. 1). One of the distinct deviations from the actual
include more detailed features of the cochlea with life- coiled geometry is the use of straight channels. A straight
sized dimensions, as by Hemmert et al. [2002] and White channel is easier to model mathematically and reduces
and Grosh [2005]. Work in the area of sensor and actua- the complexities in the fabrication process. Calculations
tor development for atomic force microscopy [Manalis et by Loh [1983] and Steele and Zais [1985] showed no sig-
al., 1996; Grow et al., 2002] has provided additional rea- nificant differences between straight and coiled models
sons to pursue physical modeling using microfabrication of a guinea pig cochlea. The fluid channels are rectangular
methods. Utilizing atomic force microscopy techniques, (2 ! 2 mm) and filled with saline. Saline was chosen as
a model with active mechanisms could be developed. the fluid since it has similar viscous properties as peri-
Why study the passive cochlea response since the co- lymph. The channels were machined from plexiglas using
chlea has been demonstrated to have active mechanisms? conventional machining methods.
With any complex problem it is important to understand
the underlying mechanisms. In the case of the cochlea, Cochlear Partition Design
the macro mechanics of the passive basilar membrane A critical part of the box model design is the cochlear
must be studied in detail first in order to establish a basis partition. The more elastic portion represents the basilar
for how the active mechanisms work. membrane. For humans, the basilar membrane has a
length of approximately 35 mm and is tapered in width
from approximately 100 m at the base to 500 m at the
Modeling apex [Wever, 1949]. The width variation of the basilar
membrane is the primary contributor to the stiffness gra-
The cochlea consists of three fluid-filled channels: sca- dation along the length.
la vestibuli, scala media, scala tympani. Separating the Iurato [1962] and Cabezudo [1978] describe the basi-
scala vestibuli from the scala tympani is the organ of Cor- lar membrane as consisting of a supporting layer made
ti which runs the full length of the spiraled cochlea. The up of collagen filaments arranged in a transverse direc-
connection to the cochlea from the middle ear ossicles is tion. This fiber arrangement leads to direction dependent
through the oval window at the stapes footplate. The properties for the basilar membrane. This was demon-
round window is open to the middle ear cavity. strated by the measurements of Naidu and Mountain
Basilar membrane
Osseous
spiral
lamina
Rib
36 mm
100 µm – 1.5 µm 2.5 µm
the ability to simultaneously fabricate many devices on a single lected for the discrete ribs. A summary of the fabrication method
wafer and to combine mechanical devices with integrated circuits. is given in figure 4. A thin layer (several microns) of the polymer
However, a limitation is 2-D planar processing, which makes it dif- (polyimide) was spun and cured on a 100-mm silicon wafer. Alu-
ficult to achieve 3-D structures. Kovacs [1998] provides an over- minum was sputter deposited, patterned with photolithography,
view of micromachined transducers, but cautions of the need to and dry etched to form the discrete ribs. The tapered plate was pat-
understand both strengths and weaknesses of the technology before terned on the backside and was released by bulk etching through
committing to a fabrication approach. Information on the basics of the wafer thickness using deep reactive ion etching.
integrated circuit processing can be found in Plummer et al. [2000].
Fundamentals of micromachining are covered in Madou [2002]. Measurement Methods
An overview of design methods related to microelectromechanical The cochlear model is evaluated by measuring the response of
systems are found in Senturia [2001] and Maluf [2000]. the cochlear partition to a stapes-simulated input. A He-Ne laser
The basic methods of micromachining involve selection of a vibrometer (Polytec CLV 700 with HLV 1000 controller) was used
substrate, materials, and micromachining methods. A common to measure the velocity (fig. 5). The laser was mounted on a surgi-
substrate is silicon, but other materials are used depending on the cal operating scope for the stapes magnet measurements and
properties needed for the device. Standard wafer diameters are 100, mounted on an adjustable table for X-Y positioning during the co-
200, and 300 mm. Thicknesses range from 450 to 2500 m and can chlear partition measurements. Locations along the length are mea-
be custom made. Materials are selectively added to the substrate in sured. A glass cover slide was used over the fluid chamber to im-
thin layers. Typical layers are from 0.1 to 1 m, but can be as large prove the laser signal to noise ratio. A hydrophone [Puria, 2003]
as 10s of microns for certain materials. was used to measure pressure in the fluid chamber. The frequency
Through the use of photolithography, patterns are created on range of excitation was 100 Hz to 25 kHz using stepped tones.
the thin layers using photoresist. The materials are selectively re-
moved using surface etching. Etching is a chemical reaction that is
performed either as a ‘wet’ or ‘dry’ process. The development of
deep reactive ion etching tools have enabled devices to be fabri- Results
cated by bulk etching through the thickness of the substrate.
For the cochlear partition, a material with a Young’s modulus Microfabrication Results
close to that of the biological material is desirable. A polymer,
Pyralin® PI2610 series polyimide from HD Microsystems, was Fabrication of the cochlear partition was performed in
selected as the base material for its properties (Young’s modulus a class 100 clean room at the Stanford Nanofabrication
6.6 GPa) and handling durability. Aluminum (70 GPa) was se- Facility. Samples with base thickness from 1 to 5 m were
Material deposition
Aluminum
Step 1: spin cast and cure polyimide
Step 2: sputter aluminum Polyimide
Wafer
Other methods: thermal oxidation, chemical
vapor deposition, epitaxy, evaporation
Patterning PR
Step 3: pattern discrete ribs using photomasks
and optically sensitive PR Wafer
Surface etching
Step 4: dry etch aluminum using gases. +
+
+
+
+ +
+ +
PR protects selected areas
Wafer
PR
Wafer
Back
Bulk etching
Step 5: backside patterning with
PR and dry etch using deep Etch +
+
+
+
+ +
reactive ion etching to remove si + +
After etch
fabricated. Rib height ranged from 0.1 to 1.0 m, but Measurement Results
were constant for a particular design. A sample cochlear The measurement results can be examined in several
partition is shown in figure 6. Over the 36 mm length, ways. The first way is to examine a single location for
there are approximately 9000 discrete aluminum ribs. multiple frequencies. The response of interest is the ve-
The figure shows a scanning electron microscope image locity of the elastic portion of the cochlear partition. The
of the aluminum ribs on the polyimide. The specific sam- velocity of the wafer portion is several orders of magni-
ple shown in the sections which follow had a thickness of tude lower (not shown). Normalized plots of the partition
4.75 m with a rib height of 0.2 m. velocity are shown in figure 7. Two locations, 0.035 m
and 0.023 m from the base location, are plotted in the
Coil
Laser
Core vibrometer
SEM image of ribs
figure. The peak response for the 0.035 m location occurs Fig. 6. Conventional photograph of cochlear partition with elastic
near 7.5 kHz. Beyond this frequency the amplitude rolls portion and helicotrema identified. Scanning electron microscope
(SEM) image shows details of the discrete ribs. Scale bar length is
off into the noise level. The 0.023 m location gradually
20 m. Width of a rib is 1.5 m. The spacing between each rib is
builds up in response and peaks near 18 kHz. The phase 2.5 m. There are approximately 9000 ribs along the length of the
is also shown. The point further away from the stapes in- partition.
put shows a larger build up of phase.
Another way to examine the results is a spatial repre-
sentation. For a single frequency, the measured response
at multiple points is plotted. A 9-kHz response is shown The calculations based on the design specifications
in figure 8 and exhibits a gradual build-up in response to reasonably approximate the measured responses (fig. 7).
a peak location which is dependent on the frequency of However, the measured responses showed some varia-
excitation. A change in wavelength is also apparent. This tion. The variations could have been due to geometry or
is typical for a dispersive wave. material property nonuniformity. High magnification
images indicate some geometric variability resulting from
the processing. Variability in width dimensions as small
Discussion and Conclusions as 5–10 m can lead to measurable changes in the stiff-
ness profile. To quantify the effect of the processing vari-
The physical model demonstrated several important ations and to account for the possibility of material non-
features which are also observed in mammalian cochleas: uniformity, an approach was needed to validate the stiff-
traveling waves, tuning, frequency to place tonotopic or- ness.
ganization, and roll off beyond the characteristic place. The stiffness of the cochlear partition in the fluid
The physical model demonstrates a traveling wave which chamber can be estimated using low frequency excitation.
peaks at a characteristic place with a gain of 2.4 at 0.029 m For this comparison, the velocity was divided by the fre-
and a phase lag of 3 for 9-kHz input. quency of excitation, , to give an equivalent displace-
ment. The displacement was divided by the pressure at
2.0
I Vbm/Vst I
I Vbm/Vst I
10−1 1.5
1.0
2
2 9 kHz calculation
9 kHz measured
0 0
−4
−6 −4
−8
−6
Measured = 0.035
−10
Calculated = 0.035
Measured = 0.023 −8
−12
Calculated = 0.023
−14 −10
0 0.005 0.01 0.015 0.02 0.025 0.03 0.035
−16 Distance from stapes (m)
103 104
b Frequency (Hz)
7 8
Hydrophone Hydrophone
× 10–9
403 Hz
4.0 415 Hz
Stapes 427 Hz
Displacement/pressure (m/Pa)
partition 2.5
2.0
102
1.5
1.0
101 ∆P = PSV – PST
0.5
100 0
103 104 0 0.005 0.01 0.015 0.02 0.025 0.03 0.035
Frequency (Hz) Location (m)
9 10
Cabezudo LM: The ultrastructure of the basilar Lechner T: A hydromechanical model of the co- Senturia SD: Microsystems Design. Boston, Klu-
membrane in the cat. Acta Otolaryngol 1978; chlea with nonlinear feedback using PVF2 wer Academic, 2001.
86:160–175. bending transducers. Hear Res 1993; 66: 202– Steele CR, Taber LA: Comparison of WKB calcu-
Cancelli C, D’Angelo S, Masili M, Malvano R: Ex- 212. lations and experimental results for three-di-
perimental results in a physical model of the Loh CH: Multiple scale analysis of the spirally mensional cochlear models. J Acoust Soc Am
cochlea. J Fluid Mech 1985;153:361–388. coiled cochlea. J Acoust Soc Am 1983;74: 94– 1979;65:1007–1018.
Grow RJ, Minne SC, Manalis SR, Quate CF: Sili- 103. Steele CR, Zais JG: Effect of coiling in a cochlear
con nitride cantilevers with oxidation-sharp- Madou M: Fundamentals of Microfabrication: model. J Acoust Soc Am 1985; 77: 1849–
ened silicon tips for atomic force microscopy. The Science of Miniaturization, ed 2. Boca Ra- 1852.
IEEE J Microelectromech Syst 2002; 11: 317– ton, CRC Press, 2002. von Békésy G: Experiments in Hearing. New York,
321. Maluf N: An Introduction to Microelectromechan- McGraw-Hill, 1960.
Helle R: Beobachtungen an hydromechanischen ical Systems Engineering. Boston, Artech Wever EG: Theory of Hearing. New York, Wiley,
Modellen des Innenohres mit Nachbildung House, 2000. 1949.
von Basilarmembran Corti-Organ und Deck- Manalis SR, Minne SC, Quate CF: Atomic force White RD, Grosh K: Microengineered hydrome-
membran. Technische Universität München, microscopy for high speed imaging using can- chanical cochlear model. Proc Natl Acad Sci
München, 1974. tilevers with an integrated actuator and sensor. USA 2005;102:1296–1301.
Hemmert W, Durig U, Despont M, Drechsler U, Appl Phys Lett 1996;68: 871–873. Xu T, Bachmann M, Zeng FG, Li GP: Polymeric
Genolet G, Vettiger P, Freeman DM: A life- Naidu RC, Mountain DC: Longitudinal coupling micro-cantilever array for auditory front-end
sized, hydrodynamical, micromechanical in- within the basilar membrane and recticular processing. Sens Actuators A Phys 2004;114:
ner ear; in Gummer AW (ed): Biophysics of the laminae; in Wada H, Takasaka T, Ikeda K, 176–182.
Cochlea. Teaneck, World Scientific, 2002. Ohyama K, Koike T (eds): Recent Develop- Zeng FG: Trends in cochlear implants. Trends
Iurato S: Functional implications of the nature and ments in Auditory Mechanics. Teaneck, World Amplif 2004;8:1–34.
submicroscopic structure of the tectorial and Scientific, 2000, pp 123–129. Zhou G, Bintz L, Anderson DZ, Bright KE: A life-
basilar membranes. J Acoust Soc Am 1962;34: Puria S: Measurements of human middle ear for- sized physical model of the human cochlea
1386–1395. ward and reverse acoustics: implications for with optical holographic readout. J Acoust Soc
Kovacs GTA: Micromachined Transducers otoacoustic emissions. J Acoust Soc Am 2003; Am 1993;93:1516–1523.
Sourcebook. San Francisco, WCB/McGraw- 113:2773–2789.
Hill, 1998.
Prosthesis
C7
0.1u
1
R8
OUT
C6 R15
82u 976k 490k
R12
+
-
100k
R11
-
-
1000k C8
R16
OUT
OUT - C9 0.027u
110k
82u
+ OUT
+
R7
Current pulses to
OUT
R18
C5 R14 R13
100k
10u 570k
100k
proportional to
+
-
vestibular nerve
R10
100k
-
Rotational input
0
R17
300k
OUT
angular velocity
R9
115k
via electrodes
HI
Sensing unit
PRE
J
Q
CLK
Q
CLR
K
Circuitry
Drive x)
m1 tion (
dir c
e
m2
or
Anch
principle [Greiff et al., 1991; Shkel et al., 2005]. The proof response in the sensing direction. Detection of the Corio-
mass, which constitutes the active portion of the sensor, lis response is also challenging, requiring measurements
is driven by an oscillator circuit at a precise amplitude, of picometer scale oscillations in the sense mode, with the
XD, and a relatively high frequency, n, so that x(t) = proof mass oscillating with tens of micrometers ampli-
XD sin(nt). When subject to a rotation with angular ve- tude in the drive mode. The synchronous demodulation
locity , the proof mass will be subject to the Coriolis technique is commonly used to tackle this problem. A
force. The resultant Coriolis force is perpendicular to high-frequency carrier signal is imposed on the structure.
both the input rate and the instantaneous radial velocity An array of differential capacitors is used to detect pico-
in the drive direction. This force produces a motion of meter scale deflections due to the Coriolis-induced mo-
the proof mass, y(t), in a direction perpendicular to its tion. The difference of the outputs of the differential am-
initial oscillation: plifiers is amplitude demodulated at the carrier signal fre-
quency, yielding the Coriolis response signal at the driving
2X D 8Q
y t
(1) frequency.
Xn
We have also developed alternative vibratory gyro-
This equation shows that the output deflection is pro- scopes with rate-integrating capabilities [Shkel et al.,
portional to the input angular velocity. The gyroscope 2005]. Here we consider the design principle and specifi-
response is also directly proportional to quality factor Q cations for a single-axis MEMS gyroscope employing a
(i.e., the sharpness of the resonance) of the device. To unique architecture that comprises a drive mode oscilla-
improve performance of the MEMS gyroscope, the device tor and a sense mode oscillator. This architecture im-
has to be vacuum packaged to achieve high-amplitude proves sensitivity while maintaining robust operation
characteristics. The device operates in air and does not sen, 1931; von Egmond et al., 1949]. In this model, the
require vacuum packaging. Figure 3 shows this MEMS cupula and endolymph are treated as a heavily damped,
gyroscope’s linear response in DC voltage as a function second-order linear system, where the cupula angular de-
of the angular rate input. The gyroscope has a sensitivity flection (t) is related to angular acceleration (t) by the
of 0.0694 mV/degree/s and a noise floor of 0.211 mV/Hz following differential equation:
at a 50-Hz bandwidth, yielding a resolution of 3.05°/s/Hz
d 2F t
d F t
τ2
τL
Battery
Gain
Rest
firing
rate
Fig. 4. A printed circuit board prototype of the electronic unilateral semicircular canal prosthesis. The dimension
is 12 ! 24 cm2.
responding to angular acceleration, and the output is the pulse amplitude, and pulse duration, have to be dynami-
pulse train with its rate being equal to the firing rate esti- cally and individually adjusted. In our implementation,
mated from the animal model. the shortest pulse duration is set at 1 ms. Therefore, the
maximum rate can be set close to 500 Hz, doubling the
Current Source maximum rate of 250 Hz used in a previous study [Gong
To provide effective and safe electric stimulation, the and Merfeld, 2002].
monophasic voltage signal has to be converted into a bi-
phasic current signal [McCreery et al., 1990; Scheiner et Printed Circuit Board Prototype
al., 1990]. Similar to cochlear implants, the vestibular Figure 4 shows such a vestibular prosthesis prototype
implant will likely have great individual variability in implemented in a printed circuit board. The sensing unit
threshold and dynamic range [Zeng and Galvin, 1999]. is a z-axis gyroscope, followed by a low-pass filter and a
Therefore, the electric parameters, including pulse rate, differentiator. The pulse generator includes a transfer
function unit and a voltage-to-frequency converter. The tions as those reported in Fernandez and Goldberg
current source includes Smith triggers, analog switches [1971].
and a current mirror. Two 9-volt batteries are used as a Figure 5 shows a segment of the prosthesis response to
power supply for the prototype circuitry and the sensor. inertial stimuli in real time. The continuous line (top
Nine potentiometers are utilized to adjust for the resis- trace) is the output of the sensing unit (gyroscope), which
tance parameters, including four time constants in the accurately reflects the sinusoidal rotation input of the rate
transfer function (1, 2, A, and L), the gain of the trans- table. In this example, the rotation input frequency is
fer function, spontaneous firing rate, pulse amplitude, 1 Hz and acceleration amplitude is 250°/s2. The dotted
and duration of both positive and negative phases for the line (second trace) is the analog signal reflecting the output
biphasic pulses. of the transfer function in the pulse generator. The value
of this analog signal is used to generate a corresponding
pulse rate. Note the apparent phase difference between the
Electronic Evaluation gyroscope’s output and the pulse generator’s output. In
this example, the biphasic current pulses generated by the
We have evaluated electronic performance of the ves- prosthesis dynamically varied from a maximum of 50
tibular prosthesis prototype against the experimentally spikes/s to a minimum of 30 spikes/s, with a spontaneous
obtained results in a squirrel monkey model [Fernandez rate of 40 spikes/s. We should note that both the sponta-
and Goldberg, 1971]. In their experiment, the animal neous firing rate and the sensitivity (setting the maximum
was mounted in a structure so that the center of the head and the minimum firing rates) can be easily adjusted,
was coincident with the axis of rotation and the horizon- should this adjustment be needed to accommodate indi-
tal canal was in the horizontal plane. Sinusoidal rota- vidual differences. Finally, occasional instant shocks on
tions with a frequency of 0.1–8 Hz were sequentially top of the pulses may occur as a result of conversion of a
applied and responses of the vestibular nerve in terms digital signal to an analog signal. While adding a capacitor
of the firing rate were monitored and recorded. In parallel to the load can minimize the potential effect of
our experiment, the prosthesis prototype was placed on such shocks on the electrode and tissue, more sophisti-
a rate table, moving under the same rotational condi- cated circuit design may be required to eliminate them.
Figure 6 compares the magnitude (panel a) and phase encouraging preliminary results have demonstrated the
(panel b) responses for the experimentally obtained data technical feasibility of combining MEMS gyroscopes and
in squirrel monkeys [Fernandez and Goldberg, 1971] analog circuits to reproduce a natural vestibular system’s
(symbols), the mathematical model prediction (dashed dynamic response to unilateral rotational movement.
lines), and the output of the vestibular prosthesis proto- The present architecture enables the use of the surface
type (solid lines). The dashed line in the magnitude re- mount hybrid techniques, which can reduce the size of
sponse is not visible because the model prediction is the overall system and potentially implement them on a
virtually identical to the prototype’s output. A compar- single chip. Power consumption can also be reduced us-
ison is performed for the harmonic angular acceleration ing the custom-integrated MEMS gyroscope and low-
with frequencies between 0.1 and 8 Hz. The gain re- power analog circuitry. Figure 7 shows the conceptual
sponse matches closely for all three sets of data, but the design of a totally implantable version for the next gen-
phase response differs slightly, particularly at higher fre- eration of the vestibular prosthesis. A three-axis MEMS
quencies, reaching 5 degrees between the physiological gyroscope will be integrated with control and signal con-
data and the prototype output at 8 Hz, and 12 degrees ditional electronics on a silicon substrate encapsulated in
between that physiological data and the model predic- a vacuum environment (panel a). The same silicon struc-
tion at the same frequency. Higher-order models or even ture will support a stimulating electrode at each end and
nonlinearities simulating the biomechanics of the ves- provide multiple feedthroughs (panel b). Wireless com-
tibular end-organ are required to remove this phase dif- munication capabilities, wireless gain adjustment capa-
ference. bilities, and wireless power supply will be integrated and
housed in a glass capsule. The glass capsule will be elec-
trostatically bonded to the substrate to provide hermetic
Future Direction sealing for protection of the receiver circuitry, sensor, and
hybrid elements from body fluids.
This paper describes the design, implementation and We should also note that successful implementation of
evaluation of an electronic prosthesis mimicking the dy- the vestibular prosthesis not only requires innovative en-
namic function of a unilateral semicircular canal. The gineering solutions but also novel surgical approaches.
Control and
signal conditioning
electronics
Sensor
package
b Glass capsule
package
Hybrid charge
storage capacitor
Benson AJ, Hutt EC, Brown SF: Thresholds for the Greiff P, Boxenhorn B, King T, Niles L: Silicon Patla AE: Strategies for dynamic stability during
perception of whole body angular movement monolithic micromechanical gyroscope. Tech adaptive human locomotion. IEEE Eng Med
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semicircular canal neurons in the rat and guin- gans of equilibrium. I. Phys Med Biol 1956;1: research. J Vestib Res 2002;12:69–76.
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1982;47:286–294. Highstein SM, Rabbitt RD, Holstein GR, Boyle anced biphasic electrical stimulation: muscle
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Proc 27th Annu IEEE Eng Med Biol Conf, Lewis RF, Gong W, Ramsey M, Minor L, Boyle R, design solutions, and opportunities. SPIE
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stimulation and dynamics of peripheral ves- adjustable parameters mimicking the function sors Conf, Irvine, 2005.
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675. Int IEEE EMBS Conf Neural Eng, Capri Is- Measuring Gyroscope. Oakland, University of
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Ear Hear 1999;20:60–74.
N
MDCK
S
SNP
MDCK
SNP
SIS seeded with clusters
fibroblasts SNP
clusters
One of the 24 insets
c
One of the 24 wells of the 80
culture plate
70
One of the 24 disc magnets
Number of MDCK (× 10 4/well)
50
40
30
20
–2 0 2 4 6 8 10 12 14 16
Days of cell culture
Fig. 1. a Schematic representation of 3 layers in the RWM model: a layer of fibroblasts sandwiched between 2
layers of MDCK cells. The diagram also shows the magnetic delivery system, a NdFeB magnet positioned under
individual culture plate wells allowing for translational pulling of SNP across the membrane. b Photomicrograph
of a cross-section of the RWM model showing stages of translational movement of the SNP. The cross-section
shows MDCK cells on both sides of the SIS membrane and fibroblasts seeded within the SIS membrane. The SNP
movement was captured on day 5 of cell culture. c Biocompatibility indicator growth plot showing that SNP (dex-
tran-coated SNP, 1 mg/ml) have no effect on cell proliferation in MDCK cell culture. The cells were counted on
days 1, 2, 3, 5, 7, 9, 11 and 14 of culture. Error bars represent standard deviation.
and the animal placed on the center surface of a 4-inch cube placed with a fresh solution (process was repeated two times for
NdFeB48 magnet (Magnetic Sales, Culver City, Calif., USA). The 60 min total exposure). Control animals went through the same
distance from the RWM to the magnet pole face was 2.5 cm for rats protocol but without the magnetic field. The area of the basal turn
and 3 cm for guinea pigs providing 0.3 tesla for 20 min. The re- and the apex, but not the RWM niche, was irrigated and aspirated
maining SNP solution was then aspirated from the niche and re- dry. The bony wall on the basal turn of the cochlea was thinned
ing the particles on the TEM plate. The oleic acid-coated concentration of magnetite was used (1 vs. 5 mg/ml) in
SNP embedded in the PLGA were not freely mobile. the formation of the PLGA microparticles, fewer magne-
Thus aggregation of the magnetite is not expected when tite particles were incorporated into the polymer and did
the particles are dried on the TEM grid. When a lower not aggregate (fig. 2d).
Biocompatibility
ESR studies of silica-coated paramagnetic nanoparti-
cles in a Fenton system revealed no evidence of free iron
in the silica-encapsulated nanoparticles. There was no
spectral evidence of free radical activity, supporting that
the silica encapsulation of the nanoparticles prevented
iron exposure and generation of free radicals.
As can be seen in figure 1c, the cell growth kinetics
curve for MDCK cells grown in culture on SIS mem-
branes was identical for cells cultured without particles Fig. 3. Representative photomicrograph of cultured organ of Corti
from postnatal day 3 mouse pups (5 days in vitro). Three rows of
or cells cultured with a concentration of 1 mg/ml of Nano-
outer HC (OHC) and one row of inner HC (IHC) are shown.
mag-D NH2 dextran particles. TRITC-phalloidin staining. a Control. b PLGA-SNP (1 mg/ml,
Application of particles to organotypic cultures of 48 h) treated. At the light microscopic level, control and particle-
mouse organ of Corti revealed little detectable HC loss or exposed cultures all evidenced little, if any, HC loss. Magnification
supporting cell scar formation with either the SNP (n = 8 200!.
at each time point) or the polymer-encapsulated oleic
acid-coated paramagnetic nanoparticles (4 at each con-
centration). Very little or no HC loss was observed nor
were replacement supporting cell scars detected (similar port with and without magnetic forces. TEM observa-
to control cultures not exposed to particles) at the light tions detected a large number of SNP with a polymer
microscopic level in any of the cultures even at 1 mg/ml payload in all 6 experimental inserts as seen in figure 2e,
concentrations and at the longest time periods of culture. f. On the other hand, in the control membranes without
Representative photomicrographs of organotypic cul- magnetic forces no SNP were detected (data not shown).
tures are seen in figure 3. The concentration of SNP was 1012 particles/ml and
TEM and light microscopy of explanted RWM 100 l was applied to each insert.
(fig. 4a–c) and in vitro tripartite SIS membrane (fig. 1b), TEM of fresh human cadaveric cochlear aspirate also
respectively, revealed no evidence of cell death, necrosis, readily demonstrated the particles of interest, whereas
inflammation or other obvious pathology on initial stud- none were seen in the specimens not exposed to magnet-
ies. Similar indicators of biocompatibility were noted for ic forces. These SNP were rapidly pulled through the hu-
the particles incorporated in the middle ear mucosa of man RWM in fresh frozen cadaveric human temporal
guinea pig ossicles [Dormer et al., 2005]. bone and detected in the inner ear perilymphatic fluid.
EELS confirmed that the particles contained iron. Peri-
Magnetic Gradient Transport lymphatic fluid from temporal bones exposed to nanopar-
A total of 9 SIS membrane inserts, 6 experimental and ticles but no magnetic forces were devoid of these parti-
3 controls, were utilized to assess magnetic gradient trans- cles (fig. 5a, b).
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Results
50
0
0 20 40 60 80 100
100 B
0
0 20 40 60 80 100
100 C
50
0
0 20 40 60 80 100 120 140
Distance (µm)
Fig. 2. Test of the fluid gradients produced by delivery of a fluorescent dye versus clear fluid to the forced-choice
(A), free-choice (B) and presentation (C) regions of the device. A sharp gradient is created in the forced-choice and
free-choice regions. A diffuse gradient is created when the microchannel exits into the presentation region, in both
the horizontal and vertical dimensions. Adapted from Wittig et al. [2005].
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edges, respectively. causing neurites to exhibit growth cone collapse and re-
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et al., 2003]. Fibronectin boundaries proved to inhibit To simulate linear tracts of ECM molecules in the or-
neurite growth, producing a strong tendency for neurites gan of Corti, photolithographic microfabrication tech-
to stop and/or turn in response to a positive edge (data niques were used to manufacture a mask with repeating
microchannels that, after placement on a culture surface, When SG explants were grown on patterns of laminin,
could be filled with fluid containing an ECM molecule, they showed a highly significant (p ! 0.001), dose-depen-
for incubation [Evans et al., 2005]. After removal of the dent tendency for preferential growth. When stripes were
mask and application of PLL to coat the regions between produced by incubation with low concentrations of lam-
the ECM stripes, this resulted in a pattern of narrow, re- inin, the neurites were preferentially found on laminin.
peating stripes of the cue. At higher concentrations, the reverse was seen. In the ex-
ample illustrated in figure 5, neurites exhibit a strong pref-
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