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PHYSICAL REVIEW APPLIED 4, 044014 (2015)

Designing Ferroelectric Field-Effect Transistors Based on the Polarization-Rotation


Effect for Low Operating Voltage and Fast Switching
Yubo Qi and Andrew M. Rappe
Department of Chemistry, The Makineni Theoretical Laboratories, University of Pennsylvania,
Philadelphia, Pennsylvania 19104-6323, USA
(Received 7 April 2015; revised manuscript received 27 August 2015; published 21 October 2015)
The effect of polarization rotation on the performance of metal-oxide-semiconductor field-effect
transistors is investigated with a Landau-Ginzburg-Devonshire theory-based model. In this analytical
model, the depolarization field, polarization rotations, and electrostatic properties of the doped silicon
substrate are considered to illustrate the size effect of ferroelectric oxides and the stability of polarization in
each direction. Based on this model, we provide guidance in designing electronic logic devices with low
operating voltages and low active-energy consumption: First, we demonstrate that MOSFET operation
could be achieved by polarization reorientation with a low operating voltage, if the thickness of the
ferroelectric oxide is properly selected. Polarization reorientation can boost the surface potential of the
silicon substrate, leading to a subthreshold swing S lower than 60 mV=decade. We also demonstrate that,
compared with polarization inversion, polarization rotation offers significant advantages, including a lower
energy barrier and a wider range of transferability in nanoelectronic devices.

DOI: 10.1103/PhysRevApplied.4.044014

I. INTRODUCTION one direction to another is the operative mode. It is true


that the channel conductance is mainly modulated by the
Ferroelectric oxides are a promising class of materials
out-of-plane polarization component [12–14] and treated
for application in electronic devices due to their intrinsic
as in one dimension, but it is also important to note
spontaneous electric polarization, which can not only
that the polarization components in all three dimensions
control the conductance of the channel, but also be
are coupled together, and the in-plane polarization strongly
reoriented by an external electric field [1–4]. By modulat-
influences the electric susceptibility out of plane.
ing the polarization of ferroelectric oxides, programmable
Furthermore, the three physical dimensions of the ferro-
binary-logic devices can be achieved, and the fast reor-
electric tune the relative stabilities of different local polar
ientation of polarization enables fast switching and
minima. The second factor is the electrostatic properties
lower-power operation of the metal-oxide-semiconductor
of the channel and gate electrode. It is widely known that
field-effect transistor (MOSFET) [5,6].
the distribution of charge in electrodes, which is para-
Here, we aim to provide guidance about designing a
meterized as screening length, determines the strength of
programmable fast-switching MOSFET with better perfor-
the depolarization field, which affects the magnitude of the
mance, by considering factors which were rarely included
spontaneous ferroelectric polarization [15–18].
in previous modeling but which may strongly affect the
In this paper, we propose a LGD theory-based single-
polarization reorientation and size effect of ferroelectric crystal model with a detailed analysis of these factors, in
oxides. Many analytical models based on the Landau- order to provide strategies for designing a low-operation-
Ginzburg-Devonshire (LGD) theory have been proposed voltage ferroelectric field-effect transistor [19,20]. A pre-
previously [7,8] to simulate the electrical behaviors of vious study argues that a subthreshold swing lower than
MOSFETs. These models provide an insightful under- 60 mV=decade can be achieved by the negative capacitance
standing about the mechanisms of ferroelectric-oxide- effect [20], but there is also a debate that direct current
based MOSFETs and guide the fabrication of novel negative capacitance is not possible, due to Gibbs free
devices. However, there are still several vital factors beyond energy considerations [21]. In our model, the polarization
the scope of previous models. First, the effect of the dynamics obeys the Landau-Khalatnikov equation and is
polarization distribution in three dimensions (3D) on the always minimizing the Gibbs free energy under a unidirec-
channel current-gate voltage relationship of a MOSFET is tional gate voltage. We demonstrate that fast switching
rarely considered, even though there are a lot of studies (subthreshold swing lower than 60 mV=decade) can be
about polarization in 3D and its response to electric fields in achieved by a proper design of the ferroelectric oxide size.
different orientations [4,9–11]. For simplicity, the polari- The mechanism is that, during the process of polarization
zation of the ferroelectric oxide in a MOSFET is usually reorientation, the tendency to possess spontaneous polari-
treated in one dimension. Here, polarization rotation from zation in a new direction boosts the screening charge

2331-7019=15=4(4)=044014(10) 044014-1 © 2015 American Physical Society


YUBO QI AND ANDREW M. RAPPE PHYS. REV. APPLIED 4, 044014 (2015)

accumulation and the channel current increases, leading to a 2V ex þ V ox ¼ 0; 2V ey þ V oy ¼ 0; V ez þ V oz þ φs ¼ V g :


low subthreshold swing. ð3Þ
Besides, in the polarization reorientation process, polari-
zation rotation between in plane and out of plane has a V ex;ey;ez and V ox;oy;oz are the voltage drop across the
lower energy barrier compared with polarization inversion. electrode and the ferroelectric oxide, respectively, in the
This design aims to optimize the performance of program- x, y, and z directions. φs is the surface potential of
mable MOSFETs and can be also transferred to other the silicon substrate, and it can also be viewed as the
electronic devices. voltage drop in the doped silicon substrate. The flat band
potential V fb , which results from the alignment of the Fermi
II. MODEL APPROACH levels of the gate electrode, oxide, and silicon substrate, is
included in V g . The electric field E is determined by both
The LGD model is a phenomenological theory which the external applied voltage and the electrostatic properties
describes the electrical properties of ferroelectric oxides. In of the ferroelectric oxide and electrodes [26–28]. It is
this model, the thermodynamic potential (Gibbs free energy widely accepted that the charge density in noble-metal
G0 ) of a single-crystal ferroelectric oxide is given as a electrodes follows the Thomas-Fermi distribution, and this
function of polarization in three directions [22,23]: distribution causes a voltage drop across the electrodes.
The following derivation calculating this potential drop
G0 ¼ α1 ðP2x þ P2y þ P2z Þ þ α11 ðP4x þ P4y þ P4z Þ follows the main idea in Ref. [24] but is reinterpreted. By
taking the z direction as an example (the electrostatic
þ α12 ðP2x P2y þ P2y P2z þ P2z P2x Þ þ α111 ðP6x þ P6y þ P6z Þ
properties in the x and y directions following similar rules),
þ α112 ½P4x ðP2y þ P2z Þ þ P4y ðP2z þ P2x Þ þ P4z ðP2x þ P2y Þ the relationship between the electric field and the charge
density takes the form
þ α123 P2x P2y P2z : ð1Þ
dEðzÞ QðzÞ nðzÞ − n0
Taking the external electric field and internal depolarization ¼− ¼ −q : ð4Þ
dz ε0 εe ε0 εe
field into consideration, electrostatic terms should be
added as EðzÞ, QðzÞ, and nðzÞ are the electric field, the charge
density, and the electron density, respectively, in electro-
G ¼ G0 − Ex Px − Ey Py − Ez Pz : ð2Þ des at the position z. n0 is the average electron density in a
neutral electrode. q is the electronic charge. ε0 and εe are
Figure 1 shows the schematic of a typical MOSFET. the electric permittivities of the vacuum and electrode,
The z axis is normal to the ferroelectric oxide-silicon respectively. Meanwhile, the potential drop VðzÞ is
interface. In the x and y directions, there is no external expressed as
voltage, and short-circuit conditions are applied [15,24,25].
dVðzÞ dVðzÞ dnðzÞ
For the case that a gate voltage V g is imposed on the ¼ −EðzÞ ⇒ ¼ −EðzÞ: ð5Þ
MOSFET, we have the following equations: dz dnðzÞ dz

ds

ds

FIG. 1. The schematic of a MOSFET with ferroelectric oxide as the insulator between the gate electrode and silicon substrate.
The pink rectangles represent insulator layers isolating the side electrodes and source and drain terminals. (a) No gate voltage is applied
(V g ¼ 0), and the polarization is in plane. No carriers or current are in the channel. (b) Gate voltage is applied (V g > 0), and the
polarization is out of plane. Carriers are induced by the polarization, and drain-source current flows.

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The electrons in metal electrodes are treated as a free Qðz ¼ 0Þ z=λz


EðzÞ ¼ e ; ð13Þ
Fermi gas, so the local potential and the electron density ε0 εe
are related as [29]
Z Z
0 0Qðz ¼ 0Þ z=λz Qðz ¼ 0Þλz
ℏ2 Ve ¼ EðzÞdz ¼ e dz ¼ :
V¼ ð3π 2 nÞ2=3 ; ð6Þ −∞ −∞ ε0 εe ε0 εe
2m ð14Þ
dVðzÞ ℏ2
¼ ð3π 2 Þ2=3 nðzÞ−1=3 : ð7Þ The heterostructure of the electrode, ferroelectric oxide,
dnðzÞ 3m and silicon substrate can be regarded as a capacitor, with
equal magnitude of charge densities at each interface:
ℏ is the reduced Planck constant, and m is the electronic
mass. By combining Eqs. (5) and (7), we have Qðz ¼ 0Þ ¼ −Qðz ¼ z0 Þ; ð15Þ
 2 −1
dnðzÞ ℏ where z0 is the position of the interface between the
¼− ð3π 2 Þ2=3 nðzÞ−1=3 EðzÞ: ð8Þ silicon substrate and ferroelectric oxide. However, the
dz 3m
charge distribution in the doped silicon substrate is quite
Taking the derivative of Eq. (4), we have different from that in metal. This is because electrons in
the metal are treated as a free electron gas. This is the basic
approximation of the Thomas-Fermi model. But doped
d2 EðzÞ q dnðzÞ 3mq
2
¼− ¼ ð3π 2 Þ−2=3 nðzÞ1=3 EðzÞ: silicon is a semiconductor, and the free carrier density is
dz ε ε
0 e dz ε0 εe ℏ2 local potential dependent [30,31]. The interface charge
ð9Þ density-potential relationship in the silicon substrate is
given by
The characteristic length λz (in the z direction, and later we  
will introduce λx and λy as the characteristic length in the x pffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi qφ
Qðz ¼ 0Þ ¼ 2εSi kTN a · e−qφs =kT þ s − 1
and y directions), which is also called the screening length kT
and determines the dispersion of electrons in electrodes, is 2
 1=2
n qφ
defined as þ i2 eqφs =kT − s − 1 ; ð16Þ
Na kT
 −1
3mq sffiffiffiffiffiffiffiffiffiffiffiffiffiffi  
λ2z ¼ 2 −2=3
ð3π Þ nðzÞ 1=3
dφðzÞ 2kTN a qφðzÞ
ε0 εe ℏ2 ¼ EðzÞ ¼ · e −qφðzÞ=kT
þ −1
 −1 dz εSi kT
3mq 2 −2=3 1=3
≈ ð3π Þ n0 : ð10Þ  1=2
ε0 εe ℏ2 n2 qφðzÞ
þ i2 eqφðzÞ=kT − −1 : ð17Þ
Na kT
Here, we take the approximation that, in a metallic
material, the electron density at any position is approx- φs is the surface potential of the silicon substrate. k is the
imately the same as the background one. Therefore, λz is Boltzmann constant. Other parameters are listed and
regarded as a constant, and Eq. (9) is rewritten as described in Table I.
From the analysis above, we see that the charge density
d2 EðzÞ 1 decreases gradually away from the oxide in both the metal
¼ 2 EðzÞ: ð11Þ electrode and the doped silicon substrate, even though the
dz2 λz
analytical expressions and physical mechanisms which
govern the charge distribution are different. As a result,
The boundary conditions are
there are voltage drops through each layer. These voltage
drops could counteract or completely neutralize the applied
Qðz ¼ 0Þ
Eð0Þ ¼ ; gate voltage, exerting significant influence on the magni-
ε0 εe tudes of ferroelectric polarization and charge in the chan-
Eð−∞Þ ¼ 0: ð12Þ nel. Equation (16) demonstrates that there is a one-to-one
correlation between the interface charge density Qðz ¼ 0Þ
Qðz ¼ 0Þ is the screening charge density at the ferroelec- and the surface potential at z ¼ z0 φs . φs is a function of
tric-oxide electrode interface, which is perpendicular to Qðz ¼ 0Þ:
the z direction. Thus, the electric field and potential drop
through one electrode are, respectively, φs ¼ f½Qðz ¼ 0Þ: ð18Þ

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TABLE I. Parameters involved in this study. ~


dP
γ þ ∇P~ G ¼ 0: ð21Þ
Description Value dt
T Temperature 298 K γ is the polarization dynamic parameter. G is the thermo-
α1 Coefficient in the LGD theorya −2.77 × 107 m=F dynamic potential defined in Eq. (2) with the restriction
α11 Coefficient in the LGD theorya −5.35 × 108 m5 =C2 F shown in Eq. (20). The most stable polarization is the one
α12 Coefficient in the LGD theorya 3.23 × 108 m5 =C2 F which minimizes Gibbs free energy G. However, if the
α111 Coefficient in the LGD theorya 8.00 × 109 m9 =C4 F
polarization is not in a local minimum, it cannot move to
α112 Coefficient in the LGD theorya 4.47 × 109 m9 =C4 F
α123 Coefficient in the LGD theorya 4.91 × 109 m9 =C4 F one instantaneously. The rate of return to a minimum is
λx;y;z Screening lengths in noble metalb 0.04 nm determined by many factors. For example, the resistance of
ε Dielectric constant of noble metalb 2.0 the circuits affects this rate, because polarization evolution
Na Substrate doping concentrationc 4 × 1015 cm−3 must be accompanied by screening charge transmission.
ni Intrinsic carrier concentrationc 1.5 × 1011 cm−3 The speed of the domain wall motion is also a key factor,
εSi Dielectric constant of silicon 11.7 F=m because polarization reorientation is accompanied with the
μeff Effective electron mobility 3.0 × 10−2 m2 =V s nucleation and growth of a new domain [35,36]. The
W Width of the silicon channel 4.0 × 10−7 m polarization dynamic parameter γ is related to the mobility
L Length of the silicon channel 4.0 × 10−7 m of polarization, as ∇P~ G can be regarded as the driving force
dy Equal to dx
of polarization and γðdP=dtÞ
~ is the speed of polarization
a
Reference [22]. evolution. The applied time-varying gate voltage takes the
b
Reference [28]. form
c
Reference [31].
 
π
The voltage drop across the ferroelectric oxide takes the V g ¼ V 0 sin ðωtÞ 0<t< : ð22Þ
ω
form
Qðz ¼ 0Þ − Pz Here, we do not mean that the applied gate voltage is
V oz ¼ Ez · dz ¼ dz : ð19Þ oscillatory. Instead, we are simulating one on-off program-
ε0
mable cycle ½0 < t < ðπ=ωÞ, and the increase or decrease
dz is the thickness of the ferroelectric film, and Pz is the of the gate voltage takes the sine form. Equation (21) is
polarization in the z direction. With the analysis above, rewritten as
equation set (3) is rewritten as
~
dP
Qðx ¼ 0Þλx Qðx ¼ 0Þ − Px γ0 þ ∇P~ G ¼ 0: ð23Þ
2 þ dx ¼ 0; dðωtÞ
ε0 εe ε0
Qðy ¼ 0Þλy Qðy ¼ 0Þ − Py γ 0 ¼ ωγ is the effective polarization dynamic parameter. φs
2 þ dy ¼ 0;
ε0 εe ε0 and Qðz ¼ 0Þ can be calculated from Pz , and the drain-
Qðz ¼ 0Þλz Qðz ¼ 0Þ − Pz source current I ds is obtained by the Pao-Sah double
þ dz þ f½Qðz ¼ 0Þ ¼ V g : integral [37]:
ε0 εe ε0
ð20Þ Z Z n2 !
W V ds φs Ni eqðφ−VÞ=kT
For short-circuit conditions, in order to balance the I ds ¼ qμeff a
dφ dV; ð24Þ
L 0 δ Eðφ; VÞ
potential drop in the electrodes, the sign of V ox;oy should
be opposite to that of V ex;ey . This indicates that the surface
where the function Eðφ; VÞ is the electric field in the
charge density should be smaller than the polarization,
channel as given in Ref. [31]. δ is an infinitesimal quantity.
which means an incomplete screening of the polarization
All the parameters in this simulation are listed in Table I.
charge. As a result, an electric field (depolarization field) is
induced opposite to the polarization. The potential drop in
III. RESULTS AND ANALYSIS
the metal electrodes, which is proportional to the screening
length, is the origin of the incomplete polarization charge The ferroelectric oxide we choose is BaTiO3 , which
screening and the depolarization field which suppresses possesses a relatively large spontaneous polarization
ferroelectricity. (Ps ≈ 0.26 C=m2 ) at room temperature [17].
The energy surface versus polarization direction and In order to simulate the energy surface, we vary the
magnitude can be plotted under the electrostatic restrictions surface potential φs and polarization Px . For each φs , charge
expressed in Eq. (20). After acquiring the energy surface, density Qðz ¼ 0Þ and polarization Pz are determined
polarization dynamics on the energy surface is simulated by uniquely by Eqs. (16) and (20). At room temperature, the
the Landau-Khalatnikov equation [32–34] BaTiO3 crystal has a tetragonal phase. The polarization

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FIG. 2. Energy surfaces and


their two-dimensional projections
for MOSFET systems with ferro-
electric oxide BaTiO3 of different
sizes. Parameters used in the
simulation are given in Ref. [22].
(a) dx ¼ 400 nm and dz ¼
200 nm, polarization in plane fa-
vored. Polarizations correspond-
ing to the four local minima are
marked as Pxþ , Px− , Pzþ , and
Pz− . (b) dx ¼ 400 nm and dz ¼
800 nm, polarization out of plane
favored. The polarization dynam-
ics is marked with the dashed
lines: path 1, polarization rotation;
path 2, polarization inversion.

 
orients either out of plane or in plane. We set the in-plane 1 Qðz ¼ 0Þλz
polarization direction as the x direction and Py ¼ 0. Here, Ez ¼ V − f½Qðz ¼ 0Þ − ; ð25Þ
dz g ε0 εe
we should also note that we assume that the in-plane
polarization has no effect on the channel. Therefore, it is  
1 0.26λz
not necessary that the source channel-drain-current flows jEz ðPzþ Þj ¼ 0.962 þ > jEz ðPz− Þj
along the x direction. Electric field E is obtained by the dz ε0 εe
 
electrostatic restrictions in Eq. (20). Then energy surfaces 1 0.26λz
describing Gibbs free energy G with respect to Px and Pz are ¼ 0.4346 þ : ð26Þ
dz ε0 εe
calculated by formulas (1) and (2).
In Fig. 2, we plot two energy surfaces of BaTiO3 with
different thicknesses in the x and z directions on a p-type
silicon substrate. 0.26
From the graphs, we can see that, for out-of-plane
Charge Density (C/m )
2

polarization, a negative orientation (pointing to the gate


electrode, with the negative ends of the oxide dipoles 0
toward the channel) is more favorable when there is no
applied voltage. This is because, for a p-type silicon
substrate, positive screening charge is more likely to -0.26
accumulate at the interface, leading to the polarization
pointing away from the substrate or ferroelectric oxide
interface. Figure 3 shows the relationship of the surface -0.5
potential and the interface charge density in the p-type
-0.4346 -0.2 0 0.2 0.4 0.6 0.8 0.962
silicon substrate. A positive (pointing to the silicon sub-
Surface Potential (V)
strate) spontaneous polarization Pzþ ≈ 0.26 C=m2 corre-
sponds to a surface potential φs ¼ 0.962 V, while FIG. 3. The relationship of the surface potential and interface
Pz− ≈ −0.26 C=m2 corresponds to a surface potential charge density in the doped silicon substrate. Positive polariza-
φs ¼ −0.4346 V. The depolarization fields through the tion (negative screening charge) corresponds to a larger surface
ferroelectric oxide are calculated with Eq. (20): potential and depolarization field.

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YUBO QI AND ANDREW M. RAPPE PHYS. REV. APPLIED 4, 044014 (2015)
0.27
The depolarization field for positive polarization is larger,
and this explains why, on the energy surface with no gate 0.26
voltage, a negative polarization is more favorable than a

Polarization Pz+ (C/m )


positive one. 0.25

2
Besides, the graphs also demonstrate the known relation
0.24
that the thicker the ferroelectric oxide is in one direction,
the more stable the polarization is in this direction. As 0.23
shown in Eq. (20), if the thickness overwhelms the screen-
0.222
ing length, the potential drop in the electrodes can be
neglected [38]. As a result, the electric field through the
0.21
ferroelectric oxide decreases, making the polarization in
this direction more favorable. 0.2
These results also illustrate that we can modulate the 0 140 300 450 600 750
Thickness dz (nm)
global minimum by adjusting the three-dimensional size of
the ferroelectric oxide. An energy surface we are particu-
FIG. 4. The Pzþ versus dz plot. Only when the thickness in the z
larly interested in possesses the global minimum for Px.
direction dz is below 140 nm is Pzþ smaller than 0.223 C=m2 .
When the gate voltage is applied, the local minimum
corresponding to Pzþ becomes deeper and polarization 
rotates to the z direction. After the gate voltage is turned off, ∂ 2G  2λx
< 0 ⇒ α1 þ α12 P2zþ þ α112 P4zþ þ < 0:
2 
∂Px x ε0 εe
the polarization relaxes back along the x direction. Pz ¼Pzþ d
Meanwhile, the depth of the local minimum for Pzþ is
close to that for Px. In such a situation, a relatively small ð30Þ
applied gate voltage V g could induce polarization to rotate
from the x direction to the z direction. The channel current The value of Pzþ increases with thickness in the z direction,
strongly depends on the interface charge density, which is since a thinner film means a larger depolarization field which
approximately equal to the polarization in the z direction: suppresses the ferroelectricity. The Pzþ − dz relationship is
shown in Fig. 4.
depends on
I ds ⟶ Qðz ¼ 0Þ ≈ Pz : ð27Þ α1 þ α12 P2zþ þ α112 P4zþ < 0 ⇒ 0 < Pzþ < 0.223 C=m2 :
ð31Þ
Here, we provide guidance about how to select the
optimal widths of the ferroelectric oxide, in order to make Therefore, dz < 140 nm is a necessary condition for the
the polarization rotation likely to occur. First, in order to polarization rotating back to the x direction:
make the polarization orient in the x direction without gate
voltage, the depolarization field for Px should be smaller 2λx
α1 þ < 0 ⇒ dx > 167 nm: ð32Þ
than the one that corresponds to Pz− : d x ε0 εe
 
1  2 × 0.26λx  According to the analysis above, in this study, the BaTiO3
jEx j ¼  < jEz ðPz− Þj dimensions are selected as dx ¼ 400 nm and dz ¼ 100 nm.
dx ε0 εe 
  Hysteresis loops with different values of γ 0 are calculated
1 0.26λz and shown in Fig. 5. It demonstrates that if γ 0 is too large,
¼ 0.4346 þ : ð28Þ
dz ε0 εe the out-of-plane polarization cannot reduce to 0 and the
device is not ready for the next program cycle. From our
Typically, the dielectric constant and screening length of simulation, the threshold γ 0 for out-of-plane polarization
the noble-metal electrodes are εe ¼ 2 and λ ¼ 0.4 Å, returning to 0 completely is around 1.0 × 105 m=F. γ 0 is
respectively [28]. For these values, we have the criterion not only frequency dependent as shown in Eq. (23) but also
dependent on the resistance in the circuit [39,40], since
dz polarization dynamics is accompanied by screening charge
< 0.87: ð29Þ
dx transmission [28,41]. Therefore, in order to make γ 0 in the
acceptable range and to have a short switching time, the
In order to have a programmable device, when the applied resistance in the circuit should be low.
gate voltage V g returns 0, the polarization should sponta- To evaluate the performance of MOSFET, the drain-
neously return from the Pzþ position to the minimum for Px source current I ds and gate voltage V g relationship
on the energy surface. According to the Landau-Khalatnikov is calculated based on the Pao-Sah double integral.
equation, the Pzþ position on the energy surface should be a The simulated hysteresis loop and I ds − V g curve for
saddle point: γ 0 ¼ 1.0 × 104 m=F are shown in Fig. 6(b).

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Figure 7 shows the potential diagrams along the z direction


of top electrode-ferroelectric oxide-bottom electrode sys-
tems at 0 applied gated voltage [42]. During the polariza-
tion reorientation period, the polarization changes suddenly
from an in-plane one corresponding to zero surface
potential to a positive out-of-plane polarization, which
maintains a large surface potential as demonstrated in
Figs. 3 and 7. The surface potential is boosted as
∂V g
< 1; ð34Þ
∂φs
causing S to break the 60 mV=decade limit.
Compared with polarization inversion, polarization rota-
tion possesses many advantages for electronic device
FIG. 5. Hysteresis loop of the out-of-plane polarization Pz , with applications. First, as shown in Fig. 2, the polarization-
different values of γ 0 . rotation process encounters a much lower energy barrier,
leading to a lower polarization-rotation voltage [43] and
a smaller polarization dynamic parameter. Besides, this
From the simulation, it can be seen that the on-off ratio of
design is quite suitable for programmable electronic devi-
the channel current is large, which means that this device is
ces. Like the traditional SiO2 -based MOSFET, the channel
extremely suitable for logic technology. This large on-off
current is turned off under the removal of the gate voltage.
ratio results from spontaneous polarization rotation, because
Thus, there should not be a local minimum for Pzþ. dz must
the spontaneous polarization attracts screening charge as free
be small (< 140 nm) so that the depolarization field in the z
carriers, leading to a large on current. The segments in the
direction is large. For the polarization inversion case, the
I ds − V g curve circled by dashed lines possess subthreshold
local minimum for Pz− should be deeper than that for Pxþ
swings S lower than 60 mV=decade. For the segment with
or Px−, which requires a dx with nearly the same dimension
I ds and V g increasing, S ¼ 53 mV=decade, and the S of the
as dz . Such a smaller-scale oxide sets a much higher
decreasing segment is even lower. This is because, as the
requirement for fabrication. Also, the working state of the
gate voltage V g increases and exceeds the threshold voltage,
MOSFET can be modulated by a unidirectional gate
the polarization rotates and boosts free carriers in the silicon voltage, by just the application and removal, rather than
channel, inducing a steep increase of the channel current. flipping the direction. What is more, this simulation and the
From Fig. 6, we can see that the steep change of the channel guidance about designing the ferroelectric oxide size can be
current is accompanied by polarization reorientation. extended to other types of channel, such as quantum wells,
S can be expressed as [20] granular films, and graphene [6,44–48]. The only aspect
that must be modified according to the electric properties of
∂V g ∂V g ∂φs
S¼ ¼ : ð33Þ new channels is the surface potential-interface charge
∂ðlog10 I ds Þ ∂φs ∂ðlog10 I ds Þ density relationship

FIG. 6. (a) Hysteresis loop of the in-plane polarization Px and out-of-plane polarization Pz , effective polarization dynamic parameter
γ 0 ¼ 1.0 × 104 m=F. (b) I ds − V g curve of MOSFET. In the circled part, the inverse slope swing is lower than 60 mV=decade.

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the polarization distribution in plane has little effect on


the channel conductance.

IV. CONCLUSION
In summary, the polarization distribution in 3D and the
electrical properties of the electrodes and the silicon
substrate are highlighted in this LGD-theory-based model.
Our model demonstrates that polarization reorientation can
modulate the drain-source current effectively. Besides, the
choice of electrodes and the dimensions of the ferroelectric
oxide are key factors in determining the performance of a
MOSFET with depolarization fields. With a proper selec-
tion of the thicknesses, a field-effect transistor with low
operating voltage and fast switching (S < 60 mV=decade)
can be achieved by the polarization reorientation of the
ferroelectric oxide.

ACKNOWLEDGMENTS
FIG. 7. Potential diagrams of the systems with (a) polarization
in the plane, so that in the z direction the ferroelectric oxide is Y. Q. acknowledges the support of the National Science
essentially a normal dielectric material; (b) polarization out of Foundation, under Grant No. DMR1124696. A. M. R.
plane and both electrodes are noble metals; (c) polarization out of acknowledges the support of the Department of
plane. The top electrode is noble metal, and the bottom one is Energy, under Grant No. DE-FG02-07ER15920. Both
doped silicon substrate. The potential should decay to 0. For authors thank the National Energy Research Scientific
simplicity, the curve truncates at 2 nm from the oxide-silicon Computing Center for their computational support. The
interface.
authors thank Jonathan E. Spanier for productive discus-
sions about this work.
φs ¼ f½Qðz ¼ 0Þ: ð35Þ

Recently, a granular-film-based electric-field sensor


system has been systematically investigated [45]. This [1] S. Mathews, R. Ramesh, T. Venkatesan, and J. Benedetto,
device design has a wide range of potential application Ferroelectric field effect transistor based on epitaxial per-
in electric-field sensors, temperature sensors and memory ovskite heterostructures, Science 276, 238 (1997).
cells. For the granular film, both positive and negative out- [2] R. C. Naber, C. Tanase, P. W. Blom, G. H. Gelinck, A. W.
of-plane polarization can induce a screening charge in Marsman, F. J. Touwslager, S. Setayesh, and D. M. De
metallic grains and enhance the conductivity. Therefore, Leeuw, High-performance solution-processed polymer ferro-
our polarization-rotation design also has significance in electric field-effect transistors, Nat. Mater. 4, 243 (2005).
[3] J. Hoffman, X. Pan, J. W. Reiner, F. J. Walker, J. Han, C. H.
modulating such devices. The graphene sensor is a similar
Ahn, and T. Ma, Ferroelectric field effect transistors for
case [46]: Out-of-plane polarization in any direction can memory applications, Adv. Mater. 22, 2957 (2010).
shift the Fermi level away from the Dirac point and make [4] H. Fu and R. E. Cohen, Polarization rotation mechanism for
the channel conductive. Polarization rotation could be an ultrahigh electromechanical response in single-crystal pie-
effective method to turn on or off the channel current. zoelectrics, Nature (London) 403, 281 (2000).
In this paper, the focus is BaTiO3 , but this analytical [5] H. Kimura, T. Hanyu, M. Kameyama, Y. Fujimori, T.
model can also be applied to other ferroelectric oxides, such Nakamura, and H. Takasu, Complementary ferroelectric-
as PbTiO3 and PbZr1−x Tix O3 . PbTiO3 possesses a larger capacitor logic for low-power logic-in-memory VLSI, IEEE
energy barrier in the polarization process compared with J. Solid-State Circuits 39, 919 (2004).
BaTiO3 [49]. Therefore, a larger applied gate voltage would [6] L. Liu, V. Narayanan, and S. Datta, A programmable
be needed, or we could use PbTiO3 with smaller dimen- ferroelectric single electron transistor, Appl. Phys. Lett.
102, 053505 (2013).
sions. Also, a single-domain ferroelectric oxide is assumed
[7] Y. Chen, Y. En, Y. Huang, X. Kong, W. Fang, and X. Zheng,
in this model. However, the effect is not limited to a single Effects of stress and depolarization on electrical behaviors
crystal. When a gate voltage is applied, polarization in of ferroelectric field-effect transistor, IEEE Electron Device
the z direction increases in different grains, and finally Lett. 33, 110 (2012).
the polarization becomes approximately uniform. After the [8] H.-P. Chen, V. C. Lee, A. Ohoka, J. Xiang, and Y. Taur,
voltage is removed, the polarization relaxes back to the Modeling and design of ferroelectric MOSFETs, IEEE
plane. Multiple domains may form in each grain, but Trans. Electron Devices 58, 2401 (2011).

044014-8
DESIGNING FERROELECTRIC FIELD-EFFECT … PHYS. REV. APPLIED 4, 044014 (2015)

[9] L. Bellaiche, A. Garcia, and D. Vanderbilt, Electric-field [25] A. M. Kolpak, N. Sai, and A. M. Rappe, Short-circuit
induced polarization paths in PbðZr1−x Tix ÞO3 alloys, Phys. boundary conditions in ferroelectric PbTiO3 thin films,
Rev. B 64, 060103(R) (2001). Phys. Rev. B 74, 054112 (2006).
[10] J. Hlinka and Márton, Phenomenological model of a 90° [26] P. Wurfel and I. P. Batra, Depolarization-field-induced
domain wall in BaTiO3 -type ferroelectrics, Phys. Rev. B 74, instability in thin ferroelectric films—Experiment and
104104 (2006). theory, Phys. Rev. B 8, 5126 (1973).
[11] V. Nagarajan, A. Roytburd, A. Stanishevsky, S. [27] J. Junquera and P. Ghosez, Critical thickness for ferroelec-
Prasertchoung, T. Zhao, L. Chen, J. Melngailis, O. tricity in perovskite ultrathin films, Nature (London) 422,
Auciello, and R. Ramesh, Dynamics of ferroelastic do- 506 (2003).
mains in ferroelectric thin films, Nat. Mater. 2, 43 (2002). [28] D. Kim, J. Jo, Y. Kim, Y. Chang, J. Lee, J.-G. Yoon, T. Song,
[12] C. H. Ahn, A. Bhattacharya, M. Di Ventra, J. N. Eckstein, and T. Noh, Polarization Relaxation Induced by a Depo-
C. D. Frisbie, M. E. Gershenson, A. M. Goldman, I. H. larization Field in Ultrathin Ferroelectric BaTiO3 Capaci-
Inoue, J. Mannhart, A. J. Millis, F. Morpurgo, Alberto, tors, Phys. Rev. Lett. 95, 237602 (2005).
D. Natelson, and J.-M. Triscone, Electrostatic modification [29] C. kittel, Introduction to Solid State Physics (Wiley,
of novel materials, Rev. Mod. Phys. 78, 1185 (2006). New York, 1971), Vol. 7, p. 247.
[13] K. S. Takahashi, M. Gabay, D. Jaccard, K. Shibuya, T. [30] S. M. Sze and K. K. Ng, Physics of Semiconductor Devices
Ohnishi, M. Lippmaa, and J.-M. Triscone, Local switching (Wiley, New York, 2006).
of two-dimensional superconductivity using the ferroelec- [31] Y. Taur et al., Fundamentals of Modern VLSI Devices
tric field effect, Nature (London) 441, 195 (2006). (Cambridge University Press, Cambridge, England, 1998),
[14] N. Reyren, S. Thiel, A. D. Caviglia, L. F. Kourkoutis, G. Vol. 2.
Hammerl, C. Richter, C. W. Schneider, T. Kopp, A. S. [32] L. Landau and I. Khalatnikov, Dokl. Akad. Nauk SSSR 96,
Rüetschi, D. Jaccard, M. Gabay, D. A. Muller, J.-M. 469 (1954).
Triscone, and J. Mannhart, Superconducting interfaces [33] V. C. Lo, Simulation of thickness effect in thin ferroelectric
between insulating oxides, Science 317, 1196 (2007). films using Landau-Khalatnikov theory, J. Appl. Phys. 94,
[15] I. Batra, P. Wurfel, and B. Silverman, Phase transition, 3353 (2003).
stability, and depolarization field in ferroelectric thin films, [34] W. Zhang and K. Bhattacharya, A computational model of
Phys. Rev. B 8, 3257 (1973). ferroelectric domains. Part I: Model formulation and domain
[16] N. Sai, A. M. Kolpak, and A. M. Rappe, Ferroelectricity in switching, Acta Mater. 53, 185 (2005).
ultra-thin perovskite films, Phys. Rev. B 72, 020101(R) [35] Y.-H. Shin, I. Grinberg, I.-W. Chen, and A. M. Rappe,
(2005). Nucleation and growth mechanism of ferroelectric domain-
[17] W. A. Al-Saidi and A. M. Rappe, Density functional study wall motion, Nature (London) 449, 881 (2007).
of PbTiO3 nanocapacitors with Pt and Au electrode, Phys. [36] R. Xu, S. Liu, I. Grinberg, J. Karthik, A. R. Damodaran,
Rev. B 82, 155304 (2010). A. M. Rappe, and L. W. Martin, Ferroelectric polarization
[18] M. A. Mendez-Polanco, I. Grinberg, A. M. Kolpak, S. V. reversal via successive ferroelastic transitions, Nat. Mater.
Levchenko, C. Pynn, and A. M. Rappe, Stabilization of 14, 79 (2015).
highly polarized PbTiO3 nanoscale capacitors due to in- [37] H. C. Pao and C.-T. Sah, Effects of diffusion current on
plane symmetry breaking at the interface, Phys. Rev. B 85, characteristics of metal-oxide (insulator)-semiconductor
214107 (2012). transistors, Solid State Electron. 9, 927 (1966).
[19] S. Datta, R. Bijesh, H. Liu, D. Mohata, and V. Narayanan, in [38] J. E. Spanier, A. M. Kolpak, J. J. Urban, I. Grinberg, L.
Proceedings of the 2013 IEEE International Reliability Ouyang, W. S. Yun, A. M. Rappe, and H. Park, Ferroelectric
Physics Symposium (IRPS) (IEEE, New York, 2013), phase transition in individual single-crystalline BaTiO3
pp. 6A–3. nanowires, Nano Lett. 6, 735 (2006).
[20] S. Salahuddin and S. Datta, Use of negative capacitance to [39] S. Sivasubramanian, A. Widom, and Y. Srivastava, Equiv-
provide voltage amplification for low power nanoscale alent circuit and simulations for the Landau-Khalatnikov
devices, Nano Lett. 8, 405 (2008). model of ferroelectric hysteresis, IEEE Trans. Ultrason.
[21] C. Krowne, S. Kirchoefer, W. Chang, J. Pond, and L. Ferroelectr. Freq. Control 50, 950 (2003).
Alldredge, Examination of the possibility of negative [40] Y. Zhou, H. Chan, C. Lam, and F. G. Shin, Mechanisms of
capacitance using ferroelectric materials in solid state imprint effect on ferroelectric thin films, J. Appl. Phys. 98,
electronic devices, Nano Lett. 11, 988 (2011). 024111 (2005).
[22] N. A. Pertsev, A. G. Zembilgotov, and A. K. Tagantsev, [41] S. V. Kalinin, C. Y. Johnson, and D. A. Bonnell, Domain
Effect of Mechanical Boundary Conditions on Phase Dia- polarity and temperature induced potential inversion on the
grams of Epitaxial Ferroelectric Thin Films, Phys. Rev. Lett. BaTiO3 (100) surface, J. Appl. Phys. 91, 3816 (2002).
80, 1988 (1998). [42] K. M. Rabe, C. H. Ahn, and J.-M. Triscone, Physics of
[23] V. G. Koukhar, N. A. Pertsev, and R. Waser, Thermody- Ferroelectrics: A Modern Perspective (Springer, New York,
namic theory of epitaxial ferroelectric thin films with dense 2007), Vol. 105, pp. 96–97.
domain structures, Phys. Rev. B 64, 214103 (2001). [43] T. Qi, Y. H. Shin, K. L. Yeh, K. A. Nelson, and A. M. Rappe,
[24] R. R. Mehta, B. D. Silverman, and J. T. Jacobs, Depolari- Collective Coherent Control: Synchronization of Polariza-
zation fields in thin ferroelectric films, J. Appl. Phys. 44, tion in Ferroelectric PbTiO3 by Shaped THz Fields, Phys.
3379 (1973). Rev. Lett. 102, 247603 (2009).

044014-9
YUBO QI AND ANDREW M. RAPPE PHYS. REV. APPLIED 4, 044014 (2015)

[44] A. Ali, H. Madan, R. Misra, A. Agrawal, P. Schiffer, carrier density modulation in graphene, Nat. Commun. 6, 6136
J. Boos, B. R. Bennett, and S. Datta, Experimental (2015).
determination of quantum and centroid capacitance in [47] X. Hong, A. Posadas, K. Zou, C. H. Ahn, and J. Zhu, High-
arsenide-antimonide quantum-well mosfets incorporating Mobility Few-Layer Graphene Field Effect Transistors
nonparabolicity effect, IEEE Trans. Electron Devices 58, Fabricated on Epitaxial Ferroelectric Gate Oxides, Phys.
Rev. Lett. 102, 136808 (2009).
1397 (2011).
[48] X. Hong, J. Hoffman, A. Posadas, K. Zou, C. H. Ahn,
[45] O. G. Udalov, N. M. Chtchelkatchev, and I. S. Beloborodov,
and J. Zhu, Unusual resistance hysteresis in n-layer
Proximity coupling of a granular film with a ferroelectric
graphene field effect transistors fabricated on ferroelectric
substrate and giant electroresistance effect, Phys. Rev. B 90, PbðZr0.2 Ti0.8 ÞO3 , Appl. Phys. Lett. 97, 033114 (2010).
054201 (2014). [49] R. E. Cohen, Electronic structure studies of the differences
[46] C. Baeumer, D. Saldana-Greco, J. M. P. Martirez, A. M. Rappe, in ferroelectric behaviour of BaTiO3 and PbTiO3 , Ferro-
M. Shim, and L. W. Martin, Ferroelectrically driven spatial electrics 136, 65 (1992).

044014-10

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