Ultrasonics 52 (2012) 306–314

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Ultrasonics
journal homepage: www.elsevier.com/locate/ultras

A theoretical study of the propagation of Rayleigh waves in a functionally

graded piezoelectric material (FGPM)
Issam Ben Salah a,⇑, Anouar Njeh b, Mohamed Hédi Ben Ghozlen a
a
Laboratoire Physique des Matériaux, Faculté des Sciences de Sfax, BP 1171, 3000 Sfax, Tunisia
b
Unité de Physique, Infomatique et Mathématique, Faculté des Sciences de Gafsa, 2112 Gafsa, Tunisia

a r t i c l e i n f o a b s t r a c t

Article history: An exact approach is used to investigate Rayleigh waves in a functionally graded piezoelectric material
Received 27 April 2011 (FGPM) layer bonded to a semi infinite homogenous solid. The piezoelectric material is polarized when
Received in revised form 10 August 2011 the six fold symmetry axis is put along the propagation direction x1. The FGPM character imposes that
Accepted 30 August 2011
the material properties change gradually with the thickness of the layer. Contrary to the analytical
Available online 7 September 2011
approach, the adopted numerical methods, including the ordinary differential equation (ODE) and the
stiffness matrix method (SMM), treat separately the electrical and mechanical gradients. The influences
Keywords:
of graded variations applied to FGPM film coefficients on the dispersion curves of Rayleigh waves are dis-
Piezoelectric
Functionally graded piezoelectric material
cussed. The effects of gradient coefficients on electromechanical coupling factor, displacement fields,
Stiffness matrix method stress distributions and electrical potential, are reported. The obtained deviations in comparison with
ODE method the ungraded homogenous film are plotted with respect to the dimensionless wavenumber. Opposite
Surface acoustic waves effects are observed on the coupling factor when graded variations are applied separately. A particular
attention has been devoted to the maximum of the coupling factor and it dependence on the stratification
rate and the gradient coefficient. This work provides with a theoretical foundation for the design and
practical applications of SAW devices with high performance.
Ó 2011 Elsevier B.V. All rights reserved.

1. Introduction have been carried out on transverse surface waves in inhomoge-

Recently, functionally graded piezoelectric materials (FGPMs)
have attracted the interest of investigators because they can be
used to manufacture surface acoustic wave (SAW) devices such
as sensors, resonators and transducers, which are extensively used
in communication, navigation and many other fields [1]. Accord-
ingly the research of SAW propagation behavior and characteristics
in FGPM has become a topic of practical importance. The function-
ally graded piezoelectric material is a kind of piezoelectric material
with material composition and properties varying continuously in
certain direction. The piezoelectric devices can be entirely made of
FGPM or use FGPM as a transit interlayer between two different
piezoelectric materials. FGPM is the composite material intention-
ally designed to possess desirable properties for some specific
applications [2]. It is well established that this new kind of materi-
als can improve the reliability or the service life of piezoelectric de-
vices [1,2]. Danoyan and Piliposian [3] studied the existence and
behavior of surface electro-elastic horizontal waves in a similar
layered structure when the shear bulk wave velocity in the elastic
layer is greater than or equal to that in the substrate. Many studies
⇑ Corresponding author. Fax: +216 74403934.
E-mail address: bs_issam@yahoo.fr (I. Ben Salah).
nous half-space [4,5] or layered structure [6–8]. However, no the-
oretical results have been published on the propagation of Rayleigh
surface waves in a structure that is covered by an inhomogenous
thin film of which the properties vary continuously along the
depth. Cao et al. [9] deal with dispersion relation of Rayleigh waves
in a FGPM half-space by the perturbation technique. In a previous
work, we have studied the propagation of Love wave in a function-
ally graded piezoelectric layer/substrate system by stiffness matrix
method, in the present study an additional ODE method is used to
describe a state space approach which reduces the wave propaga-
tion problem to a first order matrix differential equation. That pro-
cess greatly simplifies the formulation of the boundary value
problem for multilayer [10,11].
This manuscript presents a theoretical calculation of Rayleigh
wave propagation in functionally graded piezoelectric material
(FGPM) with inhomogenous properties along its depth. For that
purpose the stiffness matrix method (SMM) [12,13] and the ordin-
ary differential equation (ODE) [11] are used. Based on the above
methods, we study the influence of gradient coefficient on physical
properties of thin film and on the coupled electromechanical fac-
tor. The concrete system studied here is the well known hetero
structure PZT-5H/SiO2 [8]. The results of this study can be useful
in engineering applications of the Rayleigh waves.

0041-624X/$ - see front matter Ó 2011 Elsevier B.V. All rights reserved.
doi:10.1016/j.ultras.2011.08.016
 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314 307

2. Theoretical background Table 1

Elastic and electrical properties of piezoelectric film (PZT-5H) [18].

2.1. Problem statement C11 = C22 (GPa) C12 (GPa) C13 = C23 (GPa) C33 (GPa) C44 = C55 (GPa)
151 98 96 124 23
The basic configuration consists of a piezoelectric PZT-5H layer e31 = e32 (C/m2) e33 (C/m2) e15 = e24 (C/m2) e11 (C/Vm) e33 (C/Vm)
9
deposited on an isotropic SiO2 substrate, as shown in Fig. 1a. Their 5.1 27 17 15  10 13.27  109
corresponding elastic, piezoelectric and electric properties are re- q (kg/m3)
7500
ported in Tables 1 and 2. The film thickness labeled h is equal to
100 lm. Usually, the thickness of the substrate is much greater
than that of the layer for SAW devices, such that the structure
can be treated as a layered piezoelectric half space problem. The Table 2
Elastic and electrical properties of substrate (SiO2) [19].
rectangular Cartesian coordinates (x1, x2, x3) are selected so that
the (x1–x3) plane is parallel to Rayleigh wave polarization. The Ray- C11(GPa) C12 (GPa) e33 (C/Vm) q (kg/m3)
leigh mode becomes piezoactive when the PZT-5H six fold symme- 78.5 16.1 33  1012 2200
try axis is put along the propagation direction x1. The mechanical
and electrical material properties of the smart functionally graded
material vary continuously in the thickness direction.

2.2. Governing differential equations

Let us consider a generally anisotropic medium and a harmonic

wave propagating along the x1-axis of the form n(x3) ex-
p [i(k1x1  xt)] where k1 is the projection of the wave vector along
x1 axis. The normal stress vector ti3 = [t13, t23, t33] and the particle
displacement u = [u1, u2, u3] are chosen as the six mechanical vari-
ables. For piezoelectric material the electric potential / and the
normal electric displacement component D3, are chosen as two
electric variables which must satisfy boundary relationships. This
set of independent parameters is sufficient to describe the behavior
of the system. The eight-component state vector n = [u, , ti3, D3]T for
functionally graded piezoelectric material is utilized to write con-
stitutive equations and motion equation in the form of an ordinary
differential equation system in x3 [12–15].

@n
¼ iAn ð1Þ Fig. 2. Electromechanical coupling factor for different number of sub-layers.
@x3
where A is the fundamental acoustic tensor [14,15]. For the actual
configuration, the sagittal-plane displacement components u1, u3 2.3. Implementation for a functionally graded piezoelectric material
and / are uncoupled from the transverse component u2. Accord-
ingly the transverse displacement can be excluded and A becomes The acoustic tensor A is given by Adler [11] in terms of the sub-
6  6. matrices Cik(x3) and density q(x3), both are dependent on the
The study of wave propagation in inhomogenous media using depth.Cik given below, associated with an reduced A, are easily de-
formalism (1) has been used for a long time mainly in seismology duced from Adler development [11] after excluding the sub-space
[16,17]. The matrix A is a function of material properties, wave x2:
number and frequency. To solve the differential Eq. (1), we define 2 3
C 1i1k C 1i3k ek1i
a partial stiffness matrix K associated with a homogenous sub-
Cik ¼ 6
4 C 3i1k C 3i3k
7
ek3i 5ðwith i; k ¼ 1; 3Þ
layer, which relates the generalized stress and displacement in
plane x3 [12,13]. ei1k ei3k eik

(a) (b)
Fig. 1. (a) An elastic half-space covered by a piezoelectric layer and (b) The FGPM layer structure divided into N sub-layers with exponential variation.
308 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314

For an arbitrarily functionally graded piezoelectric layer with characteristics of wave propagation, and make use of it for design-
thickness h, the sub-matrices Cik(x3) and density q(x3) at position ing more effective devices in practice.
x3 can be written as:

Cik ðx3 Þ ¼ C0ik eax3 ; qðx3 Þ ¼ q0 eax3 ð2Þ 2.4. The boundary conditions

At first the gradient coefficient has been fixed a = 4000, the associ-
ated exponential factor is strongly related to the degree of the mate-
rial gradient in the x3-direction. The superscript ‘‘0’’ and a = 0 are
obviously associated with the ungraded layer.
We here assume that all material properties of the piezoelectric
layer as Fig. 1 may have different gradient exponential distribu-
tions along the x3-axis, and the influence of electrical and mechan-
ical parameters can be adjusted separately. Though these material
constants distributions are unrealistic, it would allow us to com-
prehend the influence of separate material gradient upon the
To describe Rayleigh waves in FGPM, the standard mechanical
and electrical boundary conditions should be satisfied. It should
be pointed out that two kinds of electrical boundary conditions,
electrically open and shorted conditions, would be taken into ac-
count in this study. It must be reminded that the generalized stress
vector Tj includes mechanical stress vector ti3 and the normal elec-
trical displacement D3, in the same way the generalized displace-
ment vector Uj includes the mechanical displacement ui and the
electrical potential /.
At the film free surface we have x3 = h

Fig. 3. Phase (a) and group (b) velocities of Rayleigh waves of the first, second and third modes for two different cases of piezoelectric medium short and open conditions in
homogenous materials.
 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314 309

Electric shorted case : t i3 ¼ 0 ði ¼ 1; 3Þ and / ¼ 0 ð3Þ The stiffness matrix method makes up a strong tool computa-
tionally stable to reduce the number of unknown amplitudes rela-
Electric open case : ti3 ¼ 0 ði ¼ 1; 3Þ and r¼0 ð4Þ tives to partial waves in the multilayer. This recursive method
relates generalized stress and displacement vectors in plane x3
r refers to the charge density, it can be deduced from D3 values in [12–15].
the neighborhood of the film free surface [12,14]: Applying the recursive process from the bottom surface (x3 = 0)
to the top surface (x3 = h), therefore the amplitudes in one layer
r ¼ D3 ðhþ Þ  D3 ðh Þ ð5Þ
are expressed in terms of the last layer Af which is fixed to the sub-
At the interface plan/substrate (x3 = 0), both generalized stress T0 strate. f subscript refers to the film. The total stiffness matrix KN,
and displacement U0 vectors are assumed to be continuous. which relates generalized stress and displacement vectors at the
film interfaces x3 = h and x3 = 0, is obtained:
2.5. Stiffness matrix for a FGPM layered    
T h U h
¼ KN ð6Þ
T0 U0
Let us consider a multilayered medium, consisting of N arbi-
trarily anisotropic layers between air and substrate as illustrated For making matrix developments easier KN is divided into four
in Fig. 1b. blocks: K N11 ; K N12 ; K N21 ; K N22 and the generalized stress and displace-

Fig. 4. The relative phase (a) and group (b) velocities change DV/V in ‘‘oc’’ case, (dash-dotted lines) (V(aEM = 4000) – V(a = 0))/V(a = 0), (dotted lines) (V(aE = 4000, aM = 0) –
V(a = 0))/V(a = 0), and (dash lines) (V(aE = 0, aM = 4000) – V(a = 0))/V(a = 0).
310 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314
ment vector at the film free surface can be deduced in term of T0
and U0. Below the results are written according to the As substrate
amplitude basis. From boundary conditions six dimensioned vec-
tors T0 and U0 are replaced by Ts and Us respectively, which are three
dimensioned vectors. Subscript ‘‘s’’ refers to the substrate [14,15].
  1   1
T h ¼ K N12  K N11 K N21 K N22 U s þ K N11 K N21 Ts ð7Þ
 1   velocity.
U h ¼ K N21 T s  K N22 U s ð8Þ
Starting from the interface next to the bottom boundary, using
recursively Eqs. (7) and (8), one obtains the state vector at all inter-
faces. Similarly for the state vectors inside a layered system on a
substrate, the surface stiffness matrix can be calculated once the
state vectors at the top surface have been obtained [12].
At this level, various physical amounts can be deduced accord-
ing to As basis, mainly stress vector ti3, electrical potential / and
charge density r [12,15]. Either in the electrically shorted or open
conditions, (4  4) characteristic matrices Msc and Moc can be
constructed:
 
ti3
¼ Moc ½As ; ð9Þ
r puted on the basis of Eq. (11), where k denotes the guide compo-
 
ti3
¼ Msc ½As  ð10Þ
/
For both cases Rayleigh velocity is the zero of Moc,sc matrices.
3. Results and discussions
For the FGPM material the electric and mechanical characteris-
tics relative to one layer, possess exponential variation pattern.
Discussions are carried out to investigate their influences on the
dispersive character of Rayleigh waves when polarization is either
electrically open or shorted circuit. The adopted material system
consists of PZT-5H film deposited on isotropic SiO2 substrate. This
combination system is frequently investigated by several research
Fig. 5. Electromechanical coupling factor of the first mode with h = 100 lm.
groups, most studies are mainly focused on the electromechanical
coupling factor and its improvement [4,6–8,10]. Because of the
contrast between mechanical characteristics of SiO2 and PZT-5H
(Tables 1 and 2) [18,19], the Rayleigh surface acoustic waves veloc-
ity decreases when the nondimensional wavenumber product kh
increases. At the low frequency range phase velocity starts at the
Rayleigh velocity of the substrate, and at the high frequency range
Rayleigh velocity is almost constant and identical to film’s Rayleigh
The computational procedure is based both on the generalized
stiffness matrix methods and the ordinary differential equation.
For the calculation of the phase velocity Vph and the profiles of var-
ious magnitudes, we have used elastic and electrical properties of
piezoelectric film and substrate (cf. Tables 1 and 2). Since the elec-
trical and mechanical film characteristics are function of x3, i.e.
Cijkl = Cijkl(x3), eijk = eijk(x3) and ij = ij(x3), the film is divided into N
layers with equal thickness and different characteristics. Each layer
is considered as homogenous and the ODE method can be applied
[11]. The calculation of surface wave velocity is performed accord-
ing to the standard procedure [12,13], on the basis of SMM and
continuity criterion [12–15]. The dispersive behavior has been
completed by an investigation of the group velocity labeled Vg,
which describes the rate at which energy is transported. Vg is com-
nent of the wave vector [20]:
V g ¼ V ph þ kðdV ph =dkÞ ð11Þ
3.1. Accuracy of the solution
The numerical studies have been carried out based on the meth-
od of dividing the whole layer into a variable N sub-layers and
treating each one as a homogenous layer. The stiffness matrix
method, which has been proved to have good convergence and
high stability, is employed for theoretical derivations. Fig. 2 pre-
sents the electromechanical coupling factor of the first mode, as
calculated through the stiffness matrix method for different N
(1, . . ., 100).
The gradient coefficient has been fixed: a = 4000.
 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314
Fig. 6. Relation between the electromechanical coupling factor and the gradient
variation of the first mode with h = 100 lm.
For this case, the convergence remains almost unchanged, while
the error is so small that it can be neglected for N P 10. It can be
seen that the curves of the electromechanical coupling factor ob-
tained by the stiffness matrix method become very close when
the number of sub-layers increases.
3.2. Effect on phase velocity and group velocity
Velocities Vph and Vg are computed for the ungraded hetero-
structure PZT-5H/SiO2 and compared to velocities when the film
is an FGPM material. The explored frequency range extends up to
42 MHz which corresponds to a dimensionless wavenumber
kh = 15.9. Fig. 3a and b shows the phase and group velocities (Vph
and Vg) of the first, second and third modes for the electrically open
‘‘oc’’ and short ‘‘sc’’ cases, respectively as function of kh.
For a = 0, the hetero structure is still ungraded Fig. 3a, the first
mode is highly dispersive in the low frequency range (kh < 4) and
no large deviation between ‘‘sc’’ and ‘‘oc’’ electrical polarizations
has been detected, elsewhere Vph remains fairly unchanged. For
the second and third modes, the phase velocity exhibits compara-
tively high deviations between ‘‘oc’’ and ‘‘sc’’. In addition their cor-
responding cut-off frequencies are wide apart.
Fig. 7. First mode shape for stress distributions T13 in a FGPM layer at kh = 0.33, for different gradient variation for mechanical and electrical properties: (a) sc and (b) oc.
311
Fig. 3b reproduces how group velocity Vg varies with respect to
kh for ‘‘oc’’ and ‘‘sc’’ electrical polarizations. It is seen that for the
first mode, the energy velocity is approximately the same for
‘‘oc’’ and ‘‘sc’’ electrical polarizations. For the remaining modes
the deviation |Vg(oc)  Vg(sc)| is noticeable. In addition group veloci-
ties undergo minimum for all investigated modes.
The relative velocity change DV/V in term of the nondimen-
sional wavenumber kh, Fig. 4a and b, is obtained just after Rayleigh
velocities are computed for homogenous and FGPM film. The ef-
fects are plotted for the first mode when electrical and mechanical
gradient variations are applied separately and altogether. The ef-
fects of about 10% are restricted to a narrow frequency interval
and they are mainly caused by the mechanical gradient variation.
The effects associated with the electrical gradient variation are
comparatively smooth. The reported plots include just ‘‘oc’’ electri-
cal polarization, the same behavior has been observed for ‘‘sc’’.
3.3. Effect on the electromechanical coupling factor
The other significant parameter represents the coupled electro-
mechanical factor K2 which plays an important role in the design of
SAW devices. For the ungraded combination system the deviation
between Rayleigh velocities (Vph (oc)  Vph(sc)) rises with higher
modes; accordingly a higher electromechanical coupling factor K2
is expected. It is defined for surface waves as [21]:
K 2 ¼ 2ðV phðocÞ  V phðscÞ Þ=V phðocÞ ð12Þ
where Vph(oc) and Vph(sc) are the phase velocities for the electrically
open and short circuits, respectively. K2 varies a lot from 11.97%
for the first mode to 35.8% for the second. The maxima are located
near kh = 0.33 and kh = 2.05 respectively, notice that the involved
frequency areas are extremely different. For the first mode K2 is
very sensitive at low frequency range, it exhibits a maximum in
the vicinity of 1.5 MHz, elsewhere it is less then 2%. Fig. 5 shows
the effects of separated gradient variations. The electrical and
mechanical gradient variations lead to opposite effects, i.e. the elec-
trical gradient, applied separately, increases K2 contrary to the
mechanical gradient.
The influence of the gradient coefficient on the electromechan-
ical coupling factor has also been studied, and the results are
shown in Fig. 6. The maximum of K2 previously found at frequency
1.5 MHz for a = 4000, is improved when a reaches 5000. On both
sides of this frequency K2 displays approximately the same maxi-
312 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314

mum with a extremely different. Consequently for FGPM materials
the coupling factor is sensitive to both the frequency and the gra-
dient coefficient.
3.4. Effect of the gradient coefficients on the stress components,
mechanical displacement and electrical potential distribution
Assuming various gradient coefficients (electrical and/or
mechanical) at frequency 1.5 MHz, the variations of the stress
components T13 and T33 with respect to x3/h, for the first mode
are shown in Figs. 7a and b and 8a and b for electrically open
and shorted circuit, respectively. As well, the variation of the
mechanical displacement U1, U3 and electrical potential / with
depth are reported in Figs. 9a and b and 10a and b and 11a and
b respectively. The obtained plots are in agreement with continuity
rules and the free character of the upper surface. Both components
of the mechanical displacements in the (x1, x3) plane satisfy to the
continuity precepts, their amplitudes tend to zero far from the free
surface. The investigation includes three kinds of gradient. The
electrical one corresponds to a = aE = 4000, that means the
mechanical properties are maintained homogenous. For the
mechanical gradient only the elastic constants and the density
are varied (a = aM = 4000). In the last case all the properties are af-
fected by the gradient (a = aEM = 4000). The reported Figs. 7–10 re-
veal opposite effects when the electrical and mechanical gradient
are applied separately. The resulting effect is smoothly slight since
the partial effects are opposite regard to the homogenous piezo-
electric structure either in ‘‘sc’’ or ‘‘oc’’ polarization.
Concerning the electrical potential the same plots have been
achieved but limited to the film thickness, the deviations are on
the same side when compared with the homogenous case (see
Fig. 11). Accordingly when the electrical and mechanical gradients
are applied together the resulting effect is twice. The electrical po-
tential at the interface between the film and the substrate is put
equal one, at the free surface a noticeable contrast is observed be-
tween ‘‘sc’’ and ‘‘oc’’ polarization.

Fig. 8. First mode shape for stress distributions T33 in a FGPM layer at kh = 0.33, for different gradient variation for mechanical and electrical properties: (a) sc and (b) oc.

Fig. 9. First mode shape for mechanical displacement U1 in a FGPM layer at kh = 0.33, for different gradient variation for mechanical and electrical properties: (a) sc and (b) oc.
 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314 313

Fig. 10. First mode shape for mechanical displacement U3 in a FGPM layer at kh = 0.33, for different gradient variation for mechanical and electrical properties: (a) sc and (b)
oc.

Fig. 11. First mode shape for electrical potential / in a FGPM layer at kh = 0.33, for different gradient variation for mechanical and electrical properties: (a) sc and (b) oc.

4. Conclusions
The propagation of surface waves (Rayleigh waves) in function-
ally graded piezoelectric material (FGPM) layer is investigated by a
numerical matrix method. The coupled electromechanical field
equations are solved exactly for the dispersion curves under both
electrically open and short conditions. This numerical approach
has the advantage of conceptual simplicity and flexibility brought
about by the stiffness matrix method and ODE technique. The elec-
trical and mechanical gradients associated with FGPM hetero
structure, are analyzed with respect to the dimensionless wave-
number kh. The numerical approach exhibits a high stability and
a good convergence when the stratification rate is modified. Vari-
ous plots have been performed to view the corresponding effects.
The obtained phase and group velocities are more affected by the
mechanical gradient for a large frequency domain. The electrome-
chanical coupling factor reveals a maximum with respect to the
gradient coefficient, its sensitivity to frequency and gradient coef-
ficient is complex and it should be examined in further work. The
involved frequency area for which coupling is high is quite narrow
and it belongs to the low frequency domain. A high sensitivity and
a small penetration depth of the Rayleigh surface wave could be
expected simultaneously in the layered functionally gradient pie-
zoelectric structure through adjusting the gradient coefficient.
These numerical results can provide theoretical foundation for
the design and practical application of surface acoustic wave de-
vices and sensors. On the other hand, further experimental investi-
gations are needed to exploit in the best way FGPM materials.
Acknowledgments
The authors are grateful for the funding provided to their labo-
ratory by the Tunisian Ministry of Higher Education, Scientific Re-
search. The authors would like to thank the anonymous reviewers
for their valuable comments.
Appendix A. Supplementary material
Supplementary data associated with this article can be found, in
the online version, at doi:10.1016/j.ultras.2011.08.016.
314 I. Ben Salah et al. / Ultrasonics 52 (2012) 306–314

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