Sie sind auf Seite 1von 37

Daily check sheet (WD0)

Date : (Ver. 0_2013.05.29) Inspector Supervisor Quality Engineer Manager

9:00 21:00PM
Machine Unit Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail

Leakage of pipes / fittings

Leakage of tanks / fittings

Leaked chemical in the machine


Inside
Machine: back Bending of pipe
and
underneath Stains, powder, or marks
the tanks
Corrosion of parts and pumps

Are all pumps operating normal?

No metal particle in the machine after IPA wiper Cleaning

Noise or vibration in robot operation

Corrosion of robot and parts

Corrosion, stains, powder, or marks inside tanks

Corrosion, stains, powder, or marks on bench top/wall inside the doors

Corrosion, stains, powder, or marks in loading area

Corrosion, stains, powder, or marks in unloading area

WD0 Cleaning solution or chemical level of each tank

Are all overflows working OK?


Front of
Machine Corrosion or damage of Thermocouples (check only when the tank is empty)

Corrosion or damage of heaters (check only when the tank is empty)

Color of chemical in bath (Normality : Clear)

Particle in Chemical / DI Wafer Bath (Normality : Non)

Is the air flow OK? (check only thread direction is facing down and exhaust section)

Is DI water spray OK in QDRs?

Are DI water nozzles of QDRs working OK?

Are DI water nozzles of QDRs clean?

Corrosion, stains, powder, or marks in exterior walls

Corrosion, stains, powder, or marks in surroundings


Surroundings
and Exteriors Leaked chemical under the machine.
of Machine
Corrosion, stains, metal powder on the robot rail surrounding

Is state of Grease on the rail OK?

Are the door and chamber clean?

Is DI water spray OK?

Is DI water nozzle clean?


Spin Dryer
Is N2 supply valve closed during idling time?

Corrosion of DI water pipes

Corrosion of N2 supply pipes


Daily check sheet (WD1)
Date : (Ver. 1_2013.02.19) Inspector Supervisor Quality Engineer Manager

9:00 21:00PM
Machine Unit Baths Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail

IPA1 (A) Leakage of tanks / pipes / fittings


IAP2 (B)
Voltron Corrosion of parts(valves) and pumps

Leakage of tanks / pipes / fittings


Detergent
Corrosion of parts(valves) and pumps
Inside
Machine: Leakage of tanks / pipes / fittings
back and SC2 (A)
underneath SC2 (B)
Corrosion of parts(valves) and pumps
the tanks
Corrosion of parts and pumps

Bending of pipe
Whole
Leaked chemical in the piping rooms

Leaked chemical under the machine

Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

IPA1 (A) Is ultrasonic working OK?


IAP2 (B)
Voltron Is DI water spray OK and nozzles clean in QDRs?

WD1 Color of chemical in bath (Normality : Clear)

Are all overflows working OK? (only QDR)

Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Detergent Is ultrasonic working OK?

Is DI water spray OK and nozzles clean in QDRs?


Front of
Machine Color of chemical in bath (Normality : Clear)

Corrosion or damage of in-line heater (check only when the tank is empty)

Corrosion or damage of Thermocouples (check only when the tank is empty)


SC2 (A)
SC2 (B) Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Is DI water spray OK and nozzles clean in QDRs?

Color of chemical in bath (Normality : Clear)

Noise or vibration in robot operation


Robot
Loading/ Corrosion, stains, powder, or marks on bench top/wall inside the doors
Unloading
Corrosion, stains, powder, or marks in loading/unloading area
Daily check sheet (WD3)
Date : (Ver. 2_29.May.2013) Inspector Supervisor Quality Engineer Manager

9:00 21:00PM
Machine Unit Baths Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail

Leakage of tanks / pipes / fittings


SC1 (A)
/ SC1 (B) Corrosion of parts(valves) and pumps

Leakage of Heater system

Leakage of tanks / pipes / fittings


HF (A) / HF(B)
Corrosion of parts(valves) and pumps

Inside Leakage of tanks / pipes / fittings


Machine: Detergent
back and Corrosion of parts(valves) and pumps
underneath
the tanks Corrosion of parts and pumps

Are all pumps operation normal?

No metal particle in the machine after IPA wiper cleaning


Whole
Bending of pipes

Leaked chemical in the piping rooms

Leaked chemical under the machine

Are all overflows working OK?

Chemical level of bath

Corrosion or damage of Thermocouples (check only when the tank is empty)


SC1 (A)
/ SC1 (B) Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Is megasonic working OK?


WD3
Is DI water spray OK and nozzles clean in QDRs?

Color of chemical in bath (Normality : Clear)

Are all overflows working OK? (only QDR)

Chemical level of bath

HF (A) / HF(B) Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Is DI water spray OK and nozzles clean in QDRs?


Front of
Machine Color of chemical in bath (Normality : Clear)

Are all overflows working OK? (only QDR)

Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Is ultrasonic working OK?

Detergent Is DI water spray OK and nozzles clean in QDRs?

Does the bubble rise in bath? (Normality : None)

Is the bubble in QDR bath? (Normality : None)

Color of chemical in bath (Normality : Clear)

Robot Noise or vibration in robot operation


Loading/
Unloading Corrosion, stains, powder, or marks in loading/unloading area

Is the air flow OK? (check only thread direction is facing down)
Whole
Corrosion, stains, powder, or marks on bench top/wall inside the doors
Daily check sheet (WD4)
Date : (Ver. 2_29.May.2013) Inspector Supervisor Quality Engineer Manager

9:00 21:00PM
Machine Unit Baths Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail

Leakage of tanks / pipes / fittings

SC2-1 Corrosion of parts(valves) and pumps

Leakage of Heater system

Leakage of tanks / pipes / fittings

SPM Corrosion of parts(valves) and pumps

Leakage of Heater system

Inside Leakage of tanks / pipes / fittings


Machine:
back and
underneath SC2-2 Corrosion of parts(valves) and pumps
the tanks
Leakage of Heater system

Corrosion of parts and pumps

Are all pumps operation normal?

No metal particle in the machine after IPA wiper cleaning


Whole
Bending of pipes

Leaked chemical in the piping rooms

Leaked chemical under the machine

Are all overflows working OK?

WD4 Corrosion or damage of Thermocouples (check only when the tank is empty)

SC2-1 Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Is DI water spray OK and nozzles clean in QDRs?

Color of chemical in bath (Normality : Clear)

Are all overflows working OK?

Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)


SPM
Is DI water spray OK and nozzles clean in QDRs?

Color of chemical in bath (Normality : Clear)


Front of
Machine
Are all overflows working OK?

Corrosion or damage of Thermocouples (check only when the tank is empty)

SC2-2 Particle/Stain in Chemical / DI Wafer Bath (Normality : Non)

Is DI water spray OK and nozzles clean in QDRs?

Color of chemical in bath (Normality : Clear)

Robot Noise or vibration in robot operation


Loading/
Unloading Corrosion, stains, powder, or marks in loading/unloading area

Is the air flow OK? (check only thread direction is facing down)
Whole
Corrosion, stains, powder, or marks on bench top/wall inside the doors
Daily check sheet (CR10K)
Date : Inspector Supervisor Quality Engineer Manager

9:00:AM 21:00PM
Area Unit Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail

Is the entire chemical arranged accordingly and separately?


Chemical
Storage Does the chemical is labeled clearly?

Is the chemical storage place having a clear, clean and safe walk path?

Is there any leakage at the base of the tools

Is the piping outside the tools is properly labeled


WD1, WD3 &
WD4 Does the floor clean?

Is the side wall of the tool clean

Does the outer parts of the tools rusted (visible)

Does the work station is tidy and clean?

Work Station Is the work station is free from any metallic objects?
& PPE
Cabinet Does the PPE cabinet is clean?

Is PPE cabinet having rusted parts

Is the rack clean?


Class 10K
Does the cassette arranged systematically?
Cassettes
Rack
Is there any abnormal substance at the rack?

Is the cassette is clean?

Is the rubber shoe been arranged?

Shoe Rack Is the shoe clean and fit to be use in class 10K?

Is the rack is clean?

Does the floor around spin dryer is dry and clean?

Are the door and chamber clean? (Normality : Non stain and rusts)

Is DI water spray OK?

Spin Dryer Is DI water nozzle clean?

Is N2 supply valve closed during idling time?

Corrosion of DI water pipes

Corrosion of N2 supply pipes

Is the rack dirty and have contacted with rust?

Shoe Rack Is the shoe arranged properly?

Does the shoe clean?

Gowning
Room
Spin Dryer Machine Shiftily Check List
Month : …………………Year :………. ………

DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
a: Phase 1: Rinse DAY
1 Spin Dryer Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
b : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
c: Time /Speed : 80s/1100rpm NIGHT
Phase 1: Rinse DAY
d : Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
e : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
f: Time /Speed : 80s/1100rpm NIGHT
a: Ok or Not DAY
2 N2 Supply NIGHT
a: Ok or Not DAY
3 DIW supply NIGHT
a: no any abnormality: DAY
4 overall machine area ( Leak,Smell, Vibration,sound ) NIGHT
DAY
Time : NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc
issue 3 9 15
/
Remarks
Any mc
issue
/ 4 10
Remarks
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

Spin Dryer Machine Shiftily Check List


Month : …………………Year :………. ………

DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30
a: Phase 1: Rinse DAY
1 Spin Dryer Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
b : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
c: Time /Speed : 80s/1100rpm NIGHT
Phase 1: Rinse DAY
d : Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
e : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
f: Time /Speed : 80s/1100rpm NIGHT
a: Ok or Not DAY
2 N2 Supply NIGHT
a: Ok or Not DAY
3 DIW supply NIGHT
a: no any abnormality: DAY
4 overall machine area ( Leak,Smell, Vibration,sound ) NIGHT
DAY
Time : NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc
issue 18 24 30
/ 19 25 31
Remarks
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
31
WD4 Machine Check List
Month :……
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No
No Abnormality
Abnormality NIGHT
(sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
Tank #1,#3 & #5 DAY
a: recycle pump NIGHT
Tank #2, #4, #6, QDR DAY
b: DI
No suply pump
Abnormality NIGHT
(jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionaly
Tank #5 NIGHT
( Ultrasonic 6 ~ 7 DAY
5 Ultrasonic A) NIGHT
6 Recipe Setting
DAY
Tank #1, #3, #5 600s NIGHT
Temperatur Process
time :

30s ( shower)/ DAY


a: Tank #2, #4, #6 60s ( bubble) NIGHT
Peregrine = 80 ± 5˚C DAY
Tank #1, #5 Others : 40 ± 5˚C NIGHT
Peregrine = 125 ± 5˚C
b: Others : 80 ± 5˚C NIGHT
e:

DAY
Tank #1 & 5 HCL 6.0 ltrs NIGHT
ix By Liters
Chemical Mix By Liters
DAY
Tank #1 & 5 H2O2 3.0 ltrs NIGHT
DAY
Tank #1 & 5 DIW 46.0 ltrs, 41.0 ltrs NIGHT
DAY
Tank #3 H2SO4 50.0 ltrs NIGHT
DAY
c: Tank #3 H2O2 5.0 ltrs NIGHT
No Abnormality: (leak, DAY
7 Overall Machine Area smell,vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue
3 9 15
/
Remarks 4 10
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

WD4 Machine Check List


Month :……
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality
(sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
Tank #1,#3 & #5 DAY
a: recycle pump NIGHT
Tank #2, #4, #6, QDR DAY
b: DI
No suply pump
Abnormality NIGHT
(jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionaly
Tank #5 NIGHT
( Ultrasonic 6 ~ 7 DAY
5 Ultrasonic A) NIGHT
6 Recipe Setting
DAY
Tank #1, #3, #5 600s NIGHT
Process
time :

30s ( shower)/ DAY


a: Tank #2, #4, #6 60s ( bubble) NIGHT
Peregrine = 80 ± 5˚C DAY
Tank #1, #5 Others : 40 ± 5˚C NIGHT
Temp:

Peregrine = 125 ± 5˚C


b: Others : 80 ± 5˚C NIGHT
DAY
Tank #1 & 5 HCL 6.0 ltrs NIGHT
Chemical Mix By Liters

DAY
Tank #1 & 5 H2O2 3.0 ltrs NIGHT
DAY
Tank #1 & 5 DIW 46.0 ltrs, 41.0 ltrs NIGHT
DAY
Tank #3 H2SO4 50.0 ltrs NIGHT
DAY
c: Tank #3 H2O2 5.0 ltrs NIGHT
No Abnormality: (leak, DAY
7 Overall Machine Area smell,vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue
18 24 30
/
Remarks 19 25 31
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
……………………………… Year :………………………………

8 9 10 11 12 13 14 15
……………………………… Year :………………………………

23 24 25 26 27 28 29 30 31
WD3 Machine Check List Month : ……………..…Year : ………………….

DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7 8 9 10 11 12 13 14
DAY
Time : NIGHT
Process Beaker Condition / DAY
1 Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a Tank #1, #3, #5, #7, #9 recycle pump NIGHT
Tank #2, #4, #6, #8, #10 QDR DI DAY
b supply pump NIGHT
No Abnormality (jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionally NIGHT
DAY
5 Ultrasonic Tank #3 & #9 ( Ultrasonic 6 ~ 7 A ) NIGHT
6 Recipe Setting ( Manual Mix )
Process time : DAY
7 Tank #1, #3, #5, #7, #9 600s NIGHT
Process time : DAY
8 Tank #2, #4, #6, #8, #10 30s ( shower)/60s ( bubble) NIGHT
Temperature : DAY
9 Tank #1 & #3 40 °C ± 5 °c NIGHT
Chemical Mix Ratio DAY
10 Tank #1 NH4OH NH4OH – 7L, H2O2 – 5L, DIW- 58L NIGHT
Chemical Mix Ratio DAY
11 Tank #3 NH4OH NH4OH – 5L, H2O2 – 3.5L, DIW – 41L NIGHT
Chemical Mix Ratio DAY
12 Tank #5, #7 HF HF – 14L, DIW – 56L NIGHT
Chemical Mix Ratio DAY
13 Tank #9 Clair CLAIR – 1L, DIW – 44L NIGHT
No Abnormality; (leak, smell, DAY
14 Overall Machine Area vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # )
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue 3 9 15
/ Remarks 4 10
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

WD3 Machine Check List Month : ……………..…Year : ………………….

DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22 23 24 25 26 27 28 29
DAY
Time : NIGHT
Process Beaker Condition / DAY
1 Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a Tank #1, #3, #5, #7, #9 recycle pump NIGHT
Tank #2, #4, #6, #8, #10 QDR DI DAY
b supply pump NIGHT
No Abnormality (jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionally NIGHT
DAY
5 Ultrasonic Tank #3 & #9 ( Ultrasonic 6 ~ 7 A ) NIGHT
6 Recipe Setting ( Manual Mix )
Process time : DAY
7 Tank #1, #3, #5, #7, #9 600s NIGHT
Process time : DAY
8 Tank #2, #4, #6, #8, #10 30s ( shower)/60s ( bubble) NIGHT
Temperature : DAY
9 Tank #1 & #3 40 °C ± 5 °c NIGHT
Chemical Mix Ratio DAY
10 Tank #1 NH4OH NH4OH – 7L, H2O2 – 5L, DIW- 58L NIGHT
Chemical Mix Ratio DAY
11 Tank #3 NH4OH NH4OH – 5L, H2O2 – 3.5L, DIW – 41L NIGHT
Chemical Mix Ratio DAY
12 Tank #5, #7 HF HF – 14L, DIW – 56L NIGHT
Chemical Mix Ratio DAY
13 Tank #9 Clair CLAIR – 1L, DIW – 44L NIGHT
No Abnormality; (leak, smell, DAY
14 Overall Machine Area vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue 18 24 30
/ Remarks 19 25 31
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
15
30 31
WD1 Machine Check List
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality ( sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a: Tank #7, #9 recycle pump NIGHT
DAY
c: Tank #4, #6, #8, #10 QDR DI suply pump NIGHT
DAY
3 Robotic Arm No Abnormality( jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly NIGHT
DAY
5 Ultrasonic Tank #3 and #5 ( Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
Process time : DAY
a 1: Tank #3, #5, #7, #9 600.0s NIGHT
Process time : 20s ( shower)/160s DAY
a 2: Tank #4, #6, #8, #10 ( bubble) NIGHT
Temperature : DAY
b: Tank #7 #9 40 °C ± 5 °c NIGHT
DAY
Tank #3 VALTRON / DI 20.0 ltrs / 80.0 ltrs NIGHT
DAY
Chemical Mix By Liters

Tank #5 CLAIR / DI 5.0 ltrs / 95.0 ltrs NIGHT


DAY
Tank #7 HCL / DI 5.0 ltrs / 55.0 ltrs NIGHT
DAY
Tank #9 HCL / DI 5.0 ltrs / 55.0 ltrs NIGHT
DAY
c: Tank #1, #2, #4, #6, #8, #10. DI WATER Full Level ( DI )
Chemical Mix
c: Tank #1, #2, #4, #6, #8, #10. DI WATER Full Level ( DI ) NIGHT
No Abnormality; (leak, DAY
9 Overall Machine Area smell,vibration,sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue 3 9 15
/ Remarks 4 10
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

WD1 Machine Check List


DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality ( sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a: Tank #7, #9 recycle pump NIGHT
DAY
c: Tank #4, #6, #8, #10 QDR DI suply pump NIGHT
DAY
3 Robotic Arm No Abnormality( jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly NIGHT
DAY
5 Ultrasonic Tank #3 and #5 ( Ultrasonic 2.5 ~ 4 A )
5 Ultrasonic Tank #3 and #5 ( Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
Process time : DAY
a 1: Tank #3, #5, #7, #9 600.0s NIGHT
Process time : 20s ( shower)/160s DAY
a 2: Tank #4, #6, #8, #10 ( bubble) NIGHT
Temperature : DAY
b: Tank #7 #9 40 °C ± 5 °c NIGHT
DAY
Tank #3 VALTRON / DI 20.0 ltrs / 80.0 ltrs NIGHT
DAY
Chemical Mix By Liters

Tank #5 CLAIR / DI 5.0 ltrs / 95.0 ltrs NIGHT


DAY
Tank #7 HCL / DI 5.0 ltrs / 55.0 ltrs NIGHT
DAY
Tank #9 HCL / DI 5.0 ltrs / 55.0 ltrs NIGHT
DAY
c: Tank #1, #2, #4, #6, #8, #10. DI WATER Full Level ( DI ) NIGHT
No Abnormality; (leak, DAY
9 Overall Machine Area smell,vibration,sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue 18 24 30
/ Remarks 19 25 31
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
Month :………………………………… Year :………………………………

8 9 10 11 12 13 14 15
Month :………………………………… Year :………………………………

23 24 25 26 27 28 29 30 31
WD0 Machine Check List
Month :………………………………
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7 8
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a: Tank #3 & #5 circulation pump NIGHT
DAY
b: Tank #2, #4, #6, QDR DI shower pump NIGHT
DAY
3 Robotic Arm No Abnormality (jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly NIGHT
DAY
5 Ultrasonic Tank #1 ( Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
DAY
Tank #1, #3 and #5 600s NIGHT
Process 20s ( shower)/ DAY
a: time : Tank #2, #4, #6 160s ( bubble) NIGHT
DAY
b: Temp: Tank #3 & 5 40 °C ± 5 °c NIGHT
DAY
Tank #1 SILCONOX 5.0 ltrs NIGHT
Chemical Mix By Liters

DAY
Tank #1 DIW 90.0 ltrs NIGHT
DAY
Tank #3 HCL 5.0 ltrs NIGHT
DAY
Tank #3 DIW 90.0 ltrs NIGHT
DAY
Tank #5 HCL 5.0 ltrs

c:
Chemical
Tank #5 HCL 5.0 ltrs NIGHT
DAY
c: Tank #5 DIW 90.0 ltrs NIGHT
No Abnormality: (leak, smell,vibration, DAY
7 Overall Machine Area sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue
3 9 15
/
4 10
Remarks
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

WD0 Machine Check List


Month :………………………………
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22 23
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a: Tank #3 & #5 circulation pump NIGHT
DAY
b: Tank #2, #4, #6, QDR DI shower pump NIGHT
DAY
3 Robotic Arm No Abnormality (jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly NIGHT
DAY
5 Ultrasonic Tank #1 ( Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
DAY
Tank #1, #3 and #5 600s NIGHT
Process 20s ( shower)/ DAY
a: time : Tank #2, #4, #6 160s ( bubble) NIGHT
DAY
b: Temp: Tank #3 & 5 40 °C ± 5 °c NIGHT
DAY
Tank #1 SILCONOX 5.0 ltrs NIGHT
Chemical Mix By Liters

DAY
Tank #1 DIW 90.0 ltrs NIGHT
DAY
Tank #3 HCL 5.0 ltrs NIGHT
DAY
Tank #3 DIW 90.0 ltrs NIGHT
DAY
Tank #5 HCL 5.0 ltrs NIGHT
DAY
c: Tank #5 DIW 90.0 ltrs NIGHT
No Abnormality: (leak, smell,vibration, DAY
7 Overall Machine Area sound) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue
18 24 30
/
19 25 31
Remarks
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
………………………………… Year :………………………………

9 10 11 12 13 14 15
………………………………… Year :………………………………

24 25 26 27 28 29 30 31