Calibration method for dual-tilt-axis

tool based on image thresholding of

skew tool influence function

Yunpeng Feng
Haobo Cheng

Yunpeng Feng, Haobo Cheng, “Calibration method for dual-tilt-axis tool based on image thresholding of
skew tool influence function,” Opt. Eng. 58(9), 092606 (2019), doi: 10.1117/1.OE.58.9.092606.

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 Optical Engineering 58(9), 092606 (September 2019)

Calibration method for dual-tilt-axis tool based on image

thresholding of skew tool influence function
Yunpeng Fenga,* and Haobo Chenga,b,*
a
Beijing Institute of Technology, School of Optics and Photonics, Joint Research Center for Optomechatronics Engineering, Beijing, China
b
Beijing Institute of Technology, Shenzhen Research Institute, Shenzhen, China

Abstract. Modern subaperture technologies mostly use the five-axis machine to follow the normal of state-of-
the-art surfaces, such as aspheric, off-axis surfaces. The dual-tilt-axis tool has been widely used in optical manu-
facture to change the orientation of the tool. The initial tilt positions of the tool play an important role in the
symmetry of tool influence function (TIF). The tilt angle errors may cause a skew TIF. We discussed the
self-developed machine and its TIF models with different motion modes. Next, the effect of tilt angle errors,
include spinning axis tilt error and revolution axis tilt error, was analyzed based on our self-developed polishing
machine. Symmetric TIF will distort and form a skew TIF due to the angle error. There was a linear relationship
between the eccentric ratio of the skew TIF and the angle error. In the experimental study, an initial adjustment
was performed by utilizing a dial gauge, and then the TIF result showed that there were still some angle errors.
We presented an image thresholding calibration method based on skew TIF to solve the tilt angle errors. After
the new calibration, the following compared experiment got a fine symmetric, and Gauss-like TIF, and proved
the validity of the proposed model and calibration method. © 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) [DOI:
10.1117/1.OE.58.9.092606]
Keywords: image thresholding; dual-tilt-axis tool; skew tool influence function; calibration; CNC machine.
Paper 181866SS received Dec. 31, 2018; accepted for publication Mar. 27, 2019; published online Apr. 24, 2019.

1 Introduction the orientation of TIF needs to be controlled by a certain

Aspheric or freeform surfaces can improve optical perfor-
mance, reduce system dimension and mass, or other benefits
in an optical system. Therefore, aspheric or freeform surfaces
are widely used in modern optical systems, such as an inertial
confinement fusion system, space telescopes, and space
satellites.1 Due to the computer-controlled optical surfacing
(CCOS) technology,2,3 the manufacture of aspheric or free-
form surfaces has become available and less complicated.
Many new techniques have been presented and developed in
recent years, such as magnetorheological finishing (MRF),4,5
ion beam figuring (IBF),6,7 fluid jet polishing (FJP),8,9 bonnet
polishing,10,11 and other manufacture techniques.
These techniques control a small (relative to the entire
optics) special tool to generate a corresponding tool influ-
ence function, move the tool along a predesigned path cover-
ing the optics, and finish the fabrication of state-of-the-art
surfaces.12 During the manufacture, a stable and robotic tool
influence function (TIF) serves an important role. It presents
the material removal in a unit time by the special tool. The
TIF affects the calculation of dwell time, and its stability is
related to the success of surface correction. If the shape or
magnitude of TIF varies during processing, the result of
manufacture will become unpredictable and uncontrollable.
Thus, maintaining the stability of TIF is crucial for those
subaperture techniques.
Normally, most of the techniques have a symmetric and
Gauss-like TIF, like CCOS,13 IBF,14 4-spot “Precessions”
BP,15 etc. Single wheel tool of MRF has a D-shape TIF,16 and
2-axis wheel tool has a symmetric TIF.17,18 The FJP has
a W-shape TIF.19 Using an asymmetric TIF during polishing,
*Address all correspondence to Yunpeng Feng, E-mail: roc@bit.edu.cn; Haobo
Cheng, E-mail: chenghaobo@tsinghua.org.cn
strategy. This may increase the difficulty of control to some
extent. Recently, some researchers presented some special
TIF in a different way. Hu et al.20 and Du et al.21 produced
heterocercal and acentric TIF. Yang et al.22 presented a bevel-
cut-like TIF in magnetorheological jet polishing. These acen-
tric TIFs have been verified to correct the edge effect.
For CCOS technology, it adopts a dual-motor tool that
includes spinning and revolution spindles. Changing the
eccentric distance and speed ratio may affect the shape of
TIF. As its superb ability to control material removal, it is
well known as an ideal method for state-of-the-art optical
surfaces.23 In order to get stable TIF, the axis or revolution
should coincide with the normal of the optical surface.
In other words, CNC machine must adjust the two tilt
axes to parallel to the normal, then move three linear axes
to coincide with the normal. Mostly, the spinning axis is
a real axis, and it is convenient to adjust. The revolution
axis is a virtual axis under most circumstances, it is difficult
to determine the exact orientation of the revolution axis
directly. This leads to some deviation between the revolution
axis and the normal of the local surface during the polishing
process. The deviation may cause a distorted TIF during the
polishing processing.
In this paper, a calibration method was presented to solve
the deviation of dual-tilt-axis tool. A five-axis polishing
machine and its work modal are presented in Sec. 2. The
effect on TIF with a small angle error was analyzed and
simulated in Sec. 3. Then, a TIF experiment after initial
adjustment was carried on, and the tilt angle error was solved
in Sec. 4. As a conclusion, the calibration method was veri-
fied, and the error can be obtained effectively and accurately.
0091-3286/2019/$28.00 © 2019 SPIE

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 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .

2 Background In general, there are two motion modes. One is planetary

2.1 Grinding/Polishing Machine with Dual-Tilt-Axis
Tool
In general, modern CCOS technology controls a special tool
(i.e., pitch tool for CCOS), and its TIF follows the normal
direction of the surface all the time. Then, dual-tilt-axis is
necessary to ensure that the machine can track the normal
of any location on the surface.
A self-developed grinding/polishing machine (JR-1000)
and its dual-tilt-axis tool were shown in Fig. 1. It has
three orthogonal linear axes (named as X-, Y- and Z-axes)
and three rotate axes (named as A-, B-, and C-axes).
A- and B-axes may change the orientation of the pitch
tool by adjusting the tilt angle. And the tool has two rotate
axes (named as U- and V-axes). Then, the machine can
follow the normal of the surface and move the tool to realize
the prescribe tool path.
2.2 Preston Equation and the TIF Model
mode, where the polishing pad has both spinning and orbital
motion. One is orbital motion, where the polishing pad only
has orbital motion. The sketch of the planetary motion and
solution method was described in Fig. 2. The outer circle is
the whole polishing area while the polishing pad moves
along its orbit (the inner dashed circle). The colored filled
circle is the polishing pad. The point O is the orbital center,
and O1 , Os , Oe are all the center of the polishing pad at dif-
ferent times. The spinning angular speed is ω1 , and the angu-
lar speed of revolution is ω0 . The radius of the polishing pad
is r1 . The distance between the orbital center and spinning
center is e (i.e., eccentric distance of tool). The relative
velocity between the tool and workpiece of an arbitrary
point in the polishing area equals the vector synthesis of
two linear velocities due to the spinning and revolution
motion, as expressed as
~ ¼V
V ~0 þ V
~ 1; (2)
EQ-TARGET;temp:intralink-;e002;326;565

Preston equation is a basic classical model for optical

fabrication,24 and it is suitable for many subaperture technol- where V ~ 0 ¼ OP × ω0 and V ~ 1 ¼ O1 P × ω1 . During a revo-
ogies. The material removal depth Δz is proportional to lution period, the point P was covered by polishing pad
engagement pressure P, relative velocity V, and time, as from Os to Oe . Os is the start position, which the polishing
pad contacts the point P at first, and Oe is the end position.
Δz ¼ κPðx; yÞVðx; yÞΔtðx; yÞ;
EQ-TARGET;temp:intralink-;e001;63;481 (1) Assume the central angle corresponding to the arc Osd O1 Oe
is 2α0 . And the central angle can be calculated according to
where κ is the process-dependent coefficient denoted as
the geometry relation, as expressed as
Preston’s coefficient, and Δt is the working time, Δz is
the material removal depth, Pðx; yÞ is the pressure between 8
tool and optic, and Vðx; yÞ is the relative velocity. >
> π;   R ≤ r1 − e
According to the Preston equation, the TIF model could <
R2 þe2 −r21
be calculated from the distributions of the pressure and the α0 ¼ arccos ; r1 − e < R ≤ r1 þ e : (3)
> 2eR
EQ-TARGET;temp:intralink-;e003;326;450

relative velocity between the tool and workpiece. For our >
: 0; R > r1 þ e
self-developed JR-1000 machine, the pressure distribution is
uniform and remains constant during the whole process due
to the spherical hinge mechanism between pin and pad. The According to the Preston equation, the TIF of planetary
velocity distribution is relative to the motion of the tool. mode can be expressed as

X U
B
A
Z
V

Fig. 1 The diagram of the five-axis machine and its tool.

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 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .

Fig. 2 (a) Sketch of dual-motor tool and (b) solution model of TIF.

EQ-TARGET;temp:intralink-;e004;63;525 Z Z
TIF ¼ KP jVjdt
~ ¼ KP ðV 1 þ V 2 Þdt
Z α0
¼ KP ðR20 ω20 þ R21 ω21 þ 2R0 R1 ω0 ω1 cos βÞ1∕2 ∕ω0 dθ;
−α0

(4)

where R0 ¼ jOPj, R1 ¼ jO1 Pj, and β ¼ arccos½ðR20 þ

R21 − e2 Þ∕2R0 R1 . Let the spinning angular speed equal to
0, it is the orbital mode. The TIF of orbital mode can be
obtained and simulated through Eq. (4).

3 Effect of Tilting Dual-Tilt-Axis on the Tool

Influence Function
For the JR-1000 machine, the spinning axis should parallel
to the revolution axis. And the axis of revolution axis should Fig. 3 The sketch of (a) the angle error and (b) the structure of pitch
follow the normal of the polishing surface. But once the tool and air cylinder.
tool is reassembled, some parameters may change, such as
the angle between the spinning axis and revolution axis. Due
to the mechanical error and alignment errors, the revolution the deviation of eccentric distance may not be negligible
axis may deviate from the normal of the surface. In this sec- due to the arm length of the spinning axis being large.
tion, the effect of tilt angle error of the tool on pressure This may cause the size of actual TIF to become larger
distribution was investigated. than expected. All manufacturing parameters calculated
based on normal TIF turn out to be not precise enough for
3.1 Effect of Angle Error between Spinning and large TIF. Large TIF may overlap in some areas where
Revolution Axis normal TIF do not overlap. This may cause the appearance
of ripple error to a certain extent. Since this kind of angle
The angle error between the spinning and revolution axis error is difficult to remove, predicting the deviation in
mainly comes from the alignment error and the movement advance and adjusting the manufacturing parameters based
of the spinning axis. The alignment error can be considered on the real TIF will be helpful to obtain a better quality
the inherent errors, which cannot be voided. For the JR-1000 optical surface.
machine, in order to change the eccentric distance in a certain
range, the spinning axis is designed as a movable part. When
the spinning axis moves, an alignment error due to the move- 3.2 Effect of the Angle Error of the Revolution Axis
ment is introduced inevitably, which causes the angle error In order to trace the normal of the local area on the optical
between the spinning and revolution axes, as shown in surface, the JR-1000 machine can adjust dual-tilt-axis
Fig. 3(a). In general, the angle error is very small. (A- and B-axes) to follow the normal of the surface. The
Due to the spherical hinge, as shown in Fig. 3(b), the pres- CNC system of the machine may automatically adjust the
sure between the polishing pad and workpiece keeps uniform orientation of the tool with high precision based on the cal-
even if there is an angle error. The main effect is that the culated values. If the initial position of the tool in the
eccentric distance increases, and the value of the change machine coordinate system is determined with high accu-
is Δe ¼ L · sinðθÞ. Although the angle error is very small, racy, all subsequent positions can be guaranteed to be

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 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .
Fig. 4 The sketch of the tilted revolution axis.
accurately controlled by the CNC system. Thus, it is impor-
tant to calibrate the tilt angle of dual-tilt-axis (A- and B-axes).
Next, the effect of the angle error of the revolution axis on the
TIF is analyzed.
Assume that the revaluation axis is α degree tilted and
the spinning axis is not inclined. At any time, the pressure
distribution between the polishing pad and workpiece is
uniform. But at a different position of the orbit, the pressure
value may vary due to the centrifugal force, as shown in
Fig. 4. The centrifugal force provides extrapressure Pf on
the workpiece, which can be expressed as
Pf ¼ m · ω20 · e · cos ϕ:
EQ-TARGET;temp:intralink-;e005;63;397
For our machine, the pressure between the polishing
pad and workpiece is produced by the air cylinder and the
self-weight (m) of the cylinder shaft and polishing pad.
According to the above analysis, the total pressure between
the polishing pad and workpiece includes the pressure P0
due to the compressed air in the air cylinder, the pressure
Pm due to the self-weight m, and the pressure Pf :
P ¼ P0 þ Pm þ Pf
EQ-TARGET;temp:intralink-;e006;63;287
d2 mg
¼ Pair · þ D2 þ meω20 cos ϕ;
D 2
π 2
where d is the inner diameter of the air cylinder. D is the
diameter of the polishing pad. Pair is the pressure of com-
pressed air in the air cylinder. g is the gravity of the
Earth. ϕ is the angle between the centrifugal force and ver-
tical axis, which depends on the position of the tool on the
orbit. According to the relation of geometry, as shown in
Fig. 5, the angle ϕ can be obtained by vector calculation.
~n0 is the vector of Z-axis. n~ 1 ðcos α; cos β; cos γÞ is the
vector presented revolution axis, α, β, and γ are the angle
between n~ 1 and each axis (X, Y, and Z axes).
Pðcos φ; sin φ; 0Þ indicates any point on the orbit. The
coordinate of the point O1 can be calculated through the
!
projection of the vector OP on the vector n~ 1, i.e.,
OO~ 1 ¼ OP ~ · n~ 1 ∕j~n1 j. O~1 P can be calculated through the
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Fig. 5 The solution of the angle ϕ using vector method.
equation O~1 P ¼ ð~n1 × OPÞ
~ × n~ 1 . Then, the angle ϕ can be
expressed as
O~1 P · n~ 1
cos ϕ ¼ : (7)
jO1 Pj · j~n1 j
EQ-TARGET;temp:intralink-;e007;326;551
When the pressure distribution and velocity distribution
are ready, the TIF can be simulated by Preston Eq. (1).
The TIF with small angle error was modeled with the param-
eters e ¼ 0.5, ω1 ∕ω0 ¼ 240∕50, as shown in Fig. 6. The TIF
with no angle error [shown in Fig. 6(a)] is the same as the
TIF generated by Eq. (4). The TIF with small angle error
become distorted [shown in Fig. 6(b)], the bottom of the
skew TIF is not as flat as normal. From the top view, the
distorted area is not in the center of the TIF. It is obvious
from its binary image with the threshold value of 0.5.
The skew TIF is no longer as symmetrical as normal, and
(5) the eccentric distance of the distorted area increases with
the tilt angle error increases in the case of small angle.
Figure 7 described the calculated results of the eccentric
ratio at different angle errors (blue line). There was a linear
relationship approximately between the eccentric ratio of the
distorted area in skew TIF and the tilt angle error, as shown in
Fig. 7. The red dashed line is the linear fitting line. The linear
fitting error was about 0.005 deg, which is already less
than the positioning accuracy of the rotate axes (i.e., the posi-
tion accuracy of A- and B-axes is 0.01 deg).
4 Calibration and TIF Experiment with a Small Tilt
(6) Angle Error
4.1 Initial Adjustment of the Tool and Its TIF
Experiment
Before using the JR-1000 machine for manufacturing,
the calibration must be performed to ensure the accuracy
of tool positioning. Normally, we utilize a dial gauge
(0.001 mm resolution) to make the tool perpendicular to the
turntable. First, adjust the eccentric distance of the tool to
zero and let the tip of the dial gauge contact the air cylinder.
Second, rotate the dial gauge (by rotating turntable) and
check whether the spinning axis is concentric with the turn-
table. If not, move the tool in X- or Y-direction. Third, move
the dial gauge along Z-axis (by moving Z-axis) to check
whether the spinning axis is parallel to Z direction. In gen-
eral, the turntable is prealigned and perpendicular to Z
direction. Then, repeat the third step in another orientation
092606-4 September 2019 • Vol. 58(9)
 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .

Fig. 6 The simulated results of TIF, (a) the side view of TIF with no angle error, (b) the side view, and
(c) top view of TIF with 0.5 deg angle error, and (d) the binary image with threshold value 0.5.

Fig. 7 The eccentric ratio of distorted area versus angle error.

(i.e., the dial gauge is 90 deg from the previous position) and
make spinning axis perpendicular to the turntable in two
orthogonal directions. Finally, we can basically guarantee
that the spinning axis is perpendicular to the turntable.
However, these operations do not confirm that the revolution
axis is perpendicular to the turntable. In addition, there are
other factors that affect the revolution axis, such as the flat-
ness of the turntable, the deformation of the turntable, the
alignment error of the tool, etc. According to the effect of
tilt angle error, the TIF will produce distortion and affect
the quality and effectiveness of the process.
After the above initial adjustment, the tool was used to
perform a TIF experiment. The parameters of the experiment
are as follows: the diameter of the polishing pitch pad is
60 mm, the eccentric distance of the tool is 15 mm, the
speed of spinning axis is −240 rpm, the speed of revolution

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 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .
Fig. 8 TIF result of the experiment after the initial adjustment.
axis is 47 rpm, the air pressure is 0.1 MPa, the polishing time
is 3 min, and the material is K9 glass. Before the TIF experi-
ment, the orientation of the workpiece in the measure
coordinate and the fabricate coordinate must be consistent.
Otherwise, we cannot get an accurate tilt angle. Then, we
can measure the surface of the workpiece before and after
polishing by Zygo interferometer. Then, the TIF map can
be obtained through the subtraction of the measured data
before and after polishing using MetroPro® software, as
shown in Fig. 8. The TIF is asymmetric and skewed. Using
this skewed TIF for precision polishing, the result of manu-
facture is certainly unpredictable.
4.2 Calibration Method of Skewed TIF
According to the experimental result, although the initial
adjustment has been completed well, the produced TIF is
not circularly symmetric. It is necessary to perform a
more accurate calibration after the initial adjustment. In
this work, a new image thresholding calibration method
was presented based on the skewed TIF to find the actual
tilt angle error.
In general, we must calibrate the size of the TIF at first to
check the tilt of the spinning axis. Due to the long arm
length, the eccentric error may increase to millimeter dimen-
sion, although the tilt angle is very small. Due to the
Fig. 9 The grayscale histogram of gray processed TIF.
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calibration function of the Zygo interferometer and its
MetroPro® software, we can calibrate the dimensions of
the entire optical surface, then the size of TIF could be
obtained. In this work, the diameter of the TIF is 89.9 mm,
which is very close to the theoretical value (90 mm), as
shown in Fig. 8. Thus, we can ignore the effect of the tilt
of the spinning axis.
In this work, an image threshold method was applied to
the binary image of the skew TIF to find the distorted area.
First, a grayscale cumulative histogram of the gray processed
TIF [as shown in Fig. 10(b), only include the area where
the TIF located] was calculated to find the optimal threshold,
as shown in Fig. 9. The criterion of threshold selection is
that all distorted area can be covered. Since the distorted
area is the area where the most removal occurs, the threshold
is the value where the largest gradient is in the cumulative
histogram. According to the cumulative histogram and its
gradient curve, the distorted area could be segmented
with the threshold value of 0.54, as shown in Fig. 10(c).
A manual review is necessary to ensure all distorted area
is covered. Since the eccentric ratio of the distorted area
is related to the tilt angle, a Sobel edge detect method
was utilized to find all points ðxn ; yn Þ at the edge of the dis-
torted area. Then, a least squares circle fitting algorithm was
adopted to fit the edge points, the circle can be expressed as
ðx − xc Þ2 þ ðy − yc Þ2 ¼ R2 . The yellow circle in Fig. 10(c)
is the fitting circle. The center of the fitting circle is
ð−0.089; −0.01Þ. A negative sign indicates the direction of
the tilt angle.
After getting the eccentric distance of distorted area, the
tilt angle can be solved by interpolation. The tilt angle along
X-axis is 0.685 deg, and the tilt angle along Y-axis is
0.084 deg. Then, the CNC system of JR-1000 machine
may precisely adjust and compensate the tilt angle error
of the tool. After the image thresholding calibration, we
set up a new TIF experiment. All parameters are the same
as before. And the TIF result was shown in Fig. 11. It is
a circularly symmetric and Gauss-like TIF, which is almost
identical to the theoretical TIF. This experiment indicates
that the image thresholding calibration method is effective
and validates the feasibility of the proposed model above.
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 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .
Fig. 10 The process method of skew TIF, (a) the origin TIF, (b) gray processed TIF, and (c) result of
Sobel edge detect and circle fitting.
Fig. 11 TIF result after tool calibration by CNC system.
5 Conclusions
A stable and symmetric TIF is important for the fabrication
of high-quality optical surfaces. Modern CCOS technologies
may change the tilt angles of the dual-tilt axis to make
the TIF follow the normal of the local area on the surface.
But if the dual-tilt-axis tool has a small angle error, the TIF
may become distorted.
We presented a typical layout of the five-axis machine sys-
tem (JR-1000) with a dual-tilt-axis tool, and introduced its two
motion modes: planetary and orbital modes. Then, the effect
of the tilt angle error was conducted. The tilt angle error of the
spinning axis will increase the size of TIF. The angle error of
the revolution axis may change the distribution of the pressure,
then distort the TIF. The skew TIF was analyzed and simu-
lated in the work. For the JR-1000 machine, the initial adjust-
ment method of the tool was described using a dial gauge.
Although the fine alignment, there is still some tilt errors
due to the virtual revolution axis. We presented an image
thresholding calibration method based on distorted TIF and
solved the tilt angle errors in two tilt directions. After the
image thresholding calibration method, the experiment with
the same parameters obtained an obvious symmetric and
Gauss-like TIF. That verifies effective and validates the fea-
sibility of the proposed model.
Acknowledgments
This work was supported by the Science and Technology
Innovation Foundation of Shenzhen (Grant Nos.
JCYJ20170817115017509 and JCYJ20170412112640428).
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092606-7 September 2019 • Vol. 58(9)
 Feng and Cheng: Calibration method for dual-tilt-axis tool based on image. . .

Yunpeng Feng received his MS and PhD degrees from
Beijing Institute of Technology University in 2008 and 2011,
respectively. Currently, he is a lecturer at Beijing Institute
of Technology. His research interests include advanced manufac-
turing technologies and applications, optical testing, and other
research.
Haobo Cheng received his PhD from Changchun Institute of Optics,
Fine Mechanics and Physics, Chinese Academy of Sciences.
Currently, he is a professor at Beijing Institute of Technology
and the dean of the Shenzhen Research Institute. His research
interests include advanced optical manufacturing, measurement,
and equipment.

Optical Engineering 092606-8 September 2019 • Vol. 58(9)

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