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3. MICRO COMBUSTOR
(K)
(a) View from top-side 1400
1200
Temperature
View 1000
direction 800
600
#1 #0
5th wafer 400 #2 #3
6th wafer 200 #4
7th wafer 0
0 0.05 0.1 0.15 0.2 0.25 0.3
Mass flow rate (g/sec)
Fig.6 Recorded temperatures at each position versus mass
flow rate with a chamber height of 1.2 mm (#1: centre of
gas exit; #0, #2-4: near exit edge)
1st wafer
2nd wafer 4. MICOR TUBINE DEVICE
3rd wafer
4th wafer 4.1. Design of micro turbine
View
direction Micro turbine, a critical part in micro gas turbine engine
(b) View from bottom-side [9-10], is used for generating power and driving the
compressor. In our design, the micro turbine is made up of
Fig. 4 Seven silicon dies of a micro combustor
three layers of silicon structure. Two acrylic plates are
used for tubing and clamping. Fig. 7 shows the schematic
diagram of our test rig for micro turbine. There are three
flow paths driving for rotor, journal air bearing and thrust
air bearing, respectively.
Top plate
1st wafer
2nd wafer
3rd wafer
Bottom plate
matches the blade profile. This ensures the improvement To enhance the etching uniformity, we used pre-
of efficiency and augmentation of output power. The bonded silicon wafer, which was embedded with a 1.5
design shown in Fig. 8 is under the assumption that the µm-thick SiO2 layer. This oxide layer can serve as the
turbine is driven by exhausted gas from a combustor. etching stopper during DRIE process. The topographical
When it is driven by compressed air at room temperature, map shown in Fig. 9 illustrates rotor profiles fabricated
the rotation speed and output power will be slightly from a pre-bonded silicon wafer.
decreased. Scale=500 nm/contour line
(mm)
Guide van
Position
Rotor blade
Position (mm)
The micro turbine was mounted on an acrylic test jig and [1] A, H, Epstein, “Millimeter-scale MEMS gas turbine
connected to a gas distribution system for air-driven engines”, Proc. ASME Turbo Expo2003, Atlanta USA,
rotation testing. Fig. 11 shows the experimental setup. An Vol. 1, pp. 1-28, 2003
optical fiber sensor is used to measure the rotation speed
of the rotor blade, by sensing the periodic change of [2] A. H. Epstein, “Power MEMS and micro engines”,
reflectivity. A stable rotation of 15,000 rpm is recorded Proc. of Transducer’97, Chicago USA, Vol. 2, pp. 753-
during the experiments. 756. 1997