Mass Flow Controller

E-1 Series.
 

Features
• Economical mass flow controllers for Liquids•
Cost effective and easy to use S. P.

• Control mass flow rates to 20 SLM

• Negligible flow surge E-1 series
• 0-5 Volt /0 to 10 setpoint and flow signals Other MFC

Time

*Prevents flow surge in the initiation of

the mass flow control operation.
Specification
Mo del E-1 (Mass flow controller)
Gases Most Liquids
Valve type Normall y Closed
Flow range* 10 S CC M - 500 SL M
Flow rate control range 5-100% F. S.
A cc ura c y ±2%F. S. (Accuracy guaranteed between 5-35°C)
Rep ea t abili t y ± 1% F. S .
Res ponse speed less than 10sec
Operating differential pressure 5 0 -3 0 0 k Pa
Pr e s sure Re sis t ance 1MPa (G)
Leak Integrity 1×10-7Pa•m3/sec (He)
Oper ating tem per ature 5-50°C less than 85% RH
Wetted surface material SS316, PTFE, Fluoro-Rubber
Seal material F luoro - Rubber
Setting signal 0-5VDC / 4 to 20 mA / 0 to 10 V DC
Output signal 0-5VDC (Optional)
St an dar d f i t t ing * * 1/4 in BSP, O ne - touch f i t t ing s
Drive power source +15VDC ±5% 60mA, -15VDC ±5% 150mA
Commu nic at ion Analog 0-5VDC(Optional)
Connec tor Electrical Connectors
* At FCON, flow rates (SCCM, SLM) are converted to values at 0ºC, 101.3kPa abs (1atm) for calibration.
** For other fitting, please contact us.

Dimensions : (Customised Designs Dimensions Change

100

12.7

25.5 77

127±1
18.5

69

Ordering

C 06 1
1 2 3

1. Type 3. Fitting*
C : Mass flow controller 1 : 1/4in. SWL (equivalent)
M : Mass flow meter 2 : One-touch fittings

2. Series
01 : 10SCCM
02 : 50SCCM
03:100 SCCM
04:500SCCM
05:1000 SCCM
06:01 LPM
07: 05 LPM
08: 10 LPM
09 :50 LPM
10 :100 LPM
11 :500LPM

• The contents of this catalog are subject to change without notice.