Sie sind auf Seite 1von 14

Critical Reviews in Solid State and Materials Sciences

ISSN: 1040-8436 (Print) 1547-6561 (Online) Journal homepage: https://www.tandfonline.com/loi/bsms20

Measurement of Residual Stresses Using


Nanoindentation Method

Li-Na Zhu, Bin-Shi Xu, Hai-Dou Wang & Cheng-Biao Wang

To cite this article: Li-Na Zhu, Bin-Shi Xu, Hai-Dou Wang & Cheng-Biao Wang (2015)
Measurement of Residual Stresses Using Nanoindentation Method, Critical Reviews in Solid State
and Materials Sciences, 40:2, 77-89, DOI: 10.1080/10408436.2014.940442

To link to this article: https://doi.org/10.1080/10408436.2014.940442

Published online: 28 Oct 2014.

Submit your article to this journal

Article views: 1058

View Crossmark data

Citing articles: 9 View citing articles

Full Terms & Conditions of access and use can be found at


https://www.tandfonline.com/action/journalInformation?journalCode=bsms20
Critical Reviews in Solid State and Materials Sciences, 40:77–89, 2015
Copyright Ó Taylor & Francis Group, LLC
ISSN: 1040-8436 print / 1547-6561 online
DOI: 10.1080/10408436.2014.940442

Measurement of Residual Stresses Using Nanoindentation Method


Li-Na Zhu,1 Bin-Shi Xu,2 Hai-Dou Wang,1,2,* and Cheng-Biao Wang1
1
School of Engineering and Technology, China University of Geosciences, Beijing 100083, China
2
National Key Lab for Remanufacturing, Academy of Armored Forces Engineering, Beijing 100072, China

Instrumented indentation, which is also known as nanoindentation or depth-sensing


indentation, is increasingly being used to probe the residual stresses of materials including
bulk solids, thin films, and coatings. The residual stresses are proved to have significant
effects on various nanoindentation parameters such as hardness, loading curve, unloading
curve, pile-up amount around indentation, and true contact area. By analyzing these
parameters, numerous methods are developed to evaluate the residual stresses of materials in
recent years. This article reviews six commonly used models which determine residual
stresses from analyzing load-depth curves, as well as indentation fracture technique which is
based on the classical fracture mechanics. Emphasis is placed on the principle, application
and limitation of each nanoindentation method.

Keywords nanoindentation, residual stress, non-destructive testing

Table of Contents

1. INTRODUCTION........................................................................................................................................... 2

2. BASIC PRINCIPLES OF NANOINDENTATION METHOD............................................................................. 2

3. EFFECT OF RESIDUAL STRESSES ON NANOINDENTATION RESPONSE................................................... 4


3.1. Effect on Mechanical Properties.................................................................................................................. 4
3.2. Effect on Load-Depth Curves ..................................................................................................................... 4
3.3. Effect on Pile-Up ...................................................................................................................................... 4
3.4. Effect on True Contact Area ....................................................................................................................... 5

4. NANOINDENTATION MODELS FOR THE DETERMINATION OF RESIDUAL STRESS ............................... 5


4.1. Suresh Model ........................................................................................................................................... 5
4.2. Lee Models .............................................................................................................................................. 7
4.2.1. Lee Model I.................................................................................................................................... 7
4.2.2. Lee Model II................................................................................................................................... 8
4.2.3. Application of Lee Models................................................................................................................ 8
4.3. Xu Model ................................................................................................................................................ 8
4.4. Swadener Models ..................................................................................................................................... 9
4.4.1. Swadener Model I ........................................................................................................................... 9
4.4.2. Swadener Model II .......................................................................................................................... 9
4.4.3. Limitation of Swadener Models ......................................................................................................... 9

5. INDENTATION FRACTURE TECHNIQUE FOR THE DETERMINATION OF RESIDUAL STRESS ..............10

*E-mail: wanghaidou@aliyun.com
Color versions of one or more of the figures in this article can be found online at www.tandfonline.com/bsms.

77
78 L.-N. ZHU ET AL.

6. CONCLUSIONS ............................................................................................................................................11

FUNDING.............................................................................................................................................................11

REFERENCES......................................................................................................................................................11

1. INTRODUCTION the finite element analysis by Bolshakov et al.31 revealed that


Residual stresses are readily generated by inhomogeneous the hardness was not always dependent of residual stress. For
heat treatment or local plastic deformation involving bulk sol- materials that are prone to pileup, the hardness is not signifi-
ids,1–3 thin films,4–6 and coatings7–9 used in various industrial cantly affected by residual stress when proper contact area is
components. The existing residual stress field in these compo- used. Based on that hardness is invariant regardless of the
nents has a significant effect on their performance such as residual stress, Suresh et al. proposed a methodology to deter-
mechanical properties,10 fatigue strength,11 wear and fracture mine the equibiaxial residual stress from the difference in con-
properties,12,13 etc. The existence of residual stress may be bene- tact area of stressed and stress-free materials indented to the
ficial or detrimental, depending upon its value and the potential same depth.42 Lee et al.1 developed a new model to evaluate
application. For instance, compressive residual stresses in the the equibiaxial residual stress by combining stress relaxation
coatings can improve the adhesion and fatigue strength of the with a shear plastic-deformation concept. This model fitted the
system, while high tensile stresses may cause cracking and contact area as an equation of the third degree in the indenta-
fatigue failure. Thus, to measure and control accurately residual tion load to make the residual stress be only related to the
stresses is very important in both scientific and technological indentation load. To overcome the limitation of the model to
perspectives. equibiaxial or uniaxial residual stress, Lee et al.43 proposed a
Various experimental techniques have been developed to new indentation model, which can evaluate an arbitrary biaxial
measure the residual stresses in materials, such as X-ray dif- stress. Through finite element simulations, Xu et al.35,36 pro-
fraction,14 hole-drilling,15 layer removal,16 neutron diffrac- posed an empirical model, which is based on the effect of
tion,17 synchrotron,18 Raman spectroscopy,19 ultrasonic residual stress on the unloading curve of nanoindentation. It
method,20 and magnetic method.21 However, these methods was found that the elastic recovery parameter he/hmax has a lin-
all have some problems. For example, X-ray diffraction ear relationship with the ratio of residual stress to yield stress
method is confined to crystals and inapplicable to amorphous s r/s y. Subsequently, the empirical model was applied to deter-
materials. As the penetration depth of X ray is very shallow, mine the residual stress in a mechanically fused quartz beam.
the measurement depth is only about 30 mm. Hole-drilling Swadener et al.44 suggested that spherical indentation is more
method is destructive to materials, and the measurement accu- sensitive to stress effects than sharp indentation, and then
racy is easily influenced by many factors such as aperture, developed two methods to measure biaxial residual stress.
hole depth, and bonding quality of strain gauges. Raman spec- An alternative way to measure the residual stress is using
troscopy and magnetic method are inapplicable to metals and indentation fracture technique, which is based on the classical
non magnetics, respectively. Neutron diffraction and synchro- fracture mechanics.45 The residual stress can be estimated by
tron equipment are expensive and scanty, which are difficult comparing the crack lengths of indentations on stressed surfa-
to apply to actual production. The limitation of these methods ces with those on stress-free surface.
drives the development of new measuring technology. This article reports on a brief description of different nano-
Nanoindentation is an instrumented indentation method, indentation models to determine residual stress. The prerequi-
which is often used to extract the mechanical properties of bulk site and limitation of these models are discussed.
solids, thin films, and coatings.22–28 In addition, nanoindentation
also can be used to estimate residual stresses in materials. In past 2. BASIC PRINCIPLES OF NANOINDENTATION
decades, numerous studies have been conducted to determine METHOD
residual stresses by nanoindentation. The influence of residual Figure 1 shows a typical load-depth curve consisting of load-
stress on various nanoindentation parameters such as hard- ing and unloading. During loading, both elastic and plastic defor-
ness,29–31 loading behavior,32–34 unloading behavior,35–37 con- mations occur as the permanent impression is generated. During
tact area,34,37–39 and pile-up,37,39–41 has been investigated both unloading, only the elastic formation is assumed to be recovered,
experimentally and with finite element simulations. and reverse plastic deformation is usually negligible.46
The experiment carried out by Tsui et al.30 showed that Figure 2 illustrates the unloading process and important
hardness calculated by standard methods decreased with ten- parameters characterizing the contact geometry. At present,
sile stress and increased with compressive stress. However, the Oliver method is commonly used to characterize the
RESIDUAL STRESS MEASUREMENT 79

reduced modulus Er is defined by

1 1 ¡ n2 1 ¡ n2i
D C ; (3)
Er E Ei

where E and Ei are the elastic modulus of the specimen and the
indenter, respectively and v and vi are the Poisson’s ratio of the
specimen and the indenter, respectively.
A crucial step in calculating the hardness and elastic modu-
lus is the determination of the contact stiffness at the initial
unloading and the projected contact area at the peak load. The
unloading curve is usually well approximated by the power
law relation:

P D aðh ¡ hr Þm ; (4)

where a and m are power law fitting constants and hr is the


residual depth after unloading.
The contact stiffness at the initial unloading can be
FIG. 1. A typical load-depth curve. obtained by differentiating Eq. (4) at the maximum depth hmax:
 
dP
hardness and elastic modulus based on the analysis of the load- SD D amðhmax ¡ hr Þm ¡ 1 : (5)
depth curves.47,48 The hardness H and reduced modulus Er are dh h D hmax
defined by
The projected contact area can be calculated from the relation
Pmax
HD (1) Ac D f ðhc Þ; (6)
Ac

pffiffiffi where hc is the contact depth. Since the Oliver method


S p
Er D pffiffiffiffiffi ; (2) assumes that the contact periphery sinks in, hc is always
2b Ac smaller than hmax :

where Pmax is the maximum load, Ac is the contact area, S D Pmax


hc D hmax ¡ e ; (7)
dP/dh is the contact stiffness at the initial unloading, and b is a S
constant which depends on the geometry of the indenter. The
where e is a constant that depends on the geometry of the
indenter.
As the indenter generally deviations from perfect geometry,
the area function is usually fitted by

X
8
Ac D Cn ðhc Þ2 ¡ n D C0 h2c C C1 hc C L C C8 h1=128
c ; (8)
nD0

where C0. . .C8 are constants determined by curve-fitting


procedures.
FIG. 2. Schematic illustration of the unloading process show- Once the contact stiffness and contact area are determined,
ing parameters characterizing the contact geometry. (Ó Cam- the hardness and elastic modulus can be calculated by Eqs.
bridge University Press. Reproduced with permission of (1)–(3).
Oliver and Pharr.47 Permission to reuse must be obtained from Work-of-indentation methods can also be used to measure a
the rightsholder.) material’s hardness.49 The hardness can be determined based
80 L.-N. ZHU ET AL.

on the total work and plastic work:

kP3max
HWt D (9)
9Wt2

kP3max
H Wp D ; (10)
9Wp2

where Wt is the total work, Wp is the plastic work, and k is a


constant equal to 0.0408 for the Berkovich indenter. The total
work and elastic work can be obtained by integrating the load-
ing curve and unloading curve, respectively. The plastic work
is the difference between the total work and elastic work.
Note that the Oliver method does not account for the pile-
up of material at the contact periphery that occurs in some
elastic-plastic materials. For pile-up, many correction methods FIG. 3. Loading curves for indents made to a maximum depth
have been proposed based on imaging the contact impres- of 700 nm of copper single crystal with different residual
sion.50–55 stress states. (Ó Elsevier. Reproduced with permission of
Zhu et al.39 Permission to reuse must be obtained from the
3. EFFECT OF RESIDUAL STRESSES rightsholder.)
ON NANOINDENTATION RESPONSE
3.1. Effect on Mechanical Properties pure elastic process and the compressive stress in the material
Both experiments and finite element simulations were used tends to push the indenter up more, more elastic recovery and
to investigate the effect of residual stresses on nanoindentation smaller residual depth are induced.35 While the tensile stress
response. Both hardness and elastic modulus were found to gives an opposite effect, thus leading to less elastic recovery
increase with compressive stress and decrease with tensile and larger residual depth.
stress,30 when the nanoindentation data were analyzed by stan-
dard methods. However, the elastic modulus which is an 3.3. Effect on Pile-Up
intrinsic property of the material should not be affected by
It is well known that materials exhibiting low strain harden-
stresses. Subsequently, both experiments and simulations
ing tend to pile up around indents due to the incompressibility
show that the properties measured according to standard meth-
ods are inaccurate because pileup around the indentation is not
accounted for in the contact area determination. Once the
proper contact area is used, the hardness and elastic modulus
are significantly independent of stress.

3.2. Effect on Load-Depth Curves


The residual stresses significantly affect load-depth curves.
For a fixed penetration depth, the loading curves for compres-
sive stresses are higher than those for stress-free state, and
conversely for tensile stresses.31,32,34,37,39,56–59 Figure 3 shows
the effect of residual stress on loading curves. The compres-
sive stress can constrain the indentation plasticity, thus leading
to a higher indentation load than that for stress-free state. Sim-
ilarly, the effect of tensile stress is opposite to that in compres-
sive stress state by enhancing the indentation plasticity.
A similar behavior was found for the unloading curves
which shifted to the left for compressive residual stress and
right for tensile residual stress when compared with that FIG. 4. The ending part of unloading curves for indents made
of stress-free state.31,37,39 Figure 4 shows the ending part of to a maximum depth of 700 nm of copper single crystal with
unloading curves for indents made to a maximum depth of different residual stress states. (Ó Elsevier. Reproduced with
700 nm of copper single crystal with different residual stress permission of Zhu et al.39 Permission to reuse must be
states. Since the unloading process of nanoindentation is a obtained from the rightsholder.)
RESIDUAL STRESS MEASUREMENT 81

of plastic deformation.60 The amount of pile-up can be charac-


terized by the height of the pile-up relative to the undeformed
surface. It is shown that pileup is large when there are large
compressive stresses in the materials, but relatively small for
large tensile stresses.31,37-39 For compressive stresses, the
materials are pushed out to the surface of indenter, which
results in more pile-up; whilst tensile stresses tend to pull the
materials away from the surface of indenter to decrease the
amount of pile-up. In addition to residual stress, pileup defor-
mation behavior is related with the ratio hf/hmax and work-
hardening behavior.61 The pile-up amount is large when hf/
hmax is close to 1 and the degree of work hardening is small.
When hf /hmax is less than 0.7, very little pile-up occurs no
matter what the work-hardening behavior of materials.

3.4. Effect on True Contact Area


The residual stresses also have a significant effect on the FIG. 5. Schematic representation of the projected contact area
true contact area of indentation in pile-up materials. Numerous considering pile-up. (Ó Elsevier. Reproduced with permission
studies have shown that the true contact area has an almost lin- of Zhu et al.50 Permission to reuse must be obtained from the
ear relationship with the residual stress and increases with rightsholder.)
increasing compressive stress, while it decreases with increas-
ing tensile stress.31,35,37,62 The different variation of true con-
tact area with residual stresses is due to the fact that The pile-up width x can be defined as
compressive stresses tend to increase the pile-up amount, thus
increasing the true contact area, while tensile stresses gives an a  
u u
opposite effect to decrease the true contact area. x D R ¡ Rcos D 2 u 1 ¡ cos (13)
Determination of true contact area for pile-up material 2 sin 2 2
u 
has been a hot and difficult research topic in recent years. 1 ¡ cos 2
D 3:765 h max C h ave
;
Atomic force microscope is usually used to determine the sin 2u p
true contact area. Kese et al.51 proposed a semi-ellipse
model to correct the contact area. Each pileup contact
perimeter was approximated as projecting a semi-ellipse where hp and x can be determined from the profile of indents,
with major axis b and minor axis ai. Then the true contact as shown in Figures 6 and 7.
area can be obtained as Equating Eqs. (12) and (13), the true projected contact area
A can be calculated.
Maybe there are other methods that can be used to measure
X the area of pile-up deformation, the above two models (semi-
A D AO-P C 5:915hc ai ; (11)
ellipse model and three-arc model) both have been used by
other researchers.63,64 However, a unified method has not yet
been formed.
where AO-P is the contact area from the Oliver-Pharr method In summary, residual stresses have significant effect on
and ai (i D 1, 2, 3) is the width for 3 pileup lobes. load-depth curve, pile-up height, and true contact area.
Saha et al.53 assumed that the piled-up material forms an Thus, the state (tensile or compressive) of residual stress
arc around the edge of the indentation (three-arc model). can be determined by comparing the load-depth curve, pile-
Based on this assumption, Zhu et al. proposed a model to up height, and true contact area of stressed material with
determine the true contact area.50 The projected contact area those of stress-free reference material. Among the three
can be modeled as an equilateral triangle bounded by three parameters, it is easiest to obtain load-depth curve from
arcs, as shown in Fig. 5. The true contact area A can be nanoindentation data. However, only residual stress state
obtained as can be qualitatively determined by simple comparison of
load-depth curves for stressed and stress-free materials. To
determine quantitatively the magnitude of residual stress in
!
up u pffiffiffi  2 the materials, specific relationship between residual stress
A D 14:175 2 u
¡ 3cot C 3 hmax C have
p : (12) and nanoindentation parameters should be extracted from
120sin 2 2
analyzing load-depth curves.
82 L.-N. ZHU ET AL.

FIG. 6. Pile-up height hp.

4. NANOINDENTATION MODELS FOR THE This model is based on the difference of contact area
DETERMINATION OF RESIDUAL STRESS between a stress-free material and the same material with
At present, there is no one set method that can be applied to residual stress. When indented to the same depth, the contact
the calculation of residual stress for all materials. In this sec- area of material with compressive stress is larger than that of
tion, six typical models usually used to quantitatively deter- stress-free material, while smaller for tensile stress.
mine residual stress from analyzing load-depth curves are Note that there is a coefficient difference (sina) between the
discussed, including Suresh model, Lee models, Xu model, calculation formulae for tensile stress and compressive stress.
and Swadener models. Because the effects of tensile stress and compressive stress on
the indentation process are different, as shown in Figures 8
4.1. Suresh Model and 9. It is obvious that sA is the difference of load in the z
The residual stresses (tensile or compressive) are assumed direction between the materials with and without tensile stress,
to be equibiaxial and the magnitude is uniform over a depth while sAsina is the difference of load in the z direction
which is at least several times larger than the indentation con- between the materials with and without compressive stress.
tact diameter. The prerequisite of the model is that the material Before calculating the magnitude of residual stress using the
hardness H is unaffected by any pre-existing residual stresses. Suresh model, the residual stress state (tensile or compressive)
The relation between the residual stress s and the ratio of the should be determined from the loading curves for the stressed
real contact area A of material with residual stress to that of and stress-free specimens. Figure 10 shows the loading curves
stress-free material A0 can be written as for the stressed and stress-free 1045 steels at a fixed depth of
230 nm. It is concluded that the residual stress in the stressed
  steel is compressive, because the material with compressive
A0
sDH ¡ 1 for tensile stress (14) residual stress requires larger force to be indented to the same
A
  depth as the one without residual stress.65 According to Eq.
H A0 (15), the residual stress in the stressed steel was ¡117 § 20
sD 1¡ for compressive stress: (15)
sin a A MPa, which was in good agreement with that by the traditional

FIG. 7. Pile-up width x.


RESIDUAL STRESS MEASUREMENT 83

FIG. 8. Schematic of the role of tensile stress at the indented


surface. (Ó Elsevier. Reproduced with permission of Suresh FIG. 10. Loading curves for the stressed and stress-free 1045
and Giannakopoulos.42 Permission to reuse must be obtained steels at a fixed depth of 230 nm. (Ó Elsevier. Reproduced
from the rightsholder.) with permission of Zhu et al.34 Permission to reuse must be
obtained from the rightsholder.)
XRD method (¡114 § 32 MPa). As the measuring depths for
the indentation and XRD methods are different, the XRD
results cannot provide a calibration standard for indentation complicated phase structures. If the indentation location is
testing, and only can be used as a reference. close to micropores or microcracks, the indentation depth will
Considerable efforts have been made to determine the resid- increase. This will lead to the increase of contact area and
ual stresses introduced during the preparation of thermal spray- decrease of hardness. As the contact area and hardness are char-
ing coatings.66–69 The Suresh model has been confirmed to be acteristic parameters for the Suresh model, errors for the calcu-
an attractive method, since it allows such residual stresses to be lated value of residual stress are bound to be produced.
quickly measured in a small region with non-destructive man- Therefore, in order to increase the accuracy of measurement,
ner and to be mapped across the coating thickness.29 Note that the location of indents should be selected through optical
the Suresh model is only valid for homogeneous coatings, and microscope or atomic force microscope to keep away from
the calculated value is only an approximation for unhomogene- micropores or microcracks as far as possible.
ous coatings containing micropores and microcracks, or The Suresh model also provides an accurate measure of
residual stress in thin films with unknown material properties.
The study by Taylor et al.70 showed that the residual stresses in
the thin carbon films calculated using the Suresh model agree
well with the theoretical analysis. The Suresh model and classi-
cal XRD technique were used by Atar71 to determine the resid-
ual stresses in ceramic thin films. The residual stresses obtained
by the indentation method have been found to be three times
higher than those of the XRD technique. As the XRD technique
has certain errors in measuring residual stresses, thus it cannot
be used to confirm the accuracy of the Suresh model.
Although the Suresh model can be applied to various mate-
rials, it has obvious disadvantages. The model is specific for
sharp indenters, such as Berkovich or Vickers indenters, and is
limited to equi-biaxial residual stresses. Moreover, the model
requires a stress-free reference sample such as free-standing
film or coating, which is often difficult to produce. On the
other hand, the residual stresses in free-standing film or coat-
FIG. 9. Schematic of the role of compressive stress at the ing cannot be completely released; the hardness values of the
indented surface. (Ó Elsevier. Reproduced with permission of stressed sample or stress-free reference sample are not identi-
Suresh and Giannakopoulos.42 Permission to reuse must be cal. Thus, unavoidable errors cannot be diminished from an
obtained from the rightsholder.) experimental standpoint.
84 L.-N. ZHU ET AL.

4.2. Lee Models model II when the stress ratio k D 1, namely, equibiaxial stress
4.2.1. Lee Model I state.
In 2003, Lee et al. proposed a new model based on stress
relaxation theory to determine equibiaxial residual stresses. 4.2.3. Application of Lee Models
Keeping the penetration depth constant, relax the residual The nanoindentation tests were performed on the cross-sec-
stress from the initial value s r to zero. tions of stressed and unstressed thermal barrier coating (TBC)
The residual stress can be calculated from the stress- samples.72 The unstressed sample was obtained by immersing
induced normal load and load difference between the materials the stressed sample in hydrochloric acid to dissolve the 304
with and without residual stress: stainless steel substrate. The residual stress in the TBC was
compressive since the coefficient of thermal expansion of the
ðP0 ¡ P1 Þ2
sr D 3
2 R3 P41 C ðR2 ¡ R3 P0 ÞP31 C ðR1 ¡ R2 P0 ÞP21 C ðR0 ¡ R1 P0 ÞP1 ¡ R0 P0 ; (16) TBC is less than that of metal substrate. As the indentations
were performed on the cross-section of the TBC, the compres-
sive stress applied on the indenter can be considered as a uni-
where P0 and P1 are the peak loads for the stress-free material
axial stress. Thus, the residual stress in the TBC was
and the material with residual stress. R0, R1, R2, and R3 are fit-
calculated using Eq. (17), k D 0. The results showed that the
ting constants between the contact area and peak load.
compressive stresses in the top coat (TBC) decrease from the
bonding coat (BC)/TBC interface to the top surface of TBC. It
4.2.2. Lee Model II
is obvious that the Lee model can evaluate the distribution of
In 2004, Lee et al. proposed another model to calculate the residual stress in micro scales.
non-equibiaxial surface stresses. Six different stresses were X. Zhao et al.57 investigated the residual stresses in TBCs
applied to the specimens using a special apparatus and divided by photoluminescence piezospectroscopy (PLPS) and nanoin-
into four categories (see Table 1): uniaxial stress dentation. The residual stresses obtained by nanoindentation
(s rx 6¼ 0; s ry D 0, 3# and 5#), equibiaxial stress (s rx D s ry 6¼ 0, 1# have similar trend with those calculated from PLPS measure-
and 6#), biaxial stress (s rx 6¼ s ry 6¼ 0, 2#), and pure shear stress ments. However, X. Zhao et al pointed out that the Lee model
(s rx D ¡ s ry 6¼ 0; 4#). s ry can be expressed as ks rx using a stress is only valid for a homogeneous material. As the TBC is far
ratio k, i.e. k D s ry =s rx , where k ranges from ¡1.0 to 1.0. from homogeneous, the residual stresses calculated by nanoin-
The biaxial stress can be separated into an equibiaxial stress dentation are only approximation.
and a pure shear stress. As the pure shear stress has no effect M.K. Khan et al.37 determined the residual stresses in
on the indentation load, the measurement of biaxial stress can Al-cladding and Al 2024-T351 by the Suresh and Lee models.
be simplified as an equibiaxial problem. The biaxial stress can The residual stresses from both of the Suresh and Lee models
be calculated as agree well with those from finite element simulation. The
divergence of the residual stresses on the far ends of the com-
3ð P0 ¡ P1 Þ pressive and tensile regions is due to that the Suresh model
s rx D ; (17)
ð1 C k ÞAc describes a nonlinear relationship and the Lee model considers
linearity in these regions.
where P0 and P1 are the peak loads for the stress-free material Like the Suresh model, the Lee models also require a stress-
and the material with residual stress. Ac is the contact area of free reference sample, although non-equi-biaxial surface stress
stressed material. Actually, Lee model I is the same as Lee can be determined. In addition, the models are based on a
stress-relaxation theory, i.e., the residual stresses are deter-
mined from the changes in applied load during stress relaxa-
TABLE 1
Unstressed reference and six different stressed states. tion at fixed indentation depth. However, the indentation
process is often considered as an elasto-plastic problem and
(Ó Elsevier. Reproduced with permission of Lee and Kwon.43
residual stress cannot be relaxed alone when keeping the depth
Permission to reuse must be obtained from the rightsholder)
invariable, because the stress-relaxation process can lead to a
Stress state s rx (MPa) s ry (MPa) k D s ry =s rx simultaneous change in the indentation load and depth.65
Reference 0 0 Unstressed

1# ¡415 ¡414 1.0 (equibiaxial) 4.3. Xu Model


2# ¡375 ¡248 0.66 (biaxial) In 2006, Xu et al investigated the effect of equibiaxial
3# ¡408 0 0 (uniaxial) residual stress on the elastic recovery of nanoindentation using
4# ¡239 231 ¡1.0 (pure shear) finite element simulations. The results showed that the residual
5# 414 0 0 (uniaxial) stress affects not only the real contact area but also the elastic
6# 428 427 1.0 (equibiaxial) recovery parameter, i.e. the ratio of elastic recovery to the
maximum penetration depth, he/hmax. The he/hmax ratio has a
RESIDUAL STRESS MEASUREMENT 85

determination of he/hmax ratio from the unloading curve of


indentation. Besides, the Xu model may be just suitable for
the determination of residual stress in very hard materials with
low E/s y ratios and limits the application to very soft materials
with high E/s y ratios, since the sensitivity of the he/hmax ratio
to the residual stress is inversely proportional to the E/s y ratio
of the material.

4.4. Swadener Models


4.4.1. Swadener Model I
In 2001, Swadener et al presented two methods for making
measurements of biaxial residual stress using spherical inden-
tation. The model based on the fact that the indentation depth
or contact radius at the onset of yielding is affected by the
residual stress in a way that can be analyzed by Hertzian con-
tact mechanics. The residual stress can be calculated by
FIG. 11. Effect of residual stress on elastic recovery parame-
ter he/hmax. (Ó Taylor & Francis. Reproduced with permission  
of Xu and Li.36 Permission to reuse must be obtained from the sR 3:72 Er a
D1¡ ; (20)
rightsholder.) sy 3p s y R 0

linear relationship with the ratio of residual stress to yield where R is the indenter radius; a the contact radius; s y the
stress, s r/s y, as shown in Figure. 11. In addition, the slope of yield stress. Obviously, if s y is available, the residual stress
the he/hmax vs. s r/s y depends only on the E/s y ratio. The fol- can be determined by Eq. (20) with experimental measurement
lowing equation can be used to relate the he/hmax ratio with the of (Era/s yR)0, which can be determined using least squares
s r/s y ratio: regression curve fits of hr/hmax D A1 C A2log(Era/s yR), as
shown in Figure 12.
he sr
D ¡ a C b; (18) 4.4.2. Swadener Model II
hmax sy
Swadener model II is based on the empirical Tabor relation-
where a and b are fitting constants, a is the slope of he/hmax vs. ship between hardness and yield stress,
s r/s y curves, and b is the intercept of he/hmax vs. s r/s y curves
at s r D 0. a depends only on the E/s y ratio, and the relation- H D Cs y ; (21)
ship between them follows a power law relationship:

  ¡ 1:25
E
a D 10:53 : (19)
sy

Equations (18) and (19) are the empirical model to determine


equibiaxial residual stresses.
In order to verify the above model, Xu et al. estimated the
residual stress in the mechanically polished fused quartz
beam. The fused quartz beam was firmly held in a three-point
bending device. The obtained residual stress in the mechani-
cally polished fused quartz beam is a compressive stress with
the magnitude of 30 MPa.
The Xu model does not require any reference sample with
known stress state, such as stress-free sample, or any particular
mechanical properties. However, it requires a special three-
point bending device, which limits the practical applications FIG. 12. Relationships between hr/hmax and Era/s yR at differ-
of this method. Moreover, as the method relies on an accurate ent residual stresses. (Ó Cambridge University Press. Repro-
determination of the ratio of he/hmax, experimental factors duced with permission of Swadener et al.44 Permission to
such as surface roughness will result in a great error in reuse must be obtained from the rightsholder.)
86 L.-N. ZHU ET AL.

where C is the constrain factor. For stressed materials, Eq. 5. INDENTATION FRACTURE TECHNIQUE FOR THE
(21) should be rewritten as DETERMINATION OF RESIDUAL STRESS
When a brittle material is indented using a moderate force,
a permanent impression is often formed with radially oriented
cracks at the indent corner, as shown in Figure 13.74 Based on
H C s R D Cs y : (22) the classic indentation fracture mechanics, the fracture tough-
ness Kc of elastic-plastic brittle materials is directly related to
the indentation load P and the length of the radial cracks at the
By establishing the variation of Cs y with Era/s yR through surface, c0. For stress-free materials, the fracture toughness
experiments in a reference material in a known stress state, can be determined using the following expression:
then the residual stress can be calculated from measurements
of hardness.
P
Kc D x 3=2
; (23)
4.4.3. Limitation of Swadener Models c0
Swadener model I has an advantage that the measured
depth at which yielding occurs is affected by the stress in a
where x is the dimensionless residual stress factor which is
manner that can be analyzed by Hertzian contact mechanics.
related to the ratio of elastic modulus to hardness (E/H). It is
However, this model requires that the yield stress of materials
given by
be known in advance and that data be extrapolated outside the
range of experimental accessibility.73
Swadener model II can be used to measure residual
x D ξ 0 ðcotuÞ2=3 ðE=H Þ1=2 ; (24)
stresses in bulk materials to within 10–20%, but it cannot
be easily applied to thin films.73 The stress-free reference
specimen must be structurally identical to the tested speci-
where ξ 0 is a dimensionless constant, and u is the indenter
men if accurate residual stress measurements are to be
half-angle.
made. Unfortunately, this is often difficult to achieve in
For materials with preexisting residual stress s, the fracture
practice. For bulk materials, there is no substrate influen-
toughness is
ces. However, the substrate greatly affects the measure-
ment of thin film residual stresses. The substrate effects
can be alleviated when the indenter radius is on the order P
of or less than the film thickness. Kc D x § csc1=2 ; (25)
c3=2
Table 2 gives a comparison of the above six models. It is
obvious that the models can characterize only equibiaxial
stress or biaxial stress, while the stress along specimen depth where c is a dimensionless constant which can be obtained
cannot be obtained. Moreover, the six models all have limita- from the crack shape, and c is the crack length for the stressed
tions. Except Swadener model I, the other models requires a material. The first term on the right hand of Eq. (25) is the
reference specimen, which is often difficult to obtain. For stress intensity factor due to the indentation load, while the
Swadener model I, although a reference specimen is not second term is the stress intensity factor due to the residual
required, the yield stress must be determined by extra stress. Note that the second term is added to the first term for
experiment. tensile stress and subtracted for compressive stress.

TABLE 2
Comparison of six commonly used models to characterize residual stress
Indenter Characteristic Scope of
Models type parameters application Limitations

Suresh model Sharp A Equibiaxial stress Require a stress-free reference sample


Lee model I Sharp P Equibiaxial stress Require a stress-free reference sample
Lee model II Sharp A Biaxial stress Require a stress-free reference sample
Xu model Sharp he/hmax ratio Equibiaxial stress Requires a special three-point bending device
Swadener model I Spherical Era/s yR Biaxial stress Require known yield stress
Swadener model II Spherical H Biaxial stress Require reference sample
RESIDUAL STRESS MEASUREMENT 87

6. CONCLUSIONS
Residual stresses are increasingly desired to be measured
using a nanoindentation technique. There is no one set method
that appears to work for all materials. Six major models from
analyzing load-depth curves and indentation fracture tech-
nique have been developed. Unfortunately, the six models
involving Suresh model, Lee model I, Lee model II, Xu model,
Swadener model I, and Swadener model II all have limitations.
The Suresh model and Lee model I are restricted to equi-biax-
ial residual stress. Lee model II accounts for a general residual
stress state but cannot describe the well-known nonlinearity.
Xu model requires a special three-point bending device and
limits the application to very soft materials with high E/s y
ratios. Swadener model I requires that the yield stress of mate-
rials be known. Swadener model II cannot be applied to thin
films. The indentation fracture technique is destructive and
only applicable to brittle materials. Therefore, in order to eval-
uate residual stresses accurately, new methods should be
developed in the future. The methods with non-destructive and
FIG. 13. Typical indent with radially-oriented cracks. (Ó universal characteristic should be the research direction.
Elsevier. Reproduced with permission of Yen et al.74 Permis-
sion to reuse must be obtained from the rightsholder.)
FUNDING
For a given indentation load P, the residual stresses can be
determined by combining Eqs. (23) and (25): This article was financially supported by NSF of Beijing
(3120001), NSFC (51275105), and Distinguished Young
" # Scholars of NSFC (51125023).
1 ¡ ðc0 =cÞ3=2
s D Kc for tensile stress (26)
cc1=2
" #
1 ¡ ðc0 =cÞ3=2 REFERENCES
s D ¡ Kc for compressive stress: (27) 1. Y. H. Lee and D. Kwon, Measurement of residual-stress effect by
cc1=2 nanoindentation on elastically strained (100) W, Scripta Materi-
alia 49, 459 (2003).
The residual stress state can be defined by comparing c0 and 2. R. Unnikrishnan, K. S. N. Satish Idury, T. P. Ismail, A. Bhadau-
c. The tensile stress can extend the cracks of the stress-free mate- ria, S. K. Shekhawat, R. K. Khatirkar, and S. G. Sapate, Effect of
rial (c0 > c), while the compressive stress can shorten them. heat input on the microstructure, residual stresses and corrosion
resistance of 304L austenitic stainless steel weldments, Mater.
T.-Y. Zhang75 et al. proposed a semi-empirical formula to
Character. 93, 10 (2014).
assess residual stresses in SiO2 and Cr thin films deposited on
3. F. Haag, D. Beitelschmidt, J. Eckert, and K. Durst, Influences of
Si wafers using indentation fracture technique. The residual residual stresses on the serrated flow in bulk metallic glass under
stresses in the SiO2 and Cr films were evaluated to be ¡358 elastostatic four-point bending-A nanoindentation and atomic
and 1095 MPa, respectively, which agree well with the theo- force microscopy study, Acta Materialia 70, 188 (2014).
retical prediction. W.G. Mao76 et al. characterized the residual 4. L. Zhang, H. Yang, X. Pang, K. Gao, and A. A. Volinsky, Micro-
stress in a thermal barrier coating system by indentation frac- structure, residual stress, and fracture of sputtered TiN films,
ture technique. The residual stress on the top coating varies Surf. Coatings Technol. 224, 120 (2013).
from ¡36.8 to ¡243MPa. 5. S. K. Sharma and D. Y. Kim, Abnormal residual stress in nano-
For the interface region between the coating and bond coat, the structured Al thin films grown on Ti/glass substrates, Curr. Appl.
residual stress varies from ¡5 to ¡30 MPa. These results are Phys. 13, 1874 (2013).
6. L. Zhang, H. Yang, X. Pang, K. Gao, and A. A. Volinsky, Micro-
in agreement with available data.
structure, residual stress, and fracture of sputtered TiN films,
Indentation fracture technique can be used to determine Surf. Coatings Technol. 224, 120 (2013).
residual stresses in bulk materials, thin films and coatings. 7. Y. Y. Santana, P. O. Renault, M. Sebastiani, J. G. La Barbera, J.
However, it is only applicable to brittle materials. Moreover, Lesage, E. Bemporad, E. Le Bourhis, E. S. Puchi-Cabrera, and
the difficulty in measuring the crack length at nanoscale M. H. Staia, Characterization and residual stresses of WC-Co
severely limits the accuracy of determination of residual stress thermally sprayed coatings, Surf. Coatings Technol. 202, 4560
using indentation fracture technique. (2008).
88 L.-N. ZHU ET AL.

8. A. Dey, and A. K. Mukhopadhyay, Evaluation of residual stress 25. A. Gouldstone, H.-J. Koh, K.-Y. Zeng, A. E. Giannakopoulos,
in microplasma sprayed hydroxyapatite coating by nanoindenta- and S. Suresh, Discrete and continuous deformation during nano-
tion, Ceram. Int. 40, 1263 (2014). indentation of thin films, Acta Materialia 48, 2277 (2000).
9. X. Zhang, M. Watanabe, and S. Kuroda, Effects of residual stress 26. A. Rico, J. G omez-Garcıa, C. J. Munez, P. Poza, and V. Utrilla,
on the mechanical properties of plasma-sprayed thermal barrier Mechanical properties of thermal barrier coatings after isother-
coatings, Eng. Fract. Mechan. 110, 314 (2013). mal oxidation, Surf. Coatings Technol. 203, 2307 (2009).
10. Y. Huang, S. Chang, and C. Chang, Effect of residual stresses on 27. J. B. Cheng, X. B. Liang, Z. H. Wang, and B. S. Xu, Microstruc-
mechanical properties and interface adhesion strength of SiN ture and mechanical properties of FeBSiNb metallic glass coat-
thin films, Thin Solid Films, 517, 4857 (2009). ings by twin wire arc spraying, J. Therm. Spray. Technol. 22,
11. H. T. Kang, Y. Lee, and X. J. Sun, Effects of residual stress and 471 (2013).
heat treatment on fatigue strength of weldments, Mater. Sci. 28. J. B. Cheng, X. B. Liang, B. S. Xu, and Y. X. Wu, Characteriza-
Eng. A, 497, 37 (2008). tion of mechanical properties of FeCrBSiMnNbY metallic glass
12. S. Novak, M. Kalin, P. Lukas, G. Anne, J. Vleugels, and O. Van coatings, J. Mater. Sci. 44, 3356 (2009).
Der Biest, The effect of residual stresses in functionally graded 29. L. N. Zhu, B. S. Xu, H. D. Wang, and C. B. Wang, Microstruc-
alumina-ZTA composites on their wear and friction behaviour, J. ture and nanoindentation measurement of residual stress in Fe-
Eur. Ceram. Soc. 27, 151 (2007). based coating by laser cladding, J. Mater. Sci. 47, 2122 (2012).
13. G. de Portu, L. Micele, S. Guicciardi, S. Fujimura, G. Pezzotti, 30. T. Y. Tsui, W. C. Oliver, and G. M. Pharr, Influences of stress on
and Y. Sekiguchi, Effect of residual stresses on the fracture the measurement of mechanical properties using nanoindenta-
behaviour of notched laminated composites loaded in flexural tion: I. Experimental studies in an aluminum alloy, J. Mater.
geometry, Compos. Sci. Technol. 65, 1501 (2005). Res. 11, 752 (1996).
14. O. P. Oladijo, A. M. Venter, L. A. Cornish, and N. Sacks, X-ray 31. A. Bolshakov, W. C. Oliver, and G. M. Pharr, Influences of stress
diffraction measurement of residual stress in WC-Co thermally on the measurement of mechanical properties using nanoindenta-
sprayed coatings onto metal substrates, Surf. Coatings Technol. tion: II. Finite element simulations, J. Mater. Res. 11, 760 (1996).
206, 4725 (2012). 32. L. N. Zhu, B. S. Xu, H. D. Wang, and C. B. Wang, On the evalu-
15. R. Seifi and D. Salimi-Majd, Effects of plasticity on residual ation of residual stress and mechanical properties of FeCrBSi
stresses measurement by hole drilling method, Mechan. Mater. coatings by nanoindentation, Mater. Sci. Eng. A 536, 98 (2012).
53, 72 (2012). 33. Y. H. Lee and D. Kwon, Residual stresses in DLC/Si and Au/Si
16. M. Mahmoodi, M. Sedighi, and D.A. Tanner, Investigation of systems: Application of a stress-relaxation model to the nanoin-
through thickness residual stress distribution in equal channel dentation technique, J. Mater. Res. 17, 901 (2002).
angular rolled Al 5083 alloy by layer removal technique and 34. L. N. Zhu, B. S. Xu, H. D. Wang, and C. B. Wang, Measurement
X-ray diffraction, Mater. Des. 40, 516 (2012). of residual stress in quenched 1045 steel by the nanoindentation
17. W. Woo, V. Em, P. Mikula, G. An, and B. Seong, Neutron dif- method, Mater. Character. 61, 1359 (2010).
fraction measurements of residual stresses in a 50 mm thick 35. Z. H. Xu and X. Li, Influence of equi-biaxial residual stress on
weld, Mater. Sci. Eng. A 528, 4120 (2011). unloading behaviour of nanoindentation, Acta Materialia 53,
18. D. R. P. Singh, X. Deng, N. Chawla, J. Bai, C. Hubbard, G. Tang, 1913 (2005).
and Y.-L. Shen, Residual stress characterization of Al/SiC nano- 36. Z. H. Xu and X. Li, Estimation of residual stresses from elastic
scale multilayers using X-ray synchrotron radiation, Thin Solid recovery of nanoindentation, Philosoph. Mag. 86, 2835 (2006).
Films 519, 759 (2010). 37. M. K. Khan, M. E. Fitzpatrick, S. V. Hainsworth, and L.
19. S. A. S. Rodrigues, A. G. Rolo, A. Khodorov, M. Pereira, and M. Edwards, Effect of residual stress on the nanoindentation
J. M. Gomes, Determination of residual stress in PZT films pro- response of aerospace aluminium alloys, Computat. Mater. Sci.
duced by laser ablation with X-ray diffraction and Raman spec- 50, 2967 (2011).
troscopy, J. Eur. Ceram. Soc. 30, 521 (2010). 38. C. E. K. Mady, S. A. Rodriguez, A. G. G omez, and R. M. Souza,
20. Y. Javadi, M. Akhlaghi, and M. A. Najafabadi, Using finite ele- Effects of mechanical properties, residual stress and indenter tip
ment and ultrasonic method to evaluate welding longitudinal geometry on instrumented indentation data in thin films, Surf.
residual stress through the thickness in austenitic stainless steel Coatings Technol. 205, 1393 (2010).
plates, Mater. Des. 45, 628 (2013). 39. L. N. Zhu, B. S. Xu, H. D. Wang, and C. B. Wang, Effect of
21. H. IlkerYelbay, I. Cam, and C.H. G€ur, Non-destructive determi- residual stress on the nanoindentation response of (100) copper
nation of residual stress state in steel weldments by Magnetic single crystal, Mater. Chem. Phys. 136, 561 (2012).
Barkhausen Noise technique, NDT&E Int. 43, 29 (2010). 40. X. Chen, J. Yan, and A. M. Karlsson, On the determination of
22. S. Suresh, A. E. Giannakopoulos, and J. Alcala, Spherical inden- residual stress and mechanical properties by indentation, Mater.
tation of compositionally graded materials: theory and experi- Sci. Eng. A 416, 139 (2006).
ments, Acta Materialia 45, 1307 (1997). 41. L. Ling, S. Long, Z. Ma, and X. Liang, Numerical study on the
23. T. A. Venkatesh, K. J. Van Vliet, A. E. Giannakopoulos, and S. effects of equi-biaxial residual stress on mechanical properties of
Suresh, Determination of elasto-plastic properties by instru- nickel film by means of nanoindentation, J. Mater. Sci. Technol.
mented sharp indentation: guidelines for property extraction, 26, 1001 (2010).
Scripta Materialia 42, 833 (2000). 42. S. Suresh and A. E. Giannakopoulos, A new method for estimat-
24. A. E. Giannakopoulos and S. Suresh, Theory of indentation of ing residual stresses by instrumented sharp indentation, Acta
piezoelectric materials, Acta Materialia 47, 2153 (1999). Materialia 46, 5755 (1998).
RESIDUAL STRESS MEASUREMENT 89

43. Y. H. Lee and D. Kwon, Estimation of biaxial surface stress by 61. A. Bolshakov and G. M. Pharr, Influences of pileup on the mea-
instrumented indentation with sharp indenters, Acta Materialia surement of mechanical properties by load and depth sensing
52, 1555 (2004). indentation techniques, J. Mater. Res. 13, 1049 (1998).
44. J. G. Swadener, B. Taljat, and G. M. Pharr, Measurement of 62. Q. N. Meng, M. Wen, C. Q. Hu, S. M. Wang, K. Zhang, J. S.
residual stress by load and depth sensing indentation with spheri- Lian, and W. T. Zheng, Influence of the residual stress on the
cal indenters, J. Mater. Res. 16, 2091 (2001). nanoindentation-evaluated hardness for zirconium nitride films,
45. T. Y. Zhang, L.-Q. Chen, and R. Fu, Measurements of residual Surf. Coatings Technol. 206, 3250 (2012).
stresses in thin films deposited on silicon wafers by indentation 63. X. Zhou, Z. Jiang, H. Wang, and R. Yu, Investigation on methods
fracture, Acta Materialia 47, 3869 (1999). for dealing with pile-up errors in evaluating the mechanical prop-
46. G. M. Pharr and A. Bolshakov, Understanding nanoindentation erties of thin metal films at sub-micron scale on hard substrates
unloading curves, J. Mater. Res. 17, 2660 (2002). by nanoindentation technique, Mater. Sci. Eng. A 488, 318 (2008).
47. W. C. Oliver and G. M. Pharr, An improved technique for deter- 64. Y. Sun, J. Liang, Z. Xu, G. Wang, and X. Li, Nanoindentation for
mining hardness and elastic modulus using load and displace- measuring individual phase mechanical properties of lead free
ment sensing indentation experiments, J. Mater. Res. 7, 1564 solder alloy, J. Mater. Sci. 19, 514 (2008).
(1992). 65. Q. Wang, K. Ozaki, H. Ishikawa, S. Nakano, and H. Ogiso,
48. W. C. Oliver and G. M. Pharr, Measurement of hardness and Indentation method to measure the residual stress induced by ion
elastic modulus by instrumented indentation: Advances in under- implantation, Nucl. Instrum. Meth. Phys. Res. B 242, 88 (2006).
standing and refinements to methodology, J. Mater. Res. 19, 3 66. X. J. Lu, X. Wang, and P. Xiao, Nanoindentation and residual
(2004). stress measurements of yttria-stablized zirconia composite coat-
49. J. R. Tuck, A. M. Korsunsky, S. J. Bull, and R. I. Davidson, On ings produced by electrophoretic deposition, Thin Solid Films
the application of the work-of-indentation approach to depth- 494, 223 (2006).
sensing indentation experiments in coated systems, Surf. Coat- 67. Y. C. Yang and E. Chang, Measurements of residual stresses in
ings Technol. 137, 217 (2001). plasma-sprayed hydroxyapatite coatings on titanium alloy, Surf.
50. L. N. Zhu, B. S. Xu, H. D. Wang, and C. B. Wang, Determina- Coatings Technol. 190, 122 (2005).
tion of hardness of plasma-sprayed FeCrBSi coating on steel sub- 68. M. Tanaka, M. Hasegawa, A. F. Dericioglu, and Y. Kagawa,
strate by nanoindentation, Mater. Sci. Eng. A 528, 425 (2010). Measurement of residual stress in air plasma-sprayed Y2O3-ZrO2
51. K. O. Kese, Z. C. Li, and B. Bergman, Influence of residual stress thermal barrier coating system using micro-Raman spectroscopy,
on elastic modulus and hardness of soda-lime glass measured by Mater. Sci. Eng. A 419, 262 (2006).
nanoindentation, J. Mater. Res. 19, 3109 (2004). 69. C. R. C. Lima, J. Nin, and J. M. Guilemany, Evaluation of resid-
52. Y. H. Lee, U. Baek, Y. I. Kim, and S. H. Nahm, On the measure- ual stresses of thermal barrier coatings with HVOF thermally
ment of pile-up corrected hardness based on the early Hertzian sprayed bond coats using the Modified Layer Removal Method
loading analysis, Mater. Lett. 61, 4039 (2007). (MLRM), Surf. Coatings Technol. 200, 5963 (2006).
53. R. Saha and W. D. Nix, Soft films on hard substrates—nanoin- 70. C. A. Taylor, M. F. Wayne, and W. K. S. Chiu, Residual stress
dentation of tungsten films on sapphire substrates, Mater. Sci. measurement in thin carbon films by Raman spectroscopy and
Eng. A 319–321, 898 (2001). nanoindentation, Thin Solid Films 429, 190 (2003).
54. K. O. Kese, Z. C. Li, and B. Bergman, Method to account for true 71. E. Atar, C. Sarioglu, U. Demirler, E. S. Kayali, and H. Cimeno-
contact area in soda-lime glass during nanoindentation with the glu, Residual stress estimation of ceramic thin films by X-ray dif-
Berkovich tip, Mater. Sci. Eng. A 404, 1 (2005). fraction and indentation techniques, Scripta Materialia 48, 1331
55. L. N. Zhu, B. S. Xu, H. D. Wang, and C. B. Wang, Measurement (2003).
of mechanical properties of 1045 steel with significant pile-up by 72. J. Zhu, H. Xie, Z. Hu, P. Chen, and Q. Zhang, Cross-Sectional
sharp indentation, J. Mater. Sci. 46, 1083 (2011). residual stresses in thermal spray coatings measured by moire
56. M. Qasmi, P. Delobelle, F. Richard, and A. Bosseboeuf, Effect of interferometry and nanoindentation technique, J. Therm. Spray
the residual stress on the determination through nanoindentation Technol. 21, 810 (2012).
technique of the Young’s modulus of W thin film deposit on 73. C. M. Lepienski, G. M. Pharr, Y. J. Park, T. R. Watkins, A.
SiO2/Si substrate, Surf. Coatings Technol. 200, 4185 (2006). Misra, and X. Zhang, Factors limiting the measurement of resid-
57. X. Zhao and P. Xiao, Residual stresses in thermal barrier coat- ual stresses in thin films by nanoindentation, Thin Solid Films
ings measured by photoluminescence piezospectroscopy and 447–448, 251 (2004).
indentation technique, Surf. Coatings Technol. 201, 1124 (2006). 74. C. Yen, S. Jian, Y. Lai, P. Yang, Y. Liao, J.S. Jang, T. Lin, and J.
58. A. W. Warren, Y. B. Guo, and M. L. Weaver, The influence of Juang, Mechanical properties of the hexagonal HoMnO3 thin
machining induced residual stress and phase transformation on films by nanoindentation, J. Alloys Comp. 508, 523 (2010).
the measurement of subsurface mechanical behavior using nano- 75. T.-Y. Zhang, L.-Q. Chen, and R. Fu, Measurements of residual
indentation, Surf. Coatings Technol. 200, 3459 (2006). stresses in thin Films deposited on silicon wafers by indentation
59. M. Nishikawa and H. Soyama, Two-step method to evaluate fracture, Acta Matererialia 47, 3869 (1999).
equibiaxial residual stress of metal surface based on micro- 76. W. G. Mao, J. Wan, C. Y. Dai, J. Ding, Y. Zhang, Y. C. Zhou,
indentation tests, Mater. Des. 32, 3240 (2011). and C. Lu, Evaluation of microhardness, fracture toughness and
60. A. E. Giannakopoulos and S. Suresh, Determination of elasto- residual stress in a thermal barrier coating system: A modified
plastic properties by instrumented sharp indentation, Scripta Vickers indentation technique, Surf. Coatings Technol. 206,
Materialia 40, 1191 (1999). 4455 (2012).

Das könnte Ihnen auch gefallen