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Precision Engineering 59 (2019) 90–109

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Precision Engineering
journal homepage: www.elsevier.com/locate/precision

A review on cutting of industrial ceramic materials T


Rahul Rakshit, Alok Kumar Das ∗

Department of Mechanical Engineering, Indian Institute of Technology (Indian School of Mines), Dhanbad, 826004, Jharkhand, India

ARTICLE INFO ABSTRACT

Keywords: Ceramics have garnered huge engineering applications in various manufacturing industries. This is due to their
Al2O3 excellent mechanical properties at high temperature, good oxidation stability and high hardness. However, their
Glass ceramics inherent brittleness properties have led to difficulty in giving proper shape through machining (achieving di-
Insulators mensional accuracy and precision) which limit their applications. In the present study, an elaborate literature
Strength
review on both non-conventional and hybrid machining/cutting techniques has been carried out for a better
Hybrid machining
understanding of machinability and surface integrity of ceramic materials. Few comparative studies and recent
innovative developments for efficient cutting of ceramics have also been discussed.

1. Introduction carbide is used as heat shields for the space shuttle. In engine and
turbine parts, high performance ceramics such as sialons are used. The
Ceramics have become an important industrial material and are piezo electric ceramics such as lead titanate, barium titanate and lead
being widely used in different fields for overcoming technological zirconate titanate (PZT) have wide applications in ultrasonic testing,
limitations. Ceramics are generally inorganic crystalline substances strain gauges, and MEMs devices. Also, ceramics are gaining acceptance
(glass being an exception) which are composed of metals and non- in making cutting tools and dies, fuel systems and valves in space ve-
metals bonded by ionic or covalent bonds. hicles, automobile engine, military weapon systems, nuclear industries,
Based on chemical composition, industrial ceramics are classified as biological industries, heat exchanger and electronic substrates for mi-
oxides, carbides, nitrides, borides, silicates and glass ceramics (Fig. 1). crowave devices [4,5].
In comparison to metals and polymers, the ability of ceramics to
withstand high operating temperatures makes them a leading en- 2. Cutting techniques for industrial ceramics
gineering material. Their stiffness and strength are comparable to that
of the metals and are generally chemically unreactive. Most of the There have always been difficulty in cutting/machining of industrial
ceramics are insulators of heat and electricity and are resistant to ad- ceramics due to their extreme properties, which limit their applications.
verse environments. Most ceramics possess properties such as high Moreover, due to high hardness and brittleness, these materials are
electrical resistance, high thermal resistance, greater chemical stability, more susceptible to fracture. Fig. 2 represents the various types of
high corrosive resistance, superior wear resistance, temperature cutting methods for industrial ceramics.
strength and high hardness. The mechanical and physical properties of The conventional methods are unable to produce damage free cuts
major industrial ceramics are listed in Table 1. and hence reduce the strength of these materials. A considerable
These properties indicate the potential utilisation of ceramics for amount of cutting force is required which induces micro cracks on the
engineering and medical applications. For example, silicon carbide, surface and edge chipping [6]. The alternative cutting techniques such
tungsten carbide, and aluminium oxide are used as abrasives in as wire electrical discharge machining, laser beam machining, abrasive
grinding wheel. Fireclay (composed mainly of alumina and silica), water jet machining and hybrid machining have also been applied by
alumina, zirconia, magnesia etc. are being used in refractory bricks. various researchers worldwide to cut ceramics. Few of these techniques
Zirconium diboride, an ultra-high temperature ceramic (UHTC) and are successful in producing high quality and accurate cutting surfaces
boron nitride are used for making crucible. Silicon carbide and silicon without degrading the parent material. These modern methods have
nitride possess high wear resisting and load carrying properties, so are potential to overcome the barriers in fabrication of engineering com-
used for making wear resistant surfaces, bearings, turbo charger rotors ponents from different ceramic materials.
etc. Uranium oxide has usage in the nuclear reactors as fuel. Titanium


Corresponding author.
E-mail address: eralok@yahoo.co.in (A.K. Das).

https://doi.org/10.1016/j.precisioneng.2019.05.009
Received 10 January 2019; Received in revised form 15 April 2019; Accepted 24 May 2019
Available online 29 May 2019
0141-6359/ © 2019 Published by Elsevier Inc.
R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Fig. 1. Classification of industrial ceramics.

Fig. 2. Various methods of ceramic cutting.


3. Conventional machining

The cutting of hard and brittle ceramics is being performed for surface which are hard to detect. This happens when few diamond abrasives
many decades. The initial cutting methods include diamond saw blade are partially embedded into ceramic specimens and inevitably generate
cutting, abrasive wheel cutting, wire saw cutting and mechanical minute fractures and flaws [12]. In the subsequent stages, processes like
mounting (scribing and breaking). Among these, diamond blade cutting lapping, polishing, ion beam implantation can repair such defects but these
and wire cutting are extensively used in industries. are not very effective in restoring the properties of the ceramics for reliable
performance.
3.1. Abrasive wheel cutting
3.3. Mechanical mounting
This is an economical method widely used for cutting of ceramics
for general fabrication purpose. The cutting abrasives include alumi- This inexpensive method comprises of two steps viz; scribing and
nium oxide, silicon carbide, zirconia alumina, etc [7]. The material of breaking. It is widely used for cutting glass (LCD panels) and Si wafers. A
the wheel influences the cutting rate and wheel life. Silicon carbide scribed line is formed on the surface of the material using a diamond scriber.
abrasives are generally accepted for cutting glass and other ceramics. In some applications, cutting disc made of tungsten carbide is rotated along
For industrial applications, diamond wheels are used for cutting of the material surface leaving a scribed line. A mechanical bending moment is
ceramics. The diamond wheels can withstand high cutting speed and applied along the scribed line for cutting/separating the material into two
have longer life compared to abrasive wheels. pieces. The cracks initiate from the scribed lines and run through the
thickness of the material when the material is subjected to mechanical force
3.2. Diamond saw cutting [13]. When the crack does not drive sufficiently deep into the thickness of
material, a relatively higher amount of breaking force is required to separate
This method is effective for cutting hard to cut materials with high as- the material. A variation in the optimal process parameters such as scribing
pect ratio using resin bonded diamond blades. It is possible to produce a speed, scribing load and scribing disc dimensions can deviate the cutting
narrow kerf width using thin blades. But it is not possible to achieve cutting path from the scribed line. Ono et al. [14] studied the effect of wheel di-
accuracy with thin blades owing to its low stiffness. The deflection and wear mension on the crack formation and crack propagation. Optimization of
of the blade during cutting influence the surface quality and geometrical process parameters is required to prevent the formation of lateral cracks
accuracy. Yamasaka et al. [8] studied improvement in straightness of the which may propagate and result in defects. Now-a-days, the separating of
sliced material using thin diamond wheels. Similarly, many research works glass is being carried out by moving the defocused laser beam along the
were performed to analyze the wear mechanism of resin coated diamond scribed line. Tsai et al. [15] performed diamond scribing and laser separ-
wheels through experiments and simulation processes [9–11]. In case of ating of glass plate and established a relationship between the crack depth,
diamond wheels, strength inhibiting defects are introduced in the cut scribe depth, scribing force and the cutting speed. The quality of the laser

Table 1
Mechanical and physical properties of major industrial ceramics [1–3].
Industrial Ceramic Elastic Modulus Flexural Fracture Electrical Resistivity Thermal Conductivity Thermal Expansion Coefficient
(GPa) Strength Toughness at 25 °C at RT (20-1000 °C) (10−6/°C)
(MPa) (MPa.m½) (ohm. cm) (W/mK)

Alumina (99.9%) 393 455 5–6 > 1014 35 6.5–9.0


Zirconia 160–240 970–1350 10–12 > 1013 1.5–2.5 7–11
Silicon Carbide 480 550–1300 4.6 0.01–100 30–200 3.2–5
Silicon Nitride 290–320 900 6 107–1012 20–30 2.6–3.7
Fused quartz 71–75 80 0.67 6 × 1010 1.4 0.55
Tungsten Carbide 730 482–1200 2–3.8 2 × 10−5 120 4.5–7.1
Steatite 111 117–138 4.5 > 1014 2.5 7.0–8.5
Mullite 144–179 206 3 1014 4 3.5–6
Cordierite 70 117 1.7–3 > 1014 3 2.1–3
Borosilicate glass 67–80 34–69 0.78 1015 1.14 3.3
Zirconia Toughened Alumina 338 586 6 > 1014 24 6–7.1
(ZTA-14)
Aluminium titanate 5–30 60 0.4–4 > 1011 1.4–2.5 1.5–3.5

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Fig. 3. Schematic diagram of wire cutting mechanism with (a) abrasive slurry and (b) fixed diamond grits [19].

Fig. 4. TEM images of the cross section of the wafers sliced with (a) loose abrasive slurry and (b) fixed abrasive diamond wire sawing. The solid and the broken lines
describe the depth of scratch and inside damage respectively [18].

broken surface was found better than that of the mechanically broken. accepted. Fixed abrasive diamond wire (Fig. 3b) can cut difficult to machine
Many researchers have conducted experiments on the scribing process using ceramic at high cutting speed with better surface integrity with minimum
laser beam, which is discussed in section 4.2.2. kerf width. The material removal mechanism involves the interactions be-
tween abrasive particles, substrate and moving wire. Generally, in fixed
abrasive diamond wire sawing, the wire remains unaffected during the
3.4. Wire saw cutting material removal process. Wu et al. [17] conducted biaxial flexural and four
point bending tests to compare the fracture strength of Si wafers cut by fixed
Wire saw is a popular technique to cut ceramics as compared to dia- abrasive diamond wire and loose abrasive slurry. They reported that the
mond saw blades, as it produces narrow kerf width and can cut complicated superior flexural strength of wafers was achieved with fixed abrasive dia-
contours with direction change of cutting wire [16]. Initially, stainless steel mond wire sawing. Experiments conducted by Wantanabe et al. [18] de-
wire with slurry of loose abrasives was used for cutting ceramics like silicon scribed the saw damage layers of the polycrystalline Si wafers using both the
carbide (Fig. 3a). The slurry is prepared by mixing oil/water/polyethylene sawing processes. The depth of scratch and inside damage were much lower
glycol with the loose abrasives (silicon carbide and diamond). This prepared in fixed abrasive diamond wire compared to loose abrasive slurry sawing (as
slurry provides low machining rate, and its recycling and retreating is a shown in Fig. 4). Abrasives slurry sawing generates micro cracking while
problem. Moreover, the viscosity of the slurry changes with temperature. To fixed abrasive diamond wire sawing generates smooth grooves (Fig. 5).
overcome the above problems, diamond impregnated wire is widely

Fig. 5. SEM images of surface morphology of Si wafers (a) loose abrasive slurry (b) fixed abrasive diamond wire sawing [19].

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Many researchers have reported that the temperature of slurry is


slightly higher than that of the moving wire due to heat generation by
the viscous forces in the slurry. Johnsen et al. [28] studied the heat
transfer and temperature distribution experimentally and computa-
tionally to investigate the influence of temperature variation on the
cutting performance. The viscous dissipation reduced the effectiveness
of slurry carrying abrasive particles in the sawing channel.
As diamonds and silicon carbide are costly abrasives; thus, the wire
saw cutting becomes very expensive. These materials account for
25–30% of the total wafer slicing cost. So, the conventional cutting is
able to produce dimensionally accurate surfaces, but it is not a cost
effective process. The proper disposal of the used slurry comprising of
substrate particles (Si debris) and abrasives particles is mandatory to
prevent environmental issues. As the SiC particles are expensive so,
many novel techniques have been developed to separate substrate
particles and SiC for recycling [29–31]. Though wire cutting can pro-
duce comparatively advanced cuts compared to diamond saw blade
cutting, but deeper caves are generated on the machined surface due to
pull out of the diamond grits in fixed abrasive diamond wire sawing.
Fig. 6. Schematic diagram of multi wire sawing arrangement using slurry [19]. This results in the formation of sub surface damages, micro cracks, and
scratches. These ceramics are used in electronic components, so defects
For cutting multiple samples or ingots simultaneously, multi wire such as chipping, micro cracks, non-linearity and angled cuts generated
slurry sawing [19,20] is introduced. The wire is looped around rollers due to these conventional cutting can affect the performance of the
or wire guides and multiple strands of wire web are formed due to finished product.
which the samples get sliced into thousands of wafers (Fig. 6). This
method is widely used for slicing wafers owing to its higher pro- 4. Non-conventional machining
ductivity. Oscillating wires produce smoother surfaces as compared to
non-oscillating wires. Wu et al. [21] investigated the influence of the The inabilities of the conventional cutting techniques have led to
reciprocating motion of the wire on the cut surface quality of silicon the development of modern techniques to cut the ceramics and to
wafers used in solar cells. As the wire speed becomes slower when the minimise cracks and damages. These are economical method for cutting
wire movement direction is reversed, the obtained surface is not uni- ceramics without much disturbing the material properties. The material
form. Meng et al. [22] explored fixed abrasive diamond endless wire wastage and scarp are minimised in these alternative cutting techni-
cutting of Al2O3/TiC. They reported that high wire speed reduced ques. These methods include wire electrical discharge machining, laser
surface roughness, wire wear and cutting forces but with increased beam machining, abrasive water jet machining and hybrid machining
cutting speed, wear of the wire, roughness of the produced surface in- which are discussed in the following sections.
creased. Similar observations were reported by Hardin et al. [23] while
performing a set of experiments for slicing 75 mm diameter SiC wafers 4.1. Wire electrical discharge machining (WEDM)
using fixed abrasive diamond wire.
The use of small sized diamond grit can reduce the micro cracks, Wire EDM is a very promising technology, which can produce in-
stagnation grooves and pulverisation on the machined surface and en- tricate shapes. The introduction of CNC to the wire EDM for controlling
hance the surface integrity. Clark et al. [24] performed fixed abrasives various motions has increased its capabilities for different 2D contour
diamond wire cutting of foam ceramics to investigate the wear and life cutting.
of diamond wire. The diamond grits were exposed and subjected to
fracture while effectively cutting the foam ceramics. A small length of 4.1.1. Principle and working
contact between the wire and the sample was maintained constantly In wire EDM, copper, brass or zinc coated wire of diameter
throughout the cutting process. The rocking wire motion mechanism 0.05–0.3 mm is used to slice hard to machine electrical conductive
was designed to maintain a consistent contact length between work- materials through thermal erosion process. During the process, a series
piece and wire and enhance the cut quality. of electric spark is generated in between the wire electrode and the
The important models for predicting and explaining the cutting and work piece which melts and vaporises the work and the tool material. A
material removal mechanisms in wire sawing include rolling indenting continuous flow of dielectric fluid (as a coolant) coaxial with the wire is
model [25] and scratching indenting model [26]. The model demon- maintained throughout the cutting process for efficient removal of
strates the mechanical interactions among substrate, wire and abra- molten material from the spark zone in the form of debris. Pulsating
sives. Yang and Kao [26] predicted the relationship between material voltage is used to create a spark between the electrodes. When the
removal rate and process parameters combined with mechanical supplied voltage reaches a critical value, a plasma channel is generated,
properties of the substrate. They reported that material removal rate and spark is initiated. This leads to a sharp rise in temperature at a point
increased with the wire speed, external load, size of abrasives and as a result of which substrate material at that point melts and vaporises.
modulus of elasticity of substrate. The wire size, contact area between The plasma channel breaks when the pulsating power supply is turned
wire and substrate, yield strength and fracture toughness of substrate off due to which temperature starts reducing suddenly. This allows the
had a negative impact on the material removal rate. Wang et al. [27] dielectric to remove the debris from the machined surface [32,33]. Wire
developed a theoretical force model for detailed understanding of micro with tension is continuously fed without any contact with the work-
and nano scratching on brittle materials with diamond abrasives. piece. A clearance of 0.025–0.05 mm is maintained automatically be-
Hexahedron, octahedron and multiply twinned series of diamond grits tween the workpiece and the wire based on the machining parameters.
were discussed. They validated this model with micro and nano The setup of WEDM is shown in Fig. 7.
scratching tests and found it apt for obtaining better surface quality SiC Generally, deionised water is used as the dielectric fluid in wire
wafers using wire sawing. EDM. In many cases, the workpiece is completely submerged under the
dielectric which helps in stabilisation of temperature [34]. Kunieda

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

helped in machining. Mohri et al. [38] performed high speed wire EDM
cutting of 7 mm thick Si3N4 ceramic which was coated with TiN layer
by PVD technique. Kerosene was used as dielectric. The coated layer of
titanium nitride was acting as an assisting electrode. For high speed
cutting of insulating ceramics, it was desirable to keep the discharge
duration longer for better diffusion of carbon particles on the insulating
surface. Gotoh et al. [39] described the parameters to control the
electrically conductive surface layer for stable machining. Also, the
discharge current should be set at a lower level to avoid wire breakage.
Tungsten or molybdenum wire possess higher tensile strength at ele-
vated temperature, so are used for cutting at higher temperatures.
Another way to machine or cut a non -conductive ceramic is by
doping it with a conductive material. Matsuo et al. [40] used wire EDM
to cut non-conductive zirconia and alumina ceramic by doping it with
TiC and NbC. An optimum level of carbide content (vol 28% for NbC
Fig. 7. Schematic diagram of WEDM setup [40]. and 30% for TiC) was observed which gave the maximum machining
rate of the ceramics.
et al. [35] performed wire cutting in gas atmosphere without using any
liquid dielectric. The dry WEDM process improved the straightness and 4.1.3. Foil electrode EDM method
roughness of cut surfaces due to reduction in vibration compared to It is observed that during WEDM, the vibration in the wire reduces
conventional WEDM. It was possible to achieve corrosion free cutting, accuracy and increases the kerf width. To reduce this vibration, a new
but this process reduced the MRR and generated streak marks on the technique for cutting silicon carbide ceramics was developed, and its
finished surface. feasibility was studied by Zhao et al. [41]. They used copper foil elec-
trode of thickness varying from 50 to 200 μm and width 15 mm which
was loaded by using a tension fixture to minimise the tool vibration.
4.1.2. Assisting electrode method
The foil fixture (Fig. 9) was connected to the Z axis of die sinking EDM,
Electric discharge machining is generally used for machining elec-
and cutting was performed by servo feeding the tool towards the
trically conductive materials. Among different types of ceramics, boron
workpiece.
carbide B4C and titanium boride TiB2 are naturally conductive ceramics
They observed that polarity of the foil influences the machining
[36]. Recent studies have reported that non-conductive materials can
characteristics. Fig. 10 shows that a higher material removal rate is
also be machined by using an assisting electrode method [37]. The first
attained when the tool is negative because of large discharge energy
trial was done on a sialon/nickel joined to understand the process. In-
distribution in the anode. So, lower tool wear ratio is found when the
itially, it was observed that discharge was occurring at the metallic
foil is negative. The tool wear ratio is increased when the thickness of
surface and interface. After some time when metallic diffusion started,
foil is reduced because of higher average heat flux due to small working
discharge was established on the ceramic surface. So, the metal acted as
area of the thinner foil.
a trigger which initiated the machining on an insulated surface. This
They also highlighted the effect of pulse duration and depth of cut
encouraged the cutting of insulated ceramics using assisting electrode
on output variables such as kerf width, cutting speed and tool wear. A
method. In this technique, metal plates and metal meshes which act as
minimum kerf width of 100 μm was attained using foil electrode
assisting electrode are placed on both the sides of the ceramic work-
method. Zhao et al. [42] utilised running ultra-thin multi foil tool
piece (Fig. 8). The conductive particles are generated from the metallic
electrode for slicing SiC ingots into wafers. The average area slicing
surfaces and carbon from the decomposed dielectric. These particles are
speed was enhanced due to larger discharge area in multi slicing
diffused on the surface of the non-conducting ceramics and develop a
compared to single slicing. The wire breakage problem in multi WEDM
conducting layer which enables cutting.
was also solved using multi foil slicing method.
Mohri et al. [37] presented a study on the wire cutting of non-
conductive sialon ceramic of 2 mm thickness by assisting electrode
method. The ceramic workpiece was covered with copper mesh fol- 4.1.4. Research progress
lowed by copper plates on both sides. In this experiment, brass wire Zhao, Kunieda and Abe [41] reported a comparative study on ma-
electrode of 0.2 mm diameter and kerosene oil (working fluid) were terial removal rate, kerf width, surface roughness and wire electrode
used. By Auger electron spectroscopy, the presence of a thin layer of
copper and carbon was confirmed on the machined surface. It was
concluded that the conductive layer formed on the ceramic surface

Fig. 9. Schematic diagram of the experimental setup arrangement for tension


Fig. 8. Construction of assisting electrode [37]. loaded foil electrode [41].

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Fig. 10. (a) Variation of metal removal rate with discharge current and tool polarity and (b) Variation of tool wear ratio with foil thickness and tool polarity [41].

breakage of SiC and SKD11. It was analysed that the SiC ingots have EDMed specimen [51]. Lok and Lee [52] measured the flexural strength
higher material removal rate compared to steel under same machining of sialon and Al2O3-TiC ceramics using three point and four point
conditions due to Joule heating effect and thermal cracks generation. quarter bending test. It was observed that mean flexural strength re-
So, material removal in edmed SiC took place due to melting and va- duced by 32% and 67% respectively due to formation of surface cracks
porising and also due to cracking and fracturing. Pramanick et al. [43] on machined surface. To obtain a highly accurate surface finish is ex-
conducted experiments on conductive boron carbide and examined the tremely difficult due to wire vibration and wire static defection (wire
optimum roughness and cutting rate at pulse on time of 30 μs, pulse off lag) [53]. So, few studies have also been conducted for understanding
time of 52 μs, dielectric pressure of 8kg/cm2 and feed rate of 2100 mm/ the wire's mechanical behaviour while machining. Many control stra-
min. A regression model was formulated for surface roughness and tegies to prevent wire breakage have also been developed by various
machining speed. Cheng, Eubank and Gadalla [44] performed ma- researchers [54,55].
chining on ZrB2 ceramics and ZrB2- Cu composite using die sinking
EDM, wire EDM and diamond saw. The experiment showed that the 4.2. Laser beam machining (LBM)
machining rate in EDM was increasing with the increase in pulse
duration, current and pulse frequency. The diamond saw cut has lower Ceramics cutting is routinely carried out by laser beam machining.
cutting rate because of high hardness of the ZrB2 based materials. It is an abrasion less technique in which the material is neither sub-
Sanchez et al. [45] conducted a set of experiments on boron carbide B4C jected to cutting forces nor vibration. Most importantly this technique
and Si infiltrated SiC and reported that the cutting rate increased with has a much higher cutting rate as compared to both conventional and
decreasing pulse off time, but after attaining a certain minimum pulse other non-conventional techniques. There are various types of lasers
off time, the wire broke due to instability in machining. They observed such as CO2 lasers, Nd:YAG lasers, fiber lasers, excimer lasers which are
that cutting rate increased with increasing voltage and it is also de- used for cutting of ceramic. CO2 lasers are popular in industries for
pendent on the thickness of the workpiece. cutting because of its high power with output beam at eye safer wa-
Many authors have investigated the inter relationships between process velength. Nd:YAG lasers are capable of storing more energy than gas
parameters and other variables for optimizing the WEDM process. Tarng lasers due to the Q-switching ability which generates high peak powers
et al. [46] utilised neural network model for solving multi response opti- in short pulse duration. Despite various advancements in their design,
mization problems and estimated cutting rates and surface finish for various these lasers have poor efficiencies (1–10%) and poor optical beam
machining parameters. Various modelling of WEDM process have also been qualities. To overcome this, Fiber lasers may be used which has distinct
carried out by various researchers for predicting the process performance. A advantages which includes high efficiency (20–40% wall plug effi-
simulation system was developed by Han et al. [47] which was successful in ciency), compact size, better beam quality, no hard optic resonator,
reproducing the discharge phenomena in WEDM. Liu and Esterling [48] reduced chiller size, low maintenance cost; this laser has wide industrial
designed a solid modelling method to represent WEDM cut geometry. Hou applications as compared to other [56,57].
et al. [49] presented a simulation of thermal stress and temperature field
distribution of Si3N4 insulating ceramic while machining with wire-EDM. A 4.2.1. Principle and working
double layer structure model was designed for simulating the discharge A highly collimated coherent beam of light is ejected from the laser
condition using FEM. A new WEDM method to cut SiC ingots was developed source which gets reflected from the deflector and falls on the work-
by Kimura et al. [50]. A multi wire EDM with track shaped section electrode piece after traveling through the focussing lens. The high power in-
wire was used to slice the ceramic with an aim to reduce kerf width and tensity of the beam melts and/or vaporises the material in the focussing
cracks on machined surface. This track shaped section brass electrode of- zone (working spot) due to a tremendous increase in temperature.
fered high tension loading compared to circular section wire and therefore Highly pressurized gas is allowed to flow in the direction of laser beam,
minimised the wire vibration. This technique provided multi point slicing of to blow away the molten metal which generates a cutting edge [58–62]
ceramics at a particular time in a very efficient manner. (Fig. 11). These pressurized gases, called assist gases, sometimes che-
The major disadvantage with EDM is the formation of heat effected mically react with the workpiece during cutting operation. The small-
zone and surface damages that not only affects the surface integrity but sized focussed beam diameter generates a narrow kerf width with an
also lowers the Weibull modulus. The Weibull modulus of flexural angle of taper and narrow heat affected zone.
strength is used to characterise the surface integrity of ceramics. The Lasers are capable of producing continuous wave (CW) and pulsed
diamond saw cut specimen shows higher Weibull modulus compared to mode (nano, pico and femto second) powers in the range of few Watts

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Fig. 11. Schematic diagram of Nd:YAG laser cutting [50].

to Kilo Watts. In CW, laser light is emitted continuously whereas, in


pulsed mode, laser light is emitted periodically. CW laser discharges
severe heat shocks which results in ceramic fracture. Short-pulsed
duration lasers are favourable for thin ceramics because they enhance
the machining quality. Ultrashort pulsed laser further improves the
quality because it removes material without formation of the molten
layer. In the case of thick ceramics, it is desirable to use long pulsed
duration laser as high material removal rate is required [61,62]. Fig. 12
shows the increase in surface roughness of laser cut ceramics with in-
creasing thickness.
Various type of assist gases that are used for cutting include ni-
trogen, oxygen, argon, helium, and air. Many researchers have ex-
amined the influence of assist gas type on cutting performance of the
ceramics [63–65]. Nitrogen is generally recommended for cutting of
alumina owning to its good balance of ionization energy and thermal
conductivity compared to other assist gases. Various researchers have
reported that the material properties such as reflectivity and thermal
conductivity of the substrate influence the surface characteristics of the
substrate [60]. It is difficult to machine highly reflecting materials like
silver and gold. It has been found that thermal stresses get induced in
materials of low thermal conductivity which cause spalling and
cracking of the substrate.

4.2.2. Laser controlled thermo splitting


Laser controlled thermo splitting (LCT) is a new innovative tech-
nique for precise cutting of glass, quartz glass and brittle ceramics Fig. 13. Description of LCT process: 1. glass workpiece 2. laser beam 3.
focussing optical lens 4. air water mixture as coolant 5. nozzle 6. micro cracks
(Fig. 13). When the workpiece is heated by the laser beam, compressive
(Qcomp: compressive stress, Qten: tensile stress) [66].
stresses are generated in the surface layers. The coolant is applied

Fig. 12. SEM images of cut surfaces of (a) 4 mm (b) 6 mm and (c) 10 mm ceramics using laser cutting [85].

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

immediately following the laser beam owing to which tensile stresses of cut heat affected zone (HAZ). In this paper, a detailed study on HAZ
are generated. When generated tensile stresses exceed the ultimate was explored. The influence of laser power, gas pressure, cutting speed
strength of the material, it results in micro cracks formation. This and pulse duration on HAZ and cut quality were highlighted.
process is also known as laser scribing. Kondratenko et al. [66] dis- Black and Chua [75] examined the influence of various assist gases
cussed the various forms of LCT. It was observed that no micro defects (compressed air, nitrogen, oxygen and argon) on surface roughness of
occurred along the cut line and edge of the workpiece during LCT of alumina ceramics. There was no significant variation in surface
glass. Also, the mechanical strength of the cut edges increases due to roughness due to various assist gases. To enhance the cutting quality,
thermal hardening by the sudden application of coolant. Yamamoto multi pass and underwater cutting in various modes (straight line, an-
et al. [67] conducted LCT technique on soda lime glass ceramics and gular, curvilinear and square) were also conducted. It was observed that
investigated the influence of glass thickness on crack depth and scribe both under water and multi pass cutting reduced temperature gradient
conditions. but re-solidification of molten material increased in under water cut-
Saman et al. [68] used thermal stress cleaving technique to cut si- ting.
licon wafers. In this process, the laser beam is irradiated over a small A major obstacle that affects the cutting quality is the induced
area creating compressive stress. The surrounding tensile stress pro- thermal stress. This stress results in crack propagation. Different tech-
pagates towards the laser spot and introduces a crack/micro groove. niques such as multi pass cutting, underwater cutting, water jet assisted
This crack propagates along laser beam path and wafer gets separated cutting, dual beam arrangement and substrate preheating have been
without using coolant. This method eliminates chips formation and performed to minimise the crack damage [76–80]. The elimination of
produces good surface finish compared to mechanical mounting. premature fractures while cutting thick ceramics is also a challenge. It
Santiago et al. [69] performed simultaneous pre-scoring approach can be controlled by lowering the heat build-up and thermal stress on
to cut 2.54 mm thick alumina ceramics using pulsed CO2 laser. A cus- the substrate. So multiple pass cutting or interrupted cutting is prac-
tomised beam delivery system (dual beam output with a single source) ticed to lower the thermal input and high temperature build up. But it
was used to cut groove on the surface and dictate the crack path ahead reduces the process speed. So, few innovative methods such as pre-
of cutting. A low power laser beam was used for scoring and dictating scoring [69] and multi beam cutting [81] are explored which cut thick
the beam path while a high power beam was used for cutting. The in- ceramics at a faster rate with minimal damage. These methods help in
fluence of spacing between two beams on cut quality and premature controlling the step temperature gradients and cooling rates and hence
fracture was also highlighted. This method was found feasible for cut- eliminate crack formation. Yilbas et al. [82] performed circular cuts on
ting thick ceramics with faster cutting rates and reduced cracks. 3 mm thick alumina tiles using N2 as assisting gas. The temperature and
stress fields were analysed using ABAQUS, and residual stress was
4.2.3. Research progress calculated using XRD technique. Striation marks and dross attachment
Chen et al. [65] discussed high quality fiber laser cutting of 1 mm at kerf exit were observed due to drag force generated by assist gas. A
Al2O3 electronic ceramic. A comparative study was made using assist temperature variation (decay) was observed in the neighbourhood of
gas as nitrogen and oxygen at a pressure of 6 bar. It was found that N2 the cut region due to the low thermal conductivity of alumina. Yilbas,
resulted in black cutting surface while O2 did not show any such affect. Akhtar and Karatas [83] also examined the temperature and stress field
A set of experiments were performed by Yan et al. [63] to achieve distribution in CO2 laser cut 5 mm thick alumina. Yan et al. [61] de-
striation free cutting using nanosecond pulsed Nd:YAG laser. They signed a finite element model to simulate thermal stress distribution
suggested that if the cutting was vaporization driven continuous cutting and temperature field and predicted the crack formation characteristics.
(low pulse frequency), then the melt oscillation could be controlled The mechanism of controlled fracture and surface breaking of alu-
with no striation formation. Table 2 shows the effect of assist gas on mina during laser cutting was highlighted by Tsai and Chen [84]. The
striation characteristics during Nd: YAG laser cutting of alumina plate. fracture mechanisms were analysed using fractographic observations
Wee et al. [64] discussed a detailed statistical analysis of the striation and stress analysis. It was observed that the breaking surface showed
formation in ceramics during laser cutting. four distinct regions characterized by evaporation region, columnar
Wang et al. [70] reported on femtosecond laser cutting of thin grain region, intergranular fracture region and trans granular fracture
alumina plates of thickness 250 μm and 381 μm. Their paper high- region respectively from top to bottom. The evaporation region was
lighted the influence of focus position and transverse speed on the cut formed due to heat concentration with minute cracks. Major cracks
quality of alumina. It was observed that minimum kerf width and taper were formed in columnar grain region due to solidification of melted
angle were attained when the focus point was placed below the sub- material. Due to a decrease in temperature, tensile stress was induced
strate surface. A comparative study of alumina and water soluble PVA which extended the crack to the intergranular region and caused in-
coated alumina was presented in which surface cleanness, debris ac- stability which resulted in the formation of trans granular fracture re-
cumulation, and cracks formation were studied (shown in Fig. 14). gion. Ji et al. [85] also discussed single pass crack free cutting of 10 mm
Radtke et al. [71] examined the influence of assist gas (He) and the thick alumina with pulsed CO2 laser. It was concluded that with high
wavelength of the laser on kerf depth. It was concluded that with an peak power at a low duty cycle, full through piercing with minimal heat
increased number of passes, geometries of higher aspect ratio could be flux could be attained effectively in thick ceramics. Lu, Siores and Wang
easily cut. [86] derived an empirical relation for crack formation in ceramics as-
Yilbas et al. [72] investigated the environmental effects of waste suming that the cracks initiated when the tensile strain attained the
material generated during laser cutting. The study was focussed on critical (fracture) strain of the material. J. Pascual-Cosp et al. [80] gave
Ti6Al4V alloy, alumina, steel 304 and Inconel 625. The experiments a detailed study on the catastrophic breakdown in highly vitrified
were conducted with pulsed CO2 laser and nitrogen as assisting gas. ceramics. The study revealed that thermal shocks were produced due to
Based on life cycle assessment it was examined that Inconel 625 was the the incoming cold gas jet during the cutting process that led to crack
major cause of environmental degradation. formation but crack propagation was limited due to visco-plastic flu-
A set of experiments was performed by Chen et al. [73] to highlight ency of material during cooling, thus preventing catastrophic break-
the effect of assisting gas pressure and cutting speed on grain size and down.
thickness of the recast layer. The microstructure of the recast layers at A detailed comparative study on the influence of injection system on
different regions along the kerf is shown in Fig. 15. A FEM model was the cutting of advanced ceramics by Nd-YAG laser was carried out by
derived for analyzing the solidification mechanism and microstructure Quintero et al. [87]. The aerodynamic interaction influence of flowing
along the kerf. A pulsed Nd:YAG laser cutting on 4 mm thick mullite jet on the ceramic cut surface and HAZ characteristics were studied.
alumina was carried out by Quintero et al. [74] for quantitative analysis The investigation revealed that HAZ zone could be significantly avoided

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Table 2
Surface profile of laser cut alumina at 415 W power, 186 mm/min scanning speed, 15 kHz pulse rate and 0.5 mm nozzle stand of distance at 1 bar assist gas pressure
[63].
SEM images of surface profile Close up view of surface profile Assist gas

Nitrogen

Helium

Argon

Oxygen

Compressed air

by proper selection of input parameters and suitable design of injection made to improve the laser cut quality by using off-axial supersonic
system. The effective flushing of molten metal could be carried out by axisymmetric rectangular nozzle instead of converging-coaxial nozzle
designing an alternative gas injection system. An investigation was for injecting the assist gas [88]. It resulted in reduction of roughness

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Fig. 14. Debris accumulation on the laser cut ceramic (a) without PVA coating and (b) with PVA coating [70].

Fig. 15. SEM images of the microstructure of recast layer at (a) upper region (b) middle region and (c) lower region [73].

and dross free cut due to efficient removal of molten materials. Quin- and 1.1, the material removal rate is improved significantly [93]. The taper
tero et al. [89] also designed three types of gas ejection systems and angle is also influenced by the hardness of the abrasives [93]. Silicon car-
analysed the mechanism of material removal in ceramics by pulsed bide is the hardest abrasive which retains its cutting ability as it flows down.
laser fusion cutting. Research studies have shown that laser inclination So, a relatively lower taper angle is formed, and maximum depth of cut is
angle has a detrimental effect on the cut quality. Mullick [90] reported generated.
that inclined beam influenced the absorption capability of the material, While machining in AWJM, it is observed that the kerf width and taper
striation depth, power distribution and shear stress distribution. angle are interrelated. The width of cut at the top surface is always greater
than that at the lower surface and hence taper cut is achieved. It was re-
4.3. Abrasive water jet machining (AWJM) ported by Wang [94] and Rahman [95] that as the abrasives flowed down
the jet, their kinetic energy decreased and relative strength zone of jet got
Abrasive water jet machining is a non-conventional machining narrowed down. With increment in stand-off distance, the width of cut and
technique widely used in construction, automotive industries, aero- taper angle increases due to the divergence of the jet stream. Also, with the
space, and environmental technology. It is a non-contact process used increase in work feed rate, the average width of cut reduces as the jet re-
for cutting hard as well as soft, brittle and fibrous materials such as mains in contact with the material for a shorter period, but taper of cut
metals, super alloys, ceramics, composite, glass, rocks, plastics etc. This increases as cutting is less effective at the jet exit. Similarly, with an increase
recent cutting technique has some inherent advantages over another in abrasive jet velocity, the kinetic energy of the jet increases which leads to
cutting process like negligible heat affected zone, high machining ver- better penetration capability, reduction of angle taper and surface roughness
satility with multidirectional cutting ability and high flexibility to when transverse speed of the jet medium is medium [96]. The major
machine any material of any thickness. Most importantly, it is an en- drawback of AWJM is that it generates enormous noise and provides a
vironment-friendly process [91,92]. messy working environment.

4.3.1. Principle and working 4.3.2. Research progress


A water jet composed of abrasive particles is passed through a small The striated marks on the machined surface affect the surface finish of
diameter orifice nozzle. The momentum transfer between water and the material. The striations are generally present in the lower region of the
abrasives generates a highly focussed and pressurized high velocity jet cut surface, and the upper is free from striations. Chen et al. [97] gave a
stream which is applied to the substrate and cuts and removes the detailed investigation on the cut quality of alumina ceramics. It was ob-
material by erosion [92] (Fig. 16). The cutting edge obtained does not served that the top cut surface was smooth with no striations or pits. The
require any further machining to improve the surface finish. middle region showed striations marks without pits, and the lower region
The abrasives used in AWJM are mostly garnet, aluminium oxide, si- was full of pits. Various researchers have presented different reasons and
licon carbide, silica sand, zirconium, glass bead etc. The penetration depth mechanisms for striation formation. Chen and Siores [98] emphasized that
of the jet is dependent on the hardness of the substrate and abrasives. the kinetic energy distribution of the abrasives particles played a major role
Results have shown that, when the hardness ratio is maintained between 1.0 in striation formation along with other process parameters and induced

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Fig. 16. Schematic diagram of AWJM setup [101].

turbulent intensity and pressure decreased.


The capability of AWJM is not limited to ceramics only. Vigano
et al. [106] performed precision cutting of 35 mm thick Yttria stabilized
zirconia alumina ceramic sponge with 5 axis AWJ cutting machine. The
cutting performance of filled ceramic sponge and ceramic sponge were
investigated. It was concluded that temporary filling procedure in
ceramic sponges helped in maintaining jet coherence and obtaining
near net shape cutting. Feed rate of 150 mm/min and pressure of
380 MPa were found to be suitable for preserving the integrity of these
fragile structures.
A parametric study on various process parameters for cutting 10 mm
thick dense silicon nitride Si3N4 was made by Ghosh et al. [107]. The
multi-response optimization was done by Grey- Taguchi method. The
results revealed that for achieving combined quality characteristics of
surface roughness, MRR and kerf width, the contributions of water jet
Fig. 17. Various types of taper cut in AWJM [104]. pressure, transverse speed, abrasive flow rate and stand-off distance
were 76.18%, 11.42%, 10.81% and 1.53% respectively.
vibration while machining. Chen, Siores and Wong [99] conducted a set of With enormous efforts, various predictive models have been pre-
cutting experiments to investigate the cut quality using multidirectional sented for predicting AWJM characteristics and enhancing the ma-
abrasive water jet. The jet impact angle (angle between the plane of chining performance. Wang and Liu [108] developed predictive models
workpiece and jet) was varied to study the formation and pattern of stria- for depth of cut and degree of taper for profile cutting and straight slit
tion mark and also the maximum penetration depth. The influence of os- cutting by AWJM. The effectiveness of these models was evaluated by
cillation angle and oscillation frequency on the upper smooth zone of kerf cutting an 87% alumina substrate. Rahman [95] derived an erosion
was also analysed. based cutting model which established a relationship between max-
Hocheng and Chang [100] performed AWJ cutting on 0.65 mm and imum cutting depth and fracture toughness and other material prop-
1.35 mm Al2O3 plate and 5 mm and 10 mm Si3N4 ceramic to analyze the erty. This erosion based model was used to investigate the effect of
kerf formation. Rouniyar et al. [101] and Upadhyai et al. [102] high- process variables on the depth of cut. Wang [94] designed a predictive
lighted the effect of hydraulic pressure, stand-off distance and traverse model based on dimensional analysis technique for predicting the depth
speed on surface roughness and kerf properties of 16 mm thick PZT of cut during AWJ contouring of alumina. The model was validated by
ceramics during AWJM. A regression model was designed to predict the conducting a set of cuttings on 25.4 mm thick 87% pure alumina
roughness of the cut geometry. Ghosh et al. [103] also analysed the ceramic with various process variables. Zeng and Kim [109] studied the
variation in kerf width and surface roughness of 10 mm thick Al2O3 erosion mechanism in polycrystalline ceramics. An erosion model was
ceramic which was cut using silicon carbide grits. It was reported that derived to analyze the network cracking and plastic flow during AWJ
better surface roughness was obtained at hydraulic pressure of 400 cutting. It was concluded that erosion rate depended on the size of
Mpa, abrasive flow rate of 15 g/min, feed rate of 4 mm/min and stand grains and the fracture energy of the material. Hlavac et al. [110] de-
off distance of 4 mm. Minimum kerf width was achieved at 400 MPa signed a theoretical model for reducing the shape distortion during
hydraulic pressure, 25 g/min abrasive flow rate, 6 mm/min feed rate, curved trajectory cutting. They reported that by proving appropriate
and 6 mm standoff distance. tilting angle to the jet, the shape deformation could be eliminated. A
Krajcarz et al. [104] reported a detailed observation of the influence mathematical model for depth of cut was designed for amorphous
of transverse speed on kerf width and taper angle while cutting of 9 mm ceramics by Aich et al. [111]. The optimization of process parameters
thick ceramic plates. The different types of kerf taper formation have was carried out by particle swarm optimization (PSO). The erosion
been shown in Fig. 17. behaviour in amorphous ceramics was also investigated. As reported by
A detailed investigation was carried out by Gupta and Sakharwade them, the material removal in the top surface and bottom surface were
[105] on the effects of nozzle jet diameter ratio on AWJM performance. dominated by brittle fracture and plastic deformation respectively
It was reported that with an increase in nozzle jet diameter ratio, the (shown in Fig. 18).
cutting velocity gradually increased but skin friction coefficient, Table 3 presents a summarised information of the results of the non-

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Fig. 18. SEM images of (a) top surface (fragmentation of surface) and (b) bottom surface (gradual plastic deformation) [111].

conventional ceramic cutting methods. (offset distance) and inclination with the laser head (impact angle). The
process parameters that govern the hybrid laser water jet machining are
4.4. Comparative study on different non-conventional methods laser power, pulse duration, and frequency, traverse speed, water jet
pressure, water jet stand-off and offset distance and impact angle of
It is quite evident that the best suitable method for cutting brittle waterjet nozzle.
ceramics depends on various parameters as discussed in Table 4. The interference of water jet with laser beam affects the machining
From Table 4, it is observed that abrasive water jet machining is performance. If there is large offset distance between laser target point
comparatively a better solution for machining/cutting ceramics. The and water jet channel such that the point is outside the channel
AWJM process has no restriction for cutting very thick electrically non- (Fig. 21a), then laser beam passes through a thin layer of water before
conductive ceramics (limitation of WEDM) and reflective ceramic ma- reaching the workpiece. In this case, there will be less heat dissipation.
terials (limitation of LBM). A major advantage of using AWJM is that a But if the laser's target point overlaps with the water jet channel
machined surface with minimal burrs and without any melted edges (Fig. 21b), then a thick layer of water will act as a disturbance for the
and HAZ can be obtained. Moreover, no hazardous gases and UV ra- laser beam to strike and heat the substrate. So, in hybrid laser water jet
diation are released which makes it an eco-friendly cutting process. machining, the formed water layer affects laser beam quality and dis-
sipates laser heat energy through water. As a result, more heat energy
5. Hybrid machining will have to be supplied by the laser beam so that the required amount
reaches the substrate for heating and softening. An optimum offset
The non-conventional cutting processes discussed above have some distance is to be maintained to minimise the disturbance and loss and
limitations which reduce their cutting efficiency and accuracy, preci- for easy cutting of material at low pressure [116].
sion and quality of the cut geometry. To enhance their performance,
few innovative machining techniques have been developed. Hybrid 5.1.2. Research progress
machining processes involve controlled and simultaneous interactions Feng et al. [117] investigated the surface quality of micro grooved
of two or more machining mechanism and/or tools/energy sources single crystal SiC with conventional laser machining and different water
which affect the performance characteristics [115]. These combine the assisted laser machining. It was observed that better cutting quality
advantages of two different processes and develop a new process which (straight and clean edges) was achieved with hybrid laser water jet
is more efficient and effective than any of the single process. machining. Underwater cutting produced discontinuous grooves and
low pressure water jet machining was unable to produce any groove.
5.1. Hybrid laser assisted water jet machining Molian et al. [119] presented a comparative study on surface quality of
aluminium nitride plate, cut by conventional CO2 laser and hybrid laser
Laser cutting of ceramics always results in thermal stresses or assisted water jet cutting. It was observed that a narrow kerf width with
thermal shocks which cause micro cracks in the brittle ceramics. To no HAZ and slag inclusion was obtained in hybrid cutting. Feng et al.
reduce these thermal damages, hybrid laser assisted water jet cutting is [120] used a nano second pulsed fiber laser and a water jet nozzle to
developed. generate micro grooves on the sample. As reported by them, with in-
creasing laser power, MRR was increased but with increasing stand-off
5.1.1. Principle and working distance and jet pressure, MRR was reduced. Also, narrow heat affected
In hybrid laser water jet cutting (shown in Fig. 19), the laser beam is zone and recast layer were formed.
only used for softening and heating the substrate, and the material is Yang et al. [121] used a different arrangement for machining thin
removed by the impact of the pressurized water jet. The water jet is materials by coupling pulsed laser beam with low pressure water jet,
flown off axially on the softened material. Hybrid laser water jet ma- termed as water guided laser machining. In this cutting technique, the
chining is able to minimise the induced thermal stress because of two water jet is coaxially passed with the laser beam from the same nozzle.
reasons. Firstly, the material is not removed by vaporization or melting The water jet acts as optical fibre where the total internal reflection of
phenomenon, so lesser amount of laser input energy is required. Sec- laser beam takes place. The cutting action is carried out by the laser.
ondly, the workpiece is cooled by the water jet, so, the thermal effect on Feng et al. [118] designed analytical models of temperature field dis-
the workpiece is reduced. The water jet nozzle has to move simulta- tribution for determining the characteristics of micro grooved SiC and
neously with the laser beam head during traverse motion. In general, deeper understanding of the material removal mechanism in hybrid
water jet nozzle can have three motions explained in Fig. 20; along its laser water jet machining. Bao et al. [116] investigated on smooth
own axis (stand-off distance), along the horizontal traverse direction particle hydrodynamic (SPH) technique for understanding the influence

101
Table 3
Summarized information of results of non- conventional ceramic cutting.
Cutting process Material Experiments Process parameters Results References
(Thickness)

WEDM B4C Effect on machining speed and Pulse on time = 30 μs, pulse off time = 52 μs, Current = 200 A, Optimal machining rate and surface roughness were Pramanick et al.
R. Rakshit and A.K. Das

(5 mm) surface roughness Water pressure = 8 kg/cm2 0.594 mm/min and 2.09 μm respectively. [43]
(optimal)
Assisting electrode WEDM Sialon (2 mm) Mechanics of machining insulating Brass wire dia. = 0.2 mm, Groove width of 0.27–0.29 mm and average machining Mohri et al. [37]
ceramics Kerosene oil, wire feed rate = 120 mm/s, tension force = 150 gf rate of 0.33 mm/min was achieved due to formation of
(optimal) conductive layer.
Foil EDM SiC (10 mm) Effect on machining rate and kerf Copper foil thickness = 0.05 mm, open voltage = 120 V, Minimum kerf width of 0.1 mm was achieved at inlet Zhao et al. [41]
width discharge duration = 1 μs, duty factor = 6.255, Discharge Negative polarity is favourable for high machining
current = 8 A (optimal) rate.
WEDM ZrB2, ZrB2-Cu Effect on MRR Current = 0.5–1.25 A, pulse duration = 1–3.5 μs, In ZrB2, MRR increased at high energy input. Cheng et al. [44]
frequency = 6-15 KHz ZrB2-Cu had low MRR and wear due to formation of
copper oxide layer. So, can be used as machining tool.
WEDM Al2O3/TiC Effect on mechanical properties Discharge voltage = 55 V, Current = 5,10,14 A Flexural strength, Weibull modulus and hardness of Jianxin et al.
WEDM were lower compared to diamond blade [51]
cutting.
Pulsed CO2 laser Al2O3 (10 mm) Analysis of crack free CPL laser Peak power = 3500 W, piercing time = 0.1–0.5 s, piercing High peak power and low duty cycle and appropriate Ji et al. [85]
cutting pitch = 0.03–0.05 mm, duty cycle < 30% piercing time slot produces crack free cuts
Diamond scribing and CO2 laser Glass (0.63 mm) Analysis of breaking surface Laser power = 70 W, cutting speed = 35 mm/s, scribing High scribing load, high cutting velocity. Tsai and Huang
breaking load = 900 g, laser spot dia. = 8.5 mm Laser breaking gave better cut quality than mechanical [15]
(optimal) breaking.
Nano second pulsed Nd:YAG Alumina (1 mm) Striation free cutting Power 360 = 420 W, pulse repetition rate = 12–15 kHz, cutting Striation free cutting by evaporation governed cut Yan et al. [63]
laser speed of 120–270 mm/min, with 1–1.5 bar nitrogen assist gas. process.
Nitrogen provided stable and striation free cut
Fiber laser Alumina Influence on flexural strength Power = 500 W Maximum strength at focus position below substrate Adelmann et al.

102
(0.63 mm) Cutting speed = 50–300 mm/s [112]
Pulse time = 1 ms
Gas pressure = 6–12 bar
Pulsed Nd:YAG laser Si3N4 (2.15 mm) Effect on surface roughness Lamp current = 25 A, cutting speed = 20 mm/s Initially decreased and then increased with increasing Kaur et al. [113]
Pulse frequency = 7 KHz lamp current, pulse frequency and cutting speed.
(optimal) Minimum surface roughness = 3 μm
CO2 laser Alumina Influence on recast layer Power = 200 W Thickness increases from upper to middle region and Chen et al. [73]
(1 mm) Cutting speed = 500–1500 mm/min then decreases to lower region as high cooling rate in
N2 gas pressure = 1–8 bar middle region
Laser scribing using nano second Al2O3 (0.6 mm) and Effect of pulse duration Pulse on time = 30 fs and 60 ns, Femtosecond scribing efficiently removed the material Iwai et al. [114]
and femtosecond laser Si wafer (0.75 mm) Wavelength = 800 nm, 1047 nm, as no bump was observed. Improved cut at pulse
Power = 0.7 W, 24 W duration = 30-600 fs
for femtosecond and nanosecond laser respectively.
Pulsed Nd:YAG laser Mullite (4 mm) Characteristics of HAZ Laser Power = 270–430 W, pulse frequency = 10–200 Hz, Minimum HAZ area (0.2–0.3 mm2) achieved at pulse Quintero et al.
cutting speed = 2.5, 5 mm/s, gas pressure = 3,5,8,12 bar frequency 20–50 Hz. [74]
Nd:YAG laser PSTZ (8.3 mm) Influence of heating temp. on pulse frequency = 180 Hz, pulse Heating the substrate reduces thermal gradient which Murray et al.
recast layer micro cracking length = 0.4 ms, cutting speed = 100 mm/min, and an O2 assist lowers the recast layer micro cracking. [76]
gas pressure = 2 bar (optimal)
Pulsed Nd:YAG laser Mullite (4 mm) Influence of gas injection system on Power = 430 W, cutting speed = 5 mm/s, pulse Off axis supersonic nozzle ejected the molten material Quintero et al.
cut quality frequency = 120 Hz, pulse duration = 1 ms, gas more effectively. [87]
pressure = 8 bar
AWJM Glass Influence of garnet, SiC and Al2O3 Jet pressure = 10-50 ksi, Smallest tapered cut and maximum width of cut was Khan and Haque
abrasives on width of cut and Standoff distance = 1–5 mm, achieved by SiC due to high hardness [93]
tapered cut Feed rate = 10–60 mm/min
AWJM Alumina (15 mm and Effect on surface roughness Jet pressure = 350 MPa, garnet abrasives, abrasives flow Surface roughness increases at the bottom of cut with Joshi et al. [96]
30 mm) rate = 320, 390 g/min, traverse speed = 37–390 mm/min increasing thickness
AWJM Alumina (12.7 mm Study on cut surface characteristics Jet pressure = 138–345 MPa, standoff distance = 2–6 mm, Upper zone- smooth surface, Chen et al. [97]
and 25.4 mm) abrasives flow rate = 575–910 g/min, traverse Middle zone- striations, lower zone- striations, pits and
speed = 20–50 mm/min ballooning effect.
AWJM Al2O3 (10 mm) Parametric analysis on kerf width Jet pressure = 4000 bar, standoff distance = 6 mm, abrasives Minimum kerf width of 1.33 mm was achieved Ghosh et al.
Precision Engineering 59 (2019) 90–109

flow rate = 25 g/min, traverse speed = 6 mm/min (optimal) [103]


R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Table 4
Comparison of different non-conventional ceramic cutting methods.
Parameters WEDM LBM AWJM

Cutting rate (mm/min) Slow Fast Fast


(0.5–10) (50-6000) (10-500)
Refs. [37,43,45] Refs. [63,73,74,113] Refs. [93,96,97]
Ceramic thickness (mm) Thin and thick Thin and medium Thick and thin
(0.5–30) (0.5–10) (0.5–30)
Refs. [32–52] Refs. [60–80] Refs. [92–105]
Electrically non -conductive Ceramic cutting Possible with special arrangement Always possible Always possible
Reflective ceramic cutting Possible Not possible or difficult Possible
Material hardening Yes Yes No
HAZ Yes (narrow) Yes (broad) No
Burr formation Minimal Yes Minimal
Noise Low Low High
Environment friendliness Low Low High
Operating costs Low Low High

Fig. 19. Setup of hybrid laser assisted water jet machining [119].

platinum as an auxiliary electrode are used for machining. KOH or


NaOH are used as the electrolyte. When the electrolyte is continuously
supplied coaxially with the wire electrolyte and high potential voltage
is applied between two electrodes, droplets are formed; inside which
oxygen and hydrogen bubbles are generated by the auxiliary electrode
and electrode wire respectively (Fig. 22). The accumulation of gas
bubbles results in the formation of stable insulated gas film which leads
to initiation of sparks and material gets removed.
In some cases, electrochemical assisted diamond wire cutting is also
used for cutting brittle ceramics. When DC voltage is supplied to the
wire (negative electrode) and the assisting electrode (positive elec-
trode), electrochemical reaction initiates and wire gets surrounded by a
hydrogen gas film. This film electrically insulates the wire from the
electrolyte. When the DC voltage overcomes the breakdown voltage,
electric sparks occur within the gas film surrounding the wire [122].
Fig. 20. Setting parameters in hybrid laser water jet machining [118].
This increases the temperature and lowers the strength of the workpiece
and the reciprocating wire cuts the ceramic. The schematic diagram has
of water on debris removal. been shown in Fig. 23. The gas film stability is disturbed by the for-
mation of bubbles during the electrochemical reaction which affects the
5.2. Electrochemical discharge assisted wire machining machining performance. Sometimes the presence of chips in the elec-
trolyte results in secondary discharges due to which the bubbles start
This method combines the mechanism of electrochemical discharge accumulating in-between the wire and workpiece. Generally, NaCl is
machining (ECDM) and wire sawing for cutting of brittle ceramics. A used as electrolyte owning to its good electrical conductivity and non-
high temperature is attained in ECDM which helps in spalling the corrosive nature.
ceramic with a reciprocating wire. The spraying velocity of the electrolyte plays a vital role in the
generation of electric discharges. When low velocity is maintained, it
5.2.1. Principle and working leads to the accumulation of bubbles surrounding the wire due to
Wire electrochemical discharge assisted machining has gained wide electrochemical reactions and electric discharges. If high velocity is
acceptance for cutting brittle non-conductive ceramics. A brass, copper maintained, the gas film is blown away by the electrolyte and wire
or tungsten as electrode wire and chemically reactive graphite or insulation is hampered. So only an ideal electrolyte spraying velocity

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R. Rakshit and A.K. Das Precision Engineering 59 (2019) 90–109

Fig. 21. Laser water jet interaction under different waterjet offset distances where hw implies water layer thickness and Oj implies impact angle. (a) no overlap and
(b) overlap of laser and water jet [116].

similar results for MRR and surface roughness while cutting insulating
ceramics. In this paper, the influence of concentration of electrolyte on
the threshold breakdown voltage was also discussed.
Peng and Liao [125] conducted experiments on borosilicate optical
glass and quartz bars of 10–30 mm diameter to investigate the perfor-
mance of electrochemical discharge assisted traveling wire cutting.
Copper and tempered stainless steel wires (0.25 mm diameter) of
WEDM and KOH and NaOH as electrolyte were used for comparative
study. It was noticed that the pulsed DC power supply produced stable
and higher energy sparks compared to constant DC power supply. It was
concluded that by rotating the bars the taper angle of cut could be re-
Fig. 22. Schematic diagram of H2 and O2 bubbles inside a KOH droplet during duced, and sliced surface quality could be improved.
WECDM [127]. The cutting accuracy is affected by wire vibration and improper
insulation by the gas film. So, abrasives of different concentration and
sizes are mixed to the electrolyte to improve the cut quality. Chemical
etching, electrical discharge, and abrasives cutting altogether enhance
the machining performance. Yang et al. [126] added silicon carbide
(SiC) abrasives to KOH electrolyte for improving over cut in 1.2 mm
thick glass plates. In pure electrolyte, cracks are produced on the ma-
chined surface whereas with the addition of abrasives, the micro cracks
are refined which reduces the surface roughness (Fig. 24).
Kuo et al. [127] performed slit cutting of quartz glass by supplying
the KOH electrolyte in droplets. A brass wire as cathode and graphite
auxiliary electrode as an anode was used and the electrolyte was ap-
plied in the titrated flow. The rapid electrolyte replenishment reduced
the bubble accumulation and ensured stable gas film insulation. The
laser cutting was also performed on the same workpiece which pro-
duced uneven machined surface with cracks (Fig. 25). So, good surface
quality and efficient machining were produced by the titrated electro-
Fig. 23. Schematic diagram of electrochemical assisted diamond wire cutting lytic flow.
[124].

can make the cutting possible and efficient. 6. Comparative study between hybrid machining and other
processes

5.2.2. Research progress It is possible to achieve near damage free micro grooving or cutting
It is difficult to generate electric discharges for thick ceramics as the of ceramics with hybrid laser wet jet machining. The material is re-
hydrogen gas film alone is incapable of providing an electrically in- moved at lower energy densities as compared to conventional laser
sulating environment around the wire. If the DC voltage is increased, cutting. A large heat affected zone is created in traditional laser cutting
then it results in wire breakage. So, in such situations, an oil film is (Fig. 26a) which can be easily minimised by using hybrid laser wet jet
coated on the diamond wire which along with gas film electrically in- cutting (Fig. 26b).
sulate the wire from the electrode [123]. For this experimental study, So, it is a novel technique to cut ceramics before reaching their
5 mm and 36 mm glass plate, 10 mm alumina sheet and stainless steel melting point and eliminating the formation of recast layer.
assisting electrode were used. NaCl solution with 20% mass con- The electrochemical assisted wire cutting facilitates spalling of
centration was sprayed into the cutting zone with a nozzle. As observed ceramics which improves the MRR compared to conventional wire
by them, MRR and surface roughness increased with increasing DC sawing. But at the same time, the spalling mechanism results in the
voltage, counterweight and wire speed. The oil film was found to be formation of craters (Fig. 27b) on the machined surface which lowers
effective for cutting thick ceramics. Wang et al. [124] also reported the surface roughness.

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Fig. 24. SEM images of machined surfaces for (a) pure electrolyte and (b) abrasives added electrolyte [126].

reduction in laser intensity under water (shown in Fig. 29).


Table 5 describes the material removal rate and attainable surface
finish of non-conventional and hybrid ceramic cutting processes.

7. Future scope

It is obvious that many researchers have developed novel techniques


to overcome the limitation barriers of non-traditional ceramic cutting
methods. But the optimization of these methods still remains a chal-
lenge as small change in individual parameter effects the machining
performance in a complex manner. In addition, due to the complicated
mechanism of material removal, stochastic and deterministic techni-
ques including mathematical models and algorithms are necessary for
optimizing the process. Moreover, future research work should be fo-
cussed upon multi objective optimization.
Fig. 25. SEM images of machined quartz glass during laser cutting and WECDM
with titrated electrolytic flow [127]. A major problem that occurs in wire EDM is the breakage and
bending of the electrode wire. A high heat flux per unit length of
electrode wire is generated at the discharge spot which leads to un-
Ito et al. [128] proposed selective laser assisted milling for precision stable machining conditions and results in wire breakage. So, an ad-
cutting of brittle glass. It was reported that the average roughness vanced study is recommended to enhance the machining efficiency
profile was reduced by 74% compared with the conventional cutting without wire breakage. The complete dross elimination during laser
method. The high quality machined surface in laser assisted milling is cutting of ceramics is still a challenge. Few techniques like water as-
shown in Fig. 28b. An investigation on the generated chips (Fig. 28c sisted laser cutting, off-axis assisting gas nozzle have already been
and d) revealed that the chips morphology changed from crack type to practiced to eliminate dross formation, but more intensive investigation
quasi continuous type (cylindrical with twisted marks) by the applica- is required. Future research should be concentrated on cutting of thick
tion of selective laser assisted milling. and reflective ceramics which acts an obstacle to such a versatile cut-
Wee et al. [129] conducted laser ablation on silicon wafer in air and ting method. Generally, erosion behaviour for crystalline ceramics
under water stream. As reported by them, water removes the debris and during AWJM has been studied in detail. The erosion mechanism in
spatter formation is reduced. But the flowing water stream cannot at- amorphous materials should be taken into consideration. Panoptic re-
tain a smoother ablated surface compared with air because of the search is required on process monitoring and control for wide

Fig. 26. Comparison of the surface topography of SiC crystal after (a) conventional laser cutting and (b) hybrid laser water jet cutting [118].

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Fig. 27. SEM images of the machined surface of alumina during (a) conventional diamond wire cutting and (b) electrochemical discharge assisted diamond wire
cutting [123].

Fig. 28. SEM images of machined surface formed by (a) conventional and (b) selective laser assisted machining. SEM images of chips generated by (c) conventional
and (d) selective laser assisted machining [128].

acceptance of these processes in machining industries. the substrate. These induce formation of micro cracks in the substrate.
Hybrid machining involves the use of different forms of energy In electrochemical assisted wire cutting, thick non-conductive and
which makes the material removal mechanisms quite complex. So, a brittle ceramics can be cut, but micro cracks and craters are formed on
detailed investigation is required to fully understand the simultaneous the machined surface which raise the surface roughness values as
and controlled interaction of various process mechanisms. Multi scale compared to conventional wire cutting. These impediments are re-
modelling for simulating and optimizing the hybrid machining pro- quired to be eliminated. As hybrid cutting processes are still at the
cesses is indispensable. In hybrid laser water jet machining, thermal research stage, so, industrial implementation of these processes can be
shocks are generated due to laser heating and water jet expelling from considered as future work.

106
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Fig. 29. Morphology of Si entrance hole (a) in air and (b) under flowing water stream [129].

Table 5 cutting hard and insulating ceramics. LBM has been successful in gen-
Material removal rate and attainable surface finish of non- conventional and erating crack free and striation free cutting under certain parameters.
hybrid ceramic cutting processes. LCT method can produce defect free cuts with enhanced mechanical
Non- conventional Material Material Surface References strength in glass and other ceramics. AWJM is considered as a better
and hybrid cutting (thickness in removal rate Finish (μm) method for cutting grooves and scribes in thick ceramics. This process is
process mm) (mm3/min) environment-friendly.
From the comparative study, it is evident that hybrid machining is
Wire electrical B4C (5) 0.45–0.6 3.83 [43]
discharge ZrB2 2.085 – [44] efficient in cutting ceramics with improved surface characteristics such
machining SiSiC (30) – 3.5 [45] as roughness, HAZ etc. As the material is removed in hybrid water jet
Sialon 4.2–6 – [52] machining in its solid state, at a temperature below its melting point, a
(2.62) very narrow heat affected zone (HAZ) is formed. It generates better
Laser beam machining Alumina (1) – 2.7–8.3 [63]
Si3N4 (2.15) – 3 [113]
crack free cut surfaces compared to dry laser cutting. Hybrid cutting
Alumina 0.1–0.4 – [132] methods are still at the research stage and further investigation is re-
(10) – 9–14 [75] quired for the better understanding of process mechanism and in-
Alumina dustrial implementation.
(9.2)
Abrasive water jet Alumina – 4.5 [97]
machining (12.7) – 0.03–0.25 [103] Acknowledgments
Alumina 30–120 – [130]
(10) 3–9 – [130] The author acknowledges the support offered by the professors of
Al2O3 (0.65) Indian Institute of Technology (Indian School of Mines), Dhanbad,
Si3N4 (1.35)
Hybrid laser water jet SiC wafers 0.402 – [120]
India.
machining (0.36) – 4.2 [131]
Alumina (1) References
Electrochemical Alumina (5) 7.3 0.62–0.85 [123]
discharge assisted Glass (10) 4.47 0.33 [123]
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