TM-3000 Um 96M11193 GB WW 1116-6

96M11193
High-speed 2D
Measurement Sensor
TM-3000 Series
User’s Manual
Read this manual before using the system in order to achieve
maximum performance.
Keep this manual in a safe place after reading it so that it can
be used at any time.
Introduction
This manual describes the operations and hardware functions of the TM-3000 Series.
Read this manual carefully to ensure the optimum performance and full functionality of the TM-3000 Series
before use.
Keep this manual in a safe place after reading it so that it can be used at any time.
Ensure that the end user of this product receives this manual.
Symbols
The following warning symbols are used to alert you to safety precautions and to prevent human injury and/or
damage to property when using this product.
DANGER
Failure to follow these instructions may lead to death or serious injury.
WARNING
Failure to follow these instructions may lead to injury.
CAUTION
Failure to follow these instructions may lead to damage to this or other units.
Note
Indicates things to take note of to ensure the maximum use of this device, as well as operations that may easily
be done improperly.
Reference
Provides advanced and useful information for operation.
Safety Precautions
Safety Precautions
General Cautions
• At startup and during operation, be sure to monitor the functions and performance of the TM-3000 Series.
• We recommend that you take substantial safety measures to avoid any damage in the event of a problem
occurring.
• Do not attempt to open or modify the TM-3000 Series or use it in any way other than as described in the
specifications. If the TM-3000 Series is modified or used other than as described, the warranty will be voided.
• When the TM-3000 Series is used in combination with other devices, functions and performance may be
degraded, depending on the operating conditions and surrounding environment.
• Do not use the TM-3000 Series for the purpose of protecting the human body.
• Do not allow the temperature to change sharply around the TM-3000 Series, including the accessories.
Otherwise, condensation may lead to malfunction.
WARNING
Follow the safety precautions below to ensure safe operation
• Apply the correct power voltage. Failure to do so may cause fire, electric shock, or malfunction.
• Do not attempt to open or modify the unit. Doing so may cause fire or electric shock.
Handling abnormalities
Turn the power off immediately in the following cases. Using the unit in an abnormal condition could cause fire
or malfunction.
Contact the nearest KEYENCE office for repair.
• If water or a foreign object enters the unit.
• If the unit is dropped or the case is damaged.
• If abnormal smoke or odor is present.
96M11193 1
Safety Precautions
CAUTION
Follow the safety precautions below to ensure safe operation
• Be sure to turn the power off when you plug/unplug the cable that leads to the unit and its accessories.
Failure to do so could result in damage.
• Do not turn off the power while writing to the memory during operations such as setting items. Part or all of the
set data may be lost. Refer to "Memory Structure" for details.
"Memory Structure" (page A-2)
• Do not block the vent holes on the unit. Increase of internal temperature could cause failure.
• 24 V DC (-) and analog voltage output 0V are all common via a choke coil. COM_IN1 and COM_IN2 are
common via a choke coil. Also, 24V DC (-), SG (GND) on RS-232C, and the USB connector metal shell are
each common with GND. Take care that a potential difference does not occur between the internal common
terminals due to a positive grounding environment or a potential difference between the equipment.
Otherwise, it may cause a malfunction in the TM-3000 Series or a malfunction in the connected computer or
other external device.
"Insulation status between I/O circuits" (page 8-10)
• We recommend backing up the settings on a memory card or TM-Navigator in case there are problems with
the device.
Installation environment
To use the TM-3000 Series correctly and safely, avoid installing it in the following locations. Doing so may cause
damage.
• Locations that are humid, dusty, or poorly ventilated
• Locations with a high temperature such as a place exposed to direct sunlight
• Locations where there are flammable or corrosive gases
• Locations where the unit may be directly subjected to vibration or impact
• Locations where water, oil, or chemicals may splash onto the unit
• Locations where static electricity is easily generated
Corrective action for noise

Do not install the TM-3000 Series near a power source or high-voltage cable, otherwise noise may cause the
TM-3000 Series to malfunction. Take corrective action for noise by using noise filters, laying cables separately,
and/or installing insulation on the controller and the head. Use a single core shielded cable for the analog
output.
Setting memory
This device comes equipped with FLASH memory for saving settings. This memory has an expected lifetime of
one hundred thousand writes. If the auto-zero or program No. switching functions are changed over the
communication link regularly, use the save off function and use the R1 command to measure and send results
without saving settings.
"Auto-zero Function" (page 3-12)
"Switching Program No." (page 3-14)
"Setting Save operations for Flash Memory (Save)" (page 6-5)
"Outputting Measurement Values and Changing Settings via Commands" (page 9-5)
2 - High-speed 2D Measurement Sensor Users' Manual -

Safety Precautions
For Optimal Performance of the TM-3000 Series
Influence of ambient temperature

A change in the ambient temperature may cause the measurement to fluctuate. Be sure to keep it stabilized.
When the ambient temperature changes by 10°C, it takes 60 minutes for the distribution of internal temperature
to equalize.
Warming up
Wait approximately 30 minutes after the power is turned on before using the TM-3000 Series. Otherwise, the
measured value may gradually fluctuate because the circuit is not immediately stable after the power is turned on.
Operating ambient light intensity level

Do not operate this device near lighting fixtures. If the unit must be used in such a location, install a light
shielding board or similar device so that the light will not affect the measurement.
Influence of dust or dirt

The measurement may fluctuate due to dirt, dust, or fluid such as water or oil in the following cases:
• Adhesion on the protective glass plate:
Blow the dirt off with clean air. If dirt persists, wipe the glass surface gently using a soft cloth moistened
with alcohol.
• Adhesion on the surface of the measuring target:
Blow the dirt off with clean air or wipe it off.
• Intrusion of floating or sprinkled dust or dirt into the light-axis range:
In this case, take corrective action with a protective cover or air purge.
Influence of vibration
When the measuring target is vibrating, the measured value may fluctuate.
In this case, increase the number of averages to achieve a more accurate value.
Measuring target
The measured value may fluctuate if the shapes or surfaces of the measuring targets vary.
In this case, use a known target and perform appropriate correction using the scaling function.
Handling
Do not wipe with a wet cloth, benzene, or thinner. Doing so could change the color or deform the shape of the
unit.
If the unit has a large amount of dirt on it, wipe it off with a cloth moistened with a mild detergent, then wipe with
a soft dry cloth.
Effect of atmospheric motions

Slow atmospheric motions may affect the measurement and result in fluctuation of the measured value.
In such a case, take the following countermeasures.
• Enclose the measurement area with an appropriate enclosure.
• Agitate the air between the measurement point and the workpiece more strongly with a fan.
- High-speed 2D Measurement Sensor Users' Manual - 3

Safety Precautions
Precautions on CE Marking
This device complies with the essential requirements of EMC Directives Users must fulfill the following
conditions when the TM-3000 Series is going to be used in EU countries.
The compliant EN standards are as follows:
EMI : EN61326-1, Class A
EMS : EN61326-1
• All cables including power and other IN/OUT cables connected to the controller terminals should be kept
under 30m.

Contents
Safety Precautions .................................................1 Chapter 3 Operations and Functions

General Cautions .............................................1 during Measurement
For Optimal Performance of the TM-3000
Series..........................................................3 Description of the Measurement Screen ........... 3-2
Precautions on CE Marking..............................4 Switching the Display of Measurement
Screen .................................................... 3-4
Selecting the Active OUT ............................. 3-5
Setting a Startup Screen .............................. 3-5
Chapter 1 Before Use Display Setting Menu ......................................... 3-6
Viewing the Display Setting Menu................ 3-6
System Configuration......................................... 1-2
Operations and Functions of the Display
Checking the Package Contents ....................... 1-3 Setting Menu........................................... 3-6
Controller (TM-3001) .................................... 1-3 Hold Function................................................... 3-10
Head (TM-006 / TM-040 / TM-065)............... 1-3 Hold Using the Console ............................. 3-10
Cable CB-A** ............................................... 1-3 Hold Using the External Input Terminal...... 3-10
List of Optional Products ................................... 1-4 Hold via the RS-232C Communication....... 3-10
Part Names and Functions ................................ 1-6 Trigger Function............................................... 3-11
Controller...................................................... 1-6 Trigger Input Using the Console ................ 3-11
Console ........................................................ 1-8 Trigger Input Using the External
Head........................................................... 1-10 Input Terminal....................................... 3-11
Installation and Wiring ..................................... 1-13 Trigger input via the RS-232C
Installing the Head ..................................... 1-13 Communication..................................... 3-11
Installing the Protective Cover ................... 1-15 Auto-zero Function........................................... 3-12
Installing the Controller .............................. 1-16 Auto-zero Using the Console ..................... 3-12
Wiring ......................................................... 1-18 Auto-zero Using the External Input
Connecting to the Terminal Block .............. 1-20 Terminal ................................................ 3-13
Checking the Image Display...................... 1-21 Auto-zero via the RS-232C
Communication..................................... 3-13
Auto-offset........................................................ 3-13
Chapter 2 Screen Overview and Basic Switching Program No. .................................... 3-14
Operations Switching Program No. Using the Console ... 3-14
Switching Program No. Using the External
Overview of the Screen and Console Input Terminal....................................... 3-15
Operations ...................................................... 2-2 Switching Program No. Using the RS-232C
Operational Flow from Setting to Measurement .... 2-4 Communication..................................... 3-15
Basic Operations for Settings ............................ 2-5 Keylock ............................................................ 3-16
Cursor (Selected status) .............................. 2-5 Setting the Keylock Using the Console ...... 3-16
Using the ENTER Key .................................. 2-6 Setting the Keylock via the RS-232C
Selecting an Item ......................................... 2-6 Communication..................................... 3-16
Selecting from a Pull-down Menu ................ 2-7 Storage Function.............................................. 3-17
Entering a Value ........................................... 2-7 Overview of Storage ................................... 3-17
Entering Characters ..................................... 2-8 Performing Data Storage............................ 3-17
Drawing an Area with the Cursor ................. 2-9 Performing Image Storage ......................... 3-19
Drawing an Area by Entering Values ......... 2-13 Image Capture Function .................................. 3-21
Restoring the default status ............................. 2-16

Chapter 4 Program Function Setting the Communication Specifications for
Ethernet ...................................................6-3
Program Function ............................................... 4-2 Setting Auto-send .........................................6-3
Setting the Strobe Time ................................6-4
Setting the Cable Expansion Mode ..............6-4
Changing Languages ...................................6-4
Chapter 5 Measurement Settings Adjusting Date and Time ..............................6-5
Details Setting the Program-switching Method ........6-5
Setting Save operations for Flash Memory
Head Settings..................................................... 5-2
(Save) ......................................................6-5
Displaying the Head Settings Screen........... 5-2
Trigger Setting .............................................. 5-2
Head A / Head B Settings............................. 5-6
Master Registration .......................................... 5-10 Chapter 7 Memory Card
Image Registration...................................... 5-10
Memory Card Usage ..........................................7-2
Head Alignment .......................................... 5-11
Displaying the Memory Card Screen ................7-2
Position Correction ........................................... 5-14
Inserting / Removing a Memory Card.................7-3
Operation Overview of Position Correction .... 5-14
Types of Position Correction....................... 5-15 Usable Memory Cards ..................................7-3
Pattern Correction....................................... 5-16 Inserting a Memory Card ..............................7-3
Edge Correction.......................................... 5-19 Removing a Memory Card............................7-3
Measurement Settings...................................... 5-37 Saving and Reading Operations ........................7-4
Overview of Measurement Settings ............ 5-37 Files...............................................................7-4
Basic Procedure for Measurement Saving to a Memory Card .............................7-4
Settings ................................................. 5-37 Reading from a Memory Card ......................7-6
Overview of Measurement types ................ 5-39 Deleting Files ................................................7-7
Elements ..................................................... 5-73 Formatting Memory Cards ............................7-8
OUT settings..................................................... 5-82 Advanced Usage of Saving and Reading..........7-9
OUT settings ............................................... 5-82 Switching to the Program in the Memory
Common settings ............................................ 5-92 Card for Measurement ............................7-9
Saving the Storage Data to the Memory
Common settings........................................ 5-92
Card ........................................................7-9
TIMING terminal.......................................... 5-93
ZERO terminal............................................. 5-94
Binary output............................................... 5-95
Analog output ............................................. 5-96 Chapter 8 I/O Terminals
Storage ....................................................... 5-98
Auto-send ................................................. 5-101 Identifying Names and Functions of the I/O
Data out timing.......................................... 5-102 Terminals.........................................................8-2
Input terminal block ......................................8-2
Output terminal block ...................................8-3
Expansion connector ....................................8-4
Chapter 6 Environment Settings
I/O Circuit and Electrical Specifications .............8-8
Setting Procedure for the Environment TM-3001 (NPN output type)..........................8-8
Settings ........................................................... 6-2 TM-3001P (PNP output type) ........................8-9
Environment Settings Items................................ 6-3 Insulation status between I/O circuits.........8-10
Setting the Communication Specifications for
RS-232C .................................................. 6-3

Chapter 9 RS-232C Communications Operation Overview When EXT
Trigger is Set ...................................... 10-12
RS-232C Communication Specifications and Operation Details When EXT
Terminal Assignment ...................................... 9-2 Trigger is Set ...................................... 10-13
Communication Specifications..................... 9-2 Input and Output Details................................ 10-16
Terminal Assignment of Connector.............. 9-2 Evaluation/Binary Output.......................... 10-16
Connections and settings for RS-232C Strobe output............................................ 10-17
Communication .............................................. 9-3 GO Output (Total Evaluation Output) ....... 10-18
LED Emission Control Input...................... 10-18
Connecting to a PC or PLC Link Unit ........... 9-3
Memory Card Control Input
Communication Specification Settings ........ 9-3
(S_SAVE Input) ................................... 10-19
Outputting Measurement Values ....................... 9-4
Measurement Response Time ....................... 10-20
Outputting Measurement Values via
Trigger Interval and Measurement Time ..... 10-20
Commands ............................................. 9-4
Response Time Delay due to Averaging..... 10-22
Outputting Measurement Values via
Power ON Reset Time .............................. 10-22
Auto-send ............................................... 9-4
RS-232C Interface.......................................... 10-23
Outputting Measurement Values and
Response Delay Time When Sending &
Changing Settings via Commands................. 9-5
Receiving Commands ........................ 10-23
Command Types and Reception ................. 9-5
Response Delay Time via Auto-send ....... 10-24
Overview of Command Formats................... 9-7
Mode Change Commands......................... 9-10
Overview of Measurement Control
Commands ........................................... 9-11 Chapter 11 Specifications
Measurement Control Command Details ... 9-12
Overview of Change Parameter Specifications................................................... 11-2
Commands ........................................... 9-18 Controller .................................................... 11-2
Details of Change Parameter Head........................................................... 11-3
Commands ........................................... 9-19 Head-to-Controller Cable ........................... 11-3
Overview of Read Parameter Transmitter-to-Receiver Cable ................... 11-3
Commands ........................................... 9-29 Characteristics ................................................. 11-4
Outputting Measurement Values via Measurement Area ..................................... 11-4
Auto-send ..................................................... 9-31 Temperature Characteristics (examples) .... 11-5
Setting Methods ......................................... 9-31 Dimensions ...................................................... 11-6
Output Method ........................................... 9-31 Default Values ................................................ 11-11
Output Data Format.................................... 9-32 Controller Status Table................................... 11-16
Reference ........................................................ 9-33
ASCII Code Table ...................................... 9-33
Appendix
Chapter 10 Timing Chart and Response Memory Structure............................................... A-2

Times Measurement Conditions and Measurement
Data Flow........................................................ A-3
When Setting is Continuous Trigger ................ 10-2 Error Messages.................................................. A-4
Operation Overview When "Cont trigger" is Troubleshooting ................................................. A-9
Selected................................................ 10-2
Index ................................................................ A-13
Operation Details When "Cont trigger" is
Selected.............................................. 10-10
When Setting is External Trigger.................... 10-12

MEMO

Chapter 1
Before Use
Before Use
This chapter explains the system configuration, settings and wiring
before actual use.
System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

Checking the Package Contents. . . . . . . . . . . . . . . . . . . . . .1-3
List of Optional Products . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Part Names and Functions . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Installation and Wiring. . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
- High-speed 2D Measurement Sensor Users' Manual - 1-1

System Configuration
System Configuration
1
Before Use
Following is the standard system example for the TM-3000 Series.
Indicator light, buzzer, etc. Photoelectric sensor, proximity sensor, etc.

(Commercial product) (Commercial product)
Produces an alarm sound depending Transmits a signal to the timing input when the
on the evaluation result output. sensor detects a target.
TM-3000 Series
Memory cards Setup support software*

CA-SD4G/CA-SD1G TM-H1 (TM-Navigator)
Controller
TM-3001 /
TM-3001P
Console
(accessory)
E
OL
NS
CO
0 OR
-300 MO
NIT
TM
R
WE
POON
I/O
RD
CA
Head-to-controller cable
SD
-B
AD
HE
OU
T
US
B
-A
(0.7m/2m/5m/10m/20m/30m)
AD
HE
2C
-23
RS
ET
RN
HE
ET
Head
(Max. 2 heads of the same
type connected)
24 VDC power supply TM-006/TM-040/TM-065
Monitor Transmitter-to-receiver
CA-MP81 cable
(1m/3m)
Recorder Programmable controller P.C. (Commercial product)

(Commercial product) (Commercial product) Enables control and importing of the
Records the measurement result. Enables timing control of measurement and measured value from the RS- 232C
switching of the program number as well as communication or parallel I/O
control output and measured value import. board.
* For the details of the setup support software (TM-Navigator), see the "TM-Navigator User's Manual" (The PDF file is
stored in the CD-ROM).
1-2 - High-speed 2D Measurement Sensor Users' Manual -

Checking the Package Contents

1
Before Use
The TM-3000 Series consists of the following models. Check if the parts and equipment listed below are included in the
package of the model you purchased before using the unit.
For information about the optional products, see "List of Optional Products" (page 1-4).
Controller (TM-3001)
Controller Console x 1 User's manual Screwdriver x1 Setup/support software

TM-3001 / (this manual) (separate package)
TM-3001P x1 • CD-ROM x1
x1
Setup guide x1
I/O
TM
-30
00
PO
WE CON
ON R SOL
E
MON
OUT ITOR
SD
CAR
D
HEA
D-B
USB
RS-2
32C
HEA
D-A
ETH
ERN
ET
Head (TM-006 / TM-040 / TM-065)
Hexagon socket bolt

TM-006 : M3 x 45 with washer x5
M4 x 20 x4
M4 x 20 x4
M5 x 20 x4
* The sensor head consists of the transmitter, receiver and TR base.

The shape of the sensor head varies depending on the model.
Cable CB-A**
Head-to-controller cable x 1
Model CB-A07 0.7m cable

CB-A2 2m cable
CB-A5 5m cable
CB-A10 10m cable
CB-A20 20m cable
CB-A30 30m cable
Note
When using the CB-A30, set the cable expansion mode in the environmental settings to ON.
"Setting the Cable Expansion Mode" (page 6-4)

List of Optional Products

1
Before Use
Name Model Figure Description

8.4-inch color LCD monitor CA-MP81 High-intensity, high resolution monitor. Used
to display and operate the TM-3000 Series.
* The monitor cable (OP-66842) is required
for connecting the controller.
Monitor cable OP-66842 Cable (3m) that connects the TM-3000

Series and CA-MP81.
CA-MP81 mount OP-42278 Mount used when the CA-MP81 is not panel
mounted.
Expansion connector cable OP-51657 Cable for the expansion connector (3m).
RS-232C cable OP-96368 Communication cable for RS-232C (2.5m).
Conversion adaptor for RS- OP-26401 Conversion adaptor for the D-sub 9-pin
232C connector.
01
64
-2
P
Use in combination with OP-96368.

O
Conversion adaptor for RS- OP-96369 Conversion adaptor for the D-sub 25-pin
232C connector.
Use in combination with OP-96368.
USB cable OP-66844 USB connection cable

(2m)

Before Use
Name Model Figure Description
Memory card CA-SD4G 4GB (SDHC)
CA-SD1G 1GB
Protective cover OP-87035 Protective cover for TM-040.

Tighten screws on the transmitter or the
receiver for use.
Cover x2
M3 x 12 Hexagon socket bolt x8
OP-87036 Protective cover for TM-065.

Tighten screws on the transmitter or the
receiver for use.
Cover x2
Transmitter-to-receiver cable OP-87033 Extension cable used between the

OP-87034 transmitter and receiver of the sensor head.
OP-87033 1m x1
OP-87034 3m x1
Console OP-82125 The same console as the supplied one.
Ethernet cable OP-66843 Cross cable (3m) for Ethernet communication

Part Names and Functions

1
Before Use
Controller
CONSOLE
I/O TM-3000
POWER
ON
10
2 5
SD CARD
11
OUT
6
3
USB
12
IN
RS-232C
7
4 ETHERNET
13
Name Description
1 POWER indicator Lights green while the TM-3000 Series operates.
2 Expansion connector Used for inputting and outputting control signals.
3 Output terminal block Used to output control signals.
4 Input terminal block Used for control signal input and power supply (24V DC).
SD memory cards (CA-SD4G / CA-SD1G) are inserted here. Used when collecting
5 Memory card slot
data, saving program files, etc.
Indicates the status of the memory card.
Lights green: The memory card has been inserted and access is possible.
6 Memory card indicator Blinks red and green: The memory card is being accessed.
Lights off: The card is not in the slot or after an ejecting operation.
(The memory card can be removed.)
Used to connect a USB cable to the computer when using the TM-Navigator setup/
7 USB port
support software. (Type B female connector)
Connects to the computer or PLC with an RS-232C cable. (Dedicated connector
8 RS-232C port
for RS-232C cable OP-96368)
Used to connect a LAN cable to the computer when using the TM-Navigator setup/
9 Ethernet port
support software. (RJ-45 connector)
Connects the supplied console.
10 Console port
Used to set measurement conditions or switching the program No.
Analog RGB monitor
11 The external monitor is connected here. (Analog RGB 15-pin connector)
output connector
12 Head B connector Connects the sensor head B.
13 Head A connector Connects the sensor head A.

Before Use
Note
24V DC (-) and analog voltage output 0 V are all common via a choke coil. COM_IN1 and COM_IN2 are common via a
choke coil. Also, 24V DC (-), SG (GND) on RS-232C, and the USB connector metal shell are each common with GND.
Take care that a potential difference does not occur between the internal common terminals due to a positive grounding
environment or a potential difference between the equipment. Otherwise, it may cause a malfunction in the TM-3000
Series or a malfunction in the connected computer or other external devices.

1
Before Use
Console
7 8
1 3
2
4 6
5
Name Status Function

1 [ZERO] key Measuring Press the [ZERO] key to use the auto-zero function. Press for three
seconds to cancel auto-zero.
This button has the same function as the ZERO input terminal.
Setting Press and hold while entering a numeric value to change the value
to default.
"Entering a Value" (page 2-7)
2 [ESCAPE] key Measuring This button has the same function as the RESET input terminal.
"Identifying Names and Functions of the I/O Terminals" (page
8-2)
Setting Press the [ESCAPE] key to return to the previous display or operation.
3 [TRG/HOLD] key Measuring Holds the measurement value when using the continuous trigger.
This button has the same function as the TIMING input terminal.
"Hold Function" (page 3-10)
Allows trigger input when using an external trigger. This button has
the same function as the TRG input terminal.
"Trigger Function" (page 3-11)
Setting Inputs a trigger via head settings or master registration while
making settings.
4 [SCREEN] key Measuring Swaps the display screen or measurement cursor.
"Switching the Display of Measurement Screen" (page 3-4)
"Measurement cursor" (page 3-8)
Saves the image of the measurement screen onto the memory
card. Used together with the [ENTER] key.
"Image Capture Function" (page 3-21)
Setting Press the [SCREEN] key to switch the selection status of the
cursor.
"Drawing an Area with the Cursor" (page 2-9)
5 [MENU] key The display setting menu appears.
"Display Setting Menu" (page 3-6)

Before Use
Name Status Function
6 [PROG No.] key The program No. selection screen appears.
7 [ENTER] key Fix the selected item by pressing the key straight down.
[U][V][Y][Z] key Select the items by tilting the key up, down, right, or left.
8 [PROG/RUN] switch Slide in the direction of the arrow to switch between measuring
and setting. Sliding the switch changes modes.
"Overview of the Screen and Console Operations" (page 2-2)
Reference
• Key numbers 1 to 6 are engraved on the console keys.
• This is displayed throughout this document as the [TRG] key or the [HOLD] key.
• Refer to the following page for more information on the state while measuring and setting.

1
Before Use
Head
TM-006 TM-040 / TM-065
3 3
2
2
10
1
10
1
9 9
8 8
6 7 6
7
5 5
4 4
Name Description
1 Receiver head (Model: TM-xxxR) Receives light from the transmitter.
2 Receiver cover glass -
3 Transmitter cover glass -
4 Head-to-controller cable Connected to the controller.
5 Receiver head cable Connected to the receiver head cable.
6 Mounting hole Used to mount the device in the final inspection location.
Indicates the position for the most accurate measurement with the
7 Focus mark
head installed as shipped.
8 Transmitter head cable Connected to the transmitter head cable.
9 TR base Fixes the transmitter and receiver distance during initial installation.
10 Transmitter head (Model: TM-xxxT) Emits light for measurement.

Before Use
Measurement coordinate and measurement area
The even and parallel light is emitted from the transmitter to the measurement target.
The receiver takes the image of the shadow generated by the measurement target and measures the dimension of the
set part.
Measurement coordinate
When the target is set between the transmitter and receiver as shown below, the image seen from the transmitter to the
receiver is displayed.
<Measurement setting example>
X
Receiver
Transmitter
<Measurement result>
Y axis (Positive direction)
X axis (Positive direction)

1
Before Use
Measurement area
The illustrations below show the measurement areas that satisfy the measurement accuracy for each head.
Measurement area
<TM-006> <TM-040>
90 90
81 30±5
(30)
65.5
40
Receiver Transmitter
±0.5μm ±2μm
φ4 φ6 φ26 φ40
±1.5μm
2 ±5μm
10
4
Unit: mm 20 Unit: mm
<TM-065>
160 110
82
±3μm
φ40 φ65
±6μm
20
30 Unit: mm

Installation and Wiring

1
Before Use
Installing the Head Installations for specific environments
The sensor head can be installed according to the type When the light source is present near the head
of measurement target and use environment.
The light reflected from the target may enter the receiver
This section explains the method to use the supplied TR
and cause a measurement error.
base.
In such cases, take the following countermeasures.
• Block the light so that the light from the interfering
Notes for installation source (fluorescent light or sunlight) does not hit the
target.
When installing the sensor heads, make sure the
• Make mask settings.
following conditions are met.
Parallel position
Light source
±1mm within Receiver Transmitter
Target
±1mm within
Shielding object
Tilt position
Within ±0.1°
Within ±0.1°
Within ±0.1°
Within ±0.1°

1
Before Use
Not using the TR base to install

Installation method
This section explains how to use the transmitter and receiver
Using the TR base to install after removing them from the TR base (ex. TM-040). The
same method can be used for TM-006 and TM-065.
The transmitter and receiver are fixed to the TR base at
1 Loosen
the time of shipment. This section explains how to install
to the device using the TR base (ex. TM-040). The same
the bolts from the bottom of TR
method can be used for TM-006 and TM-065. base and remove the base.
• To tighten screws from above

Use the hexagon socket bolt (included) to fix through the
installation holes of the top of TR base.
Tightening torque maximum value
TM-006: 1.5N•m
TM-040: 1.5N•m
TM-065: 3N•m
2 Install the sensor heads.

Use the installation holes on the sides as shown
below. Use the hexagon socket bolt (included).
TM-006: 0.6N•m
TM-040: 1.5N•m
• To tighten screws from below TM-065: 3N•m
Fix through the installation holes (TM-006: Penetrating
M4, TM-040: M4 depth 8, TM-065: M5 depth 10)of the
bottom of TR base.
TM-006: 1.5N•m
TM-040: 1.5N•m
TM-065: 3N•m
Reference
The installation holes (TM-006: M4 depth 5, TM-040/065:
M4 depth 6) of the bottom of the head can be used to
mount as shown below.
TM-006: 2.5N•m
TM-040: 2.5N•m
TM-065: 2.5N•m

Before Use
Installing the Protective Cover Installation method
1 Blow
Attaching the protective cover (optional) reduces the
adhesion of dirt on the transmitter/receiver. the dirt and dust off the glass part
This section explains how to attach the protective cover with clean air.
and handling precautions.

2 Be careful of the direction of the
protective cover and attach it to the
transmitter or receiver.
OP-87035 (for TM-040)
Protective cover unit x2
Counterbore
OP-87036 (for TM-065)

*1
Protective cover unit x2 Glass surface
• Insert screws from the sides with counterbores.

(Make sure that the glass side of the protective
cover faces closer to the head's cover glass.)
• The dent (*1) to determine the direction must be at
the upper left facing the head.
M3 x12 Hexagon socket bolt x8 3 Use four hexagon socket bolts

(included) to mount.
Tightening torque: 0.62N•m or less
Maintenance
If dirt or dust is present on the glass, blow it off with clean
air. If dirt persists, wipe the glass surface using a soft
cloth slightly moistened with ethanol.

1
Before Use
Installing the Controller

Mount the controller to the DIN rail or secure it on the bottom with screws.
Notes on the mounting direction

Install the controller in the orientation shown in the following figure with a circle. Do not install in any orientation other
than that shown.
I/O
TM
-30
00
POW
ONER CONS
OLE
MON
OUT ITOR
SD
CARD
HEAD
-B
USB
RS-23
2C
HEAD
ETHE -A
RNET
I/O
TM
-3
00
PO ON
0
W
ER
OUT
CO
SD
NS
CA
OL
RD
E
MO
NIT
OR
US
B
HE
RS
AD
-23
-B
2C
ET
HE
RN
ET
HE
AD
-A
HEAD-A
OUT
ETHERNET
HEAD-B
ETHERNET
RS-232C
RS-232C
MONITOR
I/O
USB
USB
CONSOLE
HEAD-A
SD CARD
SD CARD
POWER
ON
TM-3000
HEAD-B
POWER
ON
TM-3000
OUT
MONITOR
CONSOLE
I/O
For ventilation, secure free space of 50mm or more above the controller
and 30mm or more for both sides.
In addition, to ensure the safe connection of the cable, secure 90mm or
more of free space in front of the terminal panel of the controller. 50mm
CONSOLE
I/O TM-3000
POWER
ON
SD CARD
30mm OUT
30mm
USB
IN
RS-232C
ETHERNET
When two or more controllers are installed side by side, secure free space
of 30mm or more between controllers, and 50mm or more on top of both
controllers.
50mm 50mm
Note
• Do not cover the ventilating holes on the top and the bottom of the I/O TM-3000
POWER
ON
CONSOLE
I/O TM-3000
POWER
ON
CONSOLE
controller. The heat becomes trapped inside, causing a malfunction. SD CARD SD CARD
• When the temperature in the controller panel rises to over 50°C,

OUT OUT
30mm USB
30mm USB
30mm
decrease the ambient temperature below 50°C by introducing forced IN
RS-232C
IN
RS-232C
ETHERNET ETHERNET
cooling air or by creating more room around the system.

Before Use
Mounting on a DIN rail
E
SOL
CON
00
-30
TM ITOR
MON
R
WE
PO
ON
I/O
D
CAR
SD
D-B
HEA
I/O
T
OU
TM USB
-30
00
PO
WE CON D-A
ON R SOL HEA
E
232C
RS-
MON
OUT ITOR ET
ERN
SD ETH
CAR
D
HEA
D-B
USB
RS-2
32C
HEA
D-A
ETH
ERN
ET
Clip
Pull this clip before installing or removing the device.
Press the clip again to mount the device.
Mounting on the bottom of the controller
I/O
TM
-30
00
PO
WE CON
ON R SOL
E
MON
OUT ITOR
SD
CAR
D
HEA
D-B
USB
RS-2
32C
HEA
D-A
ETH
ERN
ET
M4 screw x4 (screw depth 6mm)
For information about mounting dimensions, see "Dimensions" (page 11-6).

(Tightening torque: 1.5N•m or less)

1
Before Use
Wiring
Console
Controller
(0.7m/2m/5m/10m/20m/30m)
E
OL
NS
CO
0 R
TO
-300 MO
NI
TM
WER
POON
I/O
RD
CA
SD
-B
AD
HE
T
OU
B
US
-A
AD
HE
2C
-23
RS
ET
RN
HE
ET
Head B
24 VDC power supply

Head A
Monitor
Note
• Be sure to turn off the power to the controller before connecting/disconnecting cables. Failure to do so may cause
malfunction.
• Ensure that the orientation of the connector is correct. Otherwise a pin could break, which may lead to system
breakdown.
• When using the CB-A30 (30m cable), set the cable expansion mode (page 6-4) in the environmental settings to ON.
• Be sure to connect the frame ground pin on the 24V DC power supply to the Class D earth.
• When mounting two heads, make sure that head A and head B are of the same type. Measurement is not possible if
two different types of heads are connected.

Before Use
1 Connect the head-to-controller cable to
the controller head connector.
3 Connect the head to the head-to-
controller cable.
If connecting only a single head, attach it to the Align the connector and insert, then turn the fixing
head A connector. ring to fix.
Check that a clicking sound is heard, indicating that
the cables are securely fixed.
When removing the cables, pull them out while
Notch
pressing the buttons on both sides of the connector.
Fixing ring
E
OL
NS
CO
0 OR
-300 NIT
Note
MO
TM
R
WE
POON
I/O
Check the connector orientation before connecting.

RD
CA
SD
-B
AD
HE
OU
T
US
B
AD
-A
Otherwise the pin could break, which may lead to
HE
system breakdown.
2C
-23
RS
ET
RN
HE
ET
4 Connect the console to the console

connector of the controller.
2 Connect the cable connector between
the transmitter and receiver.
Align the connector and insert, then turn the fixing
ring to fix. E
OL
NS
CO
(They are connected at the time of shipment.) -300

0
MO
NIT
OR
TM
R
WE
POON
I/O
RD
CA
SD
-B
AD
HE
T
OU
US
B
2C
HE
AD
-A
To the console connector
-23
RS
Fixing ring

1
Before Use
5 Connect the monitor to the analog RGB

monitor output connector of the
Connecting to the Terminal Block
• Tighten the screws on the terminal block with the
controller. flathead screwdriver included in the package.
• Use an AWG16 through AWG28 power cable.
To the analog RGB

1 Remove the terminal block from the
controller unit.
E
OL
monitor output
NS
CO
I/O
TM
-300
WE
POON
R
0
MO
NIT
OR
connector
RD
CA
SD
-B
AD
HE
T
OU
B
US
-A
AD
HE
2C
-23
RS
ET
RN
HE
ET
(1)
(7)
(8)
Terminal block
2 Use the included flathead screwdriver

to loosen the screws on the terminal
Note block.
When using RGB analog monitors designed for
markets that do not use SVGA size (800 x 600
pixels), the image may be degraded, or displayed Flathead
improperly depending on the specifications of the screwdriver
monitor (Recommended monitor: CA-MP81).
(1)
(7)
(8)

Before Use
3 After stripping the isulation by about
7mm, insert the power cable into the
Checking the Image Display
Place a target between the transmitter and receiver, and
terminal, and then tighten the screws. check if the target is displayed on the monitor.
Note
• Make sure that the uncoated cable does not come in
contact with another conductor and cause a short.
1 Short the No.1 (COM_IN 1) and No.2
(REMOTE) terminals on the input
• Use a tightening torque of 0.25N•m or less to tighten terminal block.
the screws.
Measurement becomes possible by shorting.
• Do not solder (preparation for solder, coating for solder)
They are shorted at the time of shipment.
the tip of the power cable.
For information about I/O Terminals, see
"Identifying Names and Functions of the I/O
Terminals" (page 8-2).
2 Connect the 24V DC power supply to

terminal No.7 (+) and No.8 (-) of the
input terminal block.
Terminal
Insert the uncoated
3 Turn the power on and confirm that the
shape of workpiece placed between the
power cable.
Approx.
7mm transmitter and receiver is displayed
on the screen.
4 After all of the necessary wires have

been connected, press the terminal
Reference
If not displayed properly, check the following.
"Troubleshooting" (page A-9)
block firmly back into the controller. • Check that the POWER ON lamp lights on the upper
part of the front side of controller.
• Check that No.1 and No.2 on the input terminal block
T
OU
US
B are shorted.
-A
• If nothing is displayed on the monitor display, check:

AD
HE
2C
-23
RS
Wiring and power voltage of the monitor's power supply

IN
ET
ET
HE
RN
Cable connection between the monitor and controller
• Set "Trigger Setting" (page 5-2) to the continuous
trigger.
• Connect the connector between the transmitter and the
receiver heads.

MEMO
1
Before Use

Chapter 2
Screen Overview and Basic Operations

This chapter explains the types of screens and basic operations for
the console.
Overview of the Screen and Console Operations . . . . . . . .2-2

Operational Flow from Setting to Measurement . . . . . . . . .2-4
Basic Operations for Settings. . . . . . . . . . . . . . . . . . . . . . . .2-5
Restoring the default status . . . . . . . . . . . . . . . . . . . . . . . .2-16

Overview of the Screen and Console Operations
2 This section explains overview of the screen flow and console operations.
Screens can be changed by each key operation on the console.
6. "View stored Image" screen
ENTER
ZERO
TRG/
[PROG/RUN] switch
HOLD
ESCAPE
SCREEN
PROG
NO.
[ESCAPE] key
MENU [PROG No.] key
[MENU] key
Console
Movement button in the [ESCAPE] key

display operation menu
2. Setting screen (During setting) 3. Display setting menu screen
[MENU] key
[PROG/RUN] 1. Measurement screen [MENU] key

switch (During measurement) [ESCAPE] key
Communication [PROG No.] key

command
4. Communication mode Screen 5. Program No. switching screen
• [PROG No.] key

• [ESCAPE] key
• Use the [ENTER] key to
confirm the Program No.

Operation status Equipment and operation method Reference page

2

This is the window displayed during measurement. This window
Measurement screen
1 is displayed at startup. 3-2
(During measurement)
All OUT numbers or specified OUT number can be displayed.
While the measurement screen is displayed, slide the [PROG/ Chapter 5,
Setting screen RUN] switch downward to display this window. Chapter 6,
2
(During setting) This turns off the transmitter's LED emission and measurement. Chapter 7,
Set the measurement conditions on this window. Chapter 8
While the measurement screen is displayed, press the [MENU]
Display setting menu
3 key to display this menu. 3-6
screen
The screen stops refreshing but measurement continues.
Use communication commands from the TM-Navigator or PLC
Communication mode to display this window. The measurement stops. RS-232C 2-2
4
Screen communication mode, USB communication mode, and Ethernet 11-16
communication mode are available.
While the measurement screen is displayed, press the [PROG
Program No. switching No.] key to display this window.
5 3-14
screen The screen stops refreshing but measurement continues. Up to
16 sets of measurement conditions can be switched and saved.
"View stored Image"
6 Display and confirm the image storage data. 3-9
screen

Operational Flow from Setting to Measurement
Operational Flow from Setting to Measurement
2 Step 1. Making the environmental settings commonly used (Chapter 6 Environment Settings)
• Set the communication conditions with the external devices, such as RS-232C, Ethernet, etc.
• Make basic settings, such as cable expansion mode, switching program, etc.
• Configure settings such as displayed language, internal clock settings, etc.
Step 2. Setting measurement conditions (Chapter 5 Measurement Settings Details)

Set the head conditions "Head settings"
• Set the trigger conditions.
• Set the Int prevention and trigger rate.
• Set the measurement range, mask area, etc.
Set the standard image "Master registration"
• Register the master image.
• Set the tilt correction.
Set the correction method for the position of workpiece "Position correction"
• Set the Pattern correction / X correction / Y correction / X→Y correction / Y→X correction
Set the measurement method "Measurement settings"
• Set the measurement type (what to measure).
• Set the Elements (center point of circle, edges such as intersection of 2 straight lines).
Set the measurement items "OUT settings"
• Set the number of averaging for measurement values and number of alarm errors.
• Make hold setting for measured results.
• Set offset value and scaling for measured values.
• Set tolerance (GO output range) for measured values.
Set input and output conditions "Common settings"

• Set TIMING terminal / ZERO terminal / binary output / analog output.
• Set storage (image saving, data saving).
• Set data output timing.
Step 3. Setting program functions (Chapter 4 Program Function)

• Set and save up to 16 sets of measurement conditions (programs).
Step 4. Measuring (Chapter 3 "Operations and Functions during Measurement")

Switch to the measurement screen and perform measurement
• Program switching available.
• Change the measurement display screen, zoom in or out on the measurement screen, display the
cursor, etc.
• Save the measurement result in the internal memory.
Step 5. Outputting the measurement results (Chapter 7 "Memory Card", Chapter 8

"I/O Terminals", Chapter 9 "RS-232C Communications")
• Use binary output, analog output or RS-232C to output the evaluation results or measurement values.
• Take measurement results saved in data storage or image storage and save them in the memory card.

Basic Operations for Settings
Cursor (Selected status) 2

Move or select the cursor on the TM-3000 Series by using
the [ENTER] key and the [U][V][Y][Z] keys on this unit.
Setting items
Items selected by the cursor appear with reversed font
colors and a blue background.
Pull-down menu
When pull-down menus are selected by the cursor, a blue
frame is displayed.
Entering values or letters

When boxes for entering values or letters are selected by
the cursor, a blue frame is displayed around the area for
character entry.
When individual values or letters are selected by the

cursor, the font appears with reversed colors and a blue
background.
Area cursor
When drawing an area, the display cursor is moved to the
drawing area. Use the [SCREEN] key to change the
cursor selection.
"Console" (page 1-8)
Example of a rectangle Example of a line

2 Using the ENTER Key Selecting an Item

Pressing the key straight down Use the following operations on the console to select
For selecting a menu item items or enter setting values.
For confirming a setting
Reference
Using the operations described below to select an item
and confirm the setting is described by the phrase
"Select (item name)" in this manual.
Press 1 the
Press [U], [V], [Y] or [Z] key to place
cursor on the item that you want to
Tilting the key up, down, right, or left set.
The key moves up, down, right, or left. This is used to
perform the following operations:
• Moving to another item
• Entering a value, such as tolerance
Moves upward
[U] key
The cursor moves

down every time
Moves downward
you press the [V]
[V] key
key.
Moves to Moves to
the left the right 2 Press the [ENTER] key.
[Y] key [Z] key If there are more detailed selections under the
selected item, the cursor moves to the next layer of
Reference
items in the hierarchy. Another window may open.
Tilting the [ENTER] key up or down is described as using
the [U] or [V] key in this manual.
Tilting the [ENTER] key right or left is described as using
the [Y] or [Z] key.
3 Repeat the operations until the cursor is

placed on the item that you want to set.
4 Press the [ENTER] key.

The item may appear slightly different when selected
depending on what type it is.
• Selecting from a pull-down menu
• Entering a value
• Entering a character
• Drawing an area
Reference
To cancel the selection, pressing the [ESCAPE] key
cancels the previous selection operation.

Selecting from a Pull-down Menu Entering a Value 2

When selecting an item in a pull-down menu, use the When entering values for parameters, use the following
following operations on the console. operations on the console.
1 Place the cursor on the item with the

pull-down menu by using the [U], [V],
1 Place the cursor on the item for which
to enter a value by using the [U], [V],
[Y] or [Z] key. [Y] or [Z] key.

The items that can be entered are displayed in the
The item switches to value input state and the cursor
pull-down menu. moves to the value.
In this example, "Average" is selected in "OUT In this example, "Tol upper limit" is selected in "OUT
settings". settings".
Pull-down menu Value input item
3 Press the [U] or [V] key to move the

cursor to the selection that you want to
3 Press [U], [V], [Y] or [Z] key to specify
the value.
enter, and press the [ENTER] key. [Y][Z] key: The cursor moves left or right.
The selection is fixed. [U][V] key: Change the values.
Reference
To cancel the selection, press the [ESCAPE] key
ENTER
before pressing the [ENTER] key. This cancels the
previous selection operation.
Reference
Press the [ZERO] key to set the value to 0.
4 Press the [ENTER] key after changing

the value.
The specified value is fixed.
Reference
To cancel the value entry, press the [ESCAPE] key
before pressing the [ENTER] key in step 3 above.

2 Entering Characters 4 Place the cursor on "Change program

name" button and press the [ENTER] key.
Characters can be entered for items such as the names

of measurement targets. This section describes an The Program window is displayed and the cursor
example for saving a name in a program No. moves to the program name.
1 Move the cursor to the program button

on the upper left corner of the setting
window.
The current program name is displayed.
Program button
As an example, change the name to "TEST1" and

save the changes.
5 Enter "TEST1" one character at a time.

Use [U], [V], [Y] or [Z] key for the following
operations.
To change the position of character input
Select "←" or "→" on the right side of the character

The "Program Number Change" screen is displayed.
input screen and press the [ENTER] key to move the
input position.
To delete characters
"Change program name" button
After moving the position for character input, select
"←" or "→" on the right side of the character input
screen. Then, select "DEL" (deletes the selected
character) or "BS" (deletes the character before the
selected character) and press the [ENTER] key.
Reference
The [ZERO] key has the same function as the "BS".
To select the character type

On the top of the screen, select the "A-Z",
"HIRAGANA", or "KATAKANA" tabs.
To select characters
Place the cursor on the character that you want to
3 Select the program No. for which you

want to register a name, and press the
enter and press the [ENTER] key. To enter a space,
select "SPACE" on the right side of the character
input screen and press the [ENTER] key.
[ENTER] key.
6 To end the input, select "OK" and press
the [ENTER] key.
The name of the program No. becomes "TEST1".

Drawing an Area with the Cursor 3 Press the [SCREEN] key to move the 2
cursor to the desired corner or side.

When setting measurement type or correction, you need
to draw an area. The cursor position changes each time the button is
This section describes how to move the corner with the pressed.
cursor placed, using the console. Place the cursor to the desired corner.
Shapes that can be set beforehand are determined
A
according to the setting contents. Shapes that can be set
are as follows.
B
Reference
When all corners are selected, the area moves.
Rectangle / Triangle Circular arc
Rotated rectangle
4 Press [U], [V], [Y] or [Z] key to move.
The corner with the cursor moves up, down, left or
right.
Circle Line Point

A
Basic procedures for operations
1 Display the drawing dialog.

Reference
The drawing dialog is displayed when the following
areas are set.
• Setting the shape of area for the mask setting
• Setting the area for the head alignment
• Setting the area of measurement type in the B
measurement setting
2 Press the [U] or [V] key to select

[Drawing] and press the [ENTER] key.
Repeat steps 3 to 4 to determine the shape.
5 Press the [ENTER] key to finish the

setting.

2 Drawing a rectangle Drawing a rotated rectangle

1 Display the drawing dialog, select

"Drawing" and press the [ENTER] key.
The cursor appears at point A. The cursor appears at point A.
A
2 Press [U], [V], [Y] or [Z] key to move point A. 2 Press [U], [V], [Y] or [Z] key to move point A.
Point B is fixed. The angle of rectangle and distance
between A and B change.
A
A
B
3 Press the [SCREEN] key to move the cursor

3 Press the [SCREEN] key to move the cursor
to point B, and move in the same way.
to point B, and move in the same way.
Point A is fixed. The angle of rectangle and distance
between A and B change.
B A
4 Press [SCREEN] key to move the cursor to

the side. Press [U] or [V] key to change
B
the width (height) of the rectangle.
Use [U] key to move away from the line segment AB
4 Press the [SCREEN] key.

The cursors appear at all corners.
and use [V] key to come close to AB.
5 Press [U], [V], [Y] or [Z] key to move 5 Press the [SCREEN] key.
The cursor positions are changed and displayed.
the whole rectangle position.
6 Press [U], [V], [Y] or [Z] key to move

the whole rotated rectangle position.
6 Press the [ENTER] key to finish the setting. 7 Press the [ENTER] key to finish the setting.
Drawing a triangle Drawing a circular arc 2

The cursor appears at point A. The cursor appears at the center of the circular arc.
A
2 point
Press [U], [V], [Y] or [Z] key to move
A. 2 the
center of circle.
Point A moves up, down, right, or left.
A Reference
Because 2 points out of 3 points that determine the
circular arc are fixed and center point is moved, the
shape (such as outer diameter, inner diameter, angle
of circular arc) changes.
3 Press the [SCREEN] key to move the

cursor to point B, and move in the
Example:
same way.
Point B moves up, down, right, or left.

The cursor position changes.
B

cursor to point C, and move in the
same way.
4 Press
Point C moves up, down, right, or left.
[U], [V], [Y] or [Z] key to change
the point.
C Because another 2 points are fixed as in step 2, the
shape of circle changes.
5 Press the [SCREEN] key. 5 Press the [SCREEN] key.

6 the
whole triangle position.
6 the
whole circular arc position.
Repeat steps 2 to 6 to determine the shape. Repeat steps 3 to 6 to determine the shape.
7 Press the [ENTER] key to finish the setting. 7 Press the [ENTER] key to finish the setting.
2 Drawing a circle Drawing a line


The cursor appears at the center of the circular arc. The line segment and the cursor are displayed.
A
2 point
A.
2 the
center of circle.

The cursor position changes.
The cursor position changes in order to move point B.

4 Press [U] or [V] key to change the
point.
The cursor is displayed at both ends of the line
segment.
Specify the radius of circle.

setting. 5 the
whole line segment.

setting.
Drawing a point

The point appears.
2 the
point.
3 Press the [ENTER] key to finish the setting.

Drawing an Area by Entering Values Operation procedure 2

When setting measurement mode or correction, you need Display the drawing dialog.
to draw an area.
Reference
The drawing dialog is displayed when the following areas
Basic console operations are set.
• Selecting the shape of area for the mask setting
[U][V] key • Setting the area for the head alignment
• Select the item to change. • Setting the area of measurement type in the
(The cursor moves to the selected corner.) measurement setting
1 Press the [U] or [V] key to select the

item of which the value is to be
changed, and press the [ENTER] key.
• Change the values.
ENTER
Values can be changed now.

Reference
[Y][Z] key The number of setting items changes according to
Place the cursor on the digit to select. the shape of area.
"Shape of area and setting coordinates" (page
2-14)
2 toPress [Y] or [Z] key to select the digit

change and press the [ENTER] key.
[ENTER] key
Press this key to change the value of selected items or
confirm the selected value.
3 Press
value.
[U] or [V] key to change the
Repeat steps 2 to 3 to set the desired value.
4 Press the [ENTER] key to fix the value.

Perform steps 1 to 4 to set other items and
determine the shape.
5 Press the [ESCAPE] key to finish

drawing.

2 Shape of area and setting coordinates

Triangle
Set the following 3 points when setting the triangle with
This section explains the setting items when entering value entry.
values for setting the area.
A C
Rectangle
Set the following 2 points when setting the rectangle
B
with value entry.
The setting items are set in the following order.
A
B
Point A, X coordinate
Point A, Y coordinate
Point B, X coordinate
Point B, Y coordinate
Point A, X coordinate Point C, X coordinate
Point A, Y coordinate Point C, Y coordinate
Point B, Y coordinate Circular arc
Set the following 3 points when setting the circular arc
with value entry.
Rotated rectangle
Set the following 3 points when setting the rotated C
rectangle with value entry.
A B
C
A B
Point C, X coordinate
Point C, Y coordinate
Point C, Height from the line

segment AB

Circle Point 2
Set the following 2 points when setting the circle with Set the following 1 point when setting the point with

value entry. value entry.
B A

Point B, radius
Line
Set the following 2 points when setting the line with
value entry.
B

Restoring the default status
Restoring the default status

(Initializing setting values)
2 You can initialize all of the parameters and return them to

the factory default settings.
Note
Do not turn off the power to the controller while
performing initialization.
Reference
For default values, see "Default Values" (page 11-11).
1 While pressing the [ZERO] key, turn on

the controller.
The initialization dialog appears.
2 Select
key.
"Yes" and press the [ENTER]
Initialization is performed and the controller restarts.
Reference
The interface language of the environment settings is not
initialized.
"Environment Settings" (page 6-4)

Chapter 3
Operations and Functions during Measurement

This chapter describes functions and operation methods used
during measurement.
Description of the Measurement Screen . . . . . . . . . . . . . . .3-2

Display Setting Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
Hold Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10
Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-11
Auto-zero Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12
Auto-offset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-13
Switching Program No. . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14
Keylock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-16
Storage Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17
Image Capture Function . . . . . . . . . . . . . . . . . . . . . . . . . . .3-21

Description of the Measurement Screen
This section explains screens displayed during measurement.
3 1. Program name display 2. Measurement value 3. Equipment

information display
4. Mode display
6. Total
evaluation
result
7. Active OUT
selection display
8. Process time
display
5. Image / Value
display screen
1. Program name display Displays the name of the program No. being currently measured (selected).
"Program Function" (page 4-2)
2. Measurement value
2-1 2-2 2-3
2-4 2-5 2-6
2-1. OUT name display Displays the name of the OUT number that is selected in active OUT.
2-2. Measurement Displays the measurement result for the OUT number that is selected in active OUT.
value display Value display: Displays the measurement result.
FFFFFF : Overrange on the positive side. The measurement result is larger than the
display range.
-FFFFFF : • Overrange on the negative side. The measurement result is smaller than
the display range.
• Measurement alarm displayed when an error occurs and the
measurement value cannot be calculated.
------ : Evaluation standby displayed when the measurement value cannot be
determined before measurement or internally being measured.

2-3. Evaluation result Displays the evaluation result of the OUT number that is selected in active OUT.
display
2.4. Timing display Displayed when the timing input for the OUT number that is selected in active OUT is 3
turned on.

"Measurement mode" (page 5-86)
2-5. Auto-zero display Displayed when the auto-zero input for the OUT number that is selected in active OUT is
turned on.
2-6. Value display unit Displays the unit of measured value display.
The unit is determined by the measurement mode and minimum display unit.
"Min display unit" (page 5-87)
3. Equipment information Memory card: Displayed when the memory card can be used.
display "Inserting a Memory Card/Remove"(page 7-3)
LOCK : Displayed when the console is set to keylock.
"Keylock" (page 3-16)
Storage : Displayed when using the storage function.
"Storage Function" (page 3-17)
4. Mode display Displays the unit's current status: "Measure" or "Setting".
5. Measurement Screen Image display screen : Displays the image being measured.
(Image / Value display Value display screen : Displays the measurement value in each OUT number.
screen)
6. Total evaluation The total evaluation result is based on the evaluation result of the OUT No. of which
display measurement type is set other than "No setting".
OK: When the OUT No. other than the evaluation standby state are all GO
NG: When any of the OUT No. other than the evaluation standby state is not GO
No display: When all the OUT No. are in the evaluation standby state
7. Active OUT Displays the evaluation output for all the OUT No.
selection display Also, selects Active OUT.
"Selecting the Active OUT" (page 3-5)
8. Processing time Trigger interval : Displays the shortest time for the trigger input.
display Process : Displays the length of time from trigger input until the measured value is
fixed.

Switching the Display of Measurement Screen

3 The display contents can be changed by pressing the [SCREEN] key on the console while the measurement screen is
displayed.
The display contents are as follows depending on the number of heads used and number of OUTs used.
(Head A)
ENTER
TRG/
ZERO HOLD
ESCAPE
PROG
SCREEN NO.
With 2 heads [SCREEN] key MENU
[SCREEN] key (Head B)
Console
[SCREEN] key
With
1 head (Head A, B)
[SCREEN] key
(Active OUT display)
With 2 to 4 With 5 to 8 With 9 to 16

outputs outputs outputs
[SCREEN] key
With 1
output
[SCREEN] key [SCREEN] key [SCREEN] key

Selecting the Active OUT Setting a Startup Screen

The following display and operations are available for the
OUT number that is selected as active OUT.
The screen that is displayed after turning on the power
can be selected and set.
3
• The measurement value of selected OUT and input/

output status are displayed on the measurement value
display (page 3-2) on the screen.
1 Press the [SCREEN] key on the
measurement screen to select the
• When the [ZERO] key is pressed on the console, the
auto-zero is performed for the selected OUT numbers
screen to display upon startup.
(When "All OUT" is selected, the auto-zero is performed
for all OUT numbers.). (page 3-12)
• When the [TRG/HOLD] key is pressed on the console, the timing
2 Use the [PROG/RUN] switch to display
the settings screen.
input is performed for the selected OUT numbers (When "All
OUT" is selected in the continuous trigger mode, the timing input
is performed for all OUT numbers.). (page 3-10, 3-11)
3 Use the [PROG/RUN] switch to return to
the measurement screen.
The screen selected in step 1 is saved as a startup
Active OUT selection method screen. The next time the TM-3000 Series is turned
on, the screen selected in step 1 is displayed.
1 Press the [U] or [V] key on the
measurement screen.
Move the cursor on the active OUT selection display
to the OUT number you wish to select. The screen
changes when the cursor is moved.
[U] key [V] key
ALL OUT
Reference
• An OUT No. for which the measurement type is set to
"No setting" cannot be selected.
• When "ALL OUT" is selected in active OUT, "Timing
input" or "Auto-zero input" can be performed for all
OUTs in use from the console.

Display Setting Menu

(Zooming in/out, moving the screen)
The display setting menu provides several functions,

including zooming in or out and selecting points of
Operations and Functions of the Display Setting Menu
3 measurement with the cursor.
Viewing the Display Setting Menu

Press the [MENU] key on the console to display the

display operation menu.
(1) (2) (3) (4) (5) (6) (7) (8)
Press [Y] or [Z] key to select the desired icon and press
the [ENTER] key. Then, each operation becomes
available.
(1) Zoom in/Zoom out (page 3-7)

(2) Display range movement (page 3-7)
(3) Clearing the display conditions (page 3-7)
(4) Vertical cursor display (page 3-8)
(5) Horizontal cursor display (page 3-8)
[MENU] key (6) Hide cursor (page 3-8)
[MENU] key or
[ESCAPE] key (7) Move to the "View stored Image" screen (page 3-9)
(8) Storage start/stop (page 3-9)
Reference
• While the display setting menu is displayed, the screen
stops refreshing, but measurement continues internally.
However, measurement stops when shifting to the "View
stored Image" screen.
• Part of the display setting menu is displayed on the
value display screen.
• The communication mode can be changed while
displaying the display setting menu. After shifting to the
communication mode, operation is not available using
the console. The display setting menu is closed when
returned, and the screen returns to the measurement
screen.
• The "Vertical cursor", "Horizontal cursor" and "Hide cursor"
icons are displayed only on the measurement screen.
• The options "Move to the "View stored Image" screen"
and "Start/stop storage" are grayed out when the image
storage is not selected in the storage settings.

Zoom in/Zoom out Display range movement
3
The image is zoomed in/zoomed out. When zooming in/out the image, the display
range is moved up, down, right or left.
1 Select "Zoom in/Zoom out" and press

the [ENTER] key. 1 Select "Range movement" and press
the [ENTER] key.
The cursor is displayed on the image.
The cursor is at the center position of zooming in/out. Triangles appear at the top, bottom, right and left of
the image and enables operations.
Reference
Press the [ESC] key to return to the display setting menu. Reference
Press the [ESC] key to return to the display setting menu.
2 [U], [V], [Y] or [Z] key to move the cursor to

the center where zooming in/out is performed.
Reference
When 2 heads are connected, the head selection
Reference screen is displayed. Select the image using the
When 2 heads are connected and the cursor is right/left button of the cross key and press [ENTER]
moved to the image of head A or head B, the image key. Then, the below illustration is displayed.
of head A or head B is zoomed in/out respectively.

The shape of the cursor changes.
2 Press the [U], [V], [Y] or [Z] key.

The display position moves.
Reference
• Cannot move when the magnification is 1x.
4 Press the [U] or [V] key.
The image is zoomed in/zoomed out.
• When the cross key is continuously pressed, the
display position moves in succession.
Reference
Press the [ESC] key or [ENTER] key to return to the step 1 state.
The magnification scale can be selected from 1 to 16 times.
Clearing the display conditions

This initializes the settings for zooming in/out
and display range movement.
1 Select "Clearing the display

conditions" and press the [ENTER] key.
Press the [ESC] key or [ENTER] key to return to the When 2 heads are connected, both heads are
step 1 state. initialized.

Measurement cursor 2 Press the [U], [V], [Y] or [Z] key.

The selection cursor moves.
3
Setting the measurement cursor on the image
display screen displays the value according to Reference
the cursor position. • The point is displayed at the bottom (or right end)
This section explains how to display or hide the of the selection cursor.
measurement cursor. • When [U], [V], [Y] or [Z] key is continuously
pressed, the cursor moves in succession.
1 Select "Vertical cursor" or "Horizontal

cursor"and press the [ENTER] key.
3 Select the [SCREEN] key to select the
cursor to move.
The cursors A and B are displayed on the image. Each time the [SCREEN] key is pressed, the
Reference selection cursor is switched as follows.
When 2 heads are used, refer to "Cursor selection Cursor A → Cursor B → Cursor A and B
method when using 2 heads". → Cursor A •••
Press the [ESCAPE] key to return to the display
setting menu. 4 Repeat Steps 2 and 3.
5 After determining the position of the
measurement cursor, press the
[ESCAPE] key.
The measurement cursor remains displayed.
Reference
When 2 heads are used, select the head for which the Hiding the measurement cursor
cursor setting is first made, using the [Y] or [Z] key.
Press the [ENTER] key to determine the head for which
the cursor is set.
1 Select "Hide cursor" on the display
setting menu and press the [ENTER]
key.
The cursor is not displayed.
Reference
The cursor position is fixed. When the measurement
cursor is selected again, the cursor appears at the
previously set position.
[Y][Z] key

(6)Measurement value display for the saved image

"View stored Image" screen
Displays the measurement value for the currently
3
This displays the saved image with the displayed image and the value in each OUT number at
image storage. that point. Also, the evaluation result is known
according to the display color for each OUT number.

Reference Green : "GO" evaluation
• When the "View stored Image" screen is displayed, the Red : "HI/LO" evaluation
measurement stops.
• This cannot be selected or performed if the "Image
storage" is not selected for "Storage" in the "Common
settings".
1 Select "Move to the "View stored
Image" screen" and press the [ENTER]
"Storage Function" (page 3-17) key.
"Common settings" (page 5-92)
The "View stored Image" screen appears.
"View stored Image" screen Reference

If there is no image data saved, the following dialog
(2) appears and the screen cannot be moved.
(3)
(4)
(5)
(6)
Storage start/stop
Storage can be started or stopped when the
data storage or image storage is set for the
(1)
storage setting.
(1)Image display area
Displays the selected saved image. Reference
(2)Saved image number • This cannot be selected or performed if the storage
Displays the number of saved images.
setting is OFF.
(3)Display image selection
Specifies the image displayed in the image display area.
Enter a value or set the image number using the S/T
button. 1 Select "Start/stop storage" and press
the [ENTER] key.
(4)Deleting data
Select "DEL_DATA" and press the [ENTER] key. Then, The set storage starts.
the "Image storage" dialog appears.
Press the [ENTER] key again to stop the storage.
Reference
When the manual setting is selected for the image
storage, each time the [ENTER] key is pressed, the
image storage is performed only once.
"All" : Deletes all of the saved storage
images.
"Select image" : Deletes currently displayed image
only.
(5)Save time and date
The save time and date for the image in the image
display area is displayed.

Hold Function
Hold Function
(Holding the measurement value)
This function displays the measurement value while

retaining it.
Hold Using the External Input Terminal
3 Maximum value and minimum value can be measured by
using the hold function in combination with the
The value can be held by setting the TIMING terminal for
each OUT number and shorting between the timing input
measurement mode. The type of measured value that is terminal and COM terminal in the input terminal block or
retained with the holding function varies depending on expansion connector.

the measurement mode.
"When Setting is Continuous Trigger" (page 10-2)
1 Set which of the timing input 1 and 2 is
used for each OUT number for "TIMING
Use the following 3 methods to operate this function. terminal" in the "Common settings".
• Console ([TRG / HOLD] key) "TIMING terminal" (page 5-93)
• External input terminal (Timing input terminal and COM
terminal shorted)
• RS-232C communication ("Timing ON/OFF" command)
2 Wire the timing input.
"Input terminal block" (page 8-2)
"Expansion connector" (page 8-4)
Hold Using the Console
When the [TRG / HOLD] key is pressed, the 3 When the timing input is set to ON, the
set OUT numbers are held.
measurement value for the OUT No. that is selected for
the active OUT display is held.
Hold via the RS-232C Communication
1 Set the trigger mode in the trigger
setting to "Cont trigger."
The value can be held by sending a command from an
external device through the RS-232C interface.
"Trigger Setting" (page 5-2)
2 Select the active OUT. 1 Make the connection and setting for
communication.
"Connections and settings for RS-232C
3 Press
Communication" (page 9-3)
the [TRG / HOLD] key on the
measurement screen.
The measurement value according to the
2 Set or cancel the hold function via the
communication command "Timing ON /
measurement mode is held and the timing display
OFF".
[TIM] of the measurement value display appears.
"Timing ON/OFF" (page 9-14)
Reference
Press the [ESCAPE] key to reset the measurement
value.
Canceling the hold function

Press the [TRG / HOLD] key again to cancel the hold
function and the measurement value according to the
measurement mode is displayed.
The measurement value display [TIM] is not displayed.

Trigger Function
Trigger Function
(Measuring with arbitrary timing)
This function performs sampling once for one trigger

input and displays or outputs the result.
Trigger input via the RS-232C Communication
When using the trigger function, set the trigger mode to
external trigger.
This performs sampling by sending a command from an
external device through the RS-232C interface.
3
For the timing chart when using the external trigger

function, see "When Setting is External Trigger" (page 10-
12).
1 Make the connection and setting for
communication.
Use the following 3 methods to operate this function. "Connections and settings for RS-232C
• Console ([TRG / HOLD] key) Communication" (page 9-3)
• External input terminal (Trigger input terminal and COM
terminal shorted)
• RS-232C communication ("Trigger input" command)
setting to "EXT trigger".
Trigger Input Using the Console
This performs sampling for both head A and head B
3 Sampling begins with the
communication command "Trigger
using the [TRG / HOLD] key and the measurement result
is displayed. input".
"Trigger input" (page 9-13)
2 Press the [TRG / HOLD] key on the

measurement screen.
Performs sampling once and displays the
measurement result.
Trigger Input Using the External Input Terminal

This performs sampling by shorting between the trigger
input terminal and COM terminal in the input terminal
block or expansion connector.

2 Wire the trigger input.

3 Sampling
set to ON.
begins with the trigger input
Reference
To perform sampling for head A, short between
TRG_A input and COM terminal. For head B, short
between TRG_B input and COM terminal.

Auto-zero Function
Auto-zero Function
(Performing instantaneous zero point)
The auto-zero functions sets the measurement value to

"0" when the auto-zero is input. By considering this zero
Auto-zero Using the Console
3 position as a reference, the increases and decreases are
displayed as positive and negative values.
When the [ZERO] key is pressed, the auto-zero is set for
the measurement value for the OUT No. that is selected
for the active OUT display of the current program No.
Display value Execute ZERO
1 Press the "Program No." key to select

the program No.
"Switching Program No. Using the Console"
0 (page 3-14)

active OUT.
t
Reference
• Auto-zero cannot be set in the evaluation standby state
(when “------” is displayed) or when numbers are not
3 Press the [ZERO] key.
The measurement value according to the
displayed on the measurement value display, such as measurement mode is held and the auto-zero
the over-range state. However, the auto-zero can be display [ZERO] of the measurement value display
canceled. appears.
• If the auto-zero function is set frequently, protect the
Reference
FLASH memory by setting the "Save" function in the
"Environment settings" to "OFF". Press the [ESCAPE] key to reset the measurement
"Setting Save operations for Flash Memory (Save)" value.
(page 6-5)
"Setting memory" (page 2) Canceling the auto-zero function
"Memory Structure" (page A-2) This returns the value to the uncorrected value before the
• The corrected value (auto-zero value) is stored auto-zero was set.
according to program No. and OUT No.
• The [ZERO] display on the measurement value display
lights up when the OUT number of the selected
1 Select
input.
the active OUT with auto-zero
program No. is set to auto-zero.

• When the measurement mode is set to an option other
than normal, the evaluation standby state (“------”) is 2 Press and hold the [ZERO] key on the
console.
established after auto-zero is set or canceled.
• Auto-zero is set for the setting value (display value) The auto-zero is canceled and the measurement
after measurement mode processing. value display [ZERO] is not displayed.
• The offset function can be used at the same time to
adjust for the master workpiece.
"Auto-offset" (page 3-13)
"Offset" (page 5-87)
Use the following 3 methods to operate this function.

• Console ([ZERO] key)
• External input terminal ("ZERO terminal input" and COM
terminal shorted)
• RS-232C communication ("Auto-zero ON" command)

Auto-offset
Auto-offset
(Performing instantaneous adjustment
for a master workpiece)
The auto-offset function is used to adjust a master
Auto-zero Using the External Input Terminal workpiece when the target is changed.
The auto-zero can be set by shorting between the zero
input terminal and COM terminal in the input terminal
The size of the master workpiece can be set as the
master value (reference value) by setting the size of the 3
block or expansion connector. master workpiece as the offset value, and then using the

auto-zero function while measuring the master
1 Set which of the ZERO input 1 and 2 are

used for each OUT number in the
workpiece.
"Common settings".
"ZERO terminal" (page 5-94) Example
When adjusting the master workpiece to 10.000, set the
2 Wire the ZERO input.
offset to 10.000 and perform auto-zero.
"Expansion connector" (page 8-4) Display value Execute ZERO
3 The auto-zero is set when the ZERO

input set to ON.
10.000
(Reference
Canceling the auto-zero function
value)
This returns the value to the uncorrected value before the
auto-zero is set.
t
1 Turn the auto-zero input ON for more

than 2 seconds.
The auto-zero is canceled and the measurement 1 Set the master value for "Offset" in
"OUT settings".
value display [ZERO] is not displayed.
Auto-zero via the RS-232C Communication 2 Perform zero input of the auto-zero
function.
This performs the auto-zero by sending a command from
an external device through the RS-232C interface.

communication.
2 Auto-zero begins with the communication

command "Auto-zero ON".
"Auto-zero ON" (page 9-13)
Canceling the auto-zero function

This returns the value to the uncorrected value before the
auto-zero is set.
1 Auto-zero is canceled with the

communication command "Auto-zero OFF".
Auto-zero is canceled with the communication command

"Auto-zero OFF" and the measurement value display
[ZERO] is not displayed.
Switching Program No.

(Changing the measurement conditions)
This section describes how to switch program numbers

for which measurement conditions have been set
Switching Program No. Using the Console
3 beforehand.
"Program Function" (page 4-2) 1 Select "Console" for "Program switch"
in the environment settings.
Reference
• If the program No. are switched frequently, set the

"Save" function in the "Environment settings" to "OFF" to 2 Press the [PROG No.] key on the
measurement screen.
protect the FLASH memory.
"Setting Save operations for Flash Memory (Save)" The program switching screen appears on the screen.
(page 6-5)
"Setting memory" (page 2)

• Console ([PROG No.] key)
• External input terminal (Expansion connector P1 to P4)
• RS-232C communication ("Program" command)

A pull-down menu appears.

program No. and press the [ENTER]
key.
The settings switch to the selected program No. and
the screen returns to the measurement screen.

Switching Program No. Using the External Input Terminal Switching Program No. Using the RS-232C Communication
The program No. can be changed by switching ON/OFF
of the external input terminal.
16 programs (No.00 to 15) saved in the controller can be
switched via the RS-232 communication.
3
Up to 256 programs can be switched using the memory

1 Select "Terminal" for "Program switch"
in the environment settings.
card.
"Setting the Program-switching Method" (page 1 inSelect "Console" for "Program switch"
the environment settings.
6-5)
"Program switch" (page 6-5)
2 Input the status of expansion

connector P1 to P4 according to the 2 Make the connection and setting for
communication.
chart below.
The program No. is switched according to each "Connections and settings for RS-232C
input state. Communication" (page 9-3)
Program
No.
P4 P3 P2 P1 3 Switch the Program No. using the
communication command "Program".
00 OFF OFF OFF OFF
"Switch program No. on the memory card"
01 OFF OFF OFF ON (page 9-16)
02 OFF OFF ON OFF "Switching to the Program in the Memory Card
03 OFF OFF ON ON for Measurement" (page 7-9)
04 OFF ON OFF OFF

05 OFF ON OFF ON
06 OFF ON ON OFF
07 OFF ON ON ON
08 ON OFF OFF OFF
09 ON OFF OFF ON
10 ON OFF ON OFF
11 ON OFF ON ON
12 ON ON OFF OFF
13 ON ON OFF ON
14 ON ON ON OFF
15 ON ON ON ON
TM-3001 (NPN type)
ON : Short-circuit state with the COM_IN2
terminal
OFF : Released state
TM-3001P (PNP type)
ON : Voltage-applied state with the COM_IN2
terminal
OFF : Released state
"Timing Chart and Response Times" (page 10-1)

Keylock
Keylock
(Preventing operation mistakes)
This function invalidates key inputs on the console to

prevent accidental key inputs during measurement.
3 During keylock, key operations other than "Canceling

keylock" cannot be performed.

• Console
• RS-232C communication ("Keylock" command)
Setting the Keylock Using the Console
1 Press the [MENU] key on the

measurement screen.
The "Display setting menu" appears.
2 Press and hold the [ZERO] and [TRG]

keys at the same time.
“LOCK” is displayed on the equipment information
display and the TM-3000 Series enters the keylock
state.
"Equipment information display"(page 3-3)
Canceling the keylock
1 With the keylock state, press and hold

the [ZERO] and [TRG] keys at the same
time.
“LOCK” disappears on the equipment information
display and the keylock is canceled.
Setting the Keylock via the RS-232C Communication

The keylock function can be set and canceled by
sending a command from an external device through the
RS-232C interface.

communication.
2 Send the "Keylock" command to set

the keylock.
Canceling the keylock

Send the "Keylock" command to cancel keylock in the
same way as the keylock setting .

Storage Function
Storage Function
(Saving measurement values or images to memory)
Overview of Storage Performing Data Storage

This section describes basic operations and settings of
the storage function. Storage start/stop 3

This function saves the OUT measurement values and Conditions for starting storage
image data into the internal memory of the controller (This • Operating the "Storage start/stop" button on the display
is called storage.). setting menu (page 3-9)
Storage data can be read after it was saved and it is • Starting from the setup support software "TM-Navigator"
used to check the measurement status, etc. "TM-Navigator User's manual"
Storage data can be exported using TM-Navigator, RS- • Start command from the RS-232 interface (page 9-
232C (except for image storage) or a memory card. 16)
There are 2 types of storage. Depending on the type, Conditions for stopping storage
conditions such as starting or stopping storage differ. • When the preset amount of data has been stored
• Data storage "No of data points" (page 5-98)
Measurement values for all OUT numbers to measure • Operating the "Storage start/stop" button on the display
are stored. setting menu (page 3-9)
• Image storage • Stopping from the setup support software "TM-Navigator "
Image data obtained from heads (head A, head B or "TM-Navigator User's manual"
both heads) is stored. • Stop command from the RS-232 interface (page 9-
16)
Operation overview of storage function • When shifting to the setting screen or communication
mode from the measurement screen
"Overview of the Screen and Console Operations"
(1) (4)
(page 2-2)
Storage start/stop Start Stop
(2) (5) Reference
Storage timing
(3)
When storage is resumed after once stopped, the stored
Store to internal memory data is not cleared and the new data is added to the data
that has already been stored.
(1) The storage process starts according to the
"Conditions for starting storage".
(2) The measurement values are confirmed according to
the "Storage timing".
(3) The measurement results/image data are stored in the
internal memory.
(4) The save process stops according to the "Conditions
for stopping storage".
(5) Data obtained while the storage is stopped is not
stored.
Reference
Setting contents, starting or stopping conditions differ,
depending on the type of storage.
Setting the storage function

Use the console, RS-232C or TM-Navigator for setting.
Console:"Storage" (page 5-98)
RS-232C: "Type of storage"(page 9-24)
TM-Navigator: "TM-Navigator User's Manual"

Storage Function
Storage timing Loading the storage data
3 Set the storage operation timing in "Data out timing"

(page 5-102) in the common settings.
The following methods can load data that is stored in the
internal memory of the controller.
Image update: Loading the storage data

Data is stored when sampling is performed and each • Loading from the setup support software "TM-Navigator "
OUT measurement is finished. "TM-Navigator User's manual"
• In the continuous trigger mode, data is stored for each • Saving to the memory card using the console
sampling, "Trigger mode" (page 5-3) "Saving the Storage Data to the Memory Card"
• In the external trigger mode, data is stored in with the (page 7-9)
timing for trigger A. "Trigger mode" (page 5-3) • Saving to the memory card using the external input
terminal (S_SAVE)
Timing 1: "Saving the Storage Data to the Memory Card"
The confirmed measurement values are stored with (page 7-9)
timing 1 input. • Saving to the memory card using the RS-232C
• The values are stored for the timing during normal communication
mode and hold mode according to the settings in "Save storage data" (page 9-17)
measurement mode in OUT settings,
Reference
The file is saved in the dedicated binary format.
The data can be loaded to the Excel file using TM-
If skipping is set, data is stored for each instance after
Navigator.
being skipped.
"TM-Navigator Users' Manual"
Conditions for clearing the storage data

The following operations clear the storage data while
storage is stopped.
Conditions for clearing the storage data

• When the storage data is saved to the memory card.
"Loading the storage data" (page 3-18)
• When switching from the setting screen (during setting)
to the measurement screen (during measurement)
(page 2-2)
• Initialization from the setup support software "TM-
Navigator " "TM-Navigator User's manual"
• Initialization command from the RS-232C interface
"Initialize storage" (page 9-16)
• When the program No. is changed
• When the power is turned off

Storage Function
Performing Image Storage Storage timing

This stores the image data obtained from the head to the
Set the storage operation timing in "Storage conditions"
(page 5-99) in the common settings "Storage". Select
3
Up to 100 pieces of image data can be saved from Always / Only when NG / Manual.

(Depending on the image range, the minimum number is
32 when the entire range is set.). If the amount of data Always
exceeds the maximum number, the oldest data is deleted • Stores for each sampling after storage starts.
and the latest data is stored.
Time data when stored is added to the stored image data. Only when NG
Reference • Stores only when the total evaluation result is NG.

When "Both heads" is set as "Target head", set the trigger
Manual
rate to "ON".
If it is set to "OFF", it functions the same way as when the • When shifting from the setting screen to the
target head is set to "Head A". measurement screen, storing operation state is
established. 1 piece of image data is stored by the
"Storage start/stop" button operation on the display
Storage start/stop setting menu.
Conditions for starting storage

Conditions for clearing the stored data
• Operating the "Storage start/stop" button on the display
setting menu (page 3-9) The following operations clear the stored data while
• Starting from the setup support software "TM-Navigator" storage is stopped.
"TM-Navigator User's manual"
• Start command from the RS-232C interface (page Conditions for clearing the stored data
9-16) • When the storage data is saved to the memory card.
"Loading the image data" (page 3-20)
Conditions for stopping storage
• When switching from the setting screen (during setting)
• Operating the "Storage start/stop" button on the display to the measurement screen (during measurement)
setting menu (page 3-9) "Overview of the Screen and Console Operations"
• Initialization from the setup support software "TM- (page 2-2)
Navigator " "TM-Navigator User's manual" • Initialization from the setup support software "TM-
• Stop command from the RS-232 interface (page 9- Navigator " "TM-Navigator User's manual"
16) • Initialization command from the RS-232C interface
• When shifting to the setting screen or communication "Initialize storage" (page 9-16)
mode screen from the measurement screen • When the program No. is changed
"Overview of the Screen and Console Operations" "Switching Program No." (page 3-14)
(page 2-2) • When the power is turned off
Reference
When storage is resumed after once stopped, the stored
data is not cleared and the new data is added to the data
that has already been stored.

Storage Function
Loading the image data
3 The following methods can load data that is stored in the

Loading the image data

• Loading from the setup support software "TM-
Navigator" "TM-Navigator User's manual"
• Saving to the memory card using the console
"Saving to a Memory Card" (page 7-4)
• Saving to the memory card using the external input
terminal (S_SAVE)
"Saving the Storage Data to the Memory Card"
(page 7-9)
• Saving to the memory card using the RS-232C
communication
"Save storage data" (page 9-17)
Reference
Data can be saved to the memory card in 2 formats.
Bitmap format (extension bmp):
Measurement image file
Dedicated binary format (extension dst):
Data file including settings for measurement

Image Capture Function

(Saving the measurement screen)
The image of the entire measurement screen can be

saved in a memory card (image capture). The saved file
can be opened or saved on a computer that has a
memory card slot. 3

"Reading from a Memory Card" (page 7-6)
Reference
• Measurement stops while data is being saved to a
memory card. The previous measured value is held.
"Controller Status Table" (page 11-16)
• The image cannot be saved when no memory card is
inserted, or there is not enough free space. No error
message appears at that time.
• The file name or the save folder is specified
automatically.
"Files" (page 7-4)
• The image cannot be saved with operations other than
those done on the console.
• Screens (setting screen, display setting menu screen,
etc.) other than the measurement screen cannot be
saved.
(page 2-2)
1 Insert the memory card into the

memory card slot.
"Inserting a Memory Card" (page 7-3)
2 Display
saved.
the measurement screen to be
"Switching the Display of Measurement Screen"

(page 3-4)
3 While pressing the [ENTER] key, press

the [SCREEN] key.
The image is saved. The message window is
displayed while saving the image.
"Console" (page 1-8)
4 When saving is complete, the message

window disappears, and the
measurement screen is restored.

MEMO
3

Chapter 4
Program Function
Program Function
Up to 16 sets of measurement conditions (programs) can be saved
on the TM-3000 Series.
Measurement conditions can be recalled based on previously
saved target types to allow easy changes to settings.
Program Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2

"Program Number Change" Screen . . . . . . . . . . . . . . . . . . .4-2
Displaying the "Program Number Change" screen . . . . . .4-3
Selecting the program No.. . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Naming a program No.. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
Copying the program No. . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
Initializing settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Loading and saving with the memory card . . . . . . . . . . . . .4-6

Program Function
Program Function
Up to 16 sets of programs can be registered. 1 set

"Program Number Change" Screen
consists of various setting items, such as head settings,
OUT settings, etc.
(1) (2) (3)
The setting and saving items are as follows.
4 • "Head Settings" (page 5-2)
• "Master Registration" (page 5-10)
• "Position Correction" (page 5-14)
Program Function
• "Measurement Settings" (page 5-37)

(4)
• "OUT settings" (page 5-82)
• "Common settings" (page 5-92)
• "Auto-zero Function" (page 3-12)
(5)
"Save" (page 6-5) When ON
Note
Environment settings are not saved.
(6) (7) (8)
To switch the program No. and measure, see page 4-1.

(1) Program No. display
Displays the currently selected program No.
(2) Program name display
Displays the program name of the currently selected
program No.
"Naming a program No." (page 4-4)
(3) "Change program name" button
Changes the program name.
"Naming a program No." (page 4-4)
(4) Program No. selection button
Selects the program No.
Displays the currently selected program No. in blue.
"Selecting the program No." (page 4-3)
(5) Initialize button
Initializes the settings for the currently selected
program No.
"Initializing settings" (page 4-5)
(6) Copy source selection button
Selects the copy source program No. from the pull-
down menu.
"Copying the program No." (page 4-4)
(7) Paste destination selection button
Selects the paste destination program No. from the
pull-down menu.
(8) "Copy program settings" button
Copies the program No. contents from the copy
source to the paste destination.

Program Function
Displaying the "Program Number Change" Selecting the program No.

screen Select the program No. of the program whose setting is
to be changed.
1 Use the [Prog/Run] switch to display
the settings screen. To switch the program No. and measure, see "Switching 4
Program No." (page 3-14).
"Overview of the Screen and Console
Program Function
1 Display
Operations" (page 2-2)
the "Program Number Change"
Program button
screen.
"Displaying the "Program Number Change"
screen" (page 4-3)
2 select
Press the [U], [V], [Y] or [Z] key to
the "Program No. selection"
button and press the [ENTER] key.
The number and name of the selected program appear
in "Program No. display" and "Program name display".
The selected "Program No. selection" button turns
pale green.
2 select
the "Program" button and press
the [ENTER] key.
The "Program Number Change" screen appears.
3 Press the [ESCAPE] key.

Selection process is complete and the "Program
Number Change" screen closes.

Program Function
Naming a program No. Copying the program No.
1 Display
screen.
Use this function to copy the settings from one program
No. to another program No.
4 "Displaying the "Program Number Change"

Reference
• When copying settings, the settings from the copy
screen" (page 4-3)
source program No. overwrite the settings in the paste
Program Function
2 Select
destination program No.
the "program No. selection" • The program name is not copied.
pale green.
1 Display
screen.
3 Select
the "Change program name" screen" (page 4-3)
The program name switching screen is displayed
and the cursor moves to the program name.
2 Select the "Copy source selection"
4 Enter the program name.

Setting range: Up to 16 single-byte characters, and
3 Select the copy source program No.
and press the [ENTER] key.
8 double-byte characters.
"Entering Characters" (page 2-8) The copy source program No. is confirmed.
5 To end the input, select "OK" and press 4 Select the "Paste destination selection"
the [ENTER] key.
The name of the program No. is confirmed. A pull-down menu appears.
5 Select the paste destination program

No. and press the [ENTER] key.
The paste destination program No. is confirmed.

Program Function
6 Select the "Copy Program settings"

Initializing settings
This function initializes the settings of the specified
The settings are copied from the copy source to the
program No.
paste destination. After copying is complete, the
confirmation message appears.
1 Display the "Program Number Change" 4
screen.
Program Function
screen" (page 4-3)
7 Press the [ENTER] key. 2 Select the "Program No. selection"

button for initialization and press the
The message disappears.
[ENTER] key.
pale green.
3 Select the "Initialize" button.

The initialization conformation message appears.
5 Select
key.
The message appears to confirm that the

parameters will be initialized.

The message is closed.

Program Function
Loading and saving with the memory card

Programs that are saved in the controller can be saved to
the memory card. Programs saved in the memory card
4
can be loaded back into the controller at a later time.
Program Function

Chapter 5
Measurement Settings Details

This chapter explains setting details for measurement.
Head Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2

Master Registration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
Position Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-14
Measurement Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-37
OUT settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-82
Common settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-92

Head Settings
Head Settings
Head settings are conditions that can be set to improve

the image for a more accurate measurement.
Trigger Setting
(Setting the sampling operating conditions)
The setting items and overview are as follows.
The trigger controls image acquisition intervals.
• Trigger Setting (page 5-2)
Set the trigger operating conditions in the trigger settings.
This is a common setting for Head A and Head B.
Sets the sampling timing, etc.
Setting items and overview:
5 • Head A / Head B Settings (page 5-6)

This is an individual setting for Head A and Head B.
Narrows the measurement area for faster
measurements or sets areas which are not used for (1)

(2)
measurement. (3)
Reference
This manual uses the term "sampling" to describe the
process of taking an individual measurement.
Displaying the Head Settings Screen
1 Slide the [PROG / RUN] switch.

The setting screen appears. (1)Trigger mode (page 5-3)
"Overview of the Screen and Console Set for continuous or external triggering.
Operations" (page 2-2) (2)Mutual interference prevention (page 5-4)
Eliminate mutual interference when using two heads
close to each other.
(3)Trigger rate (page 5-5)
Set whether to synchronize the trigger for image
acquisition when using two heads.
2 Press the [U] / [V] key to select "HEAD

setting" and press the [ENTER] key.
The head settings screen will be displayed and the
cursor will move to "Trigger settings".
Unconnected heads cannot be selected (They are
grayed out).

Head Settings
External Trigger
Trigger mode
The trigger input from the console or external input
There are two types of trigger modes.
terminal at arbitrary intervals allows measurement
• Continuous trigger : The trigger is automatically
according to the target's movement.
activated continuously.
One measurement is made with one input.
• External trigger : The trigger is activated from the
Heads A / B can have separate trigger inputs.
input terminal or console.
Setting range: Cont trigger / EXT trigger (Default: Cont

Measurement example: Measures the targets one by
one.
5
trigger)

Continuous Trigger
The internal trigger is automatically and continuously
activated while sampling continues. Input from the
external trigger is ignored.
Measurement example: Continuous measurement of the

target
(1)
Trigger input
Internal processing
(2)
Measured value
t
(1)Sampling begins with the trigger input.

(2)Measurement is made for each trigger input and
(1)
Internal trigger evaluation is output.
Internal processing
The external trigger input is possible with the following
(2) three methods.
Measured value • [TRG / HOLD] key on the console
t • "Trigger input" terminal of the external input terminal
(1)The controller automatically activates the trigger at the • Trigger input command from the RS-232C interface
minimum trigger period.
(2)Measurement and evaluation output are both Each operation method: "Trigger Function" (page 3-
continuous. 11)
Timing chart: "When Setting is External Trigger"
Reference
(page 10-12)
The maximum or minimum value in a series of
measurements can be held using the measurement
mode settings.
Timing chart: "When Setting is Continuous Trigger"
(page 10-2)

Head Settings
1 Select "Trigger settings" under "HEAD

setting" screen and press the [ENTER]
Mutual interference prevention
When two heads are connected for use, by changing the
key. timing of the light source activation and sampling, mutual
The "Trigger settings" screen appears. interference prevention eliminates the influence on
"Displaying the Head Settings Screen" (page 5-2) measurement caused by the reflection of light emitted
from head A onto the target and the reflected light's entry
5 2 Select "Trigger mode" and press the

[ENTER] key.
to the receiver of head B, depending on the positions of
head A and head B.
When using the mutual interference prevention, set
"Trigger rate" to ON.

"Trigger rate" (page 5-5)
Setting range: OFF/ON (Default: OFF)
• OFF
Activate the light sources simultaneously during
sampling. (Below (1))
3 Press the [U] / [V] key to select "Cont
trigger" or "EXT trigger" and press the
• ON
Activate the light sources with a small delay between
them.
[ENTER] key. Sampling for head B starts after head A is finished.
When the selection is confirmed, the cursor will (Below (2))
return to "Trigger mode".
When OFF When ON
4 Press the [ESCAPE] key to exit. Trigger (continuous/

external)
Head A sampling
(1) (2)
Head B sampling
Reference
When "Trigger rate" (page 5-5) is set to "ON", the mutual
interference prevention becomes available.
1 Select "Trigger settings" under "HEAD

setting" screen and press the [ENTER] key.
The "Trigger settings" screen appears.
"Displaying the Head Settings Screen" (page 5-2)
2 Select "Int prevention" and press the

[ENTER] key.
3 Press the [U] / [V] key to select "OFF"

or "ON" and press the [ENTER] key.
When the selection is confirmed, the cursor will
return to "Int prevention".
4 Press the [ESCAPE] key to exit.

Head Settings
Trigger rate 1 Select "Trigger settings" under "HEAD

setting" screen and press the [ENTER]
When two heads are connected, the trigger
synchronization controls whether the sampling periods key.
for head A and head B are synchronized or not (This is The "Trigger settings" screen appears.
available when the trigger mode is "External trigger"). "Displaying the Head Settings Screen" (page 5-2)
Turn this ON (synchronous) to measure the same target
at the same time, and turn this OFF (asynchronous) to
sample different targets at a different timing. 2 Set "Trigger mode" to "EXT trigger".
"External Trigger" (page 5-3)
5
Reference

When in the "Cont trigger" mode, head A and head B are
synchronized.
3 Select "Trigger rate" and press the
[ENTER] key.
Setting range: OFF/ON (Default: OFF) A pull-down menu appears.
• OFF (asynchronous)
Head A and head B are sampled individually at
arbitrary timing using the external trigger input.
• ON (synchronous)
Synchronize head A and head B, then sample. The
external trigger input for head A is enabled and the
4 Press the [U] / [V] key to select "OFF"
or "ON" and press the [ENTER] key.
external input for head B is disabled. When the selection is confirmed, the cursor will
When OFF When ON return to "Trigger rate".
Trigger A input
Trigger B input
5 Press the [ESCAPE] key to exit.
Head A sampling
(1)
Head B sampling (2)
(1)When the trigger synchronization is OFF, head B

samples when it receives trigger B input.
(2)When the trigger synchronization is ON, head B
samples when it receives trigger A input. Trigger B
input is ignored.
Note
• This is only available when the trigger mode is "EXT
trigger".
• If the trigger synchronization "ON" is selected when two
heads are not used, a system error occurs. Set the
trigger synchronization to "OFF".

Head Settings
Head A / Head B Settings Measurement range

(Setting the head operating conditions)
Narrowing the upper, lower, left and right directions (X
In "Head A" and "Head B" settings, the measurement area direction, Y direction) of the measurement range will
can be narrowed to make the measurement time shorter make the measurement time shorter.
(faster), or non-measured area in the measurement Confirm the measurement time with the actual unit.
image can be determined.
5 Also, when measuring a target that transmits light such

as a transparent object, a detection threshold value
Setting range
X: FULL (all) / 1 level reduction / ..... / 12 levels reduction
(detection sensitivity) can be set. Y: FULL (all) / 1 level reduction / ..... / 12 levels reduction
X setting example (Setting value FULL, 6 levels

reduction, 12 levels reduction)
(1)
(2)
Y setting example (Setting value FULL, 1 level reduction,
12 levels reduction)
(3)
Setting items
(1)Measurement range (page 5-6)
Narrowing the X direction or Y direction of the
measurement range will make the measurement time
shorter (faster).
1 Select "X" under "Head A" of "HEAD
(2)Mask setting (page 5-7)
Masking a certain part of measurement range will A pull-down menu appears.
allow the unit to ignore certain portions of the image
during measurement. Also, canceling the effect of
stray light will achieve a stable measurement.
(3)Detection threshold value (Threshold) (page 5-9)
This function sets the threshold value of whether to
detect the edge or not.
This is used to measure a transparent or translucent
object.
Reference
• Select "Y" to make the area setting for the Y
direction.
• Select "Head B" to make the head B setting.

Head Settings
2 Press the [U] / [V] key to select from

the pull-down menu and press the
Mask setting
Masking a certain part of measurement area will allow the
[ENTER] key. unit to ignore certain portions of the image during
The setting is confirmed and the the measurement measurement. Also, canceling the effect of stray light
range display is updated. unnecessary for measurement will achieve a more stable
measurement.

3 Press the [ESCAPE] key to exit. Setting items and range
Shape : Rectangle / Triangle
Number : 5 or less (Individual setting possible for Head A
and Head B)
Make mask settings
1 Select "Mask1" under "Head A" of

"HEADsetting" and press the [ENTER]
key.
The "Mask setting" dialog appears.
Reference
• 1 shape can be set for mask 1 to 5 respectively.
2 Select the shape in the area and press

the [ENTER] key.
The drawing dialog appears.
Depending on the selected shape of the area, the
number of coordinates to be set varies.

Head Settings
3 Select the "Drawing" button and press

the [ENTER] key.
Clear mask settings
The ares of the selected shape (rectangle or 1 Select mask 1 to 5 to clear under "Head
A" of "HEADsetting".
triangle) appears.
Displayed mask area

These areas are ignored.
2 Press the [ZERO] key.
5
The dialog appears.
3 Select "Yes" and press the [ENTER] key.

This deletes the selected mask.
When "No" or [ESCAPE] key is pressed, the mask area
is not deleted and the original display is restored.
Restricted items on a mask area

Set the mask area so that the only 2 mask edges exist in the
longitudinal direction (on the vertical line against X axis).
Reference • When only 2 mask edges exist in the longitudinal direction,
When entering values for the drawing area, see the mask areas can be used as set.
"Drawing an Area by Entering Values" (page 2-13).

cursor to the desired corner, and then Mask edge
Mask area
move up, down, left and right.

5 To complete drawing, press the

[ENTER] key.
The area cursor disappears and the cursor returns • When 3 or more mask edges exist
to the "Drawing" button. The third and the subsequent areas counting from plus
to minus direction of the Y axis will be invalid, or the

drawing.
area will be enlarged to include the mask area from
above to reduce the number of edges.
Mask edge
The "Drawing" dialog closes.
To make changes after finishing drawing, perform step 3 Mask area

and after.
The area containing
To change the area, clear the mask settings, and then the third and fourth
mask edges is invalid.
make the setting again.
The mask area is enlarged

so the number of mask
edges is reduced to 2.
Note
• The invalid area remains displayed on the mask display screen.
• The added area is not displayed on the mask display screen.

Head Settings
When measuring an object that transmits light

Detection threshold value (Threshold)
Setting the "Threshold" higher will allow the edge of the
Set this value when measuring a transparent or light-transmitting object to be recognized.
translucent object which transmits light.
The threshold value of whether to recognize the
boundary of a bright or dark area as the edge or not can
be set.
If the translucent part is set as a dark area, make
"Threshold" bigger.
5
If the translucent part is set as a bright area, make X X’

"Threshold" smaller.
Reference
• This can be set for head A and head B respectively.
• Using the TM-Navigator support software allows the
detection threshold value to be set while confirming the
Light intensity
light intensity data.
Threshold
Setting items and range
Detection threshold value: 10 to 99% (Default 50%, X-X’ light intensity distribution
setting available by 1%) When measuring an object that
transmits light, more light
intensity is obtained, compared
When measuring an object that does not transmit to an opaque object.
light
1 Select "Threshold" under "Head A" of

"HEADsetting" and press the [ENTER]
key.
X X’ 2 Enter a Value. "Entering a Value" (page 2-7)

Reference
Light intensity
Threshold
X-X’ light intensity distribution

The part receiving light intensity The part receiving light intensity
beyond the threshold value is less than the threshold value is
recognized as a bright area. recognized as a dark area.

Master Registration
Master Registration (Registering a target to be used as a measurement standard)
Measure the object to be used as the measurement

standard (master target). The measured image is
Image Registration
registered. This is called "Master reg". The registered
master image becomes the standard for measurement 1 Display the master registration screen.
settings and position correction.
Example: When the master registration is made for head
5 A
2 Set the target to set as a master and

press the [TRG / HOLD] key.
Each time the [TRG / HOLD] is pressed, the display
Example: When the master registration is made for head image is updated.
A and B respectively
When 2 heads are connected, the left image of head

A and right image of head B are updated
respectively.
Settings that require a master registration
A master registration is required for using the following
settings.
"Head Alignment" (page 5-11)
"Position Correction" (page 5-14)
"Search" (page 5-66)
Reference
To switch the setting for head A and head B, press
the [SCREEN] key.

Master Registration
3 Use the [U] / [V] key to move the

cursor to the register button for the
Head Alignment
This corrects for angle due to head placement or the
image that will be registered. measurement target.
Select among head A, head B and both heads. The approximation line is calculated from the image edge
within the set area (Range 1, Range 2). A rotation
4 Press the [ENTER] key. correction is performed so that the X axis standard or Y
axis standard of the head and the calculated
approximation line become parallel or vertical. The 5
measurement center is regarded as the rotation center.

Reference
• Perform the master registration beforehand.
• Make the measurement setting, etc. for the image after
Reference head alignment is done.
• If the image has not been imported by pressing the • The image after head alignment is performed is used
[TRG / HOLD] key, or the image cannot be on the measurement setting screen.
recognized, the following message appears. • If variation occurs when positioning the measurement
Import the image again. target, use position correction.
"Position Correction" (page 5-14)
5 Press the [ENTER] key to close the

window.
6 Press the [ESCAPE] key to finish the

master registration.
Reference
Setting items and setting range:
On the master registration screen, the screen can be
enlarged or reduced, and the enlarged display Item Setting range
position can be changed according to Display Correction ON / OFF
Setting Menu (page 3-6).
Correction direction Horizontal / Vertical
Range 1 Entire measurement range
Range 2 Entire measurement range
Setting content:
Correction direction: Horizontal
The first edge is detected from bottom up in the set
correction range (Range 1 / Range 2). (The second
and subsequent edges are ignored.)
Corrects so that the straight line obtained from the
edge can be horizontal.
Correction direction: Vertical
The first edge is detected from left to right in the set
correction range (Range 1 / Range 2). (The second
and subsequent edges are ignored.)
Corrects so that the straight line obtained from the
edge can be vertical.

Master Registration
Range 1 / Range 2
Rotate and correct so that the approximation line 2 Place the cursor on the Head alignment
setting and press the [ENTER] key.
calculated from the edge information within the
range 1 and range 2 becomes parallel or A pull-down menu appears.
perpendicular to the X axis standard or Y axis
standard of the head.
Can be used with range 1 only as well.
5 Note
3 Press the [U] / [V] key to select [ON]
• When the head alignment area is set, the image before
4 Similarly,
head alignment is displayed.
• When the head alignment is ON, the data after head
place the cursor on the
alignment is done is displayed on the master image correction direction and select either
display screen. "Horizontal" or "Vertical".
• Setting the range larger enables more accurate head
alignment.
5 Make the drawing setting for "Range 1".
1 Adjust the cursor to "Head A" under
"Head Alignment" on "Master reg" and
Select either the "Horizontal" or "Vertical" edge area
selected for correction direction.
press the [ENTER] key. "Drawing an Area by Entering Values" (page 2-13)
The master-registered image on head A and the
setting screen are displayed. 6 Press the [ESCAPE] key after the
"Range 1" setting is complete.
Reference
Select "Head B" to make the head B setting. Range 1 for head alignment has been registered.
Reference
The range setting has been made, however, the
correction angle has not yet been registered.
7 Make the "Range 2" setting as

necessary.
Reference
• To delete the range 2, select "Range 2" and press the
[ZERO] key.
• The correction angle is displayed based on the
straight line obtained from the set range 1 / range 2.
Head alignment setting

Correction direction
Range 1
Range 2
Calculated angle
Registration
Registered head
alignment angle

Master Registration
8 Place the cursor on "Registration" and

press the [ENTER] key.
The angle obtained until step 7 is determined as a
correction angle.
The angle calculated from the

range 1 / range 2 is
displayed. 5

The angle registered for head
alignment is displayed.
Reference
The following message will be displayed if the
correction angle range is exceeded. Check the
setting condition of the head and target, and the
range setting.
Correction range: -20° to 20° (Default: 0.00°)
9 Press the [ESCAPE] key to return to the

original display.

Position Correction
Position Correction (Correcting the position and angle of the target)
If there is position change and no position correction

Operation Overview of Position Correction
If there is position change in the target position, correct
This function calculates the difference in position of measurements are not be possible because the
target against the master image in the controller and measurement area will be out of the desired position.
corrects the difference. Using this function, stable
measurement can be achieved even if there are position The measurement area
changes or angle changes when positioning the target. remains at the same position
5 Reference
• A master registration is required before position
as the one set earlier.
correction.
• The measurement time and trigger interval will increase
when position correction is performed.
• The position of the measurement area is corrected on
the measurement screen display. The display of the
measured image is not corrected. Master registration Target
• If position correction fails, the measurement alarm will image (after position change)
be activated. Position correction failure can be
confirmed by the INVALID output.
"Output terminal block" (page 8-3)
If there is position change followed by position
When there is no position change correction
When there is no position change against the master The difference between the master image and the current
image, the position of the measurement area matches the measured image is calculated. The measurement area is
master image. Therefore, correct measurements are corrected by the amount of change and a measurement
possible with or without position correction. is taken.
(2) The measurement area is corrected
according to the amount of position
change calculated for (1).
Measurement area
Target
(same position as of the (1) The difference between the
master registration image) master image and the current
measured image is calculated.

Position Correction
Edge Correction
Types of Position Correction
This corrects position changes using the edge
There are two types of position correction: "Pattern information (Bright and dark areas of the image) of the
correction" which uses a shape of the measurement target. Position change along the X-axis and Y-axis or
image and "Edge correction" which uses an edge of the position change of θ direction (tilt direction) can be
target. corrected. Angle (Theta) correction corrects so that the
"About Edge" (page 5-37) specified edge becomes horizontal or vertical.
Pattern Correction
The edge correction can be processed faster than the
pattern correction. 5
This corrects the position using the shape of the target. "Edge Correction" (page 5-19)

Position change along the X-axis and Y-axis or angle
changes can be corrected. Unlike "θ" of "Edge Example: X Correction
correction", this can correct for tilts other than horizontal
and vertical tilts about an axis of rotation.
Complicated shapes that cannot be specified with the Measurement area
edge correction can be corrected.
Because this requires a great deal of internal calculation
compared to the edge correction, the trigger interval and
Master image
measurement time will be longer.
"Pattern Correction" (page 5-16)
Example: Pattern correction
Measurement
Position change image
Measurement area in the X axis
Correction
Measurement
image
Master image

Position Correction
Setting range: 0 to 99% (Default: 70%)

Pattern Correction (Correcting position by shape) (7)Correlation value
The pattern correction adjusts the position of measured The image is imported by pressing the [TRG / HOLD]
shape by detecting (searching) the portion of the master key, and the correlation value with the current
profile with which they share the greatest similarity. measured image is displayed.
Position change along the X-axis and Y-axis or a change "Testing the position correction" (page 5-19)
in angle can be corrected.
5 Setting items and range

Names and operation overview for pattern
correction
(1) Names
(2)
(3) Search area
Pattern area Measurement
(4)
area
(5) Correction
(6)
(7)
(1)Correction mode
Measurement image
Select "Pattern corr".
(2)Pattern area Master image
The image in the pattern area set on the master image
becomes the standard image for search.
(3)Search area
Operation description
The area in which the pattern image is searched for.
(4)Search speed 1. Search the set pattern area from the measured image
Set the search speed. Setting the value larger will in the search area. Search is performed along X axis,
enable the elaborate search, which results in more Y axis and tilt direction.
accurate correction. Instead, the trigger interval and 2. If an image matching the profile area to a degree
measurement time will become longer. equal to or greater than the "Correlation" is found, the
Setting range: 1 (fast) to 5 (slow) (Default: 3) position correction is judged as successful and the
(5)Search angle measurement area is corrected and measured.
Set the upper limit of correction angle against the tilt Reference
direction. Search is not possible if the target tilts with The search area and pattern area are not displayed on
larger degree than the setting angle. Because setting the measurement screen.
the angle larger increases the internal calculation, the
trigger interval and measurement time will be longer.
Setting range: ±0, ±5, ±10, ±20, ±30, ±45, ±90,
±180 (°) (Default: ±10°)
(6)Correlation
This value represents the degree of similarity between
the master-registered image and measured image in
the pattern area.
Measurement is performed only when the correction
result exceeds the correlation value (When matching
degree is high).
Increasing the setting value results in more accurate
pattern correction. At the same time, this increases the
chance of failure.
Use the default value for most cases.

Position Correction
When correction is made/not made properly Position correction operates after search only when the
Set the pattern area to be a distinctive region of the pattern area fits in the search area.
master image. Position correction may not operate In the case below, the pattern area exceeds the search
correctly if there are multiple similar shapes in the area. Thus, position correction is not performed.
measured image. If the master image has no distinctive
regions, use edge correction.
• Good example:
The set shape does not appear in other parts of the 5
pattern area and thus is suitable for position correction.

• Bad example:
The set pattern appear in other parts of the pattern area
and thus position correction may not operate correctly.
Pattern area: right angle part at the upper part of the
illustration below
Measured image: Position correction will not operate

correctly because there are
multiple similar shapes to the set
pattern area.

Position Correction
Pattern correction setting procedure 4 Set "Pattern area" and "Search area".
Reference "Drawing an Area by Entering Values" (page 2-
Perform the master registration beforehand for position 13)
correction.
5 Set "Search speed".
5 1
Place the cursor on the "Pos corr" and Set whether to increase the search speed (fast) or
press the [ENTER] key. increase the correction accuracy (slow).
The current setting state is displayed.
6 Set "Search angle".
Set the angle range for searching the registered

pattern. Restricting the search angle will shorten the
measurement time.
7 Set "Correlation".
Set the threshold value of the shape matching
degree to give the measurement error when a shape
that differs from the master image is obtained.
Set the value larger even if a slight difference should
be judged as a measurement error. Use the default
value for most cases.
2 Place the cursor on "Head A" and 8 Press the [ESCAPE] key to return to the
original display.
Pos corr - Head A screen appears.
Reference
Select "Head B" to make the head B setting.
3 Place the cursor on "Pattern corr" in

the correction mode and press the
[ENTER] key.
The search area (dotted line window) and pattern
area (solid line window) are displayed on the screen.

Position Correction
Testing the position correction

Edge Correction (Correcting position by edge)
Check the position correction operation.
Within the search area, change the position of the This function calculates the amount of position change of the
measurement target from the position where it was actual target against the measurement position set for the
master-registered and check if the position corrections master image. Correct the measurement position to measure.
follows correctly. Corrections for X-axis, Y-axis and θ directions are made.
1 Make the settings for each position

correction.
Overview of correction operation
5
Names

Keep "Pos corr - Head A (Head B)" screen of the
pattern correction step 7 and then perform the next
Measurement area
step.
2 Change the target position within the

search area and press the [TRG /
Master image
X axis correction
HOLD] key. area
The actual measurement value of correlation can be
obtained.
Each time the [TRG / HOLD] key is pressed, the
obtained image is changed and the actual Measurement
measurement value (%) of correlation is updated Position change image
in the X axis
and displayed.
If the position correction cannot be performed
correctly, change the settings.
Operation description
1. Identify the edge from the image of the measured target.
2. Compare the specified edge for the master image with
the edge obtained at step 1. and then calculate the
change in position according to the edge correction
items (X direction, Y direction, θ direction).
3. Move or rotate the measurement area according to the
contents set for the edge correction items.
Reference
• Which edge is recognized within the area and what correction
is made are determined by "Edge correction items".
• To make correction for tilt direction, set the edge
correction item to "θ" or "Centerline".
Correlation value The tilt correction angle for "θ" or "Centerline" is from -20° to 20°.
• The edge calculation method is determined based on
the type of corrections.
When "X" is selected: Average, Left, Right, θ, Centerline

original display.
When "Y" is selected: Average, Peak, Bottom, θ, Centerline
• The edge is not displayed on the measurement screen.
• Make the setting so that the standard shape for position correction
of the measured image can fit in "Position correction range" set for
the master image. If the standard shape exceeds the position
correction range, the measurement value alarm will be activated.
Example of position Correction

Detailed correction contents for X correction, Y correction, X→Y
correction and Y→X correction are explained as follows.

Position Correction
Operation example 1: Correcting the position in the Operation example 2: Correcting the position in the
X axis direction (X correction) Y axis direction (Y correction)
Detect the edge in the X direction according to the Detect the edge in the Y direction according to the
contents of "Edge correction items" and make correction. contents of "Edge correction items" and make correction.
Use this when the measurement target has a position Use this when the measurement target has a position
change in the X direction compared to the master image. change in the Y direction compared to the master image.
1 Set the position correction area for the master image. 1 Set the position correction area for the master image.
5
Measurement area
Y axis
X axis correction area
correction area
Measurement area
Master image
Master image
2 Calculate the amount of position change of the target in the X direction. 2 Calculate the amount of position change of the target in the Y direction.
Measurement image
Measurement image
Position change
in the Y axis direction
Position change
in the X axis
direction
3 Correct the measurement area in the X direction

by the amount obtained at step 2.
3 Correct the measurement area in the Y direction
by the amount obtained at step 2.
Measurement area
after correction
Y axis
correction
X axis
correction
4 Perform measurement. 4 Perform measurement.

Position Correction
Operation example 3: Correcting the position in the

X Y axis direction (X→Y correction) 4 Calculate the change in position in the
Y direction in the Y correction area.
Make the X correction before Y correction.
Use this when the measurement target has position changes
in the X direction and Y direction against the master image.
Amount of change
1
Set the position correction area for the master image.
5
Y axis correction area

Measurement
area
Master image 5 Correct the measurement area by the

amount obtained at step 4.
2 Calculate the change in position of the

target in the X direction. Y axis correction
Measurement image
Position change
6 Perform measurement.
in the X axis direction
3 Correct the Y correction area and measurement

area by the amount obtained at step 2.
X axis correction
Image after X axis

correction

Position Correction
Operation example 4: Correcting the position in the

X Y axis direction (Y→X correction) 4 Calculate the amount of position change
in the X direction in the X correction area.
Make the Y correction before X correction.
Use this when the measurement target has position changes
in the Y direction and X direction against the master image.
1 Set the position correction area for the master image.

5
Y axis
correction area
Change in position
Master image in the X axis direction
Measurement area
5 Correct the measurement area by the

2 Calculate the amount of position

change in the Y direction.
Change in position
X axis correction
Measurement
image
3 Correct the X correction area and measurement

area by the amount obtained at step 2.
Image after Y axis correction
Y axis
correction

Position Correction
Operation example 5: Correcting the angle (Y

correction, correction item θ) 4 Calculate the change in angle of the
target against the horizontal surface.
Correct the position in the Y direction. At the same time,
correct the angle (horizontally for Y correction) (vertically
for X correction).
Use this when there is a tilt of the target.
change in angle
1 Set the position correction area for the master image. correction
5

Y axis correction-θ area
Measurement area
Measurement
step
5 Rotate the measurement area according

to the angle change obtained at step 4.
Master image
2 Calculate the amount of change in the Y direction. Measurement step
Measurement image
Angle correction
Change in position
3 Correct the measurement area by the

Y axis
correction

Position Correction
Edge correction item (X correction) details

X correction (Correcting using the edge in the X direction)
Set the edge detection method and correction method for
Detect the target's edge in the X direction and calculate position correction.
the amount of position change to correct. Set the method The first edge seen from the set detection direction is set
of edge recognition and correction on the "Edge as a target.
correction items".
1. Average
5 Setting items and range The average value of X coordinate of edge surrounded
by the area is used as a position correction standard.
(1) • Edge recognized as set

(2)
(3)
(4)
X area 1
Recognized
edge
Master image
(1)Correction mode
Set either to make correction for the edge in the X
direction or Y direction. This can be used in
combination of X direction and Y direction. • Overview of correction operation
This section explains X correction.
Setting range: X corr only, Y corr only,
X→Y corr, Y→X corr
Measurement image
(2)Edge correction item (X correction)

Set which edge is selected in the image obtained in
the area and how it is corrected.
Setting range: Average, Left, Right, θ, Centerline
"Edge correction item (X correction) details"
(page 5-24) Master image Change in position
(3)Detection direction (X correction)
Set the direction for detecting the edge for the
measured image. • Setting items and range
The edge which appears first when seen from the set
Item Setting range
detection direction is used as a correction standard.
Setting range: L → R, R → L Detection direction L→R/R→L
"Detection direction (X correction)" (page 5-28) X area 1 Rectangle area using the
entire screen range
(4)Area (X correction) X area 2 Disabled
Set the edge detection range.
Setting range: Rectangle area of the entire screen
range

Position Correction
2. Left 3. Right
The edge present on the most left side among the The edge present on the most right side among the
edges surrounded by the area is used as a correction edges surrounded by the area is used as a correction
standard. standard.
• Edge recognized as set • Edge recognized as set
5
X area 1 X area 1

Master image Master image
Recognized Recognized
edge edge
• Overview of correction operation • Overview of correction operation
Measurement
image Measurement
image
Change in position Change in position

in the X axis direction Master image Master image in the X axis direction
• Setting items and range • Setting items and range

Item Setting range Item Setting range
Detection direction L→R/R→L Detection direction L→R/R→L
X area 1 Rectangle area using the X area 1 Rectangle area using the
entire screen range entire screen range
X area 2 Disabled X area 2 Disabled

Position Correction
4. θ (theta) • Rotation center of θ correction

Calculate the approximation line based on the edge The rotation center for θ correction can be obtained
surrounded by the area and use the angle against Y at the intersection of the straight line perpendicular
axis as a correction standard. Correct both the angle to the Y axis passing through the Y center point of X
and X position correction at the same time. area 1 with the approximation line.
There are 2 calculation methods for approximation
line: Single calculation at X area 1 and 2-point Measuring with X area 1 only
5 calculation both at X area 1 and X area 2.

When calculating at 2 areas, combine each edge Approximate line
information and calculate 1 approximation line.
Rotation center
The rotation center for θ correction is the intersection of the of θ correction
straight line perpendicular to the Y axis passing through
the Y center point of X area 1 with the approximation line.
Measurement image
• Edge recognized as set
Example: When setting the detection direction to
"L → R"
X area 1
Master image
Recognized
edge Measuring with X area 1 / X area 2
Approximate line
Rotation center
of θ correction
X area 1
X area 1
Measurement
• Overview of correction operation image
X area 2
Measurement image
X position
• Setting items and range

X area 1 Item Setting range
Angle change Detection direction L→ R / R → L
Change in
position in the
X area 1 Rectangle area using the
X axis direction entire screen range
entire screen range
For measurement image and master image, compare
the position of approximation line obtained from the
edge information in the X area with the position of the
intersection of the straight line perpendicular to the Y
axis passing through the Y center point in X area 1.
Then, make correction in the X direction.
Next, make correction so the angle of the
approximation line becomes parallel to the Y axis
when the Y axis is set as standard.

Position Correction
5. Centerline • Rotation center of θ correction

Calculate 2 approximation lines both from right and left The rotation center for θ correction can be obtained
edges and use the centerline of 2 line segments in the at the intersection of the straight line perpendicular
area as a correction standard. Correct both the angle to the Y axis passing through the Y center point of X
and X position correction at the same time. area 1 with the approximation line.
Calculate the approximation line based on the edge
information obtained at X area 1.
5
Measurement image
The rotation center for θ correction is the intersection
of the straight line perpendicular to the Y axis passing Rotation center
through the Y center point of X area 1 with the of θ correction

approximation line. X area 1
Master image
Recognized
X area 1
edge
Note
Make the setting so the area includes 2 edges:
Bright → Dark, Dark → Bright.
Good example
Master image
• Overview of correction operation X area 1
Angle change Measurement image
X area 1
Bad example
Master image
Change in position X position - average
X area 1
Compare the X position - average of measured image

with X position - average of master image, and then
make correction in the X direction.
Next, calculate the tilt of the approximation line with
the Y axis set as standard. • Setting items and range
Make correction so the angle becomes perpendicular Item Setting range
to the X axis.
Detection direction Disabled
entire screen range
X area 2 Disabled

Position Correction
Detection direction (X correction) Setting the X correction

Set the edge detection direction. Reference
When there are multiple edges are present on the same Y Perform the master registration beforehand for position
coordinate, use the edge that first appears on each correction.
coordinate, seen from the detection direction.
• Detection direction: Left → Right 1 Place the cursor on the "Pos corr" and
5 The current setting state is displayed.
Detection direction Edge that appears first

when detected from
left to right
As the arrow illustrated above, detect the edge from

minus to plus direction of the X axis.
Make correction according to the edge correction items
2 Place the cursor on "Head A" and
based on the edge obtained here.
The master-registered image is displayed on Pos
• Detection direction: Right → Left corr - Head A screen.
Detection direction
Edge that appears first

when detected from
right to left
Reference
Select "Head B" to make the head B setting.
plus to minus direction of the X axis.

Position Correction
3 Select
mode".
"X corr only" in "Correction Testing the position correction
Within the X area 1, change the position of the
measurement target from the position where it was
master-registered and check if the position corrections
follows correctly.

correction.
5

Keep "Pos corr - Head A (Head B)" screen of the X
correction step 5 and then perform the next step.
2 Change the target position within X

area 1 and press the [TRG / HOLD] key.
The evaluation result display can be obtained.
4 Set "Edge correction items" and

"Detection direction".
obtained image is changed and the evaluation result
display "OK/NG" is updated and displayed.
"Edge correction item (X correction) details" correctly, change the settings.
(page 5-24)
"Detection direction (X correction)" (page 5-28)
5 Set the area for correction detection.

For drawing method,
"Drawing an Area by Entering Values" (page 2-
13) see .

original display.
Evaluation result display

original display.

Position Correction
Edge correction item (Y correction) details

Y correction (Correcting using the edge in the Y direction)
Set the edge detection method and correction method for
Detect the target's edge in the Y direction and calculate position correction.
the amount of change in position to correct. Set the
method of edge recognition and correction on the "Edge 1. Average
correction items". The average value of Y coordinate of edge surrounded
by the area is used as a position correction standard.

(1)
Y area 1
Recognized edge
(2)
(3)
(4)
Master image
(1)Correction mode
Set either to make correction for the edge in the X
direction or Y direction. This can be used in • Overview of correction operation
combination of X direction and Y direction.
This section explains Y correction.
Setting range: X corr only, Y corr only,
Measurement image
X→Y corr, Y→X corr
(2)Edge correction item (Y correction) Change in

position in the
Set which edge is selected in the image obtained in Y axis direction
the area and how it is corrected.
Setting range: Average, Peak, Bottom, θ, Centerline
"Edge correction item (Y correction) details" Master image
(page 5-30)
(3)Detection direction (Y correction)

Set the direction for detecting the edge for the
measured image.
The edge which appears first when seen from the set • Setting items and range
detection direction is used as a correction standard. Item Setting range
Setting range: U → D, D → U
Detection direction U→D/D→U
"Detection direction (Y correction)" (page 5-34)
Y area 1 User set inspection window
(4)Area (Y correction) Y area 2 Disabled
Set the edge detection range.
Setting range: Rectangle area of the entire screen
range

Position Correction
2. Peak 3. Bottom
The edge present on the most upper side among the The edge present on the lowest side among the edges
edges surrounded by the area is used as a correction surrounded by the area is used as a correction
standard. standard.
• Edge recognized as set • Edge recognized as set

Y area 1 Recognized Master image
edge
Recognized
edge Y area 1
Master image
• Overview of correction operation • Overview of correction operation
Change in
Master image
position in the
Y axis direction
Measurement Measurement
image image
Change in
position in the
Y axis direction
Master image
• Setting items and range • Setting items and range

Item Setting range Item Setting range
Detection direction U→D/D→U Detection direction U→D/D→U
Y area 1 Rectangle area using the Y area 1 Rectangle area using the
entire screen range entire screen range
Y area 2 Disabled Y area 2 Disabled

Position Correction
4. θ (theta) • Rotation center of θ correction

Calculate the approximation line based on the edge The rotation center for θ correction can be obtained
surrounded by the area and use the angle against the at the intersection of the straight line perpendicular
X axis as a correction standard. Correct both the angle to the X axis passing through the X center point of Y
and Y position correction at the same time. area 1 with the approximation line.
There are 2 calculation methods for approximation
line: Single calculation at Y area 1 and 2-point Measuring with Y area 1 only
5 calculation both at Y area 1 and Y area 2.

When calculating at 2 areas, combine each edge
information and calculate 1 approximation line.
The rotation center for θ correction is the intersection of the Rotation center
straight line perpendicular to the X axis passing through of θ correction
Y area 1
the X center point of Y area 1 with the approximation line.
Approximate line
Recognized
edge Measurement image
Master image
Measuring with Y area 1 / Y area 2
Rotation center
Y area 1
of θ correction Y area 1
Y area 2
• Overview of correction operation
Change in Approximate line

position in the
Y axis direction
Measurement image

Item Setting range
Measurement image
Y position
Detection direction U→D/D→U
Angle Y area 1 Y area 1 Rectangle area using the
change entire screen range
Y area 2 Rectangle area using the
For measurement image and master image, compare entire screen range
the position of approximation line obtained from the
edge information in the Y area with the position of the
intersection of the straight line perpendicular to the X
axis passing through the X center point in Y area 1.
Then, make correction in the Y direction.
Next, make correction so the angle of the
approximation line becomes parallel to the X axis
when the X axis is set as standard.

Position Correction
5. Centerline • Rotation center of θ correction

Calculate 2 approximation lines both from upper and The rotation center for θ correction can be obtained
lower edges and use the centerline of 2 line segments at the intersection of the straight line perpendicular
in the area as a correction standard. Correct both the to the X axis passing through the X center point of Y
tilt direction and Y position correction at the same time. area 1 with the approximation line.
Calculate the approximation line based on the
information obtained at Y area 1.
The rotation center for θ correction is the intersection
of the straight line perpendicular to the X axis passing 5
through the X center point of Y area 1 with the

approximation line.
• Edge recognized as set Measurement

image
Rotation center
of θ correction
Y area 1 Y area 1
Master image
Note
Make the setting so the area includes 2 edges: Bright →
Dark, Dark → Bright.
Recognized
edge
Good example
Master image
• Overview of correction operation
Y position - average
Measurement
image Change in position in
Y area 1
the Y axis direction
Bad example
Angle
change
Y area 1
Y area 1
Master image

Item Setting range
Detection direction Disabled
Y area 1 Rectangle area using the
entire screen range
Y area 2 Disabled

Position Correction
Detection direction (Y correction) Setting the Y correction

Set the edge detection direction. Reference
When there are multiple edges present on the same X Perform the master registration beforehand for position
coordinate, use the edge that first appears on each correction.
• Detection direction: Up → Down
1 Place the cursor on the "Pos corr" and
5 Detection direction The current setting state is displayed.

when detected from plus
to minus of the Y axis

plus to minus direction of the Y axis.
based on the edge obtained here. 2 Place the cursor on "Head A" and
• Detection direction: Down → Up The master-registered image is displayed on
position correction - head A screen.
when detected from minus
to plus of the Y axis
Detection
direction
As the arrow illustrated above, detect the edge from Reference
minus to plus direction of the Y axis. • Select "Head B" to make the head B setting.

Position Correction
3 Select
mode".
"Y corr only" in "Correction Testing the position correction
Within Y area 1, change the position of the measurement
target from the position where it was master-registered
and check if the position corrections follows correctly.

correction.
Keep "Pos corr - Head A (Head B)" screen of the Y
5

correction step 5 and then perform the next step.
2 Change the target position within Y

area 1 and press the [TRG / HOLD] key.
The evaluation result display can be obtained.
4 Set "Edge correction items" and

"Detection direction".
obtained image is changed and the evaluation result
display "OK/NG" is updated and displayed.
"Edge correction item (Y correction) details" correctly, change the settings.
(page 5-30)
"Detection direction (Y correction)" (page 5-34)
5 Set the area for correction detection.

For drawing method,
13) see .

original display.
Evaluation result display

original display.

Position Correction
X → Y correction (Correcting the position Y → X correction (Correcting the position

in the order of the X axis then the Y axis) in the order of the Y axis then the X axis)
Make the correction set for X correction, and then make Make the correction set for Y correction, and then make
the correction set for Y correction. the correction set for X correction.
Set both "X correction" and "Y correction" for "X → Y Set both "Y correction" and "X correction" for "Y → X
correction". correction".
5 "X correction" (page 5-24)
"Y correction" (page 5-30)
"X correction" (page 5-24)
"Y correction" (page 5-30)
Note Note
If "θ" or "Centerline" is set as the edge correction item for If "θ" or "Centerline" is set as the edge correction item for
both X correction and Y correction, the measurement both X correction and Y correction, the measurement
alarm will be activated. alarm will be activated.
Set "θ" or "Centerline" to either of them but not both. Set "θ" or "Centerline" to either of them but not both.
Setting items and range Setting items and range
1 Set "Correction mode" to "XY corr" on

the position correction screen.
1 Set "Correction mode" to "YX corr" on
the position correction screen.
2 Set for "X correction".

Set "Edge correction items", "Detection direction"
2 Set for "Y correction".
and "Area". and "Area".
3 Set for "Y correction".

3 Set for "X correction".
and "Area". and "Area".
For each setting details, see "X correction" and "Y For each setting details, see "X correction" and "Y
correction". correction".
Reference Reference
Check the position correction operation after setting the Check the position correction operation after setting the
position correction. position correction.
For details, see "Testing the position correction" (page 5- For details, see "Testing the position correction" (page 5-
35). 29).

Measurement Settings
Measurement Settings (Setting the measurement contents)
In the measurement settings, make the detailed settings

regarding measured contents, such as outer diameter
Basic Procedure for Measurement Settings
measurement, position measurement, etc.
1 Place the cursor on "Measure set".
The currently set measurement mode can be
Overview of Measurement Settings checked.
In measurement settings, measurement contents (measurement
types) can be set to OUT1 to OUT16 respectively. There are 16
measurement types. OUT1 to OUT16 set here correspond to the 5
numbers set for "OUT setting".

• Example 1: Measuring "Diameter" (cylinder diameter)
Measurement Edge
area

The measurement setting screen appears.
The current measurement type, area, measurement
Measurement result
(Diameter) target head and display magnification are
displayed.
• Example 2: Measuring "Distance" (distance from point Measurement area
Measurement target head
to straight line) Measurement type and display magnification
Measurement target 1
(Element specifying a point)
Vector
Y axis
distance
(Element specifying
a straight line)
X axis
distance
When specifying the point or line edges, "Elements" are Reference

set and used beforehand. OUT measurement and Elements
"Elements" (page 5-73) "Elements" must be set depending on the
Reference measurement mode set for OUT1 to 16.
• About Edge Set or detect the edges of the straight line, point,
The edge is a boundary of a bright area (unblocked part) circular arc, etc. in "Elements" and use for OUT1 to
and dark area (blocked part) used for measurement. 16. 16 Elements can be set (1 to 16) and reuse is
There are 2 types of edges: edge represented with possible for other OUT numbers.
straight line/curved line (measurement target 2 in "Elements" (page 5-73)
example 1 and example 2) or edge represented with "OUT settings" (page 5-82)
point (measurement target 1 in example 2).
With this unit, dimensions or positions of targets can be
calculated by detecting and specifying edges.

• Switching screens
4 Place the cursor on "Measurement
type" and press the [ENTER] key.
OUT1 to 16 setting screen
The pull-down menu for the measurement mode
appears.
Place the cursor on "Measurement type" to set and
5
Place the cursor Place the cursor on

on "OUT meas" the "Elements" and
and press the press the [ENTER]
[ENTER] key. key.
Element 1 to 16 setting screen
5 Place the cursor on the head used for

measurement and press the [ENTER]
key.
3 Place the cursor on OUT No. to set and

The pull-down menu for the head selection appears.
Place the cursor on the head to select and press the
[ENTER] key.
The OUT No. screen appears.
6 Set the area and conditions to match

the measurement type.
Reference
Some measurement types use the Elements. In this
case, set the Elements 1 to 16 after step 7.
"Elements" (page 5-73)

OUT No. selection display.
Reference
OUT No. selected here corresponds to the No. for
"OUT setting". 8 Press the [ESCAPE] key to return to the
original display.

Overview of Measurement types

There are 16 different measurement types.
Measurement type Measurement example

Diameter (page 5-43)
Measurement Measurement Measurement
This measures the outer area area area
diameter of a target.
Average outer diameter
5
(Average), maximum

diameter (Maximum) and
minimum diameter
(Minimum) can be result (Average) result (Maximum)
measured. Measurement
result (Minimum)
Y position (page 5-46)

The X axis of the head is Measurement area Measurement area Measurement area
used as a reference. The Measurement Measurement Measurement
height (Y coordinate) to the result (Average) result (Peak) result (Bottom)
edge is measured.
Average height (Average),
maximum height (Peak)
and minimum height
(Bottom) can be measured.
Step Height (page 5-48)

This measures the difference Measurement
area 2 (Average) Measurement
area 2 (Peak)
in height (difference in Y Measurement Measurement result
result
coordinate) between two
locations. The distance
between steps can be
measured in combination of
average height (Average), Measurement
area 1 (Average) Measurement
maximum height (Peak) and area 1 (Bottom)
minimum height (Bottom).
X position (page 5-50)
The Y axis of the head is Measurement area Measurement area Measurement area
used as a reference and
the edge position is
measured.
Average position (Average),
maximum position (Right)
and minimum position (Left)
can be measured. Measurement result Measurement result Measurement result
(Average) (Left) (Right)


Width (page 5-52)
This measures the difference in Measurement area 1
(Left)
Measurement
position (difference in X area 1 Measurement area 2
Measurement (Right)
coordinate) between two area 2
locations.
The width can be measured in
5 combination of average position
(Average), maximum position
(Left to Right) and minimum Measurement result Measurement result

position (Left to Right).
Distance (page 5-54)
Vector
This measures the Measurement Measurement Measurement target 2 Measurement target 1
distances (Vector, X-axis,Y- target 1 target 2
Vector
axis) that can be Y-axis Vector
calculated point to point,
Y-axis
point to straight line,
straight line to straight line, Measurement
etc. target 1
Y-axis X-axis
X-axis X-axis
Intersection distance
Measurement
(page 5-56) target 1
Vector
This measures the Measurement
Y-axis
distances between 2 target 2
intersection points (Vector,

X-axis,Y-axis) specified
using 3 lines. Measurement
target 3
X-axis
Angle (page 5-58)

This measures the angle Measurement
between 2 lines. target 2 result
result Measurement
target 2
Measurement
target 1
Measurement
target 1
Radius (page 5-60)

This measures radius Measurement
within the measurement Measurement result
Measurement result
area set by the arc. target 1


Roundness (page 5-62)
This measures the difference
between the maximum and
minimum value of radius of
an arc or circle.
Minimum value
of radius
5

Maximum value of radius
Coordinate (Element Pos)

Measurement result
(page 5-63) (Y coordinate) Measurement result Measurement
Measurement (Y coordinate) target 1
This measures coordinates target 1
such as an intersection
point of straight line and
circular arc, or center point
of circular arc, etc.
Measurement result
(X coordinate)
Measurement result
(X coordinate)
Area (page 5-65)

Measures the unblocked
This measures the area of a area (white part) in the
Measures the measurement area.
bright region or a dark blocked area
(black part) in the
region in the measurement measurement area.
area set with rectangle.
Measurement area
Search (page 5-66)

Y coordinate in the center
This searches for the most of search area
similar shape in the measured
images to the master profile
(pattern area), and measures
the angle of the measured (Target when measuring)
image with the center
X coordinate in the center
coordinate (X, Y) in the pattern of search area
area and the master image set Angle (Pattern area after search)
as standard.
Ring measurement (Ring meas)
Measurement
(page 5-68) Measurement result
area
This measures the average Measures the ring
value, maximum value and thickness along
the circumference
minimum value of difference
between the external
diameter and internal
diameter of a ring.


Pitch (page 5-70)
This measures the
average, maximum and Pitch Measurement Width Measurement Measurement
area Gap
area area
minimum pitch and gap.
5
Calculations (page 5-72) Calculations can be selected among addition, subtraction, average, maximum, and
Sets calculations between minimum.
measured values of
selected OUTs. specified
OUT numbers.
No setting (page 5-72) None
Set this when not
measuring. OUT2 through
OUT16 are initially set to
"No setting".

<When the width of the X direction is longer than the

Diameter
width of the Y direction>
This mode is used to measure the outer diameter of a
target. When the width of the X
According to the conditions of the measurement area set with direction is longer than the
Measurement
Measurement result width of the Y direction in
rectangle, measure the differences between the coordinate of area
bright→dark edge that appeared first and the coordinate of the measurement area, the
dark→bright edge that appeared last. Then, measure the
average value (Average), maximum outer diameter (Peak) and
edge is detected from
minus to plus direction of 5
the minimum outer diameter (Bottom) of those differences. the X axis.
Edge

detection Set this when the target is
Reference direction present perpendicular to
The alarm error will be activated in the following cases. the X axis as shown on the
• When there is no edge in the measurement area left.
• When there are not two edges : Bright → Dark, Dark → Bright.
• Measured content
When the width of the X direction is shorter than the
width of the Y direction
Average : Average value of differences of [Edge Y
(1) coordinate]
(2)
(3) Peak : Maximum value of differences of [Edge Y
(4) coordinate]
(5) Bottom : Minimum value of differences of [Edge Y
coordinate]
Reference
When the width of the X direction is longer than the width
of the Y direction, calculation is performed based on
[Edge X coordinate].
Item Setting range <Average> <Peak>
(1) Measurement type Select "Diameter". Measurement Measurement

area area
(2) Target head Head A / Head B
(3) Measurement Rectangle area using the
area entire screen range
(4) Measured content Average / Peak / Bottom
Measurement
(5) Tilt correction ON / OFF result Measurement
(Average) result
• Measurement area (Maximum)
Measurements are determined according to the shape
of measurement area. <Bottom>
<When the width of the X direction is shorter than the
Measurement
width of the Y direction> area
Edge detection When the width of the X

Measurement direction
area direction is shorter than the
Measurement
result width of the Y direction in
the measurement area, the
edge is detected from plus
Measurement
to minus direction of the Y result
axis. (Minimum)
Set this when the target is
present parallel to the X
axis as shown on the left.

• Tilt correction • The width between dark → bright edge and bright →
Calculate approximation lines from both edges forming dark edge cannot be measured.
the outer diameter and correct the measurement value
so the centerline of two straight lines becomes vertical
(or horizontal when measuring the outer diameter made
in the Y direction).
Even if the target is tilted, measurement is corrected.
5
(1)
Zoom in (2)
Measurement
area
When measuring the width between dark → bright and

bright → dark, use the measurement mode "Width".
"Width" (page 5-52)
• Do not include a chamfered part in the measurement

(1) Measured width when the tilt correction is not used area.
(2) Measured width when the tilt correction is used
Reference
Following are reminders for use.
• Set the area so 2 edges are included.
area result
area result
area area
When the measured content is set to "Average", the

chamfer may affect the measurement with the area set as
shown in the illustration.
Make sure not to include the end in the area.
Measurement is not possible only with bright → dark
edge. Make sure to include 2 edges in the area: bright → • Set the wide area.
dark, dark → bright.
area result Measurement Measurement
area result
Set widely in
Set widely in the arrow
the arrow direction.
direction.
Set the wide area. More edge information can be

obtained, and the resulting averaging effect will enable
more accurate measurement.

• Dimensions other than diameter cannot be measured.

Dimension to measure
When measuring dimensions other than diameter, use the

measurement type "Width".
"Width" (page 5-52)
1 Select OUT No. on the measurement

setting screen, and select "Diameter"
in "Measurement type".
"Basic Procedure for Measurement Settings"
(page 5-37)
2 Set the target head.

Select the head to use.
3 Set the measurement area so the

measured part can be included.
4 Set the measured content.

Select from the following items.
Average / Peak / Bottom
5 Set the tilt correction to ON or OFF.

<Bottom>
Y position
Measurement
This detects the edge in the Y axis direction in the area Measurement
measurement area set with rectangle. The measured result result
(Bottom)
can be selected among the average value (Average),
maximum value (Peak) and minimum value (Bottom) of all
Y coordinates (height) of the selected edge. The
5
measured value is the edge's Y coordinate with the X axis
set as a reference. The edge which appears first within the
area is detected according to the set detection direction.
Reference
The alarm error will be activated in the following cases. • Detection direction
• When there is no edge in the measurement area
Set the edge detection direction.
• When the edge parallel to the Y axis is measured
When there are multiple edges present on the same X
Setting items and range coordinate, use the edge that first appears on each
<Detection direction: Up → Down>
(1)
(2) Detection direction
As the arrow
(3) illustrated on the left,
(4)
(5) detect the edge from
plus to minus
direction of the Y axis.
Calculate the
measured content
Edge that appears first when
detected from plus to minus based on the edge
of the Y coordinate obtained here.
Item Setting range

<Detection direction: Down → Up>
(1) Measurement type Select "Height".
(2) Target head Head A / Head B Edge that appears first when
detected from minus to As the arrow
plus of the Y coordinate
(3) Measurement Rectangle area using the illustrated on the left,
area entire screen range detect the edge from
(4) Measured content Average / Peak / Bottom minus to plus
(5) Detection direction U→D/D→U
Calculate the
• Measured content measured content
Detection based on the edge
Average : Average value of [Edge Y coordinate] direction
Peak : Maximum value of [Edge Y coordinate] obtained here.
Bottom : Minimum value of [Edge Y coordinate]
Following are the examples when the detection direction
is set to "up → down".
<Average> <Peak>
area Measurement area Measurement
result result
(Average) (Peak)

Measurement example and measurement result

• The target edge can be calculated in combination of
the measured content and detection direction.
Measurement
area

Measurement
result Detection
(Bottom) direction
When measuring the bottom position of the above shape,

set the measurement content to "Bottom" and the
detection direction to "D → U".

setting screen, and select "Y position"
in "Measurement mode".
(page 5-37)

3 Set the measurement area so the


Average / Peak / Bottom
5 Set the detection direction.

U→D/D→U

• Detection direction 1 / Detection direction 2

Step Height (Height diff)
This measures the difference (measurement area 2 - Set for measurement area 1 and measurement area 2
measurement area 1) in "Y position" (Average, Peak, respectively.
Bottom) between two locations.
"Y position" (page 5-46) When there are multiple edges present on the same X
coordinate, use this to specify the edge to detect.
Reference
5 The alarm error will be activated in the following cases.

The edge which appears first on each coordinate is
used for measurement.
• When there is no edge in the area <Detection direction: Up → Down>
• When the edge parallel to the Y axis is measured

• When the alarm error is activated for one area or both areas As the arrow illustrated
Detection direction
on the left, detect the
edge from plus to
minus direction of the Y
axis.
(1) Calculate the
(2)
(3) measured content
(4) based on the edge
(5) Edge that appears first when
detected from plus to minus obtained here.
of the Y coordinate
(6)
(7)
(8)
<Detection direction: Down → Up>

detected from minus to plus As the arrow
of the Y coordinate illustrated on the left,
detect the edge from
Item Setting range minus to plus
(1) Measurement type Select "Height diff". direction of the Y axis.
(2) Target head Head A / Head B Calculate the
measured content
based on the edge
area 1 entire screen range Detection
direction obtained here.
(4) Measured content 1 Average / Peak / Bottom
(5) Detection direction 1 U→D/D→U
area 2 entire screen range
(7) Measured content 2 Average / Peak / Bottom
(8) Detection direction 2 U→D/D→U
• Measured content 1 / Measured content 2

Set for measurement area 1 and measurement area 2
respectively.
Average : Average value of [Edge Y coordinate]
Peak : Maximum value of [Edge Y coordinate]
Bottom : Minimum value of [Edge Y coordinate]
Reference
• Measurement area 1 and 2 are indicated with the blue
inspection window and pink inspection window
respectively.
• When the height measured in the measurement area 2 is
shorter than the height measured in the measurement area
1, the measurement result will show a negative value.

Measurement example and measurement result Reference

• Example 1 As shown below, dimensions including the edge that
cannot be specified in the measured content for "Step
Measurement area 1 Height" cannot be measured.
Measurement area 2 Measured content:
(Average) In this case, use "Intersection distance" (page 5-56).
Average
Measurement Detection direction:
Up → Down
5
result
Measurement area 2
Measured content:

Average
Detection direction:
Measurement area 1 Up → Down
(Average)
• Example 2 This point cannot be

specified for “Step Height”.
Measurement area 1
Measurement
area 2 Measured content:
Measurement
result (Average) Average
Down → Up 1 Select OUT No. on the measurement
setting screen, and select "Height diff"
Measurement area 2 in "Measurement type".
Measured content:
Average
(page 5-37)
Measurement Up → Down
area 1
(Average) 2 Set the target head.
• Example 3
3 Set the measurement area 1 so the
Measurement area 1
4 Set the measured content 1.

Measured content:
Measurement Measurement Bottom
area 2 result
(Peak) Detection direction: Select from the following items.
Down → Up Average / Peak / Bottom
Measurement area 2
Measured content: 5 Set the detection direction 1.
Peak
Detection direction: U→D/D→U
Measurement Up → Down
6 Set
area 1
(Bottom) the measurement area 2,
measurement area 2 and detection
direction 2.

Following are the examples when the detection direction

X position
is set to "R → L".
This detects the edge position in the X axis direction in <Average> <Left>
the measurement area set with rectangle. The measured
Measurement area Measurement area
result can be selected among the average value
(Average), minimum value (Left) and maximum value
(Right) of all X coordinates (position) of the selected
5 edge. The measured value is the edge's X coordinate

with the Y axis set as a reference.
The edge which appears first within the area is detected
according to the set detection direction. Measurement result Measurement result

(Average) (Left)
Reference
The alarm error will be activated in the following cases. <Right>
• When there is no edge in the area
• When the edge parallel to the X axis is measured Measurement area
(1)
(2)
(3) Measurement result
(4) (Right)
(5)
• Detection direction
When there are multiple edges present on the same Y
coordinate, use the edge that first appears on each
<Detection direction: Left → Right>

Item Setting range
(1) Measurement type Select "X position". As the arrow
(2) Target head Head A / Head B illustrated on the left,
(3) Measurement Rectangle area of the
minus to plus
direction of the X axis.
(4) Measured content Average/Left/Right Calculate the
(5) Detection direction L→R/R→L Detection measured content
direction Edge that appears first when
detected from minus to plus based on the edge
of the X axis obtained here.
Average : Average value of [Edge X coordinate]
Left : Minimum value of [Edge X coordinate]
Right : Maximum value of [Edge X coordinate]

<Detection direction: Right → Left>
Detection
setting screen, and select "X Position"
direction As the arrow
illustrated on the left, in "Measurement type".
detect the edge from "Basic Procedure for Measurement Settings"
plus to minus (page 5-37)
Calculate the
measured content
5
Edge that appears first when based on the edge
detected from plus to minus

3 Set
the measurement area so the

Measurement Measurement Average/Left/Right
result area

L→R/R→L
Detection
direction
When measuring the most left point of the above shape,

set the measurement content to "Left" and the detection
direction to "L → R".

• Detection direction 1 / Detection direction 2

Width
This measures the difference (measurement area 2 - Set for measurement area 1 and measurement area 2
measurement area 1) in "Position" (Average, Left, Right) respectively.
between two locations. When there are multiple edges present on the same Y
"X position" (page 5-50) coordinate, use the edge that first appears on each
Reference
5 The alarm error will be activated in the following cases. <Detection direction: Left → Right>
• When there is no edge in the area
• When the edge parallel to the X axis is measured detected from minus to plus As the arrow
of the X axis
• When the alarm error is activated for one area or both areas illustrated on the left,
minus to plus
Calculate the
(1) measured content
(2) Detection
(3) based on the edge
direction
(4) obtained here.
(5)
(6)
(7)
(8) <Detection direction: Right → Left>
Detection
direction As the arrow
illustrated on the left,
plus to minus
Item Selection range direction of the X axis.
(1) Measurement type Select "Width". Calculate the
(2) Target head Head A / Head B measured content
Edge that appears first when based on the edge
(3) Measurement Rectangle area of the detected from plus to minus
(4) Measured content 1 Average/Left/Right
(5) Detection direction 1 L→R/R→L Measurement example and measurement result
• Example 1
Measurement area 1
(7) Measured content 2 Average/Left/Right Measured content:
Measurement area 1
(8) Detection direction 2 L→R/R→L (Average) Average
Measurement area 2 Detection direction:
(Average)
• Measured content 1 / Measured content 2 Left → Right
Set for measurement area 1 and measurement area 2
respectively. Measurement area 2
Average: Average value of [Edge X coordinate] Measured content:
Left : Minimum value of [Edge X coordinate] Average
Right : Maximum value of [Edge X coordinate] Detection direction:
Right → Left
Reference
Measurement result
• Measurement area 1 and 2 are indicated with the blue
inspection window and pink inspection window
respectively.
• When the position measured in the measurement area 2
is smaller than the position measured in the
measurement area 1, the measurement result will show
minus value.

• Example 2 Reference
As shown below, dimensions including the edge that
Measurement Measurement Measurement area 1
area 1 cannot be specified in the measured content for "Width"
result Measured content:
(Average) cannot be measured.
Average
Measurement Detection direction: In this case, use "Intersection distance" (page 5-56).
area 2 Left → Right
(Average)
Measurement area 2
Measured content:
5
Average

Right → Left
• Example 3
This point cannot be specified
for “Width”.
Measurement area 1
Measured content:
Measurement
area 1 Average
(Average)
Measurement
area 2
Left → Right 1 Select OUT No. on the measurement
setting screen, and select "Width" in
(Average)
Measurement area 2 "Measurement type".
Measured content:
Average
(page 5-37)
Right → Left
Measurement result 2 Set the target head.
• Example 4
Measurement area 1

Measured content:
Measurement
area 2 Left
(Right) Detection direction: Select from the following items.
Measurement
area 1 Left → Right Average/Left/Right
(Left)
Measurement area 2
Measured content: 5 Set the detection direction 1.
Right
Detection direction: L→R/R→L
Right → Left
Measurement
result 6 Set the measurement area 2,
measurement area 2 and detection
direction 2.

• Measurement target 1 / Measurement target 2

Distance
Set Measurement target 1 / Measurement target 2 in the
This measures the distance (Vector) that can be Elements beforehand.
calculated in combination with 2 things: point and point, Calculated dimensions are determined according to the
point and straight line, straight line and straight line, etc. type of measurement target used.
and also measures the difference (X-axis, Y-axis) of the X Following are the combinations of measurement target
coordinate and Y coordinate of measurement target 2 and measured distance.
5 (finishing point) and measurement target 1 (starting

point).
Measurement
target 1
Measurement
target 2 Measured distance
Use the point or line edges which have been set in (starting point) (finishing point)
"Elements" beforehand. Line segment connecting

Point Point
2 points
Reference
• The alarm error will be activated if even one point used Straight Perpendicular line from
Point
line point to straight line
for measurement is out of measurement range.
Straight Perpendicular line from
Setting items and range Point
line point to straight line
Perpendicular line from the
Straight Straight middle point of Measurement
(1) line line target 1 to Measurement
(2) target 2
(3) Point : Arc edge (center point), Intersection,

Arbitrary pt
(4)
(5) Straight line : Line edge, Circum Ln edge, Centerline,
Ln between 2pt, Arbitrary line
Reference
• Measurement target 1 and 2 are indicated with blue
and pink respectively.
Item Setting range
(1) Measurement type Select "Distance". Measure using the point, line segment or perpendicular line
(2) Target head Head A / Head B obtained from the measurement target 1 / measurement target 2.
(3) Measurement Element 1 to 16 Vector: Length from the starting point to finishing
target 1 point of line segment
X-axis : X coordinate of finishing point - X coordinate
(4) Measurement Element 1 to 16
of starting point
target 2
Y-axis : Y coordinate of finishing point - Y coordinate
(5) Measured content Vector / X-axis / Y-axis of starting point
Measurement
target 2
Vector
Y-axis
Measurement
target 1
X-axis


• Example 1: Distance between point and point
1 Set the Elements.
Use 2 Elements for "Distance".
Vector Make the Elements or straight line using Element.
Measurement Measurement target 2 The Element modes to obtain the point and straight
target 1 (Arc edge) line are as follows.
(Arc edge) Finishing point
Point : Arc edge (center point),
Intersection, Arbitrary pt
Straight line : Line edge, Circum Ln edge,
Centerline, Ln between 2pt,
5
Arbitrary line

Starting point Y-axis 2 Select OUT No. on the measurement

setting screen, and select "Distance" in
X-axis
"Measurement type".
• Example 2: Distance between point and straight line
(page 5-37)

(Element specifying a point)
Finishing Select the head to use.

point
Vector
4 Set the measurement target 1 /
measurement target 2.
Y-axis
Select the Element number set as a measurement
Starting point target beforehand.
(Element specifying a
straight line) X-axis
Vector / X-axis / Y-axis
• Example 3: Distance between straight line and straight line
(Element specifying a straight line)
Starting
point
Vector
Y-axis
(Element specifying
a straight line)
X-axis
Finishing
point

• Measurement target 1 / Measurement target 2 /

Intersection distance
This measures the distances between 2 intersections Set 3 straight lines as measurement target 1, 2 and 3 in
(Vector, X-axis and Y-axis) that are made by specified 3 Elements.
straight lines set in Elements beforehand. (Note that the The Element modes to obtain the straight line are as
intersection of measurement target 1 and 2 is the starting follows.
point, and the intersection of measurement target 2 and 3 Line edge, Circum Ln edge, Centerline, Ln between
5 is the finishing point.)

Depending on the shape of target, this requires less
2pt, Arbitrary line
numbers of "Elements" than using the measurement type Reference
"Distance". • Measurement target 1, 2 and 3 are indicated with

The line segment obtained by setting the Elements is blue, pink and green respectively.
extended within the measurement range to detect the
intersection. • Measured content
Reference Measure using the line segment obtained from the
The alarm error will be activated in the following cases. measurement target 1, 2 and 3.
• When even 1 intersection cannot be detected within the Vector : Length from the starting point to finishing
measurement range point of line segment
• When the measurement target representing the arc X-axis : X coordinate of finishing point - X coordinate
edge, intersection or arbitrary point is specified of starting point
Y-axis : Y coordinate of finishing point - Y coordinate
Setting items and range of starting point
Starting point
Measurement
(1) target 1
Vector
(2) Measurement
Y-axis target 2
(3)
(4) Finishing
point
(5)
(6) Measurement
target 3
X-axis
Item Setting range

(1) Measurement type Select "Intersect dist.
target 1
target 2
target 3
(6) Measured content Vector / X-axis / Y-axis

1 Set the Elements.

Use 3 Elements for "Intersection distance".
Make the setting to obtain the straight line using
Elements.
The Element modes to obtain the straight line are as
follows.
Line edge, Circum Ln edge, Centerline, Ln
between 2pt, Arbitrary line
5

setting screen, and select "Intersect
dist" in "Measurement type".
(page 5-37)

4 Set the measurement target 1, 2 and 3

respectively.
target beforehand.

Vector / X-axis / Y-axis

• Angle range
Angle
With the measurement target 1 set as a reference,
This measures the angle formed by 2 straight lines set in measure the angle of measurement target 2
the Elements beforehand. counterclockwise. Set the coordinate system for
With the straight line of measurement target 1 set as a measurement.
reference, measure the angle of measurement target 2 <-90° to 90°>
counterclockwise. Measurement target 2
5 Reference
• When measuring around 0° area, set the "Angle range" + direction
to -90 to +90°.
• When measuring around 90° area, set the "Angle range" Measurement target 1
- direction
to 0 to 180°.
• When measurement target representing the arc edge,
intersection or arbitrary point is specified, the alarm Measurement target 2
error will be activated.
<0° to 180°>
Setting items and range Measurement Measurement
target 2 target 2
(1)
(2)
(3) target 1 target 1
(4)
(5)

• Example 1
Angle range : 0 to 180°
Measurement target 1 : Line edge
Item Setting range Measurement target 2 : Lline edge
(1) Measurement type Select "Angle".
Measurement (Line edge)
(3) Element 1 to 16
target 1 Measurement result
Measurement
(4) Element 1 to 16
target 2
-90 to +90° (more than
-90° less than +90°) /
(5) Angle range
0 to 180° (more than
0° less than +180°)
• Measurement target 1 / Measurement target 2 (Line edge)
Set 2 straight lines as measurement target 1 and 2 in
the Elements.
The Element modes to obtain the straight line are as follows.
Line edge, Circum Ln edge, Centerline, Ln between
2pt, Arbitrary line
Reference
• Measurement target 1 and 2 are indicated with blue
and pink respectively.

• Example 2
Angle range : 0 to 180° 1 Set the Elements.
Use 2 Elements for "Angle".
Make the setting to obtain the straight line using the
Elements.
follows.
Measurement Line edge, Circum Ln edge, Centerline, Ln
Measurement
target 2
(Line edge)
result
Measurement
5
target 1

(Line edge)
setting screen, and select "Angle" in
"Measurement type".
(page 5-37)

• Example 3
Angle range : -90 to 90°
Measurement target 1 : Arbitrary line
4 Set the measurement target 1 and 2
respectively.
Measurement target 2 : Line edge Select the Element number set as a measurement
target beforehand.
5 Sets the angle range.

Select from the following items according to the
target 1 target 2 measurement position.
(Arbitrary) (Line edge) -90 to +90° / 0 to 180°
Measurement
result


Radius
• Example 1
This measures radius within the measurement area set by
the circular arc.
Obtain the approximate circle based on the circular arc Measurement
target 1 Measurement
edge information set in the Elements beforehand and set (Arc edge) result
the radius as a measured value.
5 Reference
When parts other than the arc edge are specified as a
measurement target, the alarm error will be activated.
(1)
(2) • Example 2
(3) Measurement
target 1
Measurement (Arc edge)
result
Item Setting range

(1) Measurement type Select "Radius".
The radius calculated in Arc edge (page 5-75) is
target 1
obtained within the measurement area set by the arc.
• Measurement target 1
Set the arc as a measurement target in the Elements.
The Element to obtain the arc is "Arc edge".

Reference
If 2 circumference edges are included in the arc edge as
shown below, the measurement will be incorrect. Make
sure that the only 1 circumference edge is included in the
arc edge.
(Arc edge)

1 Set the Element.
Use 1 Element for "Radius".
Use "Arc edge" for the supplementary measurement.

setting screen, and select "Radius" in
"Measurement type".
(page 5-37)

4 Set the measurement target 1.

target beforehand.


Roundness
This measures using the the arc edge set in the Elements (Arc edge)
beforehand.
Measure the difference between inscribed radius and
circumradius with the approximate circle center set as
center. The approximate circle has been obtained by the
5 arc edge.
Reference
When parts other than the arc edge are specified as a

measurement target, the alarm error will be activated.
Setting items and range Minimum radius
Maximum radius
(1)
(2)
(3)
1 Set the Element.
Use 1 Element for "Roundness".
Use "Arc edge" for the Elements.

setting screen, and select
"Roundness" in "Measurement type".
Item Setting range
(1) Measurement type Select "Roundness".
(page 5-37)
(3) Measurement
target 1
Element 1 to 16 3 Set the target head.
Set the arc as a measurement target in the Elements.
The Element to obtain the circular arc is "Arc edge". target beforehand.


Coordinate (Element Pos)
Select the X coordinate or Y coordinate of the specified
This measures coordinates (X coordinate or Y coordinate) point.
of point such as an intersection point of straight line and • Example 1
arc, or center point of arc, etc.
Measure using the the edge representing "Point" set in Measurement (Element specifying
the Elements beforehand. result a point)
5
(Y coordinate)
Use this when obtaining coordinates that cannot be
specified with Peak or Bottom in measurement type "Y
position", or Left or Right in "Position".

Measurement
result
(1) (X coordinate)
(2)
(3)
(4)
• Example 2
Measurement
result Measurement target 1
(Y coordinate) (Arc edge)
Item Setting range

(1) Measurement type Select "Element Pos".
target 1
(4) Measured content X coordinate / Y
coordinate Measurement
result
(X coordinate)
Set the intersection point of straight line and arc, or
center point of arc, etc. in the Elements beforehand.
The Element modes to obtain the point are as follows.
Arc edge (center point), Intersection, Arbitrary pt
Measure using the point obtained from the
X coordinate: X coordinate of point
Y coordinate: Y coordinate of point

1 Set the Element.

Use 1 supplementary measurement for "Element
Pos".
Make the setting to obtain the point using the
Element.
The Element modes to obtain the point are as
follows.
5 Arc edge (center point), Intersection, Arbitrary pt

setting screen, and select "Element
Pos" in "Measurement type".
(page 5-37)


target beforehand.

X coordinate / Y coordinate

Example 2: When setting the measured content to

Area
"White"
This measures the area of a bright region or a dark region Measure the unblocked area in the measurement
in the measurement area set with rectangle. area.
Reference
Measures the unblocked
The mask area in the measurement area is not counted area (white area) in the
5
as a bright or dark area at all. measurement area.

(1)
(2)
(3)
(4)
Measurement
area
Item Setting range

setting screen, and select "Area" in
(1) Measurement type Select "Area". "Measurement type".
(2) Target head Head A / Head B "Basic Procedure for Measurement Settings"
(3) Measurement Rectangle area of the (page 5-37)
(4) Measured content Black / White 2 Set the target head.
Sets the measured area in the measurement area.
Black: dark area (Blocked by the target) 3 Set the measurement area.
Set the measurement area with rectangle.
White: bright area (Not blocked by the target)
Example 1: When setting the measured content to
"Black" 4 Set the measured content.
Measure the blocked area in the measurement area.
Black / White
Measures the
blocked area
(black part) in
the measurement
area.

• Pattern area
Search
The image in the pattern area set on the master image
This detects the image from measured images most becomes the standard image for search.
similar to the standard image registered as a pattern
area. As a measurement result, the center coordinates (X • Search area
coordinate, Y coordinate) of the pattern area or rotation Search an image similar to the pattern area in the
angle of the measured image against the master image is search area.
5 calculated.
• Search speed
Master registration (page 5-10) is necessary to use Set the search speed. Setting the value bigger will
"Search". enable the elaborate search, which results in more

The angle is measured counter clockwise. accurate correction. Instead, the trigger interval and
measurement time will become longer.
Reference
The alarm error will be activated in the following cases. Setting range: 1 (fast) to 5 (slow) (Default: 3)
• When the pattern area exceeds the search area
• When the image does not match within the search • Search angle
angle Set the upper limit of correction angle against the tilt
direction. Search is not possible if the target tilts with
larger degree than the setting angle. Because setting
the angle larger increases the internal calculation, the
trigger interval and measurement time will be longer.
(1)
(2)
(3) Setting range: ±0, ±5, ±10, ±20, ±30, ±45, ±90,
(4) ±180 (°) (Default: ±10°)
(5)
(6)
X : X coordinate of center point of pattern area
(7)
after search
Y : Y coordinate of center point of pattern area
after search
Angle : Tilt angle of measured image with the master
image set as a reference
Item Setting range
Reference
(1) Measurement type Select "Search".
When specifying "Angle" for the measured content, the
(2) Target head Head A / Head B angle is calculated as plus in the counter clockwise
(3) Pattern area Rectangle area within direction.
the search area With the master image set as a reference within the
(4) Search area Rectangle area of the setting range of "Search angle", measurement within
entire screen range ±180° is possible.
(5) Search speed 1 to 5 (1: fast 5: slow)

(6) Search angle ±0°, ±5°, ±10°, ±20°,
±30°, ±45°, ±90°, ±180°
(7) Measured content X / Y / Angle


The setting method is the same as the one for the
setting screen, and select "Search" in
correction mode "Pattern correction" of position
correction. "Measurement type".
"Pattern Correction" (page 5-16) "Basic Procedure for Measurement Settings"
• Measurement setting example (page 5-37)
Search area
Master image
when setting 2 Set the target head.
5

3 Set the pattern area and search area.
Set each area with rectangle.
4 Set "Search speed" and "Search angle".

This affects the search accuracy and trigger interval.

Pattern area X / Y / Angle
• Measurement result
Y coordinate in the center of search area
(Target when
measuring)
X coordinate in
the center of
search area
(Pattern area
Angle after search)
As a measurement result, the X coordinate and Y

coordinate of the center of pattern area or tilt angle of the
measured image with the master image set as a
reference is calculated.


Ring measurement (Ring meas)
• Setting example
In the measurement area set with circle, this obtains the
approximate circle based on the outer diameter edge Measurement result
information. Calculate the outer diameter and inner Measurement area
diameter from the center coordinate of the approximate Measures the ring
width in the whole
circle in the entire circumference direction. circumference
5 As a measurement value, the average value, maximum
value and minimum value of difference between the
direction
radius of outer circle and radius of inner circle are

calculated.
(1)
(2)
(3)
(4)
Calculate the outer diameter and inner diameter from the
center coordinate of the approximate circle in the entire
circumference direction. Any of the average value,
maximum value or minimum value of difference between
the radius of outer circle and radius of inner circle is
calculated.
Item Setting range

(1) Measurement type Select "Ring meas".
(3) Measurement Circular area of the
(4) Measured content Average / Max / Min
Average : Average value of difference between the
radius of outer circle and radius of inner
circle
Max : Maximum value of difference between the
circle
Min : Minimum value of difference between the
circle


setting screen, and select "Ring meas"
in "Measurement type".
(page 5-37)

5

3 Set the circular area.
Average / Max / Min

<When the width of the X direction is shorter than the

Pitch
This measures the pitch, width and gap of a target in the When the width of the
Edge detection direction X direction is shorter
measurement area set with rectangle. The average value,
maximum value and minimum value of all data obtained than the width of the Y
in each area can be calculated. direction in the
measurement area,
5 Setting items and range the edge is detected

from plus to minus
(1) Set this when the

(2) shapes are parallel to
(3) the X axis as shown
(4)
(5) on the left.
• Measured content 1
Pitch: This detects the midpoint of dark part in the area
of bright → dark and dark → bright. Then,
measures the distance between the midpoints of
adjacent dark areas.
Item Setting range

(1) Measurement type Select "Pitch". Measurement
Pitch
area
(4) Measured content 1 Pitch / Width / Gap
(5) Measured content 2 Average / Max / Min
• Measurement area
Measurement parts are determined according to the
shape of measurement area.
<When the width of the X direction is longer than the
When the width of the Width: This measures the distance between edges of
X direction is longer successive bright → dark and dark → bright.
Edge detection direction than the width of the Y
direction in the
measurement area,
the edge is detected Measurement
Width area
from minus to plus
Set this when the
shapes are
perpendicular to the
X axis as shown on
the left.

Gap: This measures the distance between edges of The alarm error will be activated in the following cases.
successive dark → bright and bright → dark. • When the measurement target does not cross the area
Measurement
Gap area

• Measured content 2 • When the edge steps over the narrow side of the measurement area
This calculates multiple pitches, widths and gaps.
Average : Average value of the measured content 1
result The edge steps over the
Max : Maximum value of the measured content 1 narrow side of the
result measurement area
Min : Minimum value of the measured content 1
result
Reference
Only when dark → bright edge is present corresponding
to bright → dark edge, those edges become the
measurement target in pitch measurement.
The following case will not become the measurement
target because bright → dark edge corresponding to
dark → bright is not present.
The narrow side of

the measurement Edge information
1 Select OUT No. on the measurement setting
screen, and select "Pitch" in "Measurement type".
area is included used for
in the dark area. measurement "Basic Procedure for Measurement Settings"
(page 5-37)

3 Set the rectangle area.

Pitch / Width / Gap

Average / Max / Min

Calculations Reference
• Additional calculation is possible using the OUT
Select OUT No. as calculation target, use each numbers used for calculation.
measurement result for addition and subtraction, and • In combination with "Scaling", the scaling factors can be
calculate the maximum value, minimum value and used in calculations for calculation result.
average value among multiple OUTs. "Scaling" (page 5-88)
• Values used for calculations are data before alarm error
Reference
5 The alarm error will be activated in the following cases.

scaling, auto-zero and offset are processed.
"Measurement Conditions and Measurement Data
• When the calculation target's OUT number is bigger
Flow" (page A-3)
than the OUT number for which the calculation is set

• Calculation is performed based on the data before the
• When calculation includes different unit systems
minimum display unit process.
(distance or coordinate, angle, area)
1 Make
• When any of the calculation targets activates the alarm
error
the normal measurement settings
• When calculation targets 3 and 4 are set for calculation A-B and OUT settings.
For calculation between OUTs, 2 to 4 measured
Setting items and range results are used for calculation. Make the OUT
settings for required numbers.
(1)
setting screen, and select
(2)
(3) "Calculations" in "Measurement type".
(4) "Basic Procedure for Measurement Settings"
(5)
(page 5-37)
(6)
3 Select the calculation method.

A+B, A-B, Average, Max, Min
(1)
Item
Measurement type
Setting range
Select "Calculations".
4 Set the calculation target 1 to 4.
The number of calculation targets can be set from 2
(2) Calculation A+B, A-B, Average, to 4 as necessary.
method Max, Min
(3) Calculation target 1 OUT 1 to 15
(4) Calculation target 2 OUT 1 to 15
(5) Calculation target 3 -, OUT 1 to 15
No setting
(6) Calculation target 4 -, OUT 1 to 15
Use "No setting" when there is no need to set any of the
• Calculation method measurement items.
A+B : Adds all calculation results of selected OUT2 through OUT16 are initially set to not measure.
measurement targets.
A-B : Subtracts measurement target 2 from
Average : The average value of selected OUTs is
determined as a measured result.
Max : The maximum value of selected OUTs is
Min : The minimum value of selected OUTs is

• Measurement area 1 / Measurement area 2

Elements In the rotation rectangle area used for the line edge, the
This setting determines the edge of image. edge detection direction is determined according to the
The edge determined by the Elements is used for the area setting method.
measurement type of "OUT measurement", and is used to Be careful of the positional relations of A, B and C in the
obtain another edge in "Elements". illustration when setting the area.
When the following measurement modes are selected in A, B and C which are reference points of detection
"OUT settings", "Elements" must be set.
Distance, Intersection distance, Angle, Radius,
Roundness, Coordinate (Element Pos)
direction can be confirmed by pressing [SCREEN] key
on the console while drawing the area (A, B and C 5
characters are not displayed on the drawing screen.

Only the cursor is displayed).
Types of Element "Drawing an Area with the Cursor" (page 2-9)
The Elements include following types. "Drawing an Area by Entering Values" (page 2-13)
• Line edge ( page 5-73)
• Arc edge ( page 5-75) Make the setting so the direction (arrow in the illustration)
• Circum Ln edge ( page 5-76) from the side AB to point C crosses perpendicular to the
• Centerline ( page 5-77)
edge to be detected.
• Intersection ( page 5-78)
• Ln between 2pt ( page 5-79)
• Arbitrary line ( page 5-80) <Properly detected>
• Arbitrary pt ( page 5-81)
Line edge
A
This Element specifies the straight line as an edge.
Set the rotation rectangle area and calculate the
approximation line from all edge information in the area. When
the line and the set area are crossed, the both ends' points
are determined as start point coordinate and end point
coordinate. Then, calculate the line segment between them.
C
Reference B
If either the start point coordinate or end point coordinate is
out of measurement range, the measurement result with this
Element used will activate the measurement alarm.

<Not properly detected: example 1>
Because the direction (arrow in the illustration) from the
side AB to point C are not perpendicular to the edge to
be detected, the edge cannot be detected.
Item Setting range

(1) Target head Head A / Head B C
(2) Measurement Rotation rectangle area

area 1 of the entire screen range
(3) Measurement Rotation rectangle area
area 2 of the entire screen range

<Not properly detected: example 2> • Measuring with measurement area 1 and measurement
Set the area so only 1 edge is included. area 2
The approximation line is obtained from measurement
area 1 and measurement area 2. The points where the
line crosses the measurement area 1 and measurement
area 2 are determined as start point and end point
A There are 2 respectively. Then, calculate the line segment between
5
edges in the them.
area.
Starting point
C coordinate
B
(Line edge)
Finishing point
coordinate
• Measuring with measurement area 1 only
When the approximation line and the measurement
area 1 are crossed, the both ends' points are
determined as start point and end point. Then,
calculate the line segment between them.
1 Select Element 1 to 16 in the Elements
on the measurement setting screen.
Starting point
2 Select
coordinate
"Line edge" in measurement
type.
(Line edge) Finishing point
coordinate
4 Set the measurement area 1 with

rotation rectangle so the measured part
can be included.
13)
5 As necessary, set the measurement

area 2 with rotation rectangle so the
Reference
• To delete the measurement area 2, select
"Measurement area 2" and press the [ZERO] key.

• Example 2
Arc edge
This Element specifies an arc or circle as an edge. Measurement target 1
Set the arc area and calculate the approximation circle of (Arc edge)
all edges in the area.
The measurement result is obtained according to the
measurement type for OUT measurement.
Reference 5
If the center of circle is out of measurement range, the

measurement result with this Element used will activate
the alarm error.
Arc
Reference
Make sure that the only 1 arc edge is included in the
setting area.
If multiple arc edges are included, the approximation
circle is calculated based on those edges' information.
This will result in measurement error.
(Arc edge)
Item Setting range

(2) Measurement Arc area of the entire
area 1 screen range

• Example 1
Measurement
target 1
(Arc edge)
Measurement
result
1 Select Element 1 to 16 in the Elements on
the measurement setting screen.
2 Select
type.
"Arc edge" in measurement

4 Set the measurement area 1 with arc so

the measured part can be included.
"Drawing an Area by Entering Values" (page 2-13)

<Not properly detected>

Circum Ln edge Detection direction "Right → Left"
The edge is present before arriving the external
This Element specifies the external tangent as an edge. tangent, seen from the detection direction.
Set the rectangle area and calculate the straight line contacting
the edge seen from the detection direction. When the external
tangent and the set area are crossed, the both ends' points are Measurement area
Detection
determined as start point coordinate and end point coordinate. direction
Then, calculate the line segment between them.
5 Reference
If either the start point coordinate or end point coordinate
is out of measurement range, the measurement result

with this Element used will activate the alarm error.
Measurement The dark and bright areas

result switch before reaching
(external tangent) the external tangent.

Example: When setting the detection direction to "Left → Right"
Measurement area
Starting point
Item Setting range

Measurement
area 1 entire screen range result Finishing point
(external
(3) Detection L → R / R → L / U →D / tangent)
direction D→U
• Detection direction
Set the edge detection direction. 1 Select Element 1 to 16 in the Elements on
For the external tangent to be calculated, make the
setting so the edge can be detected from the direction
where there is no contrast change in the area.
<Properly detected> 2 Select "Circum Ln edge" in
measurement mode.
Detection direction "Left → Right"
Detection
direction Measurement area 3 Set the target head.

Only the bright
area is present
until reaching
the external
tangent. Measurement result
(external tangent)
L → R / R→ L / U → D / D → U


Centerline
This Element specifies the centerline of 2 straight lines.
Using the Element set beforehand, obtain the bisector of (Line edge)
angle formed by the 2 straight lines. Connect the bisector
of angle and both ends of 2 straight lines and the
Starting point
intersections are determined as start point and end point coordinate
respectively. Then, calculate the line segment between
them.
5
Finishing
point

Reference
coordinate
The alarm error will be activated in the following cases. Measurement
result Measurement target 2
• When the line segments obtained from the (Centerline) (Line edge)
measurement target 1 and 2 are crossed
• When the Element number to be set is smaller than the
one for the measurement target 1 and 2
Setting items and range 1 Set the Elements.

Make the setting to obtain the straight line using the
Elements.
follows.
Line edge, Circum Ln edge, Centerline, Ln
2 Select Element 1 to 16 in the Elements

3 Select
type.
"Centerline" in measurement
Item Setting range

(1) Target head Head A / Head B 4 Set the target head.
target 1
(3) Measurement Element 1 to 16 5 Set the measurement target 1 and 2
respectively.
target 2
Use the Element set in step 1.
Make the setting as a measurement target 1 and 2 in
Elements.
The Elements sets the following modes.
Line edge, Circum Ln edge, Centerline, Ln between
2pt, Arbitrary line

Intersection
This Element specifies the intersection as a point.
This measures the intersection coordinates using 2
Elements set beforehand. Intersection (left) Intersection (right)
Reference
In the following cases, the measurement result with this
5 Element used will activate the alarm error.
• When there is no intersection
• When the intersection is out of the measurement range
• When the Element number to be set is smaller than the Measurement Measurement
target 1 target 2
one for the measurement target 1 and 2 (Arc edge) (Line edge)
Measurement target 1 Measurement result

(Line edge) (Intersection)
(Line edge)
Item Setting range
target 1 1 Set the Elements.
Make the setting to obtain the straight line and
circular arc using Elements.
target 2 The Element modes to obtain the straight line or arc
(4) Intersection selection Upper / Lower / Right / Left are as follows.
Line edge, Arc edge, Circum Ln edge, Centerline,
Ln between 2pt, Arbitrary line
Element.
2 Select
The Element sets the following modes.
Line edge, Arc edge, Circum Ln edge, Centerline, Ln Element 1 to 16 in Elements on the
between 2pt, Arbitrary line measurement setting screen.
* The Arc edge mode can only be measured by
measurement target 1 or measurement target 2, not
by both. 3 Select "Intersection" in measurement type.
• Intersection selection
This setting specifies which intersection to measure 4 Set the target head.
when 2 intersections are present, such as intersections
5 Set the measurement target 1, 2.

of circular arc edge and straight line edge.
This setting is invalid when there is 1 intersection.
Upper: Specifies the intersection with the greatest Y Use the Element set in step 1.
coordinate value
Lower : Specifies the intersection with the smallest Y
coordinate value 6 Set the intersection selection.
Right : Specifies the intersection with the greatest X Upper / Lower / Right / Left
coordinate value
Left : Specifies the intersection with the smallest X
coordinate value


Ln between 2pt
• Example 1
This Element specifies the straight line connecting 2 Measurement target 1: Arc edge
points. Measurement target 2: Arc edge
This measures the line segment between 2 points (start
coordinate and end coordinate) using 2 Elements set Measurement target 2 Measurement target 1
beforehand. (Arc edge) (Arc edge)
Reference 5
If the Element number to be set is smaller than the one for

the measurement target 1 and 2, the measurement result
with this Element used will activate the alarm error.
Measurement result
(Ln between 2pt)
• Example 2
Measurement target 1 : Intersection (Arc edge and line
edge)
Measurement target 2 : Intersection (Arc edge and line
edge)
Measurement result
(Ln between 2pt)
target 1 target 2
(Intersection) (Intersection)
Item Setting range

target 1 Arc edge Line edge

target 2

1 Set the Elements.
Make the setting to obtain the point using the
Elements.
the Elements. The Element modes to obtain the point are as
The Element sets the following modes. follows.
Arc edge (center point of circle), Intersection, Arc edge (center point of circle), Intersection,
Arbitrary pt Arbitrary pt
2 Select Element 1 to 16 in the Elements on

3 Select "Ln between 2pt" in

measurement type.

5 Set the measurement target 1, 2.

Use the Element set in step 1.

Arbitrary line 1 Select Element 1 to 16 in the Elements

This Element specifies the straight line as an edge.
This sets the straight line at an arbitrary location in the
measurement range. 2 Select
type.
"Arbitrary line" in measurement
Use this as a reference when measuring an angle or a
height.

4 Set the arbitrary line.

Item Setting range

(2) Arbitrary line Entire screen range

Example: Measuring the angle formed by the arbitrary
line and target
"Angle" (page 5-58)
Measurement result
(Arbitrary line)
Angle

Arbitrary pt 1 Select Element 1 to 16 in the Elements

This Element specifies a point.
This sets an arbitrary point on the image.

2 Select
type.
"Arbitrary pt" in measurement

5

4 Set the arbitrary point.
Item Setting range

(2) Arbitrary pt Entire screen range

Example: Measuring distance from the arbitrary point to
the center of circle
"Distance" (page 5-54)
Measurement
result
(Arbitrary pt)
Vector

OUT settings
OUT settings (Setting for process of measured values)
OUT settings Displaying the OUT Settings Screen

This makes detailed settings for OUT1 to 16 individually
to process the measured values obtained in
measurement settings. The setting screen appears.
Reference
"Measurement Conditions and Measurement Data Flow"
5 (page A-3)
OUT setting screen and items
2 Press the [U] / [V] key to select "OUT

The "OUT settings" screen will be displayed and the
cursor will move to "OUT1".
OUT number Setting copy Setting items

selection
OUT name (page 5-83)
Arbitrary names can be assigned to OUT numbers.
Average (page 5-83)
Set the averaging process method for measured values.
Alarm error (page 5-85)
Set the process when measurement is impossible.
Measurement mode (page 5-86)
Set whether to perform continuous sampling while
measuring, or measure maximum and minimum values
by specifying the period.
Offset (page 5-87)
This is the value automatically added to or subtracted
from the measured value.
Min display unit (page 5-87)
Set the minimum display unit for measurement.
Scaling (page 5-88)
This is the value automatically scaled (multiplying an
arbitrary value) from the measured value. Correction
and sign inversion can be performed.
Tol upper limit (page 5-90)
If the measurement value exceeds the upper limit, the
evaluation HI is displayed.
Tol lower limit (page 5-90)
If the measurement value falls below the lower limit, the
evaluation LO is displayed.
Copy settings (page 5-91)
This allows you to copy the settings of one OUT
number to another OUT number.

OUT settings
OUT name Average

Arbitrary names can be assigned to OUT numbers (1 to Set the number of moving-average for the measurement
16). This does not affect controls or other settings. to stabilize the measured values.
Note
Setting range:
• The trigger delay, average time of measurement, refresh
Up to 20 single-byte characters or 10 two-byte
rate and evaluation standby time vary depending on the
characters.
Reference
settings.
"Trigger Interval and Measurement Time" (page 10-
5

• The OUT settings screen will abbreviate names longer 20)
than 18 single-byte characters to the first 12 characters. "Response Time Delay due to Averaging" (page
• Kanji entry is possible with the TM-Navigator support 10-22)
software.
Setting range:
1 Display the "OUT settings" screen.

"OUT setting screen and items" (page 5-82)
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1024, 2048,
4096 times (Default: 1)
2 Press the [U] / [V] key to select the

OUT number to name and press the
Continuous Trigger
When the continuous trigger is set, measurements occur
[ENTER] key. at the frequency dictated by the trigger delay and are
continuously output.

name" and press the [ENTER] key.
"Trigger mode" (page 5-3)
"Continuous Trigger" (page 5-3)
The text entry window appears. The following is the example of the process when
averaging is set to 4.
Trigger interval
1 2 3 4 5 6 7
(1) Average measurement time
Internal data
4 Enter the desired name.

Output data A B C
When you have finished entering the desired name,

Update Update
the name will be displayed in the OUT name display
box.
(1)Data 1 through 4 are averaged and output as data A.
"Entering Characters" (page 2-8)
(2)Data 2 through 5 are averaged and output as data B.

making settings.
(3)Data 3 through 6 are averaged and output as data C.

OUT settings
External Trigger
Measurement is performed by the external trigger input
4 Press the [U] / [V] key to select
"Average count" and press the
and averaged result is obtained when the trigger is input
for the specified number of averaging. [ENTER] key.
Trigger mode (page 5-3) The number of measurement times for averaging is
fixed.
External trigger input
5 5 Press the [ESCAPE] key to complete

the setting.
1 2 3 4 5 6 7
A B C
Update cycle
(1)Data 1 through 4 are averaged and output as data A.

(2)Data 2 through 5 are averaged and output as data B.
(3)Data 3 through 6 are averaged and output as data C.

"Displaying the OUT Settings Screen" (page 5-82)

OUT number and press the [ENTER]
key.
The cursor moves to the "OUT name" for the
selected OUT number.

"Average" and press the [ENTER] key.

OUT settings
Relations between the alarm error and number of

Alarm error
errors
Set the process contents when measurement is • When the measurement alarm is set to "0"
When measurement is impossible, the evaluation result
impossible.
of measurement impossible is immediately output.
The number of errors will be a reference to determine the
process method of data that cannot be measured. Occurrence of Return to the Occurrence of Return to the
measurement normal measurement normal
Status Data process impossible measurement impossible measurement
"Amt of data" that cannot The last data immediate

Normal
measurement
value
5
be measured before it could be measured
Measured value

≤ Number of errors is held. After measured
data is resumed, the normal -FFFFFF
value is displayed. (measurement
impossible) Time
"Amt of data" that cannot -FFFFFF is displayed for • When the alarm error is set to "5"
be measured the data exceeding the When the measurement impossible state occurs for 5
> Number of errors number of errors. measurement samples, the measurement value is held.
Number of errors = 0 -FFFFFF is always displayed If it occurs 6 times, the sixth measured value is output
when measurement is as -FFFFFF.
After that, when a normal value is obtained, the normal
impossible.
value is restored.
Number of errors = 255 The last value is held when
measurement is Occurrence of Return to the Occurrence of Return to the
measurement normal measurement normal
impossible. impossible measurement impossible measurement
Normal
measurement
value
Setting range: 0 (OFF), 1 to 255 times (Default: 0)
Measured value
-FFFFFF
(measurement
impossible) Time

2 number
Press the [U] / [V] key to select the OUT
3 Press the [U] / [V] key to select "Alarm

error" and press the [ENTER] key.
The device enters the value input state.
4 Set the "Alarm error" number and

The number of "Alarm error" is fixed.
5 Press the [ESCAPE] key to complete

the setting.

OUT settings
Measurement mode 1 Display the "OUT settings" screen.

Set whether to perform continuous sampling while
measuring, or measure maximum and minimum values
by specifying the sampling period. 2 Press the [U] / [V] key to select the
The sampling period is controlled by the external input
terminal, RS-232C command, or HOLD key on the key.
5 console.
Setting range and overview:

The measured
"Measurement mode" and press the
Normal
result can be [ENTER] key.
displayed or
The comparative measurement modes are
output as
displayed in a pull-down menu.
required.
Peak hold 1 / The maximum

Peak hold 2 Max. value value during
the specified
period can be
measured.
Sampling period
Bottom hold 1 / The minimum

Bottom hold 2 value during
4 Press
the specified
period can be
the [U] / [V] key to select the
Min. value
measured. measurement mode and press the
Sampling period
[ENTER] key.
The difference The comparative measurement mode is fixed.
P-to-p hold 1 /
P-to-p hold 2 between the
maximum and
minimum
the setting.
values during
Sampling period the specified
period can be
Max. value - Min. value
measured.
Average hold 1 / The average

Average hold 2 value during
the specified
Average
value period can be
measured.
Sampling period
Sample hold The value at a

specified
moment can
be measured.
Sample hold value
Refer to the timing chart for details.


OUT settings
Offset Min display unit

This is the value automatically added to or subtracted This sets the minimum unit in which the measured value
from the displayed value. will be displayed.
The offset process is performed for the values after The unit system is automatically set by the measurement
comparative measurement mode processing, auto-zero mode according to the length, area or angle to be
processing and scaling. measured. The unit for length can be selected from either
When the offset value is set, it can be displayed when the
auto-zero is performed. This can be used to adjust the
"mm" or "μm".
Changing the minimum display unit will cause a
5
master workpiece (auto-offset). corresponding change in the display range.

"Auto-offset" (page 3-13)
"Auto-zero Function" (page 3-12) Note
• When changing the measurement mode, the minimum
Setting range:
display unit is initialized.
Display range (Default: 0)
• When the "Min display unit" setting is changed, scaling,
The display range varies with the minimum display unit
offset, tolerance (maximum and minimum) and auto-
setting.
zero settings are initialized.
For details of display range, see "Min display unit"
"Scaling" (page 5-88)
(page 5-87).
"Tolerance" (page 5-90)

• The measurement value can be acquired by rounding
"Displaying the OUT Settings Screen" (page 5-82) the first digit below the minimum display unit.

Setting range and display range
• Length (Default: 0.001mm)
key. Min display unit Display range

The cursor moves to the "OUT name" for the 1mm ±9999mm
selected OUT number. 0.1mm ±9999.9mm
3 Press
0.01mm ±9999.99mm
the [U] / [V] key to select
0.001mm ±999.999 mm
"Offset" and press the [ENTER] key.
1μm ±999999μm
0.1μm ±99999.9μm
0.01μm ±9999.99μm
• Area (Default: 0.01mm2)
4 Press the [ENTER] key after inputting

the offset value.
Min display unit
1mm2
Display range
±99999mm2
The offset is set. 0.1mm2 ±99999.9mm2
"Entering a Value" (page 2-7) 0.01mm 2
±9999.99mm2
0.001mm2 ±999.999mm2
the setting.
0.0001mm2 ±99.9999mm2

OUT settings
• Angle (Default: 0.01deg)

Scaling
Min display unit Display range
1deg ±99999deg The displayed value for the measurement value can be
scaled (corrected) using 2 points.
0.1deg ±99999.9deg
0.01deg ±9999.99deg Setting range:
Display range
5 1 Display the "OUT settings" screen. "Displaying the OUT Settings Screen" (page 5-82)
The display range varies with the minimum display unit
setting.
For details of display range, see Min display unit (page

5-87).
Default value:
key. Units mm μm mm2 deg
Input value 1 0 0 0 0
Display value 1 0 0 0 0
3 Press the [U] / [V] key to select "Min

display unit" and press the [ENTER]
Input value 2
Display value 2
1
1
1000
1000
10
10
10
10
key. The default number of digits displayed varies with the
A pull-down menu appears. minimum display unit setting.
The contents of display vary with the type of
measurement. Setting conditions:
The setting conditions are as follows.
If the setting value error is displayed, press the
[ENTER] key to cancel the error, and make the setting
again.
Condition 1: Input value 1 ≠ input value 2
Display value 2 - Display value 1
Condition 2: < 10
Input value 2 - Input value 1
4 Press the [U] / [V] key to select "Min

display unit" and press the [ENTER]
Example of setting scaling procedure
This section describes scaling settings, using the
key. following values as examples.
The minimum display unit is set.

Setting content Setting value

the setting.
Original input
value 1
-1.020
Point 1
Display value 1
-1.000
after scaled
Original input
+0.990
value 2
Point 2
Display value 2
+1.000
after scaled

OUT settings
Before scaling
Display value
After scaling
Display value
5 Set "Input value 1".
Enter -1.020.
Point 2 Point 2 "Entering a Value" (page 2-7)
0.990 +1.000
-1.020 Input -1.020 Input

0.990 value 0.990 value
Point 1
-1.020
Point 1
-1.000
6 Set "Input value 2".
Enter +0.990.
5

The setting procedures are the same as for setting
"Input value 1".
7 Set "Display value 1".

Enter -1.000.
key. "Input value 1".
8 Set "Display value 2".

Enter +1.000.

"Scaling" and press the [ENTER] key.
"Input value 1".
The scaling window appears.
Measured value box

9 Press the [ESCAPE] key once settings
for "Input value 1" "Input value 2"
"Display value 1" and "Display value 2"
have been completed.
• The scaling is set and the window closes.
• An error message will be displayed if the setting
conditions are not met. Redo the settings and try
again.
"Setting conditions" (page 5-88)
Reference 10 Press the [ESCAPE] key to complete

the setting.
Pressing the [TRG / HOLD] key while the "Scaling
window" is visible will cause a measurement to be
taken and the measured result to be displayed in the
"Measured value box". Moving the cursor to either
the "Meas → Input1" button or the "Meas → Input2"
button and pressing the [ENTER] key will cause the
measured value to be used as an input value. There
is no input when the measurement value display
shows the alarm state (-FFFFFF) or the evaluation
standby state (-------).
4 Press the [U] / [V] key to select "Input

value 1" and press the [ENTER] key.

OUT settings
Setting range and default value:

Tol upper limit / Tol lower limit
Setting Setting Default value
This sets values (Tolerance) for judgement to pass or fail items range mm mm2 deg
for measured values.
Upper limit Display +5.000 +5.00 +50.00
The maximum and minimum acceptable values can be set.
Lower limit range -5.000 -5.00 -50.00
The relationship among each setting value, measured The display range varies with the minimum display unit
5 value, output and display is shown below.
Display color of
setting.
Note
Evaluation result
Evaluation Range When the minimum display unit is set, upper limit and
display lower limit settings for tolerance are initialized.
Output state For details of display range, see "Min display unit"
Measured value: Red (page 5-87).
Evaluation result: "HI"

Upper limit
HI display
< Measured value
ON only when HI "Displaying the OUT Settings Screen" (page 5-82)
output
Lower limit
Measured value:
Green
≤ Measured Evaluation result:
GO
value "GO" display key.
≤ Upper limit ON only when GO The cursor moves to the "OUT name" for the
output selected OUT number.
3 Press
Measured value: Red
Evaluation result: "LO" the [U] / [V] key to select "Tol
Measured value
LO display upper limit" and press the [ENTER] key.
< Lower limit
ON only when LO The device enters the value input state.
output Input the value, then press the [ENTER] key.
The measured value is displayed as "-------"
Evaluation
standby
and the evaluation is displayed as "--".
Evaluation output turns OFF.
4 Set "Tol upper limit".
The measured value is displayed as
Alarm
error
"- FFFFFF" and the evaluation is displayed
as "LO". Evaluation outputs HI and LO turn
5 Set "Tol lower limit" in the same way.
ON at the same time. "Tol upper limit".
Setting condition: Lower limit ≤ Upper limit 6 Press the [ESCAPE] key to complete
the setting.
If the setting value error is displayed, press the [ENTER]
key to cancel the error, and make the setting again.
Reference
• The total evaluation is calculated based on the
evaluation result of each OUT number.
• For information on the evaluation standby state
(measured value "-------") or measurement value alarm
state "-FFFFFF", etc., see "Controller Status Table" (page
11-16).

OUT settings
Copy settings
This function copies the OUT settings and measurement
settings registered with other OUT numbers to a different
OUT number. This reduces the amount of work required
to make similar settings.

5

2 Press the [U] / [V] key to select "Copy
settings" and press the [ENTER] key.
The setting copy screen will be displayed and the
cursor will move to "Copy from".


OUT number of copy source and press
the [ENTER] key.
The OUT number of copy source is set.
5 Press the [U] / [V] key to select "Paste

to" and press the [ENTER] key.

OUT number of copy destination and
The OUT number of copy destination is set.
7 Press the [U] / [V] key to select "Copy

settings" and press the [ENTER] key.
The settings are copied and completion confirmation
window appears.

window.

the setting.

Common settings
Common settings (Setting input and output conditions)
Common settings Displaying the Common Settings Screen

Common Settings set the operating conditions for the
input and output terminals as well as the operating
conditions for saving measurement results in the internal The setting screen appears.
memory.
5 "Measurement Conditions and Measurement Data

Flow" (page A-3)
Setting items and overview

"Common" and press the [ENTER] key.
The common settings screen will be displayed and
the cursor will move to "TIMING terminal".
TIMING terminal (page 5-93)

Set the OUT number to which the input is reflected
when the external input terminal TIMING1 or TIMING2
is input.
ZERO terminal (page 5-94)

Set the OUT number to which the input is reflected
when the external input terminal ZERO1 or ZERO2 is
input.
Binary output (page 5-95)

Set the items output from the external output terminal
(evaluation / binary output terminal).
Analog output (page 5-96)

Set the scaling and assignment of OUT number output
from the analog output terminal.
Storage (page 5-98)

Set the operating conditions and contents to be saved
into the internal memory.
Auto-send (page 5-101)

Select OUT numbers for measurements auto-sent over
the RS-232C interface.
Data out timing (page 5-102)

Set the operating timings for binary output, data
storage and automatic transmission.

Common settings
TIMING terminal 4 cursor

Press the [Y] / [Z] key to move the
and select the TIMING terminal.
The timing input terminal used by the hold function has 2
inputs (TIMING1 and TIMING2).
For "TIMING terminal", set the OUT number to which the
TIMING input is reflected when TIMING1 or TIMING2 is
input. Setting cursor
Hold function overview: "Hold Function" (page 3-10)
5
Types of Hold: "Measurement mode" (page 5-86)
Details of Hold operation: "Continuous Trigger" (page 5 Press the [ENTER] key.

The circle will be filled in and the setting will be
10-2)
made.
Input terminal description: "TIMING 1" (page 8-2)
The TIMING terminal indicated by the filled circle is
Input terminal description: "TIMING2" (page 8-4)
selected.

the setting.
The TIMING input from the TIMING input terminal

displayed with the black circle is reflected for each OUT
number.
1 Display the common settings screen.

"Displaying the Common Settings Screen"
(page 5-92)

"TIMING terminal" and press the
[ENTER] key.
The "TIMING terminal" settings screen is displayed
and the setting cursor appears.
Setting cursor
3 Press the [U] / [V] key to move the

cursor and select the OUT number.

Common settings
ZERO terminal 5 Press the [ENTER] key.

The circle will be filled in and the setting will be
The zero input terminal used by the auto-zero function
made.
has 2 inputs (ZERO1 and ZERO2).
The ZERO terminal indicated by the filled circle is
For "ZERO terminal", select the OUT number to which the
selected.
auto-zero input is reflected when ZERO1 or ZERO2 is
input.
5 Auto-zero overview: "Auto-zero Function" (page 3-12)

Input terminal description: "ZERO1" (page 8-2)
Input terminal description: "ZERO2" (page 8-4)
6 Press
the [ESCAPE] key to complete

the setting.
The auto-zero from the ZERO input terminal displayed

with the black circle is reflected for each OUT number.

(page 5-92)
2 terminal"
Press the [U] / [V] key to select "ZERO
The "ZERO terminal" settings screen is displayed
and the setting cursor appears.
Setting cursor
3 Press the [U] / [V] key to move the

cursor and select the OUT number.
4 cursor
Press the [Y] / [Z] key to move the
and select the ZERO terminal.
Setting cursor

Common settings
Binary output 3 Press the [U] / [V] key to move the

cursor, select the evaluation or OUT
Evaluation output (HI, GO and LO for each OUT number)
and the binary value for each OUT number can be number and press the [ENTER] key.
selected for output from the evaluation / binary output When selected, [Picture of selection mark icon] is
terminal (expansion connector No.13 to 38). If you select displayed.
the multiple output items, the data is output in a time
sharing mode. The update time for time sharing output is
set in "Setting the Strobe Time" (page 6-4) in the 5
environment settings. Check mark

The output timing is set in "Data out timing" (page 5-102).
• The box will be checked and the setting will be

Output terminal description: "Evaluation output"
made.
(page 8-6)
• If the box is already checked, it will be unchecked
Output terminal description: "Binary output" (page 8-6)
and there will be no output.
Timing chart: "Evaluation/Binary Output" (page 10-16)
4 Press
Timing chart: "Strobe output" (page 10-17)
the [ESCAPE] key to complete
the setting.
Reference
When all are OFF, the binary output terminal (expansion
connector No.13 to 38) turns all OFF.

"Displaying the Common Settings Screen" (page 5-92)

"Binary output" and press the [ENTER]
key.
The "Binary output" settings screen is displayed and
the setting cursor appears.

Common settings
This can be set for CH1 and CH2 respectively.

Analog output
Item Range
When the OUT number is set for the analog voltage
Output selection OUT1 to 16
output (CH1/CH2), the voltage can be output according
to the measurement value of the specified OUT number. Measure 1 mm: -999.999mm to
Also, scaling is possible within the range of ±10.5V. +999.999mm
Output terminal description:"Output terminal block" mm2: -9999.99mm2 to
5 (page 8-3) Analog +9999.99mm2

Measure 2
Output circuit:"Analog voltage output" (page 8-8) scaling deg: -999.999deg to
+999.999deg
Note
Voltage 1 -10.500V to
"Range over" means the state that the measured value
cannot be output within the voltage output range set for Voltage 2 +10.500V
analog output. The setting range and default values vary depending
In this case, the voltage output will be +10.8V or -10.8V. on the measurement mode.
When it exceeds or is in an alarm state ±10.5V, +10.8V or For setting values' default, see "Default Values" (page
-10.8V will be output. 11-11).
When the values are as follows: Output selection
+10V:+5mm Select the OUT number for analog output.
-10V: -5mm Positive value range over
+10.8V
Voltage Measure 1, Measure 2
[V] Analog output scaling is performed. Set 2 measurements
+10.5 you wish to use as references for scaling.
+10 Point 2
Voltage 1, Voltage 2
Analog output scaling is performed. Set the output
0
voltage for measured value 1 and 2 respectively.
-10 Point 1 Note

-10.5
Condition 1: Measure 1 ≠ Measure 2
-5 0 +5 Measured
Negative value range over value Voltage 2 - Voltage 1
-10.8V [mm] Condition 2: < 10
Measure 2 - Measure 1
Setting items and range: • Output voltages are calculated in units of mV.
(When the setting value is 5.000V, the calculation
formula uses 5000.)
• The units used in determining whether this condition
is met depend on the units of measure 1 and 2.
mm/μm : 0.1μm
mm2 : 0.001mm2
deg : 0.0001deg
(When the setting value is 5.000mm, the calculation
formula uses 50000.)
If the setting value error is displayed, press the [ENTER]

key to cancel the error, and make the setting again.

Common settings
Setting example:
To assign -10V to -5mm and +10V to +5mm, each setting 4 Press the [U] / [V] key to select the
OUT number to output and press the
value is as follows.
[ENTER] key.
Item Setting value
This sets the CH1 output.
Measure 1 -5.000mm
Measure 2 +5.000mm Before the settings below, measurement settings for the
Voltage 1
Voltage 2
-10.000V
+10.000V
OUT number set in step 4 must be made beforehand.
"Measurement Settings" (page 5-37) 5
5 Press

Voltage the [U] / [V] key to select
[V]
"Measure 1" of analog scaling for CH1
(Voltage 2)
+10
Point 2 and press the [ENTER] key.
(Voltage 1)
Point 1
-10
6 Set "Measure 1".

-5 0 +5 Measured
(Measure 1) (Measure 2) value
[mm]

"Displaying the Common Settings Screen" 7 Set "Measure 2" for CH1 analog
(page 5-92) scaling.
The steps for making this settings are the same as

"Analog output" and press the [ENTER]
for setting "Measure 1".
key. 8 Set "Voltage 1" for CH1 analog output

scaling.
The cursor moves to [Output selection] for CH1.
for setting "Measure 1".
3 Press the [U] / [V] key to select 9 Set "Voltage 2" for CH1 analog output
scaling.
"Output selection" for CH1 and press
the [ENTER] key. for setting "Measure 1".

the setting.
• The analog output settings are completed.
• An error message will be displayed if the analog
output scaling does not meet the input conditions.
Press the [ENTER] key to cancel the error, and
make the setting again.
• Make the same settings for CH2.
"Setting conditions" (page 5-88)

Common settings
Data storage
Storage
The data storage function stores the measurement values
This sets conditions to store data into the internal memory of all the measured OUT numbers. into the internal
of the controller. memory. Storage timing is set via data output timing.
Select the contents to store from the OUT measurement Function details:"Performing Data Storage" (page 3-17)
value and image data. Internal operations:"Memory Structure" (page A-2)
Stored data can be exported via the TM-Navigator
5 support software RS-232C (only OUT measurement

values) or a memory card.
Setting items and range:
Refer to "Storage function" for more information on storing

and exporting.
Storage function overview:"Storage Function" (page
3-17)
Internal operations:"Memory Structure" (page A-2)
Item Setting range

No of data points 1 to 65536
Skipping 1/2/5/10/20/50/100
• No of data points
This sets the amount of data to be stored. This is the
same for all OUT numbers being measured.
• Skipping
Item Setting range
For instructions set for data output timing, data is stored
OFF / Data storage / once per times set by skipping.
Storage
Image storage (Default: OFF)
• OFF
The storage function is not used. (page 5-92)
• Data storage
The OUT measurement values are stored.
"Data storage" (page 5-98) 2 Press the [U] / [V] key to select
"Storage" and press the [ENTER] key.
• Image storage
Image data is stored. The storage setting screen appears.
"Image storage" (page 5-99)

Common settings

"Storage selection" and press the
Image storage
The image storage function stores image data being
measured and image storage files.
[ENTER] key. Dates, OUT measurement values, etc. are saved into the
A pull-down menu appears. image storage file.
The image storage file is information required to export
the image data using the TM-Navigator support software.
"Performing Image Storage" (page 3-19)
5
4 Press

the [U] / [V] key to select "Data
storage" and press the [ENTER] key.
The data storage settings screen will appear once
the selection is confirmed.
5 Press the [U] / [V] key to select "No of

data points" and press the [ENTER]
key.
6 Set "No of data points".

"Entering a Value" (page 2-7) Item Setting range
Target head Head A / Head B / Both heads
"Skipping" and press the [ENTER] key.
Storage conditions Manual / Always / NG only
A pull-down menu appears. • Target head

Select the head for the image storage.
When selecting both heads, set the trigger rate for the
head setting to ON. When trigger rate is turned off, the
image for head A is only stored.
"Trigger rate" (page 5-5)
• Storage conditions
Always:
8 Press
Stores for every trigger input by storage start operation.
the [U] / [V] key to select NG only:
"Skipping" and press the [ENTER] key. Stores only when the total evaluation result is NG.
"Skipping" is set. Manual:
When the measurement is in process, the device enters

the setting.
the storage operation state.
Image storage is performed only once by pressing the
"Storage start/stop" button on the display setting menu.

Common settings
Note
• Saved image data is the data before the position
"Storage mode" and press the [ENTER]
correction.
• If the amount of storage data exceeds the number of key.
data that can be saved, old images are deleted and A pull-down menu appears.
new images are saved.
Reference
5 • The number of image storage that can be saved is

determined according to the measurement range

setting.
"Measurement range" (page 5-6)
storage mode and press the [ENTER]
key.
The "Storage mode" is set.
(page 5-92) 9 Press the [ESCAPE] key to complete

the setting.
"Storage" and press the [ENTER] key.
The storage setting screen appears.

"Storage selection" and press the
[ENTER] key.
4 Press the [U] / [V] key to select "Image

storage" and press the [ENTER] key.
The image storage settings screen will appear once
the selection is confirmed.
5 Press the [U] / [V] key to select "Target

Head" and press the [ENTER] key.

target head and press the [ENTER] key.

Common settings
• If the box is already checked, it will be unchecked

Auto-send and there will be no output.
Select OUT numbers for measurements sent over the RS- Repeat step 3 and select the OUT numbers for auto-
232C interface. To use auto-transmission, make the send.
setting in "Setting auto-send" in the environment setting.
The transmission timing is set via "Data output timing".
"Setting Auto-send" (page 6-3)
the setting.
"Data out timing" (page 5-102)
5

Item Setting range
Auto-send Output / Do not output
(OUT1 to OUT16)
Measurement values are output in ascending order of

OUT numbers for which "Output" is selected.

(page 5-92)
2 Press the [U] / [V] key to select "Auto-

send" and press the [ENTER] key.
The auto-send setting screen appears.

number" and press the [ENTER] key.
When selected, [Picture of selection mark icon] is
displayed.
Check mark
• The box will be checked and the setting will be

made.

Common settings
Data out timing 1 Display the common settings screen.

This sets the timing for Evaluation / binary output, data
(page 5-92)
storage and automatic transmission.
2 Press the [U] / [V] key to select "Data
out timing" and press the [ENTER] key.
5 A pull-down menu appears.

3 Press the [U] / [V] key to select items

The data out timing is set.

the setting.
Item Setting range

Data out timing Image update / TIMING1
Image update:
Data can be saved or output after measurement has
been completed for each OUT that is sampling by trigger
input.
When the trigger is set to "asynchronous", data can be
saved or output after TRG_A input measurement has
been completed.
TIMING1:
Data can be saved or output after TIMING1 is input.
Reference
Use the following methods to input TIMING1.
• TIMING1 of external input terminal
• TIMING1 of RS-232C communication
• [TRG / HOLD] key on the console
• Timing input from TM-Navigator support software

Chapter 6
Environment Settings
This sets the basic operation environments for this unit.
Setting Procedure for the Environment Settings . . . . . . . .6-2
Environment Settings Items . . . . . . . . . . . . . . . . . . . . . . . . .6-3

Setting Procedure for the Environment Settings
Setting Procedure for the Environment Settings
1 Slide the [PROG/RUN] switch on the

console on the measurement screen.
The setting screen appears.
(page 2-2)
Environ setting button
6
2 select
[Environ setting] and press the
[ENTER] key.
The "Environ setting" screen will be displayed and the
cursor will move to the setting value of "Baud rate".
Setting items Setting value
3 cursor
Press the [U] or [V] key to move the
to the item of which the setting is
to be changed and press the [ENTER] key.
A pull-down menu appears or the unit enters the
value input state.
4 Change the value by selecting from the

pull-down menu or with direct input.
"Selecting from a Pull-down Menu" (page 2-7)
5 Press the [ESCAPE] key to finish.

The setting value screen is restored.

Environment Settings Items
The contents set in the environment settings can be saved or loaded with the memory card.
"Saving and Reading Operations" (page 7-4)
Setting the Communication Specifications for RS-232C

Make the setting according to the devices communicating via RS-232C.
"Communication Specifications" (page 9-2)
Setting items Description Setting range Default value

Sets the communication speed of the 9600/19200/38400/
Baud rate
data. 57600/115200
9600 (bps)
6
Parity Sets the type of parity. NONE/EVEN/ODD NONE
Setting the Communication Specifications for Ethernet
This sets the communication specifications when using Ethernet to communicate with the TM-Navigator.
"TM-Navigator User's Manual"
Reference
• If the settings are configured incorrectly, It could cause this unit and other devices on the network to cease working
properly.
• New settings will take effect once the unit has been restarted.
• Do not set 0.0.0.0 or 255.255.255.255 for the IP address.
Setting items Description Setting range Default value

IP address This sets the IP address that this unit uses. 192.168.10.10
Subnet mask This sets the subnet mask. ***.***.***.*** 255.255.255.0
This sets the IP address of the default (*** can be from 0 to 255.)
Gateway 0.0.0.0
gateway.
Setting Auto-send
This function outputs the measurement value over the RS-232 interface synchronized with the external input terminal.
Specify ON when the auto-send function is used.
"Response Delay Time via Auto-send" (page 10-24)
"Outputting Measurement Values via Auto-send" (page 9-4)
Setting items Setting range Default value

Auto-send ON / OFF OFF

Setting the Strobe Time

This sets the update time as "Strobe Time" when outputting multiple items in time sharing mode with the evaluation/
binary output.
"Evaluation/Binary Output" (page 10-16)
"Binary output"(page 5-95)
"Evaluation output" (page 8-6)
"Binary output" (page 8-6)
"Strobe output" (page 10-17)
6 Setting items Setting range Default value
Strobe time 2 to 100 (ms) (1 ms intervals) 10 (ms)
Setting the Cable Expansion Mode

Make this setting according to the cable length between the controller and the head.
Reference
• The unit may not operate properly if settings are made incorrectly.
• New settings will take effect once the unit has been restarted.
• Setting to ON will increase the measurement time.
"Trigger Interval and Measurement Time" (page 10-20)
"System Configuration" (page 1-2)
"Wiring" (page 1-18)

ON : When using CB-A30
Cable exp mode OFF
OFF : When not using CB-A30
Changing Languages
This switches the language displayed on the measurement screen or setting screen.
Reference
The language setting is not initialized even "Restoring the default status" (page 2-16) is performed.

Japanese
Language English English
German

Adjusting Date and Time

This sets the time on the internal clock.
The time on the internal clock is used when this unit saves items such as settings or storage data to the memory card.

Year / Month / Day
Date/time Has been set at the time of shipment.
Hours : Minutes : Seconds
Reference 6
The accuracy of Date/time is ±approx. 1 minute/month (at normal temperature).
Setting the Program-switching Method
Set this to match the method for switching program No.

Console : Switching available from the console (Main unit screen), RS-232C
Program
interface and TM-Navigator. Console
switch
Terminal : Switching available from the external input terminal
Setting Save operations for Flash Memory (Save)

This unit saves the auto-zero setting values, program No., etc. to FLASH memory.
Set the "Save" setting to OFF to protect the FLASH memory when using the auto-zero or when changing program No.
frequently.
"Setting memory" (page 2)

ON : Saves the auto-zero setting values, program No., etc. to FLASH
memory.
Reference
When the method for switching program No. is "Terminal", the
Save program No. are not saved. Only the auto-zero setting values are ON
saved to the FLASH memory.
"Setting the Program-switching Method" (page 6-5)
OFF : The auto-zero setting values and program No. are not saved to
FLASH memory. Settings are erased when the power is turned OFF.
Reference
These settings including the auto-zero setting values and the program No. will be saved to the FLASH memory when
switching between the measurement screen and the setting screen using the console operation regardless of save
settings.

MEMO
6

Chapter 7
Memory Card
This chapter describes how to load/save with the memory card and
usage.
Memory Card
Memory Card Usage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
Displaying the Memory Card Screen . . . . . . . . . . . . . . . . . . . .7-2
Inserting / Removing a Memory Card. . . . . . . . . . . . . . . . . . . .7-3
Saving and Reading Operations . . . . . . . . . . . . . . . . . . . . . . . .7-4
Advanced Usage of Saving and Reading. . . . . . . . . . . . . . . . .7-9
- High-speed 2D Measurement Sensor Users’ Manual - 7-1

Memory Card Usage • Displaying the Memory Card Screen
Memory Card Usage Displaying the Memory Card

Screen
Following operations are possible with a memory card. This displays the operation screen for saving and reading
data with the memory card.
Saving and reading settings

This section explains saving and reading controller
The setting screen appears.
settings (program settings or environment settings) to or "Overview of the Screen and Console
from a memory card. Operations" (page 2-2)
• This serves as a backup of your settings in case there
are problems with the device.
• These settings can be copied to multiple controllers.
• Reading previously saved settings from the same type
of device allows for significant savings in man-hours
7
when changing settings.
"Program Function" (page 4-1)
"Environment Settings" (page 6-1)
Memory Card
Saving and reading measurement results

• This section explains how to save or read
measurements stored in the internal controller memory
(SDRAM) by the storage function to or from a memory
card.
• Stored measurement files can be read and confirmed
with the TM-Navigator. Also, files saved via image
2 select
the "Memory card" button and
storage can be read into the controller for confirmation.
• The measurement history can be saved.
• This allows analysis of images marked as NG. The memory card screen is displayed and the
"Performing Data Storage" (page 3-17) cursor moves to "Program".
"Performing Image Storage" (page 3-19)
Switching to the program in the memory card for

measurement
• Programs of No.0 to 15 can be saved as one file.
• Up to 256 types of program No. can be switched via
RS-232C interface.
"Switching to the Program in the Memory Card for
Measurement" (page 7-9)
Saving the measurement screen

The measurement screen can be saved as an image file
(image capture).
"Image Capture Function" (page 3-21)
7-2 - High-speed 2D Measurement Sensor Users’ Manual -

Inserting / Removing a Memory Card
Inserting / Removing a Memory Card
Usable Memory Cards Removing a Memory Card

This unit is compatible with the following memory cards: Reference
CA-SD1G (1GB) and CA-SD4G (4GB), each sold Take the following steps to protect the memory card and
separately. the data stored on it.
"List of Optional Products" (page 1-4) Removing the memory card without taking these steps or
Reference turning off the power while the memory card is being
• This unit supports FAT16, FAT32 and VFAT formatting. accessed will interrupt file saving operations and may
• To read CA-SD4G using a PC, use the reader damage the data on the memory card or the memory
compatible with SDHC. card itself.
• Do not use standard commercial memory cards. They
may cause problems with this unit's operation. 1 Display the memory card screen.
"Displaying the Memory Card Screen" (page 7-2) 7
Inserting a Memory Card 2 Press the [U] or [V] key to select
Memory Card
"Eject card" and press the [ENTER]
Insert the memory card into the memory card slot as
shown below.
key.
You can insert or remove the memory card with this unit The access lamp goes out and the "Memory card"
turned ON. window appears.
E
OL
NS
CO
R
0 TO
-300
NI
MO
TM
3 Press
WER
POON
I/O
SD
CA
RD
HE
AD
-B
the [ENTER] key to close the
Memory card slot
OU
T
US
B
-A
window.
AD
HE
2C
-23
RS
4 Push the memory card in the same

ET
RN
HE
ET
Memory card direction as for insertion.

• The memory card LED will illuminate when there is a Remove the memory card.
memory card inserted in the unit. (1)Confirm that the
Green : A memory card is inserted and access lamp is not
receiving power. illuminated.
Blinks red and green : The memory card is being
E
OL
accessed.
NS
CO
R
0 TO
-300
NI
MO
Off : The memory card is not

TM
WER
POON
I/O
receiving power (The memory SD

CA
RD
HE
AD
-B
card can be removed). OU

T
B
(2)Push in the
US
-A
AD
HE
Reference RS
-23
2C
memory card.
ET
RN
HE
• Make sure that the card is properly aligned before

ET
(3)Remove the
inserting it into the slot. The data on the memory card or memory card.
the memory card itself may be damaged if the memory
card is inserted into the slot incorrectly.
• Push the memory card all the way into the slot.

Saving and Reading Operations
Files Saving to a Memory Card

This section describes saving program setting contents
File name to a memory card from the controller as an example. The
procedure for saving environment settings, data storage
File names used to save data on the controller must be and image storage file are the same.
16 single-bite characters or less, or 8 double-byte For information on saving the measurement screen, see
characters or less and only in alphanumeric characters "Saving the Image of the Measurement Screen".
or katakana. "Image Capture Function" (page 3-21)
When no file name is specified, a file name will be
provided automatically.
A file name with date and time will be provided 1 Display the memory card screen.
"Displaying the Memory Card Screen" (page 7-2)
7
automatically for the measurement screen image and
storage data saved using the external terminal. Program to be saved File name
Memory Card
Save folders and file extensions

Folders to save files and file extensions are shown below.
Item Extension Save folder
Program Settings .prs \TM-3000\Prog
Environment
.ens \TM-3000\Env
Settings
Data storage .dst \TM-3000\DataSt
Image storage .bst \TM-3000\BmpSt Folder Save button
Measurement
screen image
.bmp \TM-3000\Img
"Program" in the save menu and press
• Data storage is saved in the memory card in binary the [ENTER] key.
format. The cursor moves to the file name and the default
The data can be loaded to the Excel file using TM- file name is displayed.
Navigator. The folder display shows the files that already exist
"TM-Navigator User's Manual" in the selected folder.
• When program settings are saved, both the program
setting file (.prs) and master image (.bmp) are saved.
• When image storage data is saved, both the image 3 To change the default file name, press
the [U] or [V] key to select "File name"
storage file (.bst) and image data (storage) (.bmp) are
saved. and press the [ENTER] key.
The file name input screen appears. Enter the
desired file name.
"Entering Characters" (page 2-8)

4 When the file name entry is complete,

press the [U] or [V] key to select the
Overwriting a previously existing file
"Save" button and press the [ENTER] 1 Press [U] or [V] key to select "Folder"
in step 3 of "Saving to a Memory Card".
key.
• The file is saved to memory.
• If there is a file with the same name, a message
confirming whether to overwrite the file will be
displayed.
Cursor
7
Select [YES] and press the [ENTER] key to overwrite
Memory Card
the file.
• A completion message appears when it is finished.

The cursor will move to the file list in the folder
display.
5 Press
Cursor
the [ENTER] key to close the
window.
3 Select a file name to overwrite and

The selected file name appears in the file name
display and the cursor moves to the folder display.
4 Continue from step 4 of "Saving to a

Memory Card".

Reading from a Memory Card 3 Press the [U] or [V] key to select the
folder display and press the [ENTER]
This section describes reading program setting contents
from a memory card to the controller as an example. The key.
procedure for reading environment settings and image The cursor will move to the file list in the folder
storage file are the same. display.
Reference
When reading image storage data and confirming it on
the image storage screen, set the storage setting to Cursor
"Image storage".
""View stored Image" screen" (page 3-9)
"Storage" (page 5-98)
7
1 Display the memory card screen.
Memory Card
Programs to be read File name

file to be read and press the [ENTER]
key.
The selected file name appears in the file name
display and the cursor moves to the folder display.

"Load" button and press the [ENTER]
key.
Folder Load button
The unit will start reading from the memory card.
A completion message appears when it is finished.
2 "Program"
Press the [U] or [V] key to select
in the load menu and press
the [ENTER] key.
The cursor moves to the folder display and the name
of the first file on the file list appears in the file name
display. 6 Press the [ENTER] key to close the
window.
If you do not change the file selection, proceed to
step 5.
Cursor

Deleting Files 3 Press the [U] or [V] key to select the

folder display and press the [ENTER]
This section explains how to delete unnecessary
program settings from a memory card. The procedure for key.
deleting environment settings, data storage and image The cursor will move to the file list in the folder
storage file are the same. display.
1 Display the memory card screen.

"Displaying the Memory Card Screen" (page 7-2) Cursor
Programs to be read File name
Memory Card
4 Press the [U] or [V] key to move the
cursor and select the file to be deleted.
Folder
5 Press and hold the [ZERO] key.
A message appears to confirm that the file will be
deleted.
2 "Program"
Press the [U] or [V] key to select
in the load menu and press
the [ENTER] key.
The cursor moves to the folder display.
6 Select
key.
An message appears to inform that the file has been

Cursor deleted.

window.

Formatting Memory Cards

This section explains how to quickly format memory
cards.
Reference
• If a memory card is formatted, all the data in the
memory card are erased.
• The memory card that is not formatted or whose file
system is broken cannot be formatted.
• This unit supports FAT16, FAT32 and VFAT formatting.
The memory card is formatted in the previous format.
7 1 Display the "MEMORY CARD" screen.

Memory Card

"Format" and press the [ENTER] key.
A window appears to confirm the format.
3 Select [YES] and press the [ENTER]

key to format.
The memory card will be formatted.
A format complete window appears when the format
is completed. Continue to step 4.
Select [NO] and press the [ENTER] key to cancel

the format. The procedure finishes here.

window.

Advanced Usage of Saving and Reading
Switching to the Program in the Saving the Storage Data to the

Memory Card for Measurement Memory Card
This section explains how to read a program setting file Use the external input terminal (S_SAVE) or RS-232C
from a memory card and then switch the program No. to command to save the storage data (data storage or
take measurements. image storage) to the memory card.
Up to 256 programs (16 programs x 16 files) can be "Storage Function" (page 3-17)
switched. Use the RS-232C interface to switch.
Saving the storage data
"Switch program No. on the memory card" (page 9-11)
"Response Delay Time When Sending & Receiving
Commands" (page 10-23) (1) Start storage
Preparation procedure
Data saved to
internal memory
(2)
7
(3)
Memory Card
ON
S_SAVE input
1 Set the measurement conditions.

OFF
(4)
File saved to the
Save
"Measurement Settings Details" (page 5-1) memory card
2 Save the program setting file to a

memory card.
(1)Start of data storage.
(2)Data is stored to the internal memory according to the
When saving, choose a file name from "Config00" to storage conditions.
"Config15". (3)S_SAVE input is set to ON.
Reference
Reference To save the storage data via RS-232C command, see
The name of the program setting file that can be "Save storage data" (page 9-17).
read from the memory card has been determined. (4)Data stored in the internal memory is saved to the
Make sure to use the specified file name. Custom file memory card as a single file. The file name is assigned
names cannot be used when switching. automatically. When the data is stored to the memory
card, the internal memory data is cleared.
Switching procedure Reference
• Measurements cannot be taken while data is being
1 Switch to the measurement screen and

take a measurement.
saved to a memory card.
Data Storage "Storage start/stop" (page 3-17)
Image Storage"Storage start/stop" (page 3-19)
"Overview of the Screen and Console
• For the timing chart, see "Memory Card Control Input
Operations" (page 2-2)
(S_SAVE Input)" (page 10-19).
2 Send a "Switch program No. on the

memory card" command to the
controller via the RS-232C interface.
Switched to the specified program No. in the
specified program and used for measurement.
"Switch program No. on the memory card"
(page 9-16)

MEMO
7
Memory Card

Chapter 8
I/O Terminals
This chapter describes names and functions of each of the I/O
Terminals.
I/O Terminals
Identifying Names and Functions of the I/O Terminals . . . . .8-2
I/O Circuit and Electrical Specifications . . . . . . . . . . . . . . . . .8-8

Identifying Names and Functions of the I/O Terminals
This section describes the names of the input/output terminals (input terminal block, output terminal block, and
expansion connector) and the terminal assignment.
"Part Names and Functions" (page 1-6)
"Connecting to the Terminal Block" (page 1-20)
Input terminal block
CO
NS
OL
E
Conforming socket block:
TM
WER
-300
0
MO
NI
TO
R
1 MC1.5/8-ST-3.5BK (Phoenix Contact)

POON
2
I/O
8 3
RD
CA
SD
-B
Conforming cable specification:

AD
HE
4
OU
T
US
B
AD
-A
5 AWG16 to 28, length of pigtail cable end
HE
-232
C
6 fabrication 7 mm
I/O Terminals
RS
ET
HE
RN
ET
7
8
Terminal Signal Circuit diagram(page 8-8) Reference

Description
number name TM-3001 TM-3001P page
1 COM_IN1 Input common - -
Remote terminal
The LED light is emitted from the transmitter sensor head
when short-circuited with COM_IN1. Non-voltage
2 REMOTE -
Emission is stopped when the terminal opens. input 1
The connection between REMOTE and COM_IN1 is short-
circuited with a jumper wire at the time of factory shipment.
Head A trigger input Non-
Voltage
3 TRG_A Operates as an external trigger input that performs voltage 3-11
input 2
sampling when the external trigger is selected. input 2
Timing input 1
Operates as the hold function that holds the measurement
4 TIMING 1 3-10
value. Also operates as an external synchronization signal
for the measurement mode.
Auto-zero input 1 Non-
Voltage
5 ZERO1 Operates as the auto-zero function that sets the current voltage 3-12
input 1
measurement value to zero. input 1
Reset input
This resets the measured value and evaluation. The
6 RESET
measurement standby state continues until the
measurement value is updated next time.
7 24 V DC (+) 24 V DC input for power -
8 24 V DC (-) 0 V input for power -
Note
Part of each input/output circuit is common via a choke coil. Be careful not to generate a potential difference.

Output terminal block
CO
NS
OL
E
Conforming socket block:

TM
-300
WER
POON
0
MO
NI
TO
R
COM
OUT 1 MC1.5/9-ST-3.5BK (Phoenix Contact)
2
I/O
ERR
3
RD
CA
SD
-B
GO
Conforming cable specification:
AD
HE
BUSY 4
AWG16 to 28, length of pigtail cable end
T
RDY
5
OU
B
A
US
-A
AD
HE
RS
-232
C
INV
A 6 fabrication 7 mm
ET
HE
RN
ET
CH1 7
CH2 8
0V 9
8
Terminal Signal Circuit diagram(page 8-8) Reference
Description
I/O Terminals
number name TM-3001 TM-3001P page
1 COM_OUT1 Output common - -
Performs normal closed (N.C.) output (Normal ON, Error
2 ERROR 11-16
OFF) after turning on the power or when an error occurs.
Total evaluation result output
3-2
3 GO Outputs when all of the tolerance evaluation results are
11-16
GO for the OUT numbers being used for measurement.
Busy output
NPN PNP 3-11
4 BUSY Outputs during measurement process until the
open- open- 10-1
measurement value is updated (i.e. after trigger input).
collector collector
Head A ready output output output 3-11
5 READY_A
Outputs when head A can receives a trigger input. 10-1
Invalid output
This terminal outputs whether the position correction is
5-14
6 INVALID successful or not for head A/B.
10-1
Outputs when either head has failed the position
correction.
7 CH1 Analog voltage output (CH1/CH2)
Outputs in the range of ±10.5 V with reference to the Analog voltage
8 CH2 5-96
displayed value. Output circuit
9 0V Analog voltage output 0 V
Note

Expansion connector
1 21
E
Conforming connector:
OL
NS
CO
0 R
FX2B series (HIROSE Electric Inc.)
TO
-300 MO
NI
TM
WER
POON
I/O
SD
CA
RD
-B
Use a 3 m expansion connector cable (OP-51657).
20 40
AD
HE
OU
T
"List of Optional Products" (page 1-4)
B
US
-A
AD
HE
C
-232
RS
ET
RN
HE
ET
8
Circuit diagram
Description Cable color
(page 8-8)
I/O Terminals
Terminal Reference
Signal name (OP-51657
number During evaluation During binary value page
TM-3001 TM-3001P used)
output output
1 COM_IN2 Input common - Brown
Head B trigger input
Non-
Operates as an external trigger input that Voltage
2 TRG_B voltage 3-11 Red
performs sampling when the external input 2
input 2
trigger is selected.
Timing input 2
Operates as the hold function that holds
3 TIMING2 the measurement value. Also operates as 3-10 Orange
an external synchronization signal for the
measurement mode.
Zero input 2
4 ZERO2 Operates as the auto-zero function that sets 3-12 Yellow
the current measurement value to zero.
Non-
5 P1 Voltage Green
Program No. switching input voltage
input 1
6 P2 Measurement conditions can be called input 1 Blue
3-15
7 P3 based on previously saved target types to Purple
8 P4 allow easy changes to settings. Gray
Storage data saving input
3-18
9 S_SAVE This saves images and data to the memory card White
3-20
by short-circuiting with the COM_IN terminal.
10 IN_A Expansion input A (Not used) - Black
11 IN_B Expansion input B (Not used) - Brown
12 COM_OUT2 Output common - Red
13 HI1 (9)/Binary (0) Evaluation HI output Orange
14 GO1 (9)/Binary (1) output for GO output NPN PNP Yellow
5-85
15 LO1 (9)/Binary (2) OUT1/OUT9 LO output open- open- Green
Binary output 8-6
16 HI2 (10)/Binary (3) Evaluation HI output collector collector Blue
8-7
17 GO2 (10)/Binary (4) output for GO output output output Purple
18 LO2 (10)/Binary (5) OUT2/OUT10 LO output Gray

Circuit diagram
Description Cable color
Terminal (page 8-8) Reference
Signal name (OP-51657
number During evaluation During binary value page
TM-3001 TM-3001P used)
output output
19 HI3 (11)/Binary (6) Evaluation HI output White
20 GO3 (11)/Binary (7) output for GO output Black
21 LO3 (11)/Binary (8) OUT3/OUT11 LO output Brown
22 HI4 (12)/Binary (9) Evaluation HI output Red
23 GO4 (12)/Binary (10) output for GO output Orange
24 LO4 (12)/Binary (11) OUT4/OUT12 LO output Yellow
25 HI5 (13)/Binary (12) Evaluation HI output Green
26 GO5 (13)/Binary (13) output for GO output Binary output Blue
27 LO5 (13)/Binary (14) OUT5/OUT13 LO output Purple
28 HI6 (14)/Binary (15) Evaluation HI output 5-95 Gray
29
30
GO6 (14)/Binary (16) output for
LO6 (14)/Binary (17) OUT6/OUT14
GO output
LO output
10-16
8-6
White
Black
8
8-7
I/O Terminals
31 HI7 (15)/Binary (18) Evaluation HI output Brown
32 GO7 (15)/Binary (19) output for GO output NPN PNP Red
33 LO7 (15)/Binary (20) OUT7/OUT15 LO output open- open- Orange
collector collector
34 HI8 (16)/BIN_OUT1 Evaluation HI output Yellow
output output
35 GO8 (16)/BIN_OUT2 output for GO output Green
36 LO8 (16)/BIN_OUT3 OUT8/OUT16 LO output During output Blue
During evaluation output OUT number
for OUT1 to OUT8: ON output
37 BIN_OUT4 Purple
During evaluation output
for OUT9 to OUT16: OFF
Presents the output status of the evaluation/
binary output.
38 BIN_SEL Gray
During binary output: ON
During evaluation output: OFF
8-7
39 STROBE Strobe output for evaluation/binary output White
Head B ready output
40 READY_B Outputs when head B can receives a Black
trigger input.
Note
Reference
"During output OUT No. output" (page 8-7)

Evaluation output
The evaluation output (HI/GO/LO) is output according to the tolerance evaluation result for each OUT number. HI and
LO outputs turn on at the same time when the alarm error is issued.
The evaluation output is output in time sharing mode for OUT1 to OUT8 and OUT9 to OUT16 using the expansion
connector (terminal number 13 to 36).
Binary output can be output via time sharing.
Make the setting in "Binary output" of "Common settings" whether to output the binary output.
The relevant output terminals are as follows.
Expansion connector's
Signal name Description
pin No.
No. 13 to No. 36 HI / GO / LO Tolerance evaluation output
8 Evaluation section output
No. 37 BIN_OUT4 During evaluation output for OUT1 to OUT8: ON
I/O Terminals
During evaluation output for OUT9 to OUT16: OFF

Presents the output status of the evaluation/binary output.
No. 38 BIN_SEL During binary output: ON
No. 39 STROBE Strobe output for evaluation/binary output
Reference
For the timing chart of each signal, see "Binary output" (page 5-95).
Binary output
The measurement values for OUT1 to OUT16 can be output as the binary value data (two's complement of 21 bits).
Outputs are time shared for the selected OUT number and evaluation output.
Make the setting in "Binary output" of "Common settings" whether to output the binary output or evaluation output.
Reference
Negative logic (1 when the NPN or PNP open-collector output is ON) is applied.
The relevant output terminals are as follows.
Expansion connector's
Signal name Description
pin No.
No. 13 to No. 33 Binary (0) to Binary (20) Binary output
No. 34 to No. 37 BIN_OUT1 to BIN_OUT4 During output OUT No. output
Presents the output status of the evaluation/binary output.
No. 38 BIN_SEL During binary output: ON
No. 39 STROBE Strobe output for evaluation/binary output
Reference
For the timing chart of each signal, see "Binary output" (page 5-95).

How to read the binary output

The binary output outputs the measurement value as a binary number (two's complement) of 21 bits.
The decimal point is ignored. Regardless of the unit being used, the minimum display unit is 1LSB when the decimal
point is ignored.
(Hexadecimal
Status Screen display Binary output (Binary)
display)
13.497 mm
1349.7 mm 0x0034B9 0 0000 0011 0100 1011 1001
Measured value 134.97 mm2
-13.497 mm
0x1FCB47 1 1111 1100 1011 0100 0111
-13.497 deg
Evaluation standby / Image not taken - - - - - - 0x100000 1 0000 0000 0000 0000 0000
Positive range over
• Negative range over
FFFFFF 0x0FFFFF 0 1111 1111 1111 1111 1111
8
-FFFFFF 0x100000 1 0000 0000 0000 0000 0000
• Alarm error
I/O Terminals
During output OUT No. output
The evaluation/binary OUT No. output in time sharing mode can be checked by monitoring the status of the OUT No.
output (BIN_OUT1 to BIN_OUT4).
BIN_OUT4 BIN_OUT3 BIN_OUT2 BIN_OUT1
OUT1 OFF OFF OFF OFF
OUT2 OFF OFF OFF ON
OUT3 OFF OFF ON OFF
OUT4 OFF OFF ON ON
OUT5 OFF ON OFF OFF
OUT6 OFF ON OFF ON
OUT7 OFF ON ON OFF
OUT8 OFF ON ON ON
OUT9 ON OFF OFF OFF
OUT10 ON OFF OFF ON
OUT11 ON OFF ON OFF
OUT12 ON OFF ON ON
OUT13 ON ON OFF OFF
OUT14 ON ON OFF ON
OUT15 ON ON ON OFF
OUT16 ON ON ON ON

I/O Circuit and Electrical Specifications
TM-3001 (NPN output type)

Refer to the following pages for more information on each I/O terminal alignment.
"Identifying Names and Functions of the I/O Terminals" (page 8-2)
Input circuit
Non-voltage input 1 Non-voltage input 2
+5V +12V
Internal circuit
Internal circuit
1.5kΩ 470Ω
Non-voltage 2kΩ TRG_A 1kΩ
input 1 /TRG_B
COM_IN1 COM_IN1
8 /COM_IN2 /COM_IN2
Item Specifications Item Specifications

I/O Terminals
ON voltage 1 V or less ON voltage 5 V or less

OFF current 0.3 mA or less OFF current 1 mA or less
Short-circuit current (Typ.) 2 mA ON current 5 mA or more
Reference
Compatible with the 2-wire proximity switch EV Series
(KEYENCE).
Reference
The wiring conditions are as follows.
Input Input
COM COM
Output circuit
NPN open-collector output Analog voltage output
Output
Internal circuit
47Ω 47Ω
Internal circuit
Voltage output
102
0V
1kΩ
COM_OUT1
/COM_OUT2

Maximum Output range ±10.8 V (Measurement value: ±10.5 V)
30 V
applied voltage Resolution 2 mV
Maximum sink ±0.05 % of F.S.
50 mA
current Accuracy (F.S. = 20 V, accuracy in reference
Output terminal block: 1.4 V or less (50 mA) to the displayed value)
Residual voltage 1.0 V or less (20 mA) Output impedance Approx. 100 Ω
Expansion connector: 1.0 V or less
Response delay Approx. 12 μs (after
Leakage current 0.1 mA or less time measurement value update)

TM-3001P (PNP output type)

Refer to the following page for more information on each I/O terminal alignment.
"Identifying Names and Functions of the I/O Terminals" (page 8-2)
Input circuit
Voltage input 1 Voltage input 2
Voltage 6.2kΩ TRG_A 3kΩ
Internal circuit
Internal circuit
input 1 /TRG_B
1kΩ 470Ω
COM_IN1 COM_IN1
/COM_IN2 /COM_IN2

8
I/O Terminals
Input maximum rating 26.4 V Input maximum rating 26.4 V
ON voltage 10.8 V or more ON voltage 10.8 V or more
ON current (Typ.) 2 mA or more ON current (Typ.) 3 mA or more
OFF voltage 3 V or less OFF voltage 5 V or less
OFF current 0.3mA or less OFF current 1 mA or less
Reference
Compatible with the 2-wire proximity switch EV Series
(KEYENCE).When using the EV Series, 21.6 V DC or
more input supply voltage is required.
Reference
The wiring conditions are as follows.
Input Input
COM COM
Non-voltage input 1
+5V
Internal circuit
1.5kΩ
2kΩ
REMOTE
COM_IN1
Item Specifications Reference
ON voltage 1 V or less The wiring conditions are as follows.

OFF current 0.3 mA or less
Input Input
Short-circuit current
2mA
(Typ.)
COM COM

Output circuit
PNP open-collector output Analog voltage output
COM_OUT1
/COM_OUT2
1kΩ
47Ω 47Ω
Internal circuit
Voltage output
Internal circuit
102
0V
Output
8
Maximum Output range ±10.8 V (Measurement value: ±10.5 V)
30 V
applied voltage
Resolution 2 mV
Maximum
50 mA ±0.05% of F.S.
I/O Terminals
source current
Accuracy (F.S. = 20 V, accuracy in reference
Output terminal block: 1.4 V or less (50 mA) to the displayed value)
Residual voltage 1.0 V or less (20 mA)
Output impedance Approx. 100 Ω
Expansion connector: 1.0 V or less
Response delay Approx. 12 μs (after
Leakage current 0.1 mA or less
time measurement value update)
Insulation status between I/O circuits

Note
• 24 V DC (-) and analog voltage output 0 V are all common via a choke coil. COM_IN1 and COM_IN2 are common via
a choke coil. Also, 24 V DC (-), SG (GND) on RS-232C, and the USB connector metal shell are each common with
GND. Take care that a potential difference does not occur between the internal common terminals due to a positive
grounding environment or a potential difference between the equipment. Otherwise, it may cause a malfunction in the
TM-3000 Series or a malfunction in the connected computer or other external devices.
• COM_OUT1 and COM_OUT2 are each insulated separately. Use COM_OUT1 for the output terminal block output and
use COM_OUT2 for the expansion connector output.
Expansion connector output

Analog voltage output Analog voltage output circuit Output circuit 2
COM_OUT2
Analog voltage output 0V Output terminal block output

Output circuit 1
COM_OUT1
DC24V (-)
Input circuit 2 Expansion connector input

GND for RS232C
COM_IN2
USB connector shell and GND
Input circuit 1 Output terminal block input
COM_IN1
Internal GND

Chapter 9
RS-232C Communications
This chapter explains how to read measurement values and
change setting values via RS-232C communication.
RS-232C Communication Specifications and Terminal
Assignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2
Connections and settings for RS-232C Communication . .9-3
Outputting Measurement Values . . . . . . . . . . . . . . . . . . . . .9-4
Outputting Measurement Values and Changing Settings via
Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-5
Command Types and Reception . . . . . . . . . . . . . . . . . . . .9-5
Overview of Command Formats . . . . . . . . . . . . . . . . . . . .9-7
Mode Change Commands . . . . . . . . . . . . . . . . . . . . . . . .9-10
Overview of Measurement Control Commands. . . . . . .9-11
Measurement Control Command Details . . . . . . . . . . . .9-12
Overview of Change Parameter Commands . . . . . . . . .9-18
Details of Change Parameter Commands . . . . . . . . . . .9-19
Overview of Read Parameter Commands . . . . . . . . . . .9-29
Outputting Measurement Values via Auto-send . . . . . . . . . .9-31
Setting Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-31
Output Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-31
Output Data Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-32
Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-33
ASCII Code Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-33

RS-232C Communication Specifications and Terminal Assignment
RS-232C Communication Specifications and Terminal Assignment
This section describes the communication specifications and terminal assignment of connector for RS-232C interface.
Communication Specifications
The serial communication specifications of this unit are
Item Setting range
shown in the chart at right.
EIA RS-232C compliant (Modem definition) Communication method Full duplex
Synchronization method Asynchronous
Make the setting according to the communication Transmission code ASCII
conditions for external devices that perform serial
Data length 8 bit
communication.
For settings of communication specifications, see Stop bit length 1 bit
"Setting the Communication Specifications for RS-232C" Parity check None (default) / even / odd
(page 6-3). 9600 (default)/19200/
Baud rate
38400/57600/115200bps
Data delimiter CR
9 Flow control None

Terminal Assignment of Connector

This section describes the connector shape and and terminal assignment for this unit's RS-232C communication.
Matching connector specifications: Modular 6-pin plug connector

Use a 2.5 m RS-232C cable (OP-96368).
Terminal
CONSOLE Signal name Description
number
I/O TM-3001
POWER
ON
1 (Not used) -
SD CARD 2 (Not used) -
OUT
Receives signal from external
RS-232C connector 3 SD (TXD)
devices (input)
USB
(1) 4 SG (GND) GND

IN
(2)
RS-232C
(3) Transmits signal to external

(4) 5 RD (RXD)
ETHERNET
(5)
devices (output)
(6)
6 (Not used) -
* Do not use the unused terminal. Doing so may lead to
breakdown of the unit.
* 24 V DC (-) and SG (GND) are common.
* Due to modem specifications, SD is used for receiving
data (input into this unit) and RD is used for sending data
(output from this unit).

Connections and settings for RS-232C Communication
Connections and settings for RS-232C Communication
Connecting to a PC or PLC Link Unit

Use the dedicated cables OP-96368 (2.5 m straight cable), OP-26401 (D-sub 9-pin), or OP-96369 (D-sub 25-pin) for
connection.
Refer to the instruction manual of the PC or PLC link unit as well for this connection.
Computer
TM-3001 OP-96369 OP-26401 Signal name
RD (RXD) (5) (3) (2) RD (RXD)
SG (GND) (4) (7) (5) SG (GND)
Computer SD (TXD) (3) (2) (3) SD (TXD)
(4) (7) RS (RTS)
OP-96369 (5) (8) CS (CTS)
(6) (6) DR (DSR)
(8) CD (DCD)
(20) (4) ER (DTR)
LE
CONSO
OR
000
MONIT
TM-3
R
POWE
ON
I/O
CARD
9
SD
B
HEAD-
OUT
USB
A
HEAD-
2C
RS-23
PLC link unit

NET
ETHER
OP-96368
LE
CONSO
OR
000
MONIT
TM-3
R
POWE
ON
I/O
CARD
SD
B
HEAD-
OUT
USB
A
HEAD-
2C
RS-23
NET
ETHER
OP-26401
OP-96368
Communication Specification Settings

Change the setting depending on the connected PC or PLC link unit.
Refer to the instruction manual of the PC or PLC link unit for information on the communication specifications of each
device.
"Setting the Communication Specifications for RS-232C" (page 6-3)

Outputting Measurement Values
Outputting Measurement Values
There are two methods for outputting measurement values to the connected external devices.
Outputting Measurement Values via Commands

Communication commands can be used to output measurement values via no-handshake communication. When a
measurement value output command is received from the external device, the unit replies with a measurement value
command.
"Measurement value output" (page 9-12)
RS-232C incoming command
Measurement value output command
RS-232C response command
Measurement value command
9 Outputting Measurement Values via Auto-send

Measurement value commands are sent at the same time as measurements are fixed by the external input terminal
(trigger input or timing input).
Turn the auto-send ON when using the measurement value output via auto-send.
"Auto-send" (page 5-101)
"When Setting is Continuous Trigger" (page 10-2)
"When Setting is External Trigger" (page 10-12)
External input terminal
Timing input/trigger input
RS-232C response command
Measurement value command

Outputting Measurement Values and Changing Settings via Commands
You can import measurement values or change the parameters of the TM-3000 Series via the communication
commands from external devices such as a PC and PLC link unit.
The modes in which this unit can receive a command (communication mode) vary depending on the type of command.
Command Types and Reception
Command types
There are 4 types of commands as below.
Mode change commands

These commands switch between the measurement screen (when measuring) and RS-232C communication mode.
"Mode Change Commands" (page 9-10)
Measurement control commands

These commands control measurement.
9
These commands switch measurement output, timing input, auto-zero input and program No.
"Overview of Measurement Control Commands" (page 9-11)
Change parameter commands
These commands change the settings of measurement conditions.
Tolerance, averaging and measurement mode can be changed.
These commands require use of RS-232C communication mode.
"Overview of Change Parameter Commands" (page 9-18)
Read parameter commands

These commands read the settings of measurement conditions.
These commands require use of RS-232C communication mode.
"Overview of Read Parameter Commands" (page 9-29)

Command reception
The following commands can be received, depending on the communication status of this unit and display status of
screen.
A status error is returned if the unit receives a command it cannot process in its current status.
"Error response command format" (page 9-7)
"Controller Status Table" (page 11-16)
Screen Valid RS-232C commands

Measurement
Live measurement screen • Measurement control commands
Screen
• Command to change to RS-232C communication
(During mode
Display setting menu
measurement)
• Change parameter commands
• Check parameter commands
9
"RS-232C communicating" display
• Command to change to the measurement screen
(while measuring)
Setting screen (During setting)

"View stored Image" screen
• None
"USB communicating" display
Unable to receive RS-232C commands
"ETHERNET Communicating"
display

Overview of Command Formats

The TM-3000 Series responds to incoming commands from external devices and sends response commands back to
the external device.
Use CR (Carriage return) as a delimiter for incoming/response command formats.
Incoming command
Incoming command format CR
Response command
Response command format CR
Error response command format CR
Note
To create the control program, confirm the response command from this unit before sending the next command to this unit.
Reference
Both upper-case and lower-case characters can be used in the commands. 9
The presence or absence of the brackets [ ] in the command format depends on the command conditions.
Incoming command
Incoming command format
[ , ][ , ] [ , ]
••
•
Main command Identifier 1 Identifier 2 Identifier n
Setting format may be included in the identifiers.

"Changing settings (f f f f f f f)" in "Measurement Format" (page 9-8)
"Reading settings (f f f f f f f f)" in "Measurement Format" (page 9-8)
Response command
Response command format
[ , ][ , ] [ , ]
••
•
Identifier 1 Identifier n
The main command or identifier that has been received is added as a header.
Measurement value format may be included in the identifiers.

"Measurement value (h h h h h h h h)" in "Measurement Format" (page 9-8)
Error response command format
E R , ,
Main command Error code
00 : Command error 22 : Parameter range error
01 : Status error 88 : Time-out error
20 : Command length error 90 : Checksum error
21 : Parameter number error 99 : Others

Measurement Format
This section describes the details for measurement values included in incoming/response command formats.
Changing settings (f f f f f f f)
Use the following format to change settings.
+/- code Integer portion
Fixed length of 6 numbers. No decimal point.

Fixed length of one character: "+" or "-".
<Example>
Display value Format ASCII data format*
+123.456 +123456 0x2B 0x31 0x32 0x33 0x34 0x35 0x36
-1.230 -001230 0x2D 0x30 0x30 0x31 0x32 0x33 0x30
9 +1234.56
-1.2
+123456
-000012
0x2B 0x31 0x32 0x33 0x34 0x35 0x36
0x2D 0x30 0x30 0x30 0x30 0x31 0x32
* For information about ASCII data format, see "ASCII Code Table" (page 9-33).
For information about the decimal point positions, see "Min display unit" (page 5-87).
Reading settings (f f f f f f f f)
Use the following format to read settings.
+/- code Integer portion Decimal point Fractional portion
Fixed length of 6 numbers and one decimal point.

The position of the decimal point varies depending on the settings.
<Example>
Display value Format ASCII data format*
+12.345 +012.345 0x2B 0x30 0x31 0x32 0x2E 0x33 0x34 0x35
-1.230 -001.230 0x2D 0x30 0x30 0x31 0x2E 0x32 0x33 0x30
+1234.56 +1234.56 0x2B 0x31 0x32 0x33 0x34 0x2E 0x35 0x36
-1.2 -00001.2 0x2D 0x30 0x30 0x30 0x30 0x31 0x2E 0x32

Measurement value (h h h h h h h h)
Measurement values are output in the format as shown below.
+/- code Integer portion Decimal point Fractional portion
Fixed length of 7 characters in total. The decimal point is counted as one character.
The position of the decimal point varies depending on the settings.
The measurement value is right-justified.
Display value Format ASCII data format* Remarks

+12.345 +012.345 0x2B 0x30 0x31 0x32 0x2E 0x33 0x34 0x35 -
-0.120 -000.120 0x2D 0x30 0x30 0x30 0x2E 0x31 0x32 0x30 -
+1234.56 +1234.56 0x2B 0x31 0x32 0x33 0x34 0x2E 0x35 0x36 -
-1.2 -00001.2 0x2D 0x30 0x30 0x30 0x30 0x31 0x2E 0x32 -
-------- XXXXXXXX 0x58 0x58 0x58 0x58 0x58 0x58 0x58 0x58
During evaluation
standby 9
Positive side range
+FFFFFFF +FFFFFFF 0x2B 0x46 0x46 0x46 0x46 0x46 0x46 0x46
over
Negative side range
-FFFFFFF -FFFFFFF 0x2D 0x46 0x46 0x46 0x46 0x46 0x46 0x46
over
OUT number specification

When specifying the OUT number for operation such as the auto-zero or timing input, use the following format.
aa••• aa: 16 digits - Specify OUT1 to 16.
Example: When directing measurement output of OUT 2, 5 and 16, a=0100100000000001
MM, 0100100000000001<CR>
(0x4D 0x4D 0x2C 0x30 0x31 0x30 0x30 0x31 0x30 ••• 0x30 0x31 0x0D)

Mode Change Commands

This section describes the command format for switching between the "Measurement screen (During measurement)"
and "RS-232C communication mode".
"Command types" (page 9-5)
Command list
Incoming
Response
Actions Operation description command
*1
*1
Changing to RS-232C This changes to RS-232C communication Q0<CR> Q0<CR>
communication mode mode. (0x51 0x30 0x0D) (0x51 0x30 0x0D)
This saves settings to the FLASH memory
before changing modes. The settings will be
Saving to
preserved even if the power is turned off. R0<CR> R0<CR>
FLASH
To preserve the FLASH memory, use the (0x52 0x30 0x0D) (0x52 0x30 0x0D)
9 Changing to the memory
measurement
"R1" command if you change settings
frequently.
screen
This saves settings to the SRAM memory
Not saving to
before changing modes. Nothing is saved R1<CR> R1<CR>
FLASH
to FLASH memory. These settings will be (0x52 0x31 0x0D) (0x52 0x31 0x0D)
memory
erased when the power is turned off.
*1 The figures indicated in ( ) for the incoming commands and response commands represent the ASCII code
format.
Note
• The "R1" command can be received only when the environment setting "Setting Save operations for Flash Memory
(Save)" (page 6-5) is set to OFF. When it is ON, a status error is returned.
For information about the status error, see "Error response command format" (page 9-7) of response command.

Overview of Measurement Control Commands

This section describes the incoming commands that this unit can receive during measurement for measurement control
and also describes the response commands sent when processed properly.
For details about response commands to invalid commands, see "Overview of Command Formats" (page 9-7) and
about response delay time, see "Response Delay Time When Sending & Receiving Commands" (page 10-23).
Note
These commands can be accepted only when the controller is in the "Measurement screen (During measurement)".
Incoming
Control contents Response command Reference page
commands
Switch measurement screen DC, gg,<CR> DC<CR>
MM, aa••• aa, hhhhhhhh
Measurement value output MM, aa••• aa<CR>
[, hhhhhhhh]•••[, hhhhhhhh]<CR> page 9-12
MA, hhhhhhhh
Measurement value output (ALL) MA<CR>
[, hhhhhhhh]•••[, hhhhhhhh]<CR> 9
Trigger input S i <CR> S i <CR>
Auto-zero ON VM, aa••• aa<CR> VM, aa••• aa<CR> page 9-13
Auto-zero ON (ALL) VA<CR> VA<CR>
Auto-zero OFF WM, aa••• aa<CR> WM, aa••• aa<CR>
Auto-zero OFF (ALL) WA<CR> WA<CR>
page 9-14
TM, p,
Timing ON/OFF TM, p, aa•••aa <CR>
aa••• aa<CR>
Timing 1 ON/OFF T1, p<CR> T1, p<CR>
Reset VR<CR> VR<CR>
page 9-15
Keylock KL, p<CR> KL<CR>
Confirm program No. PR<CR> PR, oo<CR>
Switch program No. PW, oo<CR> PW<CR>
Switch program No. on the memory
PC, f f , oo<CR> PC<CR>
card
page 9-16
Start storage AS<CR> AS<CR>
Stop storage AP<CR> AP<CR>
Initialize storage AQ<CR> AQ<CR>
Storage state output AN<CR> AN, s, ddddd<CR>
AD, bb
Acquire storage data AD, bb<CR> page 9-17
[, hhhhhhhh]•••[, hhhhhhhh]<CR>
Save storage data SS<CR> SS<CR>
aa••• aa: Specifies OUT number 16 bit bb: Specifies OUT 01 to 16 ddddd: Amount of storage data 0 to 65536
f f : File number 00 to 15 gg: Screen type hhhhhhhh: Measurement value
i : Specifies head oo: Program No. 00 to 15 p: Specifies ON/OFF
s: Storage state

Measurement Control Command Details

Switching the measurement screen
This switches to the specified measurement screen.
Incoming DC, gg<CR>
command (0x44 0x43 0x2C gg 0x0D)
Response DC<CR>
command (0x44 0x43 0x0D)
Parameter gg: Displays the screen type.
description 00 (0x30 0x30): Multiple value display screen
01 to 16 (0x30 0x31 to 0x31 0x36): OUT1 to OUT16 Single value display screen
HA (0x48 0x41): Screen display Head A
HB (0x48 0x42): Screen display Head B
HC (0x48 0x43): Screen display Both Heads
Example: When changing to the OUT12 value display screen
9 DC,12<CR> (0x44 0x43 0x31 0x32 0x0D)
Measurement value output

This outputs the measurement value associated with a specified OUT number.
Incoming MM, aa••• aa<CR>
command (0x4D 0x4D 0x2C aa••• aa 0x0D)
Response MM, aa••• aa, hhhhhhhh[, hhhhhhhh]•••[, hhhhhhhh]<CR>
command (0x4D 0x4D 0x2C aa••• aa, hhhhhhhh [0x2C hhhhhhhh]•••[0x2C hhhhhhhh] 0x0D)
Parameter aa••• aa: 16 digits - Set 1 (output) or 0 (not output) for every OUT from OUT1 to 16.
description Example: When outputting measurement values of OUT2, 5 and 16,
aa•••aa = 0100100000000001
MM, 0100100000000001<CR>
(0x4D 0x4D 0x2C 0x30 0x31 0x30 0x30 0x31 0x30 ••• 0x30 0x31 0x0D)
hhhhhhhh: 8 digits - Measurement value identifier(page 9-9)
Measurement value output (ALL)

This outputs the measurement values associated with all measured OUT numbers.
Incoming MA<CR>
command (0x4D 0x41 0x0D)
Response MA, hhhhhhhh[, hhhhhhhh]•••[, hhhhhhhh]<CR>
command (0x4D 0x41 0x2C hhhhhhhh [0x2C hhhhhhhh]•••[0x2C hhhhhhhh] 0x0D)
Parameter hhhhhhhh: 8 digits - Measurement value identifier(page 9-9)
description

Trigger input
This performs the trigger (page 3-11) input to the specified head.
Incoming S i <CR>
command (0x53 i 0x0D)
Response S i <CR>
command (0x53 i 0x0D)
Parameter i : Head specification
description 0 (0x30): Both Heads
1 (0x31): Head A
2 (0x32): Head B
Auto-zero ON
This performs the auto-zero (page 3-12) to the specified OUT number.
Incoming VM, aa••• aa<CR>
command (0x56 0x4D aa••• aa 0x0D)
Response VM, aa••• aa<CR> 9
command (0x56 0x4D 0x2C aa••• aa 0x0D)
Parameter aa••• aa: 16 digits - Set 1 (perform auto-zero) or 0 (not perform auto-zero) for every OUT from
description OUT1 to 16.
Example: When performing the auto-zero for OUT2, 5 and 16,
aa•••aa = 0100100000000001
VM, 0100100000000001<CR>
(0x56 0x4D 0x2C 0x30 0x31 0x30 0x30 0x31 0x30 ••• 0x30 0x31 0x0D)
Auto-zero ON (ALL)
This performs the auto-zero (page 3-12) for all measured OUT numbers.
Incoming VA<CR>
Response VA<CR>
Parameter
-
description

Auto-zero OFF
This cancels the auto-zero (page 3-12) to the specified OUT number.
Incoming WM, aa••• aa<CR>
Response WM, aa••• aa<CR>
Parameter aa••• aa: 16 digits - Set 1 (cancel auto-zero) or 0 (not cancel auto-zero) for every OUT from
description OUT1 to 16.
Example: When canceling the auto-zero for OUT2, 5 and 16,
aa•••aa = 0100100000000001
WM, 0100100000000001<CR>
(0x57 0x4D 0x2C 0x30 0x31 0x30 0x30 0x31 0x30 ••• 0x30 0x31 0x0D)
Auto-zero OFF (ALL)

This cancels the auto-zero (page 3-12) for all measured OUT numbers.
9 Incoming WA<CR>
Response WA<CR>
Parameter
-
description
Timing ON/OFF
This performs the timing input to the specified OUT number.
Incoming TM, p, aa••• aa<CR>
command (0x54 0x4D 0x2C p 0x2C aa••• aa 0x0D)
Response TM, p, aa••• aa<CR>
command (0x54 0x4D 0x2C p 0x2C aa••• aa 0x0D)
Parameter p: ON/OFF specification
description 0 (0x30): OFF
1 (0x31): ON
aa••• aa: 16 digits - Set 1 (timing input ON) or 0 (timing input OFF) for every OUT from OUT1 to 16.
Example: When performing the timing input ON for OUT2, 5 and 16,
aa•••aa = 0100100000000001
TM,1,0100100000000001<CR>
(0x54 0x4D 0x2C 0x31 0x2C 0x30 0x31 0x30 0x30 0x31 0x30 ••• 0x30 0x31 0x0D)

Timing input 1 ON/OFF

This command has the same function as the external input TIMING1.
This performs the timing input to the OUT number set for TIMING1.
Incoming T1, p<CR>
command (0x54 0x31 0x2C p 0x0D)
Response T1, p<CR>
command (0x54 0x31 0x2C p 0x0D)
1 (0x31): ON
Reset
This command has the same function as the external input terminal RESET.
Incoming VR<CR>
command
Response
(0x56 0x52 0x0D)
VR<CR>
9
Parameter
-
description
Keylock
This performs keylock for the console.
Incoming KL, p<CR>
command (0x4B 0x4C 0x2C p 0x0D)
Response KL<CR>
command (0x4B 0x4C 0x0D)
description 0 (0x30): Cancels keylock
1 (0x31): Sets keylock
Confirm program No.

This confirms the program No. in operation.
Incoming PR<CR>
Response PR, oo<CR>
command (0x50 0x52 0x2C oo 0x0D)
Parameter oo: Program No. 00 to 15 (0x30 0x30 to 0x31 0x35)
description

Switch program No.

This switches to the specified program No.
Incoming PW, oo<CR>
command (0x50 0x57 0x2C oo 0x0D)
Response PW<CR>
Parameter oo: Program No. 00 to 15 (0x30 0x30 to 0x31 0x35)
description
Error code This is valid only when "Program switch" in the environment settings is set to "Console". If "Terminal
" is selected, a status error is returned. "Error response command format" (page 9-7)
Switch program No. on the memory card

This specifies the file number and program No. of the program set and saved on the memory card beforehand.
"Switching to the Program in the Memory Card for Measurement" (page 7-9)
9 Incoming
command
PC, f f , oo<CR>
(0x50 0x43 0x2C f f 0x2C oo 0x0D)
Response PC<CR>
Parameter f f : File number 00 to 15 (0x30 0x30 to 0x31 0x35)
description oo: Program No. 00 to 15 (0x30 0x30 to 0x31 0x35)
Error code This is valid only when "Program switch" in the environment settings is set to "Console". If "Terminal
" is selected, a status error is returned. "Error response command format" (page 9-7)
Start storage
This starts the storage operation.
Incoming AS<CR>
Response AS<CR>
Stop storage
This stops the storage operation.
Incoming AP<CR>
Response AP<CR>
Initialize storage
This clears the stored data.
Incoming AQ<CR>
Response AQ<CR>

Storage state output

This confirms the storage status (operating/not operating) and the number of the accumulated data for each OUT
number.
Incoming AN<CR>
command (0x41 0x4E 0x0D)
Response AN, s, ddddd<CR>
command (0x41 0x4E 0x2C s 0x2C ddddd 0x0D)
Parameter s: Storage status
description 0 (0x30): OFF (storage not operating)
1 (0x31): ON (storage operating)
ddddd: Amount of storage data
00000 to 65536 (0x30 0x30 0x30 0x30 0x30 to 0x36 0x35 0x35 0x33 0x36)
Acquire the storage data

This acquires the accumulated data.
Incoming
command
AD, bb<CR>
(0x41 0x44 0x2C bb 0x0D)
9
Response AD, bb [, hhhhhhhh]•••[, hhhhhhhh]<CR>
command (0x41 0x44 0x2C bb [0x2C hhhhhhhh]•••[0x2C hhhhhhhh] 0x0D)
Parameter bb: OUT number 01 to 16 (0x30 0x31 to 0x31 0x36)
description hhhhhhhh: 8 digits - Measurement value (page 9-9) (Maximum number of data: 65536)
Error code When the storage setting is "Image storage", a status error is returned.
Save storage data

This copies the data stored to the internal memory to the memory card.
Incoming SS<CR>
Response SS<CR>

Overview of Change Parameter Commands

This section describes the format of commands that change the parameters.
Note
These commands are accepted only when the controller is in the "RS-232C communication mode".
Response
Control contents Incoming command Reference page
command
Trigger mode SW, HA, m <CR> SW, HA<CR>
Mutual interference prevention SW, HB, p<CR> SW, HB<CR> page 9-19
Head
Trigger rate SW, HC, p<CR> SW, HC<CR>
Settings
Measurement range SW, HD, i , m, m<CR> SW, HD<CR>
page 9-20
Detection threshold value SW, HE, i , mm<CR> SW, HE<CR>
Average SW, OA, bb, m<CR> SW, OA<CR>
Alarm error SW, OB, bb, mmm<CR> SW, OB<CR> page 9-21
9 OUT
Measurement mode
Offset
SW, OC, bb, m<CR>
SW, OD, bb, f f f f f f f f <CR>
SW, OC<CR>
SW, OD<CR>
settings Min display unit SW, OE, bb, m<CR> SW, OE<CR>
page 9-22
SW, OF, bb, f f f f f f f , f f f f f f f ,
Scaling SW, OF<CR>
f f f f f f f , f f f f f f f <CR>
Tolerance setting SW, LM, bb, f f f f f f f f , f f f f f f f f <CR> SW, LM<CR>
TIMING terminal SW, CA, aa••• aa<CR> SW, CA<CR>
page 9-23
ZERO terminal SW, CB, aa••• aa<CR> SW, CB<CR>
Binary output SW, CC, m, aa••• aa<CR> SW, CC<CR>
Analog output SW, CD, m, bb<CR> SW, CD<CR>
Analog output SW, CE, m, f f f f f f f f , f f f f f f f f ,
Common SW, CE<CR> page 9-24
Scaling f f f f f f f f , f f f f f f f f <CR>
settings
Storage type SW, CF, m<CR> SW, CF<CR>
Data storage SW, CG, ddddd, m<CR> SW, CG<CR>
Image storage SW, CH, i , m<CR> SW, CH<CR> page 9-25
Auto-send SW, CI, aa••• aa<CR> SW, CI<CR>
Data out timing SW, CJ, m<CR> SW, CJ<CR>
IP address SW, EN, I, xx ••• xx<CR> SW, EN<CR>
page 9-26
Subnet mask SW, EN, M, xx ••• xx<CR> SW, EN<CR>
Default Gateway SW, EN, G, xx ••• xx<CR> SW, EN<CR>
Environ- Auto-send SW, EA, p<CR> SW, EA<CR>
ment Strobe time SW, EB, mmm<CR> SW, EB<CR>
page 9-27
Settings Cable expansion mode SW, EC, p<CR> SW, EC<CR>
Language SW, ED, m<CR> SW, ED<CR>
Program switch SW, EF, m<CR> SW, EF<CR>
page 9-28
Save SW, EG, p<CR> SW, EG<CR>
aa••• aa: Specifies OUT number 16 bit bb: Specifies OUT 1 to 16 ddddd: Amount of storage data 0 to 65536
f f : File number 00 to 15 f f f f f f f f : Setting value gg: Screen type
hhhhhhhh: Measured value i : Specifies head p: Specifies ON/OFF
oo: Program No. 00 to 15 s: Storage status xx ••• xx: IP address

Details of Change Parameter Commands

Head setting - Trigger mode
Incoming SW, HA, m <CR>
command (0x53 0x57 0x2C 0x48 0x41 0x2C m 0x0D)
Response SW, HA<CR>
command (0x53 0x57 0x2C 0x48 0x41 0x0D)
Parameter m: Trigger Setting
description 0 (0x30): Continuous trigger
1 (0x31): External trigger
Head setting - Mutual interference prevention

Incoming SW, HB, p<CR>
command (0x53 0x57 0x2C 0x48 0x42 0x2C p 0x0D)
Response SW, HB<CR>
command
Parameter
(0x53 0x57 0x2C 0x48 0x42 0x0D)
p: ON/OFF specification
9
description 0 (0x30): OFF (Interference prevention is not set.)
1 (0x31): ON (Interference prevention is set.)
Head setting - Trigger rate

Incoming SW, HC, p<CR>
Response SW, HC<CR>
description 0 (0x30): OFF (Trigger rate is not set.)
1 (0x31): ON (Trigger rate is set.)

Head setting - Measurement range

"Measurement range" (page 5-6)
Incoming SW, HD, i , m , m <CR>
command (0x53 0x57 0x2C 0x48 0x44 0x2C i 0x2C m 0x2C m 0x0D)
Response SW, HD<CR>
1 (0x31): Head A
2 (0x32): Head B
m: Number of reduced level
0 (0x30): OFF (No reduction) 5 (0x35): 5 level reduction A (0x41): 10 level reduction
1 (0x31): 1 level reduction 6 (0x36): 6 level reduction B (0x42): 11 level reduction
2 (0x32): 2 level reduction 7 (0x37): 7 level reduction C (0x43): 12 level reduction
3 (0x33): 3 level reduction 8 (0x38): 8 level reduction
9 4 (0x34): 4 level reduction 9 (0x39): 9 level reduction
Make the setting in the order of X measurement range and next, Y measurement range.
Head Setting - Detection threshold value

"Detection threshold value (Threshold)" (page 5-9)
Incoming SW, HE, i , mm<CR>
command (0x53 0x57 0x2C 0x48 0x45 0x2C i 0x2C mm 0x0D)
Response SW, HE<CR>
1 (0x31): Head A
2 (0x32): Head B
mm : Threshold 10 to 99 (0x31 0x30 to 0x39 0x39)

OUT setting - Average

"Average" (page 5-83)
Incoming SW, OA, bb, m <CR>
command (0x53 0x57 0x2C 0x4F 0x41 0x2C bb 0x2C m 0x0D)
Response SW, OA<CR>
command (0x53 0x57 0x2C 0x4F 0x41 0x0D)
Parameter bb: OUT number specification 01 to 16 (0x30 0x31 to 0x31 0x36)
description m: Average
0 (0x30): 1 time 5 (0x35): 32 times A (0x41): 1024 times
1 (0x31): 2 times 6 (0x36): 64 times B (0x42): 2048 times
2 (0x32): 4 times 7 (0x37): 128 times C (0x43): 4096 times
3 (0x33): 8 times 8 (0x38): 256 times
4 (0x34): 16 times 9 (0x39): 512 times
OUT setting - Alarm error

"Alarm error" (page 5-85) 9
Incoming SW, OB, bb, mmm <CR>
command (0x53 0x57 0x2C 0x4F 0x42 0x2C bb 0x2C mmm 0x0D)
Response SW, OB<CR>
description mmm : Processing number of alarm error 000 to 255 (0x30 0x30 0x30 to 0x32 0x35 0x35)
OUT setting - Measurement mode

Incoming SW, OC, bb, m <CR>
Response SW, OC<CR>
description m: Measurement mode
0 (0x30): Normal 5 (0x35): Peak-to-peak hold 1
1 (0x31): Peak hold 1 6 (0x36): Peak-to-peak hold 2
2 (0x32): Peak hold 2 7 (0x37): Average hold 1
3 (0x33): Bottom hold 1 8 (0x38): Average hold 2
4 (0x34): Bottom hold 2 9 (0x39): Sample hold

OUT setting - Offset

Incoming SW, OD, bb, f f f f f f f <CR>
command (0x53 0x57 0x2C 0x4F 0x44 0x2C bb 0x2C f f f f f f f 0x0D)
Response SW, OD<CR>
description f f f f f f f : Offset value
7 digit value (page 9-8)
OUT setting - Min display unit

Incoming SW, OE, bb, m <CR>
Response SW, OE<CR>
9 command (0x53 0x57 0x2C 0x4F 0x45 0x0D)
description m: Min unit setting 0 to 6 (0x30 to 0x36)

Setting Length Area Angle
0 (0x30) 1 mm 1 mm2 1°
1 (0x31) 0.1 mm 0.1 mm2 0.1°
2 (0x32) 0.01 mm 0.01 mm2 0.01°
3 (0x33) 0.001 mm 0.001 mm2 -*
4 (0x34) 1 μm 0.0001 mm2 -*
5 (0x35) 0.1 μm -* -*
6 (0x36) 0.01 μm -* -*
Error code *Parameter range error is returned.
OUT setting - Scaling

Incoming SW, OF, bb, f f f f f f f , f f f f f f f , f f f f f f f , f f f f f f f <CR>
command (0x53 0x57 0x2C 0x4F 0x46 0x2C bb 0x2C
f f f f f f f 0x2C f f f f f f f 0x2C f f f f f f f 0x2C f f f f f f f 0x0D)
Response SW, OF<CR>
description f f f f f f f : Scaling setting value
Make the setting in the order of first input value, first display value, second input value and
second display value.

OUT setting - Tolerance setting

This sets the upper and lower limits for GO evaluation.
"Tol upper limit / Tol lower limit" (page 5-90)
Incoming SW, LM, bb, f f f f f f f , f f f f f f f <CR>
command (0x53 0x57 0x2C 0x4C 0x4D 0x2C bb 0x2C f f f f f f f , f f f f f f f 0x0D)
Response SW, LM<CR>
command (0x53 0x57 0x2C 0x4C 0x4D 0x0D)
description f f f f f f f : 7 digit value (page 9-8)
Common setting - TIMING input

"TIMING terminal" (page 5-93)
Incoming SW, CA, aa••• aa<CR>
command (0x53 0x57 0x2C 0x43 0x41 0x2C aa••• aa 0x0D)
Response SW, CA<CR>
command (0x53 0x57 0x2C 0x43 0x41 0x0D) 9
Parameter aa••• aa: 16 digits - Set TIMING1 or TIMING2 from OUT1 to 16 respectively.
description 1 (0x31): TIMING1 is used.
2 (0x32): TIMING2 is used.
"OUT number specification" (page 9-9)
Common setting - ZERO input

"ZERO terminal" (page 5-94)
Incoming SW, CB, aa••• aa<CR>
Response SW, CB<CR>
Parameter aa••• aa: 16 digits - Set ZERO1 or ZERO2 from OUT1 to 16 respectively.
description 1 (0x31): ZERO1 is used.
2 (0x32): ZERO2 is used.
Common setting - Evaluation/Binary output

Incoming SW, CC, m , aa••• aa<CR>
command (0x53 0x57 0x2C 0x43 0x43 0x2C m 0x2C aa••• aa 0x0D)
Response SW, CC<CR>
Parameter m: Evaluation is output/not output.
description 0 (0x30): Evaluation is not output.
1 (0x31): Evaluation is output.
aa••• aa: 16 digits - Set whether Binary is output or not output from OUT1 to 16 respectively.
0 (0x30): Binary is not output.
1 (0x31): Binary is output.

Common setting - Analog output

"Analog output" (page 5-96)
Incoming SW, CD, m , bb<CR>
command (0x53 0x57 0x2C 0x43 0x44 0x2C m 0x2C bb 0x0D)
Response SW, CD<CR>
Parameter m: Select the analog output terminal at bb for analog output of set OUT number.
description 0 (0x30): CH1
1 (0x31): CH2
bb: OUT number specification 01 to 16 (0x30 0x31 to 0x31 0x36)
Common setting - Analog scaling

Incoming SW, CE, m, f f f f f f f , f f f f f f f , f f f f f f f , f f f f f f f <CR>
command (0x53 0x57 0x2C 0x43 0x45 0x2C m 0x2C
9 f f f f f f f 0x2C f f f f f f f 0x2C f f f f f f f 0x2C f f f f f f f 0x0D)
Response SW, CE<CR>

Parameter m: Select the analog output terminal to set the analog scaling.
description 0 (0x30): CH1
1 (0x31): CH2
f f f f f f f : Scaling setting value (Set the voltage in units of mV without decimal point.)
Make the setting in the order of first display value, first output value, second display value
and second output value.
Common setting - Storage type

Incoming SW, CF, m <CR>
Response SW, CF<CR>
Parameter m: Storage type
1 (0x31): Data storage
2 (0x32): Image storage

Common setting - Data storage

"Data storage" (page 5-98)
Incoming SW, CG, ddddd, m <CR>
command (0x53 0x57 0x2C 0x43 0x47 0x2C ddddd 0x2C m 0x0D)
Response SW, CG<CR>
Parameter ddddd: Amount of storage data
description 00000 to 65536 (0x30 0x30 0x30 0x30 0x30 to 0x36 0x35 0x35 0x33 0x36)
m: Skipping
0 (0x30): 1/1 3 (0x33): 1/10 6 (0x36): 1/100
1 (0x31): 1/2 4 (0x34): 1/20
2 (0x32): 1/5 5 (0x35): 1/50
Common setting - Image storage

"Image storage" (page 5-99)
Incoming SW, CH, i , m <CR> 9
command (0x53 0x57 0x2C 0x43 0x48 0x2C i 0x2C m 0x0D)
Response SW, CH<CR>
1 (0x31): Head A
2 (0x32): Head B
m: Storage conditions
0 (0x30): Always
1 (0x31): NG only
2 (0x32): Manual
Common setting - Auto-send

Incoming SW, CI, aa••• aa<CR>
Response SW, CI<CR>
Parameter aa••• aa: 16 digits - Set 1 (Set auto-send) or 0 (Not set auto-send) for every OUT from OUT1 to 16.
description "OUT number specification" (page 9-9)

Common setting - Data out timing

Incoming SW, CJ, m <CR>
command (0x53 0x57 0x2C 0x43 0x4A 0x2C m 0x0D)
Response SW, CJ<CR>
command (0x53 0x57 0x2C 0x43 0x4A 0x0D)
Parameter m: Data out timing
description 0 (0x30): Image update
1 (0x31): TIMING1
Environment setting - IP address

"Setting the Communication Specifications for Ethernet" (page 6-3)
Incoming SW, EN, I, xx ••• xx <CR>
command (0x53 0x57 0x2C 0x45 0x4E 0x2C 0x49 0x2C xx ••• xx 0x0D)
Response SW, EN<CR>
9 command (0x53 0x57 0x2C 0x45 0x4E 0x0D)
Parameter xx ••• xx: 12 digits only for the number parts of aaa. bbb. ccc. ddd of IP address
description Example: For 192.168.1.1

0x31 0x39 0x32 0x31 0x36 0x38 0x30 0x30 0x31 0x30 0x30 0x31
Environment setting - Subnet mask

Incoming SW, EN, M, xx ••• xx CR>
command (0x53 0x57 0x2C 0x45 0x4E 0x2C 0x4D 0x2C xx ••• xx 0x0D)
Response SW, EN<CR>
command (0x53 0x57 0x2C 0x45 0x4E 0x0D)
Parameter xx ••• xx : 12 digits only for the number parts of aaa. bbb. ccc. ddd of subnet mask
description Example: For 192.168.1.1
0x31 0x39 0x32 0x31 0x36 0x38 0x30 0x30 0x31 0x30 0x30 0x31
Environment setting - Gateway

Incoming SW, EN, G, xxx ••• xxx <CR>
command (0x53 0x57 0x2C 0x45 0x4E 0x2C 0x47 0x2C xx ••• xx 0x0D)
Response SW, EN<CR>
command (0x53 0x57 0x2C 0x45 0x4E 0x0D)
Parameter xx ••• xx : 12 digits only for the number parts of aaa. bbb. ccc. ddd of gateway
description Example: For 255. 255. 255. 0
0x32 0x35 0x35 0x32 0x35 0x35 0x32 0x35 0x35 0x30 0x30 0x30

Environment setting - Auto-send

Incoming SW, EA, p<CR>
Response SW, EA<CR>
Parameter p: Set whether to set auto-send or not.
description 0 (0x30): Auto-send is not set.
1 (0x31): Auto-send is set.
* Needs to set whether to set auto-send or not for each OUT number in the Common settings.
Environment setting - Strobe time

"Setting the Strobe Time" (page 6-4)
Incoming SW, EB, mmm<CR>
command (0x53 0x57 0x2C 0x45 0x42 0x2C mmm 0x0D)
Response SW, EB<CR> 9
Parameter mmm : Set the strobe time (unit: ms).
description 002 to 100 (0x30 0x30 0x32 to 0x31 0x30 0x30)
Environment setting - Cable expansion mode

"Setting the Cable Expansion Mode" (page 6-4)
Incoming SW, EC, p<CR>
Response SW, EC<CR>
Parameter p: Set whether to set the cable expansion mode.
description 0 (0x30): Set
1 (0x31): Not set
Environment Setting - Language

"Changing Languages" (page 6-4)
Incoming SW, ED, m<CR>
Response SW, ED<CR>
Parameter m: Select the language.
description 0 (0x30): Japanese
1 (0x31): English
2 (0x32): German

Environment setting - Program switch

Incoming SW, EF, m <CR>
Response SW, EF<CR>
Parameter m: Select the program switching method.
description 0 (0x30): Console
1 (0x31): Terminal
Environment setting - Save

Incoming SW, EG, p<CR>
Response SW, EG<CR>
9 command (0x53 0x57 0x2C 0x45 0x47 0x0D)
Parameter p: Set save operation.
description 0 (0x30): Not save

1 (0x31): Save

Overview of Read Parameter Commands

This section describes the format of commands that read the parameters.
Note
These commands are accepted only when the controller is in the "RS-232C communication mode".
Control contents Incoming command Response command
Trigger mode SR, HA<CR> SR, HA, m <CR>
Mutual interference
SR, HB<CR> SR, HB, p<CR>
Head prevention
Settings Trigger rate SR, HC<CR> SR, HC, p<CR>
Measurement range SR, HD, i <CR> SR, HD, i , m , m <CR>
Detection threshold value SR, HE, i <CR> SR, HE, i , mm<CR>
Average SR, OA, bb<CR> SR, OA, bb, m<CR>
Alarm error SR, OB, bb<CR> SR, OB, bb, mmm <CR>
OUT
Measurement mode
Offset
SR, OC, bb<CR>
SR, OD, bb<CR>
SR, OC, bb, m <CR>
SR, OD, bb, f f f f f f f f <CR>
9
settings Min display unit SR, OE, bb<CR> SR, OE, bb, m <CR>
SR, OF, bb<CR> SR, OF, bb, f f f f f f f f , f f f f f f f f , f f f f f f f f ,
Scaling
f f f f f f f f <CR>
Tolerance setting SR, LM, bb<CR> SR, LM, bb, f f f f f f f f , f f f f f f f f <CR>
TIMING terminal SR, CA<CR> SR, CA, aa••• aa<CR>
ZERO terminal SR, CB<CR> SR, CB, aa••• aa<CR>
Binary output SR, CC<CR> SR, CC, m , aa••• aa<CR>
Analog output target SR, CD, m <CR> SR, CD, m , bb<CR>
Analog output SR, CE, m <CR> SR, CE, m, f f f f f f f f , f f f f f f f f , f f f f f f f f ,
Common
Scaling f f f f f f f f <CR>
settings
Storage type SR, CF<CR> SR, CF, m <CR>
Data storage SR, CG<CR> SR, CG, ddddd, m <CR>
Image storage SR, CH<CR> SR, CH, i , m <CR>
Auto-send SR, CI<CR> SR, CI, aa••• aa<CR>
Data out timing SR, CJ<CR> SR, CJ, m<CR>
IP address SR, EN, I<CR> SR, EN, I, xx ••• xx<CR>
Subnet mask SR, EN, M<CR> SR, EN, M, xx ••• xx<CR>
Default Gateway SR, EN, G<CR> SR, EN, G, xx ••• xx<CR>
Environ- Auto-send SR, EA<CR> SR, EA, p<CR>
ment Strobe time SR, EB<CR> SR, EB, mmm <CR>
Settings Cable expansion mode SR, EC<CR> SR, EC, p<CR>
Interface language SR, ED<CR> SR, ED, m<CR>
Program switch SR, EF<CR> SR, EF, m <CR>
Save SR, EG<CR> SR, EG, p<CR>
aa••• aa: Specifies OUT number 16 bit bb: Specifies OUT ddddd: Amount of storage data 0 to 65536
f f : File number 00 to 15 f f f f f f f f : Setting value gg: Screen type
hhhhhhhh: Measured value i : Specifies head p: Specifies ON/OFF
oo: Program No. 00 to 15 s : Storage status xx ••• xx: IP address

The variable portions of incoming commands and response commands excluding Ethernet setting format and setting
value format, are the same as for setting change commands.
Ethernet format includes 3 periods appended to the end.
Measurement Format"Reading settings (f f f f f f f f)" (page 9-8)
9

Outputting Measurement Values via Auto-send
This section describes how to synchronize the measurement value with signals from the external input terminal (timing
input, trigger input) and output it from the RS-232C interface.
Since RS-232 commands are not used, this is used when importing the measurement value or connecting the
datalogger that cannot send commands.
Note
Do not send the next measurement value while the current measurement value is being output via RS-232C interface.
Measurements sent during output are not output.
Reference
Outputting measurement values and changing settings via commands are available even when the measurement value
is being output by auto-send.
Setting Methods
Make the settings for each item below.
Setting Setting items Setting value Reference page
Trigger Setting Trigger mode Select the Cont trigger or EXT trigger. page 5-3
OUT settings Measurement mode Set this according to the measurement contents. page 5-86 9
Auto-send
Set the OUT number to use for output. page 5-101
(OUT1 to OUT16)
Common settings
Set the output timing to image update or
Data out timing page 5-102
TIMING1.
Environment
Auto-send Set this to ON. page 6-3
Settings
Output Method
Output according to the following procedure.
ON (1)
Timing input/trigger input OFF
(2)
RS-232C data output Measurement value
(1) Set the external input terminal (timing input or trigger input) to ON.
(2) The measurement value in accordance with the settings is output.
• If the auto-send in the common settings is set to "Output," measurement values from all OUT numbers will be output at
the same time. (OUT numbers whose measurement values have not been updated will also be output.)
• The measurement value set by the external input terminal (TIMING1 or TRG_A/B) can differ depending on the trigger
mode, measurement mode and data output timing settings.

Output Data Format

The response command format of the measurement value output is identified as follows.
The measurement values from the chosen OUT numbers are output in this format.
When multiple OUT numbers are specified, the output is handled in ascending OUT number order.
Response TG, bb, hhhhhhhh<CR>[TG, bb, hhhhhhhh<CR>]•••[TG, bb, hhhhhhhh<CR>]

command (0x54 0x47 0x2C bb 0x2C hhhhhhhh 0x0D [0x54 0x47 0x2C bb 0x2C hhhhhhhh 0x0D]
•••[0x54 0x47 0x2C bb 0x2C hhhhhhhh 0x0D])
Parameter bb: 01 to 16, Represents OUT1 to 16
description hhhhhhhh: 8 digit value (page 9-9)
Example: When the following 3 types of output data are output: Output 1 (10.000 mm), Output 3
(-12.500 mm), Output 4 (150.00 mm2 )
TG,01,+010.000<CR>TG, 03,-012.500<CR>TG, 04,+0150.00<CR>
9
(0x54 0x47 0x2C 0x30 0x31 0x2C 0x2B 0x30 0x31 0x30 0x2E 0x30 0x30 0x30 0x0D
0x54 0x47 0x2C 0x30 0x33 0x2C 0x2D 0x30 0x31 0x32 0x2E 0x35 0x30 0x30 0x0D
0x54 0x47 0x2C 0x30 0x34 0x2C 0x2B 0x30 0x31 0x35 0x30 0x2E 0x30 0x30 0x0D)

Reference
Reference
ASCII Code Table
High-order 4 bits
0 1 2 3 4 5 6 7
N D S
0 U
L
L
E P 0 @ P ` p
S D
1 O
H ! C
1 1 A Q a q
S D
2 T
X 2
”C 2 B R b r
C #
E D
3 T
X 3 3 C S c s
C $
E D
4 O
T 4 4 D T d t
E N
5 A % 5 E U e u
Low-order 4 bits
N
Q K
A S
6 C Y & 6 F V f v
K N
B E
7 E
L
T
B ' 7 G W g w
8 B CA ( 8 H X h x
S N
9 H E )
T M 9 I Y i y 9
A L SU * : J Z j z
F B
B V ES + ; K [ k {
T C
C F → , < L ¥ l |
F
D C ← - = M ] m }
R
~
O ↑ .
E S > N ^ n
S _ DE
F I ↓ / ? O o L

Reference
MEMO
9

10
Chapter
Timing Chart and Response Times

This chapter describes measurement value updates using timing
charts.
When Setting is Continuous Trigger . . . . . . . . . . . . . . . . . . .10-2

Operation Overview When "Cont trigger" is Selected. . . .10-2
Operation Details When "Cont trigger" is Selected. . . . .10-10

When Setting is External Trigger . . . . . . . . . . . . . . . . . . . . .10-12
Operation Overview When EXT Trigger is Set . . . . . . .10-12
Operation Details When EXT Trigger is Set . . . . . . . . .10-13
Input and Output Details . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-16
Evaluation/Binary Output . . . . . . . . . . . . . . . . . . . . . . .10-16
Strobe output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-17
GO Output (Total Evaluation Output) . . . . . . . . . . . . . .10-18
LED Emission Control Input . . . . . . . . . . . . . . . . . . . . .10-18
Memory Card Control Input (S_SAVE Input) . . . . . . . .10-19
Measurement Response Time. . . . . . . . . . . . . . . . . . . . . . . .10-20
Trigger Interval and Measurement Time. . . . . . . . . . . .10-20
Response Time Delay due to Averaging . . . . . . . . . . .10-22
Power ON Reset Time . . . . . . . . . . . . . . . . . . . . . . . . . .10-22
RS-232C Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-23
Response Delay Time When Sending & Receiving Commands . . .10-23
Response Delay Time via Auto-send . . . . . . . . . . . . . .10-24

When Setting is Continuous Trigger
Operation Overview When "Cont trigger" is Selected

In "Normal" measurement mode
In "Normal" measurement mode, measurement is performed continuously, and the measurement value is displayed and
output.
Measurement value
Internal measurement value
Normal mode measurement value
Evaluation standby
( display) t
RESET RESET
process process
10
ON
Evaluation/binary output*1 OFF
Continuous refresh Continuous refresh Continuous refresh
ON
Evaluation/binary output*2
OFF
ON
TIMING 1 input
OFF
ON
RESET/ZERO input OFF
Auto-send (RS-232C output)
/data storage
(1) (2) (3) (4) (1) (5) (6) (7)
(1) With TIMING1 input ON,

• The measurement value is held.
• The evaluation/binary output is updated.
(When "Data out timing" in "Common settings" is set to "TIMING1")
• The measurement value is output via auto-send (RS-232C).
(When "Auto-send" in "Environment settings" is set to "ON" and "Data out timing" in "Common settings" is set to
"TIMING1")
• The data is stored in the data storage.
(2) With TIMING1 input OFF,

• Hold is canceled for the measurement value.
(3) With RESET input or ZERO input ON,

• The measurement value is displayed as the evaluation standby (-------display).
• Continuous update of the evaluation/binary output is stopped.
(When "Data out timing" in "Common settings" is set to "Image update")
(4) After the RESET process time elapses,

• The measurement value is updated and displayed.
• The evaluation/binary output is updated in series according to the measurement value update (image update).


• Continuous update of the evaluation/binary output is stopped.

• Since the TIMING1 input is ON, the measurement value continues to keep the evaluation standby (-------display)
status.

• The measurement value is updated and displayed.
• The evaluation/binary output is updated in series according to the measurement value update (image update).
*1 (When "Data out timing" in "Common settings" is set to "Image update")

*2 (When "Data out timing" in "Common settings" is set to "TIMING1")
• The ON state of each output indicates that the NPN or PNP open-collector output is turned ON.
• The ON state of each output indicates the short circuit to the COM terminal in the case of TM-3001 (NPN type) and the
state where the voltage is applied over the COM terminal in the case of the TM-3001P (PNP type).
• Evaluation / binary output details 10

• The timing input, reset input and auto-zero input can be controlled via RS-232C.

Peak hold 1 /Bottom hold 1 /P-to-p hold 1 /Average hold 1

Measurement is performed within the period of time (sampling period) determined by the external timing input, and the
display and output are held.
Reference
• The sampling period indicates the period of time from the moment the TIMING input turns ON until the moment it turns
ON again. When the TIMING input turns ON, the measurement value from the previous sampling period is output.
• The internal measurement values are not reset when the timing input is turned ON.
Measurement mode Measurement value

Peak hold 1 Measures the maximum value obtained over the sampling period.
Bottom hold 1 Measures the minimum value obtained over the sampling period.
P-to-p hold 1 Measures the difference between the maximum and minimum values within
the sampling period.
Average hold 1 Measures the average value obtained over the sampling period.
Measurement value
10
Ex. Peak hold 1 measurement value
Evaluation standby
( display) t
Sampling Sampling period RESET Sampling
period process period
ON
TIMING 1 input OFF
ON
ON
ON
Strobe output*1 OFF
/data storage
(1) (2) (2) (3) (4) (2)
(1) In the following cases, the evaluation standby status (------display) continues until the first measured value is fixed.
When the power is turned on, the settings are changed, the program No. is changed, the reset command is input,
the auto-zero command is input


• The sampling period finishes.
• The measurement value is updated and held.
• The evaluation/binary output value is updated.
• The measurement value is output via auto-send (RS-232C output).
"TIMING1")


• The measurement value keeps the evaluation standby (-------display).
• The sampling operation starts.
*1 When "Data out timing" in "Common settings" is set to "Image update", the evaluation/binary output is updated
according to the measurement value update (image update). 10

• The ON state of each output indicates the short circuit to the COM terminal in the case of TM-3001 (NPN type) and
the state where the voltage is applied over the COM terminal in the case of the TM-3001P (PNP type).
• Select 1 for the number of times for averaging when the measurement mode is set to average hold.
• When the "Alarm error" for "OUT settings" is set to "0", and a large value is set for the average number of times, the
measurement result may not trigger an alarm.
• Evaluation/binary output or strobe output details
• When the internal measurement value reaches the alarm state during the sampling period, the measurement result
varies depending on the "Alarm error" settings.
With Hold: The measurement result is output by using the value immediately before the value being held.
Without Hold: At the time of peak hold, the measurement result is output while ignoring the alarm state period.
If the unit is in the alarm state during the entire sampling period, the measurement result will be
(-FFFFFF).
When not in the peak hold state, the measurement result will be (-FFFFFF).
"Alarm error" (page 5-85)
• The timing input, reset input and auto-zero input can also be controlled via RS-232C.

Peak hold 2 /Bottom hold 2 /P-to-p hold 2 /Average hold 2

Measurement is performed within the period of time (sampling period) determined by the external timing input, and the
display and output are held.
Reference
• The sampling time is the time period in which the TIMING input is OFF. When the TIMING input turns ON, the
measurement value in the sampling period immediately before is output.
• The internal measurement values are reset when the timing input is turned OFF.
Measurement mode Measurement value

Peak hold 2 Measures the maximum value obtained over the sampling period.
Bottom hold 2 Measures the minimum value obtained over the sampling period.
P-to-p hold 2 Measures the differential value of the maximum and minimum values within
the sampling period.
Average hold 2 Measures the average value obtained over the sampling period.
Measurement value
10 Ex. Peak hold 2 measurement value

Evaluation standby
( display) t
Sampling RESET Sampling RESET Sampling
period process period process period
ON
TIMING 1 input OFF
ON
ON
ON
Strobe output*1 OFF
/data storage
(1) (2) (3) (2) (4) (5) (2)



• The sampling period finishes.
• The measurement value is output via auto-send (RS-232C output).
"TIMING1")

• The sampling operation starts after the RESET process time elapses.


• The measurement value is continuously displayed as the evaluation standby (-------display).
• The sampling operation starts. 10

*1 When "Data out timing" in "Common settings" is set to "Image update", the evaluation/binary output is updated in
series according to the measurement value update (image update).
• Select 1 for the number of times for averaging when the measurement mode is set to average hold.
• If the TIMING input turns ON during the reset process, the evaluation standby status (------display) is displayed.
• When the internal measurement value reaches the alarm state during the sampling period, the measurement result
varies depending on the "Alarm error" settings.
With Hold: The measurement result is output by using the value immediately before the value being held.
Without Hold: At the time of peak hold, the measurement result is output while ignoring the alarm state period.
If the unit is in the alarm state during the entire sampling period, the measurement result will be
(-FFFFFF).
When not in the peak hold state, the measurement result will be (-FFFFFF).
"Alarm error" (page 5-85)

Sample hold
This holds the display/output of the measured value at the instant indicated by the external TIMING input.
Reference
• The internal measurement value when the TIMING input turns ON is held and output.
Measurement value
Sample hold measurement value
Evaluation standby
( display) t
RESET
process
ON
TIMING 1 input
10
OFF
ON
ON
Evaluation/binary output*1
OFF
ON
Strobe output*1 OFF
/data storage
(1) (2) (2) (3) (4) (2)

• The measurement value is output via the auto-send (RS-232C output).
"TIMING1")



• The measurement value is continuously displayed as the evaluation standby (-------display).
*1 When "Data out timing" in "Common settings" is set to "Image update", the evaluation/binary output is updated in
series according to the measurement value update (image update).
10

Operation Details When "Cont trigger" is Selected

The input and output for each measurement mode when the trigger mode is set to continuous trigger are detailed below.
Normal
Measurement value Hold –––– –––– Hold ––––
Refresh
Evaluation/binary output hold value –––– Hold ––––
Strobe output
MaxT2
MaxT2
ON
TIMING input
OFF
MaxT1
ON
RESET/ZERO input
OFF
MaxT3 T4
ON
P1 to P4
OFF
ON MaxT6 T4
READY output OFF
ON
10
BUSY output OFF
• The minimum input time for each input terminal is 1 ms.

• The trigger interval (T5), input response time (T1, T2), RESET time (T4) and program No. change time (T6) vary
depending on the settings.

• Response times (examples) are as follows. T5 is trigger interval displayed on the measurement screen.
T1: 1 ms
T2: T1 + 1 ms
T3: T1 + T5 x 2 (when RESET and ZERO are SAVE OFF)
T3: T1 + T5 x 3 + 250 ms (when ZERO is SAVE ON)
T4: T5 x (Average count - 1)
T6: T1 + T5 x 3 + 150 ms
If the master image is registered after the program is switched, the following time is added.
(Number of master images registered after the program is switched) × 100 ms + 70 ms
The values for T3 and T6 may change during TM-Navigator communication.
• Evaluation/Binary output
The operations after input response time T1 are as follows.
• RESET: After all are OFF, the unit enters the evaluation standby state. (above timing chart)
• ZERO (SAVE OFF): After the previous measured value is held, the unit enters the evaluation standby state.
• ZERO (SAVE ON): After the measured value is held for a certain period, all become OFF, and the unit enters the
evaluation standby state.
• The above evaluation/binary output is the case when the output selection item is 1 item.
• The STROBE output ON time can be changed.
• The evaluation/binary output is output in response to the measurement value update request from TRG input when
"Data out timing" in "Common settings" is set to "Image update".
When "TIMING1" is set, the TIMING1 input is output in synchronization.
• When TIMING is set to ON, the previous measured value is held.
• If RESET is set to ON when the TIMING input is ON, the evaluation standby state continues until the TIMING input turns
OFF.

Other than normal
Measurement value –––– ––––
Evaluation/binary output ––––
Strobe output
MaxT2 MaxT2 MaxT2
ON
TIMING input
OFF
MaxT3
ON
T4 Sampling period T4 Sampling period
mode 2 MaxT1
Measurement mode T4 Sampling period
mode 1
Sampling period T6
ON
P1 to P4
OFF
ON
READY output
OFF
ON
BUSY output
OFF

• Mode 1 is when the measurement mode is set to Peak hold 1/Bottom hold 1/P-to-p hold 1/Average hold 1.
The sampling period is from the rising edge of the timing input (OFF→ON) until the next rising edge (OFF→ON). 10
The maximum value, minimum value, difference between maximum and minimum, and average value of the data read

by the trigger input during the sampling period can be measured.
The sampling period is from the falling edge of the timing input (ON→OFF) until the next rising edge (OFF→ON).
T1: 1 ms
T2: T1 + 1 ms
T4: T5 × (Average count - 1)
T6: T1 + T5 x 3 + 150 ms
OFF.

When Setting is External Trigger
Operation Overview When EXT Trigger is Set
ON
TRG input OFF
ON
READY output
OFF
ON *1
BUSY output
OFF
ON
Evaluation/binary output Evaluation OUT1 OUT2
OFF
ON
Strobe output OFF
ON
INVALID output *2
OFF
ON
TIMING input
OFF
/data storage
(1) (2) (3)
(1) With TRG input ON, the sampling starts

• READY output turns OFF.
10 • BUSY output turns OFF.
(2) READY output is ON when the unit can receive the next trigger input. Trigger inputs received when the READY output
is OFF will be ignored.
(3) • BUSY output turns OFF when measurement is finished. It turns OFF with the rising or falling edge of the strobe
output (*1).
• INVALID output responds to the position correction results. It is output with the rising or falling edge of the strobe
output (*2).
• The RS-232C output is synchronized with the trigger input when "Auto-send" in the "Environment settings" is set to
"ON" and "Data out timing" in the "Common settings" is set to "Image update".
• The data storage is synchronized to the trigger input and saved when "Data out timing" in the "Common settings" is
set to "Image update".
• The above is the case when the measurement mode is normal.
• The above evaluation/binary output is the case when the output selection item is 3 items (Evaluation, OUT1, OUT2).
• The strobe output ON time can be changed.
• By selecting the proper combination of timing input and measurement mode, the maximum and minimum values from
multiple measurement results fixed by the external trigger can be measured.
• The trigger input can be controlled via RS-232C.

Operation Details When EXT Trigger is Set

In normal measurement mode
T7
TRG input
ON Hold
READY output
OFF
ON
BUSY output
OFF
Hold
Measurement value Hold –––– –––– Hold ––––
Refresh
Evaluation/binary output hold value
–––– Hold ––––
Strobe output
MaxT2 MaxT2
ON
TIMING input
OFF
MaxT1
ON
RESET/ZERO input
10
OFF
MaxT3 T4
ON
P1 to P4
OFF

T6 T4

• The trigger interval (T5), input response time (T1, T2), RESET time (T4), program No. change time (T6) and
measurement time (T7) vary depending on the settings.
• Response times (examples) are as follows. T5 and T7 are trigger interval and measurement time respectively
displayed on the measurement screen.
T1: 1 ms
T2: T1 + 1 ms
T4: T5 × (Average count - 1)
T6: T1 + T5 x 3 + 150 ms
• RESET: The unit enters the evaluation standby state. (above timing chart)
• READY output and BUSY output
• RESET, ZERO (SAVE OFF): Normal operation continues.
• ZERO (SAVE ON): After the previous measured value is held, normal operation is restored.
• P1 to P4: After the previous measured value is held, normal operation is restored. (above timing chart)
• When TIMING is set to ON, the previous measured value is held.
OFF.

When measurement mode is set to anything other than normal
(1) (2) (3) (4) (5) (6) (7) (8) (9) (10)
ON
TRG input
OFF
ON
READY output
OFF
ON
BUSY output
OFF
Internal measurement value (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)
Measurement value value
––––
value
––––
Evaluation/binary output ––––
Strobe output
MaxT2 MaxT2 MaxT2
ON
TIMING input
OFF
MaxT3
ON
T4 Sampling period T4 Sampling period
mode 2 MaxT1
Measurement mode
mode 1
Sampling period T4 Sampling period MaxT6
10
ON
P1 to P4
OFF

The sampling period is from the rising edge of the timing input (OFF→ON) until the next rising edge (OFF→ON).
The sampling period is from the falling edge of the timing input (ON→OFF) until the next rising edge (OFF→ON).
T1: 1 ms
T2: T1 + 1 ms
T3: T1 + T5 x 3 (250 ms (when ZERO is SAVE ON)
T4: T5 x (Average count - 1)
T6: T1 + T5 x 3 + 150 ms + T8 (T8: If the master image is registered after the program is switched,
(Number of master images registered after the program is switched) x 100 ms + 70 ms)

• READY output and BUSY output

• RESET, ZERO (SAVE OFF): Normal operation continues.
• ZERO (SAVE ON): After the previous measured value is held, normal operation is restored.
• P1 to P4: After the previous measured value is held, normal operation is restored. (above timing chart)
OFF.
10

Input and Output Details
Evaluation/Binary Output
The output items (evaluation output, binary outputs OUT1 to OUT16) for evaluation/binary output can be selected in
"Binary output" in the "Common settings". If multiple output items are selected, the data is output in time sharing mode.
The period of the time sharing output can be set in the "Strobe time" setting in the "Environment settings".
When the data output timing is "Image update"

The trigger interval (update period) can be changed depending on the settings. The trigger interval, number of output
items and strobe time settings may filter the evaluation/binary output.
If the data out timing is "Image update", the output is synchronized with trigger A. Trigger B is ignored.
When there is 1 output item
Trigger interval (refresh rate)
Measurement value (1) (2) (3)
10
Evaluation/binary output for Evaluation/binary output for
measured value (1) measured value (2)
Evaluation/binary output Evaluation Evaluation Evaluation

Evaluation/OUT No. output Evaluation Evaluation Evaluation
ON
Evaluation/binary selection output OFF
ON
Strobe output
OFF
Strobe period/2
• If the only output item is evaluation output (Number of OUT used is 8 or less) or a single OUT, the trigger interval
(update period) will be synchronized with the evaluation/binary output.
• If the evaluation output is performed with 9 or more number of OUT used, the evaluation results for OUT1 to OUT8 and
results beyond OUT9 are output in time series.
When evaluation/binary output time is shorter than measurement value update time (trigger interval)
Measurement value (1) (2)
Evaluation/binary output for measured value (1) Evaluation/binary output for measured value (2)
Evaluation Evaluation Evaluation Evaluation
Evaluation/binary output 1 2 OUT1 OUT2 OUT3 OUT4 OUT5 OUT6 OUT7 OUT8 OUT9 1 2
Evaluation Evaluation Evaluation Evaluation

Evaluation/OUT No. output 1 2 0 1 2 3 4 5 6 7 8 1 2
Evaluation/binary selection output
Strobe output
Strobe period Strobe period/2
• All measurement results can be output when the evaluation/binary output time is shorter than the trigger interval
(update period).
• The diagram above shows an example with output from all 11 outputs, including evaluation and OUT1 to OUT9. The
output at (1) finishes before the measurement value update at (2) by the trigger interval.
• "Evaluation 1" outputs evaluations for OUT1 to OUT8. "Evaluation 2" outputs evaluations for OUT9 to OUT16. If OUT9 to
OUT16 are not used, "Evaluation 2" is not output.

When evaluation/binary output time is longer than measurement value update time (trigger interval)
Measurement value (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)
Evaluation/binary output for measured value (1) Evaluation/binary output for measured value (7)
Evaluation/binary output Evaluation Evaluation

1 2 OUT1 OUT2 OUT3 OUT4 OUT5 OUT6 OUT7 OUT8 OUT9 Evaluation Evaluation
1 2 OUT1 OUT2 OUT3 OUT4 OUT5
Evaluation/OUT No. output Evaluation Evaluation

1 2 0 1 2 3 4 5 6 7 8 Evaluation Evaluation
1 2 0 1 2 3 4
Strobe output
Strobe period Strobe period/2
• Measurement results are skipped before being output when the Evaluation/binary output time is longer than the trigger
interval (update period).
• The diagram above shows an example with output from all 11 outputs, including evaluation and OUT1 to OUT9.
Because the Evaluation/binary output takes more time than the update of the measurement value by trigger interval,
the value output after measurement value (1) is measurement value (7). Measurement values (2) to (6) are skipped.
Shortening the strobe time or reducing the number of output items will reduce the number of items skipped. 10

When the data output timing is "TIMING1"
When the measurement value is set by the timing input, the Evaluation/binary output will be output at the same time.
All measurement results can be output when the Evaluation/binary output time is shorter than the measurement value
update from the timing input.
Measurement results are skipped before output when the Evaluation/binary output time is longer than the measurement
value update from the timing input.
Strobe output
Measurement value Measurement value
Evaluation/binary output Evaluation 1 Evaluation 2 OUT1
Evaluation/OUT No. output Evaluation 1 Evaluation 2 0
ON
OFF
ON
BUSY output
OFF
Strobe period
Strobe period/2
ON
Strobe output
OFF
0.2ms
• Evaluation/binary output is output in the time sharing mode with a period set by the strobe length when multiple setting
items are selected.
• Strobe output turns ON with 0.2 ms behind while fixing Evaluation/binary output.
• The strobe output ON time is half of the strobe length.
• Whether the output item is evaluation output or binary output can be confirmed by the evaluation/binary selection output.
• The contents of binary output can be confirmed by the OUT number outputs. 0 through 8 represent OUT1 through OUT9.
"During output OUT No. output" (page 8-7)

GO Output (Total Evaluation Output)

ON
OUT1 GO output OFF
ON
OUT2 GO output OFF
ON
OUT3 GO output OFF
ON
GO output OFF
• GO output (total evaluation output) is output when all the results are GO, other than the evaluation standby state for the
OUT number for which measurement is set (the measurement mode is other than "No setting").
• GO output (total evaluation output) is updated according to the settings for "Data out timing" in the "Common settings".
It is synchronized with the first strobe output for the evaluation/binary output, regardless of the settings for "Binary
output" under the common settings.
• The example in the diagram above shows measurement while OUT1 to OUT3 are set.
"OUT settings" (page 5-82)
Note
10 Import GO output in synchronization with the falling edge of a strobe output.

LED Emission Control Input

Min200ms
REMOTE input
MaxT2 MaxT2
LED light A/B
MaxT2 MaxT6
Measurement Image not taken Measurement

Measurement
• The input response time (T2) is 100 ms or less.

• The input response time (T6) is less than the measurement time displayed on the measurement screen.
• For REMOTE input, the short circuit in the COM terminal is ON (LED emission) and open in the COM terminal is OFF
(LED stop).
• REMOTE input will cancel any measurements taken when the REMOTE input is received and turn the laser off.
• Trigger input is ignored while the LED emission is suspended.

Memory Card Control Input (S_SAVE Input)

Storage (data or image) saves the data in internal memory to a memory card and then clears the internal memory.
Clearing the internal memory allows storage to continue uninterrupted.
A message window appears and measurement is suspended while saving. The previous measured value is held.
Example processing times:
Data storage :0.1 ms × data count + 800 ms
Image storage :800 ms × number of images + 800 ms (Measurement range X direction: FULL, Y direction: FULL)
• The processing time for saving increases as the number of files in the memory card increases.
• The response speed slows down during communication with TM-Navigator.
"Saving the Storage Data to the Memory Card" (page 7-9)
"Controller Status Table" in Saving the memory card (page 11-16)
For continuous trigger
Measurement value Hold
Evaluation/binary output Hold
Strobe output 10
ON
READY output

OFF
ON
BUSY output
OFF
ON
S_SAVE input OFF
Min1ms
Memory card Saving process
*1
*1 Period of time from the trigger activation until the measurement process completion.
For external trigger
TRG input
ON
READY output
OFF
ON
BUSY output
OFF
Measurement value Hold
Evaluation/binary output Hold
Strobe output
ON
S_SAVE input OFF
Min1ms
Memory card Saving process
Max2ms

Measurement Response Time
Trigger Interval and Measurement Time

The measurement response time will vary depending on the measurement condition settings on this unit.
The measurement screen displays the "Trigger interval" and the "Measurement time" for the measurement of the most
recent measurement condition.
Trigger interval :The shortest period for the continuous trigger or the external trigger input.
Measurement time:The time required to output the measurement result after the continuous trigger or the external
trigger is input.
"Description of the Measurement Screen" (page 3-2)
Because this unit uses multiple buffers, a trigger input can be sent as soon as the READY output terminal is ON, even if
the previous sampling has not finished and the results have not been output.
When the trigger mode is set to "Cont trigger", an internal trigger will automatically fire after every trigger interval.
When the trigger mode is "EXT trigger", synchronizing the READY terminal with the trigger input allows input at the
trigger interval displayed on the screen.
When two heads are connected and trigger synchronization is OFF, the trigger interval for head A is displayed.
When the sampling/forwarding time is long
10 Measurement time
Trigger interval
(1) (2) (3) (4)
ON
TRG input
OFF
ON
READY output
OFF
ON
BUSY output
OFF
Sampling/transfer processing (1) (2) (3) (4)
Measurement/output processing (1) (2)
ON
Strobe output
OFF
• Measurement time is the time from trigger input until sampling/forwarding processing and measurement/output
processing are completed.
• When the sampling/forwarding processing time is longer than the measurement/output processing time, the sampling/
forwarding time will be the same as the trigger interval.

When measurement/output processing time is long
Measurement time
Trigger interval
(1) (2) (3) (4)
ON
TRG input OFF
ON
READY output OFF
ON
BUSY output OFF
Sampling/transfer processing (1) (2) (3) (4)
Measurement/output processing (1) (2) (3)
ON
Strobe output
OFF
• Measurement time is the time from trigger input until sampling/forwarding processing and measurement/output
processing are completed.
• When the measurement/output processing time is longer than the sampling/forwarding processing time, the
measurement/output processing time will be the same as the trigger interval.
When the internal buffer is empty 10

(1) (2) (3)
ON
TRG input
OFF
ON
READY output
OFF
ON
BUSY output
OFF
Sampling/transfer processing (1) (2) (3)
Measurement/output processing (1) (2) (3)
Measurement value (1) (2) (3)
ON
Strobe output
OFF
• A trigger input is possible at the sampling/forwarding processing time when the internal buffer on this unit is empty.
• A trigger input at an interval shorter than that displayed on the measurement screen is possible.
• The next trigger can be input when the READY output terminal turns ON.
• After measurement/output processing has completed, the measurement results will be output in order.

Response Time Delay due to Averaging

The averaging settings may lengthen the measurement response time.
Continuous trigger: (Averaging count - 1) x trigger interval
External trigger: (Averaging count - 1) x trigger input count
The delay in measurement response time caused by averaging settings is not reflected in "Measurement time display".
"Average" (page 5-83)
Averaging count 1
1 2 3 4 5 6 7 8 9 10 11 12 13
ON
TRG input OFF
Measurement value –––––– 1 2 3 4 5 6 7 8 9 10 11 12
ON
Strobe output
OFF
• The measurement results from the trigger input are output as is.
Averaging count 4
10 ON
1 2 3 4 5 6 7 8 9 10 11 12 13
TRG input
OFF
Internal measurement 1 2 3 4 5 6 7 8 9 10 11 12
value before averaging
Measurement value –––––– –––––– –––––– –––––– 1 2 3 4 5 6 7 8 9
ON
Strobe output OFF
• Results measured for each trigger input are averaged 4 times and then output.
Power ON Reset Time

This is the period of time it takes for the unit to be able to activate the measurement trigger after the power is turned on.
Refer to "When the power is turned on" in "Controller Status Table" (page 11-16) for more information on the screen
display and the conditions of input and output during the power ON reset.
Power ON reset time: Approx. 15 seconds to 30 seconds

(This varies depending on the number of connected heads and number of master registration images of all
programs.)

RS-232C Interface
RS-232C Interface
Response Delay Time When Sending & Receiving Commands

The response delay time for response commands to each incoming command is as follows.
Incoming command Receive
Response command Respond

t
The time, t, is as follows.
Command t [ms]
Switching modes Q0 300 + Trigger interval × 2
R0 (*1) 800
R1 (*1) 400
Measurement control DC 200
KL 1000
PW (SAVE ON) (*2) 310 + Trigger interval x 2
PW (SAVE OFF) (*2)
PC (*3)
150 + Trigger interval x 2
800 + 1500 x Number of master images + Trigger
10
interval x 2

SS By file size
AQ 30
Others 3
Changing/Reading settings 3
* The response speed slows down during communication with the setup support software "TM-Navigator".
*1 When the cable extension mode is changed, 300 ms is added.
*2 When the program No. is switched and master images are registered on the switched program, the following time is
added.
(Number of master images registered after the program is switched) x 100 ms + 70 ms)
*3 Number of master images: Number of master images registered on all of the switched program No.
Refer to the following pages for more information on command details.


RS-232C Interface
Response Delay Time via Auto-send

The auto-transmission function outputs a measurement value command synchronized with the setting of the
measurement value by the external trigger input terminal (trigger input / timing input).
The auto-transmission OUT number is set via "Auto-send".
Auto-transmission timing is set via "Data out timing".
The timing chart for the "Data out timing" setting is as follows.
"Image update"
ON
TRG input OFF

t
10 • t = Measurement time (T6) + 3 ms

T6 is the measurement time displayed on the measurement screen.
• The measurement results are output at the timing at which the image is updated by the trigger.
• When the trigger mode is set to continuous trigger, the image is updated continuously and the measurement is output
continuously at the timing at which the measurement results are set. Measurement results updated during output are
filtered.
• When the trigger mode is set to external trigger, the image is updated by the trigger input and the measurement is
output at the timing at which the measurement results are set. Measurement results that are updated before output has
finished are not output.
"TIMING1"
ON
TIMING 1 input OFF

t
• t= 3 ms
• The measurement value set by the timing input is output.
• When the measurement mode is set to normal, the measurement value when the timing input turns ON is output.
• When the measurement mode is Peak/Bottom/P-to-p/Average/Sample hold, turning ON the TIMING1 input of the
external terminal outputs the set measurement value.

11
Chapter
Specifications
Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-2
Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-4
Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-6
Default Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-11
Specifications
Controller Status Table . . . . . . . . . . . . . . . . . . . . . . . . . . .11-16

Specifications
Specifications
Controller
Model TM-3001 TM-3001P

Head compatibility Available
Connectable number of heads*1 Two heads max.
Display Minimum display unit 0.01μm, 0.001mm2, 0.01°
Maximum display range ±9999.99 mm, ±99999.9 mm2, ±99999.9°
Remote input Non-voltage input
Input Trigger input (for Head A)

terminal Timing 1 input Non-voltage input
block Voltage input
Auto-zero 1 input
Reset input
Analog voltage output ±10 V x 2 outputs, output impedance 100 Ω
Total evaluation output NPN open-collector output PNP open-collector output
Output Error output NPN open-collector output (N.C.) PNP open-collector output (N.C.)
terminal
block Busy output
Trigger input permission output (for Head A) NPN open-collector output PNP open-collector output
Correction error output
Trigger input (for Head B)
Timing 2 input Non-voltage input Voltage input
Auto-zero 2 input
Program switching input Non-voltage input x 4 inputs Voltage input x 4 inputs
11 Extension
Memory card saving input Non-voltage input
3-step evaluation output:
Voltage input
3-step evaluation output:
I/O Connector OUT1 to OUT16 evaluation output OUT1 to OUT16 evaluation output
Specifications
Evaluation/binary Binary output: Binary output:

output*2 OUT1 to OUT16 measurement data output OUT1 to OUT16 measurement data output
(21 bits) (21 bits)
NPN open-collector output PNP open-collector output
Strobe output
NPN open-collector output PNP open-collector output
Trigger input permission output (for Head B)
Analog RGB monitor output SVGA (800 x 600 pixels)
RS-232C Interface Measurement data output and control I/O (Selectable up to baud rate 115200 bps)
USB interface USB 2.0 HI-SPEED compatible (USB 1.1 Full-SPEED compatible)
Ethernet interface 1000BASE-T / 100BASE-TX / 10BASE-T
Memory card Compatible with CA-SD4G (4GB), CA-SD1G (1GB)
Position correction, OUT name change, measurement mode selection (diameter, Y
position, step height, X position, width, distance, intersection distance, angle, radius,
roundness, coordinate, area, search, ring measurement, pitch), calculation between OUTs,
elements (line edge, arc edge, Circum Ln edge, center line, intersection, Ln between 2pt,
Main functions arbitrary line, arbitrary point), scaling, averaging, measurement, alarm error setting,
tolerance setting, auto-zero, storage (data, image), save to memory card, program
memory, change trigger mode, interference prevention, variable measurement range,
change detection threshold value, mask, head alignment, language switching, setup
support software, trigger interval/measurement time display, etc.
Power voltage 24 VDC ±10%, ripple (P-P): 10% max.
Rating
Max. current consumption one-head connection: 480 mA, two-head connection: 550 mA
Environmental Ambient temperature 0 to +50°C
resistance Relative humidity 35 to 85% (No condensation)
Material Polycarbonate
Weight Approx. 1120g
*1 Max. 2 heads of the same type can be connected.
*2 Evaluation results for OUT1 to OUT8, evaluation results for OUT9 to OUT16, and binary measurement data are output with time-sharing output.
• The rating of the NPN/PNP open collector output (output terminal block): 50 mA (30 V or less) max., residual voltage: 1.4 V or less (50 mA) 1.0 V (20 mA)
• The rating of the NPN/PNP open collector output (expansion connector): 50 mA (30 V or less) max., residual voltage: 1.0 V or less
• The rating of the non-voltage input is ON voltage 1 V or lower and OFF current 0.3 mA or lower. (Trigger input terminal is ON voltage 5 V or lower
and OFF current 1 mA or lower.)
• The rating of the voltage input is maximum rating 26.4 V, ON voltage 10.8 V, OFF current 0.3 mA. (Trigger input terminal is maximum rating 26.4
V, ON current 10.8 V, OFF current 1 mA.)

Specifications
Head
Model TM-006 TM-040 TM-065

Measurement range φ6 mm φ40 mm φ65 mm
Minimum detection object 0.04mm 0.3mm 0.5mm
Distance between transmitter and receiver 60mm 180mm 270mm
Light source GaN green LED InGaN green LED
Measurement accuracy ±0.5μm*1 ±2μm*3 ±3μm*5
*2 *4
Repeatability ±0.06μm ±0.15μm ±0.2μm*6
*7
Sampling cycle (trigger interval) 5.5 ms (Default setting: 33 ms)
Enclosure rating*8 IP64
Environmental
Ambient temperature 0 to +50°C
resistance
Relative humidity 35 to 85% (No condensation)
Material Aluminum
Transmitter Approx. 140g Approx. 560g Approx. 1280g
Weight Receiver Approx. 340g Approx. 720g Approx. 1460g
Base part Approx. 220g Approx. 630g Approx. 1500g
*1 Marginal error when measuring the width of the KEYENCE standard target (correction glass scale) within the measurement range of 2 mm x φ4 mm.
*2 The value of ±2σ when measuring the KEYENCE standard target (correction glass scale) in the center of measurement area with average
number of 16 times, and averaging with 1.3 mm line.
*3 Marginal error when measuring the width of the KEYENCE standard target (correction glass scale) within the measurement range of 10 mm x
φ26 mm.
number of 16 times, and averaging with 8 mm line.
*5 Marginal error when measuring the width of the KEYENCE standard target (correction glass scale) within the measurement range of 20 mm x
11
φ40 mm.
Specifications
number of 16 times, and averaging with 14 mm line.
*7 When the measurement range is minimum and other settings are default.
*8 excluding the connector part
Head-to-Controller Cable
Model CB-A07 CB-A2 CB-A5 CB-A10 CB-A20 CB-A30

Cable length 0.7m 2m 5m 10m 20m 30m
Weight Approx. 100 g Approx. 200 g Approx. 400 g Approx. 750 g Approx. 1400 g Approx. 2000 g
Transmitter-to-Receiver Cable
Model OP-87033 OP-87034

Cable length 1m 3m
Weight Approx. 60 g Approx. 130 g

Characteristics
Characteristics
Measurement Area
The illustrations below show the measurement areas that satisfy the measurement accuracy for each head.
Measurement area
<TM-006> <TM-040>
90 90
11
81 30±5
(30)
Specifications
65.5
40
±0.5μm ±2μm
φ4 φ6
±1.5μm φ26 φ40
2 ±5μm
4 10
Unit: mm 20 Unit: mm
<TM-065>
160 110
82
±3μm
φ40 φ65
±6μm
20
30 Unit: mm

Characteristics
Temperature Characteristics (examples)

Examples of the temperature characteristics are shown below.
TM-006
Temperature 10°C 15°C 20°C 25°C 30°C
Drift -0.12 -0.06 0.0 0.06 0.12
* When measuring the outer diameter with the metal pin gauge φ1 placed in the center of measurement range
(20°C standard) unit: μm
TM-040
Drift -1.5 -0.7 0.0 0.7 1.5
(20°C standard) unit: μm
TM-065
Drift -3.0 -1.5 0.0 1.5 3.0
(20°C standard) unit: μm 11
Specifications

Dimensions
Dimensions
Controller
TM-3001 / TM-3001P
92.5 (15) 135.5
DIN rail
mounting part
153 35.9
83.3
65.3
8
6 (60)
4-M4 depth 6
11
70
Specifications
80 17 Unit: mm
Console
28.8
47 2.1 17.1
5.5
17.1 11.2
78
φ20
112.7
4
φ4.5
φ11
Cable length
3m Unit: mm

Dimensions
Head
TM-006
4×4.5 Borer 15 15 4×M4
φ8 Counterbore depth 4.5
24
26
36
16±0.2
6
25 25
3×φ4 (227) 2×φ4

(Installation hole) 76 51 Measurement 8 32 (Installation hole)
Area
4
φ6
46
56
56
46
40
4
4
18
(30)
(60) Cable length 100
Cable length 500 3.5 81 38 3.5
6 48 126 25
Cable length 190
2×M4 4.5 2×M4
35
26
115 45
142 70
212
2×M4 depth 5 2×M4 depth 5
11
16
16
40 92 47 18 Unit: mm
Specifications
TM-040
4×M3 depth 3.5 7 48 48 7 4×M3 depth 3.5
4×4.5 Borer 25 25 4×M4
φ8 Counterbore depth 4.5
48
48
50
50
62
31±0.3
41.5
41.5
55 55 Transmitter front view

Receiver front view
3×φ5.5
3×φ5.5
(Installation hole)
(Installation hole)
94.8 Measurement 76.5 17.5
20 Area
φ40
97.5
97.5
88
88
65.5±0.6
20
5
Cable length 500

90 29
2.8 47 180 8 58.5
6.5
Cable length 235
Cable length 175

4×M4 depth 8
6
50
115 115
145 161
39.8 306 5.5

31
31
Unit: mm
34 103 103.5 25

Dimensions
TM-065
4×M3 depth 3.5 9 76 76 9 4×M3 depth 3.5
4×5.5 Borer
35 35 4×M4
φ9.5 Counterbore depth 5.5
76
76
94
70
70
47±0.6
44
44
12
Receiver front view 115 65 Transmitter front view
3×φ5.5 3×φ5.5
(Installation hole)
(Installation hole) 129.7 97 19
30 Measurement
Area
φ65
120
130
115
130
82±0.8
20
5
5
Cable length 500
160 33.5
8.7 66 270 66.5
9.5 11.5
Cable length 405
Cable length 175
4×M5 depth 10
12
70
200 130
240 190
49.7 430 17
47
47
Unit: mm
11 53 176 131.5 44
Transmitter-to-receiver cable
Specifications
OP-87033 / OP-87034
φ4.8
Cable length (1m / 3m)
12
10
12
6.7
44.5 51
Unit: mm
CB-A07 / CB-A2 / CB-A5 / CB-A10 / CB-A20 / CB-A30

φ7
33 Cable length (0.7m/2m/5m/10m/20m/30m)
55
φ14
26
11.5
Unit: mm

Dimensions
Protective cover
OP-87035 (for TM-040)
61
51
48 φ2 depth 1 20
18.5
27.5
51
61
48
4×3.4 Borer
φ6.5 Counterbore depth 10 Unit: mm
OP-87036 (for TM-065)
11
93
83
76 φ2 depth 1 30
34.5
Specifications
43.5
76
83
93
4×3.4 Borer
φ6.5 Counterbore depth 20 Unit: mm

Dimensions
LCD monitor
CA-MP81
241.2
(Mounting bracket dimension) Panel thickness
230 1.0 to 4.0mm
151 Mounting bracket
dimension
Mounting screw
191.2 129.8
(Mounting 180 (Effective 106
bracket display
dimension) area)
156 6 34
172.4
(Effective display area)
Panel cutout dimensions

255
11
Specifications
205
169.5 +10
219.5 +10 Unit: mm
CA-MP81 mount
OP-42278
230 109.2 144.6 144.6
30°
236
146
30°
2-R2.5 21.5
5
8 66.5
111
130
210 Unit: mm

Default Values
Default Values
List of setting ranges and default values for head settings

Item Selectable range Default value
Trigger setting Trigger mode Cont trigger / EXT trigger Cont Trigger
Int prevention ON / OFF OFF
Trigger rate ON / OFF OFF
Head A / Head B settings Measurement X 1 to 12, FULL 3
range
Y 1 to 12, FULL FULL
Mask setting Mask 1 to 5 Rectangle / Triangle Rectangle
Set the area position and size. -
Threshold 10 to 99% 50%
List of setting ranges and default values for master registration

Image registration Head A / Head B /
Both heads Register head A image / head B image / both heads images. Not registered
Head Head A / Head B ON / OFF OFF

alignment
Correction direction Horizontal / Vertical Horizontal
Range 1 Set the area position and size. -
Range 2 Set the area position and size. -
List of setting ranges and default values for position correction 11

Specifications
Correction target image Select head A / head B for correction. -
Correction mode OFF / Pattern correction / X correction / Y correction / OFF
X→Y correction / Y→X correction
Pattern corr Pattern area Set the area position and size. -
Search area Set the area position and size. -
Search speed 1 to 5 3
Search angle ±0 / ±5 / ±10 / ±20 / ±30 / ±45 / ±90 / ±180 ±10
Correlation 0 to 99 70 (%)
X corr only Position correction item Average / Left / Right / θ / Center line Average
Detection direction L→R / R→L L→R
X area 1/2 Set the area position and size. -
Y corr only Position correction item Average / Peak / Bottom / θ / Center line Average
Detection direction U→D / D→U U→D
Y area 1/2 Set the area position and size. -
XY corr Position correction item Average / Left / Right / θ / Center line Average
Position correction item Average / Peak / Bottom / θ / Center line Average
YX corr Position correction item Average / Left / Right / θ / Center line Average
Position correction item Average / Peak / Bottom / θ / Center line Average

Default Values
List of setting ranges and default values for measurement settings - Measure set
OUT1 / OUT2 / OUT3 / OUT4 / OUT5 / OUT6 / OUT7 / OUT8 / OUT9 / OUT10 / OUT11 / OUT12 / OUT13 / OUT14
-
/ OUT15 / OUT16
Measurement mode No measurement / Diameter / Y Position / Step Height / X Position /
Width / Distance / Intersect dist / Angle / Radius / Roundness / Diameter*1
Element Pos / Area / Search / Ring meas / Pitch / Calculations
Diameter Target head Head A / Head B Head A
Measurement area Set the area position and size. -
Measured content Average / Peak / Bottom Average
Tilt correction ON / OFF ON
Y position Target head Head A / Head B Head A
Measured content Average / Peak / Bottom Average
Step Height Target head Head A / Head B Head A
Measurement area 1/2 Set the area position and size. -
Measured content 1/2 Average / Peak / Bottom Average
Detection direction 1/2 U→D / D→U U→D
X Position Target head Head A / Head B Head A
11
Measured content Average / Left / Right Average
Width Target head Head A / Head B Head A
Specifications

Measured content 1/2 Average / Left / Right Average
Detection direction 1/2 L→R / R→L L→R
Distance Target head Head A / Head B Head A
Measurement target 1 Element 1 to 16 Element 1
Measured content Vector / X-axis / Y-axis Vector
Intersect dist Target head Head A / Head B Head A
Measured content Vector / X-axis / Y-axis Vector
Angle Target head Head A / Head B Head A
Angle range -90 to +90° / 0 to 180° -90 to +90°
Radius Target head Head A / Head B Head A
Roundnesss Target head Head A / Head B Head A
Element Pos Target head Head A / Head B Head A
Measured content X/Y X
Area Target head Head A / Head B Head A
Measured content Black / White Black

Default Values

Search Target head Head A / Head B Head A
Pattern area Set the area position and size. -
Search area Set the area position and size. -
Search speed 1 to 5 3
Search angle ±0 / ±5 / ±10 / ±20 / ±30 / ±45 / ±90 / ±180 ±10
Measured content X / Y / Angle X
Ring meas Target head Head A / Head B Head A
Measured content Average / Maximum / Minimum Average
Pitch Target head Head A / Head B Head A
Measured content 1 Pitch / Width / Gap Pitch
Measured content 2 Average / Max / Min Average
Calculations Calculation method A+B / A-B / Average / Max / Min A+B
Calc target 1 OUT1 to 15 OUT1
Calc target 2 OUT1 to 15 OUT2
Calc target 3/4 - / OUT1 to 15 -
*1 The default value when OUT1 is selected for the OUT number. The default value for OUT2 to OUT16 is "No measurement".
List of setting ranges and default values for measurement settings - Elements
Item Selectable range Default value 11
Element 1 / Element 2 / Element 3 / Element 4 / Element 5 / Element 6 / Element 7 / Element 8 / Element9 /
Specifications
-
Element 10 / Element 11 / Element 12 / Element 13 / Element 14 / Element 15 / Element 16
Measurement mode Line edge / Arc edge / Circum Ln edge / Center line /
-
Intersection / Ln between 2pt / Arbitrary line / Arbitrary pt
Line edge Target head Head A / Head B Head A
Arc edge Target head Head A / Head B Head A
Measurement area 1 Set the area position and size. -
Circum Ln edge Target head Head A / Head B Head A
Measurement area 1 Set the area position and size. -
Detection direction L→R / R→L / U→D / D→U L→R
Center line Target head Head A / Head B Head A
Intersection Target head Head A / Head B Head A
Intersection selection Upper / Lower / Right / Left Upper
Ln between 2pt Target head Head A / Head B Head A
Arbitrary line Target head Head A / Head B Head A
Arbitrary line Set the straight line. -
Arbitrary pt Target head Head A / Head B Head A
Arbitrary pt Set the point. -

Default Values
List of setting ranges and default values for OUT settings

OUT1 / OUT2 / OUT3 / OUT4 / OUT5 / OUT6 / OUT7 / OUT8 / OUT9 / OUT10 / OUT11 / OUT12 / OUT13 / OUT14 /
-
OUT15 / OUT16
Averaging 1 / 2 / 4 / 8 / 16 / 32 / 64 / 128 / 256 / 512 / 1024 / 2048 / 4096 1
Alarm error 0 to 255 0
Measurement mode Normal / Peak hold 1 / Bottom hold 1 / Peak-to-peak hold 1 /
Average hold 1 / Peak hold 2 / Bottom hold 2 / Peak-to-peak Normal
hold 2 / Average hold 2 / Sample hold
Offset*1 -999.999 to 999.999 0.000
Min display unit 1 1 mm / 0.1 mm / 0.01 mm / 0.001 mm /
0.001mm
1 μm / 0.1 μm / 0.01 μm
1
Scaling Input value 1 -999.999 to 999.999 (unit: mm) 0.000
Display value 1 -999.999 to 999.999 (unit: mm) 0.000
Input value 2 -999.999 to 999.999 (unit: mm) 1.000
Display value 2 -999.999 to 999.999 (unit: mm) 1.000
Tolerance*1 Upper limit -5.000 to 5.000 (unit: mm) 5.000
Lower limit -5.000 to 5.000 (unit: mm) -5.000
*1 The unit of measurement varies with the measurement mode settings.
• If the selected measurement mode is "outer diameter, height, position, step, width, distance, intersection distance, radius, circularity,
coordinate, search, ring inspection and pitch", the unit of measurement is "mm".
• If the selected measurement mode is "area", the unit of measurement is "mm2".
• If the selected measurement mode is "angle", the unit of measurement is "deg".
11
Specifications

Default Values
List of setting ranges and default values for common settings

TIMING terminal OUT1 to OUT16 Each OUT is set to TIMING1 / TIMING2 All TIMING1
ZERO terminal OUT1 to OUT16 Each OUT is set to ZERO1 / ZERO2 All ZERO1
Binary output Evaluation ON (output) / OFF (do not output) ON
OUT1 to OUT16 Each OUT is set to ON (output) / OFF (do not output) All OFF
Analog CH1 Output selection OUT1 / OUT2 / OUT3 / OUT4 / OUT5 / OUT6 /
output OUT7 / OUT8 / OUT9 / OUT10 / OUT11 / OUT1
OUT12 / OUT13 / OUT14 / OUT15 / OUT16
Analog output Measure 1 -999.999 to 999.999*1 -10.000*1
Scaling
Voltage 1 -10.500 to 10.500 (unit: V) -10.000
Measure 2 -999.999 to 999.999*1 10.000*1
Voltage 2 -10.500 to 10.500 (unit: V) 10.000
CH2 Output selection OUT1 / OUT2 / OUT3 / OUT4 / OUT5 / OUT6 /
OUT7 / OUT8 / OUT9 / OUT10 / OUT11 / OUT2
OUT12 / OUT13 / OUT14 / OUT15 / OUT16
Analog output Measure 1 -999.999 to 999.999*1 -10.000*1
scaling
Voltage 1 -10.500 to 10.500 (unit: V) -10.000
Measure 2 -999.999 to 999.999*1 10.000*1
Voltage 2 -10.500 to 10.500 (unit: V) 10.000
Storage OFF / Data storage / Image storage OFF
Data Amount of data 1 to 65536 65536
11
storage
Skipping 1 / 2 / 5 / 10 / 20 / 50 / 100 1
Image Target head Head A / Head B / Both heads Head A
storage
Storage conditions Always / NG only / Manual Always
Specifications
Auto-send OUT1 to OUT16 Each OUT is set to
All OFF
ON (output) / OFF (do not output)
Data out timing Image update / TIMING 1 Image update
*1 This is the setting range and default value when the minimum display unit in the OUT setting is set to "0.001 (mm)".

Controller Status Table
Screen display Input
Measure- Evaluation
Status Screen
ment Image Each OUT Total Trigger*6 TIMING RESET ZERO P1 to P4 S_SAVE
update
value evaluation evaluation
Normal Measurement Evaluation
c c
measurement value value result
Display
Positive side range over +FFFFFF HI c °
Negative side range over Update -FFFFFF LO c °
Measurement according
*1
Image not taken to the Hold Total c ° °
Screen ------ --
measurement evaluation c c c
(During
Evaluation standby*2 result result*9 c °
measurement)
Alarm -FFFFFF Display LO c °
Alarm error*3
Hold Hold Hold c c
Position correction error*4 Same as alarm error ON c °
REMOTE off Stop ------ Hold -- ° ° °
Display setting menu screen
Display setting menu display Same as the measurement screen (during measurement)
Program No. switching screen
Saving the memory card*5 Stop "Saving" message window display*12
11
"Reading storage data"
Reading storage data
message window display*12
°
Displays
°
Specifications
"View stored Image" screen according to the "View stored Image" screen display
(Reflected
storage setting
after
entering
Setting screen Displays the setting
Setting screen display ° operation
(During setting) content screen
(Reflected mode.)
RS-232C "RS-232C communicating" after
communication message window display*12 entering
° ° ° °
operation
Communication USB "USB communicating"
mode.)
mode Screen communication message window display*12
Ethernet "LAN communicating"

communication message window display*12
Stop ° °
"Error Messages"
When an error occurs
Error message display (page A-4)
° °
When the power is turned on (Reflected after (Reflected after
Startup screen
(Power ON reset) entering entering
operation mode.) operation mode.)
*1 In the following cases, the state that image is not taken is included by the time the measured value is set.
RESET process / Auto-zero (SAVE ON) / Program switching / No trigger input by external trigger / Power ON
*2 In the following cases, the evaluation standby status continues until the measured value is set.
RESET process / Auto-zero (SAVE ON) / Program switching / Trigger input not reaching the "Average" times
*3 For conditions to fire the measurement alarm, see each measurement mode in Chapter 5.
*4 The position correction error occurs when the position correction fails with the position correction set to ON.
*5 Saving the storage data or measurement screen
*6 The trigger input becomes valid when external trigger is selected for the trigger mode.
*7 When OUT number that has not been used for output selection is selected, -10.8 V is output.
*8 The evaluation/binary output outputs the measurement results in a time-sharing manner.
*9 The total evaluation result is based on the evaluation result of the OUT number of which measurement mode is set other than "No setting".
OK: When the OUT numbers other than the evaluation standby state or the state that image is not taken are all GO
NG: When any of the OUT numbers other than the evaluation standby state is not GO
No display: When all the OUT numbers are in the evaluation standby state

Output Communication
Evaluation/binary*8
Analog Total READY/ ERROR
OUT No. INVALID RS-232C USB Ethernet
voltage*7 evaluation Evaluation Binary Strobe BUSY (N.C.)
output
Depends on the Depends on the Depends on the
measurement value evaluation result measurement value
+10.8V HI 0x0FFFFF (+)
Turns ON
-10.8V when the LO 0x100000 (-) Measurement
Outputs
-10.8V total Evaluation or OFF value display /
All OFF Outputs in a according Measurement
*10 evaluation All OFF OUT number Image display /
time sharing to the control
result is GO*9 during time- Storage
-10.8V 0x100000 (-) manner measure command
sharing output operation
-10.8V HI and LO turn ON at the same time 0x100000 (-) ment
(TM-Navigator)
Hold Hold
Same as alarm error ON
*11 OFF All OFF OFF
Same as the measurement screen

Same as the measurement screen (during measurement)
(during measurement)*13
ON
Same as the measurement
11
screen (during
measurement)*14
Hold
Specifications
Error
Error
Error
Setting change/
confirmation command
Hold Hold
Sending and
receiving settings
Setting change
OFF Error
command
Error
ON Error
-10.8V OFF All OFF OFF OFF

OFF ° ° °
*10 Analog output is held for a certain period until the unit enters the evaluation standby state after the program is switched.
*11 The previous measured value is held immediate after REMOTE is released. After trigger interval x 2 ms, -10.8 V is output.
*12 All console operations do not work while the message is displayed.
*13 The screen returns to the measurement screen after the communication mode screen.
*14 Processing takes place after the data has been saved or loaded.
• ON / OFF indicates the ON / OFF status of the NPN or PNP open-collector output.
• c / ° indicates the validity / invalidity of input.
• HOLD represents the state in which the normal value immediately before is being held.
• USB / Ethernet indicates the communication using the Setup support software "TM-Navigator".
• The setting screen (during setting) indicates the setting screen (during setting) performed with the console.
• The communication mode screen indicates the status where setting is performed via RS-232C communication / USB communication / or Ethernet
communication. RS-232C, USB and Ethernet cannot be used at the same time.
• Moving to the communication mode and returning to the measurement screen through the USB communication / Ethernet communication are
performed automatically on the Setup support software "TM-Navigator".
• Using RS-232C communication / USB communication / Ethernet communication in the measurement screen (during measurement) lowers the
response speed.

MEMO
11
Specifications

Appendix
Memory Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2

Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-4
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-9
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-13
Appendix
- High-speed 2D Measurement Sensor Users' Manual - A-1

Memory Structure
Memory Structure
Controller
SDRAM FLASH memory Memory card

Program (measurement conditions) • Program
Measurement Program x 16 sets
(measurement conditions) (measurement conditions)*3
• Head setting • Environmental setting
• Program • Master registration
(measurement conditions)
• Position correction • Data storage
• Auto-zero setting value • Measurement setting
• OUT Settings • Image storage
• Program No. • Common Settings
• Measurement cursor • Auto-zero setting value*1
information
Storage data
• Data storage • Environmental setting

or
• Startup screen
• Image storage
• Program No.*2
• SDRAM is volatile memory. The stored data is erased when the power to the controller is turned off.
• The FLASH memory is non-volatile memory. The stored data is maintained even after the power to the controller is
turned off.
• Turning on the power to the controller transfers the measurement conditions stored in the FLASH memory to the
SDRAM, and the measurement is performed.
• If the settings are changed via TM-Navigator, the setting contents are saved to the FLASH memory regardless of the
save setting.
Appendix
*1 The auto-zero setting is saved to the FLASH memory only when the save function is set to ON.
When moving from the setting screen to the measurement screen by the console operation, the settings are saved
to the FLASH memory regardless of the save function setting.
*2 The program No. are saved to the FLASH memory only when the save function is set to ON and the method for
switching program No. is set to "Console".
When moving from the setting screen to the measurement screen by the console operation, the settings are saved
to the FLASH memory regardless of the save function setting.
*3 When saving a program (measurement condition) to a memory card, all 16 programs (measurement conditions) are
saved as a single file.

Reference
• The FLASH memory has an expected lifetime of 100,000 writes. If the auto-zero or program No. switching functions are
changed over the communication link frequently, use the save OFF function to protect the FLASH memory and use the
mode change command (R1) to measure without saving the changed settings to the FLASH memory.
• Do not turn off the power while writing to the FLASH memory or memory card. Part or all of the data may be lost, or
system errors may occur due to data errors.
"System error messages" (page A-4)
A-2 - High-speed 2D Measurement Sensor Users' Manual -

Measurement Conditions and Measurement Data Flow
Measurement Conditions and Measurement Data Flow
Head setting
Head A setting Head B setting Trigger settings
Trigger input
Measure range Measure range Trigger mode
Ready output
Mask setting Mask setting Int prevention
Threshold Threshold Trigger rate
Head alignment Head alignment

Image storage
Position correction
Position correction Invalid output
Measurement setting
Elements
OUT measurement
Appendix
OUT settings
OUT1 OUT2 OUT16

Timing input
Alarm error Alarm error Alarm error
Auto-zero input
Scaling Scaling Scaling
Reset input
Averaging Averaging Averaging
Busy output
Measurement mode Measurement mode • • • Measurement mode
Evaluation/binary output
Auto-zero Auto-zero Auto-zero
Offset Offset Offset Analog output
Tolerance evaluation Tolerance evaluation Tolerance evaluation RS-232C input/output
Total evaluation Data Storage

Error Messages
Error Messages
System error messages

System error messages appear when an error occurs that stops measurement.
Display contents Cause Remedy

Head not connected. Displayed when there are not Turn off the power and check the cable connecting the
Confirm connection of a head. any heads connected. head and controller. After checking the cable, turn the
Please cycle power. power on again.
If the error message appears again, contact your
nearest KEYENCE office.
"Wiring" (page 1-18)
Head A model number does Displayed when the two When two heads are connected, use the same model.
not match Head B. connected heads are
Check head model number. different models.
Please cycle power.
Unable to get a Image from the Displayed when there is only Set the "Trigger rate" to "OFF".
head. Please check your one head connected, "Trigger "Trigger rate" (page 5-5)
settings. rate" setting is "ON" and the
(*1) trigger is issued.
• Head A error (****) Displayed when Head A or Turn off the power and check the cable connecting the
• Head B error (****) Head B is not recognized head and controller. After checking the cable, turn the
correctly. power on again.
If the error message appears again, contact your
Controller device error (****) Displayed when there is a Contact your nearest KEYENCE office.
controller internal error.
• If the error disappears after restarting the power
Appendix
Memory sum error (****) Displayed when there is a

data error in the parameters Continue using the TM-3000 Series as normal.
saved in FLASH memory. • If the error appears again after restarting the power
This may indicate that there is Perform full initialization.
a data error due to the power "Restoring the default status" (page 2-16)
being turned off while writing, • If the error disappears after full initialization:
a data error due to noise, or Continue using the TM-3000 Series as normal.
damage due to exceeding Reconfigure the settings or load a backup file before
the number of times for using. (A backup file must be saved into a memory
writing. card or TM-Navigator beforehand.)
• If the error appears again after full initialization
There is a malfunction in the memory. Contact your
CODE (****) • May be displayed when the • When using the 30m cable (CB-A30) for connecting
cable expansion mode the head and controller, set the cable expansion
setting is not correct. mode to ON.
• Displayed when there is a "Setting the Cable Expansion Mode" (page 6-4)
head or controller internal • Contact your nearest KEYENCE office.
error.
• **** represents the specific error number.
• If the system error occurs, the error output turns ON.
(The error is not output for *1)
"Evaluation output" (page 8-6)
• If other error message appears, contact your nearest KEYENCE office.

Error Messages
Setting initialization messages

Setting initialization messages appear when part or all of the settings need to be initialized.
Setting initialization messages Cause Remedy

Initialize all settings. Proceed? Displayed when performing Select "YES" and press the [ENTER] key to perform full
full initialization. initialization.
Otherwise, select "NO" and press the [ENTER] key.
Changing the min. display unit Displayed when changing the Select "YES" and press the [ENTER] key to perform
initializes the following minimum display unit for OUT initialization.
parameters: settings. Otherwise, select "NO" and press the [ENTER] key.
Scaling settings,Tolerance The minimum display unit settings are canceled.
setting, Offset and Auto-zero "Min display unit" (page 5-87)
Appendix

Error Messages
Parameter error messages

Parameter error messages appear when a parameter is not set within the range or when settings have failed.
Setting items Display contents Cause Remedy

Master registration No Image. Can't An image cannot be found Press the [TRG] key to measure the
register master image. for master registration. image for master registration, and then
press the Register button.
Head Correction window The setting range for the Head Adjust the correction range to within
alignment exceeds field of view. Alignment exceeds ±20°. ±20° and make the head alignment
again.
"Head Alignment" (page 5-11)
Position correction The master image is Position correction can only Set the master image in "Master Image
not registered and be performed after a registration".
cannot be set. master image is registered. "Image Registration" (page 5-10)
Register the master
image in "Master
Image registration".
Pattern Set the pattern area The pattern area is set Set the pattern area inside the search
correction inside the search area. larger than the search area. area.
"Pattern Correction" (page 5-16)
Measure- Search Set the pattern area The pattern area is set Set the pattern area inside the search
ment inside the search area. larger than the search area. area.
settings "Pattern Correction" (page 5-16)
OUT Scaling The same value The scaling values do not Set the value again to meet the input
settings cannot be set for meet the input conditions. conditions.
Appendix
input. "Scaling" (page 5-88)

Set span between -10 The scaling values do not Set the value again to meet the input
and 10. meet the input conditions. conditions.
Tolerance Set the upper limit The tolerance values do Set the limits so that the lower limit is
higher than the lower not meet the input less than or equal to the upper limit.
limit. conditions. "Tol upper limit / Tol lower limit"
(page 5-90)
Common Analog The same value The analog input does not Set the value again to meet the input
settings output cannot be set for meet the input conditions. conditions.
measurement. "Analog output" (page 5-96)
Set span between -10 The analog input does not Set the value again to meet the input
and 10. meet the input conditions. conditions.

Error Messages

Memory Overall Overall error A KEYENCE memory card To prevent operation errors, use a
card messages (sold separately) is not in KEYENCE memory card (sold
use. separately).
Insert memory card. Displayed when attempting Check that a memory card is correctly
to operate the memory inserted and the memory card LED is lit.
card while the memory If a memory card is inserted but the
card LED is unlit. memory card LED is still unlit, remove
the memory card and insert it again.
"Inserting / Removing a Memory
Card" (page 7-3)
Save Input file name. Displayed when the Correctly enter a file name.
entered file name is not
correct.
Saving file failed. There is insufficient space Delete unnecessary files to increase
in the memory card. free space. Or use a new memory card.
The memory card has been Format the memory card. If the problem
damaged. is not remedied, use a new memory
card.
The memory card was Remove the memory card correctly.
removed while saving or
immediately before
confirming the save
process.
There is no Save operation was When saving data stored in data
Appendix
accumulated data. performed while the storage or image storage to the memory
amount of data storage or card, store at least one piece of data.
image storage is "0".
Continued on the next page.

Error Messages

Memory Load Reading file failed The file has been A damaged file cannot be read. (Making
card damaged. a backup file beforehand is
recommended.)
The memory card has been Format the memory card. If the problem
damaged. is not remedied, use a new memory
card.
The memory card was Remove the memory card correctly.
removed while saving or
immediately before
confirming the save
process.
Format error The format in the file is not Use files that were saved correctly in the
correct. controller.
Storage setting has The image storage file was Set the storage setting to "Image
changed. loaded when the "Storage" storage" when loading image storage
in common settings is not data.
set in image storage.
Measure range are The measure range of the Before loading, set the same measure
different. Can't read program loading differs range as the one when saving the
file. from the one when saving image storage data.
the image storage data.
Delete File deletion failed. The memory card was Remove the memory card correctly.
removed while deleting the
file or immediately before
confirming the deletion.
Appendix
Format Formatting failed. The memory card was Remove the memory card correctly.
removed while formatting
or immediately before
confirming the formatting.
The memory card has been Use a new memory card.
damaged.
Image storage screen No Image data is There is not any data saved Save at least one piece of storage data
stored. in image storage. in image storage before displaying the
image storage screen.

Troubleshooting
Troubleshooting
Reference
Problem Checkpoints Remedy
page
Nothing is Is the power cable properly connected to Properly connect the power cable.
1-20
displayed on the monitor and controller?
the monitor Is the monitor cable properly connecting Properly connect the monitor cable.
display. 1-19
the controller and the monitor?
Error message Address the problems according to the
- -
is displayed. respective messages displayed on the screen.
The console Is the console properly connected? Connect the console properly. 1-19
does not
function. Is keylock set to ON? Set the keylock OFF. 3-16
The LED does Is the cable properly connected between Properly connect the cable between the head
1-19
not turn on. the head and controller? and controller.
Is the power cable properly connected? Properly connect the power cable. 1-20
Is the remote terminal properly input? Check the remote terminal wiring. 1-20
8-2
Are the trigger settings set properly? Trigger input is required when using the
3-11
"External trigger" mode.
The Is the measurement target placed within Place the measurement target correctly within
1-12
measurement the measure range? the measure range.
image is not Does the LED turn on? See "The LED does not turn on" under
displayed. A-9
Troubleshooting.
Are you currently watching the Set the image/value display screen to the
2-3
measurement screen? measurement screen (during measurement).
Appendix
Are the trigger settings set properly? Trigger input is required when using the
3-11
"External trigger" mode.

Troubleshooting
Reference
page
The Is the measurement target placed within Place the measurement target within the
1-12
measurement the measure range? measure range.
image is not Is the image being affected by stray light? Change the position of the measurement target. 1-13
displayed
Set the mask function. 5-7
properly.
Is the "Measure range" for "Head setting" Set the "Measure range" for "Head setting"
5-6
properly set? properly.
Is the "Mask setting" for "Head setting" Set the "Mask setting" for "Head setting"
5-7
properly set? properly.
Is the "Threshold" for "Head setting" Set the "Threshold" for "Head setting" properly.
5-9
properly set?
Do the unit have mutual interference? Set the mutual interference prevention function
5-4
for "Head setting".
Is there strong ambient light? Shield the ambient light. 1-13
Are you using the CB-A30 (30 m cable) Set "Cable exp mode" in the environmental
6-4
without using the "Cable expansion mode"? settings.
Is the target covered with dirt, dust, water, Remove the dust, dirt, water, and oil.
1-15
or oil?
Is the receiver or transmitter covered with Remove the dust, dirt, water, and oil.
1-15
dirt, dust, water, or oil?
Are there splashes of water or oil in the Remove the splashes through air purging or a
-
operating environment? similar process.
Does the cover glass have flaw or crack? Replacement of the cover glass is required.
Appendix
Because this replacement requires KEYENCE -

repair service, contact your nearest Sales Office.
Does the unit have condensation? Install the unit in the proper operating environment. -
Does the measurement target or head Take appropriate countermeasures to prevent
-
vibrate? vibration.
The Does the LED turn on? See "The LED does not turn on" under
A-9
measurement Troubleshooting.
value display Are the trigger controls acting according Operate the trigger controls according to the
shows "------" 3-11
to the trigger mode? trigger mode.
and does not
Does the "Target head" selected for Select the "Target head" correctly so it
change.
"Measurement mode" in "Measurement settings" corresponds to the head currently used for 5-37
correspond to the head currently used? measurement.
Is the timing control operating properly Operate the timing control according to the
10-2
according to the measurement mode? measurement mode.
Is the "Average" for "OUT settings" properly The measurement value is not displayed until
set? the trigger input for "Average" is input.
Confirm the following contents according to
each "Trigger setting".
• "External trigger":
10-22
Input the trigger for the number of times set
for "Average".
• "Continuous trigger":
Wait for the period for "Number of times set for
"Average"" x "Trigger interval".

Troubleshooting
Reference
page
The Is the measurement image displayed See "The measurement image is not displayed
A-10
measurement properly? properly" under Troubleshooting.
value shows Is the position correction properly set? Properly set the position correction. 5-14
"-FFFFFF".
Is the measurement mode properly set? Properly set the measurement mode. 5-37
Measurement Is the measurement image displayed See "The measurement image is not displayed
A-10
value display properly? properly" under Troubleshooting.
fluctuate. Is the position correction properly set? Properly set the position correction. 5-14
Is the "Average" properly set? Setting "Average" larger stabilizes the
5-83
measurement value.
Is the "Alarm error" properly set? Properly set the "Alarm error". 5-85
Measurement Is the measurement image displayed See "The measurement image is not displayed
A-10
value display properly? properly" under Troubleshooting.
deviates. Is the measurement target tilted or Place the measurement target correctly within
1-11
displaced? the measure range.
Set the head alignment. 5-11
Set the position correction. 5-14
Is the measurement mode properly set? Properly set the measurement mode. 5-37
Is the scaling properly set? Properly set the scaling. 5-88
Is the offset properly set? Properly set the offset. 5-87
Auto-zero Is the ZERO terminal in the common Assign the OUT number properly to the ZERO
5-94
does not settings properly set? terminal.
operate
Appendix
Is the offset value properly set? Properly set the offset value. 5-87
correctly.
Cannot Is program switching in the environment Properly set the program selection according to
6-5
change the settings properly set? the program switching method.
program No. Is keylock set to ON? Set the keylock to OFF. 3-16
Is the setting screen (configuring settings) Switch to the measurement screen (during
displayed or is the unit in the measurement). 2-2
communication mode?
Is the program name properly set in the When using the program No. switching function
memory card? in the memory card, use the correct program 7-9
file name.
Evaluation Is the unit properly wired? Check the output circuit and wiring, and
9-4
output cannot connect properly.
be output Is the tolerance properly set? Properly set the tolerance. 5-90
properly.
Is the binary output in the common Select the evaluation output for binary output in
5-95
settings properly set? the common settings.
Is the data output timing in the common Properly set the data output timing in the
5-102
settings properly set? common settings.
Is the input timing properly set? Use the strobe output to enable proper input
10-1
timing.

Troubleshooting
Reference
page
Analog output Is the unit properly wired? Check the wiring and connect properly. 8-3
cannot be Is the voltage greater than +10.8 V or Set the analog output scaling properly
output 5-96
lower than -10.8 V? according to the measurement value.
properly.
Is an oscilloscope or a high-speed A/D The resolution may decrease if these devices
board used? are used. Change the analog output scaling so 5-96
that the effect should be minimized.
Binary output Is the unit properly wired? Check the output circuit and wiring, and
8-4
cannot be connect properly.
output Is the logic properly set? Negative logic is used in the output on this unit. 8-6
properly.
Is the input timing properly set? Use the strobe output to enable proper input
10-1
timing.
Is the binary output in the common Select the OUT number for binary output in the
5-95
Is the data output timing in the common Properly set the data output timing in the
5-102
Is the strobe period in environment Properly set the strobe period in environment
6-4
settings properly set? settings.
Cannot Is the communication cable properly Connect the communication cable properly.
9-3
communicate connected?
via the RS- Does the type of the communication cable Check the type of communication cable used.
232C. 9-3
conform to the specifications?
Are the communication specifications Set the communication specifications of the
Appendix
properly set? TM-3000 Series the same as for the external 9-2
device.
Is the appropriate communication Check whether the command and the delimiter
9-11
program used? are properly sent or received.
After recognizing the response command from
9-11
the TM-3000 Series, send the next command.
Is the TM-3000 Series ready to receive Send commands when the TM-3000 Series is in
9-6
commands? the correct state.
Are the communication settings properly Set the Auto-send properly.
set according to the communication 9-31
method or external devices?
The memory Address the problems according to the
card cannot respective error messages displayed on the
be read or - screen. A-7
written
correctly.

Index
Index
Details of Change Parameter Commands ...... 9-19

A
Diameter .......................................................... 5-43
Adjusting Date and Time .................................. 6-5
Dimensions ..................................................... 11-6
Advanced Usage of Saving and Reading ........ 7-9
Display Setting Menu ........................................ 3-6
Analog output ................................................. 5-96
Displaying the Head Settings Screen ............... 5-2
Analog resolution ..................................... 8-8, 8-10
Displaying the Memory Card Screen ................ 7-2
Angle ............................................................... 5-58
Distance .......................................................... 5-54
Arbitrary line .................................................... 5-80
Drawing an Area by Entering Values .............. 2-13
Arbitrary pt ...................................................... 5-81
Drawing an Area with the Cursor ...................... 2-9
Arc edge ......................................................... 5-75
Area ................................................................ 5-65
ASCII Code Table ........................................... 9-33 E
Auto-offset ....................................................... 3-13 Edge ................................................................ 5-37
Auto-send ..................................................... 5-101 Edge Correction .............................................. 5-19
Auto-zero Function .......................................... 3-12 Elements ......................................................... 5-73
Auto-zero Using the Console .......................... 3-12 Entering a Value ................................................ 2-7
Auto-zero Using the External Input Terminal ...... 3-13 Entering Characters .......................................... 2-8
Auto-zero via the RS-232C Communication ....... 3-13 Environment Settings Items .............................. 6-3
Error Messages ................................................. A-4
Evaluation/Binary Output .............................. 10-16
B
Expansion connector ........................................ 8-4
Basic Operations for Settings ........................... 2-5
Basic Procedure for measurement Settings ... 5-37
Binary output ................................................... 5-95 F
Files ................................................................... 7-4
Formatting Memory Cards ................................ 7-8
C
Cable CB-A** .................................................... 1-3
Calculations .................................................... 5-72 G
Appendix
Centerline ........................................................ 5-77 GO Output (Total Evaluation Output) ............ 10-18
Changing Languages ....................................... 6-4
Characteristics ................................................ 11-4
Checking the Image Display ........................... 1-21 H
Checking the Package Contents ...................... 1-3 Head ...................................................... 1-10, 11-3
Circum Ln edge .............................................. 5-76 Head (TM-040 / TM-065) ................................... 1-3
Command Types and Receivable State ........... 9-5 Head A / Head B Settings ................................. 5-6
Common settings ............................................ 5-92 Head Alignment .............................................. 5-11
Communication Specification Settings ............. 9-3 Head Settings ................................................... 5-2
Communication Specifications ......................... 9-2 Head-to-Controller Cable ................................ 11-3
Connecting to a PC or PLC Link Unit ................ 9-3 Hold Function .................................................. 3-10
Connections and settings for RS-232C
Communication ................................................. 9-3
I
Console ............................................................. 1-8
I/O Circuit and Electrical Specifications ........... 8-8
Controller ................................................. 1-6, 11-2
Identifying Names and Functions of the I/O
Controller (TM-3001) ......................................... 1-3
Terminals ........................................................... 8-2
Controller Status Table ................................. 11-16
Image Capture Function ................................. 3-21
Coordinate ...................................................... 5-63
Image Registration .......................................... 5-10
Cursor (Selected status) ................................... 2-5
Input and Output Details ............................... 10-16
Input terminal block .......................................... 8-2
D Inserting / Removing a Memory Card ............... 7-3
Data out timing .............................................. 5-102 Inserting a Memory Card .................................. 7-3
Default Values ............................................... 11-11 Installation and Wiring ..................................... 1-13
Deleting Files .................................................... 7-7 Installing the Controller ................................... 1-16
Description of the Measurement Screen .......... 3-2 Installing the Head .......................................... 1-13
Installing the Protective Cover ........................ 1-15
Index
Insulation status between I/O circuits ............. 8-10 Outputting Measurement Values via
Intersection ...................................................... 5-78 Auto-send .................................................9-4, 9-31
Intersection distance ....................................... 5-56 Outputting Measurement Values via
Commands ........................................................9-4
Overview of Change parameter
K Commands ......................................................9-18
Keylock ............................................................ 3-16 Overview of Command Formats ........................9-7
Overview of Measurement Control
L Commands ......................................................9-11
LED Emission Control Input ........................... 10-18 Overview of Measurement Settings .................5-37
Line edge ........................................................ 5-73 Overview of Measurement types .....................5-39
List of Optional Products ................................... 1-4 Overview of Read Parameter Commands .......9-29
Ln between 2pt ................................................ 5-79 Overview of Storage ........................................3-17
Overview of the Screen and Console
Operations .........................................................2-2
M
Master Registration ......................................... 5-10
Measurement Area .......................................... 11-4 P
Measurement Conditions and Measurement Part Names and Functions ................................1-6
Data Flow .......................................................... A-3 Pattern Correction ............................................5-16
Measurement Control Command Details ........ 9-12 Performing Data Storage .................................3-17
Measurement Response Time ....................... 10-20 Performing Image Storage ..............................3-19
Measurement Settings ..................................... 5-37 Pitch .................................................................5-70
Memory Card Control Input Position Correction ..........................................5-14
(S_SAVE Input) .............................................. 10-19 Power ON Reset Time ...................................10-22
Memory Card Usage ......................................... 7-2 Program Function ..............................................4-2
Memory Structure ............................................. A-2
Mode Change Commands .............................. 9-10 R
Appendix
Radius .............................................................5-60
N Range over ..................... 3-2, 5-96, 8-7, 9-9, 11-16
No setting ........................................................ 5-72 Reading from a Memory Card ...........................7-6
Reference ........................................................9-33
Removing a Memory Card .................................7-3
O Response Delay Time via Auto-send ............10-24
Operation Details When "Cont trigger" is Response Delay Time When Sending &
Selected ........................................................ 10-10 Receiving Commands ...................................10-23
Operation Details When EXT Trigger is Set .... 10-13 Response Time Delay due to Averaging .......10-22
Operation Overview of Position Correction ..... 5-14 Restoring the default status .............................2-16
Operation Overview When "Cont Trigger" is Ring measurement ..........................................5-68
Selected .......................................................... 10-2 Roundness ......................................................5-62
Operation Overview When EXT Trigger RS-232C Communication Specifications and
is Set .............................................................. 10-12 Terminal Assignment .........................................9-2
Operational Flow from Setting to RS-232C Interface .........................................10-23
Measurement ..................................................... 2-4
Operations and Functions of the Display
Setting Menu ..................................................... 3-6 S
OUT settings .................................................... 5-82 Saving and Reading Operations .......................7-4
Output Data Format ......................................... 9-32 Saving the Storage Data to the Memory Card ....7-9
Output Method ................................................ 9-31 Saving to a Memory Card ..................................7-4
Output terminal block ........................................ 8-3 Search .............................................................5-66
Outputting Measurement Values ....................... 9-4 Selecting an Item ...............................................2-6
Outputting Measurement Values and Selecting from a Pull-down Menu ......................2-7
Changing Settings via Commands .................... 9-5 Selecting the Active OUT ..................................3-5
Setting a Startup Screen ....................................3-5

Index
Setting Auto-send ............................................. 6-3

U
Setting Methods .............................................. 9-31
Usable Memory Cards ...................................... 7-3
Setting Procedure for the Environment
Using the ENTER Key ....................................... 2-6
Settings ............................................................. 6-2
Setting Save operations for Flash Memory
(Save) ................................................................ 6-5 V
Setting the Cable Expansion Mode .................. 6-4 Viewing the Display Setting Menu .................... 3-6
Setting the Communication Specifications
for Ethernet ....................................................... 6-3
Setting the Communication Specifications W
for RS-232C ...................................................... 6-3 When Setting Continuous Trigger ................... 10-2
Setting the Keylock Using the Console ........... 3-16 When Setting External Trigger ...................... 10-12
Setting the Keylock via the RS-232C Width ............................................................... 5-52
Communication ............................................... 3-16 Wiring .............................................................. 1-18
Setting the Program-switching Method ............. 6-5
Setting the Strobe Time .................................... 6-4
X
Specifications ................................................. 11-2
X Position ........................................................ 5-50
Step Height ..................................................... 5-48
Storage ........................................................... 5-98
Storage Function ............................................. 3-17 Y
Strobe output ................................................ 10-17 Y position ........................................................ 5-46
Switching Program No. ................................... 3-14
Switching Program No. Using the Console ..... 3-14
Switching Program No. Using the External Z
Input Terminal ................................................. 3-15 ZERO terminal ................................................. 5-94
Switching Program No. Using the RS-232C
Communication ............................................... 3-15
Switching the Display of Measurement Screen ..... 3-4
Appendix
Switching to the Program in the Memory Card
for Measurement ............................................... 7-9
System Configuration ........................................ 1-2
T
Temperature Characteristics (examples) ....... 11-5
Terminal Assignment of Connector ................... 9-2
TIMING terminal .............................................. 5-93
TM-3001 (NPN output type) .............................. 8-8
TM-3001P (PNP output type) ............................ 8-9
Transmitter-to-Receiver Cable ........................ 11-3
Trigger Function .............................................. 3-11
Trigger Input Using the Console ..................... 3-11
Trigger Input Using the External Input
Terminal .......................................................... 3-11
Trigger input via the RS-232C
Communication ............................................... 3-11
Trigger Interval and Measurement Time ....... 10-20
Trigger Setting .................................................. 5-2
Troubleshooting ................................................ A-9
Types of Position Correction ........................... 5-15

Revision History
Date of printing Version Revision contents

February 2010 Official release -
February 2012 Revised 2nd edition
August 2012 3rd edition
November 2012 4th edition
February 2015 5th edition
November 2016 6th edition
- High-speed 2D Measurement Sensor Users' Manual -

WARRANTIES AND DISCLAIMERS
(1) KEYENCE warrants the Products to be free of defects in materials and workmanship for a period of one (1) year from
the date of shipment. If any models or samples were shown to Buyer, such models or samples were used merely to
illustrate the general type and quality of the Products and not to represent that the Products would necessarily
conform to said models or samples. Any Products found to be defective must be shipped to KEYENCE with all
shipping costs paid by Buyer or offered to KEYENCE for inspection and examination. Upon examination by
KEYENCE, KEYENCE, at its sole option, will refund the purchase price of, or repair or replace at no charge any
Products found to be defective. This warranty does not apply to any defects resulting from any action of Buyer,
including but not limited to improper installation, improper interfacing, improper repair, unauthorized modification,
misapplication and mishandling, such as exposure to excessive current, heat, coldness, moisture, vibration or
outdoors air. Components which wear are not warranted.
(2) KEYENCE is pleased to offer suggestions on the use of its various Products. They are only suggestions, and it is
Buyer's responsibility to ascertain the fitness of the Products for Buyer’s intended use. KEYENCE will not be
responsible for any damages that may result from the use of the Products.
(3) The Products and any samples ("Products/Samples") supplied to Buyer are not to be used internally in humans, for
human transportation, as safety devices or fail-safe systems, unless their written specifications state otherwise.
Should any Products/Samples be used in such a manner or misused in any way, KEYENCE assumes no
responsibility, and additionally Buyer will indemnify KEYENCE and hold KEYENCE harmless from any liability or
damage whatsoever arising out of any misuse of the Products/Samples.
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provided to Buyer pertaining to the Products/Samples.
E 1101-3
Copyright (c) 2010 KEYENCE CORPORATION. All rights reserved. 11192E 1116-6 96M11193 Printed in Japan

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Corrective action for noise

2 - High-speed 2D Measurement Sensor Users' Manual -

For Optimal Performance of the TM-3000 Series

Influence of ambient temperature

Operating ambient light intensity level

Influence of dust or dirt

Effect of atmospheric motions

- High-speed 2D Measurement Sensor Users' Manual - 3

4 - High-speed 2D Measurement Sensor Users' Manual -

Safety Precautions .................................................1 Chapter 3 Operations and Functions

- High-speed 2D Measurement Sensor Users' Manual - 5

6 - High-speed 2D Measurement Sensor Users' Manual -

Chapter 10 Timing Chart and Response Memory Structure............................................... A-2

- High-speed 2D Measurement Sensor Users' Manual - 7

8 - High-speed 2D Measurement Sensor Users' Manual -

System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

- High-speed 2D Measurement Sensor Users' Manual - 1-1

Following is the standard system example for the TM-3000 Series.

Indicator light, buzzer, etc. Photoelectric sensor, proximity sensor, etc.

Memory cards Setup support software*

Recorder Programmable controller P.C. (Commercial product)

1-2 - High-speed 2D Measurement Sensor Users' Manual -

Checking the Package Contents

Controller Console x 1 User's manual Screwdriver x1 Setup/support software

Head (TM-006 / TM-040 / TM-065)

Hexagon socket bolt

* The sensor head consists of the transmitter, receiver and TR base.

Model CB-A07 0.7m cable

- High-speed 2D Measurement Sensor Users' Manual - 1-3

List of Optional Products

Name Model Figure Description

Monitor cable OP-66842 Cable (3m) that connects the TM-3000

RS-232C cable OP-96368 Communication cable for RS-232C (2.5m).

Use in combination with OP-96368.

USB cable OP-66844 USB connection cable

1-4 - High-speed 2D Measurement Sensor Users' Manual -

Protective cover OP-87035 Protective cover for TM-040.

OP-87036 Protective cover for TM-065.

Transmitter-to-receiver cable OP-87033 Extension cable used between the

Console OP-82125 The same console as the supplied one.

Ethernet cable OP-66843 Cross cable (3m) for Ethernet communication

- High-speed 2D Measurement Sensor Users' Manual - 1-5

Part Names and Functions

1-6 - High-speed 2D Measurement Sensor Users' Manual -

- High-speed 2D Measurement Sensor Users' Manual - 1-7

Name Status Function

1-8 - High-speed 2D Measurement Sensor Users' Manual -

- High-speed 2D Measurement Sensor Users' Manual - 1-9

1-10 - High-speed 2D Measurement Sensor Users' Manual -

<Measurement setting example>

Y axis (Positive direction)

X axis (Positive direction)

- High-speed 2D Measurement Sensor Users' Manual - 1-11

1-12 - High-speed 2D Measurement Sensor Users' Manual -

Installation and Wiring

- High-speed 2D Measurement Sensor Users' Manual - 1-13

 Not using the TR base to install

• To tighten screws from above

2 Install the sensor heads.

1-14 - High-speed 2D Measurement Sensor Users' Manual -

Checking the Package Contents

M3 x 12 Hexagon socket bolt x8

Not using the TR base to install

OP-87036 (for TM-065)